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Info

FIG.1 is a top perspective view of an electrode for substrate processing apparatus showing our new design;

FIG.2 is a bottom perspective view thereof;

FIG.3 is a top plan view thereof;

FIG.4 is a bottom plan view thereof;

FIG.5 is a side elevation view thereof; and,

FIG.6 is a cross-sectional view, taken along a line6-6 ofFIG.3.

CLAIM

The ornamental design for an electrode for substrate processing apparatus, as shown and described.