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USD740769S1 - Boat for substrate processing apparatus - Google Patents

Boat for substrate processing apparatus
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Publication number
USD740769S1
USD740769S1US29/467,526US201329467526FUSD740769SUS D740769 S1USD740769 S1US D740769S1US 201329467526 FUS201329467526 FUS 201329467526FUS D740769 SUSD740769 SUS D740769S
Authority
US
United States
Prior art keywords
boat
processing apparatus
substrate processing
view
taken along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/467,526
Inventor
Kosuke Takagi
Kiyohiko Maeda
Yuji Urano
Naoki Matsumoto
Yasuaki Komae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric IncfiledCriticalHitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC.reassignmentHITACHI KOKUSAI ELECTRIC INC.ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: KOMAE, YASUAKI, MAEDA, KIYOHIKO, MATSUMOTO, NAOKI, TAKAGI, KOSUKE, URANO, YUJI
Application grantedgrantedCritical
Publication of USD740769S1publicationCriticalpatent/USD740769S1/en
Assigned to Kokusai Electric CorporationreassignmentKokusai Electric CorporationASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: HITACHI KOKUSAI ELECTRIC INC.
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

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Description

FIG. 1 is a perspective view of a boat for substrate processing apparatus showing our new design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a rear elevation view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view thereof taken along line8-8 inFIG. 3;
FIG. 9 is a cross-sectional view thereof taken along line9-9 inFIG. 8;
FIG. 10 is a cross-sectional view thereof taken along line10-10 inFIG. 8;
FIG. 11 is an enlarged perspective view thereof taken along line11-11 inFIG. 1;
FIG. 12 is an enlarged front elevation view thereof taken along line12-12 inFIG. 2;
FIG. 13 is an enlarged rear elevation view thereof taken along line13-13 inFIG. 3;
FIG. 14 is an enlarged top plan view thereof taken along line14-14 inFIG. 1;
FIG. 15 is an enlarged bottom plan view thereof taken along line15-15 inFIG. 1;
FIG. 16 is an enlarged right side view thereof taken along line16-16 inFIG. 4; and,
FIG. 17 is an enlarged left side view thereof taken along line17-17 inFIG. 5.
The broken lines in the drawing views are included for the purpose of illustrating the unclaimed portions of the boat for substrate processing apparatus and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a boat for substrate processing apparatus, as shown and described.
US29/467,5262013-03-222013-09-20Boat for substrate processing apparatusActiveUSD740769S1 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JP2013-0063642013-03-22
JP20130063642013-03-22

Publications (1)

Publication NumberPublication Date
USD740769S1true USD740769S1 (en)2015-10-13

Family

ID=54253060

Family Applications (1)

Application NumberTitlePriority DateFiling Date
US29/467,526ActiveUSD740769S1 (en)2013-03-222013-09-20Boat for substrate processing apparatus

Country Status (2)

CountryLink
US (1)USD740769S1 (en)
TW (1)TWD166332S (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD769201S1 (en)*2014-11-202016-10-18Tokyo Electron LimitedWafer boat
USD772183S1 (en)*2014-11-202016-11-22Tokyo Electron LimitedWafer boat
USD789310S1 (en)*2014-11-202017-06-13Tokyo Electron LimitedWafer boat
USD791721S1 (en)*2014-11-202017-07-11Tokyo Electron LimitedWafer boat
USD839219S1 (en)*2016-02-122019-01-29Kokusai Electric CorporationBoat for substrate processing apparatus
USD847105S1 (en)2018-05-032019-04-30Kokusai Electric CorporationBoat of substrate processing apparatus
US20210035835A1 (en)*2019-07-312021-02-04Kokusai Electric CorporationSubstrate processing apparatus, substrate support, and method of manufacturing semiconductor device
USD920935S1 (en)*2018-09-202021-06-01Kokusai Electric CorporationBoat for substrate processing apparatus
USD936025S1 (en)*2018-12-262021-11-16Lg Chem, Ltd.Flexible printed circuit board for battery module
USD937791S1 (en)*2018-12-262021-12-07Lg Chem, Ltd.Flexible printed circuit board for battery module
USD939459S1 (en)*2019-08-072021-12-28Kokusai Electric CorporationBoat for wafer processing apparatus
USD958093S1 (en)*2019-11-282022-07-19Kokusai Electric CorporationBoat of substrate processing apparatus
USD962182S1 (en)*2019-03-272022-08-30Gudeng Precision Industrial Co., Ltd.Reticle pod connecting frame
USD965542S1 (en)*2020-03-192022-10-04Kokusai Electric CorporationBoat of substrate processing apparatus
USD981971S1 (en)*2021-03-152023-03-28Kokusai Electric CorporationBoat of substrate processing apparatus
USD1019583S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1053830S1 (en)*2022-03-042024-12-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1063875S1 (en)*2022-09-142025-02-25Kokusai Electric CorporationSubstrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en)*2022-09-142025-06-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1086086S1 (en)*2021-10-012025-07-29Kokusai Electric CorporationSeparator of substrate processing apparatus

Citations (40)

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Publication numberPriority datePublication dateAssigneeTitle
USD361752S (en)*1993-09-171995-08-29Tokyo Electron Kasbushiki KaishaWafer boat or rack for holding semiconductor wafers
USD366868S (en)*1993-09-291996-02-06Tokyo Electron Kabushiki KaishaWafer boat or rack
USD378675S (en)*1995-05-301997-04-01Tokyo Electron LimitedWafer boat
USD378823S (en)*1995-05-301997-04-15Tokyo Electron LimitedWafer boat
USD380454S (en)*1995-05-301997-07-01Tokyo Electron LimitedWafer boat
US5752609A (en)*1996-02-061998-05-19Tokyo Electron LimitedWafer boat
USD404015S (en)*1997-01-311999-01-12Tokyo Electron Ltd.Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en)*1997-08-201999-01-19Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
US5897311A (en)*1995-05-311999-04-27Tokyo Electron LimitedSupport boat for objects to be processed
USD409158S (en)*1997-08-201999-05-04Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en)*1997-08-201999-06-22Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
US6062853A (en)*1996-02-292000-05-16Tokyo Electron LimitedHeat-treating boat for semiconductor wafers
US6065615A (en)*1996-02-282000-05-23Asahi Glass Company, Ltd.Vertical wafer boat
US6095806A (en)*1998-06-242000-08-01Tokyo Electron LimitedSemiconductor wafer boat and vertical heat treating system
US6099645A (en)*1999-07-092000-08-08Union Oil Company Of CaliforniaVertical semiconductor wafer carrier with slats
US6099302A (en)*1998-06-232000-08-08Samsung Electronics Co., Ltd.Semiconductor wafer boat with reduced wafer contact area
US6099054A (en)*1998-10-282000-08-08Custom Metalcraft, Inc.Latch dog assembly
USD433931S (en)*2000-03-062000-11-21Poplin Richard LDoorstop
US6287112B1 (en)*2000-03-302001-09-11Asm International, N.V.Wafer boat
US6341935B1 (en)*2000-06-142002-01-29Taiwan Semiconductor Manufacturing Company, Ltd.Wafer boat having improved wafer holding capability
US20020092815A1 (en)*2001-01-182002-07-18Hong-Guen KimSemiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en)*2001-02-202002-08-22Mitsubishi Denki Kabushiki KaishaRetainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20020130061A1 (en)*2000-11-022002-09-19Hengst Richard R.Apparatus and method of making a slip free wafer boat
US20020187023A1 (en)*2001-05-112002-12-12Itsuo ArakiVertical type wafer supporting jig
US20030024888A1 (en)*2001-07-162003-02-06Rohm And Haas CompanyWafer holding apparatus
US20050145584A1 (en)*2004-01-062005-07-07Buckley Richard F.Wafer boat with interference fit wafer supports
USD534056S1 (en)*2005-05-022006-12-26Newfrey LlcAutomobile vehicle striker assembly
USD570308S1 (en)*2006-05-012008-06-03Tokyo Electron LimitedWafer boat
USD570309S1 (en)*2006-10-252008-06-03Tokyo Electron LimitedWafer boat
USD580894S1 (en)*2006-05-012008-11-18Tokyo Electron LimitedWafer boat
US7484958B2 (en)*2003-07-162009-02-03Shin-Etsu Handotai Co., Ltd.Vertical boat for heat treatment and method for producing the same
USD600221S1 (en)*2008-03-282009-09-15Tokyo Electron LimitedWafer boat
USD600222S1 (en)*2008-03-282009-09-15Tokyo Electron LimitedWafer boat
US20090250005A1 (en)*2008-04-032009-10-08Tokyo Electron LimitedReaction tube and heat processing apparatus for a semiconductor process
USD616395S1 (en)*2009-03-112010-05-25Tokyo Electron LimitedSupport of wafer boat for manufacturing semiconductor wafers
USD616394S1 (en)*2009-03-062010-05-25Tokyo Electron LimitedSupport of wafer boat for manufacturing semiconductor wafers
USD616396S1 (en)*2009-03-122010-05-25Tokyo Electron LimitedPedestal of heat insulating cylinder for manufacturing semiconductor wafers
US7730580B2 (en)*2005-05-022010-06-08Newfrey LlcAutomobile vehicle striker assembly
USD655255S1 (en)*2010-06-182012-03-06Hitachi Kokusai Electric Inc.Boat of wafer processing apparatus
USD655682S1 (en)*2010-06-182012-03-13Hitachi Kokusai Electric Inc.Boat of wafer processing apparatus

Patent Citations (40)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD361752S (en)*1993-09-171995-08-29Tokyo Electron Kasbushiki KaishaWafer boat or rack for holding semiconductor wafers
USD366868S (en)*1993-09-291996-02-06Tokyo Electron Kabushiki KaishaWafer boat or rack
USD378675S (en)*1995-05-301997-04-01Tokyo Electron LimitedWafer boat
USD378823S (en)*1995-05-301997-04-15Tokyo Electron LimitedWafer boat
USD380454S (en)*1995-05-301997-07-01Tokyo Electron LimitedWafer boat
US5897311A (en)*1995-05-311999-04-27Tokyo Electron LimitedSupport boat for objects to be processed
US5752609A (en)*1996-02-061998-05-19Tokyo Electron LimitedWafer boat
US6065615A (en)*1996-02-282000-05-23Asahi Glass Company, Ltd.Vertical wafer boat
US6062853A (en)*1996-02-292000-05-16Tokyo Electron LimitedHeat-treating boat for semiconductor wafers
USD404015S (en)*1997-01-311999-01-12Tokyo Electron Ltd.Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en)*1997-08-201999-06-22Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en)*1997-08-201999-05-04Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en)*1997-08-201999-01-19Tokyo Electron LimitedWafer boat for use in a semiconductor wafer heat processing apparatus
US6099302A (en)*1998-06-232000-08-08Samsung Electronics Co., Ltd.Semiconductor wafer boat with reduced wafer contact area
US6095806A (en)*1998-06-242000-08-01Tokyo Electron LimitedSemiconductor wafer boat and vertical heat treating system
US6099054A (en)*1998-10-282000-08-08Custom Metalcraft, Inc.Latch dog assembly
US6099645A (en)*1999-07-092000-08-08Union Oil Company Of CaliforniaVertical semiconductor wafer carrier with slats
USD433931S (en)*2000-03-062000-11-21Poplin Richard LDoorstop
US6287112B1 (en)*2000-03-302001-09-11Asm International, N.V.Wafer boat
US6341935B1 (en)*2000-06-142002-01-29Taiwan Semiconductor Manufacturing Company, Ltd.Wafer boat having improved wafer holding capability
US20020130061A1 (en)*2000-11-022002-09-19Hengst Richard R.Apparatus and method of making a slip free wafer boat
US20020092815A1 (en)*2001-01-182002-07-18Hong-Guen KimSemiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en)*2001-02-202002-08-22Mitsubishi Denki Kabushiki KaishaRetainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20020187023A1 (en)*2001-05-112002-12-12Itsuo ArakiVertical type wafer supporting jig
US20030024888A1 (en)*2001-07-162003-02-06Rohm And Haas CompanyWafer holding apparatus
US7484958B2 (en)*2003-07-162009-02-03Shin-Etsu Handotai Co., Ltd.Vertical boat for heat treatment and method for producing the same
US20050145584A1 (en)*2004-01-062005-07-07Buckley Richard F.Wafer boat with interference fit wafer supports
USD534056S1 (en)*2005-05-022006-12-26Newfrey LlcAutomobile vehicle striker assembly
US7730580B2 (en)*2005-05-022010-06-08Newfrey LlcAutomobile vehicle striker assembly
USD580894S1 (en)*2006-05-012008-11-18Tokyo Electron LimitedWafer boat
USD570308S1 (en)*2006-05-012008-06-03Tokyo Electron LimitedWafer boat
USD570309S1 (en)*2006-10-252008-06-03Tokyo Electron LimitedWafer boat
USD600221S1 (en)*2008-03-282009-09-15Tokyo Electron LimitedWafer boat
USD600222S1 (en)*2008-03-282009-09-15Tokyo Electron LimitedWafer boat
US20090250005A1 (en)*2008-04-032009-10-08Tokyo Electron LimitedReaction tube and heat processing apparatus for a semiconductor process
USD616394S1 (en)*2009-03-062010-05-25Tokyo Electron LimitedSupport of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en)*2009-03-112010-05-25Tokyo Electron LimitedSupport of wafer boat for manufacturing semiconductor wafers
USD616396S1 (en)*2009-03-122010-05-25Tokyo Electron LimitedPedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655255S1 (en)*2010-06-182012-03-06Hitachi Kokusai Electric Inc.Boat of wafer processing apparatus
USD655682S1 (en)*2010-06-182012-03-13Hitachi Kokusai Electric Inc.Boat of wafer processing apparatus

Cited By (23)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD772183S1 (en)*2014-11-202016-11-22Tokyo Electron LimitedWafer boat
USD789310S1 (en)*2014-11-202017-06-13Tokyo Electron LimitedWafer boat
USD791721S1 (en)*2014-11-202017-07-11Tokyo Electron LimitedWafer boat
USD769201S1 (en)*2014-11-202016-10-18Tokyo Electron LimitedWafer boat
USD839219S1 (en)*2016-02-122019-01-29Kokusai Electric CorporationBoat for substrate processing apparatus
USD847105S1 (en)2018-05-032019-04-30Kokusai Electric CorporationBoat of substrate processing apparatus
USD920935S1 (en)*2018-09-202021-06-01Kokusai Electric CorporationBoat for substrate processing apparatus
USD936025S1 (en)*2018-12-262021-11-16Lg Chem, Ltd.Flexible printed circuit board for battery module
USD937791S1 (en)*2018-12-262021-12-07Lg Chem, Ltd.Flexible printed circuit board for battery module
USD962182S1 (en)*2019-03-272022-08-30Gudeng Precision Industrial Co., Ltd.Reticle pod connecting frame
US11929272B2 (en)*2019-07-312024-03-12Kokusai Electric CorporationSubstrate processing apparatus, substrate support, and method of manufacturing semiconductor device
US20210035835A1 (en)*2019-07-312021-02-04Kokusai Electric CorporationSubstrate processing apparatus, substrate support, and method of manufacturing semiconductor device
USD939459S1 (en)*2019-08-072021-12-28Kokusai Electric CorporationBoat for wafer processing apparatus
USD958093S1 (en)*2019-11-282022-07-19Kokusai Electric CorporationBoat of substrate processing apparatus
USD965542S1 (en)*2020-03-192022-10-04Kokusai Electric CorporationBoat of substrate processing apparatus
USD981971S1 (en)*2021-03-152023-03-28Kokusai Electric CorporationBoat of substrate processing apparatus
USD1086086S1 (en)*2021-10-012025-07-29Kokusai Electric CorporationSeparator of substrate processing apparatus
USD1053830S1 (en)*2022-03-042024-12-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1019583S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en)*2022-05-302024-03-26Kokusai Electric CorporationInner tube of reaction tube for semiconductor manufacturing equipment
USD1063875S1 (en)*2022-09-142025-02-25Kokusai Electric CorporationSubstrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en)*2022-09-142025-06-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus

Also Published As

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TWD166332S (en)2015-03-01

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