This application claims the benefit of Korean Patent Application No. 10-2006-0074751, filed on Aug. 8, 2006, Korean Patent Application No. 10-2006-0078635, filed on Aug. 21, 2006, Korean Patent Application No. 10-2006-0130114, filed on Dec. 19, 2006, which are hereby incorporated by references as if fully set forth herein.
BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a light emitting device package and a method for manufacturing the same, and more particularly, to a light emitting device package capable of emitting uniform white light and a method for manufacturing the same.
2. Discussion of the Related Art
Light emitting diodes (LEDs) are well known as a semiconductor light emitting device which converts current to light, to emit light. Since a red LED using GaAsP compound semiconductors was made commercially available in 1962, it has been used, together with a GaP:N-based green LED, as a light source in electronic apparatuses, for image display.
The wavelength of light emitted from such an LED depends on the semiconductor material used to fabricate the LED. This is because the wavelength of the emitted light depends on the band-gap of the semiconductor material representing energy difference between valence-band electrons and conduction-band electrons.
A gallium nitride (GaN) compound semiconductor has been highlighted in the field of high-power electronic devices including light emitting diodes (LEDs) because it exhibits a high thermal stability and a wide band-gap of 0.8 to 6.2 eV. One of the reasons why the GaN compound semiconductor has been highlighted is that it is possible to fabricate semiconductor layers capable of emitting green, blue, and white light, using GaN in combination with other elements, for example, indium (In), aluminum (Al), etc.
Thus, it is possible to adjust the wavelength of light to be emitted, in accordance with the characteristics of a specific apparatus, using GaN in combination with other appropriate elements. For example, it is possible to fabricate a blue LED useful for optical recording or a white LED capable of replacing a glow lamp.
Such a white light source may be fabricated using LEDs for emitting light of three primary colors, namely, red, green, and blue, or using an LED for emitting light of a certain color and phosphors.
In accordance with the method, which uses phosphors, a white light source may be fabricated using a blue LED and yellow phosphors. In this case, white light is produced as blue light emitted from a blue LED and yellow light emitted from yellow phosphors excited by the blue light are mixed.
Similarly, the white light source may be fabricated using a green LED and red phosphors or using an ultraviolet LED and red, green, and blue phosphors.
In accordance with the method, which uses a blue LED and yellow phosphors, to fabricate a white light source, red light and green light are emitted as blue light emitted from the blue LED is absorbed in the yellow phosphors in certain degrees. The red light and green light are mixed with the blue light not absorbed in the yellow phosphors, so that they are viewed in the form of white light to the observer.
The above-mentioned method, which uses a blue LED and yellow phosphors, to fabricate a white light source, are widely used because the fabricated white light source exhibits excellent color rendering, high stability, and high reliability.
FIG. 1 illustrates an LED lamp which emits white light using the above-mentioned LED and phosphors.
In the illustrated LED lamp, ablue LED3 is disposed on astack2 mounted in a reflective cup1. Afiller5, which is formed by mixingphosphors4 with a silicon gel or an epoxy resin, is filled in the reflective cup1 such that thefiller5 encloses theblue LED3. Aglass6 is arranged over thefiller5.
In this LED lamp structure, however, thefiller5 enclosing theLED3 may have a non-uniform thickness. For this reason, there may be an optical path length difference between light paths a and b of light emitted from theLED3 to the surface of theglass6.
SUMMARY OF THE INVENTION Accordingly, the present invention is directed to a light emitting device package and a method for manufacturing the same that substantially obviate one or more problems due to limitations and disadvantages of the related art.
An object of the present invention is to provide a light emitting device package capable of emitting light generated from a light source via an external medium while achieving a reduction in optical path length difference, thereby achieving an improvement in the chromatic uniformity at different positions of the light emitting device, and enabling emission of light uniformly changed in wavelength.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
To achieve these objects and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, a light emitting device package comprises: a package body; an electrode formed over at least one surface of the package body; a light emitting device mounted over the package body; and a phosphor layer formed over the light emitting device while having a uniform thickness around the light emitting device.
In another aspect of the present invention, a method for manufacturing a light emitting device package comprises: forming a plurality of electrodes over a substrate; bonding light emitting devices to the substrate such that the light emitting devices are connected to the electrodes; forming a phosphor layer over the substrate bonded with the light emitting devices; and dicing the substrate and the phosphor layer into unit packages such that the phosphor layer over an upper surface of the light emitting device in each unit package has a thickness equal to a thickness of the phosphor layer over each side surface of the light emitting device in the unit package.
In still another aspect of the present invention, a method for manufacturing a light emitting device package comprises: forming a barrier rib defining a region surrounding a light emitting device over a mount of a substrate for mounting the light emitting device; mounting the light emitting device over the mount; and filling phosphors inside the barrier rib.
It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.
BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principle of the invention. In the drawings:
FIG. 1 is a schematic view illustrating a general light emitting device package;
FIGS.2 to8 are views illustrating a first embodiment of the present invention;
FIGS.9 to13 are views illustrating a second embodiment of the present invention;
FIGS.14 to18 are views illustrating a third embodiment of the present invention;
FIG. 19 is a view illustrating a fourth embodiment of the present invention;
FIGS.20 to22 are views illustrating a fifth embodiment of the present invention;
FIGS.23 to25 are views illustrating a sixth embodiment of the present invention;
FIG. 26 is a view illustrating a seventh embodiment of the present invention;
FIGS. 27 and 28 are views illustrating an eighth embodiment of the present invention;
FIGS.29 to33 are views illustrating a ninth embodiment of the present invention; and
FIGS.34 to38 are views illustrating a tenth embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION The present invention now will be described more fully hereinafter with reference to the accompanying figures, in which embodiments of the invention are shown.
This invention may, however, be embodied in many alternate forms and should not be construed as limited to the embodiments set forth herein. Accordingly, while the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that there is no intent to limit the invention to the particular forms disclosed, but on the contrary, the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the claims.
It will be understood that when an element such as a layer, region or substrate is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present. It will also be understood that if part of an element, such as a surface, is referred to as “inner,” it is farther to the outside of the device than other parts of the element.
In addition, relative terms, such as “beneath” and “overlies”, may be used herein to describe one layer's or region's relationship to another layer or region as illustrated in the figures.
It will be understood that these terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. Finally, the term “directly” means that there are no intervening elements. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms.
These terms are only used to distinguish one region, layer or section from another region, layer or section. Thus, a first region, layer or section discussed below could be termed a second region, layer or section, and similarly, a second region, layer or section may be termed a first region, layer or section without departing from the teachings of the present invention.
First Embodiment Hereinafter, a method for manufacturing a light emitting device package according to a first embodiment of the present invention will be described.
First, asubstrate10, which is provided with a groove-shapedmount11 formed at an upper surface of thesubstrate10, andside grooves12 formed at opposite side surfaces of thesubstrate10, is prepared, as shown inFIG. 2. The structure of thesubstrate10 is also illustrated inFIG. 7. For thesubstrate10, a silicon substrate or a ceramic substrate may be used. Theside grooves12 may be formed by forming through holes at opposite sides of thesubstrate10.
Thereafter, a pair ofelectrodes13 are formed at thesubstrate10 such that eachelectrode13 connects the interior of themount11, an associated one of theside grooves12, and a lower surface of thesubstrate10, as shown inFIG. 3.
Alight emitting device20 is then bonded on thesubstrate10 inside themount11 such that thelight emitting device20 is connected to theelectrodes13, as shown inFIG. 4. The bonding of thelight emitting device20 may be achieved usingsolders21 applied to respective terminals of theelectrodes13 of thelight emitting device20.
Subsequently, afiller22 is filled in the interior of themount11 such that thefiller22 encloses thelight emitting device20, as shown inFIG. 5. For thefiller22, a transparent material, which allows light to pass therethrough, may be used. For example, a silicon gel or an epoxy resin may be used.
Aresin layer23, in which phosphors are uniformly distributed, is the formed over thefiller22, as shown inFIG. 6. Theresin layer23 may have a uniform thickness. Thus, a light emitting device package is completely manufactured.
In the light emitting device package manufactured as described above, light generated from thelight emitting device20 passes through theresin layer23, which has a uniform thickness and is dispersed with phosphors, so that the wavelength of the light is uniformly changed. Accordingly, the wavelength-changed light is emitted from the light emitting device package.
For example, where thelight emitting device20 is a blue light emitting device, and the phosphors dispersed in theresin layer23 are yellow phosphors, blue light generated from the bluelight emitting device20 is mixed with yellow light generated from the yellow phosphors while passing through theresin layer23. In accordance with the mixing of blue and yellow colors, white light may be emitted from the light emitting device package.
As described above, themount11 is formed at the upper surface of thesubstrate10. Also, theside grooves12 are formed at opposite sides of themount11.
In order to smoothly form theelectrodes13, each side surface of thesubstrate10 has a centrally-protruded shape by inclinedly etching upper and lower portions of the side surface upon forming the associatedside groove12.
Themount11 also has inclined side walls, so that light emitted from thelight emitting device10 mounted on the bottom surface of themount11 can be reflected from the inclined side walls. In this case, it is possible to increase the amount of light output through the top of the package.
FIG. 8 illustrates optical travel paths in the light emitting device package according to this embodiment. As shown inFIG. 8, light emerging from the top of thelight emitting device20 mounted on the bottom surface of themount11 travels along an optical path B, whereas light emerging from each side surface of thelight emitting device20 travels along an optical path A after being reflected by the side surface of themount11 facing the side surface of thelight emitting device20.
Accordingly, the light traveling along the optical path A and the light traveling along the optical path B passes through the phosphor-distributedresin layer23, which has a uniform thickness, so that the wavelength of the light is uniformly changed.
Second Embodiment Hereinafter, a method for manufacturing a light emitting device package according to a second embodiment of the present invention will be described.
As shown inFIG. 9, a mountingrecess31 is first formed at an upper surface of asubstrate30. A pair ofelectrodes32 are then formed in the mountingrecess31 such that theelectrodes32 extend along side walls of the mountingrecess31 and then extend along the upper surface of thesubstrate30.
Alight emitting device40 is then bonded on the substrate to portions of theelectrodes32 arranged in the mountingrecess31, as shown inFIG. 10. Subsequently, afiller42 is filled in the mountingrecess31. A phosphor-distributedresin layer43 is the formed over the mountingrecess31 filled with thefiller42.
The bonding of thelight emitting device40 may be achieved by bonding terminals of thelight emitting device40 to theelectrodes32 usingsolders41, as in the first embodiment as described above.
The filling of thefiller42 may be achieved using a dispensing method, as shown inFIG. 11. In accordance with the dispensing method, anozzle82, which contains thefiller42, is positioned in the mountingrecess31 above thelight emitting device40. Thefiller42 is then discharged from thenozzle82, to fill the mountingrecess31.
The formation of theresin layer43 over thefiller42 may be achieved using a screen printing process, as shown inFIG. 12.
In accordance with the screen printing process, astencil80 having an opening is first prepared. Thestencil80 is then arranged on thefiller42 such that thefiller42 is exposed through the opening of thestencil80. Thereafter, a phosphor-distributed resin material is supplied to the opening of thestencil80 such that the resin material is applied to thefiller42. The resin material is then spread using asqueegee81 arranged over thestencil80 such that the resin material forms a film.
Using the above-described screen printing process, it is possible to form the phosphor-distributedresin layer43 on thefiller42 in the form of a film having a uniform thickness.
Meanwhile, theresin layer43 may be formed by separately preparing a phosphor-distributed resin film, and attaching the resin film to an upper surface of thefiller42, as shown inFIG. 13.
The remaining configurations of the second embodiment may be identical to those of the first embodiment, and so, no description thereof will be given.
Third Embodiment Hereinafter, a method for manufacturing a light emitting device package according to a third embodiment of the present invention will be described.
As shown inFIG. 14, a pair ofelectrodes51 are formed at opposite sides of afirst substrate50 such that the upper and lower surfaces of thefirst substrate50 are connected by eachelectrode51.
Asecond substrate52, which includes a mountinghole53, as shown inFIG. 15, is prepared.
It is preferred that a reflective film is formed on the mountinghole53 of thesecond substrate52. The reflective film functions to reflect light emerging from a light emitting device, which will be mounted in a subsequent process, and thus to increase the amount of light emitted through the top of the package.
As shown inFIG. 16, thesecond substrate52 is attached to thefirst substrate50 such that theelectrodes51 are partially exposed through the mountinghole53. The substrate attachment may be achieved using an adhesive54 such as an adhesive resin or an adhesive tape.
Thereafter, alight emitting device60 is bonded to theelectrodes51 exposed through the mountinghole53 of thesecond substrate52, as shown inFIG. 17. Afiller62 is then filled in the mountinghole53.
Subsequently, a phosphor-distributedresin layer63 is formed over thefiller62, as shown inFIG. 18.
For each of the first andsecond substrates50 and52, a silicon substrate or a ceramic substrate may be used. Where a ceramic substrate is used, it is preferred that the substrate is made of a material exhibiting excellent heat conductivity. The substrates may also be made of a material exhibiting excellent thermal insulation, for example, AlN or alumina.
Fourth EmbodimentFIG. 19 illustrates a light emitting device package according to a fourth embodiment of the present invention. In particular,FIG. 19 shows a state in which azener diode73 is mounted together with alight emitting device72, to achieve an improvement in voltage withstand characteristics.
In accordance with this embodiment, thelight emitting device72 andzener diode73 are bonded using wires in a state in which a pair ofleads70 and71 are formed in a package body. Afiller75 is formed over thelight emitting device72 andzener diode73. A phosphor-distributedresin layer76 is also formed over thefiller75.
Where a package is configured by connecting thezener diode73 and light emittingdevice72 in parallel, as described above, over-current generated when a surge voltage is applied to thelight emitting device72, which exhibits inferior voltage withstand characteristics, namely, inferior resistance to static electricity, does not flow toward thelight emitting device72. That is, a zener breakdown occurs in thezener diode73 near a zener voltage due to the over-current, thereby causing the over-current to be bypassed through thezener diode73. Thus, thelight emitting device72 is protected from the over-current.
Fifth Embodiment FIGS.20 to22 illustrate procedures for manufacturing a light emitting device package according to a fifth embodiment of the present invention.
In accordance with the fifth embodiment, throughholes110 are first formed through asubstrate100 using a laser or an etching method, as shown inFIG. 20. Thesubstrate100 may be one of a ceramic substrate or a silicon substrate to be used for a 2D sub-mount or a package for a light emitting device.
Thesubstrate100, which is formed with the throughholes110, as described above, forms a package body.
Thereafter,electrodes200 to be connected tomounts120, on which light emitting devices will be mounted, are formed on the surface of thesubstrate100.
Eachelectrode200 has a structure connected between the front and back surfaces of thesubstrate100 using a metal line. That is, eachelectrode200 includes a front-side electrode210 connected to a light emitting device, and a back-side electrode220 formed at the back surface of thesubstrate100 and connected to the front-side electrode210 via one throughhole110.
The back-side electrode220 may be electrically connected to an external circuit functioning to supply current to a light emitting device. In this case, it is preferred that the throughholes110 be formed in an isolation region of the package.
Uniformly-spacedbarrier ribs300 exhibiting excellent light transmissivity are formed at the front surface of thesubstrate100, on which light emittingdevices400 will be mounted.
Thebarrier ribs300 may be made of a photosensitive polymer. That is, the formation of thebarrier ribs300 can be achieved by coating a photosensitive polymer over the front surface of thesubstrate100, and performing a photolithography process such that the photosensitive polymer remains in a region where thebarrier ribs300 will be formed, while being removed in other regions.
Alternatively, thebarrier ribs300 may be formed by separately fabricating barrier ribs using a material exhibiting excellent light transmissivity, for example, glass, and bonding the fabricated barrier ribs to thesubstrate100.
After the manufacture of the sub-mount or package as described above, thelight emitting devices400 are bonded to the sub-mount or package, as shown inFIG. 21.
Afiller310, such as a phosphor-containing epoxy resin or silicon gel, is then filled in spaces between thebarrier ribs300 and thelight emitting devices400, as shown inFIG. 22.
It is preferred that the height difference between eachbarrier rib300 and the upper surface of each light emittingdevice400 be equal to the distance between thebarrier rib300 and the side surface of thelight emitting device400 facing thebarrier rib300.
Accordingly, there is no optical path length difference between light emitted from the side surface of thelight emitting device400 along a path A inFIG. 22 and light emitted from the upper surface of thelight emitting device400 along a path B inFIG. 22. Thus, a uniform light distribution is obtained.
For each light emittingdevice400, any of a horizontal type light emitting device and a vertical type light emitting device can be used.
Subsequently, lenses (not shown) may be mounted to thesubstrate100 packaged with thelight emitting devices400. Thesubstrate100 is then divided into individual packages.
Sixth Embodiment FIGS.23 to25 illustrate procedures for manufacturing a light emitting device package according to a sixth embodiment of the present invention.
In accordance with the sixth embodiment, throughholes110 are first formed through asilicon substrate100 using a solution enabling anisotropic etching, for example, a KOH or tetramethyl ammonium hydroxide (TMAH) solution, as shown inFIG. 23. Thesubstrate100 may be used for a sub-mount or a package for a light emitting device.
Where the throughholes110 are formed in accordance with an etching process, as described above, they have a structure as shown inFIG. 23. The etching for the formation of the throughholes110 is carried out at both the front and back surfaces of thesubstrate100 such that the etched front and back portions of thesubstrate100 to form each throughhole110 are connected.
Thereafter,electrodes200 to be connected tomounts120, on which light emitting devices will be mounted, are formed on the surface of thesubstrate100.
As in the fifth embodiment described above, eachelectrode200 may include a front-side electrode210 connected to a light emitting device, and a back-side electrode220 formed at the back surface of thesubstrate100 and connected to the front-side electrode210 via one throughhole110.
Subsequently,barrier ribs300 are formed, and light emittingdevices400 are mounted to themounts120, as shown inFIG. 24.
Afiller310 is then filled in spaces defined by thebarrier ribs300 inside thebarrier ribs300, as shown inFIG. 25. Subsequent procedures are identical to those of the fifth embodiment.
Seventh EmbodimentFIG. 26 illustrates a light emitting device package according to a seventh embodiment of the present invention.
In the illustrated light emitting device, alight emitting device400 is bonded to analuminum slug130 having a mirror surface, using an adhesive140. Abarrier rib300 is formed around thelight emitting device400, using a material exhibiting excellent light transmissivity.
Afiller310, such as a phosphor-containing epoxy resin or silicon gel, is filled between thebarrier rib300 and thelight emitting device400.
The electrodes of thelight emitting device400 is electrically connected to leads150 fixed to apackage body101, usingconductive wires160.
Alens170 is formed on or directly attached to an upper surface of thepackage body101, on which thelight emitting device400 is mounted.
It is preferred that the height difference between thebarrier rib300 and the upper surface of thelight emitting device400 be equal to the distance between thebarrier rib300 and the side surface of thelight emitting device400 facing thebarrier rib300.
Eighth EmbodimentFIGS. 27 and 28 illustrate procedures for manufacturing a light emitting device package according to an eighth embodiment of the present invention.
In accordance with this embodiment, throughholes110 are first formed through asubstrate100 using a laser or an etching method, as shown inFIG. 27. Thesubstrate100 may be one of a ceramic substrate or a silicon substrate to be used for a sub-mount or a package for a light emitting device.Mounts120, on which light emitting devices will be mounted, are also formed at thesubstrate100
As shown inFIG. 27, eachmount120 has a recess structure formed as thesubstrate100 is recessed in accordance with an etching process. By virtue of such a structure, eachmount120 can upwardly reflect light emitted from each side surface of the light emitting device.
Thesubstrate100, which is formed with the throughholes110, as described above, forms a package body.
Thereafter,electrodes200 are formed on thesubstrate100 such that eachelectrode200 has a structure connected between the front and back surfaces of thesubstrate100 using a metal line.
In this case, it is preferred that the throughholes110 be formed in an isolation region of the package.
Uniformly-spacedbarrier ribs300 exhibiting excellent light transmissivity are formed at the front surface of thesubstrate100, on which light emittingdevices400 will be mounted.
Thebarrier ribs300 may be made of a photosensitive polymer. That is, the formation of thebarrier ribs300 can be achieved by coating a photosensitive polymer over the front surface of thesubstrate100, and performing a photolithography process such that the photosensitive polymer remains in a region where thebarrier ribs300 will be formed, while being removed in other regions. Alternatively, thebarrier ribs300 may be formed by separately fabricating barrier ribs using a material exhibiting excellent light transmissivity, for example, glass, and bonding the fabricated barrier ribs to thesubstrate100.
After the manufacture of the sub-mount or package as described above, thelight emitting devices400 are mounted to the sub-mount or package in accordance with, for example, a flip chip bonding process.
That is, each light emittingdevice400 may be bonded to the associatedelectrode200 in a state in which thelight emitting device400 has a structure inverted from a horizontal structure. In this case, a zener diode (not shown) may be provided at theelectrode200.
Thereafter, afiller310, such as a phosphor-containing epoxy resin or silicon gel, is filled in spaces between thebarrier ribs300 and thelight emitting devices400, as shown inFIG. 22.
It is preferred that the height difference between eachbarrier rib300 and the upper surface of each light emittingdevice400 be equal to the distance between thebarrier rib300 and the side surface of thelight emitting device400 facing thebarrier rib300.
Accordingly, the lengths of the optical paths of light beams emitted from thelight emitting device400 through phosphors are substantially equal, as in the above-described embodiments.
The light emitted from each side surface of thelight emitting device400 is changed in wavelength while passing through the phosphors. In this case, the emitted light then passes through thebarrier rib300 because the barrier rib330 exhibits excellent light transmissivity. The light emerging from the barrier rib330 is then reflected by aside wall121 of themount120 such that it is upwardly directed.
A separate reflective film (not shown) may be formed on theside wall121 of themount120.
Ninth Embodiment In a procedure for manufacturing a light emitting device package in accordance with a ninth embodiment of the present invention,electrodes520, each of which includes a pair of electrode structures, are formed on asubstrate500, as shown inFIG. 29.
Eachelectrode520 may include an upper electrode (front-side electrode)521, to which a light emitting device will be coupled at desired electrical and structural strengths, and a lower electrode (back-side electrode)522, which will be coupled to a structure for supplying an external voltage, for example, a printed circuit board (PCB) substrate, at desired electrical and structural strengths.
Theupper electrode521 andlower electrode522 of eachelectrode520 may be connected by a connectingelectrode523 formed in a throughhole510. The throughhole510 may be formed through thesubstrate500 in accordance with a bulk etching process.
For the formation of theelectrodes520 on thesubstrate500, a mask layer (not shown) is first formed on thesubstrate500. Alternatively, a mask pattern required for bulk-etching of regions, where throughholes510 will be formed, is formed on thesubstrate500 in a state in which a mask layer has been formed on thesubstrate500.
Using the mask pattern, thesubstrate500 is bulk-etched (bulk-micromachined), to form the throughholes510.
Thesubstrate500 may include a silicon substrate, or substrates made of other materials, namely, aluminum, aluminum nitride (AlN), aluminum oxide (AlOx), photo sensitive glass (PSG), Al2O3, BeO, or PCB.
For the bulk-etching process, which is adapted to form the throughholes510, a wet etching process, a dry etching process, or a laser drilling process may be used.
A representative of the dry etching process may be a dip reactive ion etching process.
In the etching process for the formation of the throughholes510, a mask layer (not shown) is needed to define a region to be etched and a region to be prevented from being etched. The mask layer should be made of a material capable of exhibiting a mask function for a prolonged period of time in a dry or wet etching process. For the mask layer, a silicon nitride film or a silicon oxide film may be used.
Meanwhile, in order to divide theupper electrodes521 into positive and negative electrodes and to divide thelower electrodes522 into positive and negative electrodes, it is preferred that the throughholes510, each of which electrically connects the upper andlower electrodes521 and522 of the associatedelectrode520, be divided into two groups of through holes, namely, through holes for positive electrodes and through holes for negative electrodes.
Thereafter, an insulation layer for electrical insulation (not shown) is formed on the overall surface of thesubstrate500. For the formation of the insulation layer, the mask layer (not shown) used to form the throughholes510 is removed in this embodiment. A silicon oxide film exhibiting excellent insulation characteristics is then formed on the overall surface of thesubstrate500 in accordance with a thermal oxidation method.
A silicon nitride film may be deposited for the insulation layer (not shown), using an insulation layer formation method other than the above-described method, for example, a low pressure chemical vapor deposition (LPCVD) method or a plasma enhanced chemical vapor deposition (PECVD) method.
The insulation layer may be dispensed with in the case in which thesubstrate500 is made of an insulation material such as an aluminum nitride (AlN) or an aluminum oxide (AlOx).
Thereafter, the formation of theelectrodes520 on the structure formed with the throughholes510 is carried out in accordance with a patterning process.
For the formation of theelectrodes520, which are laterally separated from one another, a photoresist is first coated over the front or back surface of thesubstrate500. Light exposure and development are then carried out.
A metal for the formation of theelectrodes520 is then deposited on the front or back surface of thesubstrate500 in accordance with a sputtering method or an E-beam evaporation method. Before the deposition of the metal, a seed metal may be deposited.
The deposited metal is then lifted off, to form theelectrodes520 on the front or back surface of thesubstrate500.
Thereafter, a seed metal (not shown) is deposited over the surface of thesubstrate500 opposite to the metal-deposited surface. Theelectrodes520 are then formed on the seed metal. Subsequently, photoresist coating, light exposure, and development are sequentially carried out, to separate theelectrodes520 into positive and negative electrodes.
A patterning process is then carried out to form connectingelectrodes523 in the throughholes510 in accordance with an electroplating method or an electroless-plating method, and thus to connect the front-side electrodes521 and the back-side electrodes522 via the connectingelectrodes523.
Meanwhile, the seed metal may be etched to separate adjacent ones of theelectrodes521 and522 to be laterally separated from each other, and thus to make the adjacent electrodes form electrode pairs. The seed metal should exhibit excellent electrical characteristics, and a high adhesion force to the insulation layer. For an adhesion layer of the seed metal, generally, titanium (Ti), chromium (Cr), or tantalum (Ta) exhibiting a high adhesion force to a silicon oxide film, which is mainly used as an insulation layer, may be used.
Gold (Au), copper (Cu), or aluminum (Al) may be used which is a representative electrode metal exhibiting excellent electrical characteristics while being easily depositable in a semiconductor process.
The electrode metal is exposed to a high temperature condition in a subsequent procedure, in particular, a process for coupling module elements. For this reason, Ti or Cr, which is the material of the adhesion layer, may be diffused into Au, thereby degrading the electrical characteristics of Au. To this end, a diffusion barrier layer made of, for example, platinum (Pt) or nickel (Ni), may be interposed between the adhesion layer of Ti or Cr and the Au layer. Thus, theelectrodes520 may have a structure of Ti/Pt/Au, Cr/Ni/Au, or Cr/Cu/Ni/Au.
After the formation of theelectrodes520, areflective layer530 may be formed on the upper surface of thesubstrate500, in order to achieve an enhancement in the extraction efficiency of light emitted from the light emitting device, which will be subsequently mounted.
Thereflective layer530 may be made of a material exhibiting an excellent reflectivity, for example, aluminum (Al) or silver (Ag).
The formation of thereflective layer530 may be achieved by coating a photoresist over the upper surface of thesubstrate500, patterning the coated photoresist in accordance with light exposure and development such that the bottom surface thesubstrate500, on which the light emitting device will be mounted, is exposed, depositing a reflective material in accordance with a sputtering method or an E-beam evaporation method, and lifting off the patterned photoresist.
Alternatively, thereflective layer530 may be formed by depositing a reflective material over the upper surface of thesubstrate500, and then etching unnecessary portions of the deposited reflective material.
Thereflection layer530 should be formed to prevent it from being connected to or overlapped with both the electrodes of each electrode pair, in order to prevent electrical short circuit. In order to enable thereflective layer530 to adhere to theelectrodes520 of the light emitting devices, it is also preferred that thereflective layer530 should not be present on theelectrodes520 in regions where solders or Au stud pumps611 (FIG. 31) will be formed.
Hereinafter, subsequent procedures will be described in conjunction with the case in which thereflective film530 is not formed.
Next, a plurality of light emittingdevices610 are bonded to respective pairs of theelectrodes520, in accordance with a bonding method using conductive solders orAu studs611, as shown inFIG. 31A.
FIG. 31A illustrates the case in which thelight emitting devices610 are flip-chip-bonded. If necessary, horizontal or vertical type light emitting devices may be wire-bonded.
Thereafter, aphosphor layer620 are uniformly formed over thesubstrate500, to which thelight emitting devices610 have been bonded, such that thephosphor layer620 covers all the light emittingdevices610.
Thephosphor layer520 may be made of a material consisting of a transparent medium and phosphor powder contained in the transparent medium. For the transparent medium, a resin material, such as an epoxy resin or a silicon gel, may be used.
The phosphor powder may be a phosphor material which absorbs light emitted from thelight emitting devices610, and emits light having energy lower than that of the light emitted from thelight emitting devices610. For example, the phosphor powder may be a yellow phosphor material emitting yellow light. Eachlight emitting device610 may be a blue light emitting device. In this case, white light can be emitted in accordance with a mixture of the light emitted from the blue light emitting device and the light emitted from the yellow phosphor material.
Thephosphor layer620 is evenly filled such that it has a constant thickness W1 over the upper surface of each light emittingdevice610. Also, the spacing W4 between the adjacentlight emitting devices610 is also adjusted such that thephosphor layer620 is formed to have a uniform thickness on all the light emitting surfaces of each light emittingdevice610, namely, the upper and side surfaces of each light emitting device610 (W1=W2=W3).
The spacing W4 between the adjacentlight emitting devices610 may be determined, taking into consideration the width D1 of a portion of thesubstrate500 orphosphor layer620 to be removed betweenadjacent packages600 when the package structure including thesubstrate500 andphosphor layer620 is diced intoindividual packages600.
The spacing W4 between the adjacentlight emitting devices610 may correspond to a length obtained by adding the width D1, to be removed in the dicing process, to two times the thickness of thephosphor layer620 present on the upper surface of each light emitting device610 (W4=2×W1+D1).
Accordingly, the spacing W4 between the adjacentlight emitting devices610 may correspond to a length obtained by adding the width D1, to be removed in the dicing process, to two times the distance W1, W2, or W3 between the outer surface of thelight emitting device610 and the outer surface of thephosphor layer620 in each diced package600 (W4=2×W1+D1=2×W2+D1=2×W3+D1, or W4=W2+W3+D1).
If the width D1, to be removed between theadjacent packages600 in the dicing process, is negligible, the spacing W4 between the adjacentlight emitting devices610 may substantially correspond to two times the distance W1, W2, or W3 between the outer surface of thelight emitting device610 and the outer surface of thephosphor layer620 in each diced package600 (W4=2×W1=2×W2=2×W3, or W4=W2+W3).
In this case, accordingly, the spacing W4 between the adjacentlight emitting devices610 may substantially correspond to two times the thickness W1 of thephosphor layer620 over the upper surface of each light emitting device610 (W4=2×W1).
Meanwhile, thephosphor layer620 may be made of a mixture of a silicon gel or an epoxy resin having excellent light transmissivity and phosphor powder.
The solders for bonding of thelight emitting devices610 may be formed, using gold-tin (AuSn), lead-tin (PbSn), or indium (In), in accordance with an E-beam evaporation method.
Meanwhile, the package structure may be diced such that a plurality of light emittingdevices610 constitute one package, as shown inFIG. 31B. For example, the package structure may be diced such that four light emittingdevices610 constitute one package, as shown inFIG. 31B. Of course, each package may include two, six, or other numbers of light emittingdevices610.
In such cases, the spacing between the adjacentlight emitting devices610 may be different from that ofFIG. 31A. In such cases, the spacing W5 betweenadjacent package600 satisfies the above-described conditions.
For example, where four light emittingdevices610 constitute onepackage600, the spacing W5 between theadjacent packages600 may correspond to two times the distance W2 or W3 between the outer surface of each light emittingdevice610 and the outer surface of thephosphor layer620 in each dicedpackage600.
In this case, the spacing W5 between theadjacent packages600 may correspond to two times the thickness W1 of thephosphor layer620 over the upper surface of each light emittingdevice610.
On the other hand, when the spacing W5 between theadjacent packages600 is determined, taking into consideration the width (not shown) to be removed between theadjacent package600 in the dicing process, the spacing W5 may correspond to a length obtained by adding the width, to be removed between theadjacent package600 in the dicing process, to two times the distance W2 or W3 between the outer surface of each light emittingdevice610 and the outer surface of thephosphor layer620 in each dicedpackage600.
In this case, the spacing W5 between theadjacent packages600 may correspond to a length obtained by adding the width, to be removed in the dicing process, to two times the thickness of thephosphor layer620 present on the upper surface of each light emittingdevice610.
Thereafter, as shown inFIG. 32, the light emitting device package structure in a wafer size is diced intoindividual packages600 such that the phosphor layer is present on the upper and side surfaces of thelight emitting device610 in eachpackage600 while having a uniform thickness (W1=W2=W3).
Theindividual packages600, which are obtained in accordance with the dicing process, may be bonded to aPCB substrate630 at desired electrical and structural strengths, so as to be used for various purposes, for example, backlight units or illumination lamps.
If necessary, eachpackage600 may include alens640 having a shape designed to control the distribution of light emitted from thelight emitting device610 or to achieve an enhancement in light efficiency, as shown inFIG. 33.
Tenth Embodiment In a package according to a tenth embodiment of the present invention, as shown inFIG. 34, alight emitting device800 is mounted to apackage body700 formed with amount710.
Thepackage body700 includes an upper frame made of a plastic material and coupled to alead720, and alower frame740 arranged beneath themount710 and coupled to theupper frame730.
Thelower frame740 is made of a conductive material such as aluminum, in order to function as a heat sink.
In this structure, thelight emitting device800 is electrically connected to thelead720 via awire810. Afiller820 is filled in themount710, on which thelight emitting device800 is mounted. Thefiller820 may contain phosphors.
For example, phosphors may be mixed with an epoxy resin or silicon gel, and the resulting mixture is filled in themount710, as thefiller820.
For an example of a combination of thelight emitting device800 and phosphors, a blue light emitting device, which emits blue light, may be used for thelight emitting device800, and phosphors, which partially absorbs the blue light, thereby emitting yellow light, may be used. In this case, it is possible to realize a white light emitting device package capable of emitting white light in accordance with a mixture of blue light and yellow light. For the bluelight emitting device800, a gallium nitride (GaN)-based light emitting device may be used. In addition, light emitting devices and phosphors emitting light of various colors may be used.
Alens830 may be arranged over themount710 filled with thefiller820.
FIG. 35 is an enlarged view showing themount710, on which thelight emitting device800 is mounted.
As shown inFIGS. 36 and 37, themount710, on which thelight emitting device800 is mounted, is formed such that the height X from the upper surface of thelight emitting device800 is equal to a horizontal distance X between each outer side surface of thelight emitting device800 and the inner side surface of themount710 facing the outer side surface of thelight emitting device800 at the bottom of themount710.
That is, the depth of themount710 is determined such that the height of themount710 from the upper surface of thelight emitting device810 is equal to “X”, and the width of themount710 is determined such that the horizontal distance between each outer side surface of thelight emitting device800 and the inner side surface of themount710 facing the outer side surface of thelight emitting device800 at the bottom of themount710 is equal to “X”.
Where thelight emitting device800 has a square shape having four side surfaces, themount710 may be formed such that the width of themount710 is determined such that the horizontal distance between each of the four side surface of thelight emitting device800 and the side surface of themount710 facing the side surface of thelight emitting device800 at the bottom of themount710 is equal to “X”.
Taking into consideration the fact that thelight emitting device800 typically has a height of about 100 μm, a length of about 1 mm, and a width of about 1 mm, it is preferred that the depth of themount710 be 0.2 to 0.6 mm. It is also preferred that the length and width of themount710 be 1.2 to 2 mm.
That is, the depth of themount710 may be 2 to 6 times the height of thelight emitting device800. Also, the length or width of themount710 may be 1.2 to 2 times the length or width of thelight emitting device800.
The height of themount710 from the upper surface of thelight emitting device800 may be 1 to 5 times the height of thelight emitting device800. The horizontal distance between themount710 and thelight emitting device800 may be 0.1 to 0.5 times the length or width of thelight emitting device800.
The inner side surfaces of themount710 may be included to have a certain inclination θ. It is preferred that the inclination of the side surfaces of themount710 be 0 to 30° from a virtual vertical line.
FIG. 38 depicts flux data of a general light emitting device package and flux data of the light emitting device package according to the tenth embodiment of the present invention. Referring toFIG. 38, it can be seen that an increase in flux by 10% is achieved.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.