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A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

Weiwei SHAN, Xin CHEN

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Weiwei SHAN
National ASIC System Engineering Research Center, Southeast University
Xin CHEN
Nanjing university of aeronautics & astronautics

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Keywords:MEMS micro-mirror,electrostatic actuation,closed-loop control

JOURNALRESTRICTED ACCESS

2011 Volume E94.CIssue 9Pages 1486-1489

DOIhttps://doi.org/10.1587/transele.E94.C.1486

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Published: September 01, 2011Received: March 23, 2011Available on J-STAGE: September 01, 2011Accepted: -Advance online publication: -Revised: -

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Abstract

In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.

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