US7362615B2 - Methods for active boosting to minimize capacitive coupling effect between adjacent gates of flash memory devices - Google Patents

Abstract

A NAND flash memory device incorporates a unique booster plate design. The booster plate is biased during read and program operations and the coupling to the floating gates in many cases reduces the voltage levels necessary to program and read the charge stored in the gates. The booster plate also shields against unwanted coupling between floating gates. Self boosting, local self boosting, and erase area self boosting modes used with the unique booster plate further improve read/write reliability and accuracy. A more compact and reliable memory device can hence be realized according to the present invention.

Description

CROSS REFERENCE TO RELATED APPLICATIONS

The present invention is related to an application being filed concurrently herewith by Tuan D. Pham et al., entitled “Active Boosting to Minimize Capacitive Coupling Effect Between Adjacent Gates of Flash Memory Devices” which application is incorporated herein in its entirety by this reference and U.S. patent application Ser. No. 10/774,014 entitled “Self-Boosting System for Flash Memory Cells” to Hemink et al., which are hereby incorporated by this reference in their entirety, as are all patents and applications referred to in the present application.

FIELD OF THE INVENTION

This invention relates generally to non-volatile semiconductor memories of the flash EEPROM (Electrically Erasable and Programmable Read Only Memory) type, particularly to structures and methods of operating NAND types of memory cell arrays.

BACKGROUND OF THE INVENTION

There are many commercially successful non-volatile memory products being used today, particularly in the form of small form factor cards, which use an array of flash EEPROM cells.

One popular flash EEPROM architecture utilizes a NAND array, wherein a large number of strings of memory cells are connected through one or more select transistors between individual bit lines (“BLs”) and a reference potential. NAND arrays are well known in the art and are widely utilized in various consumer devices at this time. A portion of such an array is shown in plan view inFIG. 2A. BL0–BL4 (of which BL1–BL3 are also labeled12–16) represent diffused bit line connections to global vertical metal bit lines (not shown). Although four floating gate memory cells are shown in each string, the individual strings typically include 16, 32 or more memory cell charge storage elements, such as floating gates, in a column. Control gate (word) lines labeled WL0–WL3 (labeled P2 inFIG. 2B, a cross-sectional along line A—A ofFIG. 2A) and string selection lines SGD and SGS extend across multiple strings over rows of floating gates, often in polysilicon (labeled P1 inFIG. 2B). However, fortransistors40 and50, the control gate and floating gate may be electrically connected (not shown). The control gate lines are typically formed over the floating gates as a self-aligned stack, and are capacitively coupled with each other through an intermediatedielectric layer19, as shown inFIG. 2B. The top and bottom of the string connect to the bit line and a common source line respectively, commonly through a transistor using the floating gate material (P1) as its active gate electrically driven from the periphery. This capacitive coupling between the floating gate and the control gate allows the voltage of the floating gate to be raised by increasing the voltage on the control gate coupled thereto. An individual cell within a column is read and verified during programming by causing the remaining cells in the string to be turned on by placing a relatively high voltage on their respective word lines and by placing a relatively lower voltage on the one selected word line so that the current flowing through each string is primarily dependent only upon the level of charge stored in the addressed cell below the selected word line. That current typically is sensed for a large number of strings in parallel, in order to read charge level states along a row of floating gates in parallel.

Relevant examples of NAND type flash memories and their operation are provided in the following U.S. Patents/Patent Applications, all of which are incorporated herein by reference in their entirety: U.S. Pat. Nos. 5,570,315; 5,774,397; 6,046,935, 6,456,528 and 6,522,580.

The charge storage elements of current flash EEPROM arrays are most commonly electrically conductive floating gates, typically formed from doped polysilicon material. However, other materials with charge storing capabilities, that are not necessarily electrically conductive, can be used as well. An example of such an alternative material is silicon nitride. Such a cell is described in an article by Takaaki Nozaki et al., “A 1-Mb EEPROM with MONOS Memory Cell for Semiconductor Disk Application” IEEE Journal of Solid-State Circuits, Vol. 26, No. 4, April 1991, pp. 497–501.

Memory cells of a typical non-volatile flash array are divided into discrete blocks of cells that are erased together. That is, the block contains the minimum number of cells that are separately erasable together as an erase unit, although more than one block may be erased in a single erasing operation. Each block typically stores one or more pages of data, a page defined as the minimum number of cells that are simultaneously subjected to a data programming and read operation as the basic unit of programming and reading, although more than one page may be programmed or read in a single operation. Each page typically stores one or more sectors of data, the size of the sector being defined by the host system. An example is a sector of 512 byes of user data, following a standard established with magnetic disk drives, plus some number of bytes of overhead information about the user data and/or the block in which it is stored.

As in most all integrated circuit applications, the pressure to shrink the silicon substrate area required to implement some integrated circuit function also exists with flash EEPROM arrays. It is continually desired to increase the amount of digital data that can be stored in a given area of a silicon substrate, in order to increase the storage capacity of a given size memory card and other types of packages, or to both increase capacity and decrease size. Another way to increase the storage density of data is to store more than one bit of data per memory cell charge storage element. This is accomplished by dividing the allowable voltage or charge storage window of a charge storage element into more than two states. The use of four such states allows each cell to store two bits of data, eight states stores three bits of data per cell, and so on. Operation of a multiple state flash EEPROM structure is described in U.S. Pat. Nos. 5,043,940; 5,172,338, 5,570,315 and 6,046,935.

A typical architecture for a flash memory system using a NAND structure will include NAND arrays, where each array includes several NAND strings. For example,FIG. 3A shows only threeNAND strings11,13 and15 of the memory array ofFIG. 2A, which array contains more than three NAND strings. Each of the NAND strings ofFIG. 3A includes two select transistors and four memory cells. For example,NAND string11 includes select transistors20 and30, andmemory cells22,24,26 and28.NAND string13 includesselect transistors40 and50, andmemory cells42,44,46 and48. Each string is connected to the source line by its select transistor (e.g. select transistor30 and select transistor50). A selection line SGS is used to control the source side select gates. The various NAND strings are connected to respective bit lines byselect transistors20,40, etc., which are controlled by select line SGD. In other embodiments, the select lines do not necessarily need to be in common. Word line WL3 is connected to the control gates for memory cell22 andmemory cell42. Word line WL2 is connected to the control gates formemory cell24 andmemory cell44. Word line WL1 is connected to the control gates for memory cell26 andmemory cell46. Word line WL0 is connected to the control gates formemory cell28 andmemory cell48. As can be seen, each bit line and the respective NAND string comprise the columns of the array of memory cells. The word lines (WL3, WL2, WL1 and WL0) comprise the rows of the array. Each word line connects the control gates of each memory cell in the row. For example, word line WL2 is connected to the control gates formemory cells24,44, and64.

FIG. 3B is a circuit diagram depicting a number of NAND arrays, with each array controlled by a set of common word lines. The array ofFIGS. 2A and 3 appears as the top array inFIG. 3B. As shown inFIG. 3B, each NAND string (e.g.11,13) in the same array is connected to one of a plurality ofbit lines12,14, . . . and to a common source line, and are controlled by a common set of word lines (WL0–WL3).

Each memory cell can store data (analog or digital). When storing one bit of digital data (binary memory cell), the range of possible threshold voltages of the memory cell is divided into two ranges which are assigned logical data “1” and “0”. In one example of a NAND type flash memory, the voltage threshold is negative after the memory cell is erased, and defined as logic “1.” The threshold voltage after a program operation is positive and defined as logic “0.” When the threshold voltage is negative and a read is attempted with 0 volt applied to its control gate, the memory cell will conduct current to indicate logic one is being stored. When the threshold voltage is positive and a read operation is attempted, the memory cell will not turn on, which indicates that logic zero is stored. A memory cell can also store multiple levels of information, for example, multiple bits of digital data. In the case of storing multiple levels of data, the range of possible threshold voltages is divided into the number of levels of data. For example, if four levels of information are stored, there will be four threshold voltage ranges, each range assigned to one data value. Memories storing data by differentiation between multiple (i.e. more than two) ranges of threshold voltage are known as multiple state memories. In one example of a NAND type memory, the threshold voltage after an erase operation is negative and defined as “11”. Positive threshold voltages are used for the states of “10”, “01”, and “00.”

When programming a NAND flash memory cell, a program voltage is applied to the control gate and the channel area of the NAND string that is selected for programming is grounded (0V). Electrons from the channel area under the NAND string are injected into the floating gate. When electrons accumulate in the floating gate, the floating gate becomes negatively charged and the threshold voltage of the cell is raised. To ground the channel area of the selected NAND string, the corresponding bitline is grounded (0 volt), while the SGD is connected to a sufficiently high voltage (typically V_ddat for example 3.3 volts) that is higher than the threshold voltage of the select transistors. To apply the program voltage to the control gate of the cell being programmed, that program voltage is applied on the appropriate word line. As discussed above, that word line is also connected to one cell in each of the other NAND strings that utilize the same word line. For example, when programmingcell24 ofFIG. 3A, the program voltage will also be applied to the control gate ofcell44 because both cells share the same word line. A problem arises when it is desired to program one cell on a word line without programming other cells connected to the same word line, for example, when it is desired to programcell24 and notcell44. Because the program voltage is applied to all cells connected to a word line, an unselected cell (a cell that is not to be programmed) on the word line may become inadvertently programmed. For example,cell44 is adjacent tocell24. When programmingcell24, there is a concern thatcell44 might unintentionally be programmed. The unintentional programming of the unselected cell on the selected word line is referred to as “program disturb.” More generally speaking, “program disturb” is used to describe any unwanted threshold voltage shift, either in the positive or negative direction, which can occur during a programming operation and is not necessarily limited to the selected word line.

Several techniques can be employed to prevent program disturb. One method known as “self boosting” (“SB”) is proposed by K. D. Suh et al. in “A 3.3 V 32 Mb NAND Flash Memory with Incremental Step Pulse Programming Scheme,” Journal of Solid-State Circuits, Vol 30, No. 11, November 1995, pp. 1149–55. During programming using the SB scheme, the channel areas of the unselected NAND strings are electrically isolated from their corresponding bit lines. Subsequently an intermediate pass voltage (e.g. 10 volts) is applied to the unselected word lines while a high program voltage (e.g. 18 volts) is applied to the selected word line. The channel areas of the unselected NAND strings are capacitively coupled to the unselected word lines, causing a voltage (e.g. six volts, assuming a coupling ratio of 0.6) to exist in the channel areas of the unselected NAND strings. This so called “Self Boosting” reduces the potential difference between the channel areas of the unselected NAND strings and the program voltage that is applied to the selected word line. As a result, for the memory cells in the unselected NAND strings and especially for the memory cells in such strings on the selected word line, the voltage across the tunnel oxide and hence the program disturb are significantly reduced. For more information regarding NAND arrays and boosting, please refer to U.S. patent application Ser. No. 10/774,014 to Gertjan Hemink, which is hereby incorporated by reference in its entirety.

A NAND string is typically (but not always) programmed from the source side to the drain side, for example, frommemory cell28 to memory cell22. When the programming process is ready to program the last (or near the last) memory cell of the NAND string, if all or most of the previously programmed cells on the string being inhibited (e.g. string13) were programmed, then there is negative charge in the floating gates of the previously programmed cells. Because of this negative charge on the floating gates, the pre-charging can not take place completely, resulting in a lower initial potential of the channel area under the NAND string and the subsequent self-boosting of such channel area becomes less effective as well. Therefore, the boosted potential in the channels of the unselected NAND strings may not become high enough and there still may be program disturb on the last few word lines. For example, when programming voltage is applied to WL3, ifcells48,46, and44 on a string that is inhibited were programmed, then each of thosememory cells44,46,48 has a negative charge on its floating gate which will limit the boosting level of the self boosting process and possibly cause program disturb oncell42.

In view of the above problem, as an improvement, T. S. Jung et al. proposed a local self boosting (“LSB”) technique in “A 3.3V 128 Mb Multi-Level NAND Flash Memory for Mass Storage Applications”, ISSCC96,Session 2, Flash Memory, Paper TP 2.1, IEEE, pp. 32.

In the LSB scheme, when applying a high programming voltage to the word line WL2, in order to reduce or prevent program disturb in regard tomemory cell44 on a string that is inhibited, 0 volts are applied to word lines WL1 and WL3 so thatmemory cells42 and46 are turned off. Then the channel potential inmemory cell44 is not or at least less influenced by the self boosting in the channel regions ofmemory cells42,46, and48. Therefore, the channel potential of the channel region ofmemory cell44 may be self boosted by the high programming voltage Vpgm to a voltage level that is higher than that achieved when the channel region ofmemory cell44 is influenced by the self boosting in the remainingmemory cells42,46, and48. This prevents program disturb whenmemory cell24 is being programmed. For a more detailed explanation of self boosting and local self boosting, please see U.S. Pat. No. 6,107,658, especially the description in columns 6–10.

Another technique proposed as an alternative to local self boosting is described in U.S. Pat. No. 6,525,964 to Tanaka et al. and is known as erased area self boosting (“EASB”). EASB differs from LSB in that, instead of turning off both memory cells on either side of the unselected cell to prevent program disturb of the cell as in LSB, EASB turns off only the memory cell on the source side of the unselected cell. For example, wherememory cell24 is being programmed, onlymemory cell46 is being turned off without turning offmemory cell42, in order to prevent program disturb atcell44.

While LSB and EASB maybe advantageous for many applications, certain problems are still encountered when these schemes are used in their current form, especially when the memory cell dimensions of future generation devices are continually reduced or scaled down. It is therefore desirable to provide improved boosting structures and schemes.

SUMMARY OF THE INVENTION

A NAND memory device made according to the present invention is less subject to errors in programming and reading, and can also be made more compact at the same time. A booster plate with fingers than run between but not above the wordlines provides coupling that is advantageous to operations without producing excessive coupling to the top of the wordlines, which can be detrimental to operations. Elimination of unwanted coupling between adjacent cells minimizes undesired shifts above or below voltage thresholds. This is especially important in multi-level applications where the levels are closely spaced. The processes used in making the booster plate and the device in which it is used are also described.

When combined with unique boosting methods, the combination of the plate and the methods minimizes the noise that might otherwise be present, and allows for lesser voltage levels to be utilized, when appropriate. This minimizes disturbs. These methods include self boost modes, local self boost modes, and erase area self boost modes.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross section ofdevice100, an embodiment of the present invention.

FIG. 2A is a plan view of a prior art memory array or device presented to provide background on how NAND flash memory devices operate.

FIG. 2B is a cross section of the prior art memory array shown inFIG. 2A.

FIG. 3A is an electrical schematic of the array seen inFIGS. 2A and 2B.

FIG. 3B is a circuit diagram depicting a number of NAND arrays such the one seen inFIGS. 2A and 2B, with each array controlled by a set of common word lines.

FIG. 4A is a cross section ofprior art device200.

FIG. 4B is a cross section ofprior art device300.

FIGS. 5A–5D illustratedevice100 at various stages during fabrication of the device.

FIGS. 6A and 6B illustrate different embodiments ofbooster plate110.

FIG. 6C illustrates a mask used in makingbooster plate110.

DESCRIPTION

The boosting structure and routines utilized in the present invention, generally speaking, make it possible to scale down a memory array or structure, and also result in more reliable reading and writing of data within such a structure. The structure provides increased capacitive coupling where needed, while at the same time avoids the consequence of having an increased capacitive coupling where it is detrimental to operations. In particular, as compared to a prior solution incorporating a booster plate, control gate (wordline) capacitance is reduced by nearly 80%, which reduces the wordline to wordline coupling and the unwanted noise associated with it. As compared to prior solutions without a booster plate, floating gate to floating gate coupling in the wordline direction is virtually eliminated.

FIG. 1 illustrates a cross section of memory structure ordevice100, an embodiment of the present invention. The cross section is taken perpendicular to the direction or axes of the wordlines, and would be parallel to section A—A discussed with regard to the prior art described and shown inFIG. 2A. A number ofcontrol gates112, also known as wordlines are illustrated in this cross section. The center wordline is referenced as the “nth” wordline and the position of the other wordlines is noted in relation to the referenced wordline. Generally, when the programming operations will be discussed later, the “nth” wordline will denote the selected wordline for a given operation.

As can be seen inFIG. 1, thewordlines112 are above floatinggates116. Thefingers110B ofbooster plate110 are located in between the wordlines and floating gates. Thebooster plate fingers110B extend from the bottom of the floating gates to the top of the wordlines. The fingers do not extend past the level of the top of thewordlines112 inFIG. 1. In other words, no portion of thebooster plate110 orfingers110B is located over or on top of the upper surface of the wordlines. In this or other embodiments, the fingers may have an upper surface that is higher than an upper surface of the wordlines when measured a from fixed point of reference such as the substrate or a layer upon the substrate. However, this should not be taken to mean that the booster plate and fingers are located above or over the wordlines. The bottom of thebooster plate110 is at the same level as the bottom of the floatinggates110. This can be at thetop level118A ofsubstrate118, although often there may be one more other layers between the bottom of the floatinggates110 and the top of thesubstrate118. The layers may also be present between the bottom of thebooster plate110 and the top of thesubstrate118. This cross section is taken in the middle of the array, in a location where thefingers110B are not connected. Although it cannot be seen in this cross section, the fingers of the booster plate are all tied to a linking portion of the booster plate at the periphery of the device, as can be seen inFIGS. 6A and 6B. The linking portion can be thought of as type of electrical bus. That is to say, theentire booster plate110 is conductive, and a voltage applied to the linking portion will be distributed to each of thefingers110B.FIG. 4A illustrates a cross section ofprior device200, which is similar todevice100 but lacks the booster plate.Fingers110B of thebooster plate110 result in a near elimination of the floating gate to floating gate coupling present in theprior device200. This minimizes disturbs and allows the usage of lower voltage levels in various operations, which further allows for scaling down of the device.

Because thebooster plate110 indevice100 does not extend above the wordlines, there will be limited if any coupling to the top portion of the wordlines. This is in contrast to theprior art device300 shown inFIG. 4B. InFIG. 4B, the portion ofdevice300 illustrated in this cross section is structurally similar to that shown inFIG. 1 with the exception of the booster plate. Booster plate111 ofdevice300 has a solidupper plate portion111B present above the top surface ofwordlines112. Essentially, the booster plate111 indevice300 covers the wordlines and floating gates of the memory array like a (continuous) blanket. This provides a high level of coupling between plate111 and thecontrol gates112 and floatinggates116. However, as will be discussed later, such a high degree of coupling is not advantageous because it dramatically increases the overall wordline or control gate capacitance. As can be seen in Table M.2, the total control gate capacitance indevice300 is 78% higher than that ofdevice200 and 42% higher than indevice100 embodying the present invention. Control gate (“CG”) coupling presents noise problems in read and write operations and is therefore undesirable. This is especially a problem in multi-level memories, where the degree for error is quite low, and getting lower everyday. Furthermore, minimizing the noise and interference from excessive control gate coupling is key in reducing the scale and increasing the capacity of these flash devices.

Table M.1 below shows the relative floating gate (“FG”) capacitance values fordevice100 of the present invention versusprior art devices200 and300. As can be seen, the FG—FG coupling and FG-CG coupling is reduced to zero percent in the wordline direction. The FG—FG coupling is also slightly reduced in the bitline (“BL”) direction due to the increased overall capacitance.

TABLE M.1
FG capacitance

	200	300	100

FGn − CGn	Ccg	50.0%	50.0%	50.0%
FGn − CGn +		2.0%	0.0%	0.0%
1
FGn − CGn −		2.0%	0.0%	0.0%
1
FGn − FGn −		4.0%	0.0%	0.0%
1
FGn − FGn +		4.0%	0.0%	0.0%
1
FGn −	Cch	34.0%	34.0%	34.0%
CHANNELn
FGn − S/D		2.0%	0.0%	0.0%	(BL
					direction)
FGn − FGm		2.0%	2.0%	2.0%
FGn − Booster	Csp	0.0%	30.0%	30.0%
Total	Cfgtotal	100.0%	116.0%	116.0%

Table M.2 below illustrates the CG capacitance values fordevice100 of the present invention versusprior art devices200 and300. As can be seen in Table M.2, the total control gate capacitance indevice300 is 78% higher than that ofdevice200 and 42% higher than indevice100 embodying the present invention. As mentioned above, this dramatic increase in capacitance presents noise problems in read and write operations and is therefore undesirable.

TABLE M.2
CG Capacitance

	200	300	100

	CGn − FGn	52.0%	52.0%	52.0%
	CGn −FGn + 1	2.5%	0.0%	0.0%
	CGn − FGn − 1	2.5%	0.0%	0.0%
	CGn − CGn − 1	21.0%	0.0%	0.0%
	CGn −CGn + 1	21.0%	0.0%	0.0%
	CGn − S/D	1.0%	0.0%	0.0%
	CGn − Booster	0.0%	126.0%	84.0%
	Total	100.0%	178.0%	136.0%

Read Operations

In order to help in understanding the operation and advantages of the present invention, some examples of voltages used in read operations are shown in the tables below. It should be understood that these are only illustrative examples or embodiments and other values can of course be used with the present invention. Vplate is the voltage applied tobooster plate110.

During Read Operation:
Case 1:

	WL0	Vread
	WL1	Vread
	WLn − 2	Vread
	WLn − 1	Vread
	Sel WLn	0 V
	WLn + 1	Vread
	WLn + 2	Vread
	WL30	Vread
	WL31	Vread
	Vplate	Vread

Case 2:

	WL0	Vread
	WL1	Vread
	WLn − 2	Vread
	WLn − 1	Vread
	Sel WLn	0 V
	WLn + 1	Vread
	WLn + 2	Vread
	WL30	Vread
	WL31	Vread
	Vplate	Vread + Beta

Incase 2, Beta is preferably about 0.5 volts. The operation ofcase 2 minimizes read disturb issues because when the Vplate potential is increased by Beta, the Vpass value on the unselected WLs can be reduced to a level that eliminates or at least minimizes the Vread disturb effect for the unselected WLs. This reduction is possible because of the capacitive coupling effect between the fingers of the booster plate and memory cell-floating gates.

Program Operations

The memory cells ofdevice100 can be programmed in many different ways.Booster plate110 can be biased at different voltage levels for different cells or floating gates during operations, e.g. for a program operation. And of course, the voltage level of a selected wordline (and associated selected floating gate(s)) and unselected wordlines can also be varied. Use of thebooster plate110, with itsfingers110B that don't rise above the upper level or surface of the wordlines, allows for more precise and effective boosting control than in prior devices, for example,device300.

A self boost (“SB”) mode, local self boost (“LSB”) mode, and erase area self boost (“EASB”) mode will now be described. Other variations and modes may also be used with the structure of the present invention. Currently, the SB and EASB modes are preferable for use withindevice100.

Self Boost Mode

Examples of the Vplate bias potential during the SB mode are shown below for two different cases or scenarios.

TABLE SB1
During Programming Operations:
SB Mode (Self Boost) Case 1:

	WL0	Vpass
	WL1	Vpass
	WLn − 2	Vpass
	WLn − 1	Vpass
	Sel WLn	VPGM
	WLn + 1	Vpass
	WLn + 2	Vpass
	WL30	Vpass
	WL31	Vpass
	Vplate	Vpass~8 v

Biasing thebooster plate110 with the Vpass voltage level provides a very high self boosting potential.

TABLE SB2
SB Mode (Self Boost) Case 2:

	WL0	Vpass
	WL1	Vpass
	WLn − 2	Vpass
	WLn − 1	Vpass
	Sel WLn	VPGM
	WLn + 1	Vpass
	WLn + 2	Vpass
	WL30	Vpass
	WL31	Vpass
	Vplate	Vpass + Alpha

Although biasing the booster plate with the Vpass voltage level provides good self boosting, in order to minimize the disturb that may result from the Vpass voltage applied to unselected wordlines, it is desirable to minimize the Vpass level. The level of Vpass can be reduced by increasing the voltage Vplate applied to the booster plate by some amount Alpha. This is due to the coupling between the booster plate and the cell floating gates. Preferably, Alpha is about 0.5 volts in the current embodiment, but it can range up to several volts. Alpha will be selected based upon the particular structure of the device in order to minimize or eliminate the Vpass disturb effect.

As can be seen in the following tables, in comparison withprior device200, both self boosting cases allow for the program voltage Vpgm to be reduced while still applying the same voltage to the floating gate (e.g. 10v). As mentioned previously, this is beneficial for reducing disturbs and other unwanted coupling effects.

	TABLE SB3
	ProgramOperation SB mode

100

	200	case 1	case 2

SGD	VDD	VDD	VDD	VDD:	~2 v
SGS	0 v	VSG	VSG	VPGM1:	~20 v
Selected WL	VPGM1	VPGM2	VPGM3	VPASS1:	~8 v
Unselected	VPASS1	VPASS2	VPASS3	VPGM2:	~16.7 v
WL				VPASS2:	~8 v
Selected BL	0 v	0 v	0 v	VPGM3:	~16.3 v
Unselected	VDD	VDD	VDD	VPASS3:	~8 v
BL
Source	~1 v	~1 v	~1 v	a:	~0.5 v

Pwell	0 v	0 v	0 v	(VPGM2 <
Booster	N.A	VPASS2	VPASS3 + a	VPGM1)
Plate				(VPGM3 <
				VPGM2)

TABLE SB4
200	Selected Cell FG voltage = VPGM1 × Ccg/Cfgtotal
	20 v × 0.5 = 10v
100	Selected Cell FG voltage = VPGM2 × Ccg/Cfgtotal + VPASS2 ×
case1	Csp/Cfgtotal
	16.7 v × (0.5/1.16) + 8 × (0.3/1.16) = 10v
100	Selected Cell FG voltage = VPGM3 × Ccg/Cfgtotal + (VPASS3 +
case2	a) × Csp/Cfgtotal
	16.3 v × (0.5/1.16) + (8 + 0.5) × (0.3/1.16) = 10 v

Local Self Boost Mode

While the SB mode and EASB mode are preferred, the LSB mode can also be implemented in or used withdevice100. In the LSB mode a positive voltage is not applied to the booster plate in order to isolate the selected cell from other cells.

TABLE LSB 1
LSB Mode (Local Self Boost):

	WL0	Vpass
	WL1	Vpass
	WLn − 2	Vpass
	WLn − 1	0 V
	Sel WLn	VPGM
	WLn + 1	0 V
	WLn + 2	Vpass
	WL30	Vpass
	WL31	Vpass
	Vplate	0 V

Erase Area Self Boost Mode

In the EASB mode the booster plate voltage can vary depending on which wordline is being programmed. There is no limit to the possible variations of voltages applied on different wordlines and the booster plate, especially given that the number of cells in a given NAND string and the associated wordlines are prone to increase over time. However, some examples will be given for a cell having 32 wordlines. In one example, the Vpgm voltages applied at the various wordlines can linearly increase or decrease from the first wordline to the last wordline (“WL”).

In another example, for lower WLs such as WL0 to WL3, while being programmed at Vpgm, the booster plate voltage Vplate can range up to the Vpass value. For middle WLs such as WL4 to WL27, while being programmed at Vpgm, the booster plate voltage Vplate is at or around the Vread value. For higher WLs such as WL28 to WL31, while being programmed at Vpgm, the booster plate voltage Vplate can be at or around the 0V value.

EASB Case 1

InEASB case 1, a voltage of approximately Vread is placed on thebooster plate110, as seen in the tables below. In comparison to theprior design200 lacking the booster plate, the level of Vpgm is less. Again, this is advantageous in lessening disturbs and other unwanted coupling.

	TABLE EASB 1.1
	ProgramOperation
	EASB mode

		100
	200	case 1

SGD	VDD	VDD	VDD:	~2 v
SGS	0 v	VSG	VPGM1:	~20 v
Unselected WL max	VPASS1	VPASS2	VPASS1:	~8 v
Unselected WLn + 2	VPASS1	VPASS2	VPGM2:	~19.2 v
Unselected WL + 1	VPASS1	VPASS2	VPASS2:	~8 v
Selected WLn	VPGM1	VPGM2	VREAD2:	~5 v

Unselected WLn − 1	0 v	0 v	(VPGM2 < VPGM1)
Unselected WLn − 2	VPASS1	VPASS2
Unselected WL 0	VPASS1	VPASS2
Selected BL	0 v	0 v
Unselected BL	VDD	VDD
Source	~1 v	~1 v
Pwell	0 v	0 v
Booster Plate	N.A.	VREAD2

TABLE EASB 1.2
200	Selected Cell FG voltage = VPGM1 × Ccg/Cfgtotal
	20 v × 0.5 = 10v
100	Selected Cell FG voltage = VPGM2 × Ccg/Cfgtotal + VPASS2 ×
	Csp/Cfgtotal
	19.2 v × (0.5/1.16) + 5 × (0.3/1.16) = 10 v

EASB Case 2

Case 2 of the EASB mode improves uponEASB case 1 and is the preferred EASB mode. This is because lower program voltages can be used for many of the programming operations. While in some instances a higher program voltage is used, as compared to what would be used bydevice200 without a booster plate, overall, the use of this EASB programming mode with thecurrent booster plate110 is desirable.

	TABLE EASB 2.1
	ProgramOperation EASB mode

		100
	200	case 2

	all WLs	WL0	WLcenter	WLmax

SGD	VDD	VDD	VDD	VDD
SGS	0 v	VSG	VSG	VSG
Unselected	VPASS1	VPASS2	VPASS2	VPASS2
WL max
Unselected	VPASS1	VPASS2	VPASS2	VPASS2
WLn + 2
Unselected	VPASS1	VPASS2	VPASS2	VPASS2
WLn + 1
Selected	VPGM1	VPGM2_0	VPGM2_cen	VPGM2_max
WLn
Unselected	0 v	0 v	0 v	0 v
WLn − 1
Unselected	VPASS1	VPASS2	VPASS2	VPASS2
WLn − 2
Unselected	VPASS1	VPASS2	VPASS2	VPASS2
WL 0
Selected BL	0 v	0 v	0 v	0 v
Unselected	VDD	VDD	VDD	VDD
BL
Source	~1 v	~1 v	~1 v	~1 v
Pwell	0 v	0 v	0 v	0 v
Booster	N.A.	VPASS2	VREAD2	0 v
Plate

TABLE EASB 2.2
VDD:	~2 v
VPGM1:	~20 v
VPASS1:	~8 v
VPGM2_0:	~16.7 v
VPGM2_cen:	~19.2 v
VPGM2_max:	~23.2 v
VPASS2:	~8 v
VREAD2:	~5 v

TABLE EASB 2.3
200	Selected Cell FG voltage = VPGM1 × Ccg/Cfgtotal
	20 v × 0.5 = 10v
100	Selected Cell FG voltage = VPGM2 × Ccg/Cfgtotal +
case2	VPASS2 × Csp/Cfgtotal
WL0	16.7 v × (0.5/1.16) + 8 × (0.3/1.16) = 10v
100	Selected Cell FG voltage = VPGM2 × Ccg/Cfgtotal +
case2	VPASS2 × Csp/Cfgtotal
WL_cen	19.2 v × (0.5/1.16) + 5 × (0.3/1.16) = 10v
100	Selected Cell FG voltage = VPGM3 × Ccg/Cfgtotal +
case2	(VPASS3 + a) × Csp/Cfgtotal
WL_max	23.2 v × (0.5/1.16) + 0 × (0.3/1.16) = 10 v

Fabrication

Device100 and other embodiments of the present invention can be made in a number of ways. One way to make such a device is described below, for illustrative purposes.

FIGS. 5A–5D illustratedevice100 at various stages during fabrication of the device. The standard NAND fabrication processes are used to make the memory array structure underlying the boron phosphorous silicon glass (“BPSG”)layer150 deposited upon the structure, as seen inFIG. 5A. After it is deposited, there are two options. Inoption 1, it is left unpolished. In option two, the BPSG layer undergoes chemical mechanical polishing (“CMP”). About 1000 angstroms of the layer are left over the gate structure after the CMP. The resultant structure is seen inFIG. 5B.

Next, a mask is applied before theBPSG layer150 is etched for oxide removal. Once the mask is in place the oxide is etched. Any known etching method can be implemented but reactive ion etching or HF vapor etching are preferred. About 7000 angstroms of the BPSG will be removed, but full oxide islands will be kept in the SG areas, and full oxide will be left in the periphery to keep the periphery circuit intact. Then the photo resist of the mask will be removed and the structure cleaned, followed by a post barrier SiN oxidation step. The resultant structure is shown inFIG. 5C.

Next, a mask with a pattern such as that seen inFIG. 6C is made upon the structure. An RIE or HF wet etch or equivalent is performed and the BPSG is etched in the wordline area. If RIE is employed, the sides of the wordlines will have silicon oxide, and the thickness of the bottom of the oxide can be controlled. In the case of an HF etch, silicon dioxide is etched and an additional dielectric may be deposited in certain embodiments. Optionally, a thick layer of approximately five nanometers of SiN or SiO may be deposited after the etch.

Next, a layer of tungsten or poly or another equivalent material is deposited. This layer is about 500 angstroms thick, for example. It is then chemically mechanically polished to the level of the gate barrier nitride. This is followed by TEOS deposition. After that, a (photolithographic) contact mask pattern is made (patterned and etched) for thebitline contact154 andperiphery contact158. Alternatively, a two step mask and mask etch process can be utilized rather than a one step process. After that, another layer of tungsten or poly is deposited and etched back. Then another mask is made for a metallic layer and a TEOS etch is performed. The metal (tungsten, aluminum, or copper etc.) is deposited and then chemically mechanically polished. The resultant structure can be seen inFIG. 5D.Booster plate110 can be seen between the various memory cells.

FIGS. 6A and 6B illustrate different embodiments ofbooster plate110. As mentioned previously,booster plate110 comprisesfingers110B and linking or connectingportion110A.Plate110 is connected to thebooster plate transistor120 and in turn to the control circuitry of the device.

Claims (11)

1. In a flash memory device having strings of transistors of a NAND architecture comprising a first select gate, a plurality of floating gates, and a second select gate, a method comprising:

providing a plurality of wordlines perpendicular to the axes of the strings, each wordline of the plurality situated above floating gates of the strings; and

providing a booster plate comprising a plurality of fingers and a portion linking the fingers, the fingers running parallel to the wordlines and located between adjacent wordlines but not covering an upper surface of the wordlines; and

reading the charge stored on a floating gate under a selected wordline by applying a read voltage to a plurality of unselected wordlines and applying a voltage greater than the read voltage to the booster plate.

2. In a flash memory device having strings of transistors of a NAND architecture comprising a first select gate, a plurality of floating gates, and a second select gate, a method comprising:

providing a plurality of wordlines perpendicular to the axes of the strings, each wordline of the plurality situated above floating gates of the strings; and

providing a booster plate comprising a plurality of fingers and a portion linking the fingers, the fingers running parallel to the wordlines and located between but not over adjacent wordlines; and

programming a selected floating gate by applying a first voltage level to a wordline above the selected floating gate while applying a second voltage level less than said programming voltage to unselected wordlines while also applying a third voltage level greater than or equal to the second voltage level but less than the first voltage level to the booster plate.

3. The method ofclaim 2, wherein providing the booster plate and applying the third voltage level to the booster plate reduces the first voltage level necessary to produce a given charge within the selected floating gate had the booster plate not been provided and the third voltage level not applied.

4. A method of reducing a program voltage level necessary to program a cell of a flash memory device comprising strings of memory cells, the strings comprising a plurality of floating gates, the method comprising:

providing a plurality of wordlines perpendicular to the axes of the strings, each wordline of the plurality situated above floating gates of the strings;

providing a booster plate;

applying the program voltage to a wordline of the plurality located above a selected floating gate;

applying a second voltage to the selected floating gate with the booster plate at the same time the program voltage is applied; and applying a third voltage to the wordlines located above one or more unselected floating gates, the level of the third voltage less than the level of the second voltage.

5. In a flash memory of a device with a NAND architecture having strings of transistors comprising a first select gate, a plurality of floating gates, and a second select gate, and wordlines perpendicular to the axes of the strings, each wordline of the plurality situated above floating gates of the strings, a method comprising:

providing a booster plate comprising a plurality of fingers and a portion linking the fingers, the fingers running parallel to the wordlines and located between but not above adjacent wordlines; and

applying a programming voltage having a first voltage level to a selected wordline, the first voltage level depending on the position of the wordline in the strings;

applying a bias voltage to the booster plate, the bias voltage having a second voltage level, the second voltage level depending on the position of the selected wordline in the strings.

6. The method ofclaim 5, wherein if the selected wordline is the first wordline the bias voltage is equal to V_pass.

7. The method ofclaim 5, wherein if the selected wordline is the last wordline the bias voltage is equal to zero volts.

8. The method ofclaim 5, wherein if the selected wordline is in the center of the string, the bias voltage is equal to V_read.

9. The method ofclaim 5, wherein the first voltage level increments linearly from the first to last position in the string.

10. The method ofclaim 9, wherein the booster plate bias voltage increments linearly from the last to first position in the string.

11. The method ofclaim 5, wherein one of the first voltage level and the booster plate bias voltage drops while the other increases with an increasing position within the string.

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