Dellmann et al., 2000
| Publication | Publication Date | Title |
|---|---|---|
| Judy | Microelectromechanical systems (MEMS): fabrication, design and applications | |
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| Elwenspoek | Some selected research item of the micro mechanics department at MESA | |
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| Khalid | Parylene based cantilevers for biosensing | |
| Töral | Development of a high yield fabrication process for MEMS based resonant mass sensors for cell detection applications | |
| Holmes | Microengineering: the next revolution? | |
| Folta | Micro-electro-mechanical systems projects at Lawrence Livermore National Laboratory | |
| Schabmuller | Microfluidic devices for intrigrated Bio/Chemical systems | |
| Sniegowski et al. | Micromachined actuator and sensor capabilities at the Microelectronics Development Laboratory | |
| Chronis | Lab-on-a-chip mechanical and optical components for the manipulation and detection of biological species |