Movatterモバイル変換


[0]ホーム

URL:


Washo, 1976 - Google Patents

Surface Property Characterization of Plasma-Polymerized Tetraf luoroethylene Deposits

Washo, 1976

Document ID
6292703902113722375
Author
Washo B
Publication year
Publication venue
Journal of Macromolecular Science—Chemistry

External Links

Snippet

Plasma-polymerized tetrafluoroethylene (PPTFE) deposits were characterized by contact angle measurements and critical surface tension γCmeasurements. The measurements showed surface property changes of the deposits as a function of time and treatments …
Continue reading atwww.tandfonline.com (other versions)

Classifications

The classifications are assigned by a computer and are not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the classifications listed.
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12Chemical modification
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/06Coating with compositions not containing macromolecular substances
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/047Coating with only one layer of a composition containing a polymer binder
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers

Similar Documents

PublicationPublication DateTitle
ShiRecent advances in polymer thin films prepared by plasma polymerization synthesis, structural characterization, properties and applications
KimSurface modification of poly (tetrafluoroethylene) film by chemical etching, plasma, and ion beam treatments
Schreiber et al.Corrosion protection by plasma-polymerized coatings
Kim et al.Adhesion and interface studies between copper and polyimide
Siperko et al.Chemical and physical modification of fluoropolymer surfaces for adhesion enhancement: A review
Strobel et al.Plasma fluorination of polyolefins
PedersonStructural composition of polymers relative to their plasma etch characteristics
Strobel et al.Surface modification of polypropylene with CF4, CF3H, CF3Cl, and CF3Br plasmas
Gengenbach et al.Compositional changes in plasma‐deposited fluorocarbon films during ageing
Anderson Jr et al.Electron donor–acceptor properties of thin polymer films on silicon. II. Tetrafluoroethylene polymerized by RF glow discharge techniques
Lopez et al.Substrate temperature effects on film chemistry in plasma deposition of organics. I. Nonpolymerizable precursors
EP0004555A2 (en)Electron sensitive resin containing a metallic methacrylate salt and its application in electron-beam lithography
WashoSurface Property Characterization of Plasma-Polymerized Tetraf luoroethylene Deposits
Flamm et al.Etching and film formation in CF3Br plasmas: some qualitative observations and their general implications
US4690838A (en)Process for enhancing the resistance of a resist image to reactive ion etching and to thermal flow
BE1023839B1 (en) Coating
Cruden et al.Thermal decomposition of low dielectric constant pulsed plasma fluorocarbon films: I. effect of precursors and substrate temperature
Brannon et al.Ultraviolet photoablation of a plasma-synthesized fluorocarbon polymer
SoveyIon beam sputtering of fluoropolymers
US4269896A (en)Surface passivated alkali halide infrared windows
Joubert et al.Etching of polymers by oxygen plasmas: Influence of viscoelastic properties
Weber et al.Electrical and optical properties of amorphous fluorocarbon films prepared by plasma polymerization of perfluoro-1, 3-dimethylcyclohexane
US20130280442A1 (en)Adhesion Promotion of Vapor Deposited Films
Kumagai et al.Poly (ethylene terephthalate) decomposition process in oxygen plasma; emission spectroscopic and surface analysis for oxygen–plasma reaction
Maggioni et al.Polyimide and platinum containing polyimide thin films obtained by vapour deposition polymerization; effects of thermal treatments

[8]
ページ先頭

©2009-2025 Movatter.jp