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US3571642A - Method and apparatus for interleaved charged particle acceleration - Google Patents

Method and apparatus for interleaved charged particle acceleration
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US3571642A
US3571642AUS698644AUS3571642DAUS3571642AUS 3571642 AUS3571642 AUS 3571642AUS 698644 AUS698644 AUS 698644AUS 3571642D AUS3571642D AUS 3571642DAUS 3571642 AUS3571642 AUS 3571642A
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Carl H Westcott
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Atomic Energy of Canada Ltd AECL
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Abstract

A method and apparatus for accelerating charged particles is described in which charged particles of opposite sign but of similar charge to mass ratio are accelerated through the same structure by means of an alternating electric field. The two sets of particles can be accommodated in the same apparatus by grouping particles of the same charge in bunches which are spaced by a phase difference of approximately pi radians with respect to the accelerating field frequency from the bunches of the opposite charge sign.

Description

United States Patent 1 1 3,571,642
[72] Inventor Carl H. Westcott 2,770,755 11/1956 Good 315/542 Deep River, Ontario, Canada 2,813,996 1 1/1957 Chodorow 315/542 [21] App], No. 698,644 2,904,720 9/1959 Bell 315/5.42UX [22] Filed Jan. 17, 1968 2,925,522 2/1960 Kelliher 315/542 [45] Patented Mar. 23, 1971 2,979,635 4/ 1961 Burleigh..... 315/5.42X [73] Assignee Atomic Energy of Canada Limited 3,319,109 5/1967 Haimson 313/63X Ottawa, Ontario, Canada 3,331,961 7/1967 Leboutet et a1 313/63X 3,403,346 9/1968 Giordano 3 1 3/ 63X I 4 METHOD AND APPARATUS FOR INTERLEAVED Primary Examiner-James W. Lawrence CHARGED PARTICLE ACCELERATION Assistant Examiner-Palmer C. Demeo 9 (Jaims, 3 Drawing Figs Attorney-Graham and Baker [52] U.S. Cl 313/63,
250/419, 315/542 328/233 ABSTRACT: A method and apparatus for accelerating [5 1 Int. harged anides is described in which charged particles of [50] Field of Search 313/63' 0 pposite sign but of similar charge to mass ratio are ac- 328/233, 256; 315/541 (11191-11199); celerated through the same structure by means of an altemat- 250/41-9 q ing electric field. The two sets of particles can be accommodated in the same apparatus by grouping particles of the [56] References Cited same charge in bunches which are spaced by a phase dif UNITED STATES PATENTS ference of approximately 11' radians with respect to the ac- 2,545,595 3/ 1951 Alvarez 3l5/5.42X celerating field frequency from the bunches of the opposite 2,633,539 3/1953 Altar 315/5.41ux chargesign.
PATENTED HAR23 I97! 3,571, 642
sum 1 0F 2I 750 kw Mlil'lllilltlllll Ahll) AlPllAlilA'llllS Milli llN'lEhLEAl/ED QilAHZiGEll) lAll't'llltCLlE MICELERATIIGN This invention relates to a method and apparatus for the acceleration of charged particles in radio frequency wave structures. More particularly it has reference to an apparatus and method for increasing the output of a linear accelerator structure designed for charged particles of a given sign by using charged particles of similar charge to mass ratio but of opposite sign.
For the making of an intense neutron generator structure Atomic Energy of Canada Limited has suggested an accelerator system which would provide thermal neutron fluxes of the order of neutrons cm. sec. which it is proposed to achieve by the spallation reaction produced by protons of energy of the order of 1 Gev. in a thick heavy element target such as lead bismuth eutectic. Such an accelerator is however useful, not only for the production of neutrons, but for producing mesons and other high energy particles and also for other experiments and tests in connection with the developrnent of nuclear research, which require high energy particles for their production in sufficient quantity and at sufficient energy. This whole situation has been discussed in Atomic Energy of Canada Limited Publication AECL 2600 dated Jul. 1966 and the research and technical applications of a high energy of this type are discussed in Chapter V of this publication.
Of particular significance is that the protons produced from a proton source are accelerated by first bunching them into groups which can then be further accelerated by a linear accelerator. Details of the linear accelerator types of structures are given in Chapter XIVB of AECL publication 2600.
in general these accelerating structures also include magnetic focusing elements which are preferably quadrupole mag nets, but may be solenoids, grids or foils.
A quadrupole magnet system can only focus charged particles in one plane so that two or more are necessary for focusing in both of two planes at right angles. Therefore quadrupoles may be present in singlets (i.e., spaced pairs) or grouped in pairs or triplets for example. These systems would be equally suitable for focusing particles of the same charge to mass ratio but of opposite charge to those for which the system is designed even though the planes of focusing would be reversed for the oppositely charged particles for a given member of a system.
i have found that if bunches of oppositely charged particles of approximately the same charge to mass ratio are introduced substantially l80 out of phase with the bunches of charged particles for which the linear accelerator is designed, those oppositely charged particles will also be accelerated. The bunches of particles can be separated from one another into separate beams when this is desired, by suitable steering magnets or electrostatic fields.
The present invention although exemplified by a proton accelerator is not limited to it, but more particularly provides in the method of accelerating charged particles of one charge sign which are grouped into first bunches and then accelerated by an alternating electric field, the improvement which comprises, bunching charged particles of opposite sign and of substantially the same charge to mass ratio as said particles of said one sign into second bunches spacing the second bunches from the first bunches by a phase difference of approximately rrradians with respect to the accelerating field frequency, an accelerating the second bunches in said field.
The present invention also provides apparatus for accelerating charged particles of opposite charge sign but of substantially the same charge to mass ratio which comprises, a pair of respective particle sources, an alternating electric field particle accelerator, means for directing particles from said sources into said accelerator and including means for bunching said particles from said sources into discrete bunches of particles of one charge sign alternately spaced between discrete bunches of particles of opposite charge sign before introduction to said accelerator, said bunching means spacing said bunches for encountering the alternating electric field of said accelerator for acceleration in the same respective relative phase for each bunch of the one sign and in the same respective relative phase for each bunch of the said opposite sign, said relative phases being substantially 'n'radians difi'erent from one another with respect to the alternating electric field.
in the description which follows reference will be made to the accompanying drawings in which:
FIG. 1 shows one scheme for introducing positively and negatively charged particles into a single accelerating structure;
FlG. 2 shows an alternative method should there be excessive interaction between the two types of particles before acceleration and;
FIG. 3 shows in more detail the arrangement of FIG. 1.
The first embodiment of the invention is exemplified in FIG. 1. In this a source l of positive ions (suitably generating the ions from an ionized plasma from which protons are stripped) delivers the ions into astatic preaccelerator 2 which they leave with an energy of some 750 Kev. They are then deflected by amagiet 3, passing for a second deflection through amagnet 4 into abuncher 5 and from which they are delivered to a wave type accelerator such as a linac at 6. Although no details of the buncher are given here it can for instance be of the travelling wave type using either a simple gap or cavity. The bunched protons are acceptable to the accelerator and the ion current into the accelerator can be regulated by variation of the amplitude of the accelerating alternating signal applied to the buncher.
it will be appreciated that if negatively charged ions are now injected into the buncher there will be a tendency for them to be collected in bunches which are displaced or 1r radians in phase with respect to the buncher signal frequency from the bunches of protons from source 1. if therefore a source of negatively charged protons, or H ions (that is hydrogen atoms with one excess electron) is placed at 10 the ill ions whose mass differs by less than 0.2 percent from that of the protons, can be allowed to pass through the poles of magnet lli. which is unenergized, and will be bent by the magnet 4i in the opposite direction to the protons from source l and will enter thebuncher 5. To allow for overhaul of the sources which operate at fairly high currents and are subject to erosion, alternativenegative ion source 12 and proton source l3 are provided. When thesource 13 is in operation magnet ii is energized, and as this will be in conjunction with thesource i2 magnet 3 is deenergized at this time.
As a second alternative FlG. 2 shows a system which may be employed if it is found that proper bunching cannot be obtained by using asingle unit 5 for both positive and negative ions. Twoproton sources 20 and 21 and two negatively chargedhydrogen ion sources 22 and 23 are free to deliver their ions torespective bunchers 24 and 25. The bunched ions from 24 and 25 are deflected by amagnet 26 into theaccelerator 27 as before. it will be clear that whensource 20 is in operation the magnet 2b is energized and whensource 23 is usedmagnet 29 is energized. FlG. 2 shows amagnetic splitter 40 for separating the bunches of opposite charge after acceleration.
For the sake of greater clarity FIG. 3 shows details of the system which would be needed for a layout such as that of FIG. 1. Thegenerator 30 provides a high voltage of 750 ltV. for which operate in general at much higher currents have their own independenthigh voltage units 31 and 32. Magnetic focusing units 33 (which may be quadrupoles) are provided at the output of each of the preaccelerating columns for each source to reduce beam blowup and general dispersion of the ion stream, After passing throughmagnet 35 further magnetic focusing is provided at 34 and minor adjustments in beam direction are achieved by thesteering magnet 35. The ions then meet the switching magnet d which will deflect the negatively and positively charged ion beams in opposite senses. and form a composite beam, following which further focusing is carried out bymagnetic system 35 belfore the beam of mixed IOI1S 1S delivered to thebuncher gap 5, After bunching the ions are focused by themagnetic system 37 and are then captured by the first section of the linear accelerator at 6.
Negative ion sources for producing H ions are available commercially and may suitably be a Duo-Plasmatron, or type which is formed as a tube. at one end of which is a source of electrons such as a heated filament, and at the other end a pierced anode. When an axial magnetic field is applied to such a structure and hydrogen gas is led into the space between cathode and anode, electrons are accelerated along the axis towards the anode and strike the hydrogen molecules to produce the reaction It is found that there is a tendency for greater quantities of the H ions to be produced in certain regions of the plasma than in others and if the hole in the anode is suitably placed some of the H- ions will drift through the hole from which they may be picked up by a second anode.
One point to bear in mind in the system of interleaving the negative and positive ions is that, in a linear accelerator which consists of two sections operating at different frequencies, it is necessary that the second section be driven at a radio frequency which is an odd multiple of the frequency of the first section. This is necessary to maintain 1r radians phase difference between the bunches of positive and negative ions.
The particular linear accelerator chosen by Atomic E Energy of Canada Limited, consists of two sections. The first part is an Alvarez section in which a standing wave pattern is developed in what is essentially a long cylindrical cavity. The cavity is excited in the mode of oscillation which is designated as TM and which provides an alternating axial electric field which has its maximum value on the axis of the cylinder and zero at the walls, with circumferential magnetic field lines of zero intensity at the axis and a maximum near the walls. Ions are accelerated by being injected along the axis at a time when the electric field is in the direction of motion. Since an ion cannot traverse the entire length of the cavity during one-half of an RF cycle it is necessary to put a series of electrostatic screens (in practice copper tubes) along the axis. The spacings and lengths of the tubes are chosen so that the ions will be drifting through a tube screened from the electric field when the field is in the reverse direction for that charge of particle in that position. The length of each succeeding drift tube is increased so that a particular ion (the synchronous particle) will arrive at each successive gap in the same relative phase. Focusing quadrupole magnets are provided in the drift tubes to preserve the shape of the bunch and keep the particles on the axis.
In principle, acceleration to any given energy is possible by making the cylindrical cavity long enough or increasing the electric field strength. In practice, however, certain limitations are imposed and it is found that a cavity length should not exceed 20A (where )t is the wave length corresponding to the resonant frequency of the cavity), in order to limit excitation of harmonics which would lead to a nonuniform field on the axis.
The second part of the linear accelerator is made as a wave guide structure which allows the charged particles to pass through a series of excited cavities which are contiguous with one another. The particles are now at an energy at which a fixed design velocity can be used for each tank M, and problems are eased in that the particles can be considered to travel at a constant speed through each tank M. A discussion of the types of wave guide structures to be used appears in AECL 2600, Chapter XIVpages 4 to 1 1.
Let us now examine the theoretical and practical considerations of this scheme with particular reference to the apparatus of AECL 2600. In many instances the most convenient plan for experiments which it is wished to perform involves the use of several high energy beams which may be produced in an accelerator and later separated spatially by suitable means. In particular in the Atomic Energy of Canada Limited scheme described in AECL 2600 there is a need for certain meson experiments in which a beam of high energy protons having an intensity of approximately km 1 percent of the main beam is called for. Additionally the particles used for these meson experiments should preferably have a continuous characteristic except for microstructure, (that is, structure within times of the order of 1 1.) so as to minimize counting loses in the experimental arrangements likely to be used.
The interleaving of the negatively charged ions described in this application is particularly suitable for providing the beam requirements of this intensity although with better negative ion sources there is no doubt that higher intensities could be produced. The splitting of the H- ions at the output of the linear accelerator by means such assplitter 40 is a simple operation involving only a bending magnet of suitable design. Care must of course be taken not to exceed a critical field strength above which electron stripping may occur.
It is important that the linear accelerator be straight because although the axial focusing systems will work for both the I-I and theH- ions, if any change in direction of the beam is required, the magnetic field for achieving this will act in opposite directions on the two sets of particles.
The I-I ion sources for the AECL intense neutron generator give about 250 ma. of which some 65 ma. are accelerated to l Gev. If we have a 12 ma. source of r]- ions, then in conditions similar to those for the H ions %/zma. will be accelerated. These are injected, suitably bunched, by the sine wave buncher into the linac at 11' radian phase difference from the H" ions.
A requirement for this method is that the ratio of the radio frequency of the later sections of the linac to that of the Alvarez section be an odd integer, (in particular suitably 268.3 MHz. and 805 MHz.) so that a 11' phase difference between H and H- ions in the Alvarez portion leads to a 1r phase separation in the final section.
The phase stability factors are preserved for the H- ions because the mass difference of -0. 109 percent from the I-I ions is trivial. The action of quadrupole magnets will be inverted, but since a quadrupole converging in one plane is divergent in a perpendicular plane, this is equally satisfactory, at least for a cylindrically symmetrical system, although care may be needed in the injection region which may depart from symmetry. From the point where the H- and I-I beams are merged, until the first bending magnet after acceleration, there must, however, be (i) no DC (E or B) correcting fields, i.e., the linac must be straight, (ii) no windows or foils in the beam, which would strip the H- ions, and (iii) a sufiicient vacuum. After the H" beam is split from the I-I beam by the magnet at the end of the linac, foils may be used in either beam.
Two important conditions are involved in the feasibility of usingI-I-beams, those of electric dissociation and gas-collision dissociation.
Richardson (N.I.M.24, p. 493, Nov. 1963) quotes sources from which a l millisec life for an I I ionis assuredjatleast within a factor i3) if the fields do not exceed 1.9 Mv.7cm. or el te .f 9.efo Z-fLMyl.L Ihe8t field in the quadrupoles at 0.5 cm. from the axis for a 6,000 fiiQsiHF gradient is safe, giving for [3 0875 a field of only 1.48 Mv./cm. (and this for only a small fraction of the transit-time), while the main linac accelerating field is very much smaller, averaging only 11 kv./cm.
The second difficulty, gas collision dissociation, is avoided if an adequate vacuum can be maintained. For calculation purposes we assume 1 X 10- Torr of air to remain in the path, ex-
The H- beam can be (magnetically) separated and after only 18 m., stripped by a thin foil into 995 percent protons,
and 0.5 percent neutral H atoms. In the 154 m. long Alvarez section the accelerating gradient is less nearly uniform, and the calculated loss of I-I- ions by gas dissociation at [0" Torr air pressure is 0.13 percent.
The problems of beam spill are. for a given fraction spilled, less serious at injection than later. since the particles then have a low energy, but the cross sections are high and the question of loss of ions by collision must be carefully examined. Not only can gas dissociation occur (and the gas pressure near the ion sources is relatively high) but a loss of H ions by the reaction Hd'HifiZH" must be considered. After bunching, the H and H- ions are in separate bunches, but since the buncher is less than 100 percent efficient, I-I ions may still be in excess in the region of the H- bunch. Since there are relatively few H- ions, loss of the I-l beam intensity due to this reaction can never by appreciable.
Assuming for the moment that this loss by charge exchange can be tolerated, we may merge the beams before bunching in the simple arrangement indicated in FIG. 1.
On the other hand, if tests show that too many H" ions are neutralized with this arrangement, the alternative arrangement of FIG. 2, which uses two bunchers and a mixing of the I-l and H" beams after bunching, can be adopted. It is true in either case that l-I ions lost in the buncher will travel a certain distance into the linear accelerator and may therefore neutralizeH ions there, but as the latter become accelerated this loss decreases to a negligible fraction. It may also be noted that, if the scheme of FIG. 1 is adopted, the H- ions after passingmagnet 4 will undergo space-charge forces tending to condense the beam, whereas the H ions in the region of the Hions are subject to space-charge repulsion losses.
In conclusion therefore the production of a separate H- beam is feasible and its intensity is limited by available negative ion sources and by dissociation due to residual gas. Other negative ions can be used but they must have approximately an equal charge to mass ratio to the ions for which the acceleration system is designed. In practice allowable tolerancies in charge to mass ratio will probably be found to be about percent (for example allowing the use of Ne and Ne car rying equal but opposite charges).
Iclaim:
1. In the method of accelerating charged particles of one charge sign which are grouped into first bunches and then accelerated by an alternating electric field, the improvement which comprises, bunching charged particles of opposite sign and of substantially the same charge to mass ratio as said particles of said one sign into second bunches, spacing the second bunches from the first bunches by a phase difference of approximately ar radians with respect to the accelerating field frequency, and accelerating the second bunches in said field.
2. The method as defined in claim 1 including the further step of separating said first and second bunches after acceleration in said field.
3. Apparatus for accelerating charged particles of opposite charge sign but of substantially the same charge to mass ratio which comprises, a pair of respective: particle sources, an alternating electric field particle accelerator, means for directing particles from said sources into said accelerator, and including means for bunching said particles from said sources into discrete bunches of particles of one charge sign alternately spaced between discrete bunches of particles of opposite charge sign before introduction to said accelerator, said bunching means spacing said bunches for encountering the alternating electric field of said accelerator for acceleration in the same respective relative phase for each bunch of the one sign and in the same respective relative phase for each bunch of the said opposite sign, said relative phases being substantially 1r radians different from one another with respect to the alternating electric field.
4. Apparatus as defined inclaim 3 comprising means for separating said bunches of said one charge from those of said other charge leaving said accelerator.
5. Apparatus as defined inclaim 3 said accelerator being constructed for accelerating said particles in a straight line.
. Apparatus for providing a stream of negative y charged ions interleaved with a stream of positively charged ions of substantially the same charge to mass ratio which comprises a positive ion source, a negative ion source, a sine wave buncher and an alternating electric field accelerator, means coupling the buncher to the accelerator, means for directing positively charged ions and negatively charged ions from said respective sources into said buncher, and means for separating bunches of positively and negatively charged ions leaving said accelera- 01.
7. Apparatus as defined inclaim 6 comprising a pair of positive ion sources; a pair of negative ion sources; and means for directing positive ions from the first. of said positive ion sources and negative ions from the second of said negative ion sources into said buncher, and alternatively directing ions from the second of said positive ion sources and ions from the first of said negative ion sources into said buncher.
8. Apparatus as defined in claim 7 said means for directing said ions from said first sources comprising a first deflector magnet, and said means for directing said ions from said second sources comprising a second deflector magnet, said sources being aligned for directing ions into said magnets so that ions are directed into said buncher firstly by energizing one of said magnets and deenergizing the other, and alternatively by energizing said other magnet and deenergizing said one.
9. Apparatus as defined in claim 7 said alternating field accelerator comprising an Alvarez linear accelerator.

Claims (9)

3. Apparatus for accelerating charged particles of opposite charge sign but of substantially the same charge to mass ratio which comprises, a pair of respective particle sources, an alternating electric field particle accelerator, means for directing particles from said sources into said accelerator, and including means for bunching said particles from said sources into discrete bunches of particles of one charge sign alternately spaced between discrete bunches of particles of opposite charge sign before introduction to said accelerator, said bunching means spacing said bunches for encountering the alternating electric field of said accelerator for acceleration in the same respective relative phase for each bunch of the one sign and in the same respective relative phase for each bunch of the said opposite sign, said relative phases being substantially pi radians different from one another with respect to the alternating electric field.
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Cited By (75)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3740551A (en)*1969-09-181973-06-19Ass Elect IndPlural beam mass spectrometer
US3742219A (en)*1971-06-231973-06-26Atomic Energy CommissionHigh energy neutral particle beam source
US3831026A (en)*1966-05-171974-08-20P PowersPlural beam mass spectrometer and method of conducting plural beam studies
US3916034A (en)*1971-05-211975-10-28Hitachi LtdMethod of transporting substances in a plasma stream to and depositing it on a target
US3956634A (en)*1974-02-041976-05-11C.G.R.-Mev.Linear particle accelerator using magnetic mirrors
US4172236A (en)*1978-06-161979-10-23The United States As Represented By The United States Department Of EnergyLoss-free method of charging accumulator rings
US4179312A (en)*1977-12-081979-12-18International Business Machines CorporationFormation of epitaxial layers doped with conductivity-determining impurities by ion deposition
US4390495A (en)*1981-01-191983-06-28Energy Profiles, Inc.Control of colliding ion beams
JPS5997100A (en)*1982-11-261984-06-04セイコーインスツルメンツ株式会社Ion beam coaxial mechanism
US4641103A (en)*1984-07-191987-02-03John M. J. MadeyMicrowave electron gun
US4650631A (en)*1984-05-141987-03-17The University Of Iowa Research FoundationInjection, containment and heating device for fusion plasmas
US4749857A (en)*1985-05-071988-06-07Commissariat A L'energie AtomiqueProcess for the formation of high energy neutral atom beams by multiple neutralization and apparatus for performing the same
US4780682A (en)*1987-10-201988-10-25Ga Technologies Inc.Funnel for ion accelerators
US5483122A (en)*1994-02-181996-01-09Regents Of The University Of MichiganTwo-beam particle acceleration method and apparatus
RU2152696C1 (en)*1998-04-222000-07-10Государственный научный центр РФ Институт теоретической и экспериментальной физикиLinear resonance ion accelerator
US20060216940A1 (en)*2004-08-132006-09-28Virgin Islands Microsystems, Inc.Methods of producing structures for electron beam induced resonance using plating and/or etching
US20070034518A1 (en)*2005-08-152007-02-15Virgin Islands Microsystems, Inc.Method of patterning ultra-small structures
US20070075326A1 (en)*2005-09-302007-04-05Virgin Islands Microsystems, Inc.Diamond field emmission tip and a method of formation
US20070152938A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Resonant structure-based display
US20070152781A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Switching micro-resonant structures by modulating a beam of charged particles
US20070154846A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Switching micro-resonant structures using at least one director
US20070190794A1 (en)*2006-02-102007-08-16Virgin Islands Microsystems, Inc.Conductive polymers for the electroplating
US20070200071A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Coupling output from a micro resonator to a plasmon transmission line
US20070200770A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Integrated filter in antenna-based detector
US20070200646A1 (en)*2006-02-282007-08-30Virgin Island Microsystems, Inc.Method for coupling out of a magnetic device
US20070200910A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Electro-photographic devices incorporating ultra-small resonant structures
US20070200063A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Wafer-level testing of light-emitting resonant structures
US20070235651A1 (en)*2006-04-102007-10-11Virgin Island Microsystems, Inc.Resonant detector for optical signals
US20070253535A1 (en)*2006-04-262007-11-01Virgin Islands Microsystems, Inc.Source of x-rays
US20070257206A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Transmission of data between microchips using a particle beam
US20070259465A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Integration of vacuum microelectronic device with integrated circuit
US20070257620A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupled nano-resonating energy emitting structures
US20070257328A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Detecting plasmons using a metallurgical junction
US20070258689A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupling electromagnetic wave through microcircuit
US20070258146A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Reflecting filtering cover
US20070258492A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Light-emitting resonant structure driving raman laser
US20070257622A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupling energy in a plasmon wave to an electron beam
US20070257621A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Plated multi-faceted reflector
US20070257739A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Local plane array incorporating ultra-small resonant structures
US20070257273A1 (en)*2006-05-052007-11-08Virgin Island Microsystems, Inc.Novel optical cover for optical chip
US20070258126A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Electro-optical switching system and method
US20070258690A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Integration of electromagnetic detector on integrated chip
US20070259488A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Single layer construction for ultra small devices
US20070259641A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Heterodyne receiver array using resonant structures
US20070257619A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Selectable frequency light emitter
US20070258675A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Multiplexed optical communication between chips on a multi-chip module
US20070258720A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Inter-chip optical communication
US20070264030A1 (en)*2006-04-262007-11-15Virgin Islands Microsystems, Inc.Selectable frequency EMR emitter
US20070262234A1 (en)*2006-05-052007-11-15Virgin Islands Microsystems, Inc.Stray charged particle removal device
US20070264023A1 (en)*2006-04-262007-11-15Virgin Islands Microsystems, Inc.Free space interchip communications
US20070272931A1 (en)*2006-05-052007-11-29Virgin Islands Microsystems, Inc.Methods, devices and systems producing illumination and effects
US20070272876A1 (en)*2006-05-262007-11-29Virgin Islands Microsystems, Inc.Receiver array using shared electron beam
US20070274365A1 (en)*2006-05-262007-11-29Virgin Islands Microsystems, Inc.Periodically complex resonant structures
US20070284522A1 (en)*2006-04-062007-12-13Nonlinear Ion Dynamics LlcReduced Size High Frequency Quadrupole Accelerator For Producing a Neutralized Ion Beam of High Energy
US20080067941A1 (en)*2006-05-052008-03-20Virgin Islands Microsystems, Inc.Shielding of integrated circuit package with high-permeability magnetic material
US20080069509A1 (en)*2006-09-192008-03-20Virgin Islands Microsystems, Inc.Microcircuit using electromagnetic wave routing
US20080067940A1 (en)*2006-05-052008-03-20Virgin Islands Microsystems, Inc.Surface plasmon signal transmission
US20080083881A1 (en)*2006-05-152008-04-10Virgin Islands Microsystems, Inc.Plasmon wave propagation devices and methods
US20080149828A1 (en)*2006-12-202008-06-26Virgin Islands Microsystems, Inc.Low terahertz source and detector
US7436177B2 (en)2006-05-052008-10-14Virgin Islands Microsystems, Inc.SEM test apparatus
US20080296517A1 (en)*2005-12-142008-12-04Virgin Islands Microsystems, Inc.Coupling light of light emitting resonator to waveguide
US20090072698A1 (en)*2007-06-192009-03-19Virgin Islands Microsystems, Inc.Microwave coupled excitation of solid state resonant arrays
US7557647B2 (en)2006-05-052009-07-07Virgin Islands Microsystems, Inc.Heterodyne receiver using resonant structures
US7557365B2 (en)2005-09-302009-07-07Virgin Islands Microsystems, Inc.Structures and methods for coupling energy from an electromagnetic wave
US7619373B2 (en)2006-01-052009-11-17Virgin Islands Microsystems, Inc.Selectable frequency light emitter
US20090290604A1 (en)*2006-04-262009-11-26Virgin Islands Microsystems, Inc.Micro free electron laser (FEL)
US7656094B2 (en)2006-05-052010-02-02Virgin Islands Microsystems, Inc.Electron accelerator for ultra-small resonant structures
US7655934B2 (en)2006-06-282010-02-02Virgin Island Microsystems, Inc.Data on light bulb
US7723698B2 (en)2006-05-052010-05-25Virgin Islands Microsystems, Inc.Top metal layer shield for ultra-small resonant structures
US7741934B2 (en)2006-05-052010-06-22Virgin Islands Microsystems, Inc.Coupling a signal through a window
US7791053B2 (en)2007-10-102010-09-07Virgin Islands Microsystems, Inc.Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
US20110006214A1 (en)*2009-07-082011-01-13Boenig Marc-OliverAccelerator system and method for setting particle energy
US20110163068A1 (en)*2008-01-092011-07-07Mark UtlautMultibeam System
CN111212512A (en)*2020-03-062020-05-29陕西利友百辉科技发展有限公司Accelerating device, irradiation system and high-energy electron manufacturing equipment and using method thereof
WO2023192100A1 (en)*2022-03-282023-10-05Axcelis Technologies, Inc.Dual source injector with switchable analyzing magnet

Citations (10)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US2545595A (en)*1947-05-261951-03-20Luis W AlvarezLinear accelerator
US2633539A (en)*1948-01-141953-03-31Altar WilliamDevice for separating particles of different masses
US2770755A (en)*1954-02-051956-11-13Myron L GoodLinear accelerator
US2813996A (en)*1954-12-161957-11-19Univ Leland Stanford JuniorBunching means for particle accelerators
US2904720A (en)*1952-11-221959-09-15Bell John StewartIon accelerator
US2925522A (en)*1955-09-301960-02-16High Voltage Engineering CorpMicrowave linear accelerator circuit
US2979635A (en)*1959-07-151961-04-11Richard J BurleighClashing beam particle accelerator
US3319109A (en)*1961-06-291967-05-09Varian AssociatesLinear particle accelerator with collinear termination
US3331961A (en)*1961-09-271967-07-18CsfLinear particle accelerators
US3403346A (en)*1965-10-201968-09-24Atomic Energy Commission UsaHigh energy linear accelerator apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US2545595A (en)*1947-05-261951-03-20Luis W AlvarezLinear accelerator
US2633539A (en)*1948-01-141953-03-31Altar WilliamDevice for separating particles of different masses
US2904720A (en)*1952-11-221959-09-15Bell John StewartIon accelerator
US2770755A (en)*1954-02-051956-11-13Myron L GoodLinear accelerator
US2813996A (en)*1954-12-161957-11-19Univ Leland Stanford JuniorBunching means for particle accelerators
US2925522A (en)*1955-09-301960-02-16High Voltage Engineering CorpMicrowave linear accelerator circuit
US2979635A (en)*1959-07-151961-04-11Richard J BurleighClashing beam particle accelerator
US3319109A (en)*1961-06-291967-05-09Varian AssociatesLinear particle accelerator with collinear termination
US3331961A (en)*1961-09-271967-07-18CsfLinear particle accelerators
US3403346A (en)*1965-10-201968-09-24Atomic Energy Commission UsaHigh energy linear accelerator apparatus

Cited By (123)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3831026A (en)*1966-05-171974-08-20P PowersPlural beam mass spectrometer and method of conducting plural beam studies
US3740551A (en)*1969-09-181973-06-19Ass Elect IndPlural beam mass spectrometer
US3916034A (en)*1971-05-211975-10-28Hitachi LtdMethod of transporting substances in a plasma stream to and depositing it on a target
US3742219A (en)*1971-06-231973-06-26Atomic Energy CommissionHigh energy neutral particle beam source
US3956634A (en)*1974-02-041976-05-11C.G.R.-Mev.Linear particle accelerator using magnetic mirrors
US4179312A (en)*1977-12-081979-12-18International Business Machines CorporationFormation of epitaxial layers doped with conductivity-determining impurities by ion deposition
US4172236A (en)*1978-06-161979-10-23The United States As Represented By The United States Department Of EnergyLoss-free method of charging accumulator rings
US4390495A (en)*1981-01-191983-06-28Energy Profiles, Inc.Control of colliding ion beams
JPS5997100A (en)*1982-11-261984-06-04セイコーインスツルメンツ株式会社Ion beam coaxial mechanism
US4650631A (en)*1984-05-141987-03-17The University Of Iowa Research FoundationInjection, containment and heating device for fusion plasmas
US4641103A (en)*1984-07-191987-02-03John M. J. MadeyMicrowave electron gun
US4749857A (en)*1985-05-071988-06-07Commissariat A L'energie AtomiqueProcess for the formation of high energy neutral atom beams by multiple neutralization and apparatus for performing the same
US4780682A (en)*1987-10-201988-10-25Ga Technologies Inc.Funnel for ion accelerators
US5483122A (en)*1994-02-181996-01-09Regents Of The University Of MichiganTwo-beam particle acceleration method and apparatus
RU2152696C1 (en)*1998-04-222000-07-10Государственный научный центр РФ Институт теоретической и экспериментальной физикиLinear resonance ion accelerator
US20060216940A1 (en)*2004-08-132006-09-28Virgin Islands Microsystems, Inc.Methods of producing structures for electron beam induced resonance using plating and/or etching
US7758739B2 (en)2004-08-132010-07-20Virgin Islands Microsystems, Inc.Methods of producing structures for electron beam induced resonance using plating and/or etching
US20070034518A1 (en)*2005-08-152007-02-15Virgin Islands Microsystems, Inc.Method of patterning ultra-small structures
US20070075264A1 (en)*2005-09-302007-04-05Virgin Islands Microsystems, Inc.Electron beam induced resonance
US7361916B2 (en)2005-09-302008-04-22Virgin Islands Microsystems, Inc.Coupled nano-resonating energy emitting structures
US20070075263A1 (en)*2005-09-302007-04-05Virgin Islands Microsystems, Inc.Ultra-small resonating charged particle beam modulator
US7557365B2 (en)2005-09-302009-07-07Virgin Islands Microsystems, Inc.Structures and methods for coupling energy from an electromagnetic wave
US20070075907A1 (en)*2005-09-302007-04-05Virgin Islands Microsystems, Inc.Electron beam induced resonance
US7626179B2 (en)2005-09-302009-12-01Virgin Island Microsystems, Inc.Electron beam induced resonance
US20070075326A1 (en)*2005-09-302007-04-05Virgin Islands Microsystems, Inc.Diamond field emmission tip and a method of formation
US7714513B2 (en)2005-09-302010-05-11Virgin Islands Microsystems, Inc.Electron beam induced resonance
US7791290B2 (en)2005-09-302010-09-07Virgin Islands Microsystems, Inc.Ultra-small resonating charged particle beam modulator
US7791291B2 (en)2005-09-302010-09-07Virgin Islands Microsystems, Inc.Diamond field emission tip and a method of formation
US7579609B2 (en)2005-12-142009-08-25Virgin Islands Microsystems, Inc.Coupling light of light emitting resonator to waveguide
US20080296517A1 (en)*2005-12-142008-12-04Virgin Islands Microsystems, Inc.Coupling light of light emitting resonator to waveguide
US8384042B2 (en)2006-01-052013-02-26Advanced Plasmonics, Inc.Switching micro-resonant structures by modulating a beam of charged particles
US20070154846A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Switching micro-resonant structures using at least one director
US7619373B2 (en)2006-01-052009-11-17Virgin Islands Microsystems, Inc.Selectable frequency light emitter
US7586097B2 (en)2006-01-052009-09-08Virgin Islands Microsystems, Inc.Switching micro-resonant structures using at least one director
US20070152781A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Switching micro-resonant structures by modulating a beam of charged particles
US20070152938A1 (en)*2006-01-052007-07-05Virgin Islands Microsystems, Inc.Resonant structure-based display
US20090140178A1 (en)*2006-01-052009-06-04Virgin Islands Microsystems, Inc.Switching micro-resonant structures by modulating a beam of charged particles
US7470920B2 (en)2006-01-052008-12-30Virgin Islands Microsystems, Inc.Resonant structure-based display
US20070190794A1 (en)*2006-02-102007-08-16Virgin Islands Microsystems, Inc.Conductive polymers for the electroplating
US20070200063A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Wafer-level testing of light-emitting resonant structures
US7443358B2 (en)2006-02-282008-10-28Virgin Island Microsystems, Inc.Integrated filter in antenna-based detector
US20070200071A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Coupling output from a micro resonator to a plasmon transmission line
US20070200770A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Integrated filter in antenna-based detector
US20070200646A1 (en)*2006-02-282007-08-30Virgin Island Microsystems, Inc.Method for coupling out of a magnetic device
US20070200784A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Integrated filter in antenna-based detector
US20070200910A1 (en)*2006-02-282007-08-30Virgin Islands Microsystems, Inc.Electro-photographic devices incorporating ultra-small resonant structures
US7688274B2 (en)2006-02-282010-03-30Virgin Islands Microsystems, Inc.Integrated filter in antenna-based detector
US7605835B2 (en)2006-02-282009-10-20Virgin Islands Microsystems, Inc.Electro-photographic devices incorporating ultra-small resonant structures
US7888630B2 (en)*2006-04-062011-02-15Wong Alfred YReduced size high frequency quadrupole accelerator for producing a neutralized ion beam of high energy
US20070284522A1 (en)*2006-04-062007-12-13Nonlinear Ion Dynamics LlcReduced Size High Frequency Quadrupole Accelerator For Producing a Neutralized Ion Beam of High Energy
US20070235651A1 (en)*2006-04-102007-10-11Virgin Island Microsystems, Inc.Resonant detector for optical signals
US7558490B2 (en)2006-04-102009-07-07Virgin Islands Microsystems, Inc.Resonant detector for optical signals
US20070264030A1 (en)*2006-04-262007-11-15Virgin Islands Microsystems, Inc.Selectable frequency EMR emitter
US20090290604A1 (en)*2006-04-262009-11-26Virgin Islands Microsystems, Inc.Micro free electron laser (FEL)
US20070264023A1 (en)*2006-04-262007-11-15Virgin Islands Microsystems, Inc.Free space interchip communications
WO2007133224A1 (en)*2006-04-262007-11-22Virgin Islands Microsystems, Inc.Source of x-rays
US20070253535A1 (en)*2006-04-262007-11-01Virgin Islands Microsystems, Inc.Source of x-rays
US7646991B2 (en)2006-04-262010-01-12Virgin Island Microsystems, Inc.Selectable frequency EMR emitter
US7876793B2 (en)2006-04-262011-01-25Virgin Islands Microsystems, Inc.Micro free electron laser (FEL)
US7492868B2 (en)*2006-04-262009-02-17Virgin Islands Microsystems, Inc.Source of x-rays
US7557647B2 (en)2006-05-052009-07-07Virgin Islands Microsystems, Inc.Heterodyne receiver using resonant structures
US20070258720A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Inter-chip optical communication
US20080067940A1 (en)*2006-05-052008-03-20Virgin Islands Microsystems, Inc.Surface plasmon signal transmission
US20070257621A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Plated multi-faceted reflector
US7359589B2 (en)2006-05-052008-04-15Virgin Islands Microsystems, Inc.Coupling electromagnetic wave through microcircuit
US20070258492A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Light-emitting resonant structure driving raman laser
US8188431B2 (en)2006-05-052012-05-29Jonathan GorrellIntegration of vacuum microelectronic device with integrated circuit
US7436177B2 (en)2006-05-052008-10-14Virgin Islands Microsystems, Inc.SEM test apparatus
US7443577B2 (en)2006-05-052008-10-28Virgin Islands Microsystems, Inc.Reflecting filtering cover
US7442940B2 (en)2006-05-052008-10-28Virgin Island Microsystems, Inc.Focal plane array incorporating ultra-small resonant structures
US20080067941A1 (en)*2006-05-052008-03-20Virgin Islands Microsystems, Inc.Shielding of integrated circuit package with high-permeability magnetic material
US7986113B2 (en)2006-05-052011-07-26Virgin Islands Microsystems, Inc.Selectable frequency light emitter
US20070258146A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Reflecting filtering cover
US20070258689A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupling electromagnetic wave through microcircuit
US7476907B2 (en)2006-05-052009-01-13Virgin Island Microsystems, Inc.Plated multi-faceted reflector
US7342441B2 (en)2006-05-052008-03-11Virgin Islands Microsystems, Inc.Heterodyne receiver array using resonant structures
US20070257739A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Local plane array incorporating ultra-small resonant structures
US20070257328A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Detecting plasmons using a metallurgical junction
US7554083B2 (en)2006-05-052009-06-30Virgin Islands Microsystems, Inc.Integration of electromagnetic detector on integrated chip
US20070257622A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupling energy in a plasmon wave to an electron beam
US20070257620A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Coupled nano-resonating energy emitting structures
US20070257273A1 (en)*2006-05-052007-11-08Virgin Island Microsystems, Inc.Novel optical cover for optical chip
US7569836B2 (en)2006-05-052009-08-04Virgin Islands Microsystems, Inc.Transmission of data between microchips using a particle beam
US20070258126A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Electro-optical switching system and method
US20070259465A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Integration of vacuum microelectronic device with integrated circuit
US7583370B2 (en)2006-05-052009-09-01Virgin Islands Microsystems, Inc.Resonant structures and methods for encoding signals into surface plasmons
US7586167B2 (en)2006-05-052009-09-08Virgin Islands Microsystems, Inc.Detecting plasmons using a metallurgical junction
US20070257206A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Transmission of data between microchips using a particle beam
US20070258690A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Integration of electromagnetic detector on integrated chip
US20070272931A1 (en)*2006-05-052007-11-29Virgin Islands Microsystems, Inc.Methods, devices and systems producing illumination and effects
US20070262234A1 (en)*2006-05-052007-11-15Virgin Islands Microsystems, Inc.Stray charged particle removal device
US20070259488A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Single layer construction for ultra small devices
US20070258675A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Multiplexed optical communication between chips on a multi-chip module
US7656094B2 (en)2006-05-052010-02-02Virgin Islands Microsystems, Inc.Electron accelerator for ultra-small resonant structures
US7746532B2 (en)2006-05-052010-06-29Virgin Island Microsystems, Inc.Electro-optical switching system and method
US7741934B2 (en)2006-05-052010-06-22Virgin Islands Microsystems, Inc.Coupling a signal through a window
US7732786B2 (en)2006-05-052010-06-08Virgin Islands Microsystems, Inc.Coupling energy in a plasmon wave to an electron beam
US20070257619A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Selectable frequency light emitter
US7710040B2 (en)2006-05-052010-05-04Virgin Islands Microsystems, Inc.Single layer construction for ultra small devices
US20070259641A1 (en)*2006-05-052007-11-08Virgin Islands Microsystems, Inc.Heterodyne receiver array using resonant structures
US7718977B2 (en)2006-05-052010-05-18Virgin Island Microsystems, Inc.Stray charged particle removal device
US7723698B2 (en)2006-05-052010-05-25Virgin Islands Microsystems, Inc.Top metal layer shield for ultra-small resonant structures
US7728702B2 (en)2006-05-052010-06-01Virgin Islands Microsystems, Inc.Shielding of integrated circuit package with high-permeability magnetic material
US7728397B2 (en)2006-05-052010-06-01Virgin Islands Microsystems, Inc.Coupled nano-resonating energy emitting structures
US20080083881A1 (en)*2006-05-152008-04-10Virgin Islands Microsystems, Inc.Plasmon wave propagation devices and methods
US7573045B2 (en)2006-05-152009-08-11Virgin Islands Microsystems, Inc.Plasmon wave propagation devices and methods
US20070272876A1 (en)*2006-05-262007-11-29Virgin Islands Microsystems, Inc.Receiver array using shared electron beam
US20070274365A1 (en)*2006-05-262007-11-29Virgin Islands Microsystems, Inc.Periodically complex resonant structures
US7679067B2 (en)2006-05-262010-03-16Virgin Island Microsystems, Inc.Receiver array using shared electron beam
US7655934B2 (en)2006-06-282010-02-02Virgin Island Microsystems, Inc.Data on light bulb
US7450794B2 (en)2006-09-192008-11-11Virgin Islands Microsystems, Inc.Microcircuit using electromagnetic wave routing
US20080069509A1 (en)*2006-09-192008-03-20Virgin Islands Microsystems, Inc.Microcircuit using electromagnetic wave routing
US7659513B2 (en)2006-12-202010-02-09Virgin Islands Microsystems, Inc.Low terahertz source and detector
US20080149828A1 (en)*2006-12-202008-06-26Virgin Islands Microsystems, Inc.Low terahertz source and detector
US7990336B2 (en)2007-06-192011-08-02Virgin Islands Microsystems, Inc.Microwave coupled excitation of solid state resonant arrays
US20090072698A1 (en)*2007-06-192009-03-19Virgin Islands Microsystems, Inc.Microwave coupled excitation of solid state resonant arrays
US7791053B2 (en)2007-10-102010-09-07Virgin Islands Microsystems, Inc.Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
US20110163068A1 (en)*2008-01-092011-07-07Mark UtlautMultibeam System
US20110006214A1 (en)*2009-07-082011-01-13Boenig Marc-OliverAccelerator system and method for setting particle energy
CN111212512A (en)*2020-03-062020-05-29陕西利友百辉科技发展有限公司Accelerating device, irradiation system and high-energy electron manufacturing equipment and using method thereof
WO2023192100A1 (en)*2022-03-282023-10-05Axcelis Technologies, Inc.Dual source injector with switchable analyzing magnet
US11823858B2 (en)2022-03-282023-11-21Axcelis Technologies, Inc.Dual source injector with switchable analyzing magnet
US12112918B2 (en)2022-03-282024-10-08Axcelis Technologies, Inc.Dual source injector with switchable analyzing magnet

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