An iterative method for reference pattern selection in high-resolution electron backscatter diffraction (HR-EBSD)
- PMID:36871367
- DOI: 10.1016/j.ultramic.2023.113705
An iterative method for reference pattern selection in high-resolution electron backscatter diffraction (HR-EBSD)
Abstract
For high (angular) resolution electron backscatter diffraction (HR-EBSD), the selection of a reference diffraction pattern (EBSP0) significantly affects the precision of the calculated strain and rotation maps. This effect was demonstrated in plastically deformed body-centred cubic and face-centred cubic ductile metals (ferrite and austenite grains in duplex stainless steel) and brittle single-crystal silicon, which showed that the effect is not only limited to measurement magnitude but also spatial distribution. An empirical relationship was then identified between the cross-correlation parameter and angular error, which was used in an iterative algorithm to identify the optimal reference pattern that maximises the precision of HR-EBSD.
Keywords: EBSD; Electron microscopy; HR-EBSD; Strain measurement.
Copyright © 2023 The Author(s). Published by Elsevier B.V. All rights reserved.
Conflict of interest statement
Declaration of Competing Interest The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
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