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USD839224S1 - Elastic membrane for semiconductor wafer polishing - Google Patents

Elastic membrane for semiconductor wafer polishing
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Publication number
USD839224S1
USD839224S1US29/606,998US201729606998FUSD839224SUS D839224 S1USD839224 S1US D839224S1US 201729606998 FUS201729606998 FUS 201729606998FUS D839224 SUSD839224 SUS D839224S
Authority
US
United States
Prior art keywords
semiconductor wafer
elastic membrane
wafer polishing
view
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/606,998
Inventor
Satoru Yamaki
Makoto Fukushima
Keisuke Namiki
Osamu Nabeya
Shingo Togashi
Tomoko OWADA
Masahiko KISHIMOTO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JPD2016-26913Fexternal-prioritypatent/JP1582993S/ja
Priority claimed from JPD2016-26915Fexternal-prioritypatent/JP1582995S/ja
Priority claimed from JPD2016-26914Fexternal-prioritypatent/JP1582994S/ja
Application filed by Ebara CorpfiledCriticalEbara Corp
Assigned to EBARA CORPORATIONreassignmentEBARA CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: TOGASHI, SHINGO, YAMAKI, SATORU, FUKUSHIMA, MAKOTO, KISHIMOTO, MASAHIKO, NABEYA, OSAMU, NAMIKI, KEISUKE, OWADA, TOMOKO
Priority to US29/672,852priorityCriticalpatent/USD913977S1/en
Application grantedgrantedCritical
Publication of USD839224S1publicationCriticalpatent/USD839224S1/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

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Description

FIG. 1 is a bottom perspective view of an elastic membrane for semiconductor wafer polishing showing our new design;
FIG. 2 is a top perspective view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a top view thereof;
FIG. 5 is a front view thereof, a rear view being identical thereto;
FIG. 6 is a right-side view thereof, a left-side view being identical thereto;
FIG. 7 is a cross-sectional view taken along line7-7 ofFIG. 4; and,
FIG. 8 is an enlarged portion view labeledFIG. 8 inFIG. 7.
The dash-dot lines inFIG. 7 represent the boundary line of the enlarged portion view shown inFIG. 8.

Claims (1)

    CLAIM
  1. The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.
US29/606,9982016-12-122017-06-09Elastic membrane for semiconductor wafer polishingActiveUSD839224S1 (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
US29/672,852USD913977S1 (en)2016-12-122018-12-10Elastic membrane for semiconductor wafer polishing

Applications Claiming Priority (6)

Application NumberPriority DateFiling DateTitle
JP2016-0269142016-02-16
JP2016-0269152016-02-16
JPD2016-26913FJP1582993S (en)2016-12-122016-12-12
JPD2016-26915FJP1582995S (en)2016-12-122016-12-12
JP2016-0269132016-12-12
JPD2016-26914FJP1582994S (en)2016-12-122016-12-12

Related Child Applications (1)

Application NumberTitlePriority DateFiling Date
US29/672,852DivisionUSD913977S1 (en)2016-12-122018-12-10Elastic membrane for semiconductor wafer polishing

Publications (1)

Publication NumberPublication Date
USD839224S1true USD839224S1 (en)2019-01-29

Family

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US29/606,998ActiveUSD839224S1 (en)2016-12-122017-06-09Elastic membrane for semiconductor wafer polishing
US29/672,852ActiveUSD913977S1 (en)2016-12-122018-12-10Elastic membrane for semiconductor wafer polishing

Family Applications After (1)

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US29/672,852ActiveUSD913977S1 (en)2016-12-122018-12-10Elastic membrane for semiconductor wafer polishing

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD859331S1 (en)*2017-03-312019-09-10Ebara CorporationVacuum contact pad
USD859332S1 (en)*2017-06-292019-09-10Ebara CorporationElastic membrane for semiconductor wafer polishing
USD868124S1 (en)*2017-12-112019-11-26Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD869409S1 (en)*2016-09-302019-12-10Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD877101S1 (en)2018-03-092020-03-03Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD894137S1 (en)2017-10-052020-08-25Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD908645S1 (en)2019-08-262021-01-26Applied Materials, Inc.Sputtering target for a physical vapor deposition chamber
USD913230S1 (en)*2019-04-242021-03-16Tokyo Electron LimitedHeater for heating semiconductor wafer
USD913229S1 (en)*2019-04-242021-03-16Tokyo Electron LimitedHeater for heating semiconductor wafer
USD913977S1 (en)*2016-12-122021-03-23Ebara CorporationElastic membrane for semiconductor wafer polishing
USD918161S1 (en)*2017-12-192021-05-04Ebara CorporationElastic membrane
USD937329S1 (en)2020-03-232021-11-30Applied Materials, Inc.Sputter target for a physical vapor deposition chamber
USD940765S1 (en)2020-12-022022-01-11Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD954567S1 (en)*2019-06-252022-06-14Ebara CorporationMeasurement jig
USD981969S1 (en)*2020-12-182023-03-28Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD989012S1 (en)*2020-09-172023-06-13Ebara CorporationElastic membrane
USD1006768S1 (en)*2021-01-072023-12-05Solaero Technologies Corp.Semiconductor wafer for mosaic solar cell fabrication
USD1007449S1 (en)2021-05-072023-12-12Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD1053230S1 (en)2022-05-192024-12-03Applied Materials, Inc.Sputter target for a physical vapor deposition chamber
USD1072774S1 (en)2021-02-062025-04-29Applied Materials, Inc.Target profile for a physical vapor deposition chamber target

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD1061489S1 (en)*2023-01-272025-02-11All.Space Networks LimitedSatellite communication terminal

Citations (31)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD363464S (en)1992-08-271995-10-24Tokyo Electron Yamanashi LimitedElectrode for a semiconductor processing apparatus
USD411516S (en)1996-03-151999-06-29Tokyo Electron LimitedGas diffusion plate for electrode of semiconductor wafer processing apparatus
US6659850B2 (en)*2000-03-312003-12-09Speedfam-Ipec CorporationWork piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
USD546784S1 (en)2005-09-292007-07-17Tokyo Electron LimitedAttracting disc for an electrostatic chuck for semiconductor production
USD553104S1 (en)2004-04-212007-10-16Tokyo Electron LimitedAbsorption board for an electric chuck used in semiconductor manufacture
USD557226S1 (en)*2005-08-252007-12-11Hitachi High-Technologies CorporationElectrode cover for a plasma processing apparatus
USD559993S1 (en)*2005-03-302008-01-15Tokyo Electron LimitedCover ring
USD559994S1 (en)*2005-03-302008-01-15Tokyo Electron LimitedCover ring
US20090247057A1 (en)*2005-09-142009-10-01Ebara CorporationPolishing platen and polishing apparatus
USD633452S1 (en)*2009-08-272011-03-01Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD634719S1 (en)*2009-08-272011-03-22Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD649126S1 (en)*2008-10-202011-11-22Ebara CorporationVacuum contact pad
US8469776B2 (en)*2006-11-222013-06-25Applied Materials, Inc.Flexible membrane for carrier head
US20130316628A1 (en)*2012-05-232013-11-28Samsung Electronics Co., Ltd.Flexible membranes for a polishing head
USD709538S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
USD709539S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
USD709536S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
USD711330S1 (en)*2010-12-282014-08-19Ebara CorporationElastic membrane for semiconductor wafer polishing
US20140262193A1 (en)*2013-03-132014-09-18Techest Co., Ltd.Edge ring cooling module for semi-conductor manufacture chuck
US8859070B2 (en)*2011-11-302014-10-14Ebara CorporationElastic membrane
US20160002788A1 (en)*2013-02-212016-01-07Altatech SemiconductorChemical vapour deposition device
US9376752B2 (en)*2012-04-062016-06-28Applied Materials, Inc.Edge ring for a deposition chamber
USD767234S1 (en)*2015-03-022016-09-20Entegris, Inc.Wafer support ring
USD769200S1 (en)2013-05-152016-10-18Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD770992S1 (en)*2015-06-122016-11-08Hitachi High-Technologies CorporationElectrode cover for a plasma processing apparatus
USD770990S1 (en)2013-05-152016-11-08Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
US20170009367A1 (en)*2015-07-092017-01-12Applied Materials, Inc.Wafer electroplating chuck assembly
USD783922S1 (en)*2014-12-082017-04-11Entegris, Inc.Wafer support ring
USD797067S1 (en)*2015-04-212017-09-12Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD808349S1 (en)*2013-05-152018-01-23Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD810705S1 (en)*2016-04-012018-02-20Veeco Instruments Inc.Self-centering wafer carrier for chemical vapor deposition

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US6183354B1 (en)*1996-11-082001-02-06Applied Materials, Inc.Carrier head with a flexible membrane for a chemical mechanical polishing system
US20010029158A1 (en)*1998-07-302001-10-11Yoshitaka SasakiPolishing apparatus and polishing method, and method of manufacturing semiconductor device and method of manufacturing thin film magnetic head
JP3342686B2 (en)*1999-12-282002-11-11信越半導体株式会社 Wafer polishing method and wafer polishing apparatus
EP1177859B1 (en)*2000-07-312009-04-15Ebara CorporationSubstrate holding apparatus and substrate polishing apparatus
WO2003049168A1 (en)*2001-12-062003-06-12Ebara CorporationSubstrate holding device and polishing device
TWI289494B (en)*2002-01-222007-11-11Multi Planar Technologies IncChemical mechanical polishing apparatus and method having a retaining ring with a contoured surface for slurry distribution
TWI375294B (en)*2003-02-102012-10-21Ebara CorpElastic membrane
US7001245B2 (en)*2003-03-072006-02-21Applied Materials Inc.Substrate carrier with a textured membrane
US7033252B2 (en)*2004-03-052006-04-25StrasbaughWafer carrier with pressurized membrane and retaining ring actuator
CN100467210C (en)*2004-03-252009-03-11揖斐电株式会社 Vacuum Chucks and Suction Plates
US8083571B2 (en)*2004-11-012011-12-27Ebara CorporationPolishing apparatus
US7402098B2 (en)*2006-10-272008-07-22Novellus Systems, Inc.Carrier head for workpiece planarization/polishing
US7699688B2 (en)*2006-11-222010-04-20Applied Materials, Inc.Carrier ring for carrier head
KR101358645B1 (en)*2007-09-042014-02-05삼성전자주식회사carrier apparatus for polishing wafer and chemical mechanical polishing equipment used the same
JP5464820B2 (en)*2007-10-292014-04-09株式会社荏原製作所 Polishing equipment
JP5552401B2 (en)*2010-09-082014-07-16株式会社荏原製作所 Polishing apparatus and method
KR101196652B1 (en)*2011-05-312012-11-02주식회사 케이씨텍Membrane assembly in carrier head
USD839224S1 (en)*2016-12-122019-01-29Ebara CorporationElastic membrane for semiconductor wafer polishing
USD859331S1 (en)*2017-03-312019-09-10Ebara CorporationVacuum contact pad
USD859332S1 (en)*2017-06-292019-09-10Ebara CorporationElastic membrane for semiconductor wafer polishing

Patent Citations (32)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD363464S (en)1992-08-271995-10-24Tokyo Electron Yamanashi LimitedElectrode for a semiconductor processing apparatus
USD411516S (en)1996-03-151999-06-29Tokyo Electron LimitedGas diffusion plate for electrode of semiconductor wafer processing apparatus
US6659850B2 (en)*2000-03-312003-12-09Speedfam-Ipec CorporationWork piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
USD553104S1 (en)2004-04-212007-10-16Tokyo Electron LimitedAbsorption board for an electric chuck used in semiconductor manufacture
USD559993S1 (en)*2005-03-302008-01-15Tokyo Electron LimitedCover ring
USD559994S1 (en)*2005-03-302008-01-15Tokyo Electron LimitedCover ring
USD557226S1 (en)*2005-08-252007-12-11Hitachi High-Technologies CorporationElectrode cover for a plasma processing apparatus
US20090247057A1 (en)*2005-09-142009-10-01Ebara CorporationPolishing platen and polishing apparatus
USD546784S1 (en)2005-09-292007-07-17Tokyo Electron LimitedAttracting disc for an electrostatic chuck for semiconductor production
US8469776B2 (en)*2006-11-222013-06-25Applied Materials, Inc.Flexible membrane for carrier head
USD649126S1 (en)*2008-10-202011-11-22Ebara CorporationVacuum contact pad
USD633452S1 (en)*2009-08-272011-03-01Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD634719S1 (en)*2009-08-272011-03-22Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD729753S1 (en)*2010-12-282015-05-19Ebara CorporationElastic membrane for semiconductor wafer polishing
USD711330S1 (en)*2010-12-282014-08-19Ebara CorporationElastic membrane for semiconductor wafer polishing
USD709536S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
USD709539S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
USD709538S1 (en)*2011-09-302014-07-22Tokyo Electron LimitedFocusing ring
US8859070B2 (en)*2011-11-302014-10-14Ebara CorporationElastic membrane
US9376752B2 (en)*2012-04-062016-06-28Applied Materials, Inc.Edge ring for a deposition chamber
US20130316628A1 (en)*2012-05-232013-11-28Samsung Electronics Co., Ltd.Flexible membranes for a polishing head
US20160002788A1 (en)*2013-02-212016-01-07Altatech SemiconductorChemical vapour deposition device
US20140262193A1 (en)*2013-03-132014-09-18Techest Co., Ltd.Edge ring cooling module for semi-conductor manufacture chuck
USD769200S1 (en)2013-05-152016-10-18Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD770990S1 (en)2013-05-152016-11-08Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD808349S1 (en)*2013-05-152018-01-23Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD783922S1 (en)*2014-12-082017-04-11Entegris, Inc.Wafer support ring
USD767234S1 (en)*2015-03-022016-09-20Entegris, Inc.Wafer support ring
USD797067S1 (en)*2015-04-212017-09-12Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD770992S1 (en)*2015-06-122016-11-08Hitachi High-Technologies CorporationElectrode cover for a plasma processing apparatus
US20170009367A1 (en)*2015-07-092017-01-12Applied Materials, Inc.Wafer electroplating chuck assembly
USD810705S1 (en)*2016-04-012018-02-20Veeco Instruments Inc.Self-centering wafer carrier for chemical vapor deposition

Cited By (27)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD869409S1 (en)*2016-09-302019-12-10Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD913977S1 (en)*2016-12-122021-03-23Ebara CorporationElastic membrane for semiconductor wafer polishing
USD859331S1 (en)*2017-03-312019-09-10Ebara CorporationVacuum contact pad
USD859332S1 (en)*2017-06-292019-09-10Ebara CorporationElastic membrane for semiconductor wafer polishing
USD894137S1 (en)2017-10-052020-08-25Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD868124S1 (en)*2017-12-112019-11-26Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD946638S1 (en)2017-12-112022-03-22Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD918161S1 (en)*2017-12-192021-05-04Ebara CorporationElastic membrane
USD877101S1 (en)2018-03-092020-03-03Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD902165S1 (en)2018-03-092020-11-17Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD913229S1 (en)*2019-04-242021-03-16Tokyo Electron LimitedHeater for heating semiconductor wafer
USD913230S1 (en)*2019-04-242021-03-16Tokyo Electron LimitedHeater for heating semiconductor wafer
USD1035468S1 (en)2019-06-252024-07-16Ebara CorporationMeasurement jig
USD1034248S1 (en)2019-06-252024-07-09Ebara CorporationMeasurement jig
USD954567S1 (en)*2019-06-252022-06-14Ebara CorporationMeasurement jig
USD908645S1 (en)2019-08-262021-01-26Applied Materials, Inc.Sputtering target for a physical vapor deposition chamber
USD937329S1 (en)2020-03-232021-11-30Applied Materials, Inc.Sputter target for a physical vapor deposition chamber
USD970566S1 (en)2020-03-232022-11-22Applied Materials, Inc.Sputter target for a physical vapor deposition chamber
USD989012S1 (en)*2020-09-172023-06-13Ebara CorporationElastic membrane
USD1021832S1 (en)*2020-09-172024-04-09Ebara CorporationElastic membrane
USD966357S1 (en)2020-12-022022-10-11Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD940765S1 (en)2020-12-022022-01-11Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD981969S1 (en)*2020-12-182023-03-28Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD1006768S1 (en)*2021-01-072023-12-05Solaero Technologies Corp.Semiconductor wafer for mosaic solar cell fabrication
USD1072774S1 (en)2021-02-062025-04-29Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD1007449S1 (en)2021-05-072023-12-12Applied Materials, Inc.Target profile for a physical vapor deposition chamber target
USD1053230S1 (en)2022-05-192024-12-03Applied Materials, Inc.Sputter target for a physical vapor deposition chamber

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