Movatterモバイル変換

[0]ホーム
URL:

Jerman, 1994 - Google Patents

Electrically activated normally closed diaphragm valves

Jerman, 1994

Document ID
3765614484051230253
Author
Jerman H
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

Thermal actuation of integrated valve structures is attractive due to the relative simplicity of the actuator design, the moderate activation time possible, the relatively low total power required, and the ability to fully integrate the actuator with the flow control component. Of the …
Continue reading atiopscience.iop.org (other versions)

Classifications

The classifications are assigned by a computer and are not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the classifications listed.
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Micro-valves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Micro-valves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezo-electric means
    • F16K31/005—Piezo-electric benders
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane

Similar Documents

PublicationPublication DateTitle
JermanElectrically activated normally closed diaphragm valves
JermanElectrically-activated, micromachined diaphragm valves
US7474180B2 (en)Single substrate electromagnetic actuator
US6062256A (en)Micro mass flow control apparatus and method
JP2807085B2 (en) Micro valve
Esashi et al.Normally closed microvalve and mircopump fabricated on a silicon wafer
Henning et al.Microfluidic MEMS for semiconductor processing
US5681024A (en)Microvalve
Böhm et al.A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
Wu et al.A solid hydraulically amplified piezoelectric microvalve
HenningMicrofluidic mems
US6003833A (en)Integrated micro pressure-resistant flow control module
Lisec et al.Thermally driven microvalve with buckling behaviour for pneumatic applications
Gradin et al.SMA microvalves for very large gas flow control manufactured using wafer-level eutectic bonding
Park et al.A piezoelectric microvalve for cryogenic applications
Luharuka et al.A bistable electromagnetically actuated rotary gate microvalve
US7789371B2 (en)Low-power piezoelectric micro-machined valve
Fazal et al.Design and analysis of a high pressure piezoelectric actuated microvalve
JP2002228033A (en)Separation type micro valve
Park et al.A microvalve with integrated sensors and customizable normal state for low-temperature operation
Schaible et al.Electrostatic microvalves in silicon with 2-way-function for industrial applications
Yang et al.A thermopneumatically actuated bistable microvalve
Collier et al.Development of a rapid-response flow-control system using MEMS microvalve arrays
Hesketh et al.Microvalve for fuel cells and miniature gas chromatographic system
McCarthy et al.Temperature-regulated nonlinear microvalves for self-adaptive MEMS cooling
[8]ページ先頭
©2009-2025 Movatter.jp