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US5664456A - Ultrasonic transducer - Google Patents

Ultrasonic transducer
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Publication number
US5664456A
US5664456AUS08/720,081US72008196AUS5664456AUS 5664456 AUS5664456 AUS 5664456AUS 72008196 AUS72008196 AUS 72008196AUS 5664456 AUS5664456 AUS 5664456A
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layer
ultrasonic transducer
housing
diaphragm
matching layer
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US08/720,081
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Manfred Eckert
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Endress and Hauser SE and Co KG
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Endress and Hauser SE and Co KG
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Assigned to ENDRESS & HAUSER GMBH & COreassignmentENDRESS & HAUSER GMBH & COASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).Assignors: ECKERT, MANDFRED
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Abstract

This ultrasonic transducer has a high chemical resistance and a small diameter and can be used over a very wide temperature range. It has a single-piece, can-shaped housing (1) sealed off by a diaphragm (12), a sensor element (2), arranged in the housing (1), for transmitting and receiving ultrasound, a matching layer (3) arranged between the diaphragm (12) and the sensor element (2), a stress equalizing layer (5) which completely encloses the sensor element (2) apart from a front area adjoining the matching layer (3) and is made of a thermosetting plastic, especially of an epoxy resin, a clamping ring (4) coaxially enclosing the matching layer (3), and a damping layer (6) that fills a cavity that remains in the housing (1) and is bounded by the clamping ring (4), the stress equalizing layer (5) and the housing (1).

Description

BACKGROUND OF THE INVENTION
The invention relates to an ultrasonic transducer, in particular for measuring a filling level, for example in a container, or for measuring a level, for example in a channel or on a conveyor belt.
An ultrasonic pulse emitted by the ultrasonic transducer is reflected at the surface of the filling material. The propagation time of the ultrasonic pulse from the sensor to the surface and back is determined and the filling level or the level is determined therefrom.
DESCRIPTION OF THE PRIOR ART
Ultrasonic transducers of this type are used in many sectors of industry, for example in the water supply and sewage sector and in the chemical industry. In particular in the chemical industry, ultrasonic transducers of high chemical resistance are necessary which can be used over a wide temperature range.
The ultrasonic transducers preferably have a small diameter, for example in order that the openings in the container or of a sound guiding tube in which they are to be installed can likewise be small.
To generate the ultrasonic pulse, use is normally made of a disk-shaped piezoelectric element arranged in a can-like housing, the element being excited into oscillations. The bottom of the housing has the function of a diaphragm onto which the oscillations are transmitted and from which the ultrasonic pulses are then radiated.
Between the piezoelectric element and the diaphragm there is arranged a plastic layer, referred to below as matching layer, for matching the acoustic impedance of the piezoelectric element to the acoustic impedance of the medium into which the ultrasonic pulses are to be transmitted.
A cavity which remains in the housing and is bounded by a circular surface facing away from the diaphragm and a cylindrical covering surface of the piezoelectric element is filled with a damping layer which is made, for example, of a plastic. This damping layer serves for the purpose of minimizing the radiation of sound energy in the radial direction and in the direction facing away from the diaphragm.
Such ultrasonic transducers normally have a diameter from 7 cm to 25 cm and are operated in a frequency range from 15 kHz to 60 kHz. The smaller the dimensions of the piezoelectric element and hence of the ultrasonic transducer, the greater is the transmission frequency.
On account of the temperature behavior of the matching layer, the damping layer, the piezoelectric element and the housing, in particular the temperature dependency of the speeds of sound and the sound impedances of these components, their use is normally restricted to a temperature range from -20° C. to 80° C.
U.S. Pat. No. 4,130,018 describes an ultrasonic transducer having
a can-shaped housing sealed off by a laminated-on diaphragm,
a sensor element, arranged in the housing, for transmitting and receiving ultrasound,
a matching layer, arranged between the diaphragm and the sensor element and made of polyurethane, in which hollow glass spheres are embedded,
a first layer, surrounding a section of the sensor element facing away from the diaphragm, made of polyurethane for damping,
in whose portions directly adjacent to the sensor element there are arranged lead spheres for the absorption of sound energy,
a second layer, coaxially enclosing a section of the matching layer facing towards the diaphragm, for damping and made of solid polyurethane and
a third damping layer that fills a cavity that remains in the housing and is bounded by the first and the second layer and the housing, said third damping layer being made of polyurethane foam.
The ultrasonic transducer described is operated at a frequency of 50 kHz and has corresponding dimensions. The sensor can be used over a temperature range of -30° C. to 70° C.
Since the diaphragm which is laminated on the housing is very thin in comparison with the matching layer, it causes no significant additional stresses which load the sensor element mechanically over the temperature. The connecting points between the housing and the diaphragm, however, reduce the chemical resistance of the ultrasonic transducer.
In order that the most constant speeds of sound and sound impedances are present, the matching layer according to U.S. Pat. No. 4,130,018 is to be constructed approximately nine times as thick as the diaphragm. Since the diaphragm is laminated on, it can have a low thickness. However, a very thin diaphragm, made for example from a thermoplastic with a thickness of 0.5 mm, is not diffusion-tight. Therefore, in the long term, gases diffuse through the diaphragm and can effect destruction of the connection between the matching layer and the diaphragm.
In order to ensure a maximum energy transfer through the matching layer, the diaphragm and the matching layer are to be constructed such that the sum of the propagation times of the ultrasound through the matching layer and the diaphragm is equal to one quarter or an odd multiple of one quarter of the periodic duration of the ultrasound. Since the matching layer effects an attenuation of the ultrasound, however, in the case of practical applications a propagation time of one quarter of the periodic duration is to be required, and not an odd multiple thereof.
Since the minimum thickness of the diaphragm is determined by the application as a result of the requirement for chemical resistance and diffusion resistance, the two dimensioning rules mentioned above supply an upper limit for the frequency range or a lower limit for the diameter of the ultrasonic transducer.
SUMMARY OF THE INVENTION
It is an object of the invention to specify an ultrasonic transducer which has a high chemical resistance and a small diameter and can be used over a very wide temperature range.
To this end, the invention comprises an ultrasonic transducer having
a single-piece can-shaped housing sealed off by a diaphragm,
a sensor element, arranged in the housing, for transmitting and receiving ultrasound,
a matching layer arranged between the diaphragm and the sensor element,
a stress equalizing layer which completely encloses the sensor element apart from a front area adjoining the matching layer and is made of a thermosetting plastic, especially of an epoxy resin,
a clamping ring coaxially enclosing the matching layer, and
a damping layer that fills a cavity that remains in the housing and is bounded by the clamping ring, the stress equalizing layer and the housing.
According to one refinement of the invention, the clamping ring has in the radial direction a thickness in which the sum of the propagation times of the ultrasound through the clamping ring and through the housing in the radial direction is equal to half the periodic duration of the ultrasound.
According to another refinement of the invention, the clamping ring consists of a thermosetting plastic, especially of an epoxy resin, having a high density, especially of 1.7 g/cm3 to 2.0 g/cm3, a high acoustic impedance, especially of about 40·105 kg/s m2, and a low coefficient of thermal expansion, especially of about 50·10-6 1/K.
According to a further refinement of the invention, the stress equalizing layer consists of a thermosetting plastic, especially of an epoxy resin, having a high density, especially about 1.5 g/cm3, a high acoustic impedance, especially of about 35·105 kg/s m2, and a low coefficient of thermal expansion, especially of about 50·10-6 1/K.
According to a further refinement of the invention, the matching layer consists of an epoxy resin filled with hollow glass spheres, especially having a density of 0.4 g/cm3 to 0.6 g/cm3, an acoustic impedance of about 11·105 kg/s m2, and a low coefficient of thermal expansion of about 25·10-6 1/K.
According to a further refinement of the invention, the matching layer and the diaphragm have a thickness in which the sum of the propagation times of the ultrasound in the matching layer and in the diaphragm is equal to one quarter of the periodic duration of the ultrasound.
According to a further refinement of the invention, the damping layer consists of a silicone elastomer.
According to a further refinement of the invention, the stress equalizing layer consists of a material whose glass point lies at a temperature which is located approximately in the center of the temperature range in which the ultrasonic transducer can be used.
BRIEF DESCRIPTION OF THE DRAWING
The invention and its advantages are explained in more detail using the FIGURE of the drawing, in which an exemplary embodiment is shown; the FIGURE shows a longitudinal section through an ultrasonic transducer.
BRIEF DESCRIPTION OF THE DRAWING FIGURE
The FIGURE is a cross-sectional view of the exemplary embodiment of the invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
The exemplary embodiment shown in FIG. 1 of an ultrasonic transducer has a can-shaped, single-piece housing 1. This comprises ahollow cylinder 11 which is sealed off at one end by adiaphragm 12. Thehousing 1 consists of a plastic, preferably of a thermoplastic having a high chemical resistance, for example polyvinyl difluoride (PVDF) or polypropylene (PP). Thediaphragm 12 has a thickness of, for example, 2 mm, by which means high chemical and mechanical resistance is ensured.
Arranged in thehousing 1 is asensor element 2 which serves alternately for the transmission and for the reception of ultrasonic pulses. It is, for example, a cylindrical piezoelectric element, in particular made of lead titanate zirconate, on whose circular surfaces there are arranged electrodes, for example silver metallizations applied to the piezoelectric element. Electrical connectinglines 21, 22 are connected to the electrodes, for example by soldering on.
Thesensor element 2 is intended to be excited by an electronic circuit, not shown in the FIGURE, into pulsed oscillations. Following each transmission of an ultrasonic pulse, thesensor element 2 serves as a receiving element. As a result of the ultrasonic pulse reflected at a surface, for example of a filling material, thesensor element 2 is excited into oscillations. The resulting piezoelectric voltage is intended to be fed via the connectinglines 21, 22 to a further electronic circuit, likewise not shown, which determines the propagation time of the ultrasonic pulse, determines therefrom the filling level, for example, and makes a signal corresponding to the filling level accessible for further processing and/or indication.
To match the acoustic impedance of thesensor element 2 to the acoustic impedance of the medium into which the ultrasonic pulses are to be sent, amatching layer 3 made of a plastic is arranged between thesensor element 2 and thediaphragm 12. Said plastic is preferably an epoxy resin. In comparison with polyurethane or silicone elastomers, epoxy resin has a low coefficient of thermal expansion.
In addition, epoxy resin has a virtually constant speed of sound over a very wide temperature range from -50° C. to 120° C. and a virtually constant sound impedance. The deviations of these two values over the entire temperature range from -50° C. to 120° C. are less than 4.5%.
To match the acoustic impedance of the piezoelectric element to the acoustic impedance of the medium into which the ultrasonic pulses are to be transmitted, hollow spheres, made for example of glass, are arranged in thematching layer 3.
In order to ensure a maximum energy transfer through thematching layer 3, thediaphragm 12 and thematching layer 3 are to be constructed such that the sum of the propagation times of the ultrasound in thematching layer 3 and in thediaphragm 12 is equal to one quarter of the periodic duration of the ultrasound.
In the case of a transmission frequency of 70 kHz and adiaphragm 12 made of PVDF with a thickness of 2 mm, there results for amatching layer 3 made of an epoxy resin having a speed of sound of 2200 m/s a thickness of thematching layer 3 of 4 mm. In the case of a correspondingly smaller thickness of thematching layer 3, still higher frequencies of up to 100 kHz can be realized. In the case of identical material selection and identical diaphragm thickness, the thickness of the matching layer at a frequency of 100 kHz is about 1.5 mm.
Thematching layer 3 is, for example, a turned part which is intended to be connected to thesensor element 2 by means of an epoxy adhesive. It has acutout 31, through which the connectingline 22 is led into thehousing 1.
Stresses which arise as a result of the fact that thediaphragm 12 has a greater coefficient of thermal expansion than thematching layer 3 are transmitted through thematching layer 3 to thesensor element 2. At high temperatures, thesensor element 2 is thereby subjected essentially to pressure stresses; at low temperatures essentially to tensile stresses. Piezoelectric elements are relatively rugged with respect to pressure stresses, but on the other hand tensile stresses can be absorbed only to a very low extent by thesensor element 2. Especially at very low temperatures, the thermal stresses therefore cause cracks or breakage of thesensor element 2. This is all the more so, the smaller the thickness of thematching layer 3 with respect to the thickness of thediaphragm 12. However, it is exactly at high frequencies that athin matching layer 3 and athick diaphragm 12 are required, for the reasons cited above.
Thesensor element 2 is therefore enclosed, apart from a front area adjoining thematching layer 3, by astress equalizing layer 5 made of a thermosetting plastic, especially of an epoxy resin, having a high density, especially of about 1.5 g/cm3, a high acoustic impedance, especially of about 35·105 kg/s m2, and a low coefficient of thermal expansion of about 50·10-6 1/K.
Thestress equalizing layer 5 serves to protect thesensor element 2 from stresses which occur. Since it encloses thesensor element 2 symmetrically, only symmetrical forces act upon the latter. In particular, no notch effects occur. The greatest stresses occur, as finite element calculations show, in thestress equalizing layer 5 and no longer in thesensor element 2. The fatigue strength of thesensor element 2 in the installed state is considerably increased thereby and cracks or breakage of thesensor element 2 no longer occur. By this means, the ultrasonic transducer can be used even at very low temperatures of down to -50° C.
The glass point of the material of thestress equalizing layer 5 lies preferably in the center of the temperature range in which the ultrasonic transducer is to be used, for example between 30° C. and 40° C. in the case of a temperature range from -50° C. to 120° C. As a result, there is firm clamping of thesensor element 2 at low temperatures.
At high temperatures, firm clamping of thesensor element 2 is no longer absolutely necessary. In this range, that is to say above the glass point of the material of thestress equalizing layer 5, the latter is more elastic and is thus less sensitive to temperature-induced stresses. As a result of the abovementioned selection of the glass point, it is possible to use the ultrasonic transducer over a very large temperature range, from -50° C. to 120° C.
In addition, by virtue of the high acoustic impedance of thestress equalizing layer 5, in particular of about 35·105 kg/s m2, damping of the ultrasound radiated in the radial direction and in the direction away from the diaphragm is effected.
For the purposes of applying thestress equalizing layer 5, the composite oscillator formed by thesensor element 2 and thematching layer 3 is introduced, for example, into a mold, into which the liquid epoxy resin is to be filled. For the purposes of fastening such a mold to the composite oscillator, thematching layer 3 has, on that side facing the sensor element, an offsetring 32. Epoxy resin offers the advantage that it adheres very well to a multiplicity of materials.
To improve the directional characteristics of the ultrasonic pulses to be transmitted, an annular clamping ring 4, which encloses the matching layer coaxially, is arranged on thediaphragm 12. The said clamping ring consists of a thermosetting plastic, preferably of an epoxy resin having a high density of 1.7 g/cm3 to 2 g/cm3, and effects firm clamping of thematching layer 3 in thehousing 1. As a result, amplitude peaks on the diaphragm edge are suppressed and the proportion of the sound energy which is emitted is increased.
The proportion of the sound energy which is available for generating the measuring signal at a predetermined frequency is thus considerably increased. This is advantageous in particular at high frequencies, since high-frequency ultrasonic waves experience a more severe attenuation in air than low-frequency waves.
At the same time, the radiation of sound energy in the radial direction is reduced by the clamping ring 4. For this purpose, the clamping ring 4 has a high acoustic impedance, especially of about 40·105 kg/s m2, and in the radial direction it has a thickness which is to be selected such that the sum of the propagation times of the ultrasound through the clamping ring 4 and through thehousing 1 in the radial direction is equal to half of the periodic duration of the ultrasound.
For a transmission frequency of, for example, 70 kHz and a clamping ring 4 made of epoxy resin with a density of 1.8 g/cm3 and a speed of sound of 2300 m/s, and in the case of ahousing 1 made of polyvinyl difluoride with a wall thickness of 2 mm, the result is a thickness of the clamping ring 4 of about 5 mm in the radial direction. A distance of 5 mm between thesensor element 2 and thehousing 1 is to be maintained in any case, in order that the oscillation behavior of thesensor element 2 is not disturbed by the mechanical coupling to thehousing 1. The dimensions of the ultrasonic transducer therefore remain unchanged by the clamping ring 4. At a frequency of 70 kHz, the ultrasonic transducer has an outer diameter of 3.8 cm; at a frequency of 100 kHz, the outer diameter is about 2.5 cm. It can be used over a temperature range from -50° C. to 120° C.
A cavity which remains in thehousing 1 and is bounded by the clamping ring 4, thestress equalizing layer 5 and thehousing 1 is filled with a damping layer 6 made of a plastic. This damping layer serves for the purpose of minimizing the radiation of sound energy in the radial direction and in the direction away from the diaphragm and it preferably consists of a silicone elastomer.

Claims (8)

I claim:
1. An ultrasonic transducer having
a single-piece can-shaped housing (1) sealed off by a diaphragm (12),
a sensor element (2), arranged in the housing (1), for transmitting and receiving ultrasound,
a matching layer (3) arranged between the diaphragm (12) and the sensor element (2),
a stress equalizing layer (5) which completely encloses the sensor element (2) except for a front side adjoining the matching layer (3) and is made of of an epoxy resin,
a clamping ring (4) coaxially enclosing the matching layer (3), and
a damping layer (6) that fills a cavity that remains in the housing (1) and is bounded by the clamping ring (4), the stress equalizing layer (5) and the housing (1).
2. The ultrasonic transducer as claimed in claim 1, in which the clamping ring (4) has in the radial direction a thickness in which the sum of the propagation times of the ultrasound through the clamping ring (4) and through the housing (1) in the radial direction is equal to half of the periodic duration of the ultrasound.
3. The ultrasonic transducer as claimed in claim 1, in which the clamping ring (4) consists of an epoxy resin, having a high density of 1.7 g/cm3 to 2.0 g/cm3, a high acoustic impedance of about 40·105 kg/s m2, and a low coefficient of thermal expansion of about 50·10-6 1/K.
4. The ultrasonic transducer as claimed in claim 1, in which the stress equalizing layer (5) consists of an epoxy resin, having a high density of 1.5 g/cm3, a high acoustic impedance of about 35·105 kg/s m2, and a low coefficient of thermal expansion of about 50·10-6 1/K.
5. The ultrasonic transducer as claimed in claim 1, in which the matching layer (3) consists of an epoxy resin filled with hollow glass spheres having a density of 0.4 g/cm3 to 0.6 g/cm3, an acoustic impedance of about 11·105 kg/s m2, and a low coefficient of thermal expansion of about 25·10-6 1/K.
6. The ultrasonic transducer as claimed in claim 1, in which the thickness of the matching layer (3) and the thickness of the diaphragm (12) are such that the sum of the propagation times of the ultrasound in the matching layer (3) and in the diaphragm (12) is equal to one quarter of the periodic duration of the ultrasound.
7. The ultrasonic transducer as claimed in claim 1, in which the damping layer (6) consists of a silicone elastomer.
8. The ultrasonic transducer as claimed in claim 1, in which the stress equalizing layer (5) consists of a material whose glass point lies at a temperature which is located approximately in the center of the temperature range in which the ultrasonic transducer can be used.
US08/720,0811995-09-281996-09-27Ultrasonic transducerExpired - LifetimeUS5664456A (en)

Applications Claiming Priority (2)

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EP95115281AEP0766071B1 (en)1995-09-281995-09-28Ultrasonic transducer
EP951152811995-09-28

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JP (1)JP2918102B2 (en)
CA (1)CA2185073C (en)
DE (1)DE59510158D1 (en)

Cited By (43)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US6142015A (en)*1997-04-102000-11-07Endress + Hauser Gmbh + Co.Method and assembly for overfill detection in liquid level sensing in a vessel by the pulse transit time technique
US6374676B1 (en)*1997-10-072002-04-23Robert Bosch GmbhUltrasonic transducer
US6412344B1 (en)*1999-11-152002-07-02Rosemount Aerospace Inc.Fluid level sensor with dry couplant
US6417599B2 (en)*2000-06-122002-07-09Murata Manufacturing Co., Ltd.Piezoelectric resonator, piezoelectric component, and producing method for the piezoelectric resonator
WO2003006932A1 (en)*2001-07-132003-01-23Endress + Hauser Flowtec AgMeasuring head for an ultrasonic flow meter
US6545947B1 (en)*1999-11-122003-04-08Matsushita Electric Industrial Co., Ltd.Acoustic matching material, method of manufacture thereof, and ultrasonic transmitter using acoustic matching material
US20030076009A1 (en)*2000-04-102003-04-24Markus HoffmanPiezoceramic bending transducer and use thereof
US6617765B1 (en)*1999-10-222003-09-09Thales Underwater Systems S.A.S.Underwater broadband acoustic transducer
US20030172743A1 (en)*1999-04-012003-09-18Xiaolei AoClamp-on flow meter system
US20040007061A1 (en)*2002-07-122004-01-15Forgue John R.Fluid level sensor
US6739203B1 (en)*2002-08-162004-05-25Feldman Marvin JUltrasonic transducer and flow sensor configuration
US20040123666A1 (en)*2002-12-312004-07-01Ao Xiaolei S.Ultrasonic damping material
DE10305003A1 (en)*2003-02-072004-08-19Jäger, Frank-MichaelLiquid detection unit, comprises an ultrasound transducer located on a container wall, with a piezo electric element that produces an ultrasound impulse
US20050043625A1 (en)*2003-08-222005-02-24Siemens Medical Solutions Usa, Inc.Composite acoustic absorber for ultrasound transducer backing material and method of manufacture
DE10344741A1 (en)*2003-09-252005-04-14Endress + Hauser Gmbh + Co. Kg Sound or ultrasonic transducer
US20050201205A1 (en)*2004-03-102005-09-15Chavez Alfred M.Acoustic transducer assembly for aluminum hulled vessels
US20060076854A1 (en)*2002-04-112006-04-13Endress + Hauser Gmbh+Co. KgSound of ultrasound sensor
EP1681104A1 (en)*2005-01-142006-07-19Landis+Gyr GmbHUltrasonic transducer
US20070063615A1 (en)*2005-06-242007-03-22Fuji Photo Film Co., Ltd.Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head
US20070088246A1 (en)*1999-12-302007-04-19Advanced Cardiovascular Systems, Inc.Medical assembly with transducer for local delivery of a therapeutic substance and method of using same
US20080072675A1 (en)*2006-09-222008-03-27Denso CorporationUltrasonic sensor
US20080073998A1 (en)*2006-09-262008-03-27Denso CorporationUltrasonic sensor
US20080083282A1 (en)*2006-10-042008-04-10Denso CorporationUltrasonic sensor
US20080194967A1 (en)*2007-02-082008-08-14Sliwa John WHigh intensity focused ultrasound transducer with acoustic lens
US20080194965A1 (en)*2007-02-082008-08-14Sliwa John WDevice and method for high intensity focused ultrasound ablation with acoustic lens
US7523662B2 (en)*2002-10-252009-04-28Endress + Hauser Flowtec AgProcess meter
US20090301199A1 (en)*2005-09-052009-12-10Takashi AzumaUltrasonographic device
US7703337B1 (en)*2009-02-272010-04-27Murray F FellerClamping arrangements for a transducer assembly having a piezoelectric element within a foam body
US7877854B2 (en)2007-02-082011-02-01St. Jude Medical, Atrial Fibrillation Division, Inc.Method of manufacturing an ultrasound transducer
WO2011090484A1 (en)*2010-01-222011-07-28Massa Products CorporationHidden ultrasonic transducer
CN103026183A (en)*2010-05-252013-04-03罗伯特·博世有限公司Ultrasonic transducer for use in a fluid medium
US20130192386A1 (en)*2011-12-292013-08-01Endress + Hauser Flowtec AgUltrasonic transducer for a flow measuring device
CN103609140A (en)*2011-07-132014-02-26松下电器产业株式会社 Manufacturing method of acoustic matching body, acoustic matching body, ultrasonic transmitter and receiver using the acoustic matching body, and ultrasonic flowmeter
RU2509983C2 (en)*2007-05-102014-03-20Дэниел Мэжэмэнт энд Кэнтроул, Инк.Converter and method of its manufacturing, ultrasonic flow meter and method to measure characteristics of fluid medium
US20140097725A1 (en)*2012-10-102014-04-10Industrial Sonomechanics, LlcEfficient cooling of piezoelectric transducers
US20160003778A1 (en)*2013-03-062016-01-07Mitsubishi Electric CorporationObstacle detection device
CN105268619A (en)*2015-11-192016-01-27浙江大学Gas ultrasonic transducer with metal protection film structure at front end of matching layer
WO2017160102A1 (en)*2016-03-172017-09-21(주)동일기연Fluid level measuring ultrasonic transducer
US10072963B1 (en)*2014-07-112018-09-11Nick V. SolokhinUltrasonic volume-sensing transducer instrument with concave transceiver element
TWI772167B (en)*2021-09-012022-07-21詠業科技股份有限公司Ultrasonic transducer
US11426764B2 (en)*2017-05-292022-08-30Endress+Hauser Flowtec AgUltrasound transducer
US20220307896A1 (en)*2021-03-252022-09-29Endress+Hauser Conducta Gmbh+Co. KgMethod for quality inspection of ultrasonic transducers
US11691177B2 (en)*2017-04-072023-07-04Esaote S.P.A.Ultrasound probe with acoustic amplifier

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE19811982C5 (en)*1998-03-192011-02-03Microsonic Gesellschaft für Mikroelektronik und Ultraschalltechnik mbH Ultrasonic air spring assembly
DE10055893C5 (en)*2000-11-102010-04-01Hydrometer Gmbh Ultrasonic transducer assembly for use in a flowmeter for a gaseous or liquid medium
DE102005017008A1 (en)*2005-04-072006-10-12Valeo Schalter Und Sensoren Gmbh Device comprising a transmitter, a receiver and a housing accommodating the transmitter and the receiver
DE102007010500A1 (en)*2007-03-052008-09-11Robert Bosch Gmbh Ultrasonic transducer with directly embedded piezo
DE102008055126A1 (en)2008-12-232010-07-01Robert Bosch Gmbh Ultrasonic transducer for use in a fluid medium
DE102008055116A1 (en)2008-12-232010-07-01Robert Bosch Gmbh Method for producing an ultrasonic transducer
DE102009045811A1 (en)*2009-10-192011-04-21Endress + Hauser Flowtec AgSensor for thermal flow rate measuring device, has cable electrically contacting resistance thermometer and passed through opened end of case, where case is partially filled with composite material that is utilized as filling material
DE102009046144A1 (en)2009-10-292011-05-19Robert Bosch Gmbh Ultrasonic transducer for use in a fluid medium
DE102009046145A1 (en)2009-10-292011-05-12Robert Bosch Gmbh Ultrasonic transducer for use in a fluid medium
DE102009046149A1 (en)2009-10-292011-05-12Robert Bosch GmbhMethod for manufacturing ultrasonic flowmeter utilized for e.g. volume flow measurement of air in intake system of internal combustion engine of motor vehicle, involves utilizing adjusting body with porous body of polymer
DE102009046143A1 (en)2009-10-292011-05-12Robert Bosch GmbhMethod for manufacturing ultrasonic converter utilized in e.g. ultrasonic flow meter in exhaust gas system of internal combustion engine of commercial vehicle, involves connecting housing part with sealing element during molding process
DE102010000967A1 (en)2010-01-182011-07-21Robert Bosch GmbH, 70469 Ultrasonic transducer for use in a fluid medium
DE102010030189A1 (en)2010-06-162011-12-22Robert Bosch Gmbh Method for producing an ultrasonic transducer for use in a fluid medium
DE102011090079A1 (en)2011-12-292013-07-04Endress + Hauser Flowtec Ag Ultrasonic transducer for an ultrasonic flowmeter
DE102012104227A1 (en)2012-05-152013-11-21Endress + Hauser Gmbh + Co. KgUltrasonic transducer has attenuation capping portion that is interlaced with metal or metal oxide particles at room temperature, such that cross-linking encapsulation is conditioned with micro hollow spheres
DE102012208292A1 (en)*2012-05-162013-11-21Robert Bosch Gmbh A method of making an ultrasonic transducer core with an embedded piezoelectric transducer element
GB2555237B (en)2015-05-222021-09-29Halliburton Energy Services IncUltrasonic transducers with piezoelectric material embedded in backing
DE102017107331A1 (en)2017-04-052018-10-11Turck Holding Gmbh ultrasonic sensor

Citations (12)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US2430013A (en)*1942-06-101947-11-04Rca CorpImpedance matching means for mechanical waves
US4130018A (en)*1977-08-301978-12-19Envirotech CorporationUltrasonic transducer with reference reflector
US4184094A (en)*1978-06-011980-01-15Advanced Diagnostic Research CorporationCoupling for a focused ultrasonic transducer
US4326274A (en)*1979-07-041982-04-20Kabushiki Kaisha Morita SeisakushoTransmission system of aerial ultrasonic pulse and ultrasonic transmitter and receiver used in the system
US4523122A (en)*1983-03-171985-06-11Matsushita Electric Industrial Co., Ltd.Piezoelectric ultrasonic transducers having acoustic impedance-matching layers
US4984449A (en)*1989-07-031991-01-15Caldwell System Corp.Ultrasonic liquid level monitoring system
US5121628A (en)*1990-10-091992-06-16Merkl Arthur WUltrasonic detection system
EP0498015A1 (en)*1991-02-071992-08-12Siemens AktiengesellschaftProcess for manufacturing ultrasonic transducers
US5363341A (en)*1989-10-061994-11-08Endress U. Hauser Gmbh U. Co.Level measuring device which can be assembled from components
US5375099A (en)*1990-07-241994-12-20British Gas PlcTransducer with acoustic matching member and method of making the transducer
US5418759A (en)*1992-09-281995-05-23Siemens AktiengesellschaftUltrasound transducer arrangement having an acoustic matching layer
US5541468A (en)*1994-11-211996-07-30General Electric CompanyMonolithic transducer array case and method for its manufacture

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE4323134C1 (en)*1993-07-101994-06-16Pil Sensoren GmbhUltrasonic oscillator - has oversize matching body resting on support ring for acoustic dampening
DE4325398C1 (en)*1993-07-291994-07-21Grieshaber Vega KgPiezo-electric sound transducer

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US2430013A (en)*1942-06-101947-11-04Rca CorpImpedance matching means for mechanical waves
US4130018A (en)*1977-08-301978-12-19Envirotech CorporationUltrasonic transducer with reference reflector
US4184094A (en)*1978-06-011980-01-15Advanced Diagnostic Research CorporationCoupling for a focused ultrasonic transducer
US4326274A (en)*1979-07-041982-04-20Kabushiki Kaisha Morita SeisakushoTransmission system of aerial ultrasonic pulse and ultrasonic transmitter and receiver used in the system
US4523122A (en)*1983-03-171985-06-11Matsushita Electric Industrial Co., Ltd.Piezoelectric ultrasonic transducers having acoustic impedance-matching layers
US4984449A (en)*1989-07-031991-01-15Caldwell System Corp.Ultrasonic liquid level monitoring system
US5363341A (en)*1989-10-061994-11-08Endress U. Hauser Gmbh U. Co.Level measuring device which can be assembled from components
US5375099A (en)*1990-07-241994-12-20British Gas PlcTransducer with acoustic matching member and method of making the transducer
US5121628A (en)*1990-10-091992-06-16Merkl Arthur WUltrasonic detection system
EP0498015A1 (en)*1991-02-071992-08-12Siemens AktiengesellschaftProcess for manufacturing ultrasonic transducers
US5329682A (en)*1991-02-071994-07-19Siemens AktiengesellschaftMethod for the production of ultrasound transformers
US5418759A (en)*1992-09-281995-05-23Siemens AktiengesellschaftUltrasound transducer arrangement having an acoustic matching layer
US5541468A (en)*1994-11-211996-07-30General Electric CompanyMonolithic transducer array case and method for its manufacture

Cited By (69)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US6142015A (en)*1997-04-102000-11-07Endress + Hauser Gmbh + Co.Method and assembly for overfill detection in liquid level sensing in a vessel by the pulse transit time technique
US6374676B1 (en)*1997-10-072002-04-23Robert Bosch GmbhUltrasonic transducer
US20030172743A1 (en)*1999-04-012003-09-18Xiaolei AoClamp-on flow meter system
US7000485B2 (en)1999-04-012006-02-21Ge Infrastructure Sensing, Inc.Flow measurement system with reduced noise and crosstalk
US6617765B1 (en)*1999-10-222003-09-09Thales Underwater Systems S.A.S.Underwater broadband acoustic transducer
US6545947B1 (en)*1999-11-122003-04-08Matsushita Electric Industrial Co., Ltd.Acoustic matching material, method of manufacture thereof, and ultrasonic transmitter using acoustic matching material
US6412344B1 (en)*1999-11-152002-07-02Rosemount Aerospace Inc.Fluid level sensor with dry couplant
US20070088246A1 (en)*1999-12-302007-04-19Advanced Cardiovascular Systems, Inc.Medical assembly with transducer for local delivery of a therapeutic substance and method of using same
US6762536B2 (en)*2000-04-102004-07-13Siemens AktiengesellschaftPiezoceramic bending transducer and use thereof
US20030076009A1 (en)*2000-04-102003-04-24Markus HoffmanPiezoceramic bending transducer and use thereof
US6417599B2 (en)*2000-06-122002-07-09Murata Manufacturing Co., Ltd.Piezoelectric resonator, piezoelectric component, and producing method for the piezoelectric resonator
WO2003006932A1 (en)*2001-07-132003-01-23Endress + Hauser Flowtec AgMeasuring head for an ultrasonic flow meter
RU2275603C2 (en)*2001-07-132006-04-27Эндресс+Хайзер Флоутек АгMeasuring head for a ultrasound flowmeter
US20050066745A1 (en)*2001-07-132005-03-31Achim WiestMeasuring head for an ultrasonic flowmeter
US6931944B2 (en)2001-07-132005-08-23Endress + Hauser Flowtec AgMeasuring head for an ultrasonic flowmeter
US7190105B2 (en)*2002-04-112007-03-13Endress + Hauser Gmbh + Co. KgSound or ultrasound sensor
US20060076854A1 (en)*2002-04-112006-04-13Endress + Hauser Gmbh+Co. KgSound of ultrasound sensor
US20040007061A1 (en)*2002-07-122004-01-15Forgue John R.Fluid level sensor
US6993967B2 (en)*2002-07-122006-02-07Ti Group Automotive Systems, L.L.C.Fluid level sensor
US6739203B1 (en)*2002-08-162004-05-25Feldman Marvin JUltrasonic transducer and flow sensor configuration
US7523662B2 (en)*2002-10-252009-04-28Endress + Hauser Flowtec AgProcess meter
US20040123666A1 (en)*2002-12-312004-07-01Ao Xiaolei S.Ultrasonic damping material
DE10305003A1 (en)*2003-02-072004-08-19Jäger, Frank-MichaelLiquid detection unit, comprises an ultrasound transducer located on a container wall, with a piezo electric element that produces an ultrasound impulse
US20050043625A1 (en)*2003-08-222005-02-24Siemens Medical Solutions Usa, Inc.Composite acoustic absorber for ultrasound transducer backing material and method of manufacture
US8354773B2 (en)*2003-08-222013-01-15Siemens Medical Solutions Usa, Inc.Composite acoustic absorber for ultrasound transducer backing material
DE10344741A1 (en)*2003-09-252005-04-14Endress + Hauser Gmbh + Co. Kg Sound or ultrasonic transducer
US20070273249A1 (en)*2003-09-252007-11-29Endress + Hauser Gmbh + Co. KgSonic Or Ultrasonic Transducer
WO2005031274A3 (en)*2003-09-252005-05-12Endress & Hauser Gmbh & Co KgSonic or ultrasonic transducer
US7411335B2 (en)2003-09-252008-08-12Endress + Hauser Gmbh + Co. KgSonic or ultrasonic transducer
US20050201205A1 (en)*2004-03-102005-09-15Chavez Alfred M.Acoustic transducer assembly for aluminum hulled vessels
EP1681104A1 (en)*2005-01-142006-07-19Landis+Gyr GmbHUltrasonic transducer
US20070063615A1 (en)*2005-06-242007-03-22Fuji Photo Film Co., Ltd.Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head
US7732984B2 (en)*2005-06-242010-06-08Fujifilm CorporationPiezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head
US8132462B2 (en)*2005-09-052012-03-13Hitachi Medical CorporationUltrasonographic device
US20090301199A1 (en)*2005-09-052009-12-10Takashi AzumaUltrasonographic device
US20080072675A1 (en)*2006-09-222008-03-27Denso CorporationUltrasonic sensor
US7775110B2 (en)*2006-09-222010-08-17Denso CorporationUltrasonic sensor
US20080073998A1 (en)*2006-09-262008-03-27Denso CorporationUltrasonic sensor
US7612485B2 (en)*2006-09-262009-11-03Denso CorporationUltrasonic sensor
US20080083282A1 (en)*2006-10-042008-04-10Denso CorporationUltrasonic sensor
US7726192B2 (en)*2006-10-042010-06-01Denso CorporationUltrasonic sensor
US20080194965A1 (en)*2007-02-082008-08-14Sliwa John WDevice and method for high intensity focused ultrasound ablation with acoustic lens
US7877854B2 (en)2007-02-082011-02-01St. Jude Medical, Atrial Fibrillation Division, Inc.Method of manufacturing an ultrasound transducer
US8102734B2 (en)2007-02-082012-01-24St. Jude Medical, Atrial Fibrillation Division, Inc.High intensity focused ultrasound transducer with acoustic lens
WO2008098099A3 (en)*2007-02-082008-11-20St Jude Medical Atrial FibrillHigh intensity focused ultrasound transducer with acoustic lens
US20080194967A1 (en)*2007-02-082008-08-14Sliwa John WHigh intensity focused ultrasound transducer with acoustic lens
US8382689B2 (en)2007-02-082013-02-26St. Jude Medical, Atrial Fibrillation Division, Inc.Device and method for high intensity focused ultrasound ablation with acoustic lens
RU2509983C2 (en)*2007-05-102014-03-20Дэниел Мэжэмэнт энд Кэнтроул, Инк.Converter and method of its manufacturing, ultrasonic flow meter and method to measure characteristics of fluid medium
US7703337B1 (en)*2009-02-272010-04-27Murray F FellerClamping arrangements for a transducer assembly having a piezoelectric element within a foam body
WO2011090484A1 (en)*2010-01-222011-07-28Massa Products CorporationHidden ultrasonic transducer
CN103026183A (en)*2010-05-252013-04-03罗伯特·博世有限公司Ultrasonic transducer for use in a fluid medium
CN103026183B (en)*2010-05-252017-03-22罗伯特·博世有限公司Ultrasonic transducer for use in a fluid medium
EP2733959A4 (en)*2011-07-132014-12-24Panasonic Corp METHOD FOR MANUFACTURING ACOUSTIC CONFORMATION BODY, ACOUSTIC CONFORMATION BODY, ULTRASONIC TRANSDUCER USING ACOUSTIC CONFORMATION BODY, AND ULTRASONIC FLOWMETER
CN103609140A (en)*2011-07-132014-02-26松下电器产业株式会社 Manufacturing method of acoustic matching body, acoustic matching body, ultrasonic transmitter and receiver using the acoustic matching body, and ultrasonic flowmeter
US9175994B2 (en)*2011-12-292015-11-03Endress + Hauser Flowtec AgUltrasonic transducer for a flow measuring device
US20130192386A1 (en)*2011-12-292013-08-01Endress + Hauser Flowtec AgUltrasonic transducer for a flow measuring device
US9142751B2 (en)*2012-10-102015-09-22Industrial Sonomechanics, LlcEfficient cooling of piezoelectric transducers
US20140097725A1 (en)*2012-10-102014-04-10Industrial Sonomechanics, LlcEfficient cooling of piezoelectric transducers
US20160003778A1 (en)*2013-03-062016-01-07Mitsubishi Electric CorporationObstacle detection device
US10072963B1 (en)*2014-07-112018-09-11Nick V. SolokhinUltrasonic volume-sensing transducer instrument with concave transceiver element
CN105268619A (en)*2015-11-192016-01-27浙江大学Gas ultrasonic transducer with metal protection film structure at front end of matching layer
CN105268619B (en)*2015-11-192017-07-14浙江大学Gas ultrasound wave transducer of the matching layer front end with metal coating membrane structure
WO2017160102A1 (en)*2016-03-172017-09-21(주)동일기연Fluid level measuring ultrasonic transducer
US11691177B2 (en)*2017-04-072023-07-04Esaote S.P.A.Ultrasound probe with acoustic amplifier
US11426764B2 (en)*2017-05-292022-08-30Endress+Hauser Flowtec AgUltrasound transducer
US20220307896A1 (en)*2021-03-252022-09-29Endress+Hauser Conducta Gmbh+Co. KgMethod for quality inspection of ultrasonic transducers
US12399057B2 (en)*2021-03-252025-08-26Endress+Hauser Conducta Gmbh+Co. KgMethod for quality inspection of ultrasonic transducers
TWI772167B (en)*2021-09-012022-07-21詠業科技股份有限公司Ultrasonic transducer
CN115728757A (en)*2021-09-012023-03-03咏业科技股份有限公司 ultrasonic sensor

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EP0766071A1 (en)1997-04-02
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CA2185073A1 (en)1997-03-29
JPH09126861A (en)1997-05-16
CA2185073C (en)1999-09-07

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