









| TABLE 1 |
| Comparison of Tantalum Product Thickness Change, Weight |
| Loss, and Pickling | ||
| Reduction in | Rate Corresponding | |
| Thickness | Weight Loss, % | Equivalent Pickling |
| or Diameter | 0.103- | 0.0284- | Rate, mg/(cm2-min, at |
| 0.44 | inch | inch | Indicated Pickling | |
| Inch | diam. | diam. | Time, min. |
| Mil | Micron | Square | wire | wire | 5 | 10 | 20 |
| 0.2 | 5.1 | 0.091 | 0.39 | 1.4 | 0.84 | 0.42 | 0.21 |
| 0.3 | 7.6 | 0.136 | 0.58 | 2.1 | 1.26 | 0.63 | 0.32 |
| 0.4 | 10.2 | 0.182 | 0.78 | 2.8 | 1.68 | 0.84 | 0.42 |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/081,321USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/081,321USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
| Publication Number | Publication Date |
|---|---|
| USH2087H1true USH2087H1 (en) | 2003-11-04 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/081,321AbandonedUSH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
| Country | Link |
|---|---|
| US (1) | USH2087H1 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050089699A1 (en)* | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
| WO2005068681A3 (en)* | 2003-12-19 | 2005-09-15 | Applied Materials Inc | Cleaning tantalum-containing deposits from process chamber components |
| US20060105182A1 (en)* | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
| US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
| US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
| US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
| US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5164016A (en)* | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
| US5215624A (en)* | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
| US5248386A (en)* | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
| US5338367A (en)* | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
| US5354383A (en)* | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
| US5690748A (en)* | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
| US5843240A (en)* | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| US5908511A (en)* | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5338367A (en)* | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
| US5164016A (en)* | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
| US5215624A (en)* | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
| US5248386A (en)* | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
| US5690748A (en)* | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
| US5354383A (en)* | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
| US5908511A (en)* | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| US5843240A (en)* | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
| US9068273B2 (en) | 2002-11-25 | 2015-06-30 | Quantum Global Technologies LLC | Electrochemical removal of tantalum-containing materials |
| US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
| US7910218B2 (en) | 2003-10-22 | 2011-03-22 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| US20050089699A1 (en)* | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| WO2005068681A3 (en)* | 2003-12-19 | 2005-09-15 | Applied Materials Inc | Cleaning tantalum-containing deposits from process chamber components |
| US20060105182A1 (en)* | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
| US8021743B2 (en) | 2004-11-24 | 2011-09-20 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US20100086805A1 (en)* | 2004-11-24 | 2010-04-08 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
| US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
| US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
| US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
| US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
| US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
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