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USD633452S1 - Elastic membrane for semiconductor wafer polishing apparatus - Google Patents

Elastic membrane for semiconductor wafer polishing apparatus
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Publication number
USD633452S1
USD633452S1US29/356,456US35645610FUSD633452SUS D633452 S1USD633452 S1US D633452S1US 35645610 FUS35645610 FUS 35645610FUS D633452 SUSD633452 SUS D633452S
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US
United States
Prior art keywords
semiconductor wafer
polishing apparatus
elastic membrane
wafer polishing
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/356,456
Inventor
Keisuke Namiki
Hozumi Yasuda
Osamu Nabeya
Makoto Fukushima
Shingo Togashi
Satoru Yamaki
Katsuhide Watanabe
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Ebara Corp
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Ebara Corp
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Assigned to EBARA CORPORATIONreassignmentEBARA CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: FUKUSHIMA, MAKOTO, TOGASHI, SHINGO, YAMAKI, SATORU, NABEYA, OSAMU, NAMIKI, KEISUKE, WATANABE, KATSUHIDE, YASUDA, HOZUMI
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Description

FIG. 1 is a bottom view of an elastic membrane for semiconductor wafer polishing apparatus showing our new design;
FIG. 2 is a top view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a rear view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a perspective view, observed from below thereof,
FIG. 8 is a perspective view, observed from above thereof;
FIG. 9 is a cross-section view taken along theline99 ofFIG. 1 thereof; and,
FIG. 10 is a enlarged view ofpart10 ofFIG. 9 thereof.

Claims (1)

  1. The ornamental design for an elastic membrane for semiconductor wafer polishing apparatus, as shown and described.
US29/356,4562009-08-272010-02-25Elastic membrane for semiconductor wafer polishing apparatusExpired - LifetimeUSD633452S1 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JP2009-197152009-08-27
JP20090197152009-08-27

Publications (1)

Publication NumberPublication Date
USD633452S1true USD633452S1 (en)2011-03-01

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US29/356,456Expired - LifetimeUSD633452S1 (en)2009-08-272010-02-25Elastic membrane for semiconductor wafer polishing apparatus

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US (1)USD633452S1 (en)
TW (1)TWD138225S1 (en)

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