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USD694790S1 - Baffle plate for manufacturing semiconductor - Google Patents

Baffle plate for manufacturing semiconductor
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Publication number
USD694790S1
USD694790S1US29/416,082US201229416082FUSD694790SUS D694790 S1USD694790 S1US D694790S1US 201229416082 FUS201229416082 FUS 201229416082FUS D694790 SUSD694790 SUS D694790S
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United States
Prior art keywords
baffle plate
manufacturing semiconductor
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semiconductor
manufacturing
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US29/416,082
Inventor
Naoki Matsumoto
Jun Yoshikawa
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Assigned to TOKYO ELECTRON LIMITEDreassignmentTOKYO ELECTRON LIMITEDASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: MATSUMOTO, NAOKI, YOSHIKAWA, JUN
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FIG. 1 is a front view of a baffle plate of the present invention.
FIG. 2 is a rear view of the baffle plate ofFIG. 1.
FIG. 3 is a top plan view of the baffle plate ofFIG. 1.
FIG. 4 is a bottom view of the baffle plate ofFIG. 1.
FIG. 5 is a right side view of the baffle plate ofFIG. 1.
FIG. 6 is a left view of the baffle plate ofFIG. 1.
FIG. 7 is a first perspective view of the baffle plate ofFIG. 1.
FIG. 8 is a second perspective view of the baffle plate ofFIG. 1; and,
FIG. 9 is a view of the baffle plate ofFIG. 1 in use, wherein, for example, in a plasma processing device, gas entering a chamber is ionized, and a wafer is treated by an etching process with ions, and gas is exhausted from the chamber.
The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a baffle plate for manufacturing semiconductor, as shown and described.
US29/416,0822011-09-202012-03-19Baffle plate for manufacturing semiconductorActiveUSD694790S1 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JPD2011-0215022011-09-20
JPD2011-21502FJP1438319S (en)2011-09-202011-09-20

Publications (1)

Publication NumberPublication Date
USD694790S1true USD694790S1 (en)2013-12-03

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US29/416,082ActiveUSD694790S1 (en)2011-09-202012-03-19Baffle plate for manufacturing semiconductor

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JP (1)JP1438319S (en)

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