Movatterモバイル変換

Info

FIG.1 is a front, top and right side perspective view of a separator of substrate processing apparatus showing our new design;

FIG.2 is a front elevational view thereof;

FIG.3 is a right side elevational view thereof;

FIG.4 is a left side elevational view thereof;

FIG.5 is a rear elevational view thereof;

FIG.6 is a top plan view thereof;

FIG.7 is a bottom plan view thereof;

FIG.8 is a cross-sectional view taken along line8-8 inFIG.2 thereof; and,

FIG.9 is a cross-sectional view taken along line9-9 inFIG.2.

CLAIM

The ornamental design for a separator of substrate processing apparatus, as shown and described.