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DUV
Latest about DUV

U.S. lawmakers demand sales ban on chipmaking tools to China
ByAnton Shilovpublished
Bipartisan group of lawmakers want the U.S. government to impose export controls on all wafer fab equipment bound to China except those that can be made locally and make allies do the following.

Chinese fabs are reportedly upgrading older ASML DUV lithography chipmaking machines
ByLuke Jamespublished
PremiumChinese fabs are quietly extending the useful life and performance of older ASML deep ultraviolet lithography systems by upgrading key subsystems, as Beijing pushes to sustain advanced chip output.

New 1.4nm nanoimprint lithography template could reduce the need for EUV steps in advanced process nodes
ByLuke Jamespublished
PremiumJapan’s Dai Nippon Printing (DNP) claims to have developed a nanoimprint lithography template capable of patterning logic with a feature size of 1.4nm, with plans for mass production in 2027.

Chinese scientists discover method to cut defects by 99% with DUV chipmaking equipment
ByAnton Shilovpublished
PremiumBut chipmakers already know this empirically.

European think tank considers punitive DUV machine export ban following China's latest round of rare earth export controls
ByLuke Jameslast updated
PremiumThink tank suggests tighter semiconductor controls amid rare earth tensions.

China bets on DUV as EUV blockade reshapes chipmaking — but it won't dethrone ASML's advanced lithography, for now
ByLuke Jamespublished
PremiumWith EUV locked out by sanctions, China is leaning on DUV multi-patterning and fledgling domestic scanners.

China's SiCarrier challenges U.S. and EU with full-spectrum of chipmaking equipment
ByAnton Shilovpublished
Huawei-linked Chinese startup has developed a nearly complete suite of semiconductor manufacturing tools to enable fully domestic chip production amid escalating export controls.

Chinese scientists create 'breakthrough' solid-state DUV laser light source for chipmaking tools
ByAnton Shilovpublished
The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from commercialization.
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