US20200096878A1 - Movable body apparatus, exposure apparatus and device manufacturing method - Google Patents

Abstract

An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member supports the substrate holding member from below. The second supporting member supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other. The driving system moves the substrate holding member, the first supporting member and the second supporting member. The driving system includes a first driving device and a second driving device, the first driving device moving the substrate holding member and the first supporting member in a direction along a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS
• This application is a continuation of U.S. patent application Ser. No. 15/957,297 filed Apr. 19, 2018, which is a divisional of U.S. patent application Ser. No. 15/335,856 filed Oct. 27, 2016 (which is now U.S. Pat. No. 9,977,345, issued May 22, 2018), which is a divisional of U.S. patent application Ser. No. 14/861,293 filed Sep. 22, 2015 (which is now U.S. Pat. No. 9,500,963, issued Nov. 22, 2016), which is a continuation of U.S. patent application Ser. No. 14/155,914 filed Jan. 15, 2014 (which is now U.S. Pat. No. 9,170,504, issued Oct. 27, 2015), which is a division of U.S. patent application Ser. No. 12/714,733 filed Mar. 1, 2010 (which is now U.S. Pat. No. 8,659,746, issued Feb. 25, 2014), and claims priority to U.S. Provisional Application No. 61/157,415, filed on Mar. 4, 2009. The prior applications, including the specifications, drawings and abstracts, are incorporated herein by reference in their entireties.
BACKGROUND OF THE INVENTIONField of the Invention
• The present invention relates to movable body apparatuses, exposure apparatuses and device manufacturing methods, and more particularly to a movable body apparatus equipped with a movable body that moves along a predetermined two-dimensional plane, an exposure apparatus equipped with the movable body apparatus, and a device manufacturing method using the exposure apparatus.
Description of the Background Art
• Conventionally, in a lithography process for manufacturing electron devices (microdevices) such as liquid crystal display elements or semiconductor devices (integrated circuits or the like), an exposure apparatus such as a projection exposure apparatus by a step-and-repeat method (a so-called stepper), or a projection exposure apparatus by a step-and-scan method (a so-called scanning stepper, which is also called a scanner) is mainly used.
• In recent years, however, a substrate subject to exposure in an exposure apparatus (especially, a glass plate subject to exposure in a liquid crystal exposure apparatus) has tended to increasingly grow in size, and in the exposure apparatus as well, a size of a substrate table that holds the substrate has increased, and position control of the substrate becomes difficult owing to the weight increase accompanying the size increase. As the solution to solve such a problem, an exposure apparatus has been developed in which the empty-weight of a substrate table that holds a substrate is supported by an empty-weight cancelling device (empty-weight canceller) made up of a columnar member (e.g. refer to PCT International Publication No. 2008/129762).
• In this type of exposure apparatus, the empty-weight cancelling device moves integrally with the substrate table along the upper surface (guide surface) of a surface plate that is a plate-shaped member formed by, for example, stone. Further, since the guide surface of the surface plate is used to guide the substrate table along a two-dimensional plane with high accuracy, the guide surface is finished so as to have the very high flatness degree.
• However, in order to drive a substrate, which has grown in size, with a long stroke, it is necessary to increase the size of the surface plate having the guide surface used when the empty-weight cancelling device moves, and therefore, the machining of the surface plate becomes difficult. Further, when the surface plate grows in size, it becomes difficult to carry (e.g. transport by a vehicle) the surface plate to a place where an exposure apparatus is installed (e.g. a manufacturing plant of liquid crystal panels).
SUMMARY OF THE INVENTION
• According to a first aspect of the present invention, there is provided a movable body apparatus, comprising: a plurality of surface plates each of which has a guide surface parallel to a two-dimensional plane that includes a first axis and a second axis orthogonal to each other, and which are placed at a predetermined distance in a direction parallel to the first axis; a first movable body that is movable along a plane parallel to the two-dimensional plane, above the plurality of surface plates; a first support member that supports an empty weight of the first movable body and moves within a plane parallel to the two-dimensional plane above the plurality of surface plates, together with the first movable body; a second support member that supports the first support member such that the first support member is relatively movable in the direction parallel to the first axis; and a plurality of third support members placed so as to correspond to the plurality of surface plates, respectively, which support the second support member in a state where the second support member is bridged over the plurality of surface plates.
• With this apparatus, when the first support member, which moves together with the first movable body above a plurality of the surface plates that are placed at a predetermined distance in a direction parallel to the first axis, moves in the direction parallel to the first axis, the first support member moves on the second support member that is supported by a plurality of the third support members placed so as to correspond to a plurality of the surface plates respectively. Since the second support member is placed so as to be bridged over (placed astride) a plurality of the surface places via a plurality of the third support members, even in the case when the first support member moves from above one of the adjacent surface plates to above the other, the first support member can be guided along the two-dimensional plane with high accuracy.
• According to a second aspect of the present invention, there is provided a first exposure apparatus to expose an object by irradiating the object with an energy beam, the apparatus comprising: the movable body apparatus of the present invention in which the object is held on the first movable body; and a patterning device that irradiates the object mounted on the first movable body with the energy beam.
• According to a third aspect of the present invention, there is provided a second exposure apparatus to expose an object by irradiating the object with an energy beam, the apparatus comprising: a plurality of surface plates each of which has a guide surface parallel to a two-dimensional plane that includes a first axis and a second axis orthogonal to each other, and which are placed at a predetermined distance in a direction parallel to the first axis; a first stage that is movable, while holding the object, along a plane parallel to the two-dimensional plane, above the plurality of surface plates; an empty-weight cancelling member that supports an empty weight of the first stage and moves within a plane parallel to the two-dimensional plane above the plurality of surface plates, together with the first stage; a plate member that supports the empty-weight cancelling member such that the empty-weight cancelling member is relatively movable in the direction parallel to the first axis; a plurality of support members placed so as to correspond to the plurality of surface plates, respectively, which support the plate member in a state where the plate member is bridged over the plurality of surface plates; and a patterning device that irradiates the object held on the first stage with the energy beam.
• With this apparatus, even in the case when the empty-weight cancelling member moves from above one of the adjacent surface plates to above the other, the empty-weight cancelling member can be guided with high accuracy along the two-dimensional plane. Accordingly, during exposure, the empty weight of the first stage that holds an object can be supported by the empty-weight cancelling member, and the empty-weight cancelling member can be guided along the two-dimensional plane, which makes it possible to drive the object held on the first stage in a stable manner, and thereby exposure with high precision can be performed.
• According to a fourth aspect of the present invention, there is provided a device manufacturing method, comprising: exposing a substrate using one of the first and second exposure apparatuses of the present invention; and developing the substrate that has been exposed.
• In this case, there is provided a manufacturing method of manufacturing a flat-panel display as a device by using, as the substrate, a substrate for a flat-panel display. The substrate for a flat-panel display includes a film-like member or the like, besides a glass substrate or the like.
BRIEF DESCRIPTION OF THE DRAWINGS
• In the accompanying drawings;
• FIG. 1 is a view showing a schematic configuration of a liquid crystal exposure apparatus of an embodiment;
• FIG. 2 is a side view (partial cross-sectional view) of a substrate stage equipped in the exposure apparatus when viewed from an X-axis direction;
• FIG. 3 is a side view (partial cross-sectional view) of the substrate stage equipped in the exposure apparatus when viewed from a Y-axis direction;
• FIG. 4 is a plan view (No.1) showing the substrate stage with partial omission;
• FIG. 5 is a plan view (No.2) showing the substrate stage with partial omission; and
• FIGS. 6A to 6C are views used to explain an operation of the substrate stage when a substrate is driven in a step direction (the Y-axis direction).
DESCRIPTION OF THE EMBODIMENTS
• An embodiment of the present invention is described below, with reference toFIGS. 1 to 6C.
• FIG. 1 shows a schematic configuration of a liquidcrystal exposure apparatus10 related to the embodiment. Liquidcrystal exposure apparatus10 is a projection exposure apparatus by a step-and-scan method, i.e., a so-called scanner.
• As shown inFIG. 1, liquidcrystal exposure apparatus10 includes an illumination system IOP, a mask stage MST that holds a mask M, a projection optical system PL, a body BD on which mask stage MST, projection optical system PL and the like are mounted, a substrate stage PST that holds a substrate P such that substrate P is movable along an XY plane, and their control system and the like. In the description below, the explanation is given assuming that a direction in which mask M and substrate P are scanned relative to projection optical system PL, respectively, during exposure is an X-axis direction, a direction orthogonal to the X-axis direction within a horizontal plane is a Y-axis direction, and a direction orthogonal to the X-axis and Y-axis directions is a Z-axis direction, and rotational (tilt) directions around the X-axis, Y-axis and Z-axis are θx, θy and θz directions, respectively.
• Illumination system IOP is configured similar to the illumination system that is disclosed in, for example, U.S. Pat. No. 6,552,775 and the like. More specifically, illumination system IOP irradiates mask M with a light emitted from a mercury lamp (not illustrated), as an illumination light for exposure (illumination light) IL, via optical elements such as a reflection mirror, a dichroic mirror, a shutter, a wavelength selecting filter and various types of lenses, which are not illustrated. As illumination light IL, for example, a light such as an i-line (with a wavelength of 365 nm), a g-line (with a wavelength of 436 nm) or an h-line (with a wavelength of 405 nm) (or a synthetic light of the i-line, the g-line and the h-line described above) is used. Further, the wavelength of illumination light IL can be appropriately switched by the wavelength selecting filter according to the required resolution.
• On mask stage MST, mask M having a pattern surface (the lower surface inFIG. 1) on which a circuit pattern and the like are formed is fixed by, for example, vacuum suction. Mask stage MST is supported in a noncontact manner via, for example, air pads that are not illustrated, above a pair ofmask stage guides35 with the X-axis direction serving as their longitudinal directions that are integrally fixed to the upper surface of abarrel surface plate31 that is a part of body BD to be described later on. Mask stage MST is driven in a scanning direction (the X-axis direction) with a predetermined stroke and also is finely driven in the Y-axis direction and the θz direction, above a pair ofmask stage guides35, by a mask stage driving system (not illustrated) that includes, for example, a liner motor.
• Positional information (including rotational information in the θz direction) of mask stage MST within the XY plane is constantly detected at a resolution of, for example, around 0.5 to 1 nm with a mask laser interferometer (hereinafter, referred to as a “mask interferometer”)91, via a reflection surface fixed (or formed) on mask stage MST. The measurement values of mask interferometer91 are sent to a controller that is not illustrated, and the controller controls the position (and the speed) of mask stage MST in the X-axis direction, the Y-axis direction and the θz direction via the mask stage driving system, based on the measurement values of mask interferometer91.
• Projection optical system PL is supported below mask stage MST inFIG. 1, bybarrel surface plate31. Projection optical system PL in the embodiment has a configuration similar to the projection optical system disclosed in, for example, U.S. Pat. No. 6,552,775. More specifically, projection optical system PL includes a plurality of projection optical systems (multi-lens projection optical systems) whose projection areas, where a pattern image of mask M is projected, are placed in a zigzag shape, and functions equivalently to a projection optical system that has a single image field with a rectangular shape whose longitudinal direction is in the Y-axis direction. In the embodiment, as each of the plurality of projection optical systems, for example, a projection optical system that is a both-side telecentric equal-magnification system that forms an erected normal image is used. In the description below, a plurality of projection areas placed in a zigzag shape of projection optical system PL are also referred to as an exposure area as a whole.
• Therefore, when an illumination area on mask M is illuminated with illumination light IL from illumination system IOP, by illumination light IL that has passed through mask M whose pattern surface is placed substantially coincident with the first plane (object plane) of projection optical system PL, a projected image (partial erected image) of a circuit pattern of mask M within the illumination area is formed on an irradiation area (exposure area) of illumination light IL, which is conjugate to the illumination area, on substrate P which is placed on the second plane (image plane) side of projection optical system PL and whose surface is coated with a resist (sensitive agent), via projection optical system PL. Then, by moving mask M relative to the illumination area (illumination light IL) in the scanning direction (X-axis direction) and also moving substrate P relative to the exposure area (illumination light IL) in the scanning direction (X-axis direction) by synchronous drive of mask stage MST and substrate stage PST, scanning exposure of one shot area (divided area) on substrate P is performed, and a pattern of mask M is transferred onto the shot area. More specifically, in the embodiment, a pattern of mask M is generated on substrate P by illumination system IOP and projection optical system PL, and the pattern is formed on substrate P by exposure of a sensitive layer (resist layer) on substrate P with illumination light IL.
• Body BD includes a pair of substrate stage mountings33 (seeFIG. 3) andbarrel surface plate31 that is horizontally supported via a pair ofsupport members32 installed on a pair ofsubstrate stage mountings33, as disclosed in, for example, U.S. Patent Application Publication No. 2008/0030702 and the like. As can be seen fromFIGS. 1 and 3, a pair ofsubstrate stage mountings33 are each made up of a member with the Y-axis direction serving as its longitudinal direction, and are placed at a predetermined distance in the X-axis direction. Each substrate stage mounting33 has both ends in the longitudinal direction that are supported by avibration isolating mechanism34 installed on a floor surface F, and is separated from floor surface F in terms of vibration.
• As shown inFIG. 1, substrate stage PST is equipped with a plurality (e.g. three, in the embodiment) of base frames14A,14B and14C placed on floor surface F, a pair ofsurface plates12A and12B installed on a pair ofsubstrate stage mountings33, an Xcoarse movement stage23X that is driven in the X-axis direction above the threebase frames14A to14C, a Ycoarse movement stage23Y that is driven in the Y-axis direction on Xcoarse movement stage23X and configures, together with Xcoarse movement stage23X, an XY two-dimensional stage device, afine movement stage21 placed on the +Z side of (above) Ycoarse movement stage23Y, and an empty-weight cancelling device40 that moves within the XY plane in conjunction withfine movement stage21.
• Base frames14A to14C are placed at a predetermined distance in the Y-axis direction. As shown inFIG. 4, each of base frames14A to14C is equipped with aguide section15 that is a stringer-like member arranged extending in the
• X-axis direction, and a pair ofleg sections16 that support both ends ofguide section15 on floor surface F. Eachguide section15 has a rectangular YZ section that is elongated in the Z-axis direction. Base frames14A to14C and substrate stage mountings33 (seeFIG. 1) are mechanically non-connected (in noncontact). Incidentally, while both ends ofguide section15 are supported by a pair ofleg sections16 in the embodiment, an intermediate portion (which may be at a plurality of positions) in the longitudinal direction ofguide section15 can also be supported by a similar leg section, along with the support of the both ends.
• A pair ofsurface plates12A and12B are fixed to the upper surfaces of a pair ofsubstrate stage mountings33. Each ofsurface plates12A and12B is a plate-shaped member having a rectangular shape in a planar view that is formed by, for example, stone and has its longitudinal direction in the X-axis direction, andsurface plates12A and12B are placed at a predetermined distance in the Y-axis direction.Surface plate12A is placed betweenbase frame14A andbase frame14B, andsurface plate12B is placed betweenbase frame14B and base frame14C. The upper surface of each ofsurface plates12A and12B is finished so as to have a very high flatness degree.
• As shown inFIG. 4, Xcoarse movement stage23X is equipped withY beam members25 that are a pair of stringer-like members placed, with the Y-axis direction serving as their longitudinal directions, at a predetermined distance in the X-axis direction and a pair of connectingmembers26 that respectively connect both ends of a pair ofY beam members25 in the longitudinal direction, and Xcoarse movement stage23X is formed so as to have a rectangular frame shape in a planar view. While the lower surfaces ofY beam members25 and the lower surfaces of connectingmembers26 are placed coplanar, the upper surfaces of connectingmembers26 are placed at a position lower than (on the −Z side of) the upper surfaces of Y beam members25 (seeFIG. 2).
• As shown inFIG. 2, one of a pair of connecting members26 (on the −Y side) is supported bybase frame14A and the other (on the +Y side) is supported by base frame14C. On the bottom surface of each of a pair of connectingmembers26, anX mover29, which is formed so as to have an inverse U-like sectional shape, is fixed. Between a pair of opposed surfaces, which are opposed to each other, ofX mover29 fixed to connectingmember26 on the −Y side, guide section15 (seeFIG. 4) ofbase frame14A is inserted. And, between a pair of opposed surfaces, which are opposed to each other, ofX mover29 fixed to connectingmember26 on the +Y side, guide section15 (seeFIG. 4) of base frame14C is inserted. EachX mover29 is equipped with acoil unit29a, which includes a plurality of coils, on a pair of opposed surfaces. Meanwhile, on both side surfaces of eachguide section15, amagnetic unit15athat includes a plurality of permanent magnets disposed at a predetermined distance in the X-axis direction is fixed (the illustration is omitted inFIG. 4).Magnetic unit15aconfigures, together withcoil unit29aofX mover29, an X linear motor by the Lorentz force drive method that drives Xcoarse movement stage23X in the X-axis direction. Further, on each of the both side surfaces and the upper surface of eachguide section15, anX guide15barranged extending in the X-axis direction is fixed (the illustration is omitted inFIG. 4). Meanwhile, a plurality ofslide sections29beach having an inverse U-like sectional shape, which include a plurality of bearings (not illustrated), and each mechanically engage with eachX guide15bin a slidable state with respect to each X guide15b, are placed on eachX mover29.
• On the lower surface of the center portion, in the longitudinal direction, of each of a pair ofY beam members25, aslide section27 is fixed that has, at its lower end, a member having a U-like sectional shape that mechanically engages with anX guide17 fixed tobase frame14B in a slidable state with respect toX guide17. On the upper surface of each of a pair ofY beam members25, aY guide28 arranged extending in the Y-axis direction is fixed.
• Ycoarse movement stage23Y is composed of a plate-shaped (or box-shaped) member having a roughly square shape in a planar view, and as shown inFIG. 2, has an opening section23Ya in the center portion that penetrates in the Z-axis direction. At four corner portions on the lower surface of Ycoarse movement stage23Y, aslide section30 having an inverse U-like sectional shape is fixed, which includes a plurality of bearings (not illustrated) and is mechanically engaged onY guide28 fixed onY beam member25 described above in a slidable state with respect to Y guide28 (seeFIG. 4). Incidentally, although the illustration is omitted in the drawings, on the upper surface of eachY beam member25, for example, a magnetic unit including a plurality of magnets is arranged extending parallel toY guide28, and on the lower surface of Ycoarse movement23Y, a coil unit including a plurality of coils is placed. The magnetic unit on eachY beam member25 and the coil unit of Ycoarse movement stage23Y, which corresponds to the magnetic unit, configure a Y linear motor by the Lorentz force drive method that drives Ycoarse movement stage23Y in the Y-axis direction. Incidentally, the drive method (the actuator) of the X coarse movement stage and the Y coarse movement stage is not limited to the liner motor but can be a ball screw drive or a belt drive.
• As shown inFIG. 2, to the end on the +Y side of the upper surface of Ycoarse movement stage23Y, a plurality, e.g., three ofY stators53Y placed at a predetermined distance in the X-axis direction (overlapping in a direction in the depth of the drawing inFIG. 2) are fixed via acolumnar support member56aarranged extending in the Z-axis direction. Further, as shown inFIG. 3, to the end on the +X side of the upper surface of Ycoarse movement stage23Y, a plurality, e.g., three ofX stators53X placed at a predetermined distance in the Y-axis direction (overlapping in a direction in the depth of the drawing inFIG. 3) are fixed viacolumnar support member56aarranged extending in the Z-axis direction.Y stators53Y andX stators53X each have a coil unit including a plurality of coils (the illustration is omitted).
• Further, as shown inFIGS. 2 and 3, at the four corner portions on the upper surface of Ycoarse movement stage23Y, aZ stator53Z is fixed via asupport member56b. Incidentally, in order to prevent intricacy of the drawings, of the fourZ stators53Z, onlyZ stator53Z on the −Y side and the +X side is shown inFIG. 2, onlyZ stator53Z on the −X side and the −Y side is shown inFIG. 3, and the illustration of the other two Z stators is omitted.Z stators53Z each have a coil unit including a plurality of coils (the illustration is omitted).
• Fine movement stage21 is made up of a plate-shaped (or box-shaped) member having a roughly square shape in a planar view, and holds substrate P on its upper surface via a substrate holder PH. Substrate holder PH has, for example, at least a part of a vacuum suction mechanism (or an electrostatic adsorption mechanism) that is not illustrated, and holds substrate P by suction on its upper surface.
• As shown inFIGS. 2 and 3, on the side surface on the −Y side and on the side surface on the −X side offine movement stage21, movable mirrors (bar mirrors)22Y and22X are fixed via fixedmembers24Y and24X, respectively. The surface on the −X side ofmovable mirror22X and the surface on the −Y side ofmovable mirror22Y are respectively mirror-finished to serve as the reflection surfaces. Positional information offine movement stage21 with the XY plane is constantly detected at a resolution of, for example, 0.5 to 1 nm, by a laser interferometer system92 (seeFIG. 1) that irradiatesmovable mirrors22X and22Y with measurement beams. Incidentally, whilelaser interferometer system92 is actually equipped with an X laser interferometer and a Y laser interferometer that correspond to Xmovable mirror22X and Ymovable mirror22Y respectively, only the Y laser interferometer is representatively illustrated inFIG. 1.
• Further, as shown inFIG. 2, on the side surface on the +Y side offine movement stage21, a plurality, e.g., three of Y movers51Y each having a U-like sectional shape placed at a predetermined distance in the X-axis direction are fixed. Further, as shown inFIG. 3, on the side surface on the +X side offine movement stage21, a plurality, e.g., three ofX movers51X each having a U-like sectional shape placed at a predetermined distance in the Y-axis direction are fixed. Each of Y movers51Y andX movers51X has a magnetic unit including a plurality of magnets (the illustration is omitted) on a pair of opposed surfaces that are opposed to each other. The three Y movers51Y configure three Y-axisvoice coil motors55Y (hereinafter, shortly referred to as Y-axis VCMs55Y) by the Lorentz force drive method, together with the threeY stators53Y, respectively, and the threeX movers51X configure three X-axisvoice coil motors55X (hereinafter, shortly referred to asX-axis VCMs55X) by the Lorentz force drive method, together with the threeX stators53X, respectively. The main controller, which is not illustrated, drivesfine movement stage21 in the θz direction, by causing drive forces (thrusts) generated byX-axis VCMs55X (or Y-axis VCMs55Y), for example, on both ends from among the threeX-axis VCMs55X (or Y-axis VCMs55Y) to be different.
• Further, at four corner portions on the lower surface offine movement stage21, aZ mover51Z having an inverse U-like sectional shape is fixed. Incidentally, in order to prevent intricacy of the drawings, of the fourZ movers51Z, onlyZ mover51Z on the −Y side and the +X side is shown inFIG. 2, and onlyZ mover51Z on the −X side and the −Y side is shown inFIG. 3, and the illustration of the other two Z movers is omitted. Further, whileZ movers51Z are connected to fixedmembers24X and24Y inFIGS. 2 and 3 for the sake of convenience of the illustration,Z movers51Z are actually fixed to the lower surface offine movement stage21.Z movers51Z are each equipped with a magnetic unit including a plurality of magnets (the illustration is omitted) on a pair of opposed surfaces that are opposed to each other. The fourZ movers51Z configure four Z-axisvoice coil motors55Z (hereinafter, shortly referred to as Z-axis VCMs55Z) by the
• Lorentz force drive method, together with the fourZ stators53Z, respectively. The main controller, which is not illustrated, drives (vertically moves)fine movement stage21 in the Z-axis direction by controlling the respective thrusts of the four Z-axis VCMs55Z to be the same. Further, the main controller drivesfine movement stage21 in the θx direction and the θy direction by controlling the thrusts of the respective Z-axis VCMs55Z to be different. Incidentally, while the four Z-axis VCMs are placed corresponding to the four corner portions of the fine movement stage in the embodiment, this is not intended to be limiting, but Z-axis VCM55Z should generate the thrusts in the Z-axis direction from at least three non-collinear points.
• With the configuration as described above, substrate stage PST is capable of driving (coarsely moving) substrate P with a long stroke in the two axes (i.e. X-axis and Y-axis) directions, and also is capable of driving (finely moving) substrate P with a minute stroke in directions of six degrees of freedom (the X-axis, Y-axis and Z-axis directions and the θx, θy and θz directions). Incidentally, while each of the X-axis VCMs, the Y-axis VCMs and the Z-axis VCMs in the embodiment is the voice coil motor by a moving magnet method in which the mover has the magnetic unit, this is not intended to be limiting, and each of the X-axis VCMs, the Y-axis VCMs and the Z-axis VCMs can be a voice coil motor by a moving coil method in which a mover has a coil unit. Further, the drive method can be a drive method other than the Lorentz force drive method. Similarly, each of the linear motors equipped inexposure apparatus10 can be based on either of the moving magnet method or the moving coil method, and the drive method of each of the linear motors is not limited to the Lorentz force drive method, but can be another drive method such as a variable magnetoresistance method.
• Empty-weight cancelling device40 is a member that supports the empty weight of a system including fine movement stage21 (to be more specific, a system composed offine movement stage21, substrate holder PH,movable mirrors22X and22Y, fixedmembers24X and24Y, and the like), and as shown inFIG. 2, empty-weight cancelling device40 is equipped with a devicemain body60 that moves in conjunction withfine movement stage21 and a follow andsupport device70 that supports devicemain body60 abovesurface plates12A and12B and moves following devicemain body60.
• Devicemain body60 is made up of a columnar member arranged extending in the Z-axis direction, and is inserted in through-hole23Ya formed at Ycoarse movement stage23Y. Devicemain body60 includes ahousing61, anair spring62 and aslide section63. Devicemain body60 is also referred to as a central pillar.
• Housing61 is made up of a cylinder-like member having a bottom. A pair of Y arm-shaped members64Y extending in the +Y direction and the −Y direction respectively as shown inFIG. 2 and a pair of X arm-shapedmembers64X extending in the +X direction and the −X direction respectively as shown inFIG. 3 are fixed to the outer side of the upper end of the peripheral wall surface of housing61 (hereinafter, generically, the four arm-shaped members are simply referred to as arm-shaped members64). At the tip of each of the four arm-shaped members64, aprobe section65 is placed. Meanwhile, on the lower surface offine movement stage21, atarget section66 is placed so as to correspond to each ofprobe sections65 described above. In the embodiment, capacitance sensors (hereinafter, referred to as Z sensors) that are capable of measuring a distance betweenprobe sections65 andtarget sections66, i.e. the Z-position offine movement stage21 are configured including theseprobe sections65 andtarget sections66. The outputs of the Z sensors are supplied to the main controller that is not illustrated. The main controller controls the position offine movement stage21 in the Z-axis direction and the tilt quantity offine movement stage21 in each of the θx direction and the θy direction, using the measurement results of the four Z sensors. Incidentally, the number of the Z sensors is not limited to four but can be, for example, three as far as the Z-position offine movement stage21 can be measured in at least three non-collinear positions. Further, the Z sensor is not limited to the capacitance sensor but can be a laser displacement gauge by a CCD method or the like. Further, the positional relation between the probe sections and the target sections that constitute the Z sensors can be opposite to the above-described positional relation.
• As shown inFIG. 2,housing61 is connected to Ycoarse movement stage23Y by a pair of flexures67 placed on the +Y side and the −Y side ofhousing61, respectively. Flexure67 is equipped with a thin plate formed by, for example, steel, one end of which is connected tohousing61 and the other end of which is connected to Ycoarse movement stage23Y, via a ball joint. Accordingly, when Ycoarse movement stage23Y is driven in the Y-axis direction on Xcoarse movement stage23X, by the Y linear motor described earlier (the illustration is omitted),housing61 is towed by Ycoarse movement stage23Y because of the tensile force acting on the thin plate, andhousing61 moves integrally with Ycoarse movement stage23Y in the Y-axis direction (the +Y direction and the −Y direction). However, the position ofhousing61 in the Z-axis direction and the θx, θy and θz directions is not restricted by Ycoarse movement stage23Y owing to the operation of the hinged joint of the ball joint. Further, flexures67 connect devicemain body60 and Ycoarse movement stage23Y within a plane that includes the gravity center position of devicemain body60 in the Z-axis direction. Accordingly, when devicemain body60 is driven in the Y-axis direction, the moment in the ex direction (around the X-axis) can be suppressed from acting on devicemain body60, and devicemain body60 can stably be driven in the Y-axis direction. Incidentally, to be exact, if the kinetic frictional force betweenslide sections68 and76, which are described later on, is strong, the position of the flexures should be shifted downward from the gravity center plane, taking the kinetic frictional force into consideration. Regarding the movement in the Y-axis direction, however, the moment can be received with a pair of the base pads (which spans a wider range in the Y-axis direction compared with that in the X-axis direction), and therefore devicemain body60 can be driven in a relatively stable manner even if there is the influence of the frictional force.
• Air spring62 is housed in the lowermost section withinhousing61. A gas (e.g. air) is supplied from a gas supplying device, which is not illustrated, toair spring62, and thereby the inside ofair spring62 is set to be a positive pressure space whose pressure is higher compared with the outside. Devicemain body60 reduces the burden on Z-axis VCMs55Z byair spring62 absorbing (cancelling) the empty weight offine movement stage21 and the like, in a state of supportingfine movement stage21. Further,air spring62 also functions as a Z-axis air actuator that drives fine movement stage21 (i.e. substrate P) in the Z-axis direction with a long stroke by the change of its inner pressure. Instead ofair spring62, a damper also serving as an actuator (e.g. a shock absorber corresponds thereto) that can absorb (cancel) the empty weight offine movement stage21 in a state of supportingfine movement stage21 and also drivesfine movement stage21 in the Z-axis direction can be used. In this case, a spring by another method such as a bellows method or a hydraulic method can be used.
• Slide section63 is a cylinder-like member housed insidehousing61. On the inner side of the peripheral wall ofhousing61, a plurality of air pads that are not illustrated are attached and form a guide used whenslide section63 moves in the Z-axis direction. On the upper surface ofslide section63, a plurality of air pads, which are not illustrated, are placed and support a levelingdevice57 by levitation.
• Levelingdevice57 includes abearing section58 and aball59.Bearing section58 is composed of a tabular member placed parallel to the XY plane, and its lower surface is opposed to the air pads (the illustration is omitted) placed on the upper surface ofslide section63. On the upper surface of bearingsection58, a concave section having a hemispherical shape is formed and the lower portion ofball59 is slidably fitted into the concave section. Further, in the center of the lower surface offine movement stage21 as well, a concave section having a hemispherical shape is similarly formed, and the upper portion ofball59 is slidably fitted into the concave section. Incidentally,ball59 can be fixed tofine movement stage21. Accordingly,fine movement stage21 is capable of freely moving (oscillating) in the tilt directions (the θx direction and the θy direction) with respect to slidesection63. Incidentally, device main body60 (including flexures67) in the embodiment is configured similar to the empty-weight cancelling mechanism that is disclosed in, for example, PCT International Publication No. 2008/129762 (the corresponding U.S. Patent Application Publication No. 2010/0018950) and the like. Further, instead of levelingdevice57 described above, a mechanism can also be used, which allows the tilt of the fine movement stage by supporting a triangular-pyramid-shaped member with a plurality (e.g. three) of air pads, as disclosed in PCT International Publication No. 2008/129762 described above.
• As shown inFIG. 2, follow andsupport device70 is formed into a tabular shape with the Y-axis direction (i.e. the step direction) serving as its longitudinal direction, and includes astep board71 that supports devicemain body60 from below, a pair ofbase pads72A and72B that supportstep board71 from below, and a gravity-center driving device73 placed between a pair ofbase pads72A and72B.
• As shown inFIG. 4,step board71 is placed in a rectangular opening section that is formed by a pair ofY beam members25 and a pair of connectingmembers26 of Xcoarse movement stage23X. The size ofstep board71 in the longitudinal direction is set shorter than the distance between a pair of connecting members26 (e.g. set to the length around three quarters of the distance). Further, as shown inFIG. 2,step board71 is placed astridesurface plates12A and12B viabase pads72A and72B.
• As shown inFIG. 4, astopper74 is fixed to both ends in the Y-axis direction of the upper surface ofstep board71, respectively. Eachstopper74 is made up of a pair of protrusion sections placed at a predetermined distance in the X-axis direction, and between the pair of the protrusion sections, aguide rope75 stretched along the Y-axis direction is inserted via a minute gap (seeFIG. 3).Guide rope75 is stretched between the upper surfaces of a pair of connectingmembers26. Accordingly, rotation around the Z-axis (in the θz direction) ofstep board71 is suppressed.Guide rope75 is formed by, for example, a wire rope or the like.
• On the upper surface ofstep board71, a pair of Y guides76 are arranged extending in the Y-axis direction, on the +X side and the −X side withguide rope75 in between. As shown inFIGS. 3 and 4, devicemain body60 has a plurality (four in the embodiment) ofslide sections68 each having an inverse U-like sectional shape that mechanically engage with a pair of Y guides76 in a slidable state with respect to a pair of Y guides76, at four corner portions on the lower surface ofhousing61, and devicemain body60 relatively moves freely in the Y-axis direction onstep board71 and moves integrally withstep board71 in the X-axis direction. Further, as shown inFIG. 3, on the lower surface ofstep board71, a pair of Y guides77 are arranged extending in the Y-axis direction so as to correspond to a pair of Y guides76 respectively. Furthermore, in the center portion of the lower surface ofstep board71, amagnetic unit78 including a plurality of permanent magnets, which are not illustrated, is arranged extending in the Y-axis direction.
• As shown inFIG. 4, on each of the side surfaces on the +X side and the −X side ofstep board71, a pair ofpulleys79aand79bthat are freely rotatable around axes parallel to the X-axis direction are attached. Driveropes80aand80b, each of which is formed by, for example, a wire rope or the like, are wrapped around a pair ofpulleys79aand79b, respectively. As shown inFIG. 2, one end ofdrive rope80awrapped around pulley79aon the +Y side is fixed to connectingmember26 on the +Y side of Xcoarse movement stage23X, and the other end is fixed to Ycoarse movement stage23Y via asupport member81afixed to the end on the +Y side of the lower surface of Ycoarse movement stage23Y. Meanwhile, one end of drive rope80bwrapped aroundpulley79bon the −Y side is fixed to connectingmember26 on the −Y side of Xcoarse movement stage23X, and the other end is fixed to Ycoarse movement stage23Y via a support member81bfixed to the end on the −Y side of the lower surface of Ycoarse movement stage23Y. As the drive rope, while a member that has flexibility and has little change in its longitudinal direction because of a tensile force is desirable, its shape is not limited to a rope but can be formed into, for example, a belt shape.
• Accordingly, when Ycoarse movement stage23Y is driven by the Y linear motor described previously (the illustration is omitted) in the Y-axis direction on Xcoarse movement stage23X,step board71 is towed by Ycoarse movement stage23Y because of the tensile force acting ondrive rope80aor drive rope80b, and moves following Ycoarse movement stage23Y in the Y-axis direction. However, the movement distance ofstep board71 in the Y-axis direction is half (one-half) the movement distance of Ycoarse movement stage23Y in the Y-axis direction and the drive speed is also half the drive speed of Ycoarse movement stage23Y, becausepulleys79aand79bfunction as moving pulleys. Incidentally, if the step board can be driven so as to follow the Y coarse movement stage at around a half speed, then a mechanism to drive the step board is not limited to the one described above, but for example, an actuator such as a liner motor or a mechanism including a feed screw or the like can also be used.
• As shown inFIG. 2, a pair ofbase pads72A and72B are substantially the same members except thatbase pad72A is placed onsurface plate12A andbase pad72B is placed onsurface plate12B. A set ofbase pads72A and72B are each equipped with abase section82 formed into, for example, a tabular shape having an octagonal shape in a planar view (seeFIG. 5) and a plurality, e.g., three ofair pads84 connected to the lower surface ofbase section82 via ball joints83.Air pads84 form a clearance of, for example, around several μm betweenair pads84 and the upper surface ofsurface plate12A (or12B) by blowing out the pressurized gas to the upper surface ofsurface plate12A (or12B). More specifically,air pads84 function as static gas bearings that causebase section82 to levitate abovesurface plate12A (or12B) by the static pressure of the gas. Incidentally, the number ofair pads84 is not limited to three, but can be, for example, two if the two air pads are spaced apart in the X-axis direction. In the embodiment, since a set ofbase pads72A and72B are placed apart in the Y-axis direction,step board71 can stably be supported even with the two air pads. Althoughbase pads72A and72B may contact withsurface plate12A (orsurface plate12B) depending on, for example, the required specifications of an exposure apparatus, a configuration in whichbase pads72A and72B are in noncontact with the surface plate usingair pads84 is employed, as an example, in the present embodiment so as to prevent the upper surface ofsurface plate12A (or12B) from being damaged owing to a frictional force, becauseexposure apparatus10 of the embodiment is the apparatus for manufacturing large flat-panel displays.
• As shown inFIG. 5, on the upper surface ofbase section82, a plurality, e.g., four ofslide sections85 each having a U-like sectional shape are fixed that mechanically engage with a pair of Y guides77 fixed to the lower surface ofstep board71, in a slidable state with respect to a pair of Y guides77. Accordingly, empty-weight cancelling device40 (i.e. the system composed of devicemain body60,step board71 and a set ofbase pads72A and72B) is configured so as to integrally move in the X-axis direction.
• Further, as shown inFIG. 5, on the upper surface ofbase section82 of each of a pair ofbase pads72A and72B, one each ofcoil unit86 including a plurality of coils (the illustration is omitted) is placed. Eachcoil unit86 configures, together with magnetic unit78 (seeFIG. 3) placed onstep board71, a Y linear motor that drivesbase pads72A and72B in the Y-axis direction relative to stepboard71. The electric currents supplied to the coils ofcoil unit86 of one of the base pads,base pad72A and the electric currents supplied to the coils ofcoil unit86 of the other of the base pads,base pad72B are independently controlled by the main controller that is not illustrated. Accordingly, it is possible to change the support positions of a pair ofbase pads72A and72B with respect to stepboard71, independently from each other.
• As shown inFIG. 3, gravity-center driving device73 is equipped with aslide section87 that is a member having a U-like sectional shape, and a pair ofair pads89 that are connected, via ball joints88, to the tips (upper ends) of the opposed surfaces that are opposed to each other ofslide section87.
• Onslide section87, acoil unit90 including a plurality of coils is placed so as to be opposed tomagnetic unit78 fixed to the lower surface ofstep board71.Coil unit90 configures, together withmagnetic unit78, a Y linear motor that drives gravity-center driving device73 in the Y-axis direction relative to stepboard71. The electric currents supplied to the coils ofcoil unit90 are controlled by the main controller that is not illustrated.
• On the +X side and the −X side ofcoil unit90, aslide section94 having a U-like sectional shape is fixed that mechanically engages withY guide77 placed on the lower surface ofstep board71, in a slidable state with respect toY guide77, so as to prevent gravity-center driving device73 from falling because of the self weight. Accordingly, gravity-center driving device73 andstep board71 integrally move in the X-axis direction.
• By blowing out the pressurized gas to apad guide25afixed to the inner side surface of each of a pair ofY beam members25, each of a pair ofair pads89 forms a clearance of, for example, around several μm betweenair pad89 and the inner side surface ofY beam member25. Accordingly, while gravity-center driving device73 is placed in a noncontact state with respect to a pair ofY beam members25 and is movable in the Y-axis direction independently fromY beam members25, gravity-center driving device73 moves integrally withY beam members25 in the X-axis direction by the static pressure of the gas blown out fromair pads89.
• In this case, the position in the Z-axis direction of the bearing surface (gas supplying surface) of each of a pair ofair pads89 roughly coincides with the position in the Z-axis direction of a gravity center position CG (seeFIG. 2) of empty-weight cancelling device40 (i.e. the system composed of devicemain body60,step board71 and a set ofbase pads72A and72B). Consequently, the drive force that operates when driving empty-weight cancelling device40 in the X-axis direction (scan direction) acts on empty-weight cancelling device40 in the X-axis direction within the plane including gravity center position CG. Accordingly, the moment in the e_ydirection (around the Y-axis) does not act on empty-weight cancelling device40, which makes it possible to stably drive (drive at the gravity center) empty-weight cancelling device40 in the X-axis direction.
• Furthermore, the main controller, which is not illustrated, controls the positions of a set ofbase pads72A and72B and gravity-center driving device73 according to the position of devicemain body60 in the Y-axis direction. InFIGS. 6A to 6C, the state is shown wherebase pads72A and72B and gravity-center driving device73 are driven in accordance with the change in the position of devicemain body60 in the Y-axis direction.
• InFIG. 6A, Ycoarse movement stage23Y is located on the most −Y side in a range where Ycoarse movement stage23Y is movable in the Y-axis direction on Xcoarse movement stage23X. In the state shown inFIG. 6A, devicemain body60 is located above the vicinity of the end on the −Y side ofsurface plate12A, and the main controller, which is not illustrated, causes one of the base pads,base pad72A placed onsurface plate12A to position below device main body60 (so as to overlap with devicemain body60 in the Z-axis direction). Further, the main controller causes the other of the base pads,base pad72B placed onsurface plate12B to position in the vicinity of the end on the −Y side ofsurface plate12B. The size in the Y-axis direction ofstep board71 is set such that the end on the −Y side ofstep board71 is supported bybase pad72A and the end on the +Y side is supported bybase pad72B, respectively, in the state shown inFIG. 6A.
• Next, for example, in the cases such as when a step operation is performed during exposure, if Ycoarse movement stage23Y is driven in the +Y direction on Xcoarse movement stage23X, devicemain body60 moves in conjunction with Ycoarse movement stage23Y in the +Y direction onstep board71, owing to the stiffness of the plate springs of flexures67.Step board71 is towed bydrive rope80aand moves in the +Y direction following device main body60 (however, the movement stroke is almost half). Then, the main controller drivesbase pad72A onsurface plate12A by a movement distance in accordance with a movement distance of Ycoarse movement stage23Y in the Y-axis direction. Accordingly, a state wherebase pad72A is placed directly under devicemain body60 is maintained at all times, while devicemain body60 moves abovesurface plate12A. In this manner, since the position ofbase pad72A is controlled so as to constantly overlap with devicemain body60 in the Z-axis direction, the bending stress owing to the uneven loading can be suppressed from acting onstep board71. Therefore,step board71 can be reduced in thickness and weight.
• Incidentally, as shown inFIG. 6B, when devicemain body60 moves in the +Y direction in conjunction with Ycoarse movement stage23Y and is located abovebase frame14B (betweensurface plate12A andsurface plate12B), the main controller causesbase pad72A to stop in the vicinity of the end on the +Y side ofsurface plate12A. In this state shown inFIG. 6B, since a set ofbase pads72A and72B are placed in proximity, the bending stress acting on the center portion ofstep board71 can be the minimum.
• When Ycoarse movement stage23Y is further driven from the state shown inFIG. 6B, in the +Y direction as shown inFIG. 6C,step board71 also moves further in the +Y direction following devicemain body60. Further, the main controller drivesbase pad72B in accordance with a movement distance of Ycoarse movement stage23Y in the Y-axis direction such thatbase pad72B is constantly placed directly under devicemain body60, while devicemain body60 moves abovesurface plate12B. Incidentally, when Ycoarse movement stage23Y is driven in the −Y direction, which is opposite to the case shown inFIGS. 6A to 6C,step board71 follows Ycoarse movement stage23Y and moves in the −Y direction by a movement distance that is half a movement distance of Ycoarse movement stage23Y, which is reverse to the above-described case, and the main controller controlsbase pad72A orbase pad72B to be placed directly under devicemain body60 at all times (except for the state shown inFIG. 6B).
• On the other hand, for example, in the cases such as when an exposure operation (scan operation) is performed, when Xcoarse movement stage23X is driven in the X-axis direction by the X liner motor, either one of a set of air pads89 (seeFIG. 3) of gravity-center driving device73 is pressed against opposedY beam guide25. Accordingly, empty-weight cancelling device40, which is composed of devicemain body60,step board71 and a set ofbase pads72A and72B that are mechanically connected to each other, moves integrally with Xcoarse movement stage23X in the X-axis direction.
• In this case, the main controller controls the position of gravity-center driving device73 such that gravity-center driving device73 follows the movement of gravity center position CG of empty-weight cancelling device40, when devicemain body60 moves in the Y-axis direction (which includes the case when devicemain body60 also moves in the X-axis direction). Explaining more particularly usingFIGS. 6A to 6C, gravity center position CG is located slightly on the −Y side from the center ofstep board71 in the Y-axis direction, for example, in the state shown inFIG. 6A. The main controller causes gravity-center driving device73 to be located at the position corresponding to gravity center position CG, as shown inFIG. 6A. When Xcoarse movement stage23X is drive in the X-axis direction in this state, empty-weight cancelling device40 is driven at the gravity center, in the X-axis direction via air pads89 (seeFIG. 3). Further, as shown inFIG. 6B, in a state where devicemain body60 is located on the center of the step board in the Y-axis direction, gravity center position CG is located directly under devicemain body60, and therefore, the main controller controls the position of gravity-center driving device73 according to the location of gravity center position CG.
• More specifically, as shown inFIGS. 6A to 6C, while the location of gravity center position CG of empty-weight cancelling device40 changes in the Y-axis direction owing to the change in the relative positional relation between devicemain body60,step board71 and a set ofbase pads72A and72B, the main controller controls the position of gravity-center driving device73 in the Y-axis direction according to the location change of gravity center position CG, and therefore, it is possible to make the drive force in the X-axis direction act constantly on gravity center position CG of empty-weight cancelling device40. Accordingly, regardless of the relative positional relation between devicemain body60,step board71 and a set ofbase pads72A and72B, the moment in the θz direction (around the Z-axis) does not act on empty-weight cancelling device40, and empty-weight cancelling device40 can stably be driven at the gravity center, in the X-axis direction (which includes the case when empty-weight cancelling device40 is driven in the X-axis direction and the Y-axis direction simultaneously). Incidentally, in order to calculate the drive distance of gravity-center driving device73, it is preferable that the variation of gravity center position CG of empty-weight cancelling device40, in accordance with the drive distance offine movement stage21 needed when substrate P is driven in the Y-axis direction, is obtained in advance by experiment (or simulation) or the like, and this data is converted into a table format (or a mathematical formula) and stored in a memory device, which is not illustrated, of the main controller. By referring to the table described above, the main controller can control the position of gravity-center driving device73 with the drive distance in accordance with the position or the movement distance (i.e. the variation of gravity center position CG) offine movement stage21.
• In liquidcrystal exposure apparatus10 configured as described above, under control of the main controller that is not illustrated, mask M is loaded onto mask stage MST by a mask loader that is not illustrated and substrate P is loaded onto substrate stage PST by a substrate loader that is not illustrated. After that, the main controller executes alignment measurement using an alignment detection system that is not illustrated, and after the alignment measurement is completed, an exposure operation by a step-and-scan method is performed. Since this exposure operation is similar to the exposure method by a step-and-scan method that has conventionally been performed, the description thereabout is omitted.
• As described above, in liquidcrystal exposure apparatus10 in the embodiment,base pads72A and72B are respectively placed on the twosurface plates12A and12B, and onestep board71 is supported bybase pads72A and72B. Devicemain body60 moves from abovesurface plate12A toabove surface plate12B (or inversely) by moving onstep board71, and therefore, the boundary section betweenadjacent surface plate12A andsurface plate12B that are placed separately does not function as a guide surface used when empty-weight cancelling device40 moves in the Y-axis direction. Accordingly, although the twosurface plates12A and12B are placed apart, empty-weight cancelling device40 can be guided along the XY plane, which makes it possible to drive substrate P in the Y-axis direction in a stable manner.
• Further, since the surface plates are configured of the two members, each ofsurface plates12A and12B can be reduced in size. Accordingly, the materials (e.g. stone materials) for the surface plates can be secured without difficulty, and also the surface plates can be processed and carried without difficulty. Further, sincesurfaces plates12A and12B can be placed apart,base frame14B that supports Xcoarse movement stage23X in a movable manner can be placed between the surface plates, which makes it possible to suppress the bending of the center portion of Xcoarse movement stage23X in the longitudinal direction.
• Incidentally, there are no problems with the transportation (carriage) even if the surface plate is longer in one direction (e.g. a direction corresponding to the X-axis in the embodiment above), and such increase in size in the one direction can be coped without difficulty by employing the apparatus configuration similar to the embodiment above. Further, in the case when the surface plate is longer in the one direction, three or more of the substrate stage mountings (33) can be placed, or the surface plate can be divided into a plurality of surface plates also in the one direction so as to be placed in the one direction.
• Furthermore, since the configuration is employed in which devicemain body60 of empty-weight cancelling device40 moves on the step board that is a plate-shaped member placed so as to be bridged over the adjacent surface plates, the cost can be reduced compared to, for example, the case when a plurality of empty-weight cancelling devices are placed so as to correspond to a plurality (e.g. two in the embodiment above) of surface plates.
• Further, sincestep board71 moves in the Y-axis direction following devicemain body60, the size and weight ofstep board71 can be reduced. Further, since the configuration is employed in which stepboard71 is towed bydrive ropes80aand80b, the structure can be simplified compared to the case of providing an actuator or the like.
• Further, since a plurality (two in the embodiment above) ofsurface plates12A and12B are placed at a predetermined distance in the step direction during exposure, or more specifically, since there is no stitching between the plurality of surface plates in the scan direction, the upper surfaces ofsurface plates12A and12B function as a single guide surface (similar to one surface plate having a single guide surface) during the scanning operation, and therefore substrate P can stably be driven in the scan direction.
• Incidentally, in the embodiment above, while the two surface plates are arrayed at a predetermined distance in the step direction (Y-axis direction), this is not intended to be limiting, and for example, the three or more surface plates can be arranged. In this case, it is preferable that a base pad is placed on each of a plurality of surface plates and a step board that is longer in the Y-axis direction than that of the embodiment above is placed so as to be bridged over a plurality of base pads (i.e. in a state of lying astride a plurality of surface plates). Further, in the embodiment above, while the configuration in which the step board follows the device main body of the empty-weight cancelling device is employed, this is not intended to be limiting, and the step board can be fixed (in such a case, the size in the Y-axis direction needs to be longer than that of the embodiment above). Further, a plurality of surface plates can be arrayed at a predetermined distance in the scan direction (X-axis direction).
• Further, in the embodiment above, while the configuration is employed in which the base pads move in the Y-axis direction following the device main body, this is not intended to be limiting, and the base pads can be configured not movable in the Y-axis direction (but movable in the X-axis direction) by forming the base pads in a larger size than the that of the embodiment. Further, in the embodiment above, while the configuration is employed in which the base pads are driven by the linear motor, a configuration can also be employed in which the base pads are towed by a wire rope or the like in a similar manner to the case of the step board. Further, while the configuration is employed in which the step board follows the device main body by being pulled by the wire rope, this is not intended to be limiting, and the step board can be driven by, for example, an actuator such as a liner motor. Furthermore, in the embodiment above, while the configuration is employed in which the empty-weight cancelling device moves in the X-axis direction by being pressed by the X coarse movement stage, this is not intended to be limiting, and the empty-weight cancelling device can be driven in the X-axis direction by an actuator such as a liner motor. Further, a plurality of base pads can be placed on one surface plate.
• Further, the illumination light can be ultraviolet light, such as ArF excimer laser light (with a wavelength of 193 nm) and KrF excimer laser light (with a wavelength of 248 nm), or vacuum ultraviolet light such as F₂laser light (with a wavelength of 157 nm). Further, as the illumination light, a harmonic wave, which is obtained by amplifying a single-wavelength laser beam in the infrared or visible range emitted by a DFB semiconductor laser or fiber laser with a fiber amplifier doped with, for example, erbium (or both erbium and ytteribium), and by converting the wavelength into ultraviolet light using a nonlinear optical crystal, can also be used. Further, solid state laser (with a wavelength of 355 nm, 266 nm) or the like can also be used.
• Further, in the embodiment above, while the case has been described where projection optical system PL is a projection optical system by a multi-lens method that is equipped with a plurality of projection optical units, the number of the projection optical units is not limited thereto, but there should be one or more projection optical units. Further, projection optical system PL is not limited to the projection optical system by a multi-lens method, but can be, for example, a projection optical system that uses a large-size mirror of the Offner type.
• Further, in the embodiment above, while the case has been described where the projection optical system whose projection magnification is an equal magnification is used as projection optical system PL, this not intended to be limiting, and the projection optical system can be either of a reduction system or a magnifying system.
• Incidentally, in the embodiment above, a light transmissive type mask is used, which is obtained by forming a predetermined light-shielding pattern (or a phase pattern or a light-attenuation pattern) on a light transmissive mask substrate. Instead of this mask, however, as disclosed in, for example, U.S. Pat. No. 6,778,257, an electron mask (a variable shaped mask) on which a light-transmitting pattern, a reflection pattern, or an emission pattern is formed according to electronic data of the pattern that is to be exposed, for example, a variable shaped mask that uses a DMD (Digital Micromirror Device) that is a type of a non-emission type image display element (which is also called a spatial light modulator) can also be used.
• Incidentally, it is especially effective to apply the exposure apparatus of the present invention as in the embodiment above or the like to an exposure apparatus that exposes a substrate with a size (which includes at least one of an outer diameter, a diagonal line and a side) not less than 500 mm, for example, a large substrate for a flat-panel display (FPD), such as a liquid crystal display element. This is because the present invention has been made to cope with the increase in size of substrates.
• Further, in the embodiment above, while the case has been described where the present invention is applied to a projection exposure apparatus that performs scanning type exposure that is accompanied by a step-and-scan operation of the plate, this is not intended to be limiting, and the present invention can also be applied to an exposure apparatus by a proximity method that does not use any projection optical systems. Further, the present invention can also be applied to an exposure apparatus by a step-and-repeat method (a so-called stepper) or an exposure apparatus by a step-and-stitch method.
• Further, the use of the exposure apparatus is not limited to the exposure apparatus for liquid crystal display elements in which a liquid crystal display element pattern is transferred onto a rectangular glass plate, but the present invention can also be widely applied, for example, to an exposure apparatus for manufacturing semiconductors, and an exposure apparatus for producing thin-film magnetic heads, micromachines, DNA chips, and the like. Further, the present invention can be applied not only to an exposure apparatus for producing microdevices such as semiconductor devices, but can also be applied to an exposure apparatus in which a circuit pattern is transferred onto a glass substrate, a silicon wafer or the like to produce a mask or a reticle used in a light exposure apparatus, an EUV exposure apparatus, an X-ray exposure apparatus, an electron-beam exposure apparatus, and the like. Incidentally, an object that is subject to exposure is not limited to a glass plate, but for example, can be another object such as a wafer, a ceramic substrate, a film member, or a mask blank. Further, the present invention can also be applied to an exposure apparatus such as a liquid immersion type exposure apparatus in which a space between a projection optical system and a wafer is filled with a liquid, which is disclosed in, for example, U.S. Patent Application Publication No. 2005/0259234 and the like, as an exposure apparatus to transfer a circuit pattern onto a silicon wafer or the like.
• Further, as disclosed in, for example, PCT International Publication No. 2001/035168, the present invention can also be applied to an exposure apparatus (a lithography system) in which line-and-space patterns are formed on a wafer by forming interference fringes on the wafer.
• Incidentally, the present invention can be applied not only to the exposure apparatus but also to, for example, an element manufacturing apparatus equipped with a functional liquid imparting device by an ink-jet method.
• Incidentally, the above disclosures of all the publications, the PCT International Publications descriptions, and the U.S. Patent Application Publications descriptions, and the U.S. Patents descriptions that are cited in the description above and related to exposure apparatuses and the like are each incorporated herein by reference.
• Device Manufacturing Method
• A manufacturing method of a microdevice that usesexposure apparatus10 of the embodiment above in a lithography process is described next. Inexposure apparatus10 of the embodiment above, a liquid crystal display element as a microdevice can be obtained by forming a predetermined pattern (such as a circuit pattern or an electrode pattern) on a plate (a glass substrate).
• Pattern Forming Process
• First of all, a so-called optical lithography process in which a pattern image is formed on a photosensitive substrate (such as a glass substrate coated with a resist) is executed usingexposure apparatus10 described above. In this optical lithography process, a predetermined pattern that includes many electrodes and the like is formed on the photosensitive substrate. After that, the exposed substrate undergoes the respective processes such as a development process, an etching process and a resist removing process, and thereby the predetermined pattern is formed on the substrate.
• Color Filter Forming Process
• Next, a color filter in which many sets of three dots corresponding to R (Red), G (Green) and B (blue) are disposed in a matrix shape, or a color filter in which a plurality of sets of filters of three stripes of R, G and B are disposed in horizontal scanning line directions is formed.
• Cell Assembling Process
• Next, a liquid crystal panel (a liquid crystal cell) is assembled using the substrate having the predetermined pattern obtained in the pattern forming process, the color filter obtained in the color filter forming process, and the like. For example, a liquid crystal panel (a liquid crystal cell) is manufacture by injecting liquid crystal between the substrate having the predetermined pattern obtained in the pattern forming process and the color filter obtained in the color filter forming process.
• Module Assembling Process
• After that, a liquid crystal display element is completed by attaching respective components such as an electric circuit that causes a display operation of the assembled liquid crystal panel (liquid crystal cell) to be performed, and a backlight.
• In this case, since exposure of the plate is performed with high throughput and high precision using the exposure apparatus of the embodiment above in the pattern forming process, the productivity of liquid crystal display elements can be improved as a consequence.
• While the above-described embodiment of the present invention is the presently preferred embodiment thereof, those skilled in the art of lithography systems will readily recognize that numerous additions, modifications, and substitutions may be made to the above-described embodiment without departing from the spirit and scope thereof. It is intended that all such modifications, additions, and substitutions fall within the scope of the present invention, which is best defined by the claims appended below.

Claims (1)

What is claimed is:

1. A movable body apparatus comprising:

a plurality of surface plates each of which has a guide surface parallel to a two-dimensional plane that includes a first axis and a second axis orthogonal to each other, and which are placed at a predetermined distance in a direction parallel to the first axis;

a first movable body that is movable along a plane parallel to the two-dimensional plane, above the plurality of surface plates;

a first support member that supports an empty weight of the first movable body and moves within a plane parallel to the two-dimensional plane above the plurality of surface plates, together with the first movable body;

a second support member that supports the first support member such that the first support member is relatively movable in the direction parallel to the first axis; and

a plurality of third support members placed so as to correspond to the plurality of surface plates, respectively, which support the second support member in a state where the second support member is bridged over the plurality of surface plates.

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