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USD979524S1 - Confinement liner for a substrate processing chamber - Google Patents

Confinement liner for a substrate processing chamber
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Publication number
USD979524S1
USD979524S1US29/728,614US202029728614FUSD979524SUS D979524 S1USD979524 S1US D979524S1US 202029728614 FUS202029728614 FUS 202029728614FUS D979524 SUSD979524 SUS D979524S
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US
United States
Prior art keywords
processing chamber
substrate processing
confinement
liner
confinement liner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/728,614
Inventor
Joseph Perry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials IncfiledCriticalApplied Materials Inc
Priority to US29/728,614priorityCriticalpatent/USD979524S1/en
Assigned to APPLIED MATERIALS, INC.reassignmentAPPLIED MATERIALS, INC.ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: PERRY, JOSEPH
Priority to TW109305178D01Fprioritypatent/TWD215698S/en
Priority to TW109305178Fprioritypatent/TWD215697S/en
Priority to JPD2021-5063Fprioritypatent/JP1692414S/ja
Priority to JPD2020-20094Fprioritypatent/JP1686347S/ja
Priority to US29/882,671prioritypatent/USD1051867S1/en
Application grantedgrantedCritical
Publication of USD979524S1publicationCriticalpatent/USD979524S1/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

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FIG.1 is a top isometric view of a confinement liner for a substrate processing chamber showing my new design;
FIG.2 is a top plan view thereof;
FIG.3 is a bottom plan view thereof;
FIG.4 is a front elevation view thereof;
FIG.5 is a rear elevation view thereof;
FIG.6 is a left side elevation view thereof;
FIG.7 is a right side elevation view thereof; and,
FIG.8 is an enlarged cross sectional view taken along line8-8 ofFIG.2.
The broken lines shown in the drawings represent portions of a confinement liner for a substrate processing chamber that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a confinement liner for a substrate processing chamber, as shown and described.
US29/728,6142020-03-192020-03-19Confinement liner for a substrate processing chamberActiveUSD979524S1 (en)

Priority Applications (6)

Application NumberPriority DateFiling DateTitle
US29/728,614USD979524S1 (en)2020-03-192020-03-19Confinement liner for a substrate processing chamber
TW109305178D01FTWD215698S (en)2020-03-192020-09-15Confinement liner for a substrate processing chamber
TW109305178FTWD215697S (en)2020-03-192020-09-15Confinement liner for a substrate processing chamber
JPD2021-5063FJP1692414S (en)2020-03-192020-09-19
JPD2020-20094FJP1686347S (en)2020-03-192020-09-19
US29/882,671USD1051867S1 (en)2020-03-192023-01-17Confinement liner for a substrate processing chamber

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
US29/728,614USD979524S1 (en)2020-03-192020-03-19Confinement liner for a substrate processing chamber

Related Child Applications (1)

Application NumberTitlePriority DateFiling Date
US29/882,671DivisionUSD1051867S1 (en)2020-03-192023-01-17Confinement liner for a substrate processing chamber

Publications (1)

Publication NumberPublication Date
USD979524S1true USD979524S1 (en)2023-02-28

Family

ID=76083950

Family Applications (2)

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US29/728,614ActiveUSD979524S1 (en)2020-03-192020-03-19Confinement liner for a substrate processing chamber
US29/882,671ActiveUSD1051867S1 (en)2020-03-192023-01-17Confinement liner for a substrate processing chamber

Family Applications After (1)

Application NumberTitlePriority DateFiling Date
US29/882,671ActiveUSD1051867S1 (en)2020-03-192023-01-17Confinement liner for a substrate processing chamber

Country Status (3)

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US (2)USD979524S1 (en)
JP (2)JP1686347S (en)
TW (2)TWD215697S (en)

Cited By (8)

* Cited by examiner, † Cited by third party
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USD1034493S1 (en)*2022-11-252024-07-09Ap Systems Inc.Chamber wall liner for a semiconductor manufacturing apparatus
USD1049067S1 (en)*2022-04-042024-10-29Applied Materials, Inc.Ring for an anti-rotation process kit for a substrate processing chamber
USD1051867S1 (en)*2020-03-192024-11-19Applied Materials, Inc.Confinement liner for a substrate processing chamber
USD1066275S1 (en)2022-04-042025-03-11Applied Materials, Inc.Baffle for anti-rotation process kit for substrate processing chamber
USD1066440S1 (en)*2022-10-282025-03-11Applied Materials, Inc.Process chamber pumping liner
USD1071886S1 (en)*2022-01-202025-04-22Applied Materials, Inc.Substrate support for a substrate processing chamber
USD1073758S1 (en)*2022-10-132025-05-06Lam Research CorporationBaffle for substrate processing system
USD1086087S1 (en)*2023-03-302025-07-29Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring

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USD1071103S1 (en)*2022-04-112025-04-15Applied Materials, Inc.Gas distribution plate
JP2025521046A (en)2022-07-082025-07-04トーソー エスエムディー,インク. Dynamic Vacuum Seal System for Physical Vapor Deposition Sputtering Applications
TWD233706S (en)2023-10-272024-09-21俊龍 吳 Nozzle pad

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Cited By (8)

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Publication numberPriority datePublication dateAssigneeTitle
USD1051867S1 (en)*2020-03-192024-11-19Applied Materials, Inc.Confinement liner for a substrate processing chamber
USD1071886S1 (en)*2022-01-202025-04-22Applied Materials, Inc.Substrate support for a substrate processing chamber
USD1049067S1 (en)*2022-04-042024-10-29Applied Materials, Inc.Ring for an anti-rotation process kit for a substrate processing chamber
USD1066275S1 (en)2022-04-042025-03-11Applied Materials, Inc.Baffle for anti-rotation process kit for substrate processing chamber
USD1073758S1 (en)*2022-10-132025-05-06Lam Research CorporationBaffle for substrate processing system
USD1066440S1 (en)*2022-10-282025-03-11Applied Materials, Inc.Process chamber pumping liner
USD1034493S1 (en)*2022-11-252024-07-09Ap Systems Inc.Chamber wall liner for a semiconductor manufacturing apparatus
USD1086087S1 (en)*2023-03-302025-07-29Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring

Also Published As

Publication numberPublication date
JP1692414S (en)2021-08-16
TWD215698S (en)2021-12-01
USD1051867S1 (en)2024-11-19
TWD215697S (en)2021-12-01
JP1686347S (en)2021-05-31

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