





| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/728,614USD979524S1 (en) | 2020-03-19 | 2020-03-19 | Confinement liner for a substrate processing chamber |
| TW109305178D01FTWD215698S (en) | 2020-03-19 | 2020-09-15 | Confinement liner for a substrate processing chamber |
| TW109305178FTWD215697S (en) | 2020-03-19 | 2020-09-15 | Confinement liner for a substrate processing chamber |
| JPD2021-5063FJP1692414S (en) | 2020-03-19 | 2020-09-19 | |
| JPD2020-20094FJP1686347S (en) | 2020-03-19 | 2020-09-19 | |
| US29/882,671USD1051867S1 (en) | 2020-03-19 | 2023-01-17 | Confinement liner for a substrate processing chamber |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/728,614USD979524S1 (en) | 2020-03-19 | 2020-03-19 | Confinement liner for a substrate processing chamber |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/882,671DivisionUSD1051867S1 (en) | 2020-03-19 | 2023-01-17 | Confinement liner for a substrate processing chamber |
| Publication Number | Publication Date |
|---|---|
| USD979524S1true USD979524S1 (en) | 2023-02-28 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/728,614ActiveUSD979524S1 (en) | 2020-03-19 | 2020-03-19 | Confinement liner for a substrate processing chamber |
| US29/882,671ActiveUSD1051867S1 (en) | 2020-03-19 | 2023-01-17 | Confinement liner for a substrate processing chamber |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/882,671ActiveUSD1051867S1 (en) | 2020-03-19 | 2023-01-17 | Confinement liner for a substrate processing chamber |
| Country | Link |
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| US (2) | USD979524S1 (en) |
| JP (2) | JP1686347S (en) |
| TW (2) | TWD215697S (en) |
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| US6224472B1 (en)* | 1999-06-24 | 2001-05-01 | Samsung Austin Semiconductor, L.P. | Retaining ring for chemical mechanical polishing |
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| US20080110567A1 (en) | 2006-11-15 | 2008-05-15 | Miller Matthew L | Plasma confinement baffle and flow equalizer for enhanced magnetic control of plasma radial distribution |
| US8622021B2 (en) | 2007-10-31 | 2014-01-07 | Lam Research Corporation | High lifetime consumable silicon nitride-silicon dioxide plasma processing components |
| US20100304571A1 (en) | 2007-12-19 | 2010-12-02 | Larson Dean J | Film adhesive for semiconductor vacuum processing apparatus |
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| US20110100553A1 (en) | 2009-08-31 | 2011-05-05 | Rajinder Dhindsa | multi-peripheral ring arrangement for performing plasma confinement |
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| US20110226739A1 (en) | 2010-03-19 | 2011-09-22 | Varian Semiconductor Equipment Associates, Inc. | Process chamber liner with apertures for particle containment |
| US8485128B2 (en) | 2010-06-30 | 2013-07-16 | Lam Research Corporation | Movable ground ring for a plasma processing chamber |
| US8826855B2 (en) | 2010-06-30 | 2014-09-09 | Lam Research Corporation | C-shaped confinement ring for a plasma processing chamber |
| US20120273130A1 (en) | 2011-04-28 | 2012-11-01 | Lam Research Corporation | Internal Faraday Shield Having Distributed Chevron Patterns and Correlated Positioning Relative to External Inner and Outer TCP Coil |
| USD699200S1 (en)* | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
| USD709536S1 (en)* | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709537S1 (en)* | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709539S1 (en)* | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| USD709538S1 (en)* | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
| US9508530B2 (en) | 2011-11-21 | 2016-11-29 | Lam Research Corporation | Plasma processing chamber with flexible symmetric RF return strap |
| US20140113453A1 (en) | 2012-10-24 | 2014-04-24 | Lam Research Corporation | Tungsten carbide coated metal component of a plasma reactor chamber and method of coating |
| US20140116338A1 (en) | 2012-10-29 | 2014-05-01 | Advanced Micro-Fabrication Equipment Inc, Shanghai | Coating for performance enhancement of semiconductor apparatus |
| US8893702B2 (en) | 2013-02-20 | 2014-11-25 | Lam Research Corporation | Ductile mode machining methods for hard and brittle components of plasma processing apparatuses |
| US20160002788A1 (en)* | 2013-02-21 | 2016-01-07 | Altatech Semiconductor | Chemical vapour deposition device |
| USD793976S1 (en)* | 2013-05-15 | 2017-08-08 | Ebara Corporation | Substrate retaining ring |
| USD766849S1 (en)* | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
| USD729730S1 (en)* | 2013-06-06 | 2015-05-19 | Jon Simon Gillespie-Brown | Power charging ring |
| US20160158910A1 (en)* | 2013-07-11 | 2016-06-09 | Will Be S & T Co., Ltd. | Retainer ring for chemical-mechanical polishing device |
| US9123661B2 (en) | 2013-08-07 | 2015-09-01 | Lam Research Corporation | Silicon containing confinement ring for plasma processing apparatus and method of forming thereof |
| US20150364322A1 (en) | 2013-08-07 | 2015-12-17 | Lam Research Corporation | Silicon containing confinement ring for plasma processing apparatus and method of forming thereof |
| US9330927B2 (en) | 2013-08-28 | 2016-05-03 | Lam Research Corporation | System, method and apparatus for generating pressure pulses in small volume confined process reactor |
| US9184029B2 (en) | 2013-09-03 | 2015-11-10 | Lam Research Corporation | System, method and apparatus for coordinating pressure pulses and RF modulation in a small volume confined process reactor |
| US20150329955A1 (en) | 2014-05-16 | 2015-11-19 | Applied Materials, Inc. | Plasma spray coating design using phase and stress control |
| USD770992S1 (en)* | 2015-06-12 | 2016-11-08 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
| CN106898534A (en) | 2015-12-21 | 2017-06-27 | 中微半导体设备(上海)有限公司 | Plasma confinement ring, plasma processing apparatus and processing method for substrate |
| USD810705S1 (en)* | 2016-04-01 | 2018-02-20 | Veeco Instruments Inc. | Self-centering wafer carrier for chemical vapor deposition |
| USD797691S1 (en)* | 2016-04-14 | 2017-09-19 | Applied Materials, Inc. | Composite edge ring |
| US20180061618A1 (en) | 2016-08-26 | 2018-03-01 | Applied Materials, Inc. | Plasma screen for plasma processing chamber |
| US10672629B2 (en)* | 2016-09-28 | 2020-06-02 | Samsung Electronics Co., Ltd. | Ring assembly and chuck assembly having the same |
| USD840364S1 (en)* | 2017-01-31 | 2019-02-12 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
| USD876504S1 (en)* | 2017-04-03 | 2020-02-25 | Asm Ip Holding B.V. | Exhaust flow control ring for semiconductor deposition apparatus |
| USD895777S1 (en)* | 2017-09-20 | 2020-09-08 | Gardner Denver Petroleum Pumps Llc | Header ring |
| TWD197827S (en) | 2017-12-19 | 2019-06-01 | Ebara Corp | Elastic film for semiconductor wafer polishing |
| USD891382S1 (en)* | 2019-02-08 | 2020-07-28 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
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| USD1051867S1 (en)* | 2020-03-19 | 2024-11-19 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
| USD1071886S1 (en)* | 2022-01-20 | 2025-04-22 | Applied Materials, Inc. | Substrate support for a substrate processing chamber |
| USD1049067S1 (en)* | 2022-04-04 | 2024-10-29 | Applied Materials, Inc. | Ring for an anti-rotation process kit for a substrate processing chamber |
| USD1066275S1 (en) | 2022-04-04 | 2025-03-11 | Applied Materials, Inc. | Baffle for anti-rotation process kit for substrate processing chamber |
| USD1073758S1 (en)* | 2022-10-13 | 2025-05-06 | Lam Research Corporation | Baffle for substrate processing system |
| USD1066440S1 (en)* | 2022-10-28 | 2025-03-11 | Applied Materials, Inc. | Process chamber pumping liner |
| USD1034493S1 (en)* | 2022-11-25 | 2024-07-09 | Ap Systems Inc. | Chamber wall liner for a semiconductor manufacturing apparatus |
| USD1086087S1 (en)* | 2023-03-30 | 2025-07-29 | Samsung Electronics Co., Ltd. | CMP (chemical mechanical planarization) retaining ring |
| Publication number | Publication date |
|---|---|
| JP1692414S (en) | 2021-08-16 |
| TWD215698S (en) | 2021-12-01 |
| USD1051867S1 (en) | 2024-11-19 |
| TWD215697S (en) | 2021-12-01 |
| JP1686347S (en) | 2021-05-31 |
| Publication | Publication Date | Title |
|---|---|---|
| USD979524S1 (en) | Confinement liner for a substrate processing chamber | |
| USD1087371S1 (en) | Mask | |
| USD986190S1 (en) | Confinement plate for a substrate processing chamber | |
| USRE50390E1 (en) | Keyboard | |
| USD955083S1 (en) | Cart | |
| USD1011346S1 (en) | Keyboard | |
| USD965592S1 (en) | Keyboard | |
| USD1042924S1 (en) | Light | |
| USD960631S1 (en) | Cooking tray | |
| USD960303S1 (en) | Showerhead | |
| USD1038592S1 (en) | Shoe | |
| USD961592S1 (en) | Keyboard | |
| USD1002616S1 (en) | Keyboard | |
| USD1029985S1 (en) | Substrate | |
| USD1070325S1 (en) | Footwear | |
| USD967334S1 (en) | Showerhead | |
| USD1070821S1 (en) | Earphone | |
| USD1052865S1 (en) | Shoe | |
| USD997772S1 (en) | Jewelry | |
| USD1025064S1 (en) | Keyboard | |
| USD1052548S1 (en) | Gas diffuser | |
| USD1056793S1 (en) | Tailcap assembly | |
| USD980953S1 (en) | Faucet | |
| USD960318S1 (en) | Showerhead | |
| USD1028701S1 (en) | Nut |
| Date | Code | Title | Description |
|---|---|---|---|
| FEPP | Fee payment procedure | Free format text:ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |