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USD404015S - Wafer boat for use in a semiconductor wafer heat processing apparatus - Google Patents

Wafer boat for use in a semiconductor wafer heat processing apparatus
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Publication number
USD404015S
USD404015SUS29/074,281US7428197FUSD404015SUS D404015 SUSD404015 SUS D404015SUS 7428197 FUS7428197 FUS 7428197FUS D404015 SUSD404015 SUS D404015S
Authority
US
United States
Prior art keywords
processing apparatus
heat processing
semiconductor wafer
wafer
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/074,281
Inventor
Manabu Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron LtdfiledCriticalTokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITEDreassignmentTOKYO ELECTRON LIMITEDASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: HONMA, MANABU
Application grantedgrantedCritical
Publication of USD404015SpublicationCriticalpatent/USD404015S/en
Anticipated expirationlegal-statusCritical
Expired - Lifetimelegal-statusCriticalCurrent

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Description

FIG. 1 a perspective view of a wafer boat for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a bottom plan view thereof;
FIG. 5 a cross sectional view taken along line V-V in FIG. 2;
FIG. 6 a right side view thereof, the left side view being a mirror image of the right view;
FIG. 7 a rear elevational view thereof; and,
FIG. 8 a cross sectional view taken along line VIII-VIII in FIG. 2.

Claims (1)

  1. The ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/074,2811997-01-311997-07-24Wafer boat for use in a semiconductor wafer heat processing apparatusExpired - LifetimeUSD404015S (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JP9-26591997-01-10
JP2659971997-01-31

Publications (1)

Publication NumberPublication Date
USD404015Strue USD404015S (en)1999-01-12

Family

ID=71727254

Family Applications (1)

Application NumberTitlePriority DateFiling Date
US29/074,281Expired - LifetimeUSD404015S (en)1997-01-311997-07-24Wafer boat for use in a semiconductor wafer heat processing apparatus

Country Status (1)

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US (1)USD404015S (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD570309S1 (en)*2006-10-252008-06-03Tokyo Electron LimitedWafer boat
USD734730S1 (en)*2012-12-272015-07-21Hitachi Kokusai Electric Inc.Boat of substrate processing apparatus
USD737785S1 (en)*2013-07-292015-09-01Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD738329S1 (en)*2013-07-292015-09-08Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD739831S1 (en)*2013-03-222015-09-29Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD740769S1 (en)*2013-03-222015-10-13Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD747279S1 (en)*2013-07-292016-01-12Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD769201S1 (en)*2014-11-202016-10-18Tokyo Electron LimitedWafer boat
USD772183S1 (en)*2014-11-202016-11-22Tokyo Electron LimitedWafer boat
USD789310S1 (en)*2014-11-202017-06-13Tokyo Electron LimitedWafer boat
USD791721S1 (en)*2014-11-202017-07-11Tokyo Electron LimitedWafer boat
USD839219S1 (en)*2016-02-122019-01-29Kokusai Electric CorporationBoat for substrate processing apparatus
USD846514S1 (en)*2018-05-032019-04-23Kokusai Electric CorporationBoat of substrate processing apparatus
USD847105S1 (en)*2018-05-032019-04-30Kokusai Electric CorporationBoat of substrate processing apparatus
USD893438S1 (en)*2017-08-212020-08-18Tokyo Electron LimitedWafer boat
USD908102S1 (en)*2019-02-202021-01-19Veeco Instruments Inc.Transportable semiconductor wafer rack
USD908103S1 (en)*2019-02-202021-01-19Veeco Instruments Inc.Transportable semiconductor wafer rack
USD939459S1 (en)*2019-08-072021-12-28Kokusai Electric CorporationBoat for wafer processing apparatus
USD1022933S1 (en)*2021-08-272024-04-16Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1053830S1 (en)*2022-03-042024-12-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1063875S1 (en)*2022-09-142025-02-25Kokusai Electric CorporationSubstrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en)*2022-09-142025-06-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus

Citations (8)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD291413S (en)1984-07-301987-08-18Tokyo Denshi Kagaku Co., Ltd.Wafer holding frame
US4743156A (en)1986-05-091988-05-10Motorola, Inc.Dump transfer wafer carrier
US4857689A (en)1988-03-231989-08-15High Temperature Engineering CorporationRapid thermal furnace for semiconductor processing
US5174045A (en)1991-05-171992-12-29Semitool, Inc.Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
US5314574A (en)1992-06-261994-05-24Tokyo Electron Kabushiki KaishaSurface treatment method and apparatus
US5320218A (en)1992-04-071994-06-14Shinko Electric Co., Ltd.Closed container to be used in a clean room
USD361752S (en)1993-09-171995-08-29Tokyo Electron Kasbushiki KaishaWafer boat or rack for holding semiconductor wafers
USD378823S (en)1995-05-301997-04-15Tokyo Electron LimitedWafer boat

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD291413S (en)1984-07-301987-08-18Tokyo Denshi Kagaku Co., Ltd.Wafer holding frame
US4743156A (en)1986-05-091988-05-10Motorola, Inc.Dump transfer wafer carrier
US4857689A (en)1988-03-231989-08-15High Temperature Engineering CorporationRapid thermal furnace for semiconductor processing
US5174045A (en)1991-05-171992-12-29Semitool, Inc.Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
US5320218A (en)1992-04-071994-06-14Shinko Electric Co., Ltd.Closed container to be used in a clean room
US5314574A (en)1992-06-261994-05-24Tokyo Electron Kabushiki KaishaSurface treatment method and apparatus
USD361752S (en)1993-09-171995-08-29Tokyo Electron Kasbushiki KaishaWafer boat or rack for holding semiconductor wafers
USD378823S (en)1995-05-301997-04-15Tokyo Electron LimitedWafer boat

Cited By (22)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD570309S1 (en)*2006-10-252008-06-03Tokyo Electron LimitedWafer boat
USD734730S1 (en)*2012-12-272015-07-21Hitachi Kokusai Electric Inc.Boat of substrate processing apparatus
USD739831S1 (en)*2013-03-222015-09-29Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD740769S1 (en)*2013-03-222015-10-13Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD737785S1 (en)*2013-07-292015-09-01Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD738329S1 (en)*2013-07-292015-09-08Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD747279S1 (en)*2013-07-292016-01-12Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD791721S1 (en)*2014-11-202017-07-11Tokyo Electron LimitedWafer boat
USD772183S1 (en)*2014-11-202016-11-22Tokyo Electron LimitedWafer boat
USD789310S1 (en)*2014-11-202017-06-13Tokyo Electron LimitedWafer boat
USD769201S1 (en)*2014-11-202016-10-18Tokyo Electron LimitedWafer boat
USD839219S1 (en)*2016-02-122019-01-29Kokusai Electric CorporationBoat for substrate processing apparatus
USD893438S1 (en)*2017-08-212020-08-18Tokyo Electron LimitedWafer boat
USD847105S1 (en)*2018-05-032019-04-30Kokusai Electric CorporationBoat of substrate processing apparatus
USD846514S1 (en)*2018-05-032019-04-23Kokusai Electric CorporationBoat of substrate processing apparatus
USD908102S1 (en)*2019-02-202021-01-19Veeco Instruments Inc.Transportable semiconductor wafer rack
USD908103S1 (en)*2019-02-202021-01-19Veeco Instruments Inc.Transportable semiconductor wafer rack
USD939459S1 (en)*2019-08-072021-12-28Kokusai Electric CorporationBoat for wafer processing apparatus
USD1022933S1 (en)*2021-08-272024-04-16Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1053830S1 (en)*2022-03-042024-12-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus
USD1063875S1 (en)*2022-09-142025-02-25Kokusai Electric CorporationSubstrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en)*2022-09-142025-06-10Kokusai Electric CorporationWafer support of semiconductor manufacturing apparatus

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