US20120196450A1 - Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ uv cure - Google Patents

Abstract

Stress of a silicon nitride layer may be enhanced by deposition at higher temperatures. Employing an apparatus that allows heating of a substrate to substantially greater than 400° C. (for example a heater made from ceramic rather than aluminum), the silicon nitride film as-deposited may exhibit enhanced stress allowing for improved performance of the underlying MOS transistor device. In accordance with some embodiments, a deposited silicon nitride film is exposed to curing with plasma and ultraviolet (UV) radiation, thereby helping remove hydrogen from the film and increasing film stress. In accordance with other embodiments, a silicon nitride film is formed utilizing an integrated process employing a number of deposition/curing cycles to preserve integrity of the film at the sharp corner of the underlying raised feature. Adhesion between successive layers may be promoted by inclusion of a post-UV cure plasma treatment in each cycle.

Description

CROSS-REFERENCE TO RELATED APPLICATION
• This application is a divisional of U.S. application Ser. No. 11/762,590, filed Jun. 13, 2007, which claims priority to U.S. Provisional Application No. 60/805,324, filed Jun. 20, 2006, the disclosures of which are incorporated herein by reference in their entirety for all purposes. U.S. application Ser. No. 11/762,590, filed Jun. 13, 2007, is a continuation-in-part of U.S. application Ser. No. 11/400,275, filed Apr. 7, 2006, which claims priority to U.S. Provisional Application Nos. 60/685,365, filed on May 26, 2005 and 60/701,854, filed on Jul. 21, 2005, the disclosures of which are incorporated herein by reference in their entirety for all purposes. The present application is also related to U.S. application Ser. Nos. 11/398,146, filed Apr. 5, 2006, and 11/398,436, also filed Apr. 5, 2006, the disclosures of which are incorporated herein by reference in their entirety for all purposes.
BACKGROUND OF THE INVENTION
• In the processing of a substrate to fabricate circuits and displays, the substrate is typically exposed to an energized process gas capable of depositing or etching material on the substrate. In chemical vapor deposition (CVD) processes, process gas energized by a high frequency voltage or microwave energy is used to deposit material on the substrate, which may be a layer, a filling of contact holes, or other selective deposition structures. The deposited layer can be etched or otherwise processed to form active and passive devices on the substrate, such as for example, metal-oxide-semiconductor field effect transistors (MOSFETs) and other devices. A MOSFET typically has a source region, a drain region, and a channel region between the source and drain. In the MOSFET device, a gate electrode is formed above and separated from the channel by a gate dielectric to control conduction between the source and drain.
• The performance of such devices can be improved by, for example, reducing supply voltage, gate dielectric thickness, or channel length. However, such conventional methods face mounting problems as the size and spacing of the devices become ever smaller. For example, at very small channel lengths, the advantages of reducing channel length to increase the number of transistors per unit area and saturation current are offset by undesirable carrier velocity saturation effects. Similar benefits which are obtained from reducing gate dielectric thickness, such as decreased gate delay, are limited in small devices by increased gate leakage current and charge tunneling through the dielectric which can damage the transistor over time. Reducing supply voltage allows lower operating power levels but such reductions are also limited by the threshold voltage of the transistor.
• In a relatively newly developed method of enhancing transistor performance, the atomic lattice of a deposited material is stressed to improve the electrical properties of the material itself, or of underlying or overlying material that is strained by the force applied by a stressed deposited material. Lattice strain can increase the carrier mobility of semiconductors, such as silicon, thereby increasing the saturation current of the doped silicon transistors to thereby improve their performance. For example, localized lattice strain can be induced in the channel region of the transistor by the deposition of component materials of the transistor which have internal compressive or tensile stresses. For example, silicon nitride materials used as etch stop materials and spacers for the silicide materials of a gate electrode can be deposited as stressed materials which induce a strain in the channel region of a transistor. The type of stress desirable in the deposited material depends upon the nature of the material being stressed. For example, in CMOS device fabrication, negative-channel (NMOS) doped regions are covered with a tensile stressed material having positive tensile stress; whereas positive channel MOS (PMOS) doped regions are covered with a compressive stressed material having negative stress values.
• Thus, it is desirable to form stressed materials that have predetermined types of stresses, such as tensile or compressive stresses. It is further desirable to control the level of stress generated in the deposited material. It is also desirable to deposit such stressed materials to generate uniform localized stresses or strains in the substrate. It is also desirable to have a process that can form stressed materials over active or passive devices on the substrate without damaging the devices. It is still further desirable that the deposited films be highly conformal to underlying topography.
• Moreover, as device geometries of integrated circuits and transistors have decreased, the gate drive current required by the transistors has increased. A gate drive current of a transistor increases as its gate capacitance increases, and the gate capacitance of a transistor is equal to k*A/d, where k is the dielectric constant of the gate dielectric (which is usually silicon oxide), d is the dielectric thickness, and A is the gate contact area. Thus, decreasing the dielectric thickness and increasing the dielectric constant of the gate dielectric are two ways of increasing the gate capacitance and the drive current.
• Attempts have been made to reduce the thickness of dielectrics, such as reducing the thickness of silicon dioxide (SiO2) dielectrics to below 20 Å. However, the use of SiO2 dielectrics with thicknesses below 20 Å often results in undesirable performance and decreased durability. Nitridation of the SiO2 layer has been employed as a way to reduce the thickness of the SiO2 dielectric layer to below 20 Å.
• Forming dielectric layers on a substrate by chemical reaction of gases is one of the primary steps in the fabrication of modern semiconductor devices. These deposition processes are referred to as chemical vapor deposition (CVD). Plasma enhanced chemical vapor deposition (PECVD) uses plasma in combination with traditional CVD techniques.
• CVD and PECVD processes help form vertical and horizontal interconnects. Damascene or dual damascene methods involve the deposition and patterning of one or more material layers. In the damascene method, the low k dielectric (i.e., having a dielectric constant (k) of less than 4.0) or other dielectric materials are deposited and pattern etched to form vertical interconnects, also known as vias, and horizontal interconnects, also known as lines.
• However, when low k materials are used in damascene formation, it is difficult to produce features with little or no surface defects or feature deformation. During deposition, the material may overloaf, that is, deposit excess material on the shoulders of a via and deposit too little material in the base of the via, forming a shape that looks like the side of a loaf of bread. The phenomena is also known as footing because the base of the via has a profile that looks like a foot. In extreme cases, the shoulders of a via may merge to form a joined, sealed surface across the top of the via. The film thickness non-uniformity across the wafer can negatively impact the drive current improvement from one device to another. Modulating the process parameters alone does not significantly improve the step coverage and pattern loading problems.
• Therefore, a need exists in the art for a deposition method useful for semiconductor processing, which provides a conformal film over formed features.
BRIEF SUMMARY OF THE INVENTION
• Stress of a silicon nitride layer may be enhanced by deposition at higher temperatures. Employing an apparatus that allows heating of a substrate to substantially greater than 400° C. (for example a heater made from ceramic rather than aluminum), the silicon nitride film as-deposited may exhibit enhanced stress allowing for improved performance of the underlying MOS transistor device. In accordance with some embodiments, a deposited silicon nitride film is exposed to curing with plasma and ultraviolet (UV) radiation, thereby helping remove hydrogen from the film and increasing film stress. In accordance with still other embodiments, a silicon nitride film is formed utilizing an integrated process employing a number of deposition/curing cycles to preserve integrity of the film at the sharp corner of the underlying raised feature. Adhesion between successive layers may be promoted by inclusion of a post-UV cure plasma treatment in each cycle.
• A further understanding of the objects and advantages of the present invention can be made by way of reference to the ensuing detailed description taken in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
• FIG. 1 is a simplified cross-sectional view of a substrate showing a partial view of a transistor structure with an overlying deposited tensile stressed silicon nitride material;
• FIG. 2 plots compressive stress and refractive index for CVD SiN films formed under a number of different process conditions;
• FIG. 3 shows FT-IR spectra for CVD SiN films formed under a number of different process conditions;
• FIG. 4A plots compressive stress and refractive index for CVD SiN films deposited with different silane flow rates;
• FIG. 4B plots compressive stress and refractive index for CVD SiN films deposited with different faceplate-to-wafer spacings;
• FIG. 4C plots compressive stress and refractive index for CVD SiN films deposited with different hydrogen gas flow rates;
• FIG. 4D plots compressive stress and refractive index for CVD SiN films deposited at different applied power levels;
• FIG. 5A plots compressive stress and refractive index for CVD SiN films deposited with and without hydrogen gas;
• FIG. 5B plots compressive stress and refractive index for CVD SiN films deposited at different powers and at different temperatures;
• FIG. 6 is a graph showing measured tensile stresses for increasing power level of the high RF voltage and different nitrogen plasma treatment process cycles;
• FIG. 7 is a graph showing the tensile stress values and refractive indices obtained for layers deposited under different deposition and nitrogen plasma treatment process cycles;
• FIG. 8 is a graph showing the change in tensile stress values of deposited materials with N₂plasma treatment time;
• FIG. 9 is a graph showing the effect of N₂plasma treatment time on the tensile stress value for processes having different purge and pump cycles;
• FIG. 10 plots film tensile film stress versus throughput for CVD SiN films formed with different dep/treat cycles;
• FIG. 11A shows FT-IR spectra for a CVD SiN film resulting from deposition at 400° C. under the various cycle and times shown in Table IV.
• FIG. 11B plots the ratio of N—H:Si—N bonds of the CVD SiN films resulting from deposition under the various cycle conditions shown in Table IV.
• FIGS. 12A-D plotting film stress of a CVD SiN film formed at 450° C. under a variety of different process conditions.
• FIG. 13A charts tensile stress and plots reduction in hydrogen content for CVD SiN films exposed to post-deposition treatment with plasma formed from gases containing different levels of Argon, at 400° C.;
• FIG. 13B plots tensile stress, H content, and FT-IR spectrum peak area for N—H and Si—H bonds, for the CVD SiN films deposited inFIG. 13A;
• FIG. 13C charts tensile stress and plots reduction in hydrogen content for CVD SiN films exposed to post-deposition treatment with an Ar plasma at different power levels;
• FIG. 13D plots tensile stress, H content, and FT-IR spectrum peak area for N—H and Si—H bonds, for the CVD SiN films deposited inFIG. 13C;
• FIG. 13E charts tensile stress and plots reduction in hydrogen content for CVD SiN films exposed to post-deposition treatment with plasma formed from gases containing different levels of Argon, at 550° C.;
• FIG. 13F plots tensile stress, H content, and FT-IR spectrum peak area for N—H and Si—H bonds, for the CVD SiN films deposited inFIG. 13F;
• FIG. 14 plots film thickness versus number of dep/treatment cycles, for CVD SiN films deposited with and without Ar plasma cleaning between each cycle;
• FIG. 15 plots film thickness versus number of dep/treatment cycles for, CVD SiN films deposited without Ar plasma cleaning between each cycle;
• FIG. 16 plots film thickness versus number of dep/treatment cycles, for CVD SiN films formed under a number of conditions between successive cycles;
• FIG. 17 plots films thickness versus number of dep/treatment cycles, for CVD SiN films formed under a number of conditions between successive cycles;
• FIG. 18 is a schematic view of an exposure chamber suitable for exposing a silicon nitride material to a suitable energy beam source;
• FIG. 19 is a bar graph showing the change in tensile stress values of material deposited at different process conditions (A, and B) for increasing ultraviolet radiation exposure time;
• FIG. 20 is a graph showing a Fourier Transformed Infrared (FT-IR) spectrum of a stressed silicon nitride material in the as-deposited state (as dep. —continuous line), and after treatment with ultraviolet radiation (treated film—dashed line);
• FIGS. 21A to 21E are graphs showing the increase in tensile stress of deposited silicon nitride materials with time of ultraviolet radiation exposure, and inFIG. 21A, to both single wavelength (Treatment 1) and broadband (Treatment 2) ultraviolet exposure;
• FIG. 22A plots tensile stress and shrinkage versus deposition temperature for CVD SiN films exposed to post-deposition treatment with UV radiation;
• FIG. 22B plots total H content, and the ratio of FT-IR spectrum peak areas of Si—H and N—H bonds, for the CVD SiN films ofFIG. 22A;
• FIG. 23 shows FT-IR spectra of a CVD SiN film as-deposited, and after treatment with UV radiation;
• FIG. 24 shows FT-IR spectra of CVD SiN films exposed to post-deposition treatment plasma as generated from different gas mixtures;
• FIGS. 25A-D are cross-sectional electron micrographs showing conformality of CVD SiN films formed under different processing conditions;
• FIGS. 26A-B are enlarged cross-sectional electron micrographs showing morphology of CVD SiN films formed under different processing conditions;
• FIG. 27 plots the rate of deposition of material versus exposure dose.
• FIG. 28A plots deposition rate versus exposure dose.FIG. 28B shows a cross-sectional micrograph showing a feature bearing a layer deposited after a SiH₄exposure dose of 500 mT*s.
• FIGS. 29A-H are cross-sectional electron micrographs showing morphology of CVD SiN films formed under different processing conditions;
• FIG. 30 is a schematic view of an embodiment of a substrate processing chamber that is a PECVD deposition chamber;
• FIG. 31 is a simplified cross-sectional view of a conventional higher pressure processing chamber, and a chamber modified in accordance with an embodiment of the instant invention to operate at lower pressures;
• FIG. 32 is a perspective view of the modified chamber shown in cross-sectional inFIG. 31.
• FIG. 33 is a bar graph showing deposited and post annealed particle performance with the addition of an oxide layer.
• FIGS. 34A-C are graphs showing deposited and post annealed particle performance when an increased initiation layer is used.
• FIG. 35 is a bar graph showing deposited and post annealed particle performance when an oxide layer is used in combination with an increased initiation layer.
• FIG. 36 is a bar graph showing deposited and post annealed particle performance when various approaches are used to improve compressive stress reliability.
• FIG. 37A is a drawing highlighting the Fresnel Principle.
• FIG. 37B is a cross sectional micrograph illustrating the Fresnel Principle.
• FIG. 38A-B are graphs showing the Brewster angle theory.
• FIGS. 39A-M illustrate simplified cross-sectional views of an integration process flow employing stress from a plurality of sources to enhance device performance.
• FIG. 40 is graph showing the response of stressed nitride films when used with Rapid Thermal Processing versus the composition (Si—H/N—H) and total hydrogen content of the film.
• FIG. 41 is graph showing a higher etch rate on isolated areas for a post deposition NF₃etch-back process.
• FIG. 42 is an electron micrograph showing profile changes and Pattern Loading Effect (PLE) improvement after an NF₃etch-back process in accordance with an embodiment of the present invention.
• FIG. 43 shows cleavage of bonds in excited electronic states and formation of new strained silicon nitride.
• FIG. 44 plots energy change versus % increase in bond length, in the excited and ground state.FIG. 44A is an enlarged view of a portion of the plot ofFIG. 44.
• FIG. 45A shows a chain-like cluster modeling hydrogenated SiN.
• FIG. 45B shows a ring cluster modeling hydrogenated SiN.
• FIG. 46 compares calculated US observed bank gaps for silicon oxide and silicon nitride.
• FIG. 47 plots energy change versus N—H bond length in a chain-like cluster.
• FIG. 48A plots energy change versus S—N bond length at different states.
• FIG. 48B plots energy change versus Si—H bond length at different states.
• FIG. 49A plots energy change versus bond length for a larger stretched N—H bond in a ring cluster.
• FIG. 49B plots energy change versus bond length for a larger stretched Si—H bond in a ring cluster.
• FIG. 50A plots energy change versus Si—N bond length in different states for a chain cluster.
• FIG. 50B plots energy change versus bond length for a larger stretched Si—H bond in a ring cluster.
• FIG. 51 plots % reduction of Si—H and N—H content, and increase in Si—N content over time of a UV cure of a film.
• FIG. 52A shows dissociation of a Si—N bond in a chain cluster.
• FIG. 52B shows dissociation of a Si—N bond in a ring cluster.
• FIG. 52C shows restoration of SiN bond between ring clusters in SiN bulk material.
• FIG. 53A shows interaction of bulk SiN material with UV radiation to release atomic H.
• FIG. 53B shows reaction of H with bulk SiN material to release molecular hydrogen gas.
• FIG. 53C shows abstraction of H by bulk SiN material.
• FIG. 54 is a simplified schematic diagram showing deposition of silicon nitride under different conditions.
• FIG. 55A is a bar chart of stress for nitride films deposited under different conditions.
• FIG. 55B shows FTIR absorbance spectra of the nitride films deposited inFIG. 55A.
• FIG. 56A are bar charts showing various characteristics of the nitride films deposited inFIG. 55A.
• FIG. 57 plots stress versus deposition temperature exhibited by nitride films deposited under different conditions.
• FIG. 58 plots atomic hydrogen concentration versus depth into a silicon nitride film formed over a silicon substrate.
• FIGS. 59A-B plot various characteristics of silicon nitride films deposited under different conditions.
• FIG. 60 plots stress and refractive index of silicon nitride films deposited at different temperatures.
• FIGS. 61A-B are bar charts of stress and deposition rate of silicon nitride films formed under various conditions.
• FIGS. 62A-C are bar charts of various properties of silicon nitride films deposited under different conditions.
• FIGS. 63A-B plot stress and shrinkage respectively, of silicon nitride films formed under different conditions.
• FIG. 64A is an electron micrograph of a densely patterned structure bearing a deposited silicon nitride film. FIG.64AB is a bar chart of stress of films formed over densely patterned features under different conditions.
• FIG. 64B is an electron micrograph of an isolated feature bearing a deposited silicon nitride film. FIG.64BA is a bar chart of stress of films formed over isolated features under different conditions.
• FIGS. 65A-B are bar charts showing hydrogen content and wet etch rate ratio (WERR) of silicon nitride films formed under various conditions.
• FIGS. 66A-B are electron micrographs of features bearing silicon nitride films before and after UV curing, respectively.
• FIG. 67A is a simplified schematic diagram showing stress of an NMOS structure.FIG. 67B is a simplified cross-sectional view of an NMOS gate experiencing stress.
• FIGS. 68A-F are electron micrographs showing silicon nitride films formed under different conditions over dense and isolated structures.
• FIGS. 69A-C are electron micrographs showing the corners of raised features bearing silicon nitride films formed under different conditions.
• FIGS. 70A-F are electron micrographs showing silicon nitride films formed over raised features under different conditions.
• FIGS. 71A-B are bar charts showing thickness and stress, respectively, of silicon nitride films formed under different conditions.
• FIG. 72 plots FTIR spectra of silicon nitride films formed under different conditions.
• FIGS. 73A-B show electron micrographs of raised features bearing silicon nitride films formed under different conditions.
• FIGS. 74A-C are electron micrographs of silicon nitride films formed under different conditions over isolated features.
• FIGS. 75A-C are electron micrographs of silicon nitride films formed under different conditions over densely patterned features.
• FIG. 76 plots hydrogen concentration versus depth into a silicon nitride film formed under different conditions.
• FIGS. 77A-B plot stress versus cure time for silicon nitride films exposed to different UV curing conditions.
• FIG. 78A plots atomic concentration of different elements versus depth into a silicon nitride film.
• FIG. 78B is a bar chart of stress of silicon nitride films formed under different conditions.
• FIG. 79A is a simplified schematic diagram of an embodiment of an apparatus in accordance with the present invention which may be used to form a stressed silicon nitride film.
• FIG. 79B is a screen shot showing of a sequence of steps employed by the tool ofFIG. 79A.
• FIG. 80 plots density and wet etch rate of a deposited SiN film as a function of deposition temperature.
• FIG. 81 is a schematic diagram illustrating the effect of adding dopant to the chemistry for depositing silicon nitride.
• FIG. 82 is a flow chart of one embodiment of a deposition process.
• FIG. 83 is a flow chart of an additional embodiment of a deposition process.
• FIG. 84 is a graph depicting the effect of one embodiment on the post-UV cure wet etch rate (WER) and stress.
• FIG. 85 is a graph plotting relative hydrogen content versus film stress and shrinkage.
DETAILED DESCRIPTION OF THE INVENTION
• A plurality of techniques may be employed alone or in combination, to enhance conformality and stress in a film formed by chemical vapor deposition (CVD). Embodiments in accordance with the present invention are particularly suited for forming conformal layers exhibiting tensile or compressive stress which impose strain on an underlying silicon lattice.
• In one exemplary application, the tensile or compressive stressed silicon nitride material is formed on asubstrate32 or workpiece in the fabrication of a MOSFET structure392—which is illustrated in the simplified cross-sectional diagram ofFIG. 1. The relatively high internal stress of the deposited and treatedsilicon nitride material20 induces a strain in achannel region28 of thetransistor24. The induced strain improves carrier mobility in thechannel region28 which improves transistor performance, such as for example, by increasing the saturation current of thetransistor24. Thesilicon nitride material20 can also have other uses within theMOSFET24, for example, as an etch stop material. The highly stressedsilicon nitride material20 is also useful in other structures, such as other transistors including without limitation, bipolar junction transistors, capacitors, sensors, and actuators. The substrate can be a silicon wafer or can be made from other materials such as germanium, silicon germanium, gallium arsenide and combinations thereof. The substrate orworkpiece32 can also be a dielectric, such as glass, which is used in the fabrication of displays.
• Thetransistor24 illustrated inFIG. 1 is a negative channel, or n-channel, MOSFET (NMOS) having source and drainregions36,40 that are formed by doping thesubstrate32 with a Group VA element to form an n-type semiconductor. In the NMOS transistor, the substrate orworkpiece32 outside of the source and drainregions36,40 is typically doped with a Group IIIA element to form a p-type semiconductor. For the NMOS channel regions, the overlying stressed silicon nitride material is fabricated to have a tensile stress.
• In another version, theMOSFET transistor24 comprises a positive channel or p-channel MOSFET (PMOS), (not shown) which has source and drain regions that are formed by doping the substrate with a Group IIIA element to form a p-type semiconductor. In a PMOS transistor, thetransistor24 may comprise a substrate orworkpiece32 comprising an n-type semiconductor or may have a well region (not shown) comprising an n-type semiconductor formed on a substrate orworkpiece32 comprising a p-type semiconductor. The PMOS channel regions are covered with a compressive stressed silicon nitride.
• In the version shown, thetransistor24 comprises atrench44 to provide isolation betweentransistors24 or groups oftransistors24 on thesubstrate32, a technique known as shallow trench isolation. Thetrench44 is typically formed prior to the source and drainregions36,40 by an etch process. A trench side wall liner material (not shown) may be formed in thetrench44 by, for example, a rapid thermal oxidation in an oxide/oxynitride atmosphere, which may also round sharp corners on the trench44 (and elsewhere). In one version, thetrench44 may be filled withmaterial46 having a tensile stress, which can also be used to provide a tensile stress to thechannel region28. The deposition of thetrench material46 which may include the use of a High Aspect Ratio Process (HARP), which may include using an O₃/tetraethoxy silane (TEOS) based sub-atmospheric chemical vapor deposition (SACVD) process.Excess trench material46 may be removed by, for example, chemical mechanical polishing.
• The transistor comprises agate oxide material48 and agate electrode52 on top of thechannel region28 between the source and drainregions36,40. In the version shown, thetransistor24 also comprisessilicide materials56 on top of the source and drainregions36,40 as well as thegate electrode52. Thesilicide materials56 are highly conductive compared to the underlying source and drainregions36,40 andgate electrode52, and facilitate the transfer of electric signals to and from thetransistor24 throughmetal contacts54. Depending on the materials and formation processes used, thesilicide materials56 may also comprise a tensile stress and produce tensile strain in thechannel region28. The transistor shown also comprisesspacers60 and oxide-pad materials64 which may be located onopposite sidewalls68 of thegate electrode52 to keep thesilicide materials56 separated during a silicidation process to form thesilicide materials56. During silicidation, a continuous metal material (not shown) is deposited over the oxide-containing source and drainregions36,40 andgate electrode52, as well as thenitride containing spacers60. The metal reacts with the underlying silicon in the source and drainregions36,40 andgate electrode52 to form metal-silicon alloy silicide materials, but are less reactive with the nitride materials inspacers60. Thus, thespacers60 allow the overlying, unreacted metal to be etched away while not affecting the metal alloy insilicide materials56.
• The length of thechannel region28 is shorter than the length of thegate oxide material48. The length of thechannel region28 measured between the edges of thesource region36 and thedrain region40 may be about 90 nm or less, for example, from about 90 nm to about 10 nm. As the length ofchannel region28 gets smaller,implants72, also known as halos, may be counter-doped into thechannel region28 to prevent charge carriers from uncontrollably hopping from thesource region36 to thedrain region40 and vice versa.
• In the version shown inFIG. 1, thesilicon nitride material20 is formed above thesilicide materials56. Thesilicon nitride material20 typically acts as a contact-etch stop material as well as providing strain to thechannel region28. Thesilicon nitride material20 is capable of being deposited to have a stress values ranging from compressive to tensile stresses. Selection of stress in thesilicon nitride material20 selects the type of strain provided to thechannel region28 of thetransistor24.
• As just described, film stress and conformality are two key characteristics of a film that is designed to impose strain on an underlying silicon lattice. Incorporated by reference herein for all purposes is U.S. nonprovisional patent application Ser. No. 11/055,936, filed Feb. 11, 2005 and entitled “TENSILE AND COMPRESSIVE STRESSED MATERIALS FOR SEMICONDUCTORS”. This previously-filed patent application describes a number of techniques which may be employed to control stress of a deposited film.
• The instant provisional application describes additional techniques for controlling stress and conformality of a film formed by chemical vapor deposition (CVD). It has been discovered that both types of stress, namely tensile or compressive, and the stress value of the deposited silicon nitride stressed material can be set in the deposited material by controlling processing parameters or by treating the deposited material, as described below. The processing parameters are described separately or in particular combinations; however, the invention should not be limited to the exemplary separate or combinations described herein, but may include other separate or combinations of parameters as would be apparent to one of ordinary skill in the art.
• The following sections address controlling over compressive film stress, tensile film stress, and film conformality, respectively.
• I. Compressive Stressed Materials
• Deposition process and treatment conditions can be tailored to deposit a compressive stressed material on the substrate or to treat a material during or after deposition to increase its compressive stress value. Without being limited by the explanation, it has been discovered that a silicon nitride stressed material having higher compressive stress values can be obtained by increasing the RF bombardment to achieve higher film density by having more Si—N bonds in the deposited material and reducing the density of Si—H and N—H bonds. Higher deposition temperatures and RF power improved the compressive stress levels of the deposited film. In addition, higher compressive stresses levels were obtained in the deposited material at higher kinetic energy levels of plasma species. It is believed that bombardment of energetic plasma species, such as plasma ions and neutrals, generates compressive stresses in the deposited material because film density increases.
• The process gas used to deposit compressive stressed silicon nitride includes the silicon-containing and nitrogen-containing gases described below in connection with the formation of tensile stressed materials. Also the general deposition process conditions, such as radio frequency type and power levels, gas flow rates and pressure, substrate temperature and other such process are about the same as those used for the deposition of tensile stressed materials, unless otherwise specified.
• To deposit a compressive stressed silicon nitride material, the process gas introduced into the chamber comprises a first component that includes a silicon-containing gas, a second component that includes a nitrogen-containing gas, and a third component containing carbon, boron, or germanium. The silicon-containing compound can be, for example, silane, disilane, trimethylsilyl (TMS), tris(dimethylamino)silane (TDMAS), bis(tertiary-butylamino)silane (BTBAS), dichlorosilane (DCS), and combinations thereof. The carbon-containing compound can be, in addition to the compounds mentioned above, ethylene (C₂H₂), propylene (C₃H₆), toluene (C₇H₈), and combinations thereof. The boron and germanium containing compounds can be diborane (B₂H₆), boron chlorides (B₂C₁₄), and germane (GeH₄), respectively. For example, a suitable silane flow rate is from about 10 to about 200 sccm. The nitrogen-containing gas can be, for example, ammonia, nitrogen, and combinations thereof. A suitable ammonia flow rate is from about 50 to about 600 sccm. The process gas can also include a diluent gas that is provided in a much larger volume than the reactive gas components. The diluent gas can also serve both as a diluent and at least partially as a reactant nitrogen-containing gas, for example, nitrogen in a flow rate of from about 500 to about 20,000 sccm. Other gases that can be included can be inert gases, such as for example, helium or argon or Xenon, in a flow rate of from about 100 to about 5,000 sccm. The process gas may also contain additional gases such as an oxygen-containing gas, for example, oxygen, when depositing silicon oxy-nitride materials. Unless otherwise specified, in these processes, the electrode power level is typically maintained at from about 100 to about 400 Watts; electrode spacing is from about 5 mm (200 mils) to about 12 mm (600 mils); process gas pressure is from about 1 Torr to about 4 Ton; and substrate temperature is from about 300 to about 600° C.
• It has been discovered that the introduction of H₂gas into the deposition chemistry may substantially increase compressive stress in the resulting films that are formed. Table I below lists three separate conditions for deposition of silicon nitride films.

• TABLE I
  FILM #	SiH4(sccm)	NH3(sccm)	N2(L)	Ar (L)	H2(L)
  1	60	30	1	3	0
  2	60	30	1	3	1
  3	60	30	0	3	1

• FIG. 2 plots film stress and refractive index for SiN films deposited under the three separate deposition conditions listed above in Table I.FIG. 2 shows the effect of adding H₂upon the compressive stress exhibited by the resulting film.FIG. 2 shows that the highest compressive stress is achieved when the SiH₄/NH₃ratio is optimized for given H₂and Ar flows, with an N₂/Ar/H₂ratio of 0/3/1.
• FIG. 3 plots FT-IR absorption spectra for silicon nitride film #'s 1 and 3 listed above in Table I. The FT-IR spectrum for CVDSiN film #3 may fairly be contrasted with that of CVDSiN film #1. The spectra ofFIG. 2 indicate that thenitride film #3 deposited in the presence of hydrogen gas, exhibits an increase in intensity at about wavenumber 3330 cm⁻¹. This region of the spectrum corresponds to N—H deformation characteristic of tensile stress, indicating an increase in compressive stress.
• Within given relative ratios of process gases, other parameters can be varied to further enhance compressive stress. For example, SiN films were deposited by CVD at the 0/3/1 N₂/Ar/H₂flow rate ratio just described, under different flow rates of SiH₄and NH₃. These experiments revealed a center point of maximum compressive stress (G˜−2.8 GPa) with a SiH₄flow rate of 60 sccm, and a NH₃flow rate of 150 sccm.
• FIGS. 4A-D indicate that the level of compressive stress in the deposited film can be further enhanced to above about −2.8 GPa by varying other process parameters. For example,FIG. 4A plots stress and refractive index for CVD SiN films deposited at three different SiH₄flow rates.FIG. 4A shows that SiH₄flow rate may be optimized to enhance compressive stress.
• FIG. 4B plots stress and refractive index for CVD SiN films deposited at three different wafer-to-faceplate spacing distances.FIG. 4B also shows that this spacing difference may be optimized to enhance compressive stress.
• FIG. 4C plots stress and refractive index for CVD SiN films deposited at three different H₂flow rates.FIG. 4C shows that the H₂flow rate parameter may be optimized to enhance compressive stress.
• FIG. 4D plots stress and refractive index for CVD SiN films deposited at three different RF powers.FIG. 4D shows that a maximum compressive stress may be achieved by controlling this process parameter.
• FIGS. 5A and 5B show that variation of a number of process parameters in combination, may allow for a CVD SiN film to exhibit a compressive stress approaching −3.0 GPa. Specifically,FIG. 5A plots stress and refractive index of SiN films deposited with and without hydrogen gas, at three different temperatures.FIG. 5A shows that the film deposited at 480° C. with hydrogen gas, exhibited a compressive film stress approaching −3 GPa.5B plots stress and refractive index for SiN film deposited with H₂and Ar at 480° C., with a high frequency power of either 75 W or 100 W.FIG. 5B shows that the film deposited with a low frequency of 75 W achieved a compressive stress of −3 GPa. For this combination of gases/pressure/spacing, the optimum power of 75 W resulted in a film having the highest compressive stress.
• As just described, deposition of silicon nitride in the presence of hydrogen gas can produce a desirable enhancement in the compressive stress exhibited by the resulting SiN film. However, it is well known that hydrogen gas can easily diffuse through dielectric materials. Moreover, the penetration of such hydrogen into semiconducting regions can degrade reliability of the device, especially at the transistor level. This phenomenon is even more pronounced when high stress films are used as etch stop layers.
• It has also been observed that hydrogen may accumulate at the nitride/device (NiSix) interface, and this accumulated hydrogen can also create physical defects, such as blistering and delamination during subsequent processing steps. An analysis of the residue at the delamination site revealed a presence of Zn and Na, typical metal contaminants. The probability of such physical defects increases with the level of compressive stress, and is more pronounced when the nitride film is deposited at a lower temperature.
• In accordance with various embodiments of the present invention, three approaches may be utilized alone or in combination, to eliminate the occurrence of defects and thus improve the device reliability when high compressive stress nitride films are formed by deposition in the presence of hydrogen gas. In accordance with one embodiment, defects may be reduced by pre-deposition plasma treatment of the surface that is to receive the high compressive stress silicon nitride. In accordance with another embodiment, defects may be reduced by forming a buffer layer over the surface that this to receive the high compressive stress nitride layer, prior to deposition of that nitride layer. In accordance with still a further embodiment of the present invention, defects may be reduced by forming a SiN layer in the absence of hydrogen, prior to deposition of an overlying high stress SiN film in the presence of hydrogen gas. Each of these approaches is now discussed in turn below.
• In accordance with the first embodiment just mentioned, a plasma pre-treatment step prior to deposition of silicon nitride in the presence of hydrogen can be employed. This pre-deposition plasma treatment cleans the wafer surface, removing contamination that could render the surface susceptible to penetration by hydrogen, such as residual silane or metallic contaminants such as Zn and Na. The plasma utilized for this pre-treatment step may be formed from a number of different ambients, including but not limited to N₂O, O₂and NH₃-containing plasmas which have been successfully used to reduce the number of defects of the nitride film post anneal. The pre treatment may be applied in the same or in a different processing chamber in which the SiN is deposited. The plasma treatment may conclude prior to the subsequent deposition step, or may be continuous and extend into the SiN deposition step. The specific parameters of this plasma pre-treatment, such as duration, power, temperature, and ambient, may vary according to the particular application in order to achieve the desired effects.
• In accordance with the second embodiment of the present invention mentioned above, defects can be reduced and reliability improved, by forming a buffer layer on the surface that is to receive the high compressive stress nitride. Such a buffer layer, typically comprising oxide, will then be located at the nitride/NiSix interface. This oxide serves as a buffer layer, blocking hydrogen diffusing through the deposited SiN film. Atomic hydrogen reaching the oxide buffer will attempt to combine with other hydrogen atoms to form molecular hydrogen, but will be unsuccessful in doing so owing to the strength of the Si—N, Si—H, and N—H bonds. Specifically, hydrogen diffuses by hopping from one Si—H or N—H bond to another. To migrate out of the nitride layer into the oxide layer, and Si—O bond needs to break and an Si—N bond will form. This reaction id not energetically favorable, so the hydrogen will remain trapped in the nitride layer. In this manner, the oxide buffer layer acts as a wall, preventing gas accumulation at the Si/SiN interface, and decreasing blistering and post anneal delamination.
• FIG. 33 compares contamination exhibited by high compressive stress silicon nitride layers deposited over oxide buffer layers of three different thicknesses.FIG. 33 shows that even the use of a very thin oxide buffer layers results in a post-anneal area count of about 2 adders (defects per wafer) or less.
• In accordance with the third embodiment of the present invention mentioned above, defect count may be reduced, and reliability enhanced, by forming an initiation layer prior to introduction of the hydrogen gas utilized to form the high compressive stress nitride layer. As described above, the desired high compressive stress characteristic of the nitride layer derives from the presence of hydrogen gas during deposition. In accordance with this third embodiment, the penetration of this hydrogen gas may be reduced by performing the initial stages of the deposition in the absence of hydrogen, such that the resulting silicon nitride initiation layer does not exhibit high compressive stress. Once the initiation layer is formed, hydrogen gas is introduced into the deposition gas mixture to imbue the overlying silicon nitride with the desired level of compressive stress.
• The role of the initiation layer is to protect the devices from the potential surges of electrons occurring in the plasma during the deposition of the high compressive stress. Proper adjustment of the initiation layer thickness can also allow it to serve as a barrier for hydrogen diffusion. The initiation layer essentially forms a barrier which aids in eliminating hydrogen accumulation.
• FIG. 34A shows the number of adders observed by a high compressive stress silicon nitride layer is formed at 400° C. and annealed for 5 hours at 400° C., over initiation layers of different thicknesses.FIG. 34A shows that use of a thicker initiation layer improves particle performance post-anneal.FIG. 34A also shows that the post-anneal area count decreases to less than about 3 adders only for initiation layer thicknesses larger than about 90 Å (deposited for 12 sec), as compared with initiation layers having a thickness of about 35 Å (deposited for 5 sec).
• FIG. 34B shows particle performance of high compressive stress films of varying thicknesses formed at 480° C., over an initiation layer of the same thickness (deposited for 10 seconds).FIG. 34B shows that deposition of an initiation layer for 10 seconds improved particle performance for films up to at least 1500 Å in thickness.
• FIG. 34C plots film stress versus film thickness for high compressive stress films including an initiation layer deposited for 5 seconds or 10 seconds.FIG. 34C reveals that increasing the initiation from 5 seconds to 10 seconds does not significantly change the stress for film having a thickness of greater than about 350 Å.
• Though the three aforementioned approaches for increasing compressive stress reliability have been explained separately, they may also be used in various combinations with one another. For example,FIG. 35 plots particle count for four different high compressive stress silicon nitride film stacks deposited at 480° C. and then annealed for 5 hours at 400° C. The first and second film stacks include initiation layers deposited for 5 and 10 seconds, respectively. The third and fourth films include initiation layers formed over oxide layers deposited for the times indicated.
• FIG. 35 shows that use of the thicker initiation layer resulted in good particle performance in the “as deposited” film.FIG. 35 shows that film stacks utilizing an oxide buffer layer (having a thickness of 30-50 Å) under the initiation layer, also exhibited improved particle performance.
• FIG. 35 plots particle count and area count for high compressive stress silicon nitride layers formed under a variety of different conditions.FIG. 35 shows that pre-deposition plasma treatment with ammonia (NH₃) is the most efficient technique for improving resistance to blistering. The use of an oxide buffer layers and initiation layers also showed good results.
• The three embodiments of the present invention just described, can be employed to solve integration-related issues with other dielectric films such as low-k dielectrics and high tensile stress silicon nitride using hydrogen or deuterium in the deposition. In accordance with still other embodiments of the present invention, Deuterium can also be utilized instead of hydrogen during deposition, in order to form silicon nitride films with compressive stress greater than 3 GPa.
Post Deposition NF₃Etch-Back Process
• As described above, silicon nitride dielectric films may be used as a barrier or etch stop layer for various applications. The film thickness non-uniformity across the wafer (e.g., bottom vs. top vs. sidewall thickness) can negatively impact the drive current improvement from one device to another. PECVD dielectric films may suffer from a high deposition rate in isolated areas as well as at the poly-gate upper corner (e.g., bread-loafing). Modulating process parameters may not significantly improve step coverage or pattern loading.
• In accordance with one embodiment of the present invention, an NF₃etch-back process modulates a PECVD nitride step coverage and pattern loading. Diluted NF₃plasma can be used to etch back the nitride film after deposition to modulate the step coverage profile. This etch-back process results in a low etch rate and desired etch uniformity. The etch-back profile may be similar to that of a PECVD deposition profile. In one embodiment, the NF₃etch-back process is performed in the same chamber as the deposition process and can be run at the end of the deposition. Alternatively, the etch-back process can be run in a deposition/etch sequence. NF₃process parameters may be adjusted so that the etch profile can be modulated to match the deposition profile.
• FIG. 41 illustrates results of a post deposition NF₃etch-back process. InFIG. 41, a higher etch rate is shown for the isolated areas. Furthermore, a diluted NF₃etch-back reduces bottom coverage loading by about 30% without affecting film stress. This can potentially be used to modulate the step coverage for other PECVD dielectric films.
• FIG. 42 shows the profile change and Pattern Loading Effect (PLE) improvement after NF₃etch-back of the silicon nitride layer labeled M3. M3 illustrates the nitride bread-loafing profile. The M3 profile has been changed after an NF₃etch-back process. After post deposition NF₃etch-back of the M3 compressive nitride, the PLE is improved.
• II. Tensile Stressed Materials
• Without being limited by an explanation, it has been discovered that a silicon nitride stressed material having higher tensile stress values can be obtained by a number of techniques employed alone or in combination reducing the net hydrogen content, or the amount of silicon-hydrogen and nitrogen-hydrogen bonds (Si—H and N—H bonds respectively) in the deposited silicon nitride material. It is believed that lowering the hydrogen content in the deposited material, which results in a detectably smaller amount of Si—H and N—H bonds in the silicon nitride material, gives rise to higher tensile stress values in the deposited material. It has further been discovered that several different deposition process parameters, treatments of deposited material, or combinations thereof, can be used to achieve lower hydrogen content in the deposited material, as described herein.
• Incorporated by reference herein for all purposes is “Mechanism of SiN_xDeposition from NH₃—SiH₄Plasma”, Smith et al.,J. Electrochem. Soc., Vol.137, No. 2 (February 1990). This article attributes the formation of tensile stress in a CVD SiN film, to densification of the film in a subsurface zone by the elimination of the volatile ammonia (NH₃) species. Specifically, nitrogen radicals in the plasma may abstract hydrogen to release the ammonia, leaving dangling Si and N bonds separated by voids. Stretched Si—N bonds then form and are detectable by FT-IR analysis by a characteristic peak at 840 cm⁻¹. Constrained by the surrounding material, these stretched Si—N bonds cannot relax, resulting in tensile stress.
• Various techniques may be employed to enhance the level of the tensile stress that is created. As described in detail below, in accordance with one technique, tensile stress may be enhanced by forming the material in multiple layers in a plurality of successive deposition/treatment (dep/treat) cycles. In accordance with still another embodiment, tensile stress may be enhanced by depositing the material at a lower temperature prior to subsequent curing by exposure to radiation.
• To deposit a tensile stressed silicon nitride material, the process gas introduced into the chamber may comprise a first component that includes a silicon-containing gas, a second component that includes a nitrogen-containing gas, and a third component containing carbon, boron, or phosphorus. The silicon-containing gas can be, for example, silane, disilane, trimethylsilyl (TMS), tris(dimethylamino)silane (TDMAS), bis(tertiary-butylamino)silane (BTBAS), dichlorosilane (DCS), and combinations thereof. The carbon-containing compound can be, in addition to the gases mentioned above, ethylene (C₂H₄), propylene (C₃H₆), toluene (C₇H₈), and combinations thereof. The boron and phosphorus containing compounds can be diborane (B₂H₆), boron chlorides (B₂C₁₄), and phosphine (PH₃), respectively. For example, a suitable silane flow rate is from about 5 to about 100 sccm. The nitrogen-containing gas can be, for example, ammonia, nitrogen, and combinations thereof. A suitable ammonia flow rate is from about 10 to about 200 sccm. The process gas can also include a diluent gas that is provided in a much larger volume that the reactive gas components. The diluent gas can also serve both as a diluent and at least partially as a reactant nitrogen-containing gas, for example, nitrogen in a flow rate of from about 5000 to about 30,000 sccm. The process gas may also contain additional gases such as an oxygen-containing gas, for example, oxygen, when depositing silicon oxy-nitride materials. Unless otherwise specified, in these processes, typical gas pressures are from about 3 to about 10 Torr; substrate temperatures are from about 300 to 600° C.; electrode spacing is from about 5 mm (200 mils) to about 12 mm (600 mils); and RF power levels are from about 5 to about 100 Watts.
• A. Nitrogen Plasma Treatment Cycles
• It was further discovered that the stress values of the as-deposited silicon nitride material could be increased by treating the deposited silicon nitride film with a nitrogen plasma treatment step (treat). Such a treatment cycle can be performed by modifying the deposition process to have two process steps. In the first or deposition process step (dep), a process gas comprising a first component comprising silicon-containing gas and nitrogen-containing gas, and a second component comprising a diluent nitrogen gas, is introduced into the chamber and a plasma is formed from the process gas by applying a high or low frequency voltage to the chamber electrodes. In the second or nitrogen plasma treatment cycle, the flow of the first component of the process gas which includes the silicon-containing gas and the nitrogen-containing gas is shut off or substantially terminated; while the flow of the second component comprising the diluent nitrogen gas is still left on, and the high or low frequency voltage supplied to the electrodes to form the plasma is also maintained. These two process cycles are repeated a number of times during deposition of the silicon nitride material.
• Again, without being limited by the explanation, it is believed that the nitrogen plasma cycles further reduce the hydrogen content in the deposited silicon nitride. It is believed that the nitrogen plasma cycle promotes the formation of silicon-nitrogen bonds in the deposited silicon nitride material by removing silicon-hydrogen bonds from the deposited material. However, since the nitrogen plasma treatment can only affect a thin surface region of the deposited silicon nitride film, a nitrogen treatment cycle is formed after short deposition process cycles in which only a film of silicon nitride is deposited on the substrate that is sufficiently thin to allow nitrogen plasma treatment to penetrate substantially the entire thickness of the deposited film. If the nitrogen plasma treatment was performed after deposition of the entire thickness of the silicon nitride film, only a thin surface region of the deposited material would be properly treated.
• The modified deposition process comprises a sufficient number of deposition cycles followed by plasma treatment cycles to achieve the desired film thickness. For example, a deposition process comprising twenty (20) process cycles that each comprises a first deposition cycle and a second nitrogen plasma treatment cycle, deposited a tensile stressed silicon nitride material having a thickness of 500 angstroms.
• Each deposition cycles was performed for about 2 to about 10 seconds and more typically about 5 seconds; and each nitrogen plasma treatment cycle was performed for about 10 to about 30 seconds, and more typically 20 seconds. The resultant deposited tensile stressed silicon nitride material had a thickness of 500 angstroms, and the tensile stress value of the deposited material was increased by the nitrogen plasma treatment to 1.4 GPa. This represented a 10 to 20% improvement over the tensile stress of the as-deposited silicon nitride material, as shown below in Table II.

• 	TABLE II
  	Tensile Film Stress (GPa)
  	Temperature

  	400° C.	430° C.	450° C.	480° C.	500° C.

  Baseline	1.0	1.1	1.2	1.3	1.35
  (Single Material)
  NPT (1) - 20 s Treat	1.3	1.35	1.44	1.44	1.43
  NPT (2) - 10 s Treat	1.3	1.35	1.4	1.4	1.43
  NPT = Nitrogen Plasma Treatment

• Table II shows the improvement in tensile stress of a deposited silicon nitride material with increased substrate temperature during deposition, and with/without multiple nitrogen plasma treatment cycles. The baseline (single material) silicon nitride film was deposited in a single deposition process cycle using the process conditions described above, without nitrogen plasma treatment cycles. The baseline film showed an increase in tensile stress from 1 GPa to about 1.35 GPa as the substrate temperature was increased from 400 to 500° C. The NPT (nitrogen plasma treatment) films were deposited with multiple deposition and nitrogen plasma process cycles—where NPT (1) corresponds to 20 second nitrogen plasma treatment cycles and NPT (2) corresponds to 10 second nitrogen plasma treatment cycles. It is seen that for both NPT films, the tensile stress increased from the baseline film with the nitrogen plasma treatment and also increased with substrate temperature.
• FIG. 6 shows the effect of increasing power level of the high RF voltage applied to theelectrodes105,109, for different nitrogen plasma treatment process conditions, on the tensile stress values of the deposited materials. The first process (A) comprised a deposition stage for 7 seconds, followed by a plasma treatment stage of 40 seconds, repeated for 20 cycles. The second process (B) involved a deposition stage for 5 seconds, followed by plasma treatment for 40 seconds, repeated for 30 cycles. The third process involved plasma stabilizing stage for 4 seconds, deposition for 5 seconds, and plasma treatment for 40 seconds, for 30 cycles. The first and third processes resulted in the highest tensile stress values, when the high radio frequency was set to a power level of a little over 40 Watts, with tensile stress values decreasing on either side of that peak level. The third process steadily decreased in tensile stress value for increasing power levels from a tensile stress value of a little over a 1000 MPa at a power of 0 Watts to 900 MPa at a power of 100 Watts. Thus a power level of 20 to 60 watts, and more preferably 45 watts, was selected for nitrogen plasma/deposition processes.
• FIG. 7 shows the tensile stress values and refractive indices obtained for layers deposited under different deposition processes and different nitrogen plasma treatment cycles. The top line indicates the measured tensile stress values and the bottom line indicated the measured refractive indices. The processes included: a deposition only process; a process with a 40 second purge to see the effect without RF power, that is only thermal impact; a process with a 20 second purge then 20 second plasma step; a process with a 40 second plasma step; a process with a 20 second plasma step then 20 second purge; a process with a 3 second fast purge than 20 second plasma step; a process with a 3 second pump and 20 second plasma step, and a process with a 3 second fast purge and 10 second plasma step. The layers were formed by a performing a sequence of 30 consecutive cycles.
• The highest tensile stress values were achieved with the 3 second pump, 20 second plasma and 3 second fast purge, 10 second plasma processes. The lowest tensile stress values were measured for the deposition only and 10 second purge processes. Generally, the stress value obtained maximizes and evens out for plasma treatment durations longer than 10 sec; however, the stress values do not saturate for treatment durations that were longer than 20 sec when a pump down cycle was added.
• Table III below illustrates the exemplary process conditions for each step during the cycle shown inFIG. 7.

• TABLE III
  	SiH4	NH3	N2	Press.	Power	Duration
  STEP	(sccm)	(sccm)	(L)	(T)	(W)	(sec)

  Stabilize	25	50	20	6	0	4
  Deposit	25	50	20	6	45	5
  Pump	0	0	0	TFO	0	30
  Fast Purge	0	0	20	TFO	0	30
  Purge	0	0	20	6	0	5-40
  Treat	0	0	20	6	45	20-40
  All steps performed at 400° C., with a wafer-to-faceplate spacing of 430 mils
  TFO = throttle valve fully open.

• FIG. 8 shows the effect of the duration of N₂plasma treatment on the tensile stress values of deposited materials. The tensile stress values increase until a treatment duration of about 10 seconds is reached, after which the tensile stress values appears to “saturate” and do not get much larger. The refractive index increases slightly with increasing treatment time.
• FIG. 9 shows the effect of the treatment duration on the tensile stress value for processes having a 3 second fast purge and a 3 second pump. The tensile stress values inFIG. 9 do not appear to “saturate” as much as those inFIG. 8, even for treatment times up to about 20 seconds.
• It has been discovered that the implementation of additional steps in the nitrogen plasma treatment can result in an even greater enhancement of the level of tensile stress in the resulting film. Table IV summarizes the process sequence for various different cycles of N₂plasma exposure.

• TABLE IV
  	Step Time				Throughput
  Process	(x # cycles)	Thickness		Stress	Twin Tool
  Sequence	(sec)	(Å)	RI	(MPa)	(Wafers/hr)

  Dep only	134	500	1.847	1000	20
  (Baseline)
  Dep/Treat	10/20 (x5)	525	1.874	1100	10
  (DP)
  Stab/Dep/	4/5/20 (x25)	580	1.892	1180	6
  Treat
  (SDT)
  Stab/Dep/	4/5/3/5/20 (x30)	510	1.891	1230	4.5
  Pump/
  Purge/
  Treat
  (SDPPuT)

• FIG. 10 plots film stress versus process throughput, for a twin chamber tool, for each of the N₂plasma exposure cycles shown in Table IV.FIG. 10 shows that the addition of steps to each cycle reduces process throughput.
• FIG. 11 shows FT-IR spectra for a 2800 Å-thick CVD SiN film resulting from deposition at 400° C. under the various cycles and times shown in Table IV.FIG. 11 shows that the N₂treatment removes hydrogen from both Si—H and N—H bonds, and the peaks at 2200 cm⁻¹and 3330 cm⁻¹respectively decrease. An additional indication that N—H is reduced by the N₂treatment is the decrease in the peak/shoulder at 1167 cm⁻¹, which corresponds to the Si—NH—Si bond. This peak 1167 cm⁻¹becomes more pronounced when there are a significant number of N—H bonds in the film.
• Without wishing to be limited by any particular theory, it is believed that N₂treatment reduces the hydrogen content in the film leading to the formation of strained Si—N bonds. By introducing additional steps (such as purge and/or pump) after deposition, the effect of the N₂treatment is enhanced because there are no more deposition gases in the chamber. By contrast, where residual SiH₄and NH₃remains in the chamber during treatment, some deposition continues and treatment is not able to penetrate as well into the material already deposited.
• FIG. 11A plots the ratio of N—H:Si—N bonds of the CVD SiN films resulting from deposition under the various cycle conditions shown in Table IV.FIG. 11A shows that the addition of steps to the N₂plasma exposure cycle can reduce N—H content by up to about 40%.
• Table V presents stress results for CVD SiN films formed at increasing temperatures utilizing a Producer® SE tool.

• 	TABLE V
  	Tensile Film Stress (GPa)
  	Temperature (° C.)

  	Cycle	400	430	450
  	Baseline	1.0	1.1	1.2
  	D/T	1.1	1.2	—
  	S/D/T	1.2	1.	1.44
  	S/D/P/Pu/T	1.3	—	1.4

  
  Table V shows that a CVD SiN film having a tensile stress of 1.5 GPa may be formed within a thermal budget of 450° C., utilizing the modified tensile process regime.
• FIGS. 12A-D confirm this result, plotting various attributes of a CVD SiN film formed at 450° C. under different process conditions.FIG. 12A plots film stress versus NH₃flow and indicates that a tensile stress of 1.5 GPa was achieved.FIG. 12B plots film stress versus N₂flow, and indicates that a tensile stress of 1.5 GPa was achieved with lower N₂flow rates.FIG. 12C plots film stress versus the total SiH₄and NH₃flow rate, and shows that film stress is not a strong function of this process parameter.FIG. 12D plots film stress versus applied RF power, and shows that a tensile film stress of 1.5 GPa was achieved with a lower RF power.
• The treatment with a nitrogen-containing plasma can be performed with several variations. For example, exposure to the nitrogen-containing plasma can take place in the same or a different chamber than the chamber in which material was initially deposited. In addition, the nitrogen plasma exposure may take place only after the rate of flow of one or more gases into the chamber has been stabilized. Furthermore, the nitrogen-containing plasma may be generated in the chamber, or may be generated remotely and then flowed into the chamber.
• B. Argon (Plasma Treatment)
• As described above, exposure of a CVD film to a plasma including a nitrogen containing gas may enhance tensile stress of the film. In accordance with another embodiment of the present invention, stress of a CVD film may also be enhanced by exposing the film during and/or after deposition to a plasma including Argon gas.
• FIGS. 13A-F illustrate properties of a CVD SiN film formed by a dep/treat cycle under the conditions shown below in Table VI:

• TABLE VI
  	SiH4	NH3	N2	N2+ Ar	RF Power
  CYCLE STEP	(sccm)	(sccm)	(L)	(L)	(W)

  Deposition (Dep)	60	900	1	—	100
  Treatment (Treat)	0	0	—	20	varied
  Pressure = 8.5 Torr
  Wafer-to-faceplate spacing = 300 mils

• FIGS. 13A-B show the effect of varying the % of Ar gas flowed during the post deposition treatment, where deposition and treatment are performed at 400° C.FIGS. 13A-B show that the amount of tensile stress resulting in the deposited film directly correlates with reduction in hydrogen content ([H]) in the resulting film.FIGS. 13A-B also show that the increase in tensile stress is a function of Argon gas content and saturates at a % Ar of greater than about 25%.
• FIGS. 13C-D show the effect of varying the RF power level applied during the post-deposition Ar treatment, where Ar is 25% of the gas flow and both the deposition and treatment take place at 400° C.FIGS. 13C-D show that the increase in tensile stress is fairly insensitive to the treatment RF power.
• FIGS. 13E-F show the effect of varying the temperature upon deposited films treated with plasma including varying amounts of Argon. Specifically, the dep/treat cycles ofFIGS. 13E-F were performed at 550° C.FIGS. 13E-F confirm that the increase is tensile stress of the resulting film directly correlates with reduction in hydrogen content of the film.FIGS. 13E-F also indicate that the treatment is less effective when the deposition takes place at a higher temperature (i.e., 550° C. vs. 400° C.).FIGS. 13E-F show the total hydrogen content in the “as deposited” film is lower when compared to the film deposited at 400° C. (FIGS. 13A-B) which leads to a lower reduction in total hydrogen content during plasma treatment.
• While the above-description has focused upon the exposure of deposited films to plasma including argon, other types of plasmas may be used as well. For example, a plasma suitable of use in post-deposition exposure could include gas mixtures including argon and/or xenon.
• C. Ultraviolet Radiation Exposure
• The tensile stress of an as-deposited silicon nitride material can be further increased by treating the deposited material with exposure to a suitable energy beam, such as ultraviolet radiation or electron beams. It is believed that ultraviolet and electron beam exposure can be used to further reduce the hydrogen content in the deposited material. The energy beam exposure can be performed within the CVD chamber itself or in a separate chamber. For example, a substrate having the deposited stressed material could be exposed to ultraviolet or electron beam radiation inside the CVD processing chamber. In such an embodiment, the exposure source could be protected from the CVD reaction by a shield or by introducing the exposure source into the chamber subsequent to the flow of process gas. The ultraviolet or electron beams could be applied to the substrate, in-situ in the CVD deposition chamber during a CVD reaction to deposit the stressed material. In this version, it is believed that ultraviolet or e-beam exposure during the deposition reaction would disrupt undesirable bonds as they are formed, thereby enhancing the stress values of the deposited stressed material.
• FIG. 18 shows an exemplary embodiment of anexposure chamber200 which can be used to expose asubstrate32 to ultraviolet radiation or electron beam treatment. In the version shown, thechamber200 includes asubstrate support104 moveable between a released position distal from theexposure source204, and a lifted position proximate to thesource204 to allow adjustment of the spacing therebetween. Asubstrate support104 supports thesubstrate32 in thechamber200. During insertion and removal of thesubstrate32 from theexposure chamber200, thesubstrate support104 can be moved to a loading position, and thereafter, during exposure of thesubstrate32 having the deposited silicon nitride material to ultraviolet radiation or electron beams, thesupport104 is raised into the lifted position to maximize exposure levels. Thechamber200 further comprises aheater206, such as a resistive element, which can be used to heat thesubstrate32 to a desired temperature during exposure of thesubstrate32. Agas inlet208 is provided to introduce a gas into theexposure chamber200 and agas outlet210 is provided to exhaust the gas from thechamber200.
• Theexposure chamber200 further includes anexposure source204 that provides a suitable energy beam, such as ultraviolet radiation or electron beams. A suitable ultraviolet radiation source can emit a single ultraviolet wavelength or a broadband of ultraviolet wavelengths. A suitable single wavelength ultraviolet source comprises an excimer ultraviolet source that provides a single ultraviolet wavelength of 172 nm or 222 nm. A suitable broadband source generates ultraviolet radiation having wavelengths of from about 200 to about 400 nm. Such ultraviolet sources can be obtained from Fusion Company, USA or Nordson Company, USA. The stressed silicon nitride material may be exposed to ultraviolet radiation having other wavelengths that are generated by lamps that contain gas that radiates at specific wavelengths when electrically stimulated. For example, suitable ultraviolet lamp may comprise Xe gas, which generates ultraviolet radiation having a wavelength of 172 nm. In other versions, the lamp may comprise other gases having different corresponding wavelengths, for example, mercury lamps radiate at a wavelength of 243 nm, deuterium radiates at a wavelength of 140 nm, and KrCl₂radiates at a wavelength of 222 nm. Also, in one version, generation of ultraviolet radiation specifically tailored to modify the stress value in the deposited stressed material can be accomplished by introducing a mixture of gases into the lamp, each gas capable of emitting radiation of a characteristic wavelength upon excitation. By varying the relative concentration of the gases, the wavelength content of the output from the radiation source can be selected to simultaneously expose all of the desired wavelengths, thus minimizing the necessary exposure time. The wavelength and intensity of the ultraviolet radiation can be selected to obtain predetermined tensile stress value in the deposited silicon nitride material.
• TheCVD deposition chamber80 andexposure chamber200 may also be integrated together on a multi-chamber processing platform (not shown) served by a single robot arm. Theexposure source204 and the support of theexposure chamber200, and the components of theCVD deposition chamber80 that include thesubstrate support104, motor, valves or flow controllers, gas delivery system, throttle valve, high frequency power supply, andheater206, and the robot arm of the integrated processing system, may all be controlled by a system controller over suitable control lines. The system controller relies on feedback from optical sensors to determine the position of movable mechanical assemblies such as the throttle valve andsubstrate support104 which are moved by appropriate motors under the control of the controller.
• For exposure treatment in the describedexposure chamber200, a substrate having a silicon nitride material according to any of the deposition processes described or other deposition processes known in the art, is inserted into theexposure chamber200 and placed upon thesubstrate support104 in the lowered position. Thesubstrate support104 is then raised to a lifted position, theoptional heater206 in the support powered on, and theexposure source204 is activated. During exposure, a gas may be circulated through theexposure chamber200, such as helium, to improve thermal heat transfer rates between the substrate and the support. Other gases may also be used. After a period of radiation exposure, theexposure source204 is deactivated and thesubstrate support104 is lowered back into the released position. The substrate bearing the exposed silicon nitride stressed material is then removed from theexposure chamber200.
• FIG. 19 is a bar graph showing the effect of ultraviolet radiation treatment on the tensile stress values of materials deposited at different process conditions including A: compressive film (45 sccm SiH₄/600 sccm NH₃/2000 sccm He/30 W HF/30 W LF/2.5T/480 mils/430° C.); and B: tensile film (75 sccm SiH₄/1600 sccm NH₃/5000 sccm N₂/50 W HF/5 W LF/6 T/480 mils/430° C.). Different broadband UV treatment times at 400° C. of 5 minutes and 10 minutes were used. For all deposited films, ultraviolet radiation exposure increased tensile stress values, with the greatest improvement occurring for the materials having the lowest tensile stress values, namely materials A and B. A and B increased in a tensile stress of level from about −1500 MPa to around about −1300 MPa. Materials C and D also increased. Thus, the ultraviolet treatment can increase the tensile stress value for deposited materials.
• It was determined that exposure of the deposited silicon nitride material to ultraviolet radiation or electron beams is capable of reducing the hydrogen content of the deposited material, and thereby increasing the tensile stress value of the material. It is believed that exposure to ultraviolet radiation allows replacement of unwanted chemical bonds with more desirable chemical bonds. For example, the wavelength of UV radiation delivered in the exposure may be selected to disrupt unwanted hydrogen bonds, such as the Si—H and N—H bond that absorbs this wavelength. The remaining silicon atom then forms a bond with an available nitrogen atom to form the desired Si—N bonds. For example,FIG. 20 shows a Fourier Transformed Infrared spectrum (FT-IR) of a stressed silicon nitride material in the as-deposited state (as dep. —continuous line), and after treatment with ultraviolet radiation (treated film—dashed line). From the FT-IR spectrum, it is seen that after treatment with the ultraviolet radiation, the size of both the N—H stretch peak and the Si—H stretch peak significantly decrease, while the size of the Si—N stretch peak increases. This demonstrates that after ultraviolet treatment, the resultant silicon nitride material contains fewer N—H and Si—H bonds, and an increased number of Si—N bonds which are desirable to increase the tensile stress of the deposited material.
• FIGS. 21A to 21E show the improvement in tensile stress value of an as-deposited silicon nitride material that is subjected to different periods of ultraviolet exposure treatment times. The silicon nitride material ofFIG. 21A was deposited under the followingprocess conditions 60 sccm flow rate of silane; 900 sccm flow rate of ammonia; 10,000 sccm flow rate of nitrogen; 6 Ton process gas pressure; electrode power level of 100 watt; and electrode spacing of 11 mm (430 mils). The tensile stress of the deposited silicon nitride film was measured in the as-deposited state to be about 700 MPa. The points label 0 to 6 on the x-axis each correspond to different ultraviolet treatment time of 0 minutes (as deposited), 10 minutes, 30 minutes, 45 minutes, one hour, two hours, and three hours, respectively. The as-deposited silicon nitride material of the line labeled with tetrahedrons (treatment 1) was exposed to a broadband ultraviolet radiation source, while the as-deposited silicon nitride material of the line labeled with squares (treatment 2) was exposed to a single wavelength ultraviolet source at 172 nm. It was determined that the broadband ultraviolet radiation source provided increased tensile stress in the deposited material as compared with a single wavelength ultraviolet radiation source.
• Generally, as ultraviolet treatment time increased, the tensile stress of the as-deposited film also increased from the original value of 700 MPa to values exceeding about 1.6 GPa. The silicon nitride material ofFIGS. 21B and 21C were deposited under the same conditions as the sample shown inFIG. 21A, with the following exceptions—the sample ofFIG. 21B was deposited using 60 sccm flow rate of silane; 600 sccm flow rate of ammonia; and electrode power level of 150 watts; and the sample ofFIG. 21C was deposited using 60 sccm flow rate of silane; 300 sccm flow rate of ammonia; and an electrode power level of 150 watts. InFIGS. 21B and 21C, the as-deposited material was treated only with a broadband ultraviolet radiation, and the treatment times also varied from 0 minutes to 3 hours but at different time intervals corresponding to 8 or 9 segments, as shown. The best result obtained is shown inFIG. 21C, where the as-deposited silicon nitride material increased in tensile stress after approximately three hours of ultraviolet exposure from 800 MPa to 1.8 GPa, which was almost double the original tensile stress value.
• The material deposited shown inFIG. 21D was deposited using 60 sccm flow rate of silane; 900 sccm flow rate of ammonia; 10,000 sccm nitrogen; electrode power of 100 watt; pressure of 7 Torr; and 11 mm spacing. Line (a) was treated with a Fusion H UV light source which provided UV wavelengths of about 200 to 400 nm; and Line (b) was treated with an Excimer UV source which provided UV wavelengths of about 172 nm. For both treatments, tensile stresses increased from about 800 MPa (for the as-deposited silicon nitride) to 1.8 and 1.4 GPa, respectively, after about 50 minutes of ultraviolet exposure material. The cure time can be significantly reduced by further optimizing the UV lamp to increase the light intensity reaching the wafer. The sample ofFIG. 21E was deposited using 60 sccm flow rate of silane; 300 sccm flow rate of ammonia; 10,000 sccm nitrogen; electrode power of 150 watt; pressure of 6 Ton; and 11 mm spacing. The deposited material was treated with a Fusion H source. As before, the as-deposited silicon nitride material increased in tensile stress after approximately 50 minutes of treatment from about 700 MPa to 1.6 GPa.
• In the manner just described, tensile stress of a CVD material may be enhanced by post-deposition exposure to ultraviolet radiation. This stress enhancement may be accomplished by varying process parameters such as UV treatment time, and diluent gas content at the time of deposition.
• It was also determined that the effect of ultraviolet exposure could be enhanced by optimizing the composition of the “as deposited” film. It has further been discovered that the tensile stress increases by increasing hydrogen content in the “as deposited” film and adjusting the ratio of Si—H/N—H bonds to about 1:1. The total hydrogen content in the film can be increased by decreasing the deposition temperature prior to UV exposure. Specifically, reducing the temperature at the time of deposition can enhance the tensile stress imparted to a film that is subsequently cured by exposure to UV radiation.
• Table VIII lists FT-IR spectral data for two CVD silicon nitride films exposed to UV radiation post-deposition. The first CVD nitride film was deposited at 400° C., and the second nitride film was deposited at 300° C.

• TABLE VIII
  FT-IR SPECTRA DATA OF DEPOSITED FILM AFTER UV CURE
  (FT-IR data normalized to 3000 Å)

  	NH Peak		SiH Peak		SiH Peak
  DEPOSITION	Center	NH Peak	Center	SiH Peak	Center	SiN Peak
  TEMPERATURE	(cm−1)	Area	(cm−1)	Area	(cm−1)	Area

  400° C.	As Dep	3355	0.033	2159	0.031	842	0.491
  	UV Treated	3355	0.022	2170	0.024	836	0.497
  	% Change	—	33.8	—	23.5	—	1.1
  300° C.	As Dep	3359	0.042	2146	0.05	847	.43
  	UV Treated	3360	0.011	2171	0.01	833	0.5
  	% Change	—	73.8	—	70.8	—	17.0

• Table VIII indicates that post-deposition UV treatment reduces the numbers of both Si—H and N—H bonds, while increasing the network of Si—N bonds. Without being limited to a particular explanation, Table VIII likely indicates that deposition of a lower temperature allows more film restructuring during the UV cure step, leading to higher tensile stress in the resulting film.
• FIG. 22A plots stress and film shrinkage after UV cure, of a plurality of CVD nitride films deposited at different temperatures.FIG. 22A indicates an increase in stress with decreased deposition temperature.FIG. 22A also indicates an increase in shrinkage with decreased deposition temperature. The correlation of increased shrinkage with reduced deposition temperature ofFIG. 22A confirms the greater restructuring undergone by the films initially deposited at low temperatures.
• FIG. 22B plots total H content ([H]), and SiH/NH peak area ratio; of SiN films formed by CVD at different temperatures.FIG. 22B shows that tensile stress of the film increases with hydrogen content at lower deposition temperatures.
• FIG. 23 plots FT-IR spectra of a CVD nitride film exhibiting as deposited at 300° C., and then after exposure to UV radiation at 400° C. Table IX lists composition of the CVD SiN film as-deposited, and after UV curing, as determined by Rutherford Backscattering Spectrometry (RBS) and the Hydrogen-Forward Scattering (HFS) method:

• 	TABLE IX
  	RBS/HFS	H(%)	N(%)	Si(%)	Si/N

  	AsDep Film	25	43	32	0.74
  	Post UV Treat Film	16.5	48.5	35	0.73

  
  FIG. 23 and Table IX indicate that a lower deposition temperature results in formation of more SiN bonds after the UV cure, leading to higher stress in the cured film.
• Both the N₂treatment and UV treatment are based on the same principle. Specifically, Si—H and N—H bonds are broken and hydrogen is removed from the film. This hydrogen removal leaves Si and N dangling bonds in the film, allowing new Si—N bonds to be formed. Those new Si—N bonds are strained, because the Si and N atoms are locked in place by the network and can't more to relieve the strain.
• However, the N₂treatment technique is limited by de penetration depth of the N radicals/ions, and the energy of those N radicals/ions. Increasing the energy may be detrimental, because the N will become implanted in the film, decreasing tensile stress.
• By contrast, the UV treatment technique has a bulk effect. The entire film can be treated at once and the process is more efficient and can break more bonds. Also, because a broadband UV source emitting wavelengths down to 200 nm is being used, the UV energy also favors re-bonding of the dangling bonds to form the strained Si—N bonds. Specifically, some dangling bonds remain during the formation of all films. These dangling bonds have the effect of degrading electrical properties of the film. These dangling bonds can survive subsequent treatment, especially if the distance between a Si dangling bond and a N dangling bond is too large. The UV treatment technique provides the necessary activation energy to allow the two types (Si and N) of dangling bonds to form a desired Si—N bond.
• Without being limited to any particular explanation, it is believed that application of ultraviolet energy in wavelength range of (200-300 nm) promotes cleavage of Si—H and N—H bonds in excited electronic states, and formation of new strained Si—N.FIG. 43 shows cleavage of bonds in excited electronic states and formation of new strained silicon nitride.
• Further understanding regarding the effect of UV irradiation on bond cleavage and film stress can be obtained from Ab initio modeling. Predictions from such ab initio modeling can be compared with data from FTIR analysis of UV cure time, to identify the impact of UV irradiation on bond cleavage/formation.
• In general, bond cleavage is preceded by bond stretch that requires energy.FIG. 44 is a generic plot of energy change versus % increase in bond length, in the excited and ground state.FIG. 44A is an enlarged view of a portion of the plot ofFIG. 44. These figures show the measure of the impact of UV irradiation in the difference between energy for initial bond stretch in excited state vs. energy for initial bond stretch in ground state. It is assumed that differences in initial stretches for ground and excited states correlates with differences bond strengths in ground and excited states
• A small bond stretch allows vertical electronic excitation approach. Vertical excitation involves the same geometry in excited and ground states.
• Time-dependent DFT is appropriate for vertical excitations. In an excited state by TDDFT, the DFT functional B3LYP; basis 6-31+g (d,p). The geometry is the same in excited and ground state—B3LYP/6-31g(d,p). Bond stretch by increments up to about 12% increase in length. Two different clusters were used to model hydrogenated SiN.FIG. 45A shows a chain-like cluster modeling hydrogenated SiN.FIG. 45B shows a ring cluster modeling hydrogenated SiN.
• The TDDFT method was validated as follows.FIG. 46 compares calculated (λ) vs. observed band gaps for silicon oxide and silicon nitride. Calculated λ values are close to observed band gaps for oxide, and slightly lower than observed band gaps for nitride.
• An example of interpretation of initial bond stretch is as follows.FIG. 47 plots energy change (ΔE) versus N—H bond length in a chain-like cluster, from an equilibrium bond stretch length of 1.015 Å, in increments of 0.2 Å.FIG. 47 shows that it is easier to Stretch N—H Bond in Excited States than in Ground State
• The modeled effect of UV irradiation on initial bond stretch of N—H and Si—H Bonds is shown inFIGS. 48A-B.FIG. 48A plots energy change versus S—N bond length at different states. This figures shows N—H initial stretches are more favorable in excited state.FIG. 48B plots energy change versus Si—H bond length at different states. ΔE for Si—H stretches in excited and ground states are close. Modeling of the chain cluster yields a similar result. InFIGS. 48A-B, the bond strengths in ground state (N—H=4.8 eV; Si—H=4.0 eV) do not correlate with bond strengths in the excited state. Comparison ofFIGS. 48A-B indicates that N—H Bonds are more likely to break under UV cure than are Si—H bonds.
• The effect of UV radiation on large bond stretches of a ring cluster for N—H and Si—H bonds is shown inFIGS. 49A-B.FIG. 49A plots energy change versus bond length for a larger stretched N—H bond in a ring cluster. ΔE for N—H stretch is only 0.5 eV for the excited state, but increases sharply up to 3 eV for the ground state.FIG. 49B plots energy change versus bond length for a larger stretched Si—H bond in a ring cluster. ΔE for Si—H stretch in the excited state is less than in the ground state only when ΔE reaches 1.5 eV. As the ground state increase in Si—H is not as sharp as the increase for N—H, in large stretches the N—H bonds are more likely to break than Si—H bonds under exposure to UV radiation.
• FIGS. 50A-B illustrate the results of modeling the effect of UV irradiation on Si—N bonds.FIG. 50A plots energy change versus Si—N bond length in different states for a chain cluster.FIG. 50A shows that the Si—N bond is noticeably weakened in excited state for chain model.FIG. 50B plots energy change versus bond length for a larger stretched Si—H bond in a ring cluster. The smaller weakening of the Si—N bond in the excited state for the ring is due to restrictions imposed by ring. Specifically, restoration of broken Si—N bonds is highly probable in this configuration. Such restoration of Si—N bonds in the network could be occur due to the limited mobility of Si and N atoms.
• Transmission FTIR analysis shows reduction of Si—H and N—H content and an increase on Si—N content during exposure of SiN to UV from a broad band source.FIG. 51 plots % reduction of Si—H and N—H content, and increase in Si—N content, versus UV cure time. This Figure shows that Si—H and N—H content decrease at approximately the same rate. Disagreement with the modeling predictions may be attributable to additional reactions involving released H.
• For example,FIGS. 53A-C show several different possible reactions involving released H atoms.FIG. 53A shows interaction of bulk SiN material with UV radiation to release atomic H.FIG. 53B shows reaction of H with bulk SiN material to release molecular hydrogen gas. Specifically, H is easily abstracted from Si—H by the H, with no barrier (DFT). As a result of this reaction, the number of Si—H bonds decreases.FIG. 53C shows the abstraction of H by bulk SiN material Specifically, H is abstracted from N—H by the H, with a barrier of 0.5 Ev (DFT). As a result of this reaction, the number of N—H bonds increases. The reactions shown inFIGS. 53A-B can lead to the same loss rate of H for both bonds
• Si—N bonds may dissociate and then be restored in a number of different ways.FIG. 52A shows dissociation of a Si—N bond in a chain cluster. Resistance to stretch is located mostly within the Si—N bond.FIG. 52B shows dissociation of a Si—N bond in a ring cluster. Here, resistance to stretch is spread to adjacent bonds.FIG. 52C shows restoration of SiN bond between ring clusters in SiN bulk material. In sum, these figures show that UV exposure hardly leads to irreversible cleavage of the Si—N Bond.
• The modeling and experimental observations discussed above may be summarized as follows. First, ab initio modeling predicts higher probability of the H abstraction by UV cure from N—H than from Si—H. Second, it is unlikely that UV cure leads to irreversible cleavage of the Si—N bond. Finally, FTIR transmission analysis reveals that the content of N—H and Si—N bonds decrease at about the same rate with UV cure time. Any disagreement between ab initio modeling and observed FTIR results may be attributable to other reactions involving released H atoms.
• As discussed above, UV treatment is one of the techniques used to increase the tensile stress of the nitride layers. The efficiency of the UV cure is directly correlated with the optical properties of the silicon nitride layer and the substrate topography.
• An increase of UV cure efficiency can improve the stress level and the manufacturability of high stress nitride film. The Fresnel principle as shown inFIG. 34A, illustrates that if the gate to gate spacing is of the same order of magnitude as the UV light wavelength, diffraction will occur leaving some areas un-treated, such as sidewall and bottom corner of the poly gate.FIG. 34B shows an illuminated region photo with dark bands against the edge followed by light and dark bands.FIG. 34B confirms the Fresnel principle by showing plenty of dark areas around the bottom and side walls.
• UV cure efficiency can be improved by properly engineering the incidence of the UV light and the device sidewall profile in order to avoid the Fresnel effect and take advantage of the Brewster angle theory. According to this theory, the light absorption is optimal for a critical angle calculated from the refractive index ratio of the vacuum and nitride. For some SiNx film, this angle is calculated to be between 63 and 66 degrees.FIG. 35A illustrates this theory by defining the geometrical orientation and the p- and s-components of polarization.FIG. 35B shows the reflectance for each component as a function of the angle of incidence, indicating a minimum at Brewster's angle for the p-component. At this Brewster angle, absorption is at a maximum as there is no diffraction.
• Two methods may be utilized in accordance with embodiments of the present invention in order to take advantage of the Brewster angle theory and ensure even treatment of different locations on the film by the UV light. In accordance with a first embodiment, the substrate may be moved relative to the UV light source, to ensure that light is incident over a variety of angles, including the Brewster angle. In accordance with an alternative embodiment, the raised features on the substrate may be formed having sidewalls of less than 90 degrees, thereby allowing light incident at the Brewster angle to penetrate reach the substrate surface.
• As mentioned above, the maximum absorption occurs when the angle between the film normal and the direction of UV incidence is between 63 and 66 degrees. For blanket wafers or features covering large areas, the film has only one orientation relative to the wafer surface and makes a fixed angle with the incident light. Thus in accordance with one embodiment of the present invention, the direction of UV incidence can be modified by rotating the source around its axis and/or on a hemisphere above the wafer, or by rotating the substrate relative to the source. This rotation ensures that every section of the nitride film on the wafers is exposed to a UV light with a 63-66 degree angle of incidence.
• In accordance with an alternative embodiment of the present invention, UV absorption by the nitride film can be enhanced where the device structure is modified to offer an angle less than 90 degrees with the wafer surface. On patterned wafers, the film follows the device contour and the angle between the UV incidence and film normal, varying from 0 to 180 degrees. Where the features form less than a 90 degree angle, the probability of satisfying the Brewster angle criterion is increased which leads to an enhancement in UV absorption and a direct increase in the tensile stress.
• The UV source rotation embodiment and the device angle engineering embodiment may also be used together to enhance efficiency of UV curing. These two embodiments can also be applied for enhancing the post-UV cure properties of other films such a low-k dielectrics.
• In accordance with still other embodiments of the present invention, UV cure efficiency can be enhanced by the addition of porogens. The effect of the UV cure is directly correlated to the UV lamp efficiency and the curing potential of the deposited film. The curing potential relates to the change in the film structure dining cure. The structural change involves elimination of hydrogen and reconstruction of the nitride amorphous network. These structural changes in turn lead to proportional changes in film properties, namely, film refractive index and density increase, the film shrinks, and residual stress in the film becomes more tensile. To maximize the post-cure tensile stress, the hydrogen content in the film needs to be maximized while maintaining a balance between SiH and NH content in the film. The hydrogen content in the nitride films is a strong function of the deposition temperature and is limited to about 30%.
• In accordance with an embodiment of present invention, various temperature-labile molecules can be introduced to the deposition chemistry for forming a silicon nitride film, in order to enhance its curing potential. Such temperature labile molecules are usually of large size, and are incorporated into the film during deposition without breakage.
• After deposition, the molecule can be removed using UV treatment or in-situ plasma treatment. During the post-deposition cure process, the space in the film previously occupied by the temperature labile molecule will close, resulting in strained Si—N bonds and increasing tensile stress in the film. The temperature-liable molecules can include but are not limited to those listed in the following TABLE X:

• TABLE X
  TEMPERATURE LABILE MOLECULES (POROGENS)

  	Name	Chemical Formula
  	alpha-terpinene (ATRP)	C10H10
  	Toluene	C7H8
  	Limonene	C10H16
  	Pyran	C6H10O2
  	Vinyl acetate	C4H6O2
  	Cyclo-pentene	C8H14
  	1 methyl cyclo-penetne	C6H10
  	5 vinyl bicyclo hept-2-ene	C9H12
  	Cyclo-pentene oxide	C5H8O

• While the above discussion has focused upon the application of UV energy to enhance tensile stress in a silicon nitride layer, embodiments in accordance with the present invention are not limited to this particular application. In accordance with alternative embodiments, UV radiation can be employed to enhance compressive stress in a deposited film. Such UV curing can modify the bond configuration and crystallographic structure of the film. Examples include but are not limited to grain growth assisted by UV in atmosphous silicon and polysilicon films or crystallization of amorphous silicon nitride films.
• III. Strain-Inducing Spacer
• Still another embodiment in accordance with the present invention offers an integration scheme useful for further enhancing performance of an NMOS device by taking advantage of the change in stress of the nitride layer induced by the spike annealing process.FIGS. 39A-M illustrate simplified cross-sectional views of the process steps for this integration.
• As shown inFIG. 39A, the starting point for the process integration is aprecursor CMOS structure3900 comprisingPMOS region3902 separated fromadjacent NMOS region3904 by shallow trench isolation (STI) structure3906.Gate oxide layer3908 and overlyinggate polysilicon layer3910 are formed in a stack overprecursor CMOS structure3900.
• FIG. 39B shows the patterning ofphotoresist mask3912 to definegap3912aexposing the gate polysilicon/oxide stack at the location of the NMOS gate.FIG. 39C illustrates the pre-amorphization processes performed on the polysilicon in the exposed region. Two possible methods for such pre-amorphization include 1) the implantation of germanium into the NMOS poly, or 2) recessing the NMOS poly-silicon gate followed by selective SiGe deposition. With regard to the second alternative, an oxide mask may be used to ensure results.
• FIG. 39D shows performance of standard processing steps to formgates3903 and3905 of the PMOS and NMOS transistor structures, respectively. This conventional processing includes use of disposable (sacrificial) spacers for source/drain implants, followed by the Halo implants.
• The imposition of tensile stress enhances the speed of electron flow across the NMOS channel region. Conversely, the imposition of compressive stress enhances the speed of movement of holes in the PMOS channel region. Accordingly,FIG. 39E shows the deposition of the tensile-stressednitride film3930 over the PMOS and NMOS gates prior to rapid thermal processing (RTP).
• FIGS. 39F-G show removal of the tensile stressed nitride layer over PMOS regions. As shown inFIG. 39F, amask3931 is first patterned to expose the SiN overlying the PMOS region. InFIG. 39G, the exposed SiN is selectively etched utilizing the mask, which is then removed.
• FIG. 39H show performance of a RTP spike annealing step, which elevates the stress of the conformal nitride film from <1 GPa to about 2 GPa. This RTP spike anneal creates a stress-inducingtexture3932 in the polysilicon gate. Alternatively, the annealing during this step may take the form of a dynamic surface anneal used to activate dopants. These annealing methods or any other annealing methods may be used to recrystallize the polysilicon of the NMOS gate, thereby increasing nitride stress to 2.0 GPa. The tensile stress imposed by this film serves to enhance the performance of the NMOS device.
• The composition of the silicon nitride layer can be optimized to result in highest tensile stress of the SiN film after RTP.FIG. 40 plots film stress versus the RTP temperature spike, for deposited SiN films of different compositions.FIG. 40 shows the response of PECVD nitride films to RTP, vs. the composition (Si—H/N—H) and total hydrogen content of the film. The stress in the SiN film post RTP is 2 GPa (tensile), and this stress value can potentially be increased by further optimizing the deposition chemistry.
• FIGS. 39I-L shows the next series of steps in the integration process flow, wherein nitride spacers are formed adjacent to gate oxide/polysilicon stack, to complete formation of the gate structures. Specifically, inFIG. 391,nitride layer3934 of neutral or compressive stress is formed over the entire structure. As shown inFIGS. 39J-K, lithography and etching are employed to removenitride layer3934 from the NMOS region.
• FIGS. 39L illustrates formation of thespacer structures3950 and3952 for the NMOS and PMOS devices, through etching of the tensilestress SiN layer3930 and the neutral/compressive SiN layer3934, respectively.
• Finally,FIG. 39M shows the dual stress layer integration. Halo implants are performed, and conducting contacts such as NiSix are formed, followed by formation of the nitride etch stop layer (ESL). Over the NMOS device, aSiN ESL3936 exhibiting tensile stress is created. Over the PMOS device, aSiN ESL3938 exhibiting compressive stress is created.
• Once deposited, the silicon nitride etch stop layer may be treated to enhance its tensile stress. For example the deposited etch stop layer may be subjected to in-situ plasma treatment. Alternatively or in conjunction with plasma treatment, the deposited etch stop layer may be subjected to a UV cure with, or without a capping layer to modulate the radiation experienced by the film. Examples of such capping layers include but are not limited to amorphous carbon, oxynitride, or other materials having extinction coefficients different from the high stress nitride layer.
• The integration scheme shownFIGS. 40A-L take advantage of several different sources of tensile stress in order to improve device performance. First, the tensile stress of the nitride spacer layer is utilized. A second source of stress is that induced in the polysilicon gate by the RTP step. A third source of stress is from the nitride etch stop layer formed over the gate.
• IV. Enhanced Film Conformality
• The above description has focused upon the enhancement of film stress. However, as shown and described above in connection withFIG. 1, another important property of a film intended to impose strain on a silicon lattice is conformality. Embodiments in accordance with the present invention allow the enhancement of conformality of a CVD film, by permitting deposition and treatment to be performed at low pressures, thereby obviating the need for separate, time-consuming purge steps between film deposition and treatment.
• The substrate processing techniques described so far have been performed at pressures of about 1 Torr or greater. As shown and described above, however, a cycle in a process for CVD of a film exhibiting controlled properties, may involve successive deposition and treatment under different conditions.
• Where the processing chamber is operating at pressures of about 1 Torr and above, such changed conditions may generally necessitate pumping or purging steps in order to achieve optimum results. However, as shown and illustrated above in connection with Table IV andFIG. 10, such an intervening pumping/purging steps can consume significant amounts of processing time, substantially reducing throughput.
• Accordingly, embodiments of the present invention also relate to methods and apparatuses for depositing films by chemical vapor deposition at relatively low pressures (i.e. between about 20-150 mTorr). The pumping required to maintain the chamber in this low pressure range ensures a short residence time for gases employed for deposition and treatment, thereby obviating the need for a separate pumping or purging steps.
• It has further been discovered that CVD processing at low pressures, and the concurrent elimination of separate intervening gas pumping/purging steps, sufficiently reduces processing time and elevates throughput enough to render commercially practicable the formation of highly conformal SiN films. In particular, the highly conformal CVD SiN films are formed by repeated cycles in which an initial step involving a silicon precursor in the absence of a plasma, results in deposition of a highly conformal layer of amorphous silicon (a-Si). This deposition step is followed by a treatment step in which the conformal a-Si film is exposed to a nitrogen-containing plasma. This cyclic processing regime is rendered commercially practicable by eliminating the need for separate gas pumping and purging steps intervening between the successive deposition and treatment steps of the cycle.
• In accordance with one embodiment of the present invention, a conformal SiN layer may be formed by employing a cyclic deposition process at low pressure wherein a silane soak deposition step in the absence of plasma is followed by treatment with a plasma formed from N₂as the nitrogen-containing species. In certain embodiments, the plasma may also include argon, which may bombard the deposited film and/or assist in the dissociation of N₂, thereby decreasing N—H content in the deposited film and forming dense N—H bonds.
• In accordance with an alternative embodiment of the present invention, a conformal SiN layer may be formed by employing a cyclic deposition process at low pressure, wherein a silane soak deposition step in the absence of plasma is followed by treatment with a plasma formed from N₂and NH₃as the nitrogen-containing species.
• FIG. 24 shows an FT-IR spectra of CVD SiN films formed by a 20 sec silane soak followed by treatment by a 10 sec exposure to a plasma formed from N₂+Ar, or from N₂+NH₃.FIG. 24 shows that the presence of argon during treatment may have resulted in a decrease in N—H content, and the formation of dense SiN bonds.
• In another experiment, this SiN process regime was performed with, and without, a post SiH₄soak purging step. It was discovered that removal of the post-SiH₄soak purging step processing at low pressures, did not impact the thickness of the SiN layer formed per cycle. Specifically, the low pressure and efficient pumping effectively interrupted the SiH₄soaking step.
• It was also discovered that the thickness of the SiN material deposited per cycle was improved with treatment by the N₂/Hr plasma relative to the NH₃/N₂plasma. Specifically, treatment with the N₂/Ar plasma resulted in a thickness of material deposited per cycle of about 3-5 Å, whereas treatment with the N₂/NH₃plasma resulted in a thickness of material deposited per cycle of about 2-5 Å.
• FIGS. 25A and 25B show electron micrographs of densely-packed topographic features bearing SiN CVD films formed at wafer temperatures of 350° C., utilizing N₂+NH₃and N₂+Ar plasma treatment, respectively. Comparison ofFIG. 25A withFIG. 25B reveals the presence of Ar in the treatment step to have increased N₂dissociation, and improved film morphology and step coverage.
• FIG. 25C shows an electron micrograph of densely-packed topographic features bearing a SiN CVD film formed from N₂+Ar plasma at a higher wafer temperature of 430° C. Comparison ofFIG. 25C withFIG. 25B reveals the increased temperature to have improved step coverage of the resulting film.
• FIG. 25D shows an electron micrograph of less dense topography bearing a CVD SiN film formed from N₂+Ar plasma at the 430° C. wafer temperature. Comparison ofFIG. 25D withFIG. 25C reveals that the Pattern Loading Effect (PLE) is also improved by this deposition regime.
• Without being bound by any particular theory, the N₂treatment reduces the hydrogen content in the film leading to the formation of strained Si—N bonds. By introducing additional steps (such as purge and/or pump) after deposition, the effect of the N₂treatment is enhanced because there are no more deposition gases in the chamber. When residual SiH₄and NH₃are still in the chamber, the deposition continues during the treatment as well, and the treatment is able to penetrate through the material already deposited during the intentional deposition step.
• FIGS. 26A-B are enlarged cross-sectional micrographs showing the upper portion of a raised feature bearing a SiN layer formed by a SiH₄soaking, followed by treatment with N₂/Ar and N₂/NH₃plasmas, respectively. Comparison ofFIGS. 26A-B shows that the nitride layer treated with the N₂/NH₃plasma exhibits a columnar, grainy film morphology as compared with the film exposed to the Ar/N₂plasma.
• The character of the resulting film may depend upon the SiH₄soak deposition step, as well as upon the subsequent treatment with a nitrogen-containing plasma. For example, the quality of morphology of the resulting deposited film may be influenced by the exposure dose during the SiH₄soak step. For purposes of the following discussion, the exposure dose is defined by Equation (I) below:
• 
  D=T×PP; where  (I)
• • D=exposure dose;
  • T=time of exposure; and
  • PP=partial pressure of SiH₄.
• The thickness of the saturated film per dep/treat cycle is dependent upon the incoming flux of SiH₄reaching the surface, and the rate of desorption of SiH₄from that surface. The incoming SiH₄flux is dependent upon the exposure dose, and the rate of SiH₄desorption is dependent upon the temperature. Accordingly,FIG. 27 plots the rate of deposition of material versus exposure dose.FIG. 27 shows that this rate of deposition will decline with increasing temperature.
• FIG. 28A plots deposition rate versus exposure dose.FIG. 28B shows a cross-sectional micrograph showing a feature bearing a layer deposited after a SiH₄exposure dose of 500 mT*s.FIG. 28B shows the step coverage performance of the silicon nitride film deposited with the process conditions corresponding to the fourth data point ofFIG. 28A.
• FIGS. 29A-H are cross-sectional electron micrographs showing the morphology of films deposited utilizing a SiH₄soak deposition step followed by treatment by exposure to a nitrogen-containing plasma under the plurality of different conditions shown below in Table XI.

• TABLE XI
  FIG.
  #	Purge?	Temp (° C.)	Treat Plasma	Relative FilmMorphology
  29A	No
  	400	NH3	Columnar
  29B			N2+Ar	Homogenous
  29C
  		500	NH3	Columnar
  29D			N2+ Ar	Homogenous
  29E	Yes
  	400	NH3	Columnar
  29F			N2+Ar	Homogenous
  29G
  		500	NH3	Columnar
  29H			N2+ Ar	Homogenous

• FIGS. 29A-H emphasize the effect of temperature and addition of Ar during treatment, upon step coverage and morphology of the resulting deposited film. These figures indicate that higher temperature improves both step coverage and film morphology. In particular, step coverage from feature side wall-to-top (S/T), is improved from 30% at 400° C., to 60% at 500° C. Film morphology is improved from columnar/grainy, to dense and homogeneous films.
• Without being bound by any theory, in comparing treatment by NH₃(typically diluted w/N₂) with treatment by N₂+Ar, the latter is more beneficial because the addition of Ar increases plasma density by improving the N₂dissociation. This provides more N-radicals and ions to react with the SiH₄already present on the surface from the previous SiH₄soak.
• It has further been discovered that exposure to a plasma including Argon gas can substantially enhance the rate of deposition of a film formed in accordance with embodiments of the present invention.
• For example, while the discussion so far has focused upon a processing regime wherein SiN is deposited from a plasma including both SiH₄and NH₃, this is not required by the present invention. In accordance with alternative embodiments of the present invention, a ratio of NH₃:SiH₄can be zero (0) with material deposited in the absence of a plasma. In such an embodiment, an amorphous silicon layer (a-Si) is initially deposited from SiH₄at low pressures. This amorphous silicon layer is then subsequently treated with a plasma containing nitrogen, and also potentially Argon and Helium, in order to result in formation of the SiN.
• The efficiency of the deposition process is in part limited by the surface coverage of the first precursor. The silicon-source precursor has to be chemisorbed on both the initial as well as the newly formed surfaces with a 100% surface coverage. However, it is known that nitrogen-containing precursors inhibit the adsorption of the silane (SiH₄) on the surface, which may lead to a decrease in the deposition rate with the number of cycles.
• Maintaining a constant deposition rate throughout the deposition process is important to control film thickness. A substantially constant deposition rate can be achieved using a surface activation process which removes the un-reacted precursors and enhances the chemisorption of SiH₄on the SiNx surface. The surface activation process may be realized by employing an argon (Ar) cleaning step. The role of the Ar radicals is to sputter off the excess precursor adsorbed on the surface.
• In accordance with embodiments of the present invention, Ar is either introduced into the chamber for stabilization or after being stabilized through the divert line. The Ar is radicalized using either a capacitive plasma discharge inside the chamber, or using a Remote Plasma Unit (RPS). The plasma power, gas flow and cleaning time are parameters influencing the surface recovery.
• FIG. 14 shows the difference in the plots film thickness versus number of cycles for regimes including and not including a post-treatment Ar plasma cleaning step. Without the Ar clean, the deposition rate decreases 10 times over 120 cycles. When using the Ar clean, a constant deposition rate of about 0.5 ML/cycle is achieved. A similar post-treatment cleaning concept can also be used to form other types of films, for example other barrier dielectric films.
• FIG. 15 plots SiN film thickness versus a number of dep-soak (SiH₄)/treat (NH₃) cycles under the specific conditions listed below in Table XII:

• 	TABLE XII
  	Cycle Step

  Process Parameter	SiH4		NH3	NH3
  Step	soak	Purge	stab	plasma	Purge

  Step time (sec)	20	10	10	10	10
  Pressure (Torr)	4.8	4.8	4.8	4.8	4.8
  HF RF Power (W)	0	0	0	400	0
  Heater temperature (C.)	400	400	400	400	400
  Lift Pos (steps)	450	450	450	450	450
  SiH4Flow (sccm)	230	0	0	0	0
  NH3Flow (sccm)	0	0	100	100	0
  N2Flow (sccm)	2000	2000	2000	2000	2000

• FIG. 15 indicates that the deposition rate decreases over time from 8 Å/cycle to less than 1 Å/cycle. This decrease in deposition rate may be due to the accumulation of NH₃and NH₃-derived species on the surface of the film after each dep/treat cycle. Accordingly, a cleaning step may be employed at the end of each cycle to regenerate and prepare the surface to adsorb SiH₄in the deposition stage of the next cycle.
• FIG. 16 plots thickness of SiN films deposited utilizing the cyclic dep process regime described in Table XII, where the surface is exposed to different conditions between successive dep/treat cycles.FIG. 16 shows exposure to an Argon plasma to be the most effective inter-cycle cleaning approach.
• FIG. 17 plots thickness of SiN films deposited utilizing the cyclic process regime described in Table XII, where the surface is exposed to different conditions between successive dep/treat cycles.FIG. 17 shows that reduction in power applied to generate the Ar cleaning plasma, resulted in a further improvement in deposition rate.
• V. Embodiments of Substrate Processing Chambers
• An embodiment of asubstrate processing chamber80 that can be used for depositing stressed materials is schematically illustrated inFIG. 30. While an exemplary chamber is used to illustrate the invention, other chambers as would be apparent to one of ordinary skill in the art may also be used. Accordingly, the scope of the invention should not be limited to the exemplary embodiment of the chamber or other components provided herein. Generally, thechamber80 is a plasma enhanced chemical vapor deposition (PE-CVD) chamber suitable for processing asubstrate32, such as a silicon wafer. For example, a suitable chamber is a Producer® SE type chamber from Applied Materials, Santa Clara, Calif. Thechamber80 comprisesenclosure walls84, which include aceiling88, sidewalls92, and abottom wall96, that enclose aprocess zone100. Thechamber80 may also comprise a liner (not shown) that lines at least a portion of theenclosure walls84 about theprocess zone100. For processing a 300 mm silicon wafer, the chamber typically has a volume of about 20,000 to about 30,000 cm³, and more typically about 24,000 cm³.
• During a process cycle, thesubstrate support104 is lowered and asubstrate32 is passed through aninlet port110 and placed on thesupport104 by asubstrate transport106, such as a robot arm. Thesubstrate support104 can be moved between a lower position for loading and unloading, and an adjustable upper position for processing of thesubstrate32. Thesubstrate support104 can include anenclosed electrode105 to generate a plasma from process gas introduced into thechamber80. Thesubstrate support104 can be heated byheater107, which can be an electrically resistive heating element (as shown), a heating lamp (not shown), or the plasma itself. Thesubstrate support104 typically comprises a ceramic structure which has a receiving surface to receive thesubstrate32, and which protects theelectrode105 andheater107 from the chamber environment. As discussed below, use of ceramic materials for the chamber components allows processing to take place at temperatures in excess of 400° C., which is typically the upper limit of conventional materials such as aluminum. Examples of ceramic materials allowing a heater to perform processing at elevated temperatures include aluminum nitride (up to 900° C.), graphite (>1000° C.), silicon carbide (>1000° C.), alumina—Al₂O₃(<500° C.), and Ytria—Y₂O₃(>1000° C.).
• In use, a radio frequency (RF) voltage is applied to theelectrode105 and a direct current (DC) voltage is applied to theheater107. Theelectrode105 in thesubstrate support104 can also be used to electrostatically clamp thesubstrate32 to thesupport104. Thesubstrate support104 may also comprise one or more rings (not shown) that at least partially surround a periphery of thesubstrate32 on thesupport104.
• After asubstrate32 is loaded onto thesupport104, thesupport104 is raised to a processing position that is closer to thegas distributor108 to provide a desired spacing gap distance, d_s, therebetween. The spacing distance can be from about 2 mm to about 12 mm. Thegas distributor108 is located above theprocess zone100 for dispersing a process gas uniformly across thesubstrate32. Thegas distributor108 can separately deliver two independent streams of first and second process gas to theprocess zone100 without mixing the gas streams prior to their introduction into theprocess zone100, or can premix the process gas before providing the premixed process gas to theprocess zone100. Thegas distributor108 comprises afaceplate111 havingholes112 that allow the passage of process gas therethrough. Thefaceplate111 is typically made of metal to allow the application of a voltage or potential thereto, and thereby serve as electrode in thechamber80. Asuitable faceplate111 can be made of aluminum with an anodized coating. Thesubstrate processing chamber80 also comprises first and second gas supplies124a, bto deliver the first and second process gas to thegas distributor108, the gas supplies124a, beach comprising agas source128a, b, one ormore gas conduits132a, b, and one ormore gas valves144a, b. For example, in one version, thefirst gas supply124acomprises afirst gas conduit132aand afirst gas valve144ato deliver a first process gas from thegas source128ato afirst inlet110aof thegas distributor108, and thesecond gas supply124bcomprises a second gas conduit132band asecond gas valve144bto deliver a second process gas from thesecond gas source128bto asecond inlet110bof thegas distributor108.
• The process gas can be energized by coupling electromagnetic energy, for example, high frequency voltage energy to the process gas to form a plasma from the process gas. To energize the first process gas, a voltage is applied between (i) theelectrode105 in thesupport104, and (ii) asecond electrode109 which may be thegas distributor108,ceiling88 orchamber sidewall92. The voltage applied across the pair ofelectrodes105,109 capacitively couples energy to the process gas in theprocess zone100. Typically, the voltage applied to theelectrode105,109 is at a radio frequency. Generally, radio frequencies cover the range of from about 3 kHz to about 300 GHz. For the purposes of the present application, low radio frequencies are those which are less than about 1 MHz, and more preferably from about 100 KHz to 1 MHz, such as for example a frequency of about 300 KHz. Also for the purposes of the present application, high radio frequencies are those from about 3 MHz to about 60 MHz, and more preferably about 13.56 MHz. The selected radio frequency voltage is applied to thefirst electrode105 at a power level of from about 10 W to about 1000 W, and thesecond electrode109 is typically grounded. However, the particular radio frequency range that is used, and the power level of the applied voltage, depend upon the type of stressed material to be deposited.
• Thechamber80 also comprises agas exhaust182 to remove spent process gas and byproducts from thechamber80 and maintain a predetermined pressure of process gas in theprocess zone100. In one version, thegas exhaust182 includes apumping channel184 that receives spent process gas from theprocess zone100, anexhaust port185, athrottle valve186 and one or more exhaust pumps188 to control the pressure of process gas in thechamber80. The exhaust pumps188 may include one or more of a turbo-molecular pump, cryogenic pump, roughing pump, and combination-function pumps that have more than one function. Thechamber80 may also comprise an inlet port or tube (not shown) through thebottom wall96 of thechamber80 to deliver a purging gas into thechamber80. The purging gas typically flows upward from the inlet port past thesubstrate support104 and to an annular pumping channel. The purging gas is used to protect surfaces of thesubstrate support104 and other chamber components from undesired deposition during the processing. The purging gas may also be used to affect the flow of process gas in a desirable manner.
• Acontroller196 is also provided to control the activities and operating parameters of thechamber80. Thecontroller196 may comprise, for example, a processor and memory. The processor executes chamber control software, such as a computer program stored in the memory. The memory may be a hard disk drive, read-only memory, flash memory or other types of memory. Thecontroller196 may also comprise other components, such as a floppy disk drive and a card rack. The card rack may contain a single-board computer, analog and digital input/output boards, interface boards and stepper motor controller boards. The chamber control software includes sets of instructions that dictate the timing, mixture of gases, chamber pressure, chamber temperature, microwave power levels, high frequency power levels, support position, and other parameters of a particular process.
• Thechamber80 also comprises a power supply198 to deliver power to various chamber components such as, for example, thefirst electrode105 in thesubstrate support104 and thesecond electrode109 in the chamber. To deliver power to thechamber electrodes105,109, the power supply198 comprises a radio frequency voltage source that provides a voltage having the selected radio frequencies and the desired selectable power levels. The power supply198 can include a single radio frequency voltage source, or multiple voltage sources that provide both high and low radio frequencies. The power supply198 and also include an RF matching circuit. The power supply198 can further comprise an electrostatic charging source to provide an electrostatic charge to an electrode often electrostatic chuck in thesubstrate support104. When aheater107 is used within thesubstrate support104, the power supply198 also includes a heater power source that provides an appropriate controllable voltage to theheater107. When a DC bias is to be applied to thegas distributor108 or thesubstrate support104, the power supply198 also includes a DC bias voltage source that is connected to a conducting metal portion of thefaceplate111 of thegas distributor108. The power supply198 can also include the source of power for other chamber components, for example, motors and robots of the chamber.
• Thesubstrate processing chamber80 also comprises a temperature sensor (not shown) such as a thermocouple or an interferometer to detect the temperature of surfaces, such as component surfaces or substrate surfaces, within thechamber80. The temperature sensor is capable of relaying its data to thechamber controller196 which can then use the temperature data to control temperature of theprocessing chamber80, for example, by controlling the resistive heating element in thesubstrate support104.
• The embodiment of the chamber described above in connection withFIG. 30 is typically configured to perform processing at pressures of about 1 Torr and above. As shown and described above, however, in order to deposit highly conformal films with reasonably high throughput, it may be advantageous to perform processing in a substantially lower pressure regime.
• Accordingly,FIG. 31 shows a simplified cross-sectional view comparing the processing chambers of the Applied Materials' Producer® SE chamber configured to operate at higher (1 Ton) pressures, and an alternative chamber embodiment configured to operate at lower (−20-150 mTorr) pressures.FIG. 32 shows a perspective view of the modified chamber.
• Lower pressure chamber3100 differs from higher pressure chamber3102 in the following respects. First thelow pressure chamber3100 has been modified to increase the volume3102 under the heater3104 in order to improve turbo pumping symmetry and efficiency. This allows the modified chamber to accommodate a higher power pump (not shown) with an adapter tube3103 and a turbo throttle valve (not shown) and adding a new turbo adapter tube parts to accommodate these parts. The chamber was redesigned to create a low pressure pump port3106 located at approximately the height of the wafer pedestal3108. This in turn involved deepening the chamber body profile by about 2″, which in turn involved extending lift pin rods3110 and heater adapter block3112 by about the same distance.
• In the region overlying the pedestal, isolators3114 having a measured thickness were employed, and spacers (not shown) were used to raise lid components as necessary.
• Different types of stressed materials can be deposited in accordance with embodiments of the present invention. One type of stressed material that is commonly deposited comprises silicon nitride. By silicon nitride it is meant a material having silicon-nitrogen (Si—N) bonds, including materials such as silicon oxy-nitride, silicon-oxygen-hydrogen-nitrogen, and other stoichiometric or non-stoichiometric combinations of silicon, nitrogen, oxygen, hydrogen and even carbon.
• For example, silicon nitride films were traditionally used as an etch stop for the borophosphosilicate glass (BPSG) pre-metal dielectric (PMD) layer immediately overlying the active devices formed on the substrate. This is in part because silicon nitride films act as an excellent barrier to mobile ions when deposited at very high temperatures (i.e. >650 C). However, with the introduction of silicide contacts to the gate (such as NiSix), the thermal budget for deposition of SiN films was reduced to 480° C. In addition, other materials (such as low k SiOC, SiCN, BN, BCN, SiBCN and related materials) have been introduced at this level, both for etch stop and spacer applications.
• Two methods have been identified to improve the barrier properties of silicon nitride dielectric films used for such etch stop and spacer applications. One approach is to employ a higher (480° C. vs. 400° C.) deposition temperature, and is discussed below.
• Another approach is to introduce dopants into the SiN film. The role of dopant ions is two fold: to act as mobile-ion getter (i.e P), and increase the film density. Addition to of dopants to the deposition chemistry can be used to improve barrier performance at low temperature (<400° C.). Examples of such dopants include but are not limited to phosphorus, boron, carbon, chlorine, fluorine, sulfur, Ar, and Xe.
• In the case of P-doped nitride, on average, every other phosphorus site would have “extra” non-bridging oxygen atom associated with it.FIG. 81 provides a simplified schematic diagram of this type of film. As indicated inFIG. 81, these atoms will have a significant local negative charge, and thus represent favorable sites for a positive ion such as sodium drifting through the lattice.
• Exemplary methods to deposit silicon nitride stressed material are described herein to illustrate the invention; however, it should be understood that these methods can also be used to deposit other types of materials, including stressed silicon oxide, stressed dielectric layers, and others. Thus, the scope of the present invention should not be limited to the illustrative stressed silicon nitride embodiment described herein.
• VI. Deposition Temperature
• As discussed above, improvement in stress properties of a SiN layer can be achieved through RF bombardment with dilution gases.FIG. 54 is a simplified schematic diagram illustrating deposition of silicon nitride under different conditions.
• FIG. 54 shows that the highest compressive stress (−3.3 GPa) was demonstrated using PECVD at a deposition temperature of 400° C. These conditions represent an extension of existing SiH₄—NH₃deposition chemistry.
• Further work has indicated that the temperature of deposition of the film can also affect its properties, including compressive stress. In particular, it has been found that compressive stress of a SiN film can be increased (to −3.5 GPa) by an increase in deposition temperature (480° C.). TABLE XIII shows three different conditions for formation of silicon nitride films.

• 	TABLE XIII
  	PARAMETER	A2	M3i	M3r

  	High Frequency RF	100	80	90
  	Low Frequency RF	75	80	30
  	SiH4 Flow (sccm)	60	60	50
  	NH3 Flow (sccm)	130	150	100
  	Ar Flow (sccm)	3000	3000	3000
  	N2 Flow (sccm)	1000	—	—
  	H2 Flow (sccm)	—	1000	3500

• FIG. 55A is a bar chart of stress for nitride films deposited under the three different conditions of TABLE XIII. This figure shows that under all three conditions, compressive stress is enhanced by increasing the deposition temperature.
• FIG. 55B shows FTIR absorbance spectra of the nitride films deposited inFIG. 55A. This figure shows that Si—H Content is reduced by increasing deposition temperature leading to improved thermal stability
• FIG. 56A-C are bar charts showing various characteristics of the nitride films deposited inFIG. 55A. These figures show that film properties such as density, wet etch rate (WER), and hydrogen content, are improved by increasing deposition temperature
• FIG. 57 plots stress versus deposition temperature exhibited by nitride films deposited under different conditions.FIG. 57 indicates that stress hysteresis drops by 1 GPa by increasing the deposition temperature from 400° C. to 480° C.

• TABLE XIV
  Film properties	M3i compressive process	M3icompressive process
  Deposition
  	400° C.	480° C.
  Temperature (° C.)
  Deposition	6.2	6.1
  Rate (Å/s)
  Refractive Index	1.970	1.980
  (RI)
  Stress (GPa)	−2.8	−3.0
  Density (g/cm3)	2.9	3.0
  (measured by XRR)
  Si:N:H (RBS/HFS)	31:47:22	33:48.4:18.6
  Wet Etch Rate	15	8.5
  (Å/min) in 100:1HF
  Thermal Stability
  	300*	<100 (80 MPa)
  (5 h/400° C.)
  ΔStress (MPa)

  
  TABLE XIV shows that the properties of film stress, density, wet etch rate, and hydrogen content are each improved by increasing deposition temperature
• FIG. 58 plots atomic hydrogen concentration versus depth into a silicon nitride film formed over a silicon substrate. These results show lower hydrogen concentration in the film deposited at 480° C.
• An increased temperature of depositions of the SiN film can also result in enhanced adhesion to the underlying material. TABLE XV shows the energy (Gc) required to delaminate layers of a various film stacks including SiN:

• TABLE XV
  	SiN dep	Ave Gc
  Test stack	temp	(J/m2)	Failure interface
  Si/NiSix 200A/850A SiN	480° C.	177.8	Top SiN/top epoxy layer
  Si/850A SiN	480° C.	230.7	Top SiN/top epoxy layer
  Si/NiSix 200A/850A SiN	400° C.	138.4	Top SiN/top epoxy layer
  Si/850A SiN	400° C.	207.2	Top SiN/top epoxy layer

  
  All test samples were delaminated at SiN/epoxy interface. No Gc could be generated for Si/SiN or NiSi/SiN interfaces, because the Si/SiN stack has never delaminated at Si/SiN interface. The adhesion is improved (higher Gc) by increasing deposition temperature from 400 to 480° C.
• FIGS. 59A-B plot various characteristics of silicon nitride films deposited under different conditions. These figures show that compressive stress reaches −3.0 GPa at 480° C.
• FIG. 60 plots stress and refractive index of silicon nitride films deposited at different temperatures. Here, a compressive stress of −3.3 GPa was demonstrated using PECVD at 400° C. These conditions represent an extension of existing SiH4-NH3 chemistry. Compressive stress of the deposited film increased to −3.5 GPa with a deposition temperature of 480° C.
• Deposition of silicon nitride films at higher temperatures required the use of an apparatus having components that are capable of withstanding the higher temperatures. For example, a substrate heater may be comprised of ceramic rather than aluminum, in order to withstand temperatures of greater than 420° C.
• Improved step coverage for a tensile stressed SiN film may be achieved under certain processing conditions. TABLE XVI lists three different sets of conditions for forming a SiN film:

• TABLE XVI
  Process Parameters	D1	D1-H	D8

  HF RF (W)	45	45	100
  SiH4(sccm)	25	25	75
  NH3(sccm)	50	50	3,200
  N2(sccm)	20,000	10,000	10,000
  Pressure (Torr)	6	6	5
  Spacing (mils)	430	430	480
  	baseline	Improved step coverage	reference

  
  TABLE XVI illustrates that good step coverage is expected for process regimes with higher concentration of Si(NH2)3 in the gas phase
• FIGS. 61A-B are bar charts of stress and deposition rate of silicon nitride films formed under various conditions. All stress nitride films characterized exhibit a stress of >1.0 GPa at 480° C. Thus, the higher deposition rates characteristic of higher deposition temperatures, can be achieved without significant stress degradation.
• FIGS. 62A-C are bar charts of various properties of silicon nitride films deposited under different conditions. Density, wet etch rate ratio (WERR), and hydrogen content all improve with increasing deposition temperature.
• FIG. 80 plots stress and wet etch rate of silicon nitride films deposited at different temperatures. This figure shows that density of the tensile nitride film increases with deposition temperature. The benefit of higher deposition temperature is also proven by device performance, with improved reliability achieved with higher deposition temperatures.
• As discussed above, UV curing of deposited SiN films may result in enhanced stress. Parameters of this UV curing, such as temperature, may also affect properties such as stress of the resulting SiN film.
• FIGS. 63A-B plot stress and shrinkage respectively, of silicon nitride films formed under different conditions. In these figures, the first temperature represents the temperature at deposition, and the second temperature represents the temperature at which the UV curing takes place.FIGS. 63A-B show that the low deposition temperature film exhibits the highest post UV cure stress, even though the stress of the film as-deposited is lower. Thus, deposition temperature has the most impact on film shrinkage during UV cure. The figures also indicate that a curing at a higher temperature improves cure efficiency, allowing a shorter cure time or higher stress for a given cure time.
• The underlying topography upon which the SiN film is deposited may affect the stress.FIG. 64A is an electron micrograph of a densely patterned structure bearing a deposited silicon nitride film. FIG.64AB is a bar chart of stress of films formed over densely patterned features under different conditions.FIG. 64B is an electron micrograph of an isolated feature bearing a deposited silicon nitride film. FIG.64BA is a bar chart of stress of films formed over isolated features under different conditions.
• These figures indicate that the combination of a deposition temperature of 400° C. with a UV curing temperature of 480° C. results in the highest stress on densely patterned structures. In these figures, the stress measurements were extracted based upon film shrinkage data.
• FIGS. 65A-B are bar charts showing hydrogen content and wet etch rate ratio (WERR) of silicon nitride films formed under various conditions. These figures reveal that a higher UV cure temperature reduces overall H content of the film. In addition, a higher deposition temperature is beneficial for better film density, as indicated by reduction in the wet etch rate ratio.
• TABLE XVII shows the properties of SiN films formed under different conditions:

• TABLE XVII
  Film Properties	U2 1x600A dep & 7 mins cure

  CVD temp (° C.)	300	400	480
  As-dep Stress	0.26	0.67	1.01
  (GPa)

  UV Cure temp	400	480	400	480	480
  (° C.)
  Post-cure Stress	1.68	1.76	1.60	1.74	1.55
  (GPa)
  Post-cure RI	1.81	1.82	1.85	1.86	1.89
  Average	16.7%	17.4%	8.8%	10.0%	4.1%
  shrinkage (%)
  Density (g/cm3)	2.5	2.5	2.4	2.5	2.5
  WERR (100:1		8.9	6.4	4.8	2.5
  DHF)
  Si:N:H	35:49:16	38:52:9	H~14%	40:49:11	40:48:12
  (RBS/HFS)

• TABLE XVII indicates that the higher UV cure temperature reduces overall H content of the film. Higher deposition temperature is beneficial for better film density, as indicated by the reduction in wet etch rate ratio.
• In summary, deposition temperature has the most impact on film shrinkage during UV cure. Lower deposition temperature yields highest post UV stress even though the stress of the film as-deposited is the lowest. Film shrinkage during UV cure decreases with deposition temperature, and higher deposition temperature is beneficial for wet etch rate reduction. Higher UV cure temperature removes more H from the film and increases post UV cure stress. Density, wet etch rate, and hydrogen content improve with increasing deposition temperature.
• VII. Integrated Deposition/Cure Processes
• Stressed SiN films may be formed over the raised gate structures of MOS transistors in order to impose stress. The sidewalls of such gates are typically substantially vertical, and thus one issue encountered with forming these stressed nitride layers is degradation of the integrity of the film at the sharp (90°) corners during UV curing due to film shrinkage.
• FIGS. 66A-B are electron micrographs of features bearing silicon nitride films before and after UV curing, respectively.FIG. 66B shows that integrity of the film at the bottom corner is degraded during UV cure owing to shrinkage of the film.
• FIG. 67A is a simplified schematic diagram showing stress of an NMOS structure. This figures shows the stress to be tensile along both the x- and z-axes, and compressive along the y-axis.
• FIG. 67B is a simplified cross-sectional view of an NMOS gate structure that is experiencing stress. Electron and hole mobility change per 1 GPa stress, based upon piezoresistance effect.
• However, shrinkage of the silicon nitride film at the bottom corners of the raised gate structure can pull the film away in opposite directions, leading to cracks and seams at these locations. Such film degradation at the gate corner reduces the overall mobility improvement by 50%. Therefore, ensuring continuity of the integrity of the stressed nitride film is desirable to achieve the highest improvement in the performance of the NMOS device.
• FIGS. 68A-F are electron micrographs showing silicon nitride films formed under different conditions over dense and isolated structures. The SiN films of these figures had a thickness of 600 Å “as deposited”, and were exposed to a single UV cure at 480° C. for 7 min. These figures indicate that corner cracking is more probable for films deposited at low temperature due to high UV cure shrinkage.
• FIGS. 69A-C are electron micrographs showing the corners of raised features bearing silicon nitride films deposited at a temperature of 400° C. and exposed to UV curing at 480° C. for 7 minutes. Comparison of these FIGS. withFIGS. 68A-F, reveals that a higher deposition temperature increases the cracking threshold. Specifically,FIG. 69B shows no cracking of a film having a thickness of <600 Å that was deposited at 400° C. By contrast,FIG. 68B shows cracking of a film having a thickness of <300 Å that was deposited at 300° C. However, this increased cracking threshold comes at the expense of the lower stress of these films (1.70 GPa versus 1.75 GPa, respectively).
• One approach to resolving the issue of film cracking is to employ integrated UV curing to improve corner integrity.FIGS. 70A-F are electron micrographs showing silicon nitride films formed over raised features under different conditions.
• Specifically,FIG. 70A shows a raised feature bearing a SiN film formed by three successive cycles of deposition followed by curing.FIG. 70B shows a raised feature bearing a SiN film formed by six successive cycles of deposition followed by curing. These figures show that an integrated multilayer deposition-cure approach helps improve integrity of the film at the corners. However, the layers resulting from the successive deposition-cure cycles may exhibit weak interfaces.
• However, integration of a post-UV cure plasma treatment process may help enhance the interface between the films resulting from integrated deposition-curing. Specifically, exposure of a surface of a UV cured nitride layer to a plasma may result in the formation dangling bonds. Such dangling bonds activate the surface, promoting subsequent formation of overlying nitride on that surface and promoting adhesion between the surface and the overlying nitride.
• FIG. 70C shows a raised feature bearing a SiN film formed by three successive cycles of deposition followed by curing and plasma treatment.FIG. 70D shows a raised feature bearing a SiN film formed by six successive cycles of deposition followed by curing and then plasma treatment. These figures show that post UV cure plasma treatment improves the interface between layers and preserves corner integrity.
• Moreover, incorporation of such post-UV cure plasma treatment improves adhesion while not affecting the stress of the resulting film.FIGS. 70E-F show raised features bearing a film comprising a trio of 200 Å thick SiN films formed by integrated deposition-curing cycles, lacking and including treatment with an N2 plasma, respectively. These figures reveal that post UV cure plasma treatment improves the interface between layers and preserves corner integrity without stress degradation.
• FIGS. 71A-B are bar charts showing thickness and stress, respectively, of SiN films formed under different conditions of integrated deposition-curing. These figures indicate that no significant shrinkage or stress difference was observed for multi-layer deposition-curing, with or without post-cure plasma treatment. The post-cure thickness of the film with integrated post plasma treatment is 20-30% the original thickness.
• FIG. 72 plots Fourier Transform Infrared (FTIR) spectra of silicon nitride films formed under different integrated deposition-cure conditions. This figure indicates that decreasing the number of layers and introducing post-cure plasma treatment step does not affect the composition of the resulting films.
• FIGS. 73A-B show electron micrographs of raised features bearing silicon nitride films formed under different conditions. Specifically,FIG. 73A shows a SiN film formed utilizing a single deposition-cure cycle.FIG. 73B shows a SiN film formed utilizing multiple deposition-cure cycles. These figures reveal that an integrated deposition and UV cure process sequence helps to improve film corner integrity without impacting stress of the film.
• Moreover, utilizing an integrated deposition-cure process for forming a SiN film can resolve issues related to corner crackingFIGS. 74A-C show electron micrographs of isolated features bearing a total thickness of 600 Å of silicon nitride films deposited at 300° C. and exposed to UV curing at 480° C. In contrast with the film formed in a single deposition-cure cycle (FIG. 73A), the films formed utilizing multiple integrated deposition-cure cycles exhibited no significant film degradation at the corner observed in the isolated areas where volume change is higher. The thickness threshold can be increased to 300 Å depending on topography.
• FIGS. 75A-C are electron micrographs of silicon nitride films formed according to the same conditions as inFIGS. 74A-C, except over densely patterned features. Again, no corned cracking was observed for 200 Å “as deposited” film per layer. And, the thickness threshold can be increased to 300 Å depending on topography.
• FIG. 76 plots hydrogen concentration versus depth into a tensile-stressed silicon nitride film formed under different conditions. This figure indicates that the integrated multiple deposition/cure process produces lower total hydrogen content for the layer closest to the gate.
• FIGS. 77A-B plot stress versus cure time for silicon nitride films exposed to different UV curing conditions. Specifically,FIG. 77A shows the effect upon stress, of a single pass of UV curing of nitride films of different thicknesses. Here, the 1200 Å as-deposited film yields a lower final stress as compared to the thinner film due to the longer H diffusion path.FIG. 77B shows the effect upon stress, of a multiple passes of UV curing of nitride films. This Figure shows that a multiple deposition-cure process sequence also improves stress over a single pass process for thick films, in addition to preventing corner cracking.
• FIG. 78A plots atomic concentration of different elements versus depth into a silicon nitride film. This figure indicates that the SiN film as-deposited, exhibits some level of surface oxidation upon exposure to air, according to the following reaction:
• 
  Si—H+H—OH—→SiOH+H₂
• FIG. 78B is a bar chart of stress of silicon nitride films formed under different conditions. This figure indicates that the oxide film formed at the film surface acts as hydrogen barrier, reducing the tensile stress induced by the UV cure. Accordingly, an integrated deposition/curing process without a break in vacuum and corresponding exposure to air is desirable to maintain high stress levels and prevent film oxidation.
• FIG. 79A is a simplified schematic diagram of an embodiment of anapparatus7900 in accordance with the present invention, which may be used to form a stressed silicon nitride film.Transfer chamber7902 is maintained at vacuum in order to prevent the unwanted growth of oxide between the deposition step performed inchamber7904, and the UV curing performed inchamber7906. Where the silicon nitride films are to be deposited at high temperatures, the heater and support of thedeposition chamber7904 should be formed from a material such as ceramic (rather than aluminum) able to withstand the elevated temperatures. The same is true for the elements ofchamber7906, where curing is to be performed at elevated temperatures in accordance with embodiments of the present invention.
• FIG. 79B is a screen shot showing of a sequence of steps employed by the tool ofFIG. 79A. Example parameters of recipes that may be run are shown in TABLE XVIII below:

• TABLE XVIII
  Name	N2 stab	N2 treat	Purge	Stab	DEP	Purge	Lift	PUMP
  Mode	Time	Time	Time	End	Time	Time	TimeOrEnd	Time
  				point			point
  MaxTime
  	10	10	5	25	18*	5	5	10
  Heater Temp	300	300	300	300	300	300	300	300
  (deg C.)
  PressMode	Servo	Servo	Servo	Servo	Servo	Servo	Servo	AbsCtrl
  Press (torr)	8.5	8.5	8.5	8.5	8.5	8.5	8.5	0
  TV position	0	0	0	0	0	0	0	90
  (deg)
  LiftPos	Process	Process	Process	Process	Process	Process	Process	Lift
  HtrSpace (in)	0.3	0.3	0.3	0.3	0.3	0.3	1.6	1.6
  RFTime (s)	0	10	0	0	18	0	0	0
  HighFreqRFPwr	0	50	0	0	100	0	0	0
  (W)
  RFMatchSet	M4	M4	M4	M4	M4	M4	M4	M4
  SIH4 Flow Set	0	0	0	60	60	0	0	0
  (sccm)
  NH3 Flow Set	0	0	0	900	900	0	0	PumpThro
  (sccm)								Final
  Ar-Dep	10000	10000	0	0	0	0	0	PumpThro
  Flow Set								Final
  (sccm)
  N2 Flow Set	10000	10000	10000	1000	1000	2000	1000	PumpThro
  (sccm)								Final
  Endpoint				Pressure
  				and Gas
  				flow

• In summary, a film deposited at low deposition temperature exhibits the highest stress post-UV cure, even though it exhibits the lowest stress as-deposited. This indicates that deposition temperature has the most impact on film shrinkage during UV cure. A higher UV cure temperature improves cure efficiency (resulting in a shorter cure time or a higher stress at a given cure time). Processes integrating multiple deposition/cure cycles improves corner integrity at the bottom of the gate, but require additional steps. However, throughput can be improved by increasing deposition temperature, which will increase the threshold for “as deposited” thickness per layer. Finally, such an integrated deposition/curing process should be performed without vacuum break in order to avoid film oxidation and to maintain high stress levels.
• Embodiments in accordance with the present invention generally provide a method for forming a dielectric film on a substrate. In one embodiment, the method comprises placing a substrate with at least one formed feature across a surface of the substrate into a chamber. A dielectric layer is deposited on the surface of the substrate. The dielectric layer is treated with plasma. The dielectric layer is treated with a UV source. In one embodiment, the method further comprises repeating depositing the dielectric layer and treating the dielectric layer with plasma. In another embodiment, the dielectric layer comprises silicon oxide, silicon oxynitride, or silicon nitride. In one embodiment the depositing a dielectric layer and treating the dielectric layer with plasma are performed in the same chamber. In one embodiment, the plasma comprises a mixture of argon and nitrogen.
• Also, embodiments in accordance with the present invention generally provide a method for forming a dielectric film on a substrate. The method comprises placing a substrate with at least one formed feature across a surface of the substrate into a chamber. A dielectric layer is deposited on the surface of the substrate. The dielectric layer is treated with plasma. The dielectric layer is treated with a UV source. The dielectric layer is treated with plasma. In one embodiment, the dielectric layer comprises silicon oxide, silicon oxynitride, or silicon nitride. In one embodiment, the plasma comprises a mixture of argon and nitrogen.
• Embodiments in accordance with the present invention provide a method and apparatus for depositing a conformal dielectric film over a formed feature. The films that can benefit from this process include dielectric materials such as silicon oxide, silicon oxynitride, or silicon nitride. The films may be carbon doped, hydrogen doped, or contain some other chemical or element to tailor the dielectric properties. The layer may be carbon doped or nitrogen doped. Specifically, a combination of thin layers that have been individually deposited and plasma treated provide a more conformal film than a single thick dielectric layer. The chambers that are preferred for this process include the PRODUCER P3™ chamber, PRODUCER APF PECVD™ chamber, PRODUCER BLACK DIAMOND PECVD™ chamber, PRODUCER BLOK PECVD™ chamber, PRODUCER DARC PECVD™ chamber, PRODUCER HARP™ chamber, PRODUCER PECVD™ chamber, PRODUCER SACVD™ chamber, PRODUCER STRESS NITRIDE PECVD™ chamber, and PRODUCER TEOS FSG PECVD™ chamber, and each of these chambers is commercially available from Applied Materials, Inc. of Santa Clara, Calif. One exemplary system is described in U.S. patent application Ser. No. 11/414,869, entitled UV ASSISTED THERMAL PROCESSING, filed May 1, 2006, which is herein incorporated by reference to the extent it is not inconsistent with the current specification. The chambers of this process may be configured individually, but are most likely part of an integrated tool such as an ENDURA™ integrated tool and a CENTURA™ integrated tool which are commercially available from Applied Materials, Inc. of Santa Clara, Calif. The process may be performed on any substrate, such as a 200 mm or 300 mm substrate or other medium suitable for semiconductor or flat panel display processing.
• FIG. 82 is a flow chart of an embodiment of adeposition process8200. All of the process steps ofdeposition process8200 may be performed in the same chamber. Theprocess8200 begins withstart step8210 that includes placing a substrate with at least one formed feature across its surface into a chamber. The formed feature may be any type of formed feature such as a via or interconnect. Next, a dielectric layer is deposited by CVD or PECVD during thin dielectriclayer deposition step8220. The thin dielectric layer may be silicon oxide, silicon oxynitride, or silicon nitride. The layer may be carbon doped or nitrogen doped. The thin dielectric layer may have a thickness of about 1 Å to about 8 Å. The pressure of the chamber is about 100 mTorr to about 8 Torr, and 2 to 8 Torr is preferred. The thin dielectric layer is deposited duringdeposition step8220 for about 2 to about 5 seconds and then the thin dielectric layer is plasma treated duringstep8230. Deposition methods for thin dielectric film layers are discussed in U.S. Provisional Patent Application No. 60/788,279, entitled METHOD TO IMPROVE THE STEP COVERAGE AND PATTERN LOADING FOR SILICON NITRIDE FILMS, filed Mar. 31, 2006, which is herein incorporate by reference to the extend it does not conflict with the current specification. The thin dielectric layer is then UV treated duringstep8240.
• The UV source for theUV treatment step8240 may comprise UV lamps including sealed plasma bulbs filled with one or more gases such as xenon (Xe) or mercury (Hg) for excitation by a power source. In one embodiment, the power source may be a conventional UV power source or one or more transformers to include energize filaments of the magnetrons. In another embodiment, the power source can introduce radio frequency (RF) energy sources that are capable of excitation of the gases within the UV lamp bulbs. In one embodiment, the UV lamp bulb may have low pressure Hg or other low pressure UV producing discharges to produce radiation of 254 nm and 185 nm.
• The process is completed during theend step8260. Duringend step8260 the substrate undergoes additional processing and is removed from the chamber.
• FIG. 83 is a flow chart of an embodiment of adeposition process8300 which includes astart step8310. Theprocess8300 begins withstart step8310 that includes placing a substrate with at least one formed feature across its surface into a chamber. The formed feature may be any type of formed feature such as a via or interconnect. Next, a dielectric layer is deposited by CVD or PECVD during thin dielectric layer deposition step8320. As discussed above, the thin dielectric layer may be silicon oxide, silicon oxynitride, or silicon nitride. The thin dielectric layer is plasma treated duringstep8330.Plasma treatment step8330 may be performed with a combination of any inert plasma and nitrogen but is preferably performed with a combination of argon and nitrogen. The thin dielectric layer is then UV treated duringstep8340. The thin dielectric layer undergoes another plasma treatment step instep8350. UV cure of patterned structures generally suffers from shadowing effects which reduce the cure efficiency at the gate corners. The addition of this second plasma treatment step, preferably performed with a nitrogen plasma, improves the corner integrity by healing the “partially cured” region at the bottom of the poly gate. This process can be optimized as a function of the desired film thickness for improved throughput performance. Furthermore, repeating the steps of depositing a dielectric layer, treating the dielectric layer with a plasma, treating the dielectric layer with a UV source, and treating the dielectric layer with a plasma improves step coverage. Dividing the deposition/cure sequence in multiple cycles allows for improved corner integrity by reducing the amount of shrinkage per layer and improved step coverage.
• FIG. 84 is a graph depicting the effect of the deposition process on the post-UV cure wet etch rate (WER) and stress.FIG. 84 shows the significant decrease in WER by introducing the Argon/Nitrogen plasma treatment (C) after the deposition prior to UV cure with minor stress degradation in comparison to no plasma treatment (A) or plasma treatment at high temperature (B). NMOS device performance increases linearly with the tensile stress level of the SiN_xH_ycontact liner.FIG. 84 shows that UV treatment combined with in-situ plasma can be used to increase the tensile stress of the nitride layers. However, to benefit from both the in-situ plasma treatment and the UV-cure, the composition of “as-deposited” nitride film should be tailored so the Si—H/N—H ratio is approximately one. The Ar addition to the nitrogen plasma modifies the plasma density thus increasing the concentration of nitrogen radicals responsible for removing hydrogen from the film. For example, this combination of in-situ plasma treatment and UV cure allows for the deposition of a nitride film with 1.55 GPa tensile stress and a low wet etch rate at a low temperature of approximately 400° C.
• Silicon Nitride films with tensile stress up to 1.7 GPa can be deposited at 400° C. using UV cure by optimizing the Si—H/N—H ratio and total hydrogen content in the “as deposited film”. As shown inFIG. 85, exposing PECVD SiNx film to broadband UV light leads to a steep decrease of the hydrogen content and increase in the cross-linking of the nitride network. The stress increase is induced by a three-dimensional shrinkage of the film due to formation of Si—N bonds following the dissociation of Si—H and N—H bonds.
• While the above embodiments have been described in connection with formation of silicon nitride films, the present invention is not limited to this particular example. Other types of films, including silicon oxynitride and doped silicon nitride films, could also be formed according to embodiments of the present invention. Examples of dopants in such films include but are not limited to carbon, oxygen, boron, phosphorous, germanium, and arsenic.
• Although exemplary embodiments of the present invention are shown and described, those of ordinary skill in the art may devise other embodiments which incorporate the present invention, and which are also within the scope of the present invention. For example, other radiation treatments, such as infrared radiation or selected wavelengths of visible light may also be used to treat the deposited film. Also, a combination of different radiation exposures can also be used. Furthermore, the terms below, above, bottom, top, up, down, first and second and other relative or positional terms are shown with respect to the exemplary embodiments in the FIGS. and are interchangeable. Therefore, the appended claims should not be limited to the descriptions of the preferred versions, materials, or spatial arrangements described herein to illustrate the invention.

Claims (11)

1.-16. (canceled)

17. A method of forming a dielectric film on a substrate, comprising:

placing a substrate with at least one formed feature across a surface of the substrate into a chamber;

depositing a dielectric layer on the surface of the substrate;

treating the dielectric layer with plasma; and

treating the dielectric layer with a UV source.

18. The method ofclaim 17, further comprising repeating depositing a dielectric layer and treating the dielectric layer with a plasma.

19. The method ofclaim 17, wherein the dielectric layer comprises silicon oxide, silicon oxynitride, silicon nitride, or doped silicon nitride.

20. The method ofclaim 17, wherein the depositing a dielectric layer and treating the dielectric layer with plasma are performed in the same chamber.

21. The method ofclaim 17, wherein the treating of the dielectric layer with a UV source is performed in a second chamber comprising a UV source.

22. The method ofclaim 17, wherein the plasma includes argon, nitrogen, Xenon, or Helium.

23. The method ofclaim 17 further comprising treating the dielectric layer with plasma.

24. The method ofclaim 23, further comprising repeating depositing a dielectric layer, treating the dielectric layer with a plasma, treating the dielectric layer with a UV source, and treating the dielectric layer with a plasma.

25. The method ofclaim 23, wherein the depositing a dielectric layer, treating the dielectric layer with plasma, treating the dielectric layer with a UV source, and treating the dielectric layer with a plasma are performed in an integrated deposition/UV system.

26. The method ofclaim 23, wherein the plasma includes argon, nitrogen, helium, or Xenon.

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