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USD871608S1 - Gas ring for a plasma processing apparatus - Google Patents

Gas ring for a plasma processing apparatus
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Publication number
USD871608S1
USD871608S1US29/635,289US201829635289FUSD871608SUS D871608 S1USD871608 S1US D871608S1US 201829635289 FUS201829635289 FUS 201829635289FUS D871608 SUSD871608 SUS D871608S
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US
United States
Prior art keywords
processing apparatus
plasma processing
gas ring
view
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/635,289
Inventor
Kouji Okuda
Motohiro Tanaka
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Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies CorpfiledCriticalHitachi High Technologies Corp
Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATIONreassignmentHITACHI HIGH-TECHNOLOGIES CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: OKUDA, KOUJI, TANAKA, MOTOHIRO
Application grantedgrantedCritical
Publication of USD871608S1publicationCriticalpatent/USD871608S1/en
Assigned to HITACHI HIGH-TECH CORPORATIONreassignmentHITACHI HIGH-TECH CORPORATIONCHANGE OF NAME AND ADDRESSAssignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
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Description

This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/635,287, filed herewith and entitled “Electrode Plate for a Plasma Processing Apparatus”;
Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”; and
Application Ser. No. 29/635,296, filed herewith and entitled “Electrode Plate Peripheral Ring for a Plasma Processing Apparatus”.
FIG. 1 is a front and bottom perspective view of a gas ring for a plasma processing apparatus according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is a cross-sectional view taken along line8-8 ofFIG. 2; and,
FIG. 9 is an enlarged view of the portion shown inBOX9 inFIG. 8.
The broken lines inFIG. 8 show the boundary of the enlarged portion illustrated inFIG. 9 and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gas ring for a plasma processing apparatus, as shown and described.
US29/635,2892017-07-312018-01-30Gas ring for a plasma processing apparatusActiveUSD871608S1 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JP2017-0164972017-02-01
JPD2017-16497FJP1598984S (en)2017-07-312017-07-31

Publications (1)

Publication NumberPublication Date
USD871608S1true USD871608S1 (en)2019-12-31

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ID=61274621

Family Applications (1)

Application NumberTitlePriority DateFiling Date
US29/635,289ActiveUSD871608S1 (en)2017-07-312018-01-30Gas ring for a plasma processing apparatus

Country Status (3)

CountryLink
US (1)USD871608S1 (en)
JP (1)JP1598984S (en)
TW (1)TWD193438S (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD889335S1 (en)*2018-10-032020-07-07Vaughn C JewellDisc
USD891636S1 (en)*2018-10-252020-07-28Hitachi High-Tech CorporationRing for a plasma processing apparatus
USD891923S1 (en)*2017-11-122020-08-04Yun LinContainer lid
USD917825S1 (en)*2019-07-162021-04-27Entegris, Inc.Wafer support ring
USD954986S1 (en)*2019-10-182022-06-14Hitachi High-Tech CorporationElectrode cover for a plasma processing device
USD974910S1 (en)*2020-02-042023-01-10Wilson Sporting Goods Co.Tennis ball container overcap
USD1042374S1 (en)2022-03-182024-09-17Applied Materials, Inc.Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en)2022-03-182024-09-17Applied Materials, Inc.Sliding ring for an interlocking process kit for a substrate processing chamber
USD1055006S1 (en)*2022-03-182024-12-24Applied Materials, Inc.Support ring for an interlocking process kit for a substrate processing chamber
USD1062662S1 (en)*2023-03-302025-02-18Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring
USD1063595S1 (en)*2023-03-302025-02-25Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring
US12293902B2 (en)2018-01-192025-05-06Applied Materials, Inc.Process kit for a substrate support
USD1079661S1 (en)*2023-08-312025-06-17Kokusai Electric CorporationSusceptor of semiconductor manufacturing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP2025521046A (en)2022-07-082025-07-04トーソー エスエムディー,インク. Dynamic Vacuum Seal System for Physical Vapor Deposition Sputtering Applications

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US5486975A (en)*1994-01-311996-01-23Applied Materials, Inc.Corrosion resistant electrostatic chuck
USD447223S1 (en)*1998-11-062001-08-28Lindab AbSealing rings for ventilation ducts
USD465061S1 (en)*2000-09-152002-10-29Spa Electrics Pty. Ltd.Sealing ring
US20040004327A1 (en)*2002-07-032004-01-08Veiga Jose Carlos C.Gasket seal for flanges of piping and equipment, a method for manufacturing gasket seals, and a sealing ring for a gasket seal
USD494552S1 (en)*2002-12-122004-08-17Tokyo Electron LimitedExhaust ring for manufacturing semiconductors
USD515675S1 (en)*2001-12-272006-02-21Flow International CorporationElement for a superpressure static fluid seal
US20070050901A1 (en)*2005-05-172007-03-08Den-Lu HungSealing ring structure of a sinkhole
USD574934S1 (en)*2007-07-172008-08-12S & B Technical Products, Inc.Pipe gasket
USD631142S1 (en)*2009-02-112011-01-18Kmt Waterjet Systems Inc.Inner packing element for a high pressure seal
US7885530B1 (en)*2008-07-232011-02-08Irving E. Bushnell, IIIManual focus driving ring
USD638550S1 (en)*2009-11-132011-05-243M Innovative Properties CompanySample processing disk cover
USD655401S1 (en)*2009-08-102012-03-06Nippon Valqua Industries, Ltd.Hybrid seal member
USD659175S1 (en)*2010-08-172012-05-08Ebara CorporationSealing ring
USD667561S1 (en)*2009-11-132012-09-183M Innovative Properties CompanySample processing disk cover
USD672050S1 (en)*2012-01-132012-12-04Samsung Electronics Co., Ltd.Disk for a medical testing machine
USD699200S1 (en)*2011-09-302014-02-11Tokyo Electron LimitedElectrode member for a plasma processing apparatus
US20140090554A1 (en)*2012-09-282014-04-03Air Products And Chemicals, Inc.Wear-Compensating Sealing Ring Assembly
USD730734S1 (en)*2013-07-102015-06-02Gino RappariniReinforcement ring for beverage capsule
USD743513S1 (en)*2014-06-132015-11-17Asm Ip Holding B.V.Seal ring
JP1545406S (en)2015-06-162016-03-14
USD793572S1 (en)*2015-06-102017-08-01Tokyo Electron LimitedElectrode plate for plasma processing apparatus
USD793976S1 (en)*2013-05-152017-08-08Ebara CorporationSubstrate retaining ring
USD810705S1 (en)*2016-04-012018-02-20Veeco Instruments Inc.Self-centering wafer carrier for chemical vapor deposition
USD811226S1 (en)*2013-10-312018-02-27Clariant Production (France) SasContainer

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* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US5174775A (en)*1991-10-231992-12-29Amp IncorporatedRF convertor and switch
US5486975A (en)*1994-01-311996-01-23Applied Materials, Inc.Corrosion resistant electrostatic chuck
USD447223S1 (en)*1998-11-062001-08-28Lindab AbSealing rings for ventilation ducts
USD465061S1 (en)*2000-09-152002-10-29Spa Electrics Pty. Ltd.Sealing ring
USD515675S1 (en)*2001-12-272006-02-21Flow International CorporationElement for a superpressure static fluid seal
US20040004327A1 (en)*2002-07-032004-01-08Veiga Jose Carlos C.Gasket seal for flanges of piping and equipment, a method for manufacturing gasket seals, and a sealing ring for a gasket seal
USD494552S1 (en)*2002-12-122004-08-17Tokyo Electron LimitedExhaust ring for manufacturing semiconductors
US20070050901A1 (en)*2005-05-172007-03-08Den-Lu HungSealing ring structure of a sinkhole
USD574934S1 (en)*2007-07-172008-08-12S & B Technical Products, Inc.Pipe gasket
US7885530B1 (en)*2008-07-232011-02-08Irving E. Bushnell, IIIManual focus driving ring
USD631142S1 (en)*2009-02-112011-01-18Kmt Waterjet Systems Inc.Inner packing element for a high pressure seal
USD655401S1 (en)*2009-08-102012-03-06Nippon Valqua Industries, Ltd.Hybrid seal member
USD667561S1 (en)*2009-11-132012-09-183M Innovative Properties CompanySample processing disk cover
USD638550S1 (en)*2009-11-132011-05-243M Innovative Properties CompanySample processing disk cover
USD659175S1 (en)*2010-08-172012-05-08Ebara CorporationSealing ring
USD699200S1 (en)*2011-09-302014-02-11Tokyo Electron LimitedElectrode member for a plasma processing apparatus
USD672050S1 (en)*2012-01-132012-12-04Samsung Electronics Co., Ltd.Disk for a medical testing machine
US20140090554A1 (en)*2012-09-282014-04-03Air Products And Chemicals, Inc.Wear-Compensating Sealing Ring Assembly
USD793976S1 (en)*2013-05-152017-08-08Ebara CorporationSubstrate retaining ring
USD730734S1 (en)*2013-07-102015-06-02Gino RappariniReinforcement ring for beverage capsule
USD811226S1 (en)*2013-10-312018-02-27Clariant Production (France) SasContainer
USD743513S1 (en)*2014-06-132015-11-17Asm Ip Holding B.V.Seal ring
USD793572S1 (en)*2015-06-102017-08-01Tokyo Electron LimitedElectrode plate for plasma processing apparatus
JP1545406S (en)2015-06-162016-03-14
USD810705S1 (en)*2016-04-012018-02-20Veeco Instruments Inc.Self-centering wafer carrier for chemical vapor deposition

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
Isozaki et al., Design U.S. Appl. No. 29/635,296, filed Jan. 30, 2018.
Metal Gaskets Manufacturer. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: https://www.jaydeepsteels.com/metal-gaskets/.*
S-SiC Mechanical Components. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: http://caecsic.com/S-SiC.html.*

Cited By (13)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD891923S1 (en)*2017-11-122020-08-04Yun LinContainer lid
US12293902B2 (en)2018-01-192025-05-06Applied Materials, Inc.Process kit for a substrate support
USD889335S1 (en)*2018-10-032020-07-07Vaughn C JewellDisc
USD891636S1 (en)*2018-10-252020-07-28Hitachi High-Tech CorporationRing for a plasma processing apparatus
USD917825S1 (en)*2019-07-162021-04-27Entegris, Inc.Wafer support ring
USD954986S1 (en)*2019-10-182022-06-14Hitachi High-Tech CorporationElectrode cover for a plasma processing device
USD974910S1 (en)*2020-02-042023-01-10Wilson Sporting Goods Co.Tennis ball container overcap
USD1042374S1 (en)2022-03-182024-09-17Applied Materials, Inc.Support pipe for an interlocking process kit for a substrate processing chamber
USD1055006S1 (en)*2022-03-182024-12-24Applied Materials, Inc.Support ring for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en)2022-03-182024-09-17Applied Materials, Inc.Sliding ring for an interlocking process kit for a substrate processing chamber
USD1062662S1 (en)*2023-03-302025-02-18Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring
USD1063595S1 (en)*2023-03-302025-02-25Samsung Electronics Co., Ltd.CMP (chemical mechanical planarization) retaining ring
USD1079661S1 (en)*2023-08-312025-06-17Kokusai Electric CorporationSusceptor of semiconductor manufacturing apparatus

Also Published As

Publication numberPublication date
TWD193438S (en)2018-10-11
JP1598984S (en)2018-03-05

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