Movatterモバイル変換


[0]ホーム

URL:


USD770990S1 - Elastic membrane for semiconductor wafer polishing apparatus - Google Patents

Elastic membrane for semiconductor wafer polishing apparatus
Download PDF

Info

Publication number
USD770990S1
USD770990S1US29/489,477US201429489477FUSD770990SUS D770990 S1USD770990 S1US D770990S1US 201429489477 FUS201429489477 FUS 201429489477FUS D770990 SUSD770990 SUS D770990S
Authority
US
United States
Prior art keywords
semiconductor wafer
polishing apparatus
elastic membrane
wafer polishing
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/489,477
Inventor
Makoto Fukushima
Hozumi Yasuda
Keisuke Namiki
Osamu Nabeya
Shingo Togashi
Satoru Yamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JPD2013-10676Fexternal-prioritypatent/JP1495739S/ja
Priority claimed from JPD2013-10677Fexternal-prioritypatent/JP1521451S/ja
Priority claimed from JPD2013-10674Fexternal-prioritypatent/JP1495081S/ja
Priority claimed from JPD2013-10678Fexternal-prioritypatent/JP1521701S/ja
Priority claimed from JPD2013-10675Fexternal-prioritypatent/JP1495082S/ja
Priority claimed from JPD2013-10672Fexternal-prioritypatent/JP1494713S/ja
Priority claimed from JPD2013-10673Fexternal-prioritypatent/JP1495738S/ja
Priority claimed from US29/472,346external-prioritypatent/USD769200S1/en
Application filed by Ebara CorpfiledCriticalEbara Corp
Priority to US29/489,477priorityCriticalpatent/USD770990S1/en
Application grantedgrantedCritical
Publication of USD770990S1publicationCriticalpatent/USD770990S1/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

Links

Images

Description

FIG. 1 is a bottom plan view of an elastic membrane for semiconductor wafer polishing apparatus showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a front elevation view thereof;
FIG. 4 is an enlarged perspective view of a portion taken alongsection4 inFIG. 2;
FIG. 5 is a cross sectional view taken along line5-5 inFIG. 2; and,
FIG. 6 is an enlarged portion view taken along line6-6 inFIG. 5.
The broken lines shown in the drawings represent portions of the elastic membrane for semiconductor wafer polishing apparatus that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary lines of the claimed design.
All surfaces not shown form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an elastic membrane for semiconductor wafer polishing apparatus, as shown and described.
US29/489,4772013-05-152014-04-30Elastic membrane for semiconductor wafer polishing apparatusActiveUSD770990S1 (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
US29/489,477USD770990S1 (en)2013-05-152014-04-30Elastic membrane for semiconductor wafer polishing apparatus

Applications Claiming Priority (24)

Application NumberPriority DateFiling DateTitle
JP2013-0263472013-02-14
JP2013-106742013-05-15
JP2013-106722013-05-15
JPD2013-10675FJP1495082S (en)2013-05-152013-05-15
JPD2013-10672FJP1494713S (en)2013-05-152013-05-15
JPD2013-10678FJP1521701S (en)2013-05-152013-05-15
JP2013-106762013-05-15
JPD2013-10674FJP1495081S (en)2013-05-152013-05-15
JP2013-106752013-05-15
JPD2013-10673FJP1495738S (en)2013-05-152013-05-15
JPD2013-10676FJP1495739S (en)2013-05-152013-05-15
JP2013-106732013-05-15
JP2013-106772013-05-15
JP2013-106782013-05-15
JPD2013-10677FJP1521451S (en)2013-05-152013-05-15
JP20130263462013-11-11
JP2013-0263492013-11-11
JP20130263472013-11-11
JP20130263482013-11-11
JP2013-0263462013-11-11
JP2013-0263482013-11-11
JP20130263492013-11-11
US29/472,346USD769200S1 (en)2013-05-152013-11-12Elastic membrane for semiconductor wafer polishing apparatus
US29/489,477USD770990S1 (en)2013-05-152014-04-30Elastic membrane for semiconductor wafer polishing apparatus

Related Parent Applications (1)

Application NumberTitlePriority DateFiling Date
US29/472,346Continuation-In-PartUSD769200S1 (en)2013-05-152013-11-12Elastic membrane for semiconductor wafer polishing apparatus

Publications (1)

Publication NumberPublication Date
USD770990S1true USD770990S1 (en)2016-11-08

Family

ID=57210360

Family Applications (1)

Application NumberTitlePriority DateFiling Date
US29/489,477ActiveUSD770990S1 (en)2013-05-152014-04-30Elastic membrane for semiconductor wafer polishing apparatus

Country Status (1)

CountryLink
US (1)USD770990S1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD808349S1 (en)*2013-05-152018-01-23Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD813180S1 (en)*2013-05-152018-03-20Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD814473S1 (en)*2016-01-192018-04-03Sony CorporationMemory card
USD839224S1 (en)2016-12-122019-01-29Ebara CorporationElastic membrane for semiconductor wafer polishing
USD981969S1 (en)*2020-12-182023-03-28Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus

Citations (26)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US20010029158A1 (en)*1998-07-302001-10-11Yoshitaka SasakiPolishing apparatus and polishing method, and method of manufacturing semiconductor device and method of manufacturing thin film magnetic head
US6659850B2 (en)*2000-03-312003-12-09Speedfam-Ipec CorporationWork piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
US20040175951A1 (en)*2003-03-072004-09-09Applied Materials, Inc.Substrate carrier with a textured membrane
US20080070479A1 (en)*2004-11-012008-03-20Ebara CorporationPolishing Apparatus
US7357699B2 (en)*2003-02-102008-04-15Ebara CorporationSubstrate holding apparatus and polishing apparatus
US7402098B2 (en)*2006-10-272008-07-22Novellus Systems, Inc.Carrier head for workpiece planarization/polishing
US20090068934A1 (en)*2007-09-042009-03-12Samsung Electronics Co., Ltd.Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same
US20090068935A1 (en)*2003-10-172009-03-12Hiroomi ToriiPolishing apparatus
US20090111362A1 (en)*2007-10-292009-04-30Ebara CorporationPolishing Apparatus
US20090247057A1 (en)*2005-09-142009-10-01Ebara CorporationPolishing platen and polishing apparatus
USD616390S1 (en)*2009-03-062010-05-25Tokyo Electron LimitedQuartz cover for manufacturing semiconductor wafers
CN301348233S (en)2009-08-272010-09-15株式会社荏原制作所Elastic film for semiconductor wafer polishing device
USD633452S1 (en)2009-08-272011-03-01Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD634719S1 (en)2009-08-272011-03-22Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
TWD139857S (en)2009-08-272011-04-11荏原製作所股份有限公司 Elastic film for semiconductor wafer polishing equipment
USD649126S1 (en)*2008-10-202011-11-22Ebara CorporationVacuum contact pad
TWD146491S (en)2010-12-282012-04-21荏原製作所股份有限公司 Elastic film for semiconductor wafer polishing
USD684551S1 (en)*2011-07-072013-06-18Phuong Van NguyenWafer polishing pad holder
US8469776B2 (en)*2006-11-222013-06-25Applied Materials, Inc.Flexible membrane for carrier head
USD686175S1 (en)*2012-03-202013-07-16Veeco Instruments Inc.Wafer carrier having pockets
USD686582S1 (en)*2012-03-202013-07-23Veeco Instruments Inc.Wafer carrier having pockets
USD687791S1 (en)*2012-03-202013-08-13Veeco Instruments Inc.Multi-keyed wafer carrier
USD687790S1 (en)*2012-03-202013-08-13Veeco Instruments Inc.Keyed wafer carrier
US20130316628A1 (en)*2012-05-232013-11-28Samsung Electronics Co., Ltd.Flexible membranes for a polishing head
USD711330S1 (en)2010-12-282014-08-19Ebara CorporationElastic membrane for semiconductor wafer polishing
US8859070B2 (en)*2011-11-302014-10-14Ebara CorporationElastic membrane

Patent Citations (27)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US20010029158A1 (en)*1998-07-302001-10-11Yoshitaka SasakiPolishing apparatus and polishing method, and method of manufacturing semiconductor device and method of manufacturing thin film magnetic head
US6659850B2 (en)*2000-03-312003-12-09Speedfam-Ipec CorporationWork piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
US7357699B2 (en)*2003-02-102008-04-15Ebara CorporationSubstrate holding apparatus and polishing apparatus
US20040175951A1 (en)*2003-03-072004-09-09Applied Materials, Inc.Substrate carrier with a textured membrane
US20090068935A1 (en)*2003-10-172009-03-12Hiroomi ToriiPolishing apparatus
US20080070479A1 (en)*2004-11-012008-03-20Ebara CorporationPolishing Apparatus
US20090247057A1 (en)*2005-09-142009-10-01Ebara CorporationPolishing platen and polishing apparatus
US7402098B2 (en)*2006-10-272008-07-22Novellus Systems, Inc.Carrier head for workpiece planarization/polishing
US8469776B2 (en)*2006-11-222013-06-25Applied Materials, Inc.Flexible membrane for carrier head
US20090068934A1 (en)*2007-09-042009-03-12Samsung Electronics Co., Ltd.Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same
US20090111362A1 (en)*2007-10-292009-04-30Ebara CorporationPolishing Apparatus
USD649126S1 (en)*2008-10-202011-11-22Ebara CorporationVacuum contact pad
USD616390S1 (en)*2009-03-062010-05-25Tokyo Electron LimitedQuartz cover for manufacturing semiconductor wafers
TWD139857S (en)2009-08-272011-04-11荏原製作所股份有限公司 Elastic film for semiconductor wafer polishing equipment
USD633452S1 (en)2009-08-272011-03-01Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
CN301348233S (en)2009-08-272010-09-15株式会社荏原制作所Elastic film for semiconductor wafer polishing device
USD634719S1 (en)2009-08-272011-03-22Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD711330S1 (en)2010-12-282014-08-19Ebara CorporationElastic membrane for semiconductor wafer polishing
TWD146491S (en)2010-12-282012-04-21荏原製作所股份有限公司 Elastic film for semiconductor wafer polishing
USD729753S1 (en)2010-12-282015-05-19Ebara CorporationElastic membrane for semiconductor wafer polishing
USD684551S1 (en)*2011-07-072013-06-18Phuong Van NguyenWafer polishing pad holder
US8859070B2 (en)*2011-11-302014-10-14Ebara CorporationElastic membrane
USD686582S1 (en)*2012-03-202013-07-23Veeco Instruments Inc.Wafer carrier having pockets
USD687790S1 (en)*2012-03-202013-08-13Veeco Instruments Inc.Keyed wafer carrier
USD687791S1 (en)*2012-03-202013-08-13Veeco Instruments Inc.Multi-keyed wafer carrier
USD686175S1 (en)*2012-03-202013-07-16Veeco Instruments Inc.Wafer carrier having pockets
US20130316628A1 (en)*2012-05-232013-11-28Samsung Electronics Co., Ltd.Flexible membranes for a polishing head

Cited By (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD808349S1 (en)*2013-05-152018-01-23Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD813180S1 (en)*2013-05-152018-03-20Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus
USD814473S1 (en)*2016-01-192018-04-03Sony CorporationMemory card
USD839224S1 (en)2016-12-122019-01-29Ebara CorporationElastic membrane for semiconductor wafer polishing
USD913977S1 (en)2016-12-122021-03-23Ebara CorporationElastic membrane for semiconductor wafer polishing
USD981969S1 (en)*2020-12-182023-03-28Ebara CorporationElastic membrane for semiconductor wafer polishing apparatus

Similar Documents

PublicationPublication DateTitle
USD813180S1 (en)Elastic membrane for semiconductor wafer polishing apparatus
USD808349S1 (en)Elastic membrane for semiconductor wafer polishing apparatus
USD918895S1 (en)Kiosk
USD913977S1 (en)Elastic membrane for semiconductor wafer polishing
USD772841S1 (en)Headphone device
USD775091S1 (en)Power semiconductor module
USD776071S1 (en)Power semiconductor module
USD775593S1 (en)Power semiconductor module
USD793016S1 (en)Brush cleaning apparatus
USD717112S1 (en)Cutlery
USD769124S1 (en)Bottle
USD797472S1 (en)Mat base
USD727763S1 (en)Breathalyzer
USD815385S1 (en)Wafer support ring
USD717111S1 (en)Cutlery
USD714098S1 (en)Glass
USD774628S1 (en)Conduit coupler
USD717000S1 (en)Hair stylizing apparatus
USD715010S1 (en)Footwear cleaning device
USD759404S1 (en)Pillow
USD769832S1 (en)Semiconductor device
USD859332S1 (en)Elastic membrane for semiconductor wafer polishing
USD804828S1 (en)Brush
USD747412S1 (en)Board
USD854902S1 (en)Polishing or grinding pad

[8]ページ先頭

©2009-2025 Movatter.jp