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US7885097B2 - Non-volatile memory array with resistive sense element block erase and uni-directional write - Google Patents

Non-volatile memory array with resistive sense element block erase and uni-directional write
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US7885097B2
US7885097B2US12/501,077US50107709AUS7885097B2US 7885097 B2US7885097 B2US 7885097B2US 50107709 AUS50107709 AUS 50107709AUS 7885097 B2US7885097 B2US 7885097B2
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memory cells
fixed reference
resistive state
voltage
reference voltage
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US20100091548A1 (en
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Daniel S. Reed
Yong Lu
Andrew John Carter
Hai Li
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Seagate Technology LLC
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Seagate Technology LLC
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Priority to KR1020127003432Aprioritypatent/KR101361570B1/en
Priority to CN201080031900.2Aprioritypatent/CN102473448B/en
Priority to JP2012519687Aprioritypatent/JP5688081B2/en
Priority to PCT/US2010/041134prioritypatent/WO2011005809A1/en
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Assigned to SEAGATE TECHNOLOGY INTERNATIONAL, SEAGATE TECHNOLOGY (US) HOLDINGS, INC., SEAGATE TECHNOLOGY LLC, SEAGATE TECHNOLOGY, SEAGATE HDD CAYMAN, I365 INC., SEAGATE TECHNOLOGY PUBLIC LIMITED COMPANY, SEAGATE TECHNOLOGY HDD HOLDINGSreassignmentSEAGATE TECHNOLOGY INTERNATIONALRELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).Assignors: THE BANK OF NOVA SCOTIA
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Abstract

In accordance with various embodiments, a column of non-volatile memory cells is connected between opposing first and second control lines. A fixed reference voltage is applied to the second control line. The memory cells are simultaneously programmed to a first resistive state by applying a first voltage to the first control line that is greater than the fixed reference voltage. Less than all of the memory cells are subsequently simultaneously programmed to a different, second resistive state by applying a second voltage to the first control line that is less than the fixed reference voltage, so that at the conclusion of the respective programming steps a first portion of the memory cells along said column are at the first resistive state and a second portion of the memory cells along said column are at the second resistive state.

Description

RELATED APPLICATIONS
This application makes a claim of domestic priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 61/104,402 filed Oct. 10, 2008.
BACKGROUND
Data storage devices can be used to store and retrieve user data in a fast and effective manner. Some data storage devices utilize a semiconductor array of solid-state memory cells to store data. The memory cells can be volatile or non-volatile. Some non-volatile memory cells can be provided with a 1T1R configuration with a single transistor (“T”) and a single programmable resistive sense element (“R”).
The resistive sense element is programmable to different resistive states through the application of write currents to the memory cell, and these different resistive states can be used to denote different logical states (e.g., logical 0, 1, 10, etc.). The programmed state of the resistive sense element can be sensed using a sense amplifier to detect a voltage generated by passage of a read current through the memory cell. A number of resistive sense element (RSE) constructions are known, including without limitation magnetic random access memory (MRAM), spin-torque transfer random access memory (STRAM), resistive random access memory (RRAM), phase change random access memory (PCRAM), and programmable metallic cells (PMCs).
The memory cell transistor serves as a switching device to facilitate access to the memory cell during write and read operations, and to decouple the memory cell from adjacent cells at other times. The cell transistor may be realized as an n-channel metal oxide semiconductor field effect transistor (NMOSFET).
The cell transistor will be sized to accommodate the relatively large bi-directional write currents used to program the RSE to different resistive states, and can require a substantially greater semiconductor area than the associated RSE in the cell. The size of the cell transistor can thus serve as a limiting factor in achieving greater areal data storage densities in a semiconductor array.
SUMMARY
Various embodiments of the present invention are generally directed to a non-volatile memory cell and method of use therefor.
In accordance with various embodiments, a column of non-volatile memory cells is connected between opposing first and second control lines. A fixed reference voltage is applied to the second control line. The memory cells are simultaneously programmed to a first resistive state by applying a first voltage to the first control line that is greater than the fixed reference voltage. Less than all of the memory cells are subsequently simultaneously programmed to a different, second resistive state by applying a second voltage to the first control line that is less than the fixed reference voltage, so that at the conclusion of the respective programming steps a first portion of the memory cells along said column are at the first resistive state and a second portion of the memory cells along said column are at the second resistive state.
These and other features and advantages which characterize the various embodiments of the present invention can be understood in view of the following detailed discussion and the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a generalized functional representation of an exemplary data storage device constructed and operated in accordance with various embodiments of the present invention.
FIG. 2 shows an exemplary construction for a resistive sense element (RSE) of the memory array ofFIG. 1 in accordance with some embodiments.
FIGS. 3A-3B show respective erase and uni-directional writes of a memory cell of the device ofFIG. 1 in accordance with various embodiments.
FIG. 4 is an elevational representation of the memory cell ofFIGS. 3A-3B.
FIGS. 5A-5C show a schematic representation of an array of memory cells fromFIG. 4 subjected to respective single column erase, multi-column erase and multi-cell write operations.
FIG. 6 is a flow chart for a data access routine in accordance with various embodiments.
DETAILED DESCRIPTION
FIG. 1 provides a functional block representation of adata storage device100 constructed and operated in accordance with various embodiments of the present invention.
Top level control of thedevice100 inFIG. 1 is carried out by acontroller102, which may be a programmable or hardware based microcontroller. Thecontroller102 communicates with a host device via a controller interface (I/F)circuit104. Amemory space106 comprises a number ofmemory arrays108. Eacharray108 comprises a block of semiconductor memory of selected storage capacity. In some embodiments, the device is characterized as a solid-state drive (SSD).
FIG. 2 shows a resistive sense element (RSE)110 used in various memory cells of thememory array108 ofFIG. 1 to store data. The RSE110 is characterized inFIG. 2 as a spin-torque transfer random access memory (STRAM), although other RSE constructions can be used. The STRAM RSE includes a magnetic tunneling junction (MTJ)112 with afixed reference layer114, afree layer116 and atunneling barrier layer118. The MTJ112 is bounded byelectrodes120,122. In some embodiments, the electrodes comprise spin polarizing material that uniformly orients the spin of current passing through the RSE MTJ112.
Thereference layer114 has a fixed magnetic orientation in a selected direction. This fixed magnetic orientation can be established in a number of ways, such as via pinning to a separate magnet (not shown). Thefree layer116 has a selectively programmable magnetic orientation that can be parallel or anti-parallel with the selected direction of thereference layer114. Other respective magnetization orientations can be used, such as orientations substantially perpendicular to those shown inFIG. 2.
A low resistance state RLfor the MTJ112 is achieved when the magnetization of thefree layer116 is oriented to be substantially in the same direction (parallel) as the magnetization of thereference layer114. To orient the MTJ112 in the parallel low resistance state, a write current124 passes through the MTJ112 so that the magnetization direction of thereference layer114 sets the magnetic orientation of thefree layer116. Since electrons flow in the direction opposite to the direction of current, the write current direction passes from thefree layer116 to thereference layer114, and the electrons travel from thereference layer114 to thefree layer116.
A high resistance state RHfor the MTJ112 is established in the anti-parallel orientation in which the magnetization direction of thefree layer116 is substantially opposite that of thereference layer114. To orient theMTJ112 in the anti-parallel resistance state, a writecurrent126 passes through theMTJ112 from thereference layer114 to thefree layer116 so that spin-polarized electrons flow into thefree layer116 in the opposite direction.
A different logical state is assigned to each of the programmable resistances of the MTJ. In some embodiments, the low resistance, parallel state is used to represent a logical 0, and the high resistance, anti-parallel state is used to represent a logical 1. Additional programmed states can be used when the MTJ is configured to store multiple bits. For example, programmed resistances R1<R2<R3<R4 can be used to respectively store multi-bit values “00,” “01,” “10” and “11”.
RSEs such as110 can have asymmetric write characteristics in that it can require greater write effort to switch the programmed state in one direction as compared to another other direction. For example, with respect to the MTJ112 inFIG. 2 it has been found that writing to the anti-parallel high resistance RHstate can require higher magnitudes of driving voltage and driving current as compared to the writing of the parallel low resistance RLstate. Moreover, the relative ordering of the RSE and a switching device within a memory cell can contribute to asymmetric write characteristics, since the effective gate voltage may be lower when the direction of write current passes through the transistor prior to the RSE.
Accordingly, various embodiments of the present invention are generally directed to a memory cell comprising a switching device and a resistive sense element (RSE) having a hard programming direction and an easy programming direction. An erase operation is carried out to program the RSE in the hard programming direction by forward biasing a body-drain junction of the switching device. A write operation is carried out to program the RSE in the easy direction by applying a gate control voltage to the switching device and passing write current through a drain-source junction of the device.
As explained below, this provides a number of advantages including reduced metallization and control circuitry requirements. Smaller switching devices with reduced current carrying requirements can be utilized, promoting higher data storage densities. The memory cell configuration also supports higher throughput block level read and write schemes, such as page-mode read and write operations.
FIGS. 3A-3B shows anexemplary memory cell130 constructed and operated in accordance with various embodiments. Thememory cell130 includes anRSE110 connected in series with aswitching device132. TheRSE110 can be characterized as theMTJ112 inFIG. 2, although other RSE configurations can readily be used including but not limited to RRAM, MRAM, PCRAM and PMCs. Theswitching device132 can be characterized as a metal oxide semiconductor field effect transistor (MOSFET), although other switch configurations can be used including programmable elements.
Support structures within thememory cell110 including anelectrode layer134 and a via136 interconnect theRSE110 and the switching device (transistor)132. Afirst control line138, characterized as a bit line BL is connected to an upper portion of theRSE110. Asecond control line140, characterized as a reference line, is set to a fixed control (reference) voltage VSS, such as ground or some other reference level viareference source141. Thecontrol line140 can take any number of suitable forms, such as a ground plane, in which case thereference source141 can be characterized as a ground termination.
Thetransistor132 includes respective drain, source and gate terminals. The drain terminal is connected to theRSE110 as shown (by way of the via136 and electrode138). The source terminal of thetransistor132 is connected to thereference voltage source141. The gate terminal of thetransistor132 receives a gate control voltage input supplied by aword line WL142.
Erase operations to write theRSE110 to a first resistive state, such as logical 0, are shown inFIG. 3A. The erase operations are carried out in the hard programming direction for theRSE110 and can be initiated by setting the voltage VBLof theBL138 to a level less than the fixed voltage VSS(VBL<VSS), and by setting theWL142 to the fixed reference voltage VSS.
When the VBLvoltage is sufficiently low, a body-drain diode junction144 of thetransistor132 will become forward biased and allow a first write (programming) current146 to flow from the body of the transistor through the drain and to theRSE110. InFIG. 3A, the body-drain PN junction144 is explicitly shown as a diode, but it will be understood that this is merely for purposes of illustration; thejunction144 is a characteristic of thetransistor142 and does not represent an additional diode circuit element.
Write operations to write theRSE110 to a second resistive state, such as logical 1, are shown inFIG. 3B. The write operations are carried out in the easy programming direction for theRSE110 and are initiated by applying a suitable gate control voltage, such as VDDto the word line WL142 (VDD>VSS) and setting the voltage VBL of theBL138 to a level greater than the fixed voltage VSS(VBL>VSS). This allows a second write current148 to flow from theBL138, through theRSE110 and across the drain-source junction of thetransistor132.
The second write current148 flows in the opposite direction through theRSE110 as compared to thefirst write current146, and programs the RSE to a different resistive state. It is contemplated that the body-drain diode current146 can potentially be larger than the normal source-drain current148 of the transistor. Thetransistor132 can accordingly be sized to accommodate the lower current requirements of thesecond write current148, providing a smaller overall cell size and larger cell densities in a given semiconductor area. Driver circuitry and metallization processing to form separate conductors for thesecond control line140 can be eliminated, since thecell130 is continuously maintained at the fixed reference voltage VSSduring operation of the device.
FIG. 4 provides an exemplary elevational semiconductor layout of thememory cell130 ofFIGS. 3A-3B in accordance with some embodiments. Other layouts can readily be used. N+ dopedregions150,152 are provided in aP substrate154 to form respective source and drain regions of thecell transistor132. Acontrol gate156 is coupled to theword line WL142 and spans the source and drainregions150,152 to selectively control transistor operation.
Thesource region150 is permanently maintained at the VSSvoltage via VSSsource141A. Thedrain region152 is coupled to theRSE110 as inFIGS. 3A-3B. AP+ contact region158 is formed in thesubstrate154 to facilitate a permanent connection to asecond VSS source141B (which may be the same source as141A).
The forwardbiased PN junction144 ofFIG. 3A is denoted inFIG. 4 along the boundary between the P material of thesubstrate154 and theN+ drain region152. The erase current146 inFIG. 3A passes from the VSSsource141B and through theP+ contact158,P substrate154 andN+ drain region152 to theRSE110. This body-drain current will flow while the voltage VBLis maintained below VSSand thegate156 is maintained at VSS.
Thewrite current148 ofFIG. 3B will flow from thebit line BL138, through theRSE110 to theN+ drain region152, across the cell transistor channel to theN+ source region150, and to theVSS source141A. This write current will flow responsive to VBLbeing greater than VSS, and thegate156 being set to VDD.
FIGS. 5A-5C show an array ofmemory cells130 to illustrate various erase and write operations upon groups of cells. Thememory cells130 can correspond to a selectedarray108 fromFIG. 1, and are arranged into a series of rows and columns. The rows are denoted160A-160C and the columns are denoted162A-162C. While a 3×3 array is shown, it will be appreciated that any respective numbers of rows and columns can be used to form an M×N memory block (such as 32 rows by 4096 columns, etc.). Thecells130 along eachrow160A-160C are connected to a common word line142 (WL1-WL3), and thecells130 along eachcolumn162A-162C are connected to a common bit line138 (BL1-BL3).
FIG. 5A illustrates a single column erase operation. InFIG. 5A,column162C is erased by setting the word lines WL1-WL3 to a suitable reference voltage (e.g., VWL=VSS) and setting the voltage of the selected column to a lower voltage VBL<VSS. The bit lines138 of thenon-selected columns162A and162B are also set to a suitable reference (e.g., VBL=VSS). This configuration will write each of thememory cells130 in the selectedcolumn162C to the erased resistive state, in this case RL(logical 0). The programmed states of thememory cells130 in thenon-selected columns162A and162B will remain unaffected. Theother columns162A,162B can be respectively erased in like manner.
FIG. 5B shows a multi-column erase operation. InFIG. 5B, the bit lines BL1-BL3 of all threecolumns162A-162C are set to the lower voltage VBL<VSS, and the word lines WL1-WL3 are set to the reference voltage VSS. This sets all of thememory cells130 to the low resistive state (logical 0).
FIG. 5C shows a selective write operation in which selectedmemory cells130 in thearray108 are written to a second resistive state, such as the high resistance RH(logical 1). The writing of logical is inFIG. 5C can be carried out on an individual cell basis, to various cells along a selected row, or to various cells along a selected column.
For example, the first andthird memory cells130 in thefirst row160A can be written to the high resistance state by setting the bit lines BL1 and BL3 high (VBL>VSS), setting the bit line BL2 to a reference level (VBL=VSS), setting the word line WL1 high (VDD), and setting the word lines WL2 and WL3 to a reference level (e.g., VBL=VSS). This operates to store the bit-sequence “101” along thefirst row160A. Cells along a selected column can be similarly written by setting the associated bit line high and individually selecting the word lines for the cells to be written along the selected column.
The data along a selected row or column can be subsequently read in a number of ways. In some embodiments, a page-mode operation is carried out in which read currents are applied by each of the bit lines to cells along a selected row. Sense amplifier circuitry (not shown) can sense the voltage drop across each memory cell along the selected row and latch an output state corresponding to the word data stored along the row.
FIG. 6 provides a DATA ACCESS routine200 generally illustrative of steps carried out in accordance with the foregoing discussion. Atstep202, an array of memory cells is provided with each memory cell having an asymmetric RSE such as110 and a switching device such as132. In some embodiments, the memory cells are arranged into rows and columns, with each memory cell connected between a first control line with a variable control voltage and a second control line (reference line) at a fixed reference voltage.
Atstep204, a block of the memory cells, such as a selected column or a plurality of selected columns, are erased by setting the memory cells to a first resistive state. In some embodiments, this is carried out by lowering the voltage of the associated first control lines below that of the fixed reference voltage, and flowing a body-drain junction current of the switching device through the associated RSE (FIG. 3A).
Atstep206, selected ones of the erased memory cells are subsequently written to a second resistive state, such as by raising the voltage of the first control lines of the selected memory cells to a voltage above that of the fixed reference voltage, and applying a gate control voltage to the switching device (FIG. 3B). The routine then ends atstep208.
As can be appreciated by one skilled in the art, the various embodiments illustrated herein provide a number of advantages over prior art configurations. The source-drain current through the cell transistor is uni-directional because it is only used to write in a single direction, such as the low resistance parallel state of theexemplary MTJ112 ofFIG. 2 in the easy programming direction. The writing of the other state, such as the high resistance anti-parallel state of theMTJ112 inFIG. 2 uses the body-drain diode current, which can be a higher current consonant with the hard programming direction.
The cell configuration embodied herein facilitates the use of higher spin-torque currents and/or the use of smaller devices. Also, the various embodiments herein allow connection of the source of an NMOSFET to be connected directly to the reference voltage VSS. This enables the use of smaller bit cells and eliminates the need for connections and drivers for an active source line SL since only two active signals connect to each cell (WL and BL). This can provide a more compact layout than prior art configurations.
A block erase approach as embodied herein also allows a large number of cells to be simultaneously written to a selected resistive state (such as logical 0), allowing control circuitry to more closely conform to mature Flash memory control technologies. While STRAM MTJs have been embodied herein, it will be appreciated that the various embodiments can be adapted for any number of different types of RSE and switching device constructions.
It is to be understood that even though numerous characteristics and advantages of various embodiments of the present invention have been set forth in the foregoing description, together with details of the structure and function of various embodiments of the invention, this detailed description is illustrative only, and changes may be made in detail, especially in matters of structure and arrangements of parts within the principles of the present invention to the full extent indicated by the broad general meaning of the terms in which the appended claims are expressed.

Claims (18)

1. An apparatus comprising an array of non-volatile memory cells arranged into a plurality of rows and a plurality of columns, each memory cell in the array comprising a switching device and a resistive sense element (RSE), wherein each of the memory cells in a selected column along a bit line direction are connected to a first control line supplied with a variable voltage and a second control line maintained at a fixed reference voltage, and wherein a plural number of the memory cells in the selected column less than all of the memory cells in the selected column are simultaneously programmed to a first resistive state by lowering the variable voltage of the first control line below the fixed reference voltage of the second control line and flowing respective body-drain currents through the associated switching devices of said plural number of memory cells, a remaining plural number of the memory cells along the selected column remaining at a different, second resistive state.
3. A method comprising:
providing an array of non-volatile memory cells arranged into rows and columns, wherein each of the memory cells comprises a switching device in series with a resistive sense element (RSE), wherein each of the memory cells along a selected column along a bit line direction are connected between first and second control lines, and wherein a fixed reference voltage is continuously applied to the second control line;
programming the RSEs of all of the memory cells along the selected column simultaneously to a first resistive state by applying a first voltage to the first control line that is lower than the fixed reference voltage; and
subsequently programming a plurality of the RSEs less than all of the memory cells along the selected column simultaneously to a different, second resistive state by applying a second voltage to the first control line that is higher than the fixed reference voltage.
11. A method comprising:
connecting a column of non-volatile memory cells along a bit line direction between opposing first and second control lines;
applying a fixed reference voltage to the second control line;
simultaneously programming the memory cells along said column to a first resistive state by applying a first voltage to the first control line that is greater than the fixed reference voltage; and
subsequently simultaneously programming a plurality of the memory cells less than all of the memory cells along said column to a different, second resistive state by applying a second voltage to the first control line that is less than the fixed reference voltage, so that at the conclusion of the respective programming steps a first portion of the memory cells along said column are at the first resistive state and a second portion of the memory cells along said column are at the second resistive state.
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US12/501,077US7885097B2 (en)2008-10-102009-07-10Non-volatile memory array with resistive sense element block erase and uni-directional write
PCT/US2010/041134WO2011005809A1 (en)2009-07-102010-07-07Non-volatile memory array with resistive sense element block erase and uni-directional write
JP2012519687AJP5688081B2 (en)2009-07-102010-07-07 Nonvolatile memory array having resistance sensing elements for block erase and unidirectional writing
CN201080031900.2ACN102473448B (en)2009-07-102010-07-07 Nonvolatile Memory Array with Resistive Sense Element Bulk Erase and Unidirectional Write
KR1020127003432AKR101361570B1 (en)2009-07-102010-07-07Non―volatile memory array with resistive sense element block erase and uni-directional write
US12/903,011US8213259B2 (en)2008-10-102010-10-12Non-volatile memory cell with resistive sense element block erase and uni-directional write

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