US20060239803A1 - Pod cover removing-installing apparatus - Google Patents
Pod cover removing-installing apparatusDownload PDFInfo
- Publication number
- US20060239803A1 US20060239803A1US11/472,428US47242806AUS2006239803A1US 20060239803 A1US20060239803 A1US 20060239803A1US 47242806 AUS47242806 AUS 47242806AUS 2006239803 A1US2006239803 A1US 2006239803A1
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- Prior art keywords
- pod
- cover
- key
- head
- installing apparatus
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B65/00—Locks or fastenings for special use
- E05B65/006—Locks or fastenings for special use for covers or panels
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
Definitions
- the present inventionrelates to a pod cover removing-installing apparatus for a pod which contains and transfers thin substrates such as semiconductor wafers from one space to another space while maintaining the cleanliness of both spaces.
- FIG. 19shows an example of a conventional pod cover removing-installing apparatus.
- This conventional pod cover removing-installing apparatus 100is provided with a diaphragm 101 which partitions off a high clean space A and a low clean space B, an opening 102 formed in the diaphragm 101 that serves as a passage between the high clean space A and the low clean space B, a door 103 which opens and closes the opening 102 of the diaphragm 101 , a latch mechanism 104 that latches the cover 203 of the pod 200 , with two positioning pins 104 a , 104 b and two T-shaped keys 104 c , 104 d provided in the door 103 , and a table 105 provided in the low clean space B for mounting the pod 200 , which has three positioning pins 105 a , 105 b , 105 c and one lock key 105 d.
- the pod 200is a container with an extremely clean internal space C for containing a plurality of semiconductor wafers (25 wafers, for example).
- This pod 200is provided with a main container body 201 , an opening 202 provided on one side of the main container body 201 , a cover 203 for opening and closing the opening 202 , the cover 203 having pin holes 204 a , 204 b for engaging the positioning pins 104 a , 104 b , and key holes 204 c , 204 d for engaging T-shaped keys 104 c , 104 d , and a bottom 205 having grooves 205 a , 205 b , 205 c possessing a V-shaped section for engaging the positioning pins 105 a , 105 b , 105 c , and a key hole 205 d for engaging the lock key 105 d.
- the three positioning pins 105 a , 105 b , 105 cengage the V-shaped section-possessing grooves 205 a , 205 b , 205 c .
- switching on a lock buttoncauses the lock key 105 d to move upward, become angled, and engage the key hole 205 d .
- the table 105moves toward the diaphragm 101 for a prescribed distance (about 30 mm, for example), thereby causing the pod 200 to become attached to the diaphragm 101 .
- a sealing materialsuch as an O-ring, not shown in the figure, is provided along the circumference of the opening 102 of the diaphragm 101 and the opening 202 of the pod 200 , to ensure close attachment of the openings and maintain cleanliness.
- the movement of the table 105causes the cover 203 of the pod 200 to become closely attached to the door 103 , whereby the positioning pins 104 a , 104 b engage the pin holes 204 a , 204 b of the cover 203 and the T-shaped keys 104 c , 104 d engage the key holes 204 c , 204 d . Thereafter, the T-shaped keys 104 c , 104 d are rotated 90° by a rotary actuator or the like, not shown in the figure, whereby nails 204 e to 204 h are pulled in to release the lock between the container main body 201 and the cover 203 .
- the door 103is pulled into the space A (arrow D 1 ) and caused to descend (arrow D 2 ) by a drive mechanism, not shown in the figure, whereby the internal space C of the pod 200 and the internal space A of the partition board 101 are brought into communication while maintaining cleanliness.
- the covercannot smoothly open or close, and is suspended in the state in which the rectangular engaging grooves run out of alignment in the rotational direction.
- the automation linestops and it takes a long period of time for restoring the line.
- the cover of the recovered podis manually opened in a less clean chamber, expensive wafers stored in the pod may become unusable.
- An object of the present inventionis to provide a pod cover removing-installing apparatus usable with various pods manufactured by different manufacturers according to the SEMI standard and capable of releasing lock of the cover when rectangular engaging grooves run out of alignment during previous steps or during a carrying operation from a previous step.
- a first inventionprovides a pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door of an opening of a highly clean room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings, the cover being provided with a lock mechanism for locking and unlocking the opening of the pod by rotation of a rectangular key groove provided inside the rectangular key hole, wherein the door is provided with a locking member having a T-shaped key, the head of which engages the rectangular key groove via the rectangular key hole of the cover, and driving to lock or unlock the lock mechanism by the rotation of the T-shaped key, and the T-shaped key is provided in the head section thereof with an engagement allowance section for allowing the engagement of the head with the rectangular key groove according to deviation of the rotation angle of the rectangular key groove of the rock mechanism.
- a second inventionprovides the pod cover removing-installing apparatus of the first invention, wherein the engagement allowance section consists of inclined sides extending along the both longitudinal sides of the head and tapering from the center toward the end.
- a third inventionprovides the pod cover removing-installing apparatus of the second invention, wherein the engagement allowance section consists of chamfers formed on the top of the inclined sides.
- a fourth inventionprovides the pod cover removing-installing apparatus of the first invention, provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated for a prescribed angle.
- a fifth inventionprovides the pod cover removing-installing apparatus of the first invention, provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated for the number of times, each time for a prescribed angle, until the head of the T-shaped key engages the rectangular key groove.
- a sixth inventionprovides the pod cover removing-installing apparatus of the first invention, wherein the T-shaped key is provided with a rotation allowable section on the head to allow rotation of the head according to deformation of the periphery of the rectangular key hole of the cover.
- a seventh inventionprovides the pod cover removing-installing apparatus of the sixth invention, wherein the rotation allowance section consists of chamfers formed on the jaw side of the inclined sides.
- FIG. 1is a perspective view showing an outline of a first embodiment of the cover removing-installing apparatus for a pod of the present invention.
- FIG. 2is a front view of the first embodiment of the cover removing-installing apparatus for a pod of the present invention.
- FIG. 3is an enlarged view of the part III of FIG. 2 and shows the fine adjustment mechanism for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 4is an enlarged view of the part IV of FIG. 2 and shows the centering mechanism for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 5is a cross sectional view along the line V-V of FIG. 2 and shows the holding mechanism of the pod cover removing-installing apparatus of the first embodiment.
- FIG. 6 ( a )is a perspective view and FIG. 6 ( b ) is a cross sectional view along the line VI-VI of FIG. 2 , showing an eccentric transmission mechanism for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 7is a cross sectional view along the line VII-VII of FIG. 2 and shows the positioning securing means of the pod cover removing-installing apparatus of the first embodiment.
- FIG. 8is a block diagram showing a control means for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 9is a flowchart showing an operational example (cover opening operation 1 ) for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 10is a flowchart showing an operational example (cover opening operation 2 ) for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 11is a flowchart showing an operational example (cover closing operation 1 ) for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 12is a flowchart showing an operational example (cover opening operation 2 ) for the pod cover removing-installing apparatus of the first embodiment.
- FIG. 13shows a T-shaped key unit for the pod cover removing-installing member of the first embodiment, wherein FIG. 13 ( a ) is a plan view, FIG. 13 ( b ) is a side view, and FIG. 13 ( c ) is a front view.
- FIG. 14shows a T-shaped key unit extracted from FIG. 13 , wherein FIG. 14 ( a ) is a front view, FIG. 14 ( b ) is a side view, FIG. 14 ( c ) is a plan view, and FIG. 14 ( d ) is an enlarged view of the D section of FIG. 14 ( a ).
- FIG. 15is a drawing for describing the shape and engagement movement of The T-shaped key 104 c.
- FIG. 16is a drawing for describing the shape and engagement movement of The T-shaped key 14 c - 1 .
- FIG. 17is a drawing for describing the shape and engagement movement of The T-shaped key 14 c.
- FIG. 18is a flow chart showing subroutine for the unlock operation of a motor 71 for locking the cover of S 105 in FIG. 9 .
- FIG. 19shows an example of a conventional pod cover removing-installing apparatus.
- FIGS. 1 and 2are drawings showing a first embodiment of the pod cover removing-installing apparatus of the present invention, wherein FIG. 1 is a perspective view showing an outline and FIG. 2 is a plan view of the apparatus.
- This pod cover removing-installing apparatusis provided with a diaphragm 11 , an opening 12 , a door 13 which opens and closes the opening 12 of the diaphragm 11 , two positioning pins 14 a , 14 b and two T-shaped keys 14 c , 14 d , a latch mechanism 14 which opens and closes a cover 203 of a pod 200 , and the like.
- the door 13is provided with a base plate 13 A and a position adjusting plate 13 B movable in the direction vertical to the plane so that its position can be adjusted with respect to the base plate 13 .
- the door 13is provided therein with four fine adjustment mechanisms 20 , two centering mechanisms 30 , four holding mechanisms 40 , two eccentric transmission mechanisms 50 , one positioning fixing means 60 , and the like.
- FIG. 3 ( a ) and FIG. 3 ( b )are enlarged views of the part III of FIG. 2 and show the fine adjustment mechanism for the pod cover removing-installing apparatus of the first embodiment.
- the fine adjustment mechanism 20supports the position adjusting plate 13 B movable in the direction vertical to the plane and exactly adjusts the position of the positioning pins 14 a and 14 b .
- This fine adjustment mechanism 20is provided in the four corners of the position adjusting plate 13 B (see FIG.
- the fine adjustment mechanism 20is designed so that in the initial state in which the positioning pins 14 a , 14 b engage the pin holes 204 a , 204 b of the pod 200 (see FIG. 19 ), tapered tips of the positioning pins 14 a , 14 b move a prescribed distance (e.g. 3 mm in every direction) vertically to the plane, while the tapered tips match the tapered pin holes 204 a , 204 b . For this reason, even if there is some error in the position of the pin holes 204 a , 204 b of the pod 200 , the positioning pins 14 a , 14 b can easily engage these pin holes without colliding.
- a prescribed distancee.g. 3 mm in every direction
- FIG. 4 ( a ) and FIG. 4 ( b )are enlarged views of the part IV of FIG. 2 and show the centering mechanism for the pod cover removing-installing apparatus of the first embodiment.
- the centering mechanism 30is a mechanism for causing the position adjusting plate 13 B to return to the center.
- the centering mechanism 30consisting of two systems, one in the horizontal direction (x direction) and the other in the vertical direction (y direction), is provided with press boards 31 x , 31 y , securing members 32 x, 32 y for securing the press boards 31 x , 31 y in the base plate 13 A, coil springs 33 x, 33 y for moving the press boards 31 x , 31 y to the center, securing members 34 x , 34 y for securing the other ends of the coil springs 33 x , 33 y to the base plate 13 A, guide pieces 35 , 37 which come into contact with the press boards 31 x , 31 y , securing members 36 , 38 for securing the guide pieces 35 , 37 in the position adjusting plate 13 B and base plate 13 A, and the like.
- the press board 31 xaligns the guide pieces 35 , 37 on a straight line in the X direction. In the same manner, the press board 31 y aligns the guide pieces 35 , 37 on a straight line in the Y direction.
- the position adjusting plate 13 Bis centered by these actions.
- FIG. 2Although omitted from FIG. 2 , a mechanism which is the same but symmetrical with the mechanism shown in the upper right side is provided in the upper left side of the FIG. 2 .
- the centering mechanism 30always causes the position adjusting plate 13 B to be positioned in the previously determined center position (the engaging position without an error) in the initial state in which the positioning pins 14 a , 14 b engage the pin holes 204 a , 204 b of the pod 200 (see FIG. 19 ).
- FIG. 5is a cross sectional view along the line V-V of FIG. 2 and shows the holding mechanism of the pod cover removing-installing apparatus of the first embodiment.
- the holding mechanism 40holds the position adjusting plate 13 B to the cover 203 of the pod 200 at the position where the positioning pins 14 a , 14 b engage.
- the holding mechanism 40has a securing plate 41 provided in a base plate frame 13 A- 1 , a joint 43 connected with this securing plate 41 through the O-ring 42 , having a nozzle (not shown in the figure) connected to a vacuum pressure source, and an absorption pad 44 provided in the joint 43 which is capable of being attached to the position adjusting plate 13 B.
- the holding mechanism 40can hold the positioning pins 14 a , 14 b to engage the pin holes 204 a , 204 b of the pod 200 (see FIG. 19 ).
- This structureensures that the container maintains the same position as the position before removal when the cover 203 has been once removed and returned thereafter. Therefore, the cover can be closed without impediment.
- FIG. 6 ( a )is a perspective view and FIG. 6 ( b ) is a cross sectional view along the line VI-VI of FIG. 2 , showing an eccentric transmission mechanism for the pod cover removing-installing apparatus of the first embodiment.
- the T-shaped key 14 c ( 14 d )is provided in a prescribed position of the position adjusting plate 13 B to engage the key hole 204 c ( 204 d ) of the cover 203 to lock the cover 203 , and driven by a lock drive mechanism 70 (see FIG. 2 ).
- This lock drive mechanism 70is provided on the side of the base plate 13 A and rotates in either direction around the axis of the T-shaped key 14 c ( 14 d ) to perform locking or unlocking movements.
- the lock drive mechanism 70 and the likeare preferably installed on the base plate 13 A. For this reason, an eccentric transmission mechanism 50 is provided to transmit a driving force from the lock drive mechanism 70 to the T-shaped key 14 c ( 14 d ).
- This eccentric transmission mechanism 50allows a deflection of the base plate 13 A and position adjusting plate 13 B in the direction vertical to the plane and transmits a rotational force of the lock drive mechanism 70 to the T-shaped key (locking member) 14 c ( 14 d ).
- the eccentric transmission mechanism 50has a driving lever 51 connected to the lock drive mechanism 70 , a rotation lever 52 rotatively connected to the driving lever 51 , a bearing 54 supporting the rotation lever 52 on the base plate 13 A in a freely rotative manner, transmission rollers 53 A, 53 B provided on the rotation lever 52 , a slide disc 55 having grooves 55 a , 55 b orthogonally provided on both sides, into which the transmission rollers 53 A, 53 B and transmission rollers 56 A, 56 B are respectively inserted, a rotation board 57 provided on the same axis with the T-shaped key 14 c ( 14 d ), a bearing 58 having the transmission rollers 56 A, 56 B provided therein and supporting the axis of the rotation board 57 and the T-shaped key 14 c ( 14 d ) on the position adjusting plate 13 B in a freely rotative manner, and the like.
- the eccentric transmission mechanism 50transmits a rotational force of the lock drive mechanism 70 to the T-shaped key 14 c ( 14 d ), even if the position adjusting plate 13 B deviates from its original position within a movable range in the direction vertical to the plane.
- the lock drive mechanism 70is provided with a motor 71 , a drive screw 73 to which the rotation of the motor 71 is transmitted by a belt 72 , a slide axis 74 arranged in parallel with the drive screw 73 , a moving block 75 freely slidably supported in the slide axis 74 and driven by a drive screw 73 , a bearing 76 secured on a moving block 75 and engaging a long hole in the driving lever 51 , and the like.
- the rotation lever 52When the bearing 76 is in the position (a), the rotation lever 52 is in the position (a). When the bearing 76 moves to the right and comes to the position (b), the rotation lever 52 rotates. This causes the driving lever 51 to move that distance and to descend to the point indicated by a chain line connected by two dots. Because the bearing 76 is secured on the moving block 75 , the horizontal level of the position (b) remains the same as that of the position (a). Because of this, a deviation of the engaging position of the driving lever 51 and the bearing 76 is absorbed by the long hole of the driving lever 51 .
- T-shaped key 14 c ( 14 d ) featuring the present inventionwill now be described in detail.
- FIG. 13shows a T-shaped key unit of the cover removing-installing apparatus of the first embodiment and FIG. 14 shows the T-shaped key extracted from FIG. 13 . Since the T-shaped keys 14 c and 14 d have the same shape, only the T-shaped key 14 c will be described.
- the T-shaped key unitcomprises the T-shaped key 14 c , transmission rollers 56 A, 56 B, a rotation board 57 provided coaxially with the T-shaped key 14 c , a bearing 58 rotatably supporting the axis of the rotation board 57 and T-shaped key 14 c on the positioning plate 13 B, and the like.
- the T-shaped key 14 cconsists of a head 141 and a neck 142 functioning as a rotation axis for the head 141 .
- the head 141has four inclined sides 143 along the both longitudinal sides tapering from the center toward the end. An angle of inclination ( ⁇ ) of about 8-10° has been confirmed to be sufficient for the inclined sides 143 by experiments of the present inventor.
- the T-shaped key 14 chas a chamfer 144 on the topside of each inclined side 143 .
- An angle of the chamfer ( ⁇ ) of about 10-12°has been confirmed to be sufficient for the chamfers 144 by experiments of the present inventor.
- FIGS. 15-17are drawings for describing the shape and engagement movement of the T-shaped key 14 c.
- 204 cindicates a rectangular key hole
- 104 cis a conventional T-shaped key
- 204 iis a rectangular key groove.
- the T-shaped key 14 c - 1does not have the chamfers 144 for the T-shaped key 14 c described in FIG. 14 .
- ⁇is the deviation allowance angle due to the inclined sides 143
- the T-shaped key 14 chas the chamfers 144 described in FIG. 14 .
- ⁇is the deviation allowance angle due to the angle of the chamfers 144
- the angle of the chamfers 144 ( ⁇ )is about 30°
- ⁇is about 10°
- ⁇ 3is 30°.
- FIG. 7is a cross sectional view along the line VII-VII of FIG. 2 , and shows the position securing means of the pod cover removing-installing apparatus of the first embodiment.
- the position securing means 60 of this embodimenthas a passage 61 provided in the axial direction of the positioning pin 14 a ( 14 b ), a passage 62 provided in the vertical direction of the passage 61 and joining therewith, a stretch member 63 formed from rubber such as neoprene provided around the circumference of the positioning pin 14 a ( 14 b ) and capable of stretching according to an increase or decrease in the internal pressure, a pipe 64 connected with the passage 61 , a securing member 65 for securing the pipe 64 at the rear end of the positioning pin 14 a ( 14 b ), and the like.
- pipe 64is connected to a pneumatic circuit or a vacuum circuit, not shown in the figure, which causes the internal pressure of the passages 61 , 62 to increase or decrease, thereby causing the stretch member 63 to expand or contract, causing the gap between the positioning pins 14 a , 14 b and the pin holes 204 a , 204 b to be filled out.
- the positioning pins 14 a , 14 bare secured in the position in this manner.
- FIG. 8is a block diagram showing a control means for the pod cover removing-installing apparatus of the first embodiment
- FIGS. 9-12are flow charts showing operations of the cover removing-installing apparatus.
- the control means 80has various sensors 81 for detecting the positions and the like of each moving part, a controller 82 which produces various control signals to control each drive part, described later, based on the position detection signals from the sensors 81 , a driver 83 for converting control signals from the controller 82 into drive signals conforming to each drive part, and a drive part driven based on the drive signals from the driver 83 , including a position-keeping valve 84 which controls the flow of the air pressure to the holding mechanism 40 , a cover securing valve 85 which controls the flow of the air pressure to a cover securing means 60 , a cover locking motor 71 of a lock drive means 70 , a container moving motor 86 , a door moving motor 87 , and the like.
- the controller 82drives the position-keeping valve 84 to the release side (Step 101 , the step is hereinafter referred to as “S”) and, upon confirmation of release with a sensor (S 102 , YES), drives the container moving motor 86 to move the pod 200 forward (S 103 ), then, upon confirmation that the pod 200 has come to the joining position (S 104 , YES), stops the container moving motor 86 .
- the position adjusting plate 13 Bis not only free, but also has been moved to the center by the centering mechanism 30 .
- the position adjusting plate 13 Bcan be moved by the fine adjustment mechanism 20 , enabling the complete joining of the cover 203 of the pod 200 and the door 13 even though the pin holes 204 a and 204 b of the pod 200 deviate in the allowable range with respect to the positioning pins 14 a , 14 b.
- the cover locking motor 71is driven to the unlock side (S 105 ) and the T-shaped keys 14 c and 14 d are rotated to retract the nails 204 e - 204 h of the cover 203 .
- the cover securing valve 85is driven to the securing side (S 107 ) to expand the stretch member 63 of the positioning pins 14 a , 14 b , confirming the securing of the pin holes 204 a , 204 b with the sensor (S 108 , YES).
- the T-shaped keys 14 c , 14 dcan rotate due to the eccentric transmission mechanism 50 .
- pin holes 204 a , 204 bare secured by expanding the stretch member 63 of the positioning pins 14 a , 14 b.
- the position-keeping valve 84is driven to the hold side (S 109 ), confirming the holding with the sensor (S 110 , YES), and causing the door to reverse by driving the door moving motor 87 (S 111 ).
- the door moving motor 87is further driven to move the door downward (S 113 ).
- the operation to terminate the processis stopped.
- the position-keeping valve 84is driven to the hold side and holds the position of the position adjusting plate 13 B in its original position in the later-described door closing operation. Therefore, the door does not collide with the opening 202 of the pod 200 when closed.
- the controller 82drives the door moving motor 87 to elevate (S 201 ) to the upper limit point (S 202 , YES), then to go forward (S 203 ) until the door 13 starts rejoining the pod 200 .
- the position-keeping valve 84is driven to the release side (S 205 ).
- the door moving motor 87is driven forward (S 207 ) until rejoining is complete, whereupon the door moving motor 87 is stopped and the rejoining with the pod 200 is confirmed by a sensor (S 208 ).
- the cover securing valve 85is driven to the release side (S 209 ) to cause the stretch member 63 of the positioning pins 14 a , 14 b to become contracted.
- the release from the pin holes 204 a , 204 bis confirmed by a sensor (S 210 , YES).
- the cover locking motor 71is driven to the lock side (S 211 ) to rotate the T-shaped keys 14 c , 14 d and cause the nails 204 e to 204 h to protrude and lock the cover, which is confirmed by a sensor (S 212 , YES).
- the container moving motor 86is driven to move the pod 200 backward (S 213 ). Upon confirmation by a sensor that the pod 200 has reversed (S 214 , YES), the container moving motor 86 is stopped to terminate the cover closing operation.
- FIG. 18is a flow chart showing subroutine for the unlock operation of a motor 71 for locking the cover of S 105 in FIG. 9 .
- a pod moving motor 86is withdrawn (S 1052 ) and T-shaped keys 14 c and 14 d are rotated a small angle (in this case about 3o) by a cover locking motor 71 (S 1053 ).
- the pod moving motor 86is then driven forward (S 1054 ) again to judge whether the heads 141 of the T-shaped keys 14 c , 14 d have engaged the rectangular key groove 204 i (S 1055 ). If the response in S 1055 is YES, the operation proceeds to S 1058 ; if NO, the operation proceeds to S 1056 .
- a prescribed number of operations(four times here) is counted. Whether or not the number has been counted up to four is judged (S 1056 ). If the response is NO, the operations of S 1052 -S 1055 are repeated; if YES, the operation proceeds to S 1057 , wherein an alarm is given, and then the operation returns to the flow of FIG. 9 .
- the T-shaped key 14 csince the T-shaped key 14 c is provided with the inclined sides 143 and chamfers 144 and, in addition, is rotated a small angle during an engaging operation, the T-shaped key 14 c can engage the rectangular key groove 204 i via the key hole 204 c , even if the rectangular key groove 204 i is out of alignment with respect to the key hole 204 c.
- the T-shaped keys 14 c and 14 dmay be rotated a small angle by a cover locking motor 71 (S 1053 ) without withdrawing the pod moving motor 86 . In this instance, whether or not the engagement at that position has been successful may be again judged (S 1055 ).
- the T-shaped key 14 cmay have a chamfer (rotation allowance) 145 on the jaw side of the inclined side 144 of the head 141 . This arrangement ensures rotation of The T-shaped key 14 c even if the periphery of the key holes 204 of the cover 203 inwardly deforms.
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Abstract
Description
- 1. Field of the Invention
- The present invention relates to a pod cover removing-installing apparatus for a pod which contains and transfers thin substrates such as semiconductor wafers from one space to another space while maintaining the cleanliness of both spaces.
- 2. Description of the Background Art
FIG. 19 shows an example of a conventional pod cover removing-installing apparatus.- This conventional pod cover removing-installing
apparatus 100 is provided with adiaphragm 101 which partitions off a high clean space A and a low clean space B, anopening 102 formed in thediaphragm 101 that serves as a passage between the high clean space A and the low clean space B, adoor 103 which opens and closes the opening102 of thediaphragm 101, alatch mechanism 104 that latches thecover 203 of thepod 200, with twopositioning pins shaped keys door 103, and a table105 provided in the low clean space B for mounting thepod 200, which has threepositioning pins lock key 105d. - The
pod 200 is a container with an extremely clean internal space C for containing a plurality of semiconductor wafers (25 wafers, for example). - This
pod 200 is provided with amain container body 201, anopening 202 provided on one side of themain container body 201, acover 203 for opening and closing theopening 202, thecover 203 havingpin holes positioning pins key holes shaped keys grooves positioning pins key hole 205dfor engaging thelock key 105d. - When the
pod 200 is placed on the table105, the threepositioning pins grooves lock key 105dto move upward, become angled, and engage thekey hole 205d. Then, the table105 moves toward thediaphragm 101 for a prescribed distance (about 30 mm, for example), thereby causing thepod 200 to become attached to thediaphragm 101. A sealing material such as an O-ring, not shown in the figure, is provided along the circumference of the opening102 of thediaphragm 101 and theopening 202 of thepod 200, to ensure close attachment of the openings and maintain cleanliness. - The movement of the table105 causes the
cover 203 of thepod 200 to become closely attached to thedoor 103, whereby thepositioning pins pin holes cover 203 and the T-shaped keys key holes shaped keys nails 204eto204hare pulled in to release the lock between the containermain body 201 and thecover 203. - Then, the
door 103 is pulled into the space A (arrow D1) and caused to descend (arrow D2) by a drive mechanism, not shown in the figure, whereby the internal space C of thepod 200 and the internal space A of thepartition board 101 are brought into communication while maintaining cleanliness. - In the above-described conventional technology, if some trouble occurs during previous steps or during a carrying operation from a previous step, one or both rectangular engaging grooves (not shown) in
key holes shaped keys pod 200 run out of alignment in the rotational direction and cannot engage the T-shaped keys cover 203 cannot be unlocked from themain container body 201. - For example, in the pod cover removing-installing apparatus in the previous step, the cover cannot smoothly open or close, and is suspended in the state in which the rectangular engaging grooves run out of alignment in the rotational direction.
- In this instance, the automation line stops and it takes a long period of time for restoring the line. In addition, if the cover of the recovered pod is manually opened in a less clean chamber, expensive wafers stored in the pod may become unusable.
- An object of the present invention is to provide a pod cover removing-installing apparatus usable with various pods manufactured by different manufacturers according to the SEMI standard and capable of releasing lock of the cover when rectangular engaging grooves run out of alignment during previous steps or during a carrying operation from a previous step.
- To achieve the above object, a first invention provides a pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door of an opening of a highly clean room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings, the cover being provided with a lock mechanism for locking and unlocking the opening of the pod by rotation of a rectangular key groove provided inside the rectangular key hole, wherein the door is provided with a locking member having a T-shaped key, the head of which engages the rectangular key groove via the rectangular key hole of the cover, and driving to lock or unlock the lock mechanism by the rotation of the T-shaped key, and the T-shaped key is provided in the head section thereof with an engagement allowance section for allowing the engagement of the head with the rectangular key groove according to deviation of the rotation angle of the rectangular key groove of the rock mechanism.
- A second invention provides the pod cover removing-installing apparatus of the first invention, wherein the engagement allowance section consists of inclined sides extending along the both longitudinal sides of the head and tapering from the center toward the end.
- A third invention provides the pod cover removing-installing apparatus of the second invention, wherein the engagement allowance section consists of chamfers formed on the top of the inclined sides.
- A fourth invention provides the pod cover removing-installing apparatus of the first invention, provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated for a prescribed angle.
- A fifth invention provides the pod cover removing-installing apparatus of the first invention, provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated for the number of times, each time for a prescribed angle, until the head of the T-shaped key engages the rectangular key groove.
- A sixth invention provides the pod cover removing-installing apparatus of the first invention, wherein the T-shaped key is provided with a rotation allowable section on the head to allow rotation of the head according to deformation of the periphery of the rectangular key hole of the cover.
- A seventh invention provides the pod cover removing-installing apparatus of the sixth invention, wherein the rotation allowance section consists of chamfers formed on the jaw side of the inclined sides.
FIG. 1 is a perspective view showing an outline of a first embodiment of the cover removing-installing apparatus for a pod of the present invention.FIG. 2 is a front view of the first embodiment of the cover removing-installing apparatus for a pod of the present invention.FIG. 3 is an enlarged view of the part III ofFIG. 2 and shows the fine adjustment mechanism for the pod cover removing-installing apparatus of the first embodiment.FIG. 4 is an enlarged view of the part IV ofFIG. 2 and shows the centering mechanism for the pod cover removing-installing apparatus of the first embodiment.FIG. 5 is a cross sectional view along the line V-V ofFIG. 2 and shows the holding mechanism of the pod cover removing-installing apparatus of the first embodiment.FIG. 6 (a) is a perspective view andFIG. 6 (b) is a cross sectional view along the line VI-VI ofFIG. 2 , showing an eccentric transmission mechanism for the pod cover removing-installing apparatus of the first embodiment.FIG. 7 is a cross sectional view along the line VII-VII ofFIG. 2 and shows the positioning securing means of the pod cover removing-installing apparatus of the first embodiment.FIG. 8 is a block diagram showing a control means for the pod cover removing-installing apparatus of the first embodiment.FIG. 9 is a flowchart showing an operational example (cover opening operation1) for the pod cover removing-installing apparatus of the first embodiment.FIG. 10 is a flowchart showing an operational example (cover opening operation2) for the pod cover removing-installing apparatus of the first embodiment.FIG. 11 is a flowchart showing an operational example (cover closing operation1) for the pod cover removing-installing apparatus of the first embodiment.FIG. 12 is a flowchart showing an operational example (cover opening operation2) for the pod cover removing-installing apparatus of the first embodiment.FIG. 13 shows a T-shaped key unit for the pod cover removing-installing member of the first embodiment, whereinFIG. 13 (a) is a plan view,FIG. 13 (b) is a side view, andFIG. 13 (c) is a front view.FIG. 14 shows a T-shaped key unit extracted fromFIG. 13 , whereinFIG. 14 (a) is a front view,FIG. 14 (b) is a side view,FIG. 14 (c) is a plan view, andFIG. 14 (d) is an enlarged view of the D section ofFIG. 14 (a).FIG. 15 is a drawing for describing the shape and engagement movement of The T-shaped key 104c.FIG. 16 is a drawing for describing the shape and engagement movement of The T-shaped key 14c-1.FIG. 17 is a drawing for describing the shape and engagement movement of The T-shaped key 14c.FIG. 18 is a flow chart showing subroutine for the unlock operation of amotor 71 for locking the cover of S105 inFIG. 9 .FIG. 19 shows an example of a conventional pod cover removing-installing apparatus.- The present invention will be described in more detail by way of preferred embodiments with reference to the attached drawings.
FIGS. 1 and 2 are drawings showing a first embodiment of the pod cover removing-installing apparatus of the present invention, whereinFIG. 1 is a perspective view showing an outline andFIG. 2 is a plan view of the apparatus.- This pod cover removing-installing apparatus is provided with a
diaphragm 11, anopening 12, adoor 13 which opens and closes theopening 12 of thediaphragm 11, twopositioning pins shaped keys cover 203 of apod 200, and the like. - In the first embodiment, the
door 13 is provided with abase plate 13A and aposition adjusting plate 13B movable in the direction vertical to the plane so that its position can be adjusted with respect to thebase plate 13. - The
door 13 is provided therein with fourfine adjustment mechanisms 20, twocentering mechanisms 30, fourholding mechanisms 40, twoeccentric transmission mechanisms 50, one positioning fixing means60, and the like. FIG. 3 (a) andFIG. 3 (b) are enlarged views of the part III ofFIG. 2 and show the fine adjustment mechanism for the pod cover removing-installing apparatus of the first embodiment.- The
fine adjustment mechanism 20 supports theposition adjusting plate 13B movable in the direction vertical to the plane and exactly adjusts the position of thepositioning pins fine adjustment mechanism 20 is provided in the four corners of theposition adjusting plate 13B (seeFIG. 1 ), each having afixture 21 for fastening and securing thebase plate 13A using a thread21a,afemale screw 22 for keeping thefixture 21 from loosening, a receivingmember 23 of free bearings and the like inserted into thefixture 21, aball 24 rotatively supported by thereceiving member 23, anopposing plate 25 provided in thebase plate frame 13A-1 on the opposing side, a receivingmember 26 provided in theopposing plate 25, aball 27 rotatively supported in the receivingmember 26, aguide plate 28 provided on the side ofposition adjusting plate 13B and movably squeezed by theball 24 and theball 27. - The
fine adjustment mechanism 20 is designed so that in the initial state in which thepositioning pins pin holes FIG. 19 ), tapered tips of thepositioning pins tapered pin holes pin holes pod 200, thepositioning pins FIG. 4 (a) andFIG. 4 (b) are enlarged views of the part IV ofFIG. 2 and show the centering mechanism for the pod cover removing-installing apparatus of the first embodiment.- The
centering mechanism 30 is a mechanism for causing theposition adjusting plate 13B to return to the center. Thecentering mechanism 30, consisting of two systems, one in the horizontal direction (x direction) and the other in the vertical direction (y direction), is provided withpress boards members press boards base plate 13A,coil springs press boards members coil springs base plate 13A,guide pieces press boards members guide pieces position adjusting plate 13B andbase plate 13A, and the like. - The
press board 31xaligns theguide pieces press board 31yaligns theguide pieces position adjusting plate 13B is centered by these actions. - Although omitted from
FIG. 2 , a mechanism which is the same but symmetrical with the mechanism shown in the upper right side is provided in the upper left side of theFIG. 2 . - Because the
position adjusting plate 13B can move vertical to the plane with respect to thebase plate 13A by means of thefine adjustment mechanism 20, the centeringmechanism 30 always causes theposition adjusting plate 13B to be positioned in the previously determined center position (the engaging position without an error) in the initial state in which the positioning pins14a,14bengage the pin holes204a,204bof the pod200 (seeFIG. 19 ). FIG. 5 is a cross sectional view along the line V-V ofFIG. 2 and shows the holding mechanism of the pod cover removing-installing apparatus of the first embodiment.- The holding
mechanism 40 holds theposition adjusting plate 13B to thecover 203 of thepod 200 at the position where the positioning pins14a,14bengage. The holdingmechanism 40 has a securingplate 41 provided in abase plate frame 13A-1, a joint43 connected with this securingplate 41 through the O-ring 42, having a nozzle (not shown in the figure) connected to a vacuum pressure source, and anabsorption pad 44 provided in the joint43 which is capable of being attached to theposition adjusting plate 13B. - Because the
position adjusting plate 13B can move vertical to the plane with respect to thebase plate 13A by means of thefine adjustment mechanism 20, the holdingmechanism 40 can hold the positioning pins14a,14bto engage the pin holes204a,204bof the pod200 (seeFIG. 19 ). This structure ensures that the container maintains the same position as the position before removal when thecover 203 has been once removed and returned thereafter. Therefore, the cover can be closed without impediment. FIG. 6 (a) is a perspective view andFIG. 6 (b) is a cross sectional view along the line VI-VI ofFIG. 2 , showing an eccentric transmission mechanism for the pod cover removing-installing apparatus of the first embodiment.- The T-shaped
key 14c(14d) is provided in a prescribed position of theposition adjusting plate 13B to engage thekey hole 204c(204d) of thecover 203 to lock thecover 203, and driven by a lock drive mechanism70 (seeFIG. 2 ). Thislock drive mechanism 70 is provided on the side of thebase plate 13A and rotates in either direction around the axis of the T-shapedkey 14c(14d) to perform locking or unlocking movements. - Because it is desirable to make the
position adjusting plate 13B light for ease of movement, thelock drive mechanism 70 and the like are preferably installed on thebase plate 13A. For this reason, aneccentric transmission mechanism 50 is provided to transmit a driving force from thelock drive mechanism 70 to the T-shapedkey 14c(14d). - This
eccentric transmission mechanism 50 allows a deflection of thebase plate 13A andposition adjusting plate 13B in the direction vertical to the plane and transmits a rotational force of thelock drive mechanism 70 to the T-shaped key (locking member)14c(14d). - As shown in
FIG. 6 , theeccentric transmission mechanism 50 has a drivinglever 51 connected to thelock drive mechanism 70, arotation lever 52 rotatively connected to the drivinglever 51, abearing 54 supporting therotation lever 52 on thebase plate 13A in a freely rotative manner,transmission rollers rotation lever 52, aslide disc 55 havinggrooves transmission rollers transmission rollers rotation board 57 provided on the same axis with the T-shapedkey 14c(14d), abearing 58 having thetransmission rollers rotation board 57 and the T-shapedkey 14c(14d) on theposition adjusting plate 13B in a freely rotative manner, and the like. - The
eccentric transmission mechanism 50 transmits a rotational force of thelock drive mechanism 70 to the T-shapedkey 14c(14d), even if theposition adjusting plate 13B deviates from its original position within a movable range in the direction vertical to the plane. - Here, as shown in
FIG. 2 , thelock drive mechanism 70 is provided with amotor 71, adrive screw 73 to which the rotation of themotor 71 is transmitted by abelt 72, a slide axis74 arranged in parallel with thedrive screw 73, a movingblock 75 freely slidably supported in the slide axis74 and driven by adrive screw 73, abearing 76 secured on a movingblock 75 and engaging a long hole in the drivinglever 51, and the like. - When the
bearing 76 is in the position (a), therotation lever 52 is in the position (a). When the bearing76 moves to the right and comes to the position (b), therotation lever 52 rotates. This causes the drivinglever 51 to move that distance and to descend to the point indicated by a chain line connected by two dots. Because thebearing 76 is secured on the movingblock 75, the horizontal level of the position (b) remains the same as that of the position (a). Because of this, a deviation of the engaging position of the drivinglever 51 and thebearing 76 is absorbed by the long hole of the drivinglever 51. - The T-shaped
key 14c(14d) featuring the present invention will now be described in detail. FIG. 13 shows a T-shaped key unit of the cover removing-installing apparatus of the first embodiment andFIG. 14 shows the T-shaped key extracted fromFIG. 13 . Since the T-shapedkeys key 14cwill be described.- As shown in
FIG. 13 , the T-shaped key unit comprises the T-shapedkey 14c,transmission rollers rotation board 57 provided coaxially with the T-shapedkey 14c, a bearing58 rotatably supporting the axis of therotation board 57 and T-shapedkey 14con thepositioning plate 13B, and the like. - As shown in
FIG. 14 , the T-shapedkey 14cconsists of ahead 141 and aneck 142 functioning as a rotation axis for thehead 141. Thehead 141 has fourinclined sides 143 along the both longitudinal sides tapering from the center toward the end. An angle of inclination (ψ) of about 8-10° has been confirmed to be sufficient for theinclined sides 143 by experiments of the present inventor. - The T-shaped
key 14chas achamfer 144 on the topside of eachinclined side 143. An angle of the chamfer (Ψ) of about 10-12° has been confirmed to be sufficient for thechamfers 144 by experiments of the present inventor. FIGS. 15-17 are drawings for describing the shape and engagement movement of the T-shapedkey 14c.- In
FIG. 15 (a),204cindicates a rectangular key hole,104cis a conventional T-shaped key, and204iis a rectangular key groove. In this embodiment, since there is a clearance between the T-shapedkey 104cand thekey hole 204c, the T-shapedkey 104ccan engage the rectangular key groove204ivia thekey hole 204ceven if the rectangular key groove204iis out of alignment at an angle of θ1=α (the deviation allowance due to the clearance, the clearance is 0.3-0.5 mm and α is about 4° in this embodiment) as shown inFIG. 15 (b). - In
FIG. 16 (a), the T-shapedkey 14c-1 does not have thechamfers 144 for the T-shapedkey 14cdescribed inFIG. 14 . In this embodiment, since the T-shapedkey 14c-1 has inclinedsides 143, the T-shapedkey 14c-1 can engage the rectangular key groove204ivia thekey hole 204ceven if the rectangular key groove204iis out of alignment at an angle of θ2=α+β (wherein β is the deviation allowance angle due to the inclined sides143) as shown inFIG. 16 (b). When the angle of inclination of the inclined sides143 (ψ) is 8°, β is about 16°, and θ2 is 20°. - In
FIG. 17 (a), the T-shapedkey 14chas thechamfers 144 described inFIG. 14 . In this embodiment, since the T-shapedkey 14chas thechamfers 144, the T-shapedkey 14ccan engage the rectangular key groove204ivia thekey hole 204ceven if the rectangular key groove204iis out of alignment at an angle of θ3=α+β+γ (wherein γ is the deviation allowance angle due to the angle of the chamfers144) as shown inFIG. 17 (b). When the angle of the chamfers144 (Ψ) is about 30°, γ is about 10°, and θ3 is 30°. FIG. 7 is a cross sectional view along the line VII-VII ofFIG. 2 , and shows the position securing means of the pod cover removing-installing apparatus of the first embodiment.- The position securing means60 of this embodiment has a
passage 61 provided in the axial direction of thepositioning pin 14a(14b), apassage 62 provided in the vertical direction of thepassage 61 and joining therewith, astretch member 63 formed from rubber such as neoprene provided around the circumference of thepositioning pin 14a(14b) and capable of stretching according to an increase or decrease in the internal pressure, apipe 64 connected with thepassage 61, a securingmember 65 for securing thepipe 64 at the rear end of thepositioning pin 14a(14b), and the like. - In this position securing means60,
pipe 64 is connected to a pneumatic circuit or a vacuum circuit, not shown in the figure, which causes the internal pressure of thepassages stretch member 63 to expand or contract, causing the gap between the positioning pins14a,14band the pin holes204a,204bto be filled out. The positioning pins14a,14bare secured in the position in this manner. FIG. 8 is a block diagram showing a control means for the pod cover removing-installing apparatus of the first embodiment, andFIGS. 9-12 are flow charts showing operations of the cover removing-installing apparatus.- The control means80 has
various sensors 81 for detecting the positions and the like of each moving part, acontroller 82 which produces various control signals to control each drive part, described later, based on the position detection signals from thesensors 81, adriver 83 for converting control signals from thecontroller 82 into drive signals conforming to each drive part, and a drive part driven based on the drive signals from thedriver 83, including a position-keepingvalve 84 which controls the flow of the air pressure to theholding mechanism 40, acover securing valve 85 which controls the flow of the air pressure to a cover securing means60, acover locking motor 71 of a lock drive means70, acontainer moving motor 86, adoor moving motor 87, and the like. - Next, the cover opening operation will be described referring to
FIGS. 9 and 10 . - The
controller 82 drives the position-keepingvalve 84 to the release side (Step 101, the step is hereinafter referred to as “S”) and, upon confirmation of release with a sensor (S 102, YES), drives thecontainer moving motor 86 to move thepod 200 forward (S103), then, upon confirmation that thepod 200 has come to the joining position (S 104, YES), stops thecontainer moving motor 86. - Because the
holding mechanism 40 is canceled in this state by the position-keepingvalve 84, theposition adjusting plate 13B is not only free, but also has been moved to the center by the centeringmechanism 30. When thepod 200 comes to the joining point, theposition adjusting plate 13B can be moved by thefine adjustment mechanism 20, enabling the complete joining of thecover 203 of thepod 200 and thedoor 13 even though the pin holes204aand204bof thepod 200 deviate in the allowable range with respect to the positioning pins14a,14b. - Next, the
cover locking motor 71 is driven to the unlock side (S105) and the T-shapedkeys nails 204e-204hof thecover 203. When the sensor confirms that thenails 204e-204hhave been retracted (unlock) (S106, YES), thecover securing valve 85 is driven to the securing side (S107) to expand thestretch member 63 of the positioning pins14a,14b, confirming the securing of the pin holes204a,204bwith the sensor (S108, YES). - In the final stage of the operation S107, even if there is a deviation between the positioning pins14a,14band pin
holes position adjusting plate 13B has been moved, the T-shapedkeys eccentric transmission mechanism 50. - Moreover, accurate positioning is possible because the pin holes204a,204bare secured by expanding the
stretch member 63 of the positioning pins14a,14b. - Next, as shown in
FIG. 10 , the position-keepingvalve 84 is driven to the hold side (S109), confirming the holding with the sensor (S110, YES), and causing the door to reverse by driving the door moving motor87 (S111). Upon confirmation that the door has reversed (S112, YES), thedoor moving motor 87 is further driven to move the door downward (S113). When the door has reached the lower limit (S114, YES), the operation to terminate the process is stopped. - In this state, the position-keeping
valve 84 is driven to the hold side and holds the position of theposition adjusting plate 13B in its original position in the later-described door closing operation. Therefore, the door does not collide with theopening 202 of thepod 200 when closed. - Next, the cover closing operation will be described referring to
FIGS. 11 and 12 . - Referring to
FIG. 11 , thecontroller 82 drives thedoor moving motor 87 to elevate (S201) to the upper limit point (S202, YES), then to go forward (S203) until thedoor 13 starts rejoining thepod 200. Upon confirmation of the initiation of rejoining by a sensor (S204, YES), the position-keepingvalve 84 is driven to the release side (S205). Upon confirmation of the release by a sensor (S206, YES), thedoor moving motor 87 is driven forward (S207) until rejoining is complete, whereupon thedoor moving motor 87 is stopped and the rejoining with thepod 200 is confirmed by a sensor (S208). - Next, the
cover securing valve 85 is driven to the release side (S209) to cause thestretch member 63 of the positioning pins14a,14bto become contracted. The release from the pin holes204a,204bis confirmed by a sensor (S210, YES). Thecover locking motor 71 is driven to the lock side (S211) to rotate the T-shapedkeys nails 204eto204hto protrude and lock the cover, which is confirmed by a sensor (S212, YES). - Finally, the
container moving motor 86 is driven to move thepod 200 backward (S213). Upon confirmation by a sensor that thepod 200 has reversed (S214, YES), thecontainer moving motor 86 is stopped to terminate the cover closing operation. - Next, the T-shaped key control operation when the rectangular key groove204iof the
cover 203 is out of alignment, featuring the present invention, will be described. FIG. 18 is a flow chart showing subroutine for the unlock operation of amotor 71 for locking the cover of S105 inFIG. 9 .- When S1050 in
FIG. 18 is called for by S105 inFIG. 9 , whether or not theheads 141 of the T-shapedkeys cover locking motor 71 is rotationally driven to the unlock side, and then the operation returns to the flow ofFIG. 9 . - When the answer of S1051 is NO, a
pod moving motor 86 is withdrawn (S1052) and T-shapedkeys - The
pod moving motor 86 is then driven forward (S1054) again to judge whether theheads 141 of the T-shapedkeys - A prescribed number of operations (four times here) is counted. Whether or not the number has been counted up to four is judged (S1056). If the response is NO, the operations of S1052-S1055 are repeated; if YES, the operation proceeds to S1057, wherein an alarm is given, and then the operation returns to the flow of
FIG. 9 . - As described above, since the T-shaped
key 14cis provided with theinclined sides 143 andchamfers 144 and, in addition, is rotated a small angle during an engaging operation, the T-shapedkey 14ccan engage the rectangular key groove204ivia thekey hole 204c, even if the rectangular key groove204iis out of alignment with respect to thekey hole 204c. - (Modification)
- The present invention is not limited to the above-described embodiments and can be varied or modified in various ways. Such variations and modifications are within the scope of equivalency of the present invention.
- (1) For example, in
FIG. 18 , when the answer to the judgment (S1051) as to whether the engagement has been successfully completed is NO, the T-shapedkeys pod moving motor 86. In this instance, whether or not the engagement at that position has been successful may be again judged (S1055). - (2) When the T-shaped
keys FIG. 18 , the T-shapedkeys FIG. 18 . - (3) Although an embodiment of the T-shaped
key 14cwith thechamfers 144 was described, the T-shapedkey 14c-1 without thechamfers 144 described inFIG. 16 is also within the scope of the present invention. - (4) The T-shaped
key 14cmay have a chamfer (rotation allowance)145 on the jaw side of theinclined side 144 of thehead 141. This arrangement ensures rotation of The T-shapedkey 14ceven if the periphery of thekey holes 204 of thecover 203 inwardly deforms.
Claims (7)
1. (canceled)
2. A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door of an opening of a highly clean room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings, the cover being provided with a lock mechanism to lock and unlock the opening of the pod by rotation of a rectangular key groove provided inside the rectangular key hole, wherein the door is provided with a locking member having a T-shaped key, the head of which engages the rectangular key groove via the rectangular key hole of the cover, and driving to lock or unlock the locking mechanism by the rotation of the T-shaped key, the T-shaped key is provided with an engagement allowance section for allowing the engagement of the head with the rectangular key groove according to deviation of the rotation angle of the rectangular key groove of the rock mechanism, and the engagement allowance section consists of inclined sides extending along the both longitudinal sides of the head and tapering from the center toward the end.
3. The pod cover removing-installing apparatus according toclaim 2 , wherein the engagement allowance section consists of chamfers formed on the top of the inclined sides.
4. (canceled)
5. The pod cover removing-installing apparatus according toclaim 2 , provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated the number of times, each time a prescribed angle, until the head of the T-shaped key engages the rectangular key groove.
6. The pod cover removing-installing apparatus according toclaim 2 , wherein the T-shaped key is provided with a rotation allowable section on the head to allow rotation of the head according to deformation of the periphery of the rectangular key hole of the cover.
7. The pod cover removing-installing apparatus according toclaim 6 , wherein the rotation allowance section consists of chamfers formed on the jaw side of the inclined sides.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2003/016563WO2005062373A1 (en) | 2003-12-24 | 2003-12-24 | Cover attaching/detaching device of carry container |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2003/016563ContinuationWO2005062373A1 (en) | 2003-12-24 | 2003-12-24 | Cover attaching/detaching device of carry container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20060239803A1true US20060239803A1 (en) | 2006-10-26 |
Family
ID=34708608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/472,428AbandonedUS20060239803A1 (en) | 2003-12-24 | 2006-06-22 | Pod cover removing-installing apparatus |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20060239803A1 (en) |
| EP (1) | EP1708256A4 (en) |
| CN (1) | CN100386860C (en) |
| WO (1) | WO2005062373A1 (en) |
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|---|---|---|---|---|
| US20080107506A1 (en)* | 2006-09-14 | 2008-05-08 | Brooks Automation, Inc. | Carrier gas system and coupling substrate carrier to a loadport |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7524824B2 (en) | 2003-09-04 | 2009-04-28 | Pacific Arrow Limited | Composition comprising Xanthoceras sorbifolia extracts, compounds isolated from same, methods for preparing same and uses thereof |
| CN111734223B (en)* | 2020-07-06 | 2021-07-30 | 颀中科技（苏州）有限公司 | Crystal boat unlocking tool |
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- 2003-12-24CNCNB2003801110437Apatent/CN100386860C/ennot_activeExpired - Fee Related
- 2003-12-24WOPCT/JP2003/016563patent/WO2005062373A1/enactiveApplication Filing
- 2003-12-24EPEP03768153Apatent/EP1708256A4/ennot_activeWithdrawn
- 2006
- 2006-06-22USUS11/472,428patent/US20060239803A1/ennot_activeAbandoned
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| US20020033606A1 (en)* | 2000-05-02 | 2002-03-21 | Shinyo Kimoto | Cylinder, load port using it, and production system |
| US20030103835A1 (en)* | 2001-11-21 | 2003-06-05 | Tatsuhiko Nagata | Pod cover removing-installing apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080107506A1 (en)* | 2006-09-14 | 2008-05-08 | Brooks Automation, Inc. | Carrier gas system and coupling substrate carrier to a loadport |
| US8297319B2 (en) | 2006-09-14 | 2012-10-30 | Brooks Automation, Inc. | Carrier gas system and coupling substrate carrier to a loadport |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100386860C (en) | 2008-05-07 |
| WO2005062373A1 (en) | 2005-07-07 |
| EP1708256A4 (en) | 2009-03-04 |
| CN1910744A (en) | 2007-02-07 |
| EP1708256A1 (en) | 2006-10-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment | Owner name:RIGHT MFG, CO., LTD., JAPAN Free format text:ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NAGATA, TATSHIKO;REEL/FRAME:018027/0801 Effective date:20060620 | |
| STCB | Information on status: application discontinuation | Free format text:ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |