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A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage

Kazuhiro Takahashi, Ho Nam Kwon, Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi

Author information

Kazuhiro Takahashi
Institute of Industrial Science, University of Tokyo
Kanagawa Academy of Science and Technology
Ho Nam Kwon
Institute of Industrial Science, University of Tokyo
Gwangju Institute of Science and Technology
Kunihiko Saruta
Institute of Industrial Science, University of Tokyo
Currently with SONY Corp.
Makoto Mita
Japan Aerospace Exploration Agency
Hiroyuki Fujita
Institute of Industrial Science, University of Tokyo
Hiroshi Toshiyoshi
Institute of Industrial Science, University of Tokyo
Kanagawa Academy of Science and Technology

Corresponding author

Keywords:MEMS,2D optical scanner,micro lens,electrostatic micro actuator,double gimbal XY-stage

JOURNALFREE ACCESS

2005 Volume 2Issue 21Pages 542-547

DOIhttps://doi.org/10.1587/elex.2.542

Details

Published: 2005Received: September 20, 2005Available on J-STAGE: November 10, 2005Accepted: October 19, 2005Advance online publication: -Revised: -

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Article overview

Abstract

We report the design, fabrication and electromechanical performance of a newly developed micro electromechanical XY-scanner for micro-optical spatial light modulation using the silicon micromachining technology. A two-dimensional stage is integrated with a silicon micro lens to scan a transmitting infrared light of 1.55-micron-wavelength by the mechanism of the ƒ-θ lens scanner. Mechanical displacement of up to ± 10 microns (optical angle of ± 0.57 degrees) was obtained with a drive voltage of 30V; optical simulation has suggested that the scanner can be used to construct a free-space optical crossconnect of 9-input by 9-output port counts.

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