WO1999012184A3 - Microwave power applicator for generating reactive chemical species from gaseous reagent species - Google Patents

Abstract

A plasma generating device including a microwave applicator for generating a microwave electric field in the plasma chamber, a plasma chamber for generation of plasma, gas sources for supplying a variety of gases to the plasma generating and reaction chambers, a reaction chamber having a support structure for supporting a substrate. The microwave applicator contains one or more individual microwave generating sources that provide microwave energy into the plasma chamber through a dielectric vacuum window via an array of radiating antenna structures. The use of an array of antennae creates a more uniform field over the substrate to be treated, thereby increasing the consistency of the coating on the substrate. An optional substrate heating system consisting of either an infrared illuminating system for radiating the substrate with thermal energy or a heated platen in contact with the substrate, and a metal grid disposed between the plasma and reaction chambers may also be used.