USD969980S1 - Deposition chamber showerhead - Google Patents

Description

FIG. 1 is an isometric top side view of a deposition chamber showerhead for a substrate processing system.

FIG. 2 is an isometric bottom side view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a first side view thereof taken along line5-5 ofFIG. 3.

FIG. 6 is a second side view thereof taken along line6-6 ofFIG. 3.

FIG. 7 is a third side view thereof taken along line7-7 ofFIG. 3.

FIG. 8 is a fourth side view thereof taken along line8-8 ofFIG. 3.

FIG. 9 is a fifth side view thereof taken along line9-9 ofFIG. 1.

FIG. 10 is another front isometric top view thereof assembled with three additional deposition chamber showerheads.

FIG. 11 is another top plan view thereof assembled with the three additional deposition chamber showerheads.

FIG. 12 is another side isometric bottom view thereof assembled with three additional deposition chamber showerheads; and,

FIG. 13 is another bottom plan view thereof assembled with the three additional deposition chamber showerheads.

The broken lines shown inFIGS. 10-13 show an environment in which the deposition chamber showerhead can be positioned that forms no part of the claimed design. All other broken lines shown inFIGS. 1-13 illustrate portions of the deposition chamber showerhead that form no part of the claimed design.

Claims (1)

CLAIM
1. The ornamental design for a deposition chamber showerhead, as shown and described.

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