US20040056009A1 - Multiple beam micro-machining system and method - Google Patents

Abstract

A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Description

CROSS REFERENCE TO RELATED APPLICATION
• This application claims the benefit of U.S. Provisional Patent Application No.60/297,453, filed Jun. 13, 2001, the disclosure of which is incorporated by reference in its entirety.[0001]
FIELD OF THE INVENTION
• The present invention generally relates to multiple laser beam positioning and energy deliver systems, and more particularly to laser micro-machining systems employed to form holes in electrical circuit substrates.[0002]
BACKGROUND OF THE INVENTION
• Various laser machining devices are used to micro-machine patterns in substrates. Such systems typically are used in the manufacture of electrical circuit boards. Electrical circuit board manufacture comprises depositing conductive elements, such as conductive lines and pads, on a non-conductive, typically dielectric, substrate. Several such substrates are adhered together to form an electrical circuit board. In order to provide electrical interconnection between the various layers of an electrical circuit board, holes, called vias, are drilled through selected substrate layers and plated with a conductor. Electrical circuit boards typically include tens of thousands of vias, and as many as several hundred thousand vias.[0003]
SUMMARY OF INVENTION
• The present invention seeks to provide an improved laser micro-machining apparatus, such apparatus being particularly useful to form vias in electrical circuit boards.[0004]
• The present invention still further seeks to provide an improved laser beam positioning system operative to provide generally simultaneous independent positioning of a plurality of laser beams.[0005]
• The present invention still further seeks to provide laser micro-machining apparatus employing a laser beam positioning system operative to provide simultaneous independent positioning of a plurality of laser beams.[0006]
• The present invention still further seeks to provide laser micro-machining system operative to independently position a plurality of pulsed laser beams, with a minimal loss in laser energy.[0007]
• The present invention still further seeks to provide laser micro-machining apparatus that efficiently utilizes laser energy supplied by a pulsed laser, such as a solid state Q-switched laser, to generate vias in electrical circuit substrates.[0008]
• The present invention still further seeks to provide laser micro-machining apparatus that controls an energy property of a laser beam by splitting an input laser beam into at least one output beams that are used to micro-machine a substrate. The at least one output beams may be a single beam or a plurality of beams.[0009]
• The present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a selectable number of output sub-beams.[0010]
• The present invention still further seeks to provide a dynamic beam splitter operative to selectably split an input laser beam into a plurality of sub-beams having a generally uniform energy property.[0011]
• The present invention still further seeks to provide a system for selectably deflecting a pulsed beam to a selectably positionable beam reflector pre-positioned in an orientation to suitable for delivering energy to a selectably location on a substrate. Deflection of the beam may be performed at a duty cycle which is at least as fast as a pulse repetition of the laser beam. Positioning of the reflector is performed at a duty cycle which is slower than the pulse repetition rate.[0012]
• The present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a plurality of output laser beams, each of which is directed in a selectable direction. In accordance with an embodiment of the invention, each of the output laser beams is emitted from a different spatial section of the beam splitter.[0013]
• The present invention still further seeks to provide a laser beam diverter operative to receive a plurality of laser beams generally propagating in a common plane, and to divert each of the laser beams to a location in a two-dimensional array of locations outside the plane.[0014]
• In accordance with a general aspect of an embodiment of the present invention, a laser beam positioning system, useful for example, to micro-machine substrates, is operative to provide a plurality of sub-beams which are dynamically deflected in a selectable direction. Each sub-beam is deflected so as to impinge on a deflector, located in an array of independently positionable deflector, whereat the sub-beams are further deflected by the deflectors to impinge on a substrate at a selectable location. In accordance with an embodiment of the invention, the plurality of sub-beams is generated from a single input beam by a dynamically controllable beam splitter.[0015]
• In accordance with a general aspect of an embodiment of the invention, a system for delivering energy to a substrate, includes a dynamically directable source of radiant energy providing a plurality of beams of radiation, propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.[0016]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction, and a plurality of independently positionable beam steering elements, some of which receive the plurality of sub-beams and direct them to selectable locations on the substrate.[0017]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and a dynamically configurable beam splitter disposed between the source of radiant energy and the substrate.[0018]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and an opto-electronic multiple beam generator disposed between the source of radiant energy and the substrate. The multiple beam generator is operative to generate at least two sub-beams from the beam and to select an energy density characteristic of each sub-beam.[0019]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, the pulsed beam including multiple pulses separated by a temporal pulse separation, and a multiple beam, selectable and changeable angle output beam splitter disposed between the source of radiant energy and the substrate. The selectable and changeable angle output beam splitter is operative to output a plurality of sub-beams at a selected angle relative to the optical axis. The angle is changeable in an amount of time that is less than the temporal pulse separation.[0020]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation, the pulsed beam including multiple pulses separated by a temporal pulse separation, a beam splitter disposed between the source of radiant energy and a substrate, the beam splitter being operative to output a plurality of sub-beams at selectable angles which are changeable, and a plurality of selectable spatial orientation deflectors. The deflectors are operative to change a spatial orientation in an amount of time that is greater than the temporal pulse separation. Some of the spatial orientation deflectors are arranged to receive the sub-beams and to direct the sub-beams to the substrate.[0021]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a selectable number of output beams, the output beams having an energy property functionally related to the selectable number, a beam steering element receiving an output beam and directing the output beam to micro-machine a portion of a substrate.[0022]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane and a plurality of deflectors receiving the plurality of beams and deflecting at least some of the beams to predetermined locations outside the plane.[0023]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to receive the beam and to output a plurality of sub-beams propagating in a plane, and a plurality of deflectors receiving the plurality of sub-beams and deflecting at least some of the plurality of sub-beams to predetermined locations outside the plane.[0024]
• In accordance with another general aspect of an embodiment of the invention a method for delivering energy to a substrate comprises directing a first plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing the first plurality of beams onto a first plurality of locations, during the first time interval, selectably positioning a second plurality of selectably positionable deflectors, and during a second time interval, directing the first plurality of beams of radiation onto the second plurality of selectable positionable deflectors for directing the first plurality of beams onto a second plurality of locations.[0025]
• In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one radiant beam source providing at least one beam of radiation and at least first and second deflectors disposed to receive the at least one beam to deliver the beam to respective at least first and second at least partially overlapping locations on the substrate.[0026]
• In accordance with another general aspect of an embodiment of the invention a laser micro-machining apparatus includes at least one radiant beam source providing a plurality of radiation beams, a plurality of independently positionable deflectors disposed between the at least one radiant beam source and a substrate to be micro-machined, the plurality of independently positionable deflectors being operative to independently deliver the at least one radiation beam to selectable locations on the substrate, and a focusing lens disposed between the at least one radiant beam source and the substrate, the focusing lens receiving the plurality of radiation beams and being operative to simultaneously focus the beams onto the selectable locations on the substrate.[0027]
• In accordance with another general aspect of an embodiment of the invention an acousto-optical device includes an optical element receiving a beam of radiation along an optical axis, and a transducer associated with the optical element, the transducer forming in the optical element an acoustic wave simultaneously having different acoustic frequencies, the optical element operative to output a plurality of sub-beams at different angles with respect to the optical axis.[0028]
• In accordance with another general aspect of an embodiment of the invention a method for micro-machining a substrate includes providing a laser beam to a beam splitter device, splitting the laser beam into a first number of output beams and directing the first number of output beams to form at least one opening in a first layer of a multi-layered substrate, and then splitting the laser beam into a second number of output beams and directing ones of the second number of output beams to remove selected portions of a second layer of the multi-layered substrate via the at least one opening.[0029]
• Additional features and aspects of the invention include various combinations of one or more of the following:[0030]
• The source of radiant energy comprises a pulsed source of radiant energy outputting a plurality of beams each defined by pulses of radiant energy.[0031]
• The pulsed source of radiant energy comprises at least one Q-switched laser.[0032]
• A dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy and splitting the beam into a selectable number of sub-beams.[0033]
• A dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy, to split the beam into a plurality of sub-beams and to direct the sub-beams each selectable directions.[0034]
• The beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.[0035]
• The beam splitter comprises an acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the number of sub-beams output by the acousto-optical deflector.[0036]
• The beam splitter comprises acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the selectable directions of the sub-beams.[0037]
• The acoustic wave in the acousto-optical deflector includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of the control signal having a distinct frequency.[0038]
• Each spatially distinct acoustic wave segment in the acoustic wave determines a corresponding spatially distinct direction of a corresponding sub-beam, which is a function of the frequency of the portion of the control signal corresponding to the acoustic wave segment.[0039]
• The number of spatially distinct acoustic wave segments determines the number of corresponding sub-beams.[0040]
• The dynamically directable source of radiant energy comprises a dynamically configurable beam splitter receiving a beam of radiant energy and splitting the beam into a selectable number of sub-beams. The dynamically configurable beam splitter is capable of changing at least one of the number and direction of the sub-beams within a reconfiguration time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is greater than the reconfiguration time duration.[0041]
• The plurality of independently positionable beam steering elements is capable of changing the direction of the sub-beams within a redirection time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is less than the redirection time duration.[0042]
• Each of the beam steering elements includes a reflector mounted on at least one selectably tilting actuator. The actuator comprises a piezoelectric device or a MEMs device.[0043]
• The number of beam steering devices exceeds the number of sub-beams included in the plurality of sub-beams. At least some of the plurality of sub-beams are directed to at least some of the plurality of beam steering devices while others of the plurality of the beam steering devices are being repositioned.[0044]
• The selectable number of sub-beams all lie in a plane, a two dimensional array of beam steering elements lies outside the plane, and an array of fixed deflectors optically interposed between the at least one dynamically directable source of radiant energy and the plurality of independently positionable beam steering elements is operative direct the beams lying in a plane to locations outside the plane.[0045]
BRIEF DESCRIPTION OF DRAWINGS
• The present invention will be understood and appreciated more fully from the following detailed description, taken in conjunction with the drawings in which:[0046]
• FIG. 1A is a simplified partially pictorial, partially block diagram illustration of a system and functionality for fabricating an electrical circuit constructed and operative in accordance with a preferred embodiment of the present invention;[0047]
• FIG. 1B is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1;[0048]
• FIG. 2 is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an apparatus for micro-machining electrical substrates in the system and functionality of FIG. 1A;[0049]
• FIG. 3 is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2;[0050]
• FIG. 4 is a flow diagram of a method for manufacturing electrical circuits in accordance with an embodiment of the invention;[0051]
• FIG. 5 is an illustration showing the result of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;[0052]
• FIG. 6 is an illustration showing the result of varying the angle of multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;[0053]
• FIG. 7 is an illustration showing the result of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter produced by modulation control signals including multiple at least partially superimposed different frequency components in the system and functionality of FIGS. 1A and 2;[0054]
• FIG. 8 is an illustration showing the result of varying the energy distribution among multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;[0055]
• FIGS. 9A and 9B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2; and[0056]
• FIGS. 10A and 10B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIGS. 9A and 9B in accordance with a preferred embodiment of the present invention.[0057]
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
• Reference is now made to FIG. 1A, which is a simplified partially pictorial, partially block diagram, illustration of a system and functionality for fabricating an electrical circuit, constructed and operative in accordance with a preferred embodiment of the present invention, and to FIG. 1B which is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1A. The system seen in FIG. 1A includes laser[0058]micro-machining apparatus10, which also includes the functionality of delivering energy to a substrate.
• [0059]Apparatus10 is particularly useful in the context of micro-machining holes, such asvias12, in printedcircuit board substrates14, during the fabrication of printed circuit boards.Apparatus10 may also be used in other suitable fabrication processes employing micro-machining, including without limitation, the selective annealing of amorphous silicon in flat panel displays and the removal of solder masks on electrical circuits. Accordingly, although the invention is described in the context of micro-machining printed circuit boards, the scope of the invention should not be limited solely to this application..
• Printed circuit board substrates, such as a[0060]substrate14, which are suitable to be micro-machined using systems and methods described hereinbelow, typically include dielectric substrates, for example epoxy glass, having one or more electrical circuit layers, each electrical circuit layer having selectively formed thereon aconductor pattern16. The substrates may be formed of a single layer or of a laminate formed of several substrate layers adhered together. Additionally, the outermost layer of thesubstrate14 may comprise theconductor pattern16 formed thereon, as seen in FIG. 1A. Alternatively, the outermost layer ofsubstrate14 may comprise, for example, a metal foil substantially overlaying a continuous portion of the outer surface of thesubstrate14, for example as shown by the region indicated byreference numeral17.
• In an embodiment of the invention, as seen in FIG. 1A,[0061]laser micro-machining apparatus10 includes apulsed laser20 outputting a pulsed laser beam22. Pulsed laser beam22 is defined by a stream of light pulses, schematically indicated bypeaks24 in laser pulse graph26 (FIG. 1B). In accordance with an embodiment of the invention pulsedlaser20 is a frequency tripled Q-switched YAG laser providing a pulsed a UV laser beam22 at a pulse repetition rate of between 10-50 KHz, and preferably at about 10-20 KHz. Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A. Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used.
• Another laser suitable for use as[0062]pulsed laser20, operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S.provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety.
• In the embodiment seen in FIG. 1A, which is a highly simplified schematic representation of laser[0063]micro-machining apparatus10, pulsed laser beam22 impinges on afirst lens28, which preferably is a cylindrical lens operative to flatten beam22 at an image plane (not seen) in a first variable deflector assembly, such as an acousto-optical deflector (AOD)30. PreferablyAOD30 includes atransducer element32 and atranslucent crystal member34 formed of quartz or other suitable crystalline material.
• [0064]Transducer32 receives acontrol signal36 and generates anacoustic wave38 that propagates throughcrystal member34 ofAOD30.Control signal36 preferably is an RF signal provided by anRF modulator40, preferably driven by a direct digital synthesizer (DDS)42, or other suitable signal generator, for example a voltage controlled oscillator (VCO). Asystem controller44, in operative communication withDDS42 and alaser driver47, is provided to coordinate between generation of thecontrol signal36 andlaser pulses24 defining pulsed laser beam22 so that portions ofsubstrate14 are removed, e.g. by ablation, in accordance with a desired design pattern of an electrical circuit to be manufactured. Such design pattern may be provided, for example, by a CAM data file46 or other suitable computer file representation of an electrical circuit to be manufactured.
• As known in the art, the presence of the[0065]acoustic wave38 incrystal member34, when beam22 impinges thereon causes beam22 to be deflected at an angle θ_nwhich is a function of the frequency f_nofwave26 according to the formula:${\theta }_n=\frac{\Delta f_n\times \lambda }{{\upsilon }_s}$

  
• Where:[0066]
• Δf[0067]_n=f_n−f₀;
• λ=wavelength of beam[0068]22
• υ[0069]_s=speed of sound in thecrystal34 ofAOD30, and
• n is an integer representing the index number of a laser sub-beam, as described hereinbelow.[0070]
• In accordance with an embodiment of the invention,[0071]AOD30 is operative to function as a dynamic beam splitter and which governs at least one of a number segments into which beam22 is split and its angle of deflection.Signal36 may be selectably provided so as to causeacoustic wave38 to propagate at a uniform frequency throughcrystal member34. Alternatively, signal36 may be selectably provided so as to cause theacoustic wave38 to propagate at different frequencies through thecrystal member34.
• Various aspects of the structure, function and operation of[0072]AOD30 as a dynamic beam splitter are described hereinbelow with reference to FIGS.5-7. The structure and operation of another type of AOD, configured and arranged to function as a dynamic beam splitter and deflector is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”.
• In accordance with an embodiment of the invention, signal[0073]36 causes theacoustic wave38 to be generated inAOD30 with different frequencies such that at a moment in time theacoustic wave38 interacts with thelaser pulse24, theacoustic wave38 comprises at least two different frequencies. By generating anacoustic wave38 with more than one frequency, beam22 is split into more than one segment. Typically, the different frequencies are spatially separated inAOD30 at the time at which a laser pulse impinges thereon. Alternatively, the different frequencies are superimposed in a complex waveform.
• Thus, when the[0074]acoustic wave38 is propagated throughcrystal member32 in a non-uniform waveform and interacts with the laser beam22, the beam22 is segmented intoseveral beam segments50, or sub-beams. Each of the segments is deflected at an angle θ_nwhich is a function of an acoustic wave frequency, or frequencies, of theacoustic wave38 incrystal member34 at the time the laser beam22, represented by peak24 (FIG. 1B), impinges thereon.
• In accordance with an embodiment of the invention,[0075]AOD30 operates at a duty cycle, which is less than the pulse repetition rate of laser beam22. In other words, the time required to reconfigure theacoustic wave38 inAOD30 to comprise a different composition of frequencies when impinged upon by alaser pulse24, so as to change at least one of the number ofsub-beams50 and the respective directions thereof at the output fromAOD30, is less than the time separation betweensequential pulses24 in beam22.
• Each one of[0076]beam segments50, whether a single segment provided e.g. by a uniform acoustic wave, or several segments as seen in FIG. 1, is directed towards a secondvariable deflector assembly52. The secondvariable deflector assembly52 is formed of a plurality of independently tiltable beam steeringreflector elements54.
• In accordance with an embodiment of the invention, second[0077]variable deflector assembly52 comprises an optical MEMs device, or is formed as an array of mirrors tiltable by suitable piezo-electric motors, or is formed as an array of galvanometers, or comprises any other suitable array of independently tiltable reflector devices. In the configuration of secondvariable deflector assembly52 seen in FIG. 1A, a 6×6 array ofreflector elements54 elements is provided. Any other suitable quantity of independentlytiltable reflector elements54 may be used.
• A suitable optical MEMs device providing an array of independently controllable digital light switches is employs technologies used in a Digital Micromirror Device (DMD™) available from Texas Instruments of Dallas, U.S.A. Alternatively, a suitable array of[0078]reflector elements54 may be constructed in accordance with fabrication principles of the DMD™ described in detail in Mignardi et. al.,The Digital Micromirror Device—a Micro-Optical Electromechanical Device for Display Applications, presented in MEMS and MOEMS Technology and Applications (Rai-Choudhury, editor), SPIE Press, 2000, the disclosures of which are incorporated herein by reference.
• Each of the[0079]reflector elements54 is operative to separately and independently steer abeam segment50 impinging thereon to impinge on thesubstrate14 at a selectable location in atarget region55 so as to micro-machine, drill or otherwise remove a portion ofsubstrate14 at the required location.
• As seen in FIG. 1A, operation of[0080]reflector elements54 may be controlled, for example, by aservo controller57 in operative communication withsystem controller44 to ensure thatreflector elements54 suitablydirect beam segments50 to impinge onsubstrate14 at a required location, in accordance with a desired design pattern of an electrical circuit to be manufactured. Such design pattern may be provided, for example, by the CAM data file46 or other suitable computer file representation of an electrical circuit to be manufactured.
• Each of the[0081]reflector elements54 is configured so that a beam impinging thereon may be steered to a selectable location in a corresponding region of coverage. In accordance with an embodiment of the invention, the regions of coverage, corresponding to at least some of thereflector elements54, at least partially mutually overlap.
• In accordance with an embodiment of the invention, the number of[0082]reflector elements54 in the secondvariable deflector assembly52 exceeds the maximum number ofbeam segments50 output byAOD30.Reflector elements54 typically operate at a duty cycle which is slower than the pulse repetition rate of laser beam22. In other words, the time required to redirect a givenreflector element54 so that abeam segment50 impinging thereon may be redirected to a new location onsubstrate14, is greater than the time separation betweensequential pulses24 in beam22.
• Because of the redundancy in[0083]reflector elements54, for any givenpulse24 in beam22,beam segments50 are impinging on only some of the reflector elements54., but not on others. Thus,reflector elements54, which are not receiving a sub-beam50, may be repositioned to a new spatial orientation, in preparation for receiving a sub-beam50 from asubsequent laser pulse24, while at generally the same timeother reflector elements54 are directingbeam segments50 to impinge onsubstrate14.
• As seen in FIG. 1A, a[0084]folding mirror62, a focusinglens63 and atelecentric imaging lens64 are interposed between secondvariable deflector assembly52 andsubstrate14 to deliverbeam segments50 to the surface ofsubstrate14. It is appreciated that the optical design oflenses63 and64 should accommodatebeam segments50 which propagate along optical axes extending in mutually different directions.
• It is further appreciated that as a function of system geometry and engineering design, a[0085]single folding mirror62, no folding mirror or multiple folding mirrors may be provided. Additionally focusinglens63 andtelecentric lens64 may be combined into a single optical element, or alternatively each oflenses62 and64 may comprise multiple lens elements. Moreover,system10 may include a zoom lens (not shown) operative to govern a cross sectional dimension of one ormore beam segments50, for example in order to form holes and vias onsubstrate14 having different diameters. Alternatively zoom optics may be employed to accommodate and make uniform a diameter of beam-segments50 which may be output by AOD with different diameters.
• In accordance with an embodiment of the invention, the angles en at which[0086]beam segments50 are deflected byAOD30 relative to the optical axis of the incoming beam22 typically are very small, in the order of 10⁻²radians. In order to provide for a more compact system, a beam angle expander, such as a telescoping optical element, schematically represented bylens56, operative to increase the mutual angular divergence ofbeam segments50, preferably is provided downstream ofAOD30.
• [0087]AOD30 generally is operative to deflect sub-beams50 so that the optical axes ofbeam segments50 generally lie in a plane. As seen in FIG. 1A, secondvariable deflector assembly52 comprises a two dimensional array that lies outside the plane of the optical axes ofbeam segments50. As seen in FIG. 1A, a linear to 2-dimensional mapping assembly58 is located betweenAOD30 and the secondvariable deflector assembly52.Mapping assembly58 receivesbeam segments50, propagating in the same plane, and redirects thebeam segments50 to a two dimensional array of locations outside the plane of the sub-beams50.
• In accordance with an embodiment of the invention,[0088]mapping assembly58 comprises a plurality of mappedsections60 each of which are positioned in a suitable spatial orientation so that abeam segment50 output byAOD30 which impinges on a given mappedsection60 is directed to areflector element54, to which it is mapped.
• The following is a simplified general description of the operation and functionality of system[0089]10: The acoustic wave is38 is generated incrystal34 in synchronization with thepulses24 of beam22 such that a desired acoustic wave structure is present incrystal member34 at the time a first laser beam pulse impinges thereupon. Theacoustic wave38 may have a uniform frequency throughoutcrystal34, which produces asingle beam segment50. Alternatively, acoustic wave may have several different frequencies. Typically, the different frequencies may be, for example, at various spatial segments along the length ofacoustic wave38 to produce several somewhat spaced apartbeam segments50. In accordance with an embodiment of the invention, the duty cycle ofAOD30 is sufficiently fast such that it can be dynamically reconfigured to selectably and differently split or deflect eachpulse24 in a beam22. In a preferred embodiment of the invention, dynamic reconfiguration of the beam splitter is accomplished by forming acoustic waves having mutually different structures inAOD30 at the moment eachpulse24 defining beam22 impinges onAOD30.
• The different frequencies in[0090]acoustic wave38 cause eachbeam segment50 to be deflected at a selectable angle θ_nto impinge on a selected mappedsection60 ofmapping assembly58, preferably after passing throughbeam expander lens56. Eachbeam segment50 is directed by an appropriate mappedsection60 to a corresponding location on one ofreflector elements54 at secondvariable deflector assembly52. Thereflector element54 is suitably tilted so that thebeam segment50 is subsequently further directed to a location onsubstrate14 for micro-machining or drilling a required location of thesubstrate14.
• In accordance with an embodiment of the invention, although[0091]AOD30 operates at a duty cycle which generally is faster than the pulse repetition rate of laser beam22, the deflection that it provides is relatively limited in that it deflectsbeam segments50 by relatively small angles of deflection. Thebeam segments50 typically all lie in the same plane.
• Conversely, the time required to position[0092]individual reflector elements54 in secondvariable deflector assembly52 typically is greater than the time separation between subsequent pulses defining laser beam22. However, since eachreflector element54 may be tilted over a relatively large range of angles, preferable in at least 2-dimensions, alaser sub-beam50 impinging on thereflector element54 may be delivered to cover a relatively large spatial region.
• In accordance with an embodiment of the invention, each of[0093]reflector elements54 is suitably tiltable so as thatadjacent reflector elements54 are operable to deliverbeam segments50 to cover mutually overlapping regions on the surface ofsubstrate14. Moreover, thereflector elements54 in secondvariable deflector assembly52 are able to deliverbeam segments50 to substantially any location in the field ofview68 of thelenses63 and64.
• After micromachining the desired[0094]portions55 in the field ofview68,substrate14 andapparatus10 are mutually displaced relative tosystem10 so that the field ofview68 covers a different portion of thesubstrate14.
• In accordance with an embodiment of the invention, the number of[0095]reflector elements54 inassembly52 typically exceeds the number ofbeam segments50 into which laser beam22 is split byAOD30. During an initial time interval,beam segments50 impinge on a first plurality of thereflector elements54, but not onother reflector elements54. The initial time interval is used to reposition theother reflector elements54 which do not receive abeam segment50, as described hereinbelow.
• During a subsequent second time interval,[0096]beam segments50 are deflected byAOD30 to impinge on at least some of thereflector elements54 which did not receivebeam segments50 during the previous time interval. Thereflector elements54 employed in the second time interval are now suitably repositioned to deflect the sub-beam50 to thesubstrate14. During the second time interval at least some of the reflector elements that are not impinged on by abeam segment50, possibly including reflector elements that were used in the first time interval, are repositioned for use in a subsequent time interval. This process of repositioningreflector elements54 that are not used during a given time interval is repeated.
• Stated generally, it may be said that concurrent to[0097]beam segments50 from a first laser pulse impinging on selectedreflector elements54, other reflectors are concurrently repositioned to receivebeam segments50 from subsequent beam pulses.
• Typically the time required to position a[0098]single reflector element54 is in the order of between 1-10 milliseconds, corresponding to about between 20-200 pulses of a 20 KHz Q-switched laser. The length of time, which exceeds the duty cycle of thelaser pulses24, used to positionreflectors54, ensures stabilized beam pointing accuracy. Additionally, the use ofmultiple reflectors54 ensures a redundancy which minimizes the loss of pulses while repositioningreflector54 following micromachining of a location onsubstrate14. It is appreciated that in order to the increase the speed of theapparatus10, and to provide a controlled dosage of energy in eachbeam segment50, it may be necessary for more than onebeam segment50 to simultaneously impinge on the surface ofsubstrate14 at the same location. In such an arrangement,multiple beam segments50 are each individually deflected to impinge onseparate reflectors54, which are each oriented to direct the sub-beams50 to impinge onsubstrate14 at the same location.
• Reference is now made to FIG. 2 which is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an[0099]apparatus110 for micro-machining electrical circuits in the system and functionality of FIG. 1. In general,laser machining apparatus110, may be thought of as a system for delivering energy to a substrate.
• In an embodiment of the invention, as seen in FIG. 1,[0100]laser micro-machining apparatus110 includes apulsed laser120 outputting apulsed laser beam122.Pulsed laser beam122 is defined by a stream of light pulses. In accordance with an embodiment of the invention pulsedlaser20 is a frequency tripled Q-switched YAG laser providing a pulsed aUV light beam122 at a pulse repetition rate of between 10-50 KHz, and preferably between about 10-20 KHz. Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A. Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used.
• Another laser suitable for use as[0101]pulsed laser120, operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S.provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety.
• In the embodiment seen in FIG. 2, which is a highly simplified schematic representation a preferred embodiment of laser[0102]micro-machining apparatus110, apulsed laser beam122 impinges on afirst lens128, which preferably is a cylindrical lens operative to flattenbeam122 at an image plane (not seen) on a first variable deflector assembly, such as an acousto-optical deflector (AOD)130. PreferablyAOD130 includes atransducer element132 and atranslucent crystal member134 formed of quartz or any other suitable crystalline material.
• [0103]Transducer132 is controlled by a control signal (not shown), corresponding to controlsignal36 in FIG. 1A, and is operative to generateacoustic waves138 that propagate throughcrystal member134 ofAOD130, similarly as described with reference to FIG. 1A. Theacoustic waves138 are operative to interact withlaser beam122 incrystal member134 to dynamically and selectably split and deflect pulses inlaser beam122, tooutput beam segments150 orsub-beams150.
• [0104]AOD130 is thus operative to function as a dynamic beam splitter which controls, by forming a suitableacoustic wave138 having a selectable wave configuration, at least one of anumber segments150 into whichbeam122 is split and a direction at which the resulting beam segments are directed.
• Various aspects of the structure, function and operation of[0105]AOD130 as a dynamic beam splitter are described hereinbelow with reference to FIGS.5-7. The structure and operation of another type of AOD configured and arrange to function as a dynamic beam splitter is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”.
• In accordance with an embodiment of the invention,[0106]acoustic wave138 may be formed inAOD30 with several different frequencies such that at a moment in time at which theacoustic wave138 interacts with thelaser beam122, theacoustic wave138 comprises at least two different frequencies. By forming anacoustic wave138 with more than one frequency,beam122 is split into more than onesegments150. The different frequencies may be spatially separated inAOD130 at the time at which a laser pulse impinges thereupon. Alternatively, the different frequencies may be superimposed in a complex waveform.
• Thus when[0107]acoustic wave138 is propagated throughcrystal member132 in a non-uniform waveform,beam122 may be segmented intoseveral beam segments150, or sub-beams. Each of thebeam segments150 is deflected at an angle on which is a function of an acoustic wave frequency, or frequencies, ofacoustic wave138 incrystal member134 at the time a laser pulse inlaser beam122 impinges thereon.
• In accordance with an embodiment of the invention,[0108]AOD30 operates at a duty cycle which is shorter than the pulse repetition rate oflaser beam122. Thus, the time required to reconfigure anacoustic wave138 inAOD130 to comprise a different composition of frequencies when interacting with a laser pulse inlaser beam122, so as to change at least one of the number and respective directions ofsub-beams150, is less than the time separation between sequential pulses inlaser beam122.
• Each one of[0109]beam segments150, whether a single segment provided e.g. by a uniform acoustic wave, or several segments as seen in FIG. 2, is directed to a first selectable target located at a secondvariable deflector assembly152. The secondvariable deflector assembly152 is formed of a plurality of independently tiltable beam steeringreflector elements154.
• Each of the[0110]reflector elements154 also operates to further separately and independently steer abeam segment150, impinging thereon, to impinge onsubstrate14, as described with reference to FIG. 1A, and subsequently to micro-machine, drill or otherwise remove a portion ofsubstrate14 at such location.
• In accordance with an embodiment of the invention, each[0111]reflector element154 comprises amirror240, or another suitable reflective element, mounted on apositioner assembly242 comprising abase244, amirror support246, at least oneselectable actuator248,3 actuators are shown assembled in a starlike arrangement, and a biasing spring (not shown). Each of theselectable actuators248 is, for example, a piezoelectric actuator, such as a TORQUE-BLOCK™ actuator available from Marco Systemanalyse und Entwicklung GmbH of Germany, independently providing an up and down positioning as indicated byarrows249 so as to selectively tiltmirror240 into a desired spatial orientation for receiving abeam segment150 and subsequently to direct thebeam segment150 to impinge on a desired location on the surface ofsubstrate14.
• As appreciated from FIG. 2, considered along with FIG. 1A, each of the[0112]actuators248 is operatively connected to aservo controller57 which in turn is operatively connected to and controlled bysystem controller44 as described hereinabove with respect to FIG. 1A. Thus, it is appreciated that in correspondence to the a pattern design, for example of a pattern of vias in an printed circuit board, contained in CAM data file46, the relative spatial orientation, or tilt, ofreflector elements154 is independently controlled in synchronization with the laserpulses defining beam122 and with the generation of control signal controlling the operation ofAOD130 to dynamically split and deflectlaser beam122. Abeam segment150 is deflected to a desiredreflector element154, which in turn is suitably oriented so that thebeam segment150 ultimately impinges onsubstrate14 at a desired location.
• In accordance with an embodiment of the invention, each of the[0113]reflector elements154 is configured so that a sub-beam150 may be steered to a selectable location in a corresponding region of coverage onsubstrate14. The regions of coverage corresponding to at least some of thereflector elements154 at least partially mutually overlap.
• The number of[0114]reflector elements154 in secondvariable deflector assembly152 typically exceeds the maximum number ofbeam segments150 output byAOD130. Thus as seen in FIG. 2, second variable deflector assembly includes36 reflector elements, while6sub-beams150 are output byAOD130.Reflector elements154 typically operate at a duty cycle which is less than the pulse repetition rate oflaser beam122. Thus, the time required to mechanically reposition areflector element154, so that abeam segment150 impinging thereupon may be redirected to a new location onsubstrate14 is greater than the time separation between sequentialpulses defining beam122.
• Because of the redundancy in[0115]reflector elements154 over the respective ofbeam segments150, for any given pulse inbeam122,beam segments150 are deflected to impinge on somereflector elements154, but not on otherreflective elements154. Thus, somereflector elements170 which are not receiving abeam segment150 may be repositioned to a new spatial orientation, in preparation for receiving asubsequent laser pulse24, while at the same timeother reflector elements172, which are receiving abeam segment150, are directing thebeam segments150 to impinge downstream, onsubstrate14.
• In accordance with an embodiment of the invention, the angles en at which[0116]beam segments150 are deflected byAOD130 relative to the optical axis of theincoming beam122 typically are very small, in the order of 10⁻²radians. In order to provide for a more compact system, a beam angle expander, such as a telescoping optical element, schematically represented bylens156, operates to increase the mutual angular divergence ofbeam segments150, preferably is provided downstream ofAOD130.
• [0117]AOD130 generally is operative to deflectbeams50 so that the optical axes ofbeam segments150 generally lie in the same plane, while secondvariable deflector assembly152, comprising a two dimensional array that lies outside the plane of the optical axes ofbeam segments150.
• A 2-dimensional mapping assembly[0118]180 is interposed betweenAOD130 and the secondvariable deflector assembly152. Mapping assembly180 receivesbeam segments150, all generally propagating in a plane, and redirects thebeam segments150 to a two dimensional array of locations outside the plane of the sub-beams150.
• In accordance with an embodiment of the invention, mapping assembly[0119]180 comprises an array ofsupport members182 which comprise a plurality of opticallytransmissive portions184, through whichbeam segments150 can pass, and a plurality ofreflective portions186 operative to reflectbeam segments150, which impinge thereupon.
• As seen in FIG. 2, the[0120]reflective portions186 generally are spaced apart on eachsupport member182, and the respective locations ofreflective portions186 are preferably mutually laterally staggered amongsupport members182. Eachreflective portion186 is generally mapped to acorresponding reflector element154. Consequently, eachbeam segment150 entering assembly180 is received by the respectivereflective portion186 on afirst support member187, or passes through one or more support members until it is received by areflective portion186 on one of theother support members182.
• Assembly[0121]180 thus provides a means for redirectingbeam segments150, which propagate along optical axes lying in a plane of beam propagation, to impinge on a two dimensional array of locations lying outside the plane of propagation.AOD130 selectively deflects abeam segment150 to impinge on one of thereflective portions186 formed on one of thesupport members182 in assembly180. Becausereflective portions186 intersect the plane of propagation at mutually staggered locations, along both an X axis and a Y axis in the plane of propagation, the angle at which abeam segment150 is selectably deflected byAOD130 determines thereflective portion186 on which it impinges. Thus, a location in a two dimensional array of selectable locations, such as at secondvariable deflector assembly152, lies outside the plane of propagation.
• Reference is now made to FIG. 3 which is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2.[0122]Laser pulses224 in a laser pulse timing graph226 are designated234,236 and238 respectively.Laser122 typically compriseslaser pulses224 which are spaced time. Control signals244,246 and248 are shown belowlaser pulses234,236 and238 respectively. The control signals244-248, for controlling the generation of thepulse138 are shown being fed into atransducer252 associated with anAOD260.AOD260 typically corresponds toAOD130 in FIG. 2. Acoustic wave, corresponding to control signals264-268 are shown inAOD260.Acoustic wave264 corresponds to controlsignal244,acoustic wave266 corresponds to controlsignal246 andacoustic wave268 corresponds to controlsignal244. For the purposes of simplicity of illustration, only a part ofAOD260 is shown for each oflaser pulses224.
• At a moment in time, corresponding to the emission of a[0123]laser pulse224, aninput laser beam270 impinges on theAOD260. The acoustic waves264-268 respectively causelaser beam270 to be segmented into beam segments, generally designated250, each of which is deflected at an angle of deflection which is functionally related to corresponding frequencies in acoustic waves264-268.
• First, second and third reflector elements,[0124]280,282 and284 respectively, corresponding to beam steeringreflector elements154 in FIG. 2, are shown below each of theAODs260. At a time corresponding to eachlaser pulse224, abeam segment250 is deflected to impinge on one of thereflector elements280,282 and284.
• FIG. 3 also shows with particularity the timing relationship between[0125]laser pulses224, operation ofAOD260 as a dynamic beam deflector having a duty cycle which is faster than the pulse repetition rate represented bypulses224, and operation ofreflector elements280,282 and284, having a duty cycle which is slower than the pulse repetition rate
• As previously noted, the reconfiguration time required to introduce a different acoustic wave into[0126]AOD260 is less than the time separation betweenpulses234. Thus, the respective waveforms of control signals244-248, and the respective waveforms of acoustic waves264-268 are each different thereby resulting in the selectable deflection ofbeam segments250 for each ofpulses224. It is noted however, that in the sequentially providedcontrol signals244 and246, and corresponding sequentially providedacoustic waves264 and266, the frequency in a firstspatial wave segment290 changes, while the frequency in a secondspatial wave segment292 remains unchanged.
• For both[0127]pulses234 and236, afirst beam segment294, corresponding to the secondspatial wave segment292, impinges onthird reflector element284.Reflector element284 is held stationary to receive thefirst beam segment294 for each ofpulses234 and236 respectively.
• A[0128]second beam segment296 is deflected in a first direction by firstspatial segment290 ofacoustic wave264, while athird beam segment298 is deflected in a different direction by firstspatial segment290 inacoustic wave266.
• Moreover, for[0129]pulses234 and236, neither of thebeam segments250 impinge on first andsecond deflector elements280 and282 respectively, but rather are directed to other deflector elements which are not shown. The time interval betweenpulses234 and236 is utilized to spatially reposition the first andsecond reflector elements280 and282.
• A new wave form of[0130]acoustic wave268 is formed inAOD260 to selectably split and deflectbeam270 atpulse238. As seen belowpulse238, none of thebeam segments250 impinge onfirst reflector element280 orthird reflector element284.
• A[0131]fourth beam segment300 impinges ondeflector element282.Beam segment300 is deflected in a direction that is functionally related to the frequency ofacoustic wave268 in secondspatial segment292. It is noted that the frequency in the secondspatial segment292 ofacoustic wave268 has been changed relative to theacoustic waves264 and266. Afifth beam segment302 is deflected in a direction that is functionally related to the frequency ofacoustic wave268 in firstspatial segment290.
• It is thus noted from the foregoing that the repositioning time of reflector elements[0132]280-284, such as beam steeringreflector elements154, is slower than a time separation betweenpulses224. Nevertheless, because the reconfiguration time of dynamic beam splitter is less than the time separation between pulses, any redundant reflector elements can be repositioned over a time interval greater than the separation between pulses. A reflector element that is in a suitable position can then be selected in a time interval that is less than the time separation between pulses.
• Reference is now made to FIG. 4 which is a flow diagram[0133]320 of a methodology for manufacturing electrical circuits in accordance with an embodiment of the invention. The methodology is described in the context of a process for forming micro vias in a multi layered printed circuit board substrate having a metal foil layer overlaying a dielectric substrate.
• The presently described methodology for manufacturing electrical circuits employs at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction. The beams are selectably directed to a plurality of independently positionable beam steering elements. Some of the beam steering elements receive the beams and direct them to selectable locations on a printed circuit board substrate to be micro-machined.[0134]
• Suitable apparatus for generating a plurality of beams propagating in dynamically selectable directions is the[0135]laser micro-machining apparatus10 is described with reference to FIG. 1A, and lasermicro-machining apparatus110 described with reference to FIG. 2. Thus beams propagating in dynamically selectable directions may be produced, for example, by passing one or more beams output by at least one Q-switched laser through at least one dynamic beam splitting and deflecting device. Optionally, several separately generated beams may be treated separately or in combination.
• In accordance with an embodiment of the invention, the dynamic deflector device is operable to selectably provide at least one metal machining beam-segment. In an embodiment of the invention, a beam splitting functionality is provided by the dynamic deflector, although a separate beam splitting device providing a selectable beam splitting function may be provided. The metal-machining beam-segment has an energy density that is suitable to remove a portion of the metal foil layer, for example by burning or by ablation.[0136]
• Each metal machining beam segment is dynamically deflected to impinge on a beam steering device, such as a[0137]tiltable reflector element154 in FIG. 2. The beam steering device is suitably positioned so that the metal machining beam segment is steered to a selectable location on a PCB substrate whereat a portion of the metal foil is removed to expose the underlying dielectric substrate.
• While a metal machining beam is removing a portion of the metal foil at a first location, beam steering devices which are not being presently used may be suitably repositioned for removal of metal foil at other selectable locations. Thus, each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device.[0138]
• Removal of portions of the metal foil continues at selectable locations until metal foil is removed for a desired plurality of locations.[0139]
• In a subsequent operation, the dynamic deflector device is provide at least one dielectric machining beam-segment having an energy property that is different from the metal machining beam-segment. A beam splitting functionality may be provided, for example by the dynamic deflector or by a suitable beam splitter device. For example, dielectric machining beam segment has a lower energy density than a metal machining beam-segment. The energy property of the dielectric machining beam segment is suitable to remove a portion of the dielectric layer, for example by burning or by ablation, but is not suitable to remove a portion of the metal foil.[0140]
• In accordance with an embodiment of the invention, the respective energy densities of[0141]beam segments50 and150 are controlled by splittinglaser beam22 and122 into a selectable number ofbeam segments50 and150, and by maintaining the diameter of the resultingbeam segment150 irrespective of the number of beam segments.
• Each dielectric machining beam segment is dynamically deflected to impinge on a beam steering device, such as a[0142]tiltable reflector element154 in FIG. 2. The beam steering device is suitably positioned so that each dielectric machining beam segment is steered to a selectable location whereat a portion of the metal foil has already been removed, to expose of the dielectric layer, and a desired portion of the dielectric is removed.
• While a dielectric machining beam is removing a portion of the dielectric at a first set of locations, beam steering devices which are not being presently used may be suitably repositioned for removal of dielectric at other selectable locations. Thus, each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device. It is appreciated that because a reduced energy density is required to remove dielectric,[0143]beam122 may be divided into a greater number of dielectric machining beam segments, resulting in a greater system throughput for removing dielectric as compared to removing metal foil.
• Removal of dielectric continues at selectable locations until the dielectric is removed for substantially all of the locations at which metal foil was previously removed. Once this operation is completed, a substrate can be repositioned for micro-machining of a subsequent portion thereof.[0144]
• As noted above, in accordance with an embodiment of the present invention, an AOD is configured and operative to dynamically and selectably split an incoming beam of radiation into a selectable number of beam segments, each of which is dynamically directed in a selectable direction.[0145]
• Reference is now made to FIG. 5, which is an illustration of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2.[0146]Laser pulses424 in a laserpulse timing graph426 are designated434,436 and438 respectively.Laser pulses424 define, for example,beam122 in FIG. 2 and are mutually separated in time.
• Control signals[0147]444,446 and448 are shown above laserpulse timing graph426, corresponding topulses434,436 and438 respectively. The control signals444-448 are shown being fed into atransducer452 associated with anAOD460, corresponding toAOD130 in FIG. 2. Acoustic waves,464,466 and468, corresponding to control signals444-448 are shown inAOD460.Acoustic wave464 corresponds to controlsignal444,acoustic wave466 corresponds to controlsignal446 andacoustic wave468 corresponds to controlsignal448.
• At a moment in time corresponding to the emission of a[0148]laser pulse424, aninput laser beam470 impinges on the onAOD460. The acoustic waves464-468 respectively causelaser beam470 to be segmented into a selectable number of beam segments, generally designated450. Each of thebeam segments450 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion of acoustic waves464-468.
• FIG. 5 shows with particularity the timing relationship between[0149]laser pulses424 and operation ofAOD460 as a dynamic beam splitter which is operative to split aninput beam470 into a selectable number ofbeam segments450 at a duty cycle which is less than the pulse repetition rate represented bypulses424.
• A[0150]control signal444 having a generally uniform frequency generates anacoustic wave464 inAOD460 also having a generally uniform frequency. When thebeam470 associated withpulse434 impinges onAOD460, a single beam-segment480 is output. It is noted that a part ofbeam470 may not be deflected. This is ignored for the purposes of simplicity of illustration.
• A[0151]control signal446 having a six spatially distinct segments482-492, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave466 inAOD460 also having six spatiallydistinct segments502,504,506,508,510 and512. Each of the spatially distinct segments502-512 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment. When thebeam470 associated withpulse436 impinges onAOD460, six distinct beam-segments522-532 are output. It is noted that a part ofbeam470 may not be deflected. This is ignored for the purposes of simplicity of illustration.
• A[0152]control signal448 having a two spatiallydistinct segments542 and544, each segment having a generally uniform frequency and a frequency which is different from its neighboring segment, generates anacoustic wave468 inAOD460 also having two spatiallydistinct segments562 and564. Each of the spatiallydistinct segments562 and564 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from its neighboring segment. When thebeam470 associated withpulse438 impinges onAOD460, two distinct beam-segments572 and574 are output. It is noted that a part ofbeam470 may not be deflected. This is ignored for the purposes of simplicity of illustration.
• In the embodiment seen in FIG. 5, the division of a[0153]beam470 into different numbers of beam-segments450 results inbeam segments450 each having different a different width. In such embodiment it may be desirable to provide suitable optics downstream ofAOD460 in order to control the size of a spot impinging on asubstrate14, resulting from each different number of beam-segments450, for example to ensure a uniform diameter.
• Reference is now made to FIG. 6, which is an illustration of varying the angle of multiple laser beams produced by a dynamic beam deflector in the system and functionality of FIGS. 1A and 2.[0154]Laser pulses624 in a laserpulse timing graph626 are designated634 and636 respectively.Laser pulses624 define, for example, beam22 in FIG. 1 andbeam122 in FIG. 2, and are mutually separated in time.
• Control signals[0155]644 and646 are shown above laserpulse timing graph626, corresponding topulses634 and636 respectively. The control signals644 and646 are shown being fed into atransducer652 associated with anAOD660, corresponding toAOD30 in FIG. 1 andAOD130 in FIG. 2. Acoustic waves, corresponding to controlsignals644 and646 are shown inAOD660.Acoustic wave664 corresponds to controlsignal644, andacoustic wave666 corresponds to controlsignal646.
• At a moment in time corresponding to the emission of a[0156]laser pulse624, aninput laser beam670 impinges on the onAOD660. Theacoustic waves664 and666 respectively causelaser beam670 to be segmented into a selectable number of beam segments, generally designated650, as described with reference to FIG. 5. Each of thebeam segments650 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion ofacoustic waves664666.
• FIG. 6 shows with particularity the timing relationship between[0157]laser pulses634 and operation ofAOD660 as a dynamic beam splitter which is operative to split theinput beam670 into a selectable number ofbeam segments650, and to separately deflect thebeam segments650 at distinct angles of deflection, all at a duty cycle which is less than the pulse repetition rate represented bypulses624.
• A[0158]control signal644 having a six spatially distinct segments682-692, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave664 inAOD660 also having six spatiallydistinct segments702,704,706,708,710 and712. Each of the spatially distinct segments702-712 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment. When thebeam670 associated withpulse634 impinges onAOD660, six distinct beam-segments722-732 are output. It is noted that the respective frequencies in each of segments702-712 progressively increases, relative to the previous segment, and as a result the angle at which beams722-732 are deflected increases in a corresponding manner.
• A[0159]control signal646 having a six spatially distinct segments742-752, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave666 inAOD660 also having six spatiallydistinct segments762,764,766,768,770, and772 respectively. Each of the spatially distinct segments762-772 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment. When thebeam670 associated withpulse636 impinges onAOD660, six distinct beam-segments782-790 are output, in which beam-segment782 corresponds toacoustic wave segment762, beam-segment784 corresponds toacoustic wave segment764, beam-segment786 corresponds toacoustic wave segment766, beam-segment788 corresponds toacoustic wave segment768, beam-segment790 corresponds toacoustic wave segment770, and beam-segment792 corresponds to acoustic wave segment792.
• It is seen that the arrangement of respective frequencies in each of acoustic wave segments[0160]762-772 does not change in an orderly manner. As a result some of beams782-790 overlap. This enables beams782-790 to be selectably deflected to impinge, for example on a mapping element60 (FIG. 1). It is further noted that the change in angles occurring in beams782-792, relative to beams722-732 results from the reconfiguration of the acoustic wave inAOD660. Accordingly, the change in configuration of the acoustic wave, fromacoustic wave664 toacoustic wave666, is carried out in a period of time that is less than the time separation betweenpulses634 and636,
• Reference is now made to FIG. 7 which is an illustration of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter, by modulating, for example control signals[0161]36, including multiple at least partially superimposed different frequency components, in the system and functionality of FIGS. 1A and 2. Acontrol signal844 is shown being fed into atransducer852, associated with anAOD860, corresponding toAOD30 in FIG. 1 andAOD130 in FIG. 2. Anacoustic wave864, corresponding to controlsignal844 is shown inAOD860.
• [0162]Control signal844 corresponds to a mutual superimposition of three control signals (not shown) each having a different frequency. It is noted that a greater or lesser number of control signals may be superimposed, and that superimposition of three control signals is chosen merely for the purposes of simplicity of illustration.
• At a moment in time corresponding to the emission of a laser pulse in a[0163]pulsed laser beam22 or122, aninput laser beam870 impinges on the onAOD860 and is split into threebeam segments880,882 and884. Each of the beam segments880-884 has a generally uniform width generally related to the width ofacoustic wave864 inAOD860. Each of thebeam segments880,882 and884 is deflected at an angle functionally related to one of the frequency components isacoustic wave864, and at least partially mutually overlap.
• Reference is now made to FIG. 8 which is an illustration of varying the energy distribution among multiple laser beam segments produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2. Typically, due to the Gaussian energy profile of typical laser beams, a uniform spatial splitting of the beam results in beam segments, such as[0164]beam segments150 in FIG. 2, which do not have a uniform energy property. It is appreciated, that a beam shaping element, located upstream of the dynamic beam splitter, may be provided to form a beam, such asbeam22 or122, which has a non-Gaussian, preferably top-hat shaped energy profile. In accordance with an embodiment of the invention, presently described, sub-beams having a generally uniform energy characteristic that is formed without using an external beam shaping element. Additionally, an energy characteristic of the sub beams may be changed in a time which is less than a separation time between pulses in a pulsed laser.
• In FIG. 8,[0165]laser pulses924 in a laserpulse timing graph926 are designated934 and936 respectively.Laser pulses924 define, for example,beam122 in FIG. 2 and are mutually separated in time. Aninput energy graph940 indicates a typical Gaussian energy characteristic, in one dimension, of a laser beam such asbeam122.
• Control signals[0166]944 and946 are shown above laserpulse timing graph926, and correspond topulses934 and936 respectively. The control signals944 and946 are shown being fed into atransducer952 associated with anAOD960, corresponding toAOD30 in FIG. 1 andAOD130 in FIG. 2. Acoustic waves, corresponding to controlsignals944 and946 are shown inAOD960.Acoustic wave964 corresponds to controlsignal944 andacoustic wave966 corresponds to controlsignal946.
• At a moment in time corresponding to the emission of a[0167]laser pulse924, aninput laser beam970 impinges on theAOD960. Theacoustic waves964 and966 respectively causelaser beam970 to be segmented into a selectable number of beam segments, generally designated950. Each of thebeam segments950 is deflected at an angle of deflection which is functionally related to a corresponding distinct frequency in a portion ofacoustic waves964 and966, and the width of beam segments is related to the width of a portion ofacoustic waves964 and966 which has a distinct frequency.
• It is seen in FIG. 8 that signal[0168]944 is divided into sixsegments945 which are not of equal width. The resultingacoustic wave964 thus is likewise formed of six segments which are not of equal width. Moreover, the respective widths of the resulting beam segments972-982 are also not equal.
• It is appreciated that the respective widths of[0169]segments945, can be dynamically arranged and modified to produce beam segments, which, although having different spatial widths, have a generally uniform energy characteristic. Thus the selectable division ofacoustic wave964 intonon-uniform segments945 produces a selectable energy characteristic of each beam972-982, indicated by the area underoutput energy graph984. For example, the dynamic splitting ofbeam970 can be such that a relatively small spatial section of a high energy portion ofbeam970 is used to producebeam segments976 and978, a relatively large spatial section of a low energy portion ofbeam970 is used to producebeam segments972 and982, and an intermediate size spatial portion ofbeam970 is used to producebeam segments974 and980. Energy uniformity is seen inhistogram990.
• Thus, energy uniformity of output beam segments may be controlled and made generally uniform by distributing energy among beam segments[0170]972-982, generally without attenuating the energy ofinput beam970. Moreover, energy uniformity may be controlled independently of the number ofbeam segments984 into whichbeam970 is split, or the direction of deflection of respective beam segments. In accordance with an embodiment of the invention, suitable optics (not shown) are provided downstream ofAOD960 in order to accommodate and control the respective diameters of beam-segments972-982, each of which have a different width, but generally uniform energy distribution.
• In FIG. 8 it is also seen that the energy distribution among beam segments[0171]972-982 may be varied betweenpulses924. Thus in the graphs associated withpulse936,segments1005 ofcontrol signal946 have been made generally uniform. As a result, the spatial width of each of thebeam segments950 resulting fromacoustic wave966 is generally uniform, however the energy distribution among the beam segments resulting from interaction ofacoustic wave966 andbeam970 is not uniform, as shown byhistogram1010.
• Uniformity of an energy characteristic among beam segments formed by an[0172]acoustic wave966 may be improved, for example by providing a beam shaping element (not shown) external toAOD960 and operative to shape the energy profile ofinput beam970. Alternatively, the power ofacoustic wave966 atvarious segments1015, represented by convention as an amplitude, may be varied. In generally an increase power ofacoustic wave966 results in a higher transmissivity through an AOD, namely a relatively greater portion of energy passes throughAOD960. Thus in order to providesub-beams950, and972-982 having a generally uniform energy characteristic, an energy characteristic of beam segments which are formed from a spatial portion of970 having a relatively high energy level may be attenuated by reducing thereat the power ofacoustic wave966.
• FIGS. 9A and 9B are illustrations of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2. As seen in FIGS. 9A and 9B a[0173]beam size modifier1120 is provided to selectably change the size of aninput beam1170 impinging on anAOD1130. The beam size modifier may be, for example, a beam expander, zoom lens or cylindrical telescope.
• As seen in FIG. 9A, a modified[0174]size beam1172 is output frombeam size modifier1120. In the example seen in FIG. 9A, the modifiedsize beam1172 impinges on only a portion ofAOD1130, thereby reducing an operative portion ofAOD1130. Acontrol signal1136 is provided to form anacoustic wave1138 inAOD1130, which in turn is operative to selectably split modifiedsize beam1172 into twobeam segments1150 each having, for example, a standardized modular size.
• As seen in FIG. 9B, a modified[0175]size beam1182 is output frombeam size modifier1120. In the example seen in FIG. 9B, the size ofbeam1182 is different frombeam1172, is substantially not modified respective ofbeam1170 and impinges on substantially and entire operative portion ofAOD1130. Acontrol signal1146 is provided to form anacoustic wave1148 inAOD1130, which in turn is operative to selectably splitbeam1182 into sixbeam segments1190. Each of beam segments have, for example, a standardized modular size corresponding to the size ofbeam segments1150.
• FIGS. 10A and 10B are an illustration of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIG. 9 in accordance with a preferred embodiment of the present invention. An[0176]array1200 of partially transmissive beam splitter elements1202-1212 is provided in cascade to produce a plurality of separated beam segments, which are provided to adynamic beam deflector1230.
• The transmissivity of each beam splitter element is determined as a function of its location relative to a last beam splitter element in the array. Thus, as seen in FIGS. 10A and 10B, a first[0177]beam splitter element1202 deflects 16.7% of the input beam, a secondbeam splitter element1204 deflects 20% of the input beam reaching it, a thirdbeam splitter element1206 deflects 25% of the input beam reaching it, a fourthbeam splitter element1208 deflects 33.3% of the input beam reaching it, a fifthbeam splitter element1210 deflects 50% of the input beam reaching it, and a sixth and lastbeam splitter element1212 deflects 100% of the input beam reaching it.
• As seen in FIG. 10A, all of the beam splitter elements[0178]1202-1212 are positioned in line to receive alaser input beam1222, and a plurality of sixdistinct beam segments1224, each having about 16.7% of the total energy ininput beam1222, are output to impinge on adynamic beam deflector1230. A spatially sectioned acoustic wave1238 is formed inAOD1230 and is operative to dynamically deflect each ofbeam segments1222, generally as described hereinabove.
• As seen in FIG. 10B, beam splitter elements[0179]1202-1208 are out of the optical path oflaser input beam1222, such thatbeam1222 first impinges onbeam splitter element1210. Only twodistinct beam segments1226, each having about 50% of the total energy ininput beam1222, are output to impinge on adynamic beam deflector1230. A spatially sectioned acoustic wave1238 is formed inAOD1230 and is operative to dynamically deflect each ofbeam segments1222, generally as described hereinabove.
• It is noted, from the foregoing description with respect to FIGS.[0180]5-10B, that an a dynamic deflector comprises an AOD and is operative to perform at least on of the following functionalities: selectably split an input beam into a selectable number of output beams, to select an energy characteristic of the output beams, and to direct the output beams each at a selectable angle.
• It is appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the present invention includes modifications and variations thereof which would occur to a person of skill in the art upon reading the foregoing description and which are not in the prior art.[0181]

Claims (728)

What is claimed is:

1. A system for delivering energy to a substrate, comprising:

at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction; and

a plurality of independently positionable beam steering elements, some of said beam steering elements receiving said plurality of beams and directing them to selectable locations on said substrate.

2. The system claimed inclaim 1 and wherein said at least one dynamically directable source of radiant energy comprises a pulsed source of radiant energy outputting a plurality of beams each defined by pulses of radiant energy.

3. The system claimed inclaim 1 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.

4. The system claimed inclaim 3 and wherein said at least one pulsed laser is a Q-switched laser.

5. The system claimed inclaim 1 and wherein said at least one dynamically directable source of radiant energy comprises a Q-switched laser.

6. The system claimed inclaim 1 and wherein said at least one dynamically directable source of radiant energy comprises a beam splitter receiving a beam of radiant energy and splitting said beam into a selectable number of sub-beams.

7. The system claimed inclaim 1 and wherein said at least one dynamically directable source of radiant energy comprises a beam splitter receiving a beam of radiant energy, splitting said beam into a plurality of sub-beams and directing said sub-beams each selectable directions.

8. The system claimed inclaim 6 and wherein said beam splitter is operative to direct said sub-beams in selectable directions.

9. The system claimed inclaim 8 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

10. The system claimed inclaim 9 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

11. The system claimed inclaim 9 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

12. The system claimed inclaim 10 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

13. The system claimed inclaim 12 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

14. The system claimed inclaim 13 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

15. The system claimed inclaim 13 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

16. The system claimed inclaim 2 and wherein:

said at least one dynamically directable source of radiant energy comprises a dynamically configurable beam splitter receiving a beam of radiant energy and splitting said beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

17. The system claimed inclaim 2 and wherein:

said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

18. The system claimed inclaim 16 and wherein:

said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

19. The system claimed inclaim 3 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

20. The system claimed inclaim 18 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

21. The system claimed inclaim 19 and wherein said at least one actuator comprises a piezoelectric device.

22. The system claimed inclaim 19 and wherein said at least one actuator comprises a MEMs device.

23. The system claimed inclaim 18 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.

24. The system claimed inclaim 6 and wherein said selectable number of sub-beams all lie in a plane.

25. The system claimed inclaim 1 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.

26. The system claimed inclaim 25 and further comprising an array of fixed deflectors optically interposed between said at least one dynamically directable source of radiant energy and said plurality of independently positionable beam steering elements.

27. The system claimed inclaim 1 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at said locations.

28. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a beam of radiation;

a beam splitter operative to split said beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction; and

a plurality of independently positionable beam steering elements, some of said steering elements receiving said plurality of sub-beams and directing them to selectable locations on said substrate.

29. The system claimed inclaim 28 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.

30. The system claimed inclaim 28 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

31. The system claimed inclaim 30 and wherein said at least one pulsed laser is a Q-switched laser.

32. The system claimed inclaim 28 and wherein said at least one source of radiant energy comprises a Q-switched laser.

33. The system claimed inclaim 28 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.

34. The system claimed inclaim 33 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

35. The system claimed inclaim 34 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

36. The system claimed inclaim 34 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

37. The system claimed inclaim 35 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

38. The system claimed inclaim 37 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

39. The system claimed inclaim 38 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

40. The system claimed inclaim 38 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

41. The system claimed inclaim 29 and wherein:

said beam splitter comprises a dynamically configurable beam splitter receiving said beam;

said plurality of sub-beams is a selectable number of sub-beams;

said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

42. The system claimed inclaim 29 and wherein:

said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

43. The system claimed inclaim 41 and wherein:

said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

44. The system claimed inclaim 30 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

45. The system claimed inclaim 43 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

46. The system claimed inclaim 44 and wherein said at least one actuator comprises a piezoelectric device.

47. The system claimed inclaim 44 and wherein said at least one actuator comprises a MEMs device.

48. The system claimed inclaim 43 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.

49. The system claimed inclaim 33 and wherein said selectable number of sub-beams all lie in a plane.

50. The system claimed inclaim 28 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.

51. The system claimed inclaim 50 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.

52. The system claimed inclaim 28 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at said locations.

53. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a beam of radiation; and

a beam splitter disposed between said source of radiant energy and said substrate, said beam splitter operative to split said beam into a selectable plurality of sub-beams.

54. The system claimed inclaim 53 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.

55. The system claimed inclaim 53 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

56. The system claimed inclaim 55 and wherein said at least one pulsed laser is a Q-switched laser.

57. The system claimed inclaim 53 and wherein said at least one source of radiant energy comprises a Q-switched laser.

58. The system claimed inclaim 53 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.

59. The system claimed inclaim 58 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

60. The system claimed inclaim 59 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines the number of said plurality of sub-beams.

61. The system claimed inclaim 59 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

62. The system claimed inclaim 60 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

63. The system claimed inclaim 62 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

64. The system claimed inclaim 63 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

65. The system claimed inclaim 63 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

66. The system claimed inclaim 54 and wherein:

said beam splitter comprises a dynamically configurable beam splitter receiving said beam;

said beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

67. The system claimed inclaim 54 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein:

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

68. The system claimed inclaim 66 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein:

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

69. The system claimed inclaim 55 and also comprising:

a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.

70. The system claimed inclaim 68 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

71. The system claimed inclaim 69 and wherein said at least one actuator comprises a piezoelectric device.

72. The system claimed inclaim 69 and wherein said at least one actuator comprises a MEMs device.

73. The system claimed inclaim 68 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.

74. The system claimed inclaim 60 and wherein said selectable number of sub-beams all lie in a plane.

75. The system claimed inclaim 67 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.

76. The system claimed inclaim 75 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.

77. The system claimed inclaim 67 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.

78. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a beam of radiation; and

an opto-electronic multiple beam generator disposed between said source of radiant energy and said substrate and being operative to generate at least two sub-beams from said beam and to select an energy density characteristic of each sub-beam.

79. The system claimed inclaim 78 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.

80. The system claimed inclaim 78 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

81. The system claimed inclaim 80 and wherein said at least one pulsed laser is a Q-switched laser.

82. The system claimed inclaim 78 and wherein said at least one source of radiant energy comprises a Q-switched laser.

83. The system claimed inclaim 78 and wherein said opto-electronic multiple beam generator is operative to generate a selectable number of sub-beams.

84. The system claimed inclaim 78 and wherein said opto-electronic multiple beam generator is operative to generate a plurality of sub-beams and to direct each of said sub-beams in a selectable direction.

85. The system claimed inclaim 83 and wherein said opto-electronic multiple beam generator is operative to direct each of said sub-beams in a selectable direction.

86. The system claimed inclaim 85 and wherein said opto-electronic multiple beam generator comprises an acousto-optical deflector whose operation is governed by a control signal.

87. The system claimed inclaim 86 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

88. The system claimed inclaim 86 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

89. The system claimed inclaim 87 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

90. The system claimed inclaim 89 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

91. The system claimed inclaim 90 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

92. The system claimed inclaim 90 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

93. The system claimed inclaim 79 and wherein:

said opto-electronic multiple beam generator comprises a dynamically configurable opto-electronic multiple beam generator generating a selectable number of sub-beams,

said dynamically configurable opto-electronic multiple beam generator being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

94. The system claimed inclaim 79 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

95. The system claimed inclaim 93 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

96. The system claimed inclaim 80 and also comprising:

a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.

97. The system claimed inclaim 95 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

98. The system claimed inclaim 96 and wherein said at least one actuator comprises a piezoelectric device.

99. The system claimed inclaim 96 and wherein said at least one actuator comprises a MEMs device.

100. The system claimed inclaim 95 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.

101. The system claimed inclaim 83 and wherein said selectable number of sub-beams all lie in a plane.

102. The system claimed inclaim 94 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.

103. The system claimed inclaim 102 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.

104. The system claimed inclaim 94 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.

105. A system for micromachining a substrate, comprising:

at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation; and

a multiple beam, selectable and changeable angle output beam splitter disposed between said source of radiant energy and said substrate and being operative to output a plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.

106. The system claimed inclaim 105 and wherein said at least one source of pulsed radiant energy comprises at least one pulsed laser and wherein said pulsed beam of radiation includes a pulsed laser beam.

107. The system claimed inclaim 106 and wherein said at least one pulsed laser is a Q-switched laser.

108. The system claimed inclaim 105 and wherein said at least one source of pulsed radiant energy comprises a Q-switched laser.

109. The system claimed inclaim 105 and wherein said plurality of sub-beams includes a selectable number of sub-beams.

110. The system claimed inclaim 105 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.

111. The system claimed inclaim 109 and wherein said beam splitter is operative to direct said sub-beams in selectable directions.

112. The system claimed inclaim 111 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

113. The system claimed inclaim 112 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

114. The system claimed inclaim 112 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

115. The system claimed inclaim 113 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

116. The system claimed inclaim 115 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

117. The system claimed inclaim 116 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

118. The system claimed inclaim 116 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

119. The system claimed inclaim 105 and wherein:

said beam splitter comprises a dynamically configurable beam splitter receiving said pulsed beam of radiation and splitting said beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said temporal pulse separation is greater than said reconfiguration time duration.

120. The system claimed inclaim 105 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and wherein:

said temporal pulse separation is less than said redirection time duration.

121. The system claimed inclaim 119 and also comprising:

a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and wherein:

said temporal pulse separation is less than said redirection time duration.

122. The system claimed inclaim 106 and also comprising:

a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.

123. The system claimed inclaim 121 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

124. The system claimed inclaim 122 and wherein said at least one actuator comprises a piezoelectric device.

125. The system claimed inclaim 122 and wherein said at least one actuator comprises a MEMs device.

126. The system claimed inclaim 121 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.

127. The system claimed inclaim 109 and wherein said selectable number of sub-beams all lie in a plane.

128. The system claimed inclaim 120 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.

129. The system claimed inclaim 128 and further comprising an array of fixed deflectors optically interposed between said at least one source of pulsed radiant energy and said plurality of independently positionable beam steering elements.

130. The system claimed inclaim 120 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.

131. A system for micromachining a substrate, comprising:

at least one source of pulsed radiant energy providing a pulsed beam of radiation said pulsed beam including multiple pulses separated by a temporal pulse separation;

a beam splitter disposed between said source of radiant energy and a substrate and being operative to output a plurality of sub-beams at selectable angles which are changeable; and

a plurality of selectable spatial orientation deflectors, ones of said selectable spatial orientation deflectors being operative to change a spatial orientation in an amount of time that is greater than said temporal pulse separation, some of said spatial orientation deflectors being arranged to receive said sub-beams and to direct said sub-beams to said substrate.

132. The system claimed inclaim 131 and wherein said at least one source of pulsed radiant energy comprises at least one pulsed laser and wherein said pulsed beam of radiation includes at least one pulsed laser beam.

133. The system claimed inclaim 132 and wherein said at least one pulsed laser is a Q-switched laser.

134. The system claimed inclaim 131 and wherein said at least one source of pulsed radiant energy comprises a Q-switched laser.

135. The system claimed inclaim 131 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.

136. The system claimed inclaim 131 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

137. The system claimed inclaim 136 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

138. The system claimed inclaim 136 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable angles of said sub-beams.

139. The system claimed inclaim 137 and wherein said acoustic wave also determines said selectable angles of said sub-beams.

140. The system claimed inclaim 139 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

141. The system claimed inclaim 140 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

142. The system claimed inclaim 140 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

143. The system claimed inclaim 131 and wherein:

said beam splitter comprises a dynamically configurable beam splitter receiving said pulsed beam of radiation and splitting said pulsed beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and angle of said sub-beams within a reconfiguration time duration; and

said temporal pulse separation is greater than said reconfiguration time duration.

144. The system claimed inclaim 131 and also comprising:

said plurality of selectable spatial orientation deflectors being capable of changing the angle of said sub-beams within a redirection time duration; and

said temporal pulse separation is less than said redirection time duration.

145. The system claimed inclaim 143 and wherein:

said plurality of selectable spatial orientation deflectors being capable of changing the angle of said sub-beams within a redirection time duration; and

said temporal pulse separation is less than said redirection time duration.

146. The system claimed inclaim 132 and wherein each of said plurality of selectable spatial orientation deflectors comprises a reflector mounted on at least one selectably tilting actuator.

147. The system claimed inclaim 145 and wherein each of said plurality of selectable spatial orientation deflectors comprises a reflector mounted on at least one selectably tilting actuator.

148. The system claimed inclaim 146 and wherein said at least one actuator comprises a piezoelectric device.

149. The system claimed inclaim 146 and wherein said at least one actuator comprises a MEMs device.

150. The system claimed inclaim 145 and wherein said plurality of selectable spatial orientation deflectors includes a number of selectable spatial orientation deflectors which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of selectable spatial orientation deflectors while others of said plurality of said selectable spatial orientation deflectors are being repositioned.

151. The system claimed inclaim 135 and wherein said selectable number of sub-beams all lie in a plane.

152. The system claimed inclaim 131 and wherein said plurality of selectable spatial orientation deflectors comprises a two dimensional array of selectable spatial orientation deflectors.

153. The system claimed inclaim 152 and further comprising an array of fixed deflectors optically interposed between said at least one source of pulsed radiant energy and said plurality of selectable spatial orientation deflectors.

154. The system claimed inclaim 131 wherein said selectable spatial orientation deflectors are operative to direct said sub-beams of radiation to remove a portion of said substrate at said locations.

155. A system for micromachining a substrate, comprising:

at least one source of radiant energy providing a beam of radiation;

a beam splitter operative to split said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number; and

at least one beam steering element receiving at least one output beam and directing said at least one output beam to micro-machine a portion of said substrate.

156. The system claimed inclaim 155 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said output beams is defined by pulses of radiant energy.

157. The system claimed inclaim 155 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

158. The system claimed inclaim 157 and wherein said at least one pulsed laser is a Q-switched laser.

159. The system claimed inclaim 155 and wherein said at least one source of radiant energy comprises a Q-switched laser.

160. The system claimed inclaim 155 and wherein said beam splitter is operative to direct each of said output beams in a selectable direction.

161. The system claimed inclaim 160 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

162. The system claimed inclaim 161 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of output beams.

163. The system claimed inclaim 161 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said output beams.

164. The system claimed inclaim 162 and wherein said acoustic wave also determines said selectable directions of said output beams.

165. The system claimed inclaim 164 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

166. The system claimed inclaim 165 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding output beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

167. The system claimed inclaim 165 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding output beams.

168. The system claimed inclaim 156 and wherein:

said beam splitter comprises a dynamically configurable beam splitter capable of changing at least one of the number and direction of said output beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

169. The system claimed inclaim 156 and wherein:

said at least one beam steering element is capable of changing the direction of said output beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

170. The system claimed inclaim 168 and wherein:

said at least one beam steering element is capable of changing the direction of said output beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

171. The system claimed inclaim 157 and wherein each of said at least one beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

172. The system claimed inclaim 170 and wherein each of said at least one beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.

173. The system claimed inclaim 171 and wherein said at least one actuator comprises a piezoelectric device.

174. The system claimed inclaim 171 and wherein said at least one actuator comprises a MEMs device.

175. The system claimed inclaim 170 and wherein said at least one beam steering element includes a number of beam steering elements which exceeds the number of output beams included in said selectable number of output beams and wherein at least some of said selectable number of output beams are directed to at least some of said at least one beam steering elements while others of said at least one beam steering elements are being repositioned.

176. The system claimed inclaim 155 and wherein said selectable number of output beams all lie in a plane.

177. The system claimed inclaim 155 and wherein said at least one beam steering element comprises a two dimensional array of beam steering elements.

178. The system claimed inclaim 177 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said at least one beam steering element.

179. The system claimed inclaim 155 wherein said at least one beam steering element is operative to direct said output beams to remove said portion of said substrate.

180. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane; and

a plurality of deflectors receiving said plurality of beams and deflecting at least some of said beams to predetermined locations outside said plane.

181. The system claimed inclaim 180 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said plurality of beams is defined by pulses of radiant energy.

182. The system claimed inclaim 180 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.

183. The system claimed inclaim 182 and wherein said at least one pulsed laser is a Q-switched laser.

184. The system claimed inclaim 180 and wherein said at least one source of radiant energy comprises a Q-switched laser.

185. The system claimed inclaim 180 and wherein said plurality of beams comprises a selectable number of beams.

186. The system claimed inclaim 180 and wherein said at least one source of radiant energy is operative to direct each of said plurality of beams in a selectable direction.

187. The system claimed inclaim 185 and wherein said at least one source of radiant energy is operative to direct each of said plurality of beams in a selectable direction.

188. The system claimed inclaim 187 and wherein at least one of said plurality of deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.

189. The system claimed inclaim 188 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.

190. The system claimed inclaim 188 and wherein- said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.

191. The system claimed inclaim 189 and wherein said acoustic wave also determines said selectable directions of said beams.

192. The system claimed inclaim 191 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

193. The system claimed inclaim 192 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

194. The system claimed inclaim 192 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.

195. The system claimed inclaim 181 and wherein:

said at least one source of radiant energy being capable of changing at least one of the number and direction of said plurality of beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

196. The system claimed inclaim 181 and wherein:

said plurality of deflectors being capable of changing the direction of said plurality of beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

197. The system claimed inclaim 195 and wherein:

said plurality of deflectors being capable of changing the direction of said plurality of beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

198. The system claimed inclaim 182 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

199. The system claimed inclaim 197 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

200. The system claimed inclaim 198 and wherein said at least one actuator comprises a piezoelectric device.

201. The system claimed inclaim 198 and wherein said at least one actuator comprises a MEMs device.

202. The system claimed inclaim 197 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.

203. The system claimed inclaim 185 and wherein said selectable number of beams all lie in a plane.

204. The system claimed inclaim 180 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.

205. The system claimed inclaim 204 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of deflectors.

206. The system claimed inclaim 180 wherein said deflectors are operative to direct each of said plurality of beams of radiation to remove a portion of said substrate at said locations.

207. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a beam of radiation;

a beam splitter operative to receive said beam and to output a plurality of sub-beams propagating in a plane; and

a plurality of deflectors receiving said plurality of sub-beams and deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.

208. The system claimed inclaim 207 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said sub-beams is defined by pulses of radiant energy.

209. The system claimed inclaim 207 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

210. The system claimed inclaim 209 and wherein said at least one pulsed laser is a Q-switched laser.

211. The system claimed inclaim 207 and wherein said at least one source of radiant energy comprises a Q-switched laser.

212. The system claimed inclaim 207 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.

213. The system claimed inclaim 207 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.

214. The system claimed inclaim 212 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.

215. The system claimed inclaim 214 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.

216. The system claimed inclaim 215 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

217. The system claimed inclaim 215 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.

218. The system claimed inclaim 216 and wherein said acoustic wave also determines said selectable directions of said sub-beams.

219. The system claimed inclaim 218 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

220. The system claimed inclaim 219 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

221. The system claimed inclaim 219 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

222. The system claimed inclaim 208 and wherein:

said plurality of sub-beams is a selectable number of sub-beams;

said beam splitter comprises a dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

223. The system claimed inclaim 208 and wherein:

said plurality of deflectors being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

224. The system claimed inclaim 222 and wherein:

said plurality of deflectors being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

225. The system claimed inclaim 209 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

226. The system claimed inclaim 224 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

227. The system claimed inclaim 225 and wherein said at least one actuator comprises a piezoelectric device.

228. The system claimed inclaim 225 and wherein said at least one actuator comprises a MEMs device.

229. The system claimed inclaim 224 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.

230. The system claimed inclaim 212 and wherein said selectable number of sub-beams all lie in a plane.

231. The system claimed inclaim 207 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.

232. The system claimed inclaim 231 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of deflectors.

233. The system claimed inclaim 207 wherein said deflectors are operative to direct said plurality of sub-beams to remove a portion of said substrate at said locations.

234. A system for delivering energy to a substrate, comprising:

at least one source of radiant energy providing a plurality of beams of radiation;

a first plurality of selectably positionable deflectors; and

a second plurality of selectably positionable deflectors,

said first plurality of beams being directed onto said first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;

said second plurality of selectably positionable deflectors being selectably positioned during said first time interval; and

said first plurality of beams of radiation being directed onto said second plurality of selectable positionable deflectors during a second time interval for directing said plurality of beams onto a second plurality of locations.

235. The system claimed inclaim 234 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said plurality of beams is defined by pulses of radiant energy.

236. The system claimed inclaim 234 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.

237. The system claimed inclaim 236 and wherein said at least one pulsed laser is a Q-switched laser.

238. The system claimed inclaim 234 and wherein said at least one source of radiant energy comprises a Q-switched laser.

239. The system claimed inclaim 234 and wherein said plurality of beams comprises a selectable number of beams.

240. The system claimed inclaim 234 and wherein each of said plurality of beams is directed in a selectable direction.

241. The system claimed inclaim 239 and wherein each of said plurality of beams is directed in a selectable direction.

242. The system claimed inclaim 241 and wherein at least one of said first plurality of deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.

243. The system claimed inclaim 242 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.

244. The system claimed inclaim 242 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.

245. The system claimed inclaim 243 and wherein said acoustic wave also determines said selectable directions of said beams.

246. The system claimed inclaim 245 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

247. The system claimed inclaim 246 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

248. The system claimed inclaim 246 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.

249. The system claimed inclaim 235 and wherein:

said plurality of beams comprises a selectable number of beams;

said at least one source of radiant energy being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

250. The system claimed inclaim 235 and wherein:

said first plurality of selectably positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

251. The system claimed inclaim 249 and wherein:

said first plurality of selectably positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

252. The system claimed inclaim 236 and wherein each of said plurality of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.

253. The system claimed inclaim 251 and wherein each of said plurality of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.

254. The system claimed inclaim 252 and wherein said at least one actuator comprises a piezoelectric device.

255. The system claimed inclaim 252 and wherein said at least one actuator comprises a MEMs device.

256. The system claimed inclaim 251 and wherein said first plurality of selectably positionable deflectors includes a number of selectably positionable deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of selectably positionable deflectors while others of said plurality of said selectably positionable deflectors are being repositioned.

257. The system claimed inclaim 239 and wherein said selectable number of beams all lie in a plane.

258. The system claimed inclaim 234 and wherein said first plurality of selectably positionable deflectors comprises a two dimensional array of selectably positionable deflectors.

259. The system claimed inclaim 258 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of selectably positionable deflectors.

260. The system claimed inclaim 234 wherein said second plurality of selectably positionable deflectors are operative to direct said plurality of beams of radiation to remove a portion of said substrate at said second plurality of locations.

261. A system for delivering energy to a substrate, comprising:

at least one radiant beam source providing at least one beam of radiation;

at least first and second deflectors disposed to receive said at least one beam to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.

262. The system claimed inclaim 261 and comprising:

a deflector positioner associated with each deflector, each deflector positioner being operative to position the deflector associated therewith in a spatial orientation such that a beam impinging on the deflector is delivered to said substrate within a region which is at least partially overlapping with a corresponding region to which a beam impinging on a different deflector is delivered.

263. The system claimed inclaim 262 and wherein said at least one radiant beam source comprises a pulsed radiant beam source and said at least one beam is defined by pulses of radiant energy.

264. The system claimed inclaim 262 and wherein said at least one radiant beam source comprises at least one pulsed laser and wherein said at least one beam of radiation includes at least one pulsed laser beam.

265. The system claimed inclaim 264 and wherein said at least one pulsed laser is a Q-switched laser.

266. The system claimed inclaim 262 and wherein said at least one radiant beam source comprises a Q-switched laser.

267. The system claimed inclaim 262 and wherein said at least one beam comprises a selectable number of beams.

268. The system claimed inclaim 262 and wherein said at least one radiant beam source is operative to direct said at least one beam in a selectable direction.

269. The system claimed inclaim 267 and wherein said at least one radiant beam source is operative to direct said at least one beam in a selectable direction.

270. The system claimed inclaim 269 and wherein at least one of said at least first and second deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.

271. The system claimed inclaim 270 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.

272. The system claimed inclaim 270 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.

273. The system claimed inclaim 271 and wherein said acoustic wave also determines said selectable directions of said beams.

274. The system claimed inclaim 273 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

275. The system claimed inclaim 274 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

276. The system claimed inclaim 274 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.

277. The system claimed inclaim 263 and wherein:

said at least one beam comprises a selectable number of beams;

said radiant beam source being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

278. The system claimed inclaim 263 and wherein:

said at least first and second deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

279. The system claimed inclaim 277 and wherein:

said at least first and second deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

280. The system claimed inclaim 264 and wherein each of said at least first and second deflectors comprises a reflector mounted on at least one selectably tilting actuator.

281. The system claimed inclaim 279 and wherein each of said at least first and second deflectors comprises a reflector mounted on at least one selectably tilting actuator.

282. The system claimed inclaim 280 and wherein said at least one actuator comprises a piezoelectric device.

283. The system claimed inclaim 280 and wherein said at least one actuator comprises a MEMs device.

284. The system claimed inclaim 267 and wherein said selectable number of beams all lie in a plane.

285. The system claimed inclaim 262 and wherein said at least first and second deflectors comprise a two dimensional array of deflectors.

286. The system claimed inclaim 285 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said at least first and second deflectors.

287. The system claimed inclaim 262 wherein said at least first and second deflectors are operative to direct said at least one beam of radiation to remove a portion of said substrate at said partially overlapping locations.

288. Laser micro-machining apparatus, comprising:

at least one radiant beam source providing a plurality of radiation beams;

a plurality of independently positionable deflectors arranged to be disposed between said at least one radiant beam source and a substrate to be micro-machined, said plurality of independently positionable deflectors being operative to independently deliver said at least one radiation beam to selectable locations on said substrate; and

a focusing lens disposed between said at least one radiant beam source and said substrate, said focusing lens receiving said plurality of radiation beams and being operative to simultaneously focus said beams onto said selectable locations on said substrate.

289. The apparatus claimed inclaim 288 and wherein said at least one radiant beam source comprises a pulsed radiant beam source and each of said plurality of beams is defined by pulses of radiant energy.

290. The apparatus claimed inclaim 288 and wherein said at least one radiant beam source comprises at least one pulsed laser and wherein said plurality of radiation beams include at least one pulsed laser beam.

291. The apparatus claimed inclaim 290 and wherein said at least one pulsed laser is a Q-switched laser.

292. The apparatus claimed inclaim 288 and wherein said at least one radiant beam source comprises a Q-switched laser.

293. The apparatus claimed inclaim 288 and wherein said plurality of beams comprises a selectable number of beams.

294. The apparatus claimed inclaim 288 and wherein said at least one radiant beam source is operative to direct each of said plurality of beams in a selectable direction.

295. The apparatus claimed inclaim 293 and wherein said at least one radiant beam source is operative to direct each of said plurality of beams in a selectable direction.

296. The apparatus claimed inclaim 295 and wherein at least one of said independently positionable deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.

297. The apparatus claimed inclaim 296 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.

298. The apparatus claimed inclaim 296 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.

299. The apparatus claimed inclaim 297 and wherein said acoustic wave also determines said selectable directions of said beams.

300. The apparatus claimed inclaim 299 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

301. The apparatus claimed inclaim 300 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

302. The apparatus claimed inclaim 300 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.

303. The apparatus claimed inclaim 289 and wherein:

said plurality of beams comprises a selectable number of beams;

said at least one radiant beam source being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

304. The apparatus claimed inclaim 289 and wherein:

said plurality of independently positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

305. The apparatus claimed inclaim 303 and wherein:

said plurality of independently positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

306. The apparatus claimed inclaim 290 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

307. The apparatus claimed inclaim 305 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

308. The apparatus claimed inclaim 306 and wherein said at least one actuator comprises a piezoelectric device.

309. The apparatus claimed inclaim 306 and wherein said at least one actuator comprises a MEMs device.

310. The apparatus claimed inclaim 305 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.

311. The apparatus claimed inclaim 293 and wherein said selectable number of beams all lie in a plane.

312. The apparatus claimed inclaim 288 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.

313. The apparatus claimed inclaim 312 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable deflectors.

314. The apparatus claimed inclaim 288 wherein said independently positionable deflectors are operative to direct said beams of radiation to remove a portion of said substrate at said locations.

315. An acousto-optic device, comprising:

a source of radiant energy providing a beam of radiation along an optical axis;

an optical element receiving said beam; and

a transducer associated with said optical element, said transducer forming in said optical element an acoustic wave simultaneously having different acoustic frequencies, said optical element operative to output a plurality of sub-beams at different angles with respect to said optical axis.

316. The device claimed inclaim 315 and wherein said source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.

317. The device claimed inclaim 315 and wherein said source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.

318. The device claimed inclaim 317 and wherein said at least one pulsed laser is a Q-switched laser.

319. The device claimed inclaim 315 and wherein said source of radiant energy comprises a Q-switched laser.

320. The device claimed inclaim 315 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.

321. The device claimed inclaim 315 and wherein said different angles comprise selectable angles.

322. The device claimed inclaim 320 and wherein said different angles comprise selectable angles.

323. The device claimed inclaim 322 and wherein said transducer comprises an acousto-optical deflector whose operation is governed by a control signal.

324. The device claimed inclaim 323 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.

325. The device claimed inclaim 324 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

326. The device claimed inclaim 325 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

327. The device claimed inclaim 325 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.

328. The device claimed inclaim 316 and wherein:

said plurality of sub-beams comprises a selectable number of sub-beams;

said transducer being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

329. The device claimed inclaim 316 and wherein:

said transducer being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

330. The device claimed inclaim 328 and wherein:

said transducer being capable of changing the direction of said sub-beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

331. The device claimed inclaim 317 and wherein said transducer comprises a reflector mounted on at least one selectably tilting actuator.

332. The device claimed inclaim 330 and wherein said transducer comprises a reflector mounted on at least one selectably tilting actuator.

333. The device claimed inclaim 331 and wherein said at least one actuator comprises a piezoelectric device.

334. The device claimed inclaim 331 and wherein said at least one actuator comprises a MEMs device.

335. The device claimed inclaim 320 and wherein said selectable number of sub-beams all lie in a plane.

336. The device claimed inclaim 315 and further comprising an array of fixed deflectors optically interposed between said source of radiant energy and said optical element.

337. The device claimed inclaim 315 wherein said transducer is operative to direct said sub-beams to remove a portion of a substrate at specific locations.

338. A system for micro-machining a substrate, comprising:

a laser beam generator providing a laser beam;

a beam splitter receiving said laser beam and splitting said laser beam into a first number of output beams and a second number of output beams;

a first plurality of beam steering elements directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate; and

a second plurality of beam steering elements directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.

339. The system claimed inclaim 338 and wherein said laser beam generator is a Q-switched laser.

340. The system claimed inclaim 338 and wherein said first number of output beams comprises a selectable number of output beams.

341. The system claimed inclaim 338 and wherein said second number of output beams comprises a selectable number of output beams.

342. The system claimed inclaim 338 and wherein said first plurality of beam steering devices direct each of said first number of output beams in a selectable direction.

343. The system claimed inclaim 338 and wherein said second plurality of beam steering devices direct each of said second number of output beams in a selectable direction.

344. The system claimed inclaim 340 and wherein said first plurality of beam steering devices direct each of said first number of output beams in a selectable direction.

345. The system claimed inclaim 341 and wherein said second plurality of beam steering devices direct each of said second number of output beams in a selectable direction.

346. The system claimed inclaim 344 and wherein at least one of said first plurality of beam steering devices comprises an acousto-optical deflector whose operation is governed by a control signal.

347. The system claimed inclaim 346 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of output beams.

348. The system claimed inclaim 346 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said output beams.

349. The system claimed inclaim 347 and wherein said acoustic wave also determines said selectable directions of said output beams.

350. The system claimed inclaim 349 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.

351. The system claimed inclaim 350 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding output beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

352. The system claimed inclaim 350 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.

353. The system claimed inclaim 338 and wherein:

said first number of output beams comprises a selectable number of output beams;

said second number of output beams comprises a selectable number of output beams;

said beam splitter comprises a dynamically configurable beam splitter being capable of changing at least one of the number and direction of said output beams within a reconfiguration time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.

354. The system claimed inclaim 338 and wherein:

said first plurality of beam steering devices being capable of changing the direction of said first number of output beams within a redirection time duration;

said second plurality of beam steering devices being capable of changing the direction of said second number of output beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

355. The system claimed inclaim 353 and wherein:

said first plurality of beam steering devices being capable of changing the direction of said first number of output beams within a redirection time duration;

said second plurality of beam steering devices being capable of changing the direction of said second number of output beams within a redirection time duration; and

said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.

356. The system claimed inclaim 338 and wherein each of said first and second pluralities of beam steering devices comprises a reflector mounted on at least one selectably tilting actuator.

357. The system claimed inclaim 355 and wherein each of said first and second pluralities of beam steering devices comprises a reflector mounted on at least one selectably tilting actuator.

358. The system claimed inclaim 356 and wherein said at least one actuator comprises a piezoelectric device.

359. The system claimed inclaim 356 and wherein said at least one actuator comprises a MEMs device.

360. The system claimed inclaim 355 and wherein said first plurality of beam steering elements includes a number of beam steering elements which exceeds the number of output beams included in said first plurality of output beams and wherein at least some of said first plurality of output beams are directed to at least some of said first plurality of beam steering elements while others of said first plurality of said beam steering elements are being repositioned.

361. The system claimed inclaim 355 and wherein said second plurality of beam steering elements includes a number of beam steering elements which exceeds the number of output beams included in said second plurality of output beams and wherein at least some of said second plurality of output beams are directed to at least some of said second plurality of beam steering elements while others of said second plurality of said beam steering elements are being repositioned.

362. The system claimed inclaim 340 and wherein said selectable number of first output beams all lie in a plane.

363. The system claimed inclaim 341 and wherein said selectable number of second output beams all lie in a plane.

364. The system claimed inclaim 338 and wherein said first plurality of beam steering elements comprises a two dimensional array of beam steering elements.

365. The system claimed inclaim 338 and wherein said second plurality of beam steering elements comprises a two dimensional array of beam steering elements.

366. The system claimed inclaim 364 and further comprising an array of fixed deflectors optically interposed between said laser beam generator and said first plurality of beam steering elements.

367. The system claimed inclaim 365 and further comprising an array of fixed deflectors optically interposed between said first plurality of beam steering elements and said second plurality of beam steering elements.

368. A method for delivering energy to a substrate, comprising:

providing a plurality of beams of radiation;

propagating each of said plurality of beams in a dynamically selectable direction; and

directing said plurality of beams to selectable locations on said substrate.

369. The method claimed inclaim 368 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.

370. The method claimed inclaim 368 and wherein said providing comprises generating said plurality of beams, said plurality of beams of radiation including at least one pulsed laser beam, using at least one pulsed laser.

371. The method claimed inclaim 370 and wherein said at least one pulsed laser is a Q-switched laser.

372. The method claimed inclaim 368 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.

373. The method claimed inclaim 368 and wherein said providing comprises:

generating a beam of radiant energy; and

splitting said beam into a selectable number of sub-beams.

374. The method claimed inclaim 368 and wherein said providing comprises:

generating a beam of radiant energy;

splitting said beam into a plurality of sub-beams; and

directing each of said sub-beams in a selectable direction.

375. The method claimed inclaim 373 and also comprising:

directing each of said sub-beams in a selectable direction.

376. The method claimed inclaim 375 and wherein said splitting comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

377. The method claimed inclaim 376 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

378. The method claimed inclaim 376 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said sub-beams.

379. The method claimed inclaim 377 and wherein said controlling also comprises:

determining said selectable directions of said sub-beams.

380. The method claimed inclaim 379 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

381. The method claimed inclaim 380 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

382. The method claimed inclaim 380 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

383. The method claimed inclaim 369 and wherein said providing comprises:

generating a beam of radiant energy;

splitting said beam into a selectable number of sub-beams;

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

384. The method claimed inclaim 369 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

385. The method claimed inclaim 383 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

386. The method claimed inclaim 370 and wherein said directing also comprises: providing a plurality of reflectors, each mounted on

at least one selectably tilting actuator.

387. The method claimed inclaim 385 and wherein said directing also comprises:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

388. The method claimed inclaim 386 and wherein said at least one actuator comprises a piezoelectric device.

389. The method claimed inclaim 386 and wherein said at least one actuator comprises a MEMs device.

390. The method claimed inclaim 385 and wherein said directing comprises:

providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

391. The method claimed inclaim 373 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

392. The method claimed inclaim 390 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.

393. The method claimed inclaim 392 and also comprising: deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of beams to said selectable locations.

394. The method claimed inclaim 368 and also comprising:

removing a portion of said substrate at said locations.

395. A method for delivering energy to a substrate, comprising:

providing a beam of radiation;

splitting said beam into a plurality of sub-beams;

propagating each of said plurality of sub-beams in a selectable direction; and

directing said plurality of sub-beams to selectable locations on said substrate.

396. The method claimed inclaim 395 and wherein said providing comprises:

generating a beam defined by pulses of radiant energy.

397. The method claimed inclaim 395 and wherein said providing comprises generating said beam using at least one pulsed laser and wherein said beam includes a pulsed laser beam.

398. The method claimed inclaim 397 and wherein said at least one pulsed laser is a Q-switched laser.

399. The method claimed inclaim 395 and wherein said providing comprises generating said beam using a Q-switched laser.

400. The method claimed inclaim 395 and wherein said splitting comprises:

splitting said beam into a selectable number of sub-beams.

401. The method claimed inclaim 400 and wherein said splitting comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

402. The method claimed inclaim 401 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

403. The method claimed inclaim 401 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said sub-beams.

404. The method claimed inclaim 402 and wherein said controlling also comprises:

determining said selectable directions of said sub-beams.

405. The method claimed inclaim 404 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

406. The method claimed inclaim 405 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

407. The method claimed inclaim 405 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

408. The method claimed inclaim 396 and wherein said splitting comprises:

splitting said beam into a selectable number of sub-beams;

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

409. The method claimed inclaim 396 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

410. The method claimed inclaim 408 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

411. The method claimed inclaim 397 and wherein said directing also comprises: providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

412. The method claimed inclaim 410 and wherein said directing also comprises:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

413. The method claimed inclaim 411 and wherein said at least one actuator comprises a piezoelectric device.

414. The method claimed inclaim 411 and wherein said at least one actuator comprises a MEMs device.

415. The method claimed inclaim 410 and wherein said directing comprises:

providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

416. The method claimed inclaim 400 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

417. The method claimed inclaim 415 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.

418. The method claimed inclaim 417 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of sub-beams to said selectable locations.

419. The method claimed inclaim 395 and also comprising:

removing a portion of said substrate at said locations.

420. A method for delivering energy to a substrate, comprising:

providing a beam of radiation;

splitting said beam into a plurality of sub-beams, said plurality of sub-beams comprised of a selectable number of sub-beams.

421. The method claimed inclaim 420 and wherein said providing comprises:

generating a beam defined by pulses of radiant energy.

422. The method claimed inclaim 420 and wherein said providing comprises generating said beam using at least one pulsed laser and wherein said beam includes a pulsed laser beam.

423. The method claimed inclaim 422 and wherein said at least one pulsed laser is a Q-switched laser.

424. The method claimed inclaim 420 and wherein said providing comprises generating said beam using a Q-switched laser.

425. The method claimed inclaim 420 and wherein said splitting also comprises:

directing each of said plurality of sub-beams in a selectable direction.

426. The method claimed inclaim 425 and wherein said splitting also comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

427. The method claimed inclaim 426 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

428. The method claimed inclaim 426 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of sub-beams.

429. The method claimed inclaim 427 and wherein said controlling also comprises:

determining said selectable directions of sub-beams.

430. The method claimed inclaim 429 and wherein generating said acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

431. The method claimed inclaim 430 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

432. The method claimed inclaim 430 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

433. The method claimed inclaim 421 and wherein said splitting comprises:

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

434. The method claimed inclaim 421 and also comprising:

changing the direction of said sub-beams within a redirection time duration, and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

435. The method claimed inclaim 433 and also comprising:

changing the direction of said sub-beams within a redirection time duration, and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

436. The method claimed inclaim 422 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

437. The method claimed inclaim 435 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

438. The method claimed inclaim 436 and wherein said at least one actuator comprises a piezoelectric device.

439. The method claimed inclaim 436 and wherein said at least one actuator comprises a MEMs device.

440. The method claimed inclaim 435 and also comprising:

providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

441. The method claimed inclaim 427 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

442. The method claimed inclaim 440 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.

443. The method claimed inclaim 442 and also comprising:

deflecting said plurality of sub-beams, an array of fixed deflectors.

444. The method claimed inclaim 434 and also comprising:

removing a portion of said substrate at specific locations.

445. A method for delivering energy to a substrate, comprising:

providing a beam of radiation using at least one source of radiant energy;

disposing an opto-electronic multiple beam generator between said at least one source of radiant energy and said substrate;

generating at least two sub-beams from said beam; and

selecting an energy density characteristic of each sub-beam.

446. The method claimed inclaim 445 and wherein said providing comprises generating said beam defined by pulses of radiant energy using a pulsed source of radiant energy.

447. The method claimed inclaim 445 and wherein said providing comprises generating said beam of radiation, said beam of radiation including a pulsed laser beam, using at least one pulsed laser.

448. The method claimed inclaim 447 and wherein said at least one pulsed laser is a Q-switched laser.

449. The method claimed inclaim 445 and wherein said providing comprises generating said beam using a Q-switched laser.

450. The method claimed inclaim 445 and wherein generating comprises generating a selectable number of sub-beams.

451. The method claimed inclaim 445 and also comprising:

directing each of said sub-beams in a selectable direction.

452. The method claimed inclaim 450 and also comprising:

directing each of said sub-beams in a selectable direction.

453. The method claimed inclaim 452 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

454. The method claimed inclaim 453 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

455. The method claimed inclaim 453 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of sub-beams.

456. The method claimed inclaim 454 and wherein said controlling also comprises:

determining said selectable directions of sub-beams.

457. The method claimed inclaim 456 and wherein generating said acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

458. The method claimed inclaim 457 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

459. The method claimed inclaim 457 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

460. The method claimed inclaim 446 and wherein said generating comprises:

generating a selectable number of sub-beams, changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

461. The method claimed inclaim 446 and also comprising:

changing the direction of said sub-beams within a redirection time duration, and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

462. The method claimed inclaim 460 and also comprising:

changing the direction of said sub-beams within a redirection time duration, and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

463. The method claimed inclaim 447 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

464. The method claimed inclaim 462 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

465. The method claimed inclaim 463 and wherein said at least one actuator comprises a piezoelectric device.

466. The method claimed inclaim 463 and wherein said at least one actuator comprises a MEMs device.

467. The method claimed inclaim 462 and also comprising:

providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

468. The method claimed inclaim 450 and wherein said generating said selectable number of sub-beams comprises generating said selectable number of sub-beams all lying in a plane.

469. The method claimed inclaim 467 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.

470. The method claimed inclaim 469 and also comprising:

deflecting said plurality of sub-beams, an array of fixed deflectors.

471. The method claimed inclaim 445 and also comprising:

removing a portion of said substrate at specific locations.

472. A method for micromachining a substrate, comprising:

providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation; and

splitting said beam into a plurality of sub-beams; and

outputting said plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.

473. The method claimed inclaim 472 and wherein said providing comprises generating said pulsed beam of radiation, said pulsed beam including a pulsed laser beam, using at least one pulsed laser.

474. The method claimed inclaim 473 and wherein said at least one pulsed laser is a Q-switched laser.

475. The method claimed inclaim 472 and wherein said providing comprises generating said beam using a Q-switched laser.

476. The method claimed inclaim 472 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams.

477. The method claimed inclaim 472 and wherein said splitting also comprises:

directing each of said plurality of sub-beams in a selectable direction.

478. The method claimed inclaim 476 and wherein said splitting also comprises:

directing each of said plurality of sub-beams in a selectable direction.

479. The method claimed inclaim 478 and wherein said splitting also comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

480. The method claimed inclaim 479 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

481. The method claimed inclaim 479 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of sub-beams.

482. The method claimed inclaim 480 and wherein said controlling also comprises:

determining said selectable directions of sub-beams.

483. The method claimed inclaim 482 and wherein generating said acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

484. The method claimed inclaim 483 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

485. The method claimed inclaim 483 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

486. The method claimed inclaim 472 and wherein said splitting also comprises:

splitting said beam into a selectable number of sub-beams, and the method also comprising:

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and wherein

said temporal pulse separation is greater than said reconfiguration time duration.

487. The method claimed inclaim 472 and also comprising:

changing the direction of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.

488. The method claimed inclaim 486 and also comprising:

changing the direction of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.

489. The method claimed inclaim 473 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

490. The method claimed inclaim 488 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

491. The method claimed inclaim 489 and wherein said at least one actuator comprises a piezoelectric device.

492. The method claimed inclaim 489 and wherein said at least one actuator comprises a MEMs device.

493. The method claimed inclaim 488 and also comprising:

providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

494. The method claimed inclaim 476 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

495. The method claimed inclaim 493 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.

496. The method claimed inclaim 495 and also comprising:

deflecting said plurality of sub-beams, an array of fixed deflectors.

497. The method claimed inclaim 472 and also comprising:

removing a portion of said substrate at specific locations.

498. A method for micromachining a substrate, comprising:

providing a pulsed beam of radiation, said pulsed beam including multiple pulses separated by a temporal pulse separation;

splitting said beam into a plurality of sub-beams;

outputting said plurality of sub-beams at selectable angles which are changeable; and

receiving said sub-beams, a plurality of selectable spatial orientation deflectors;

changing a spatial orientation in an amount of time that is greater than said temporal pulse separation, ones of said selectable spatial orientation deflectors; and

directing said sub-beams to said substrate, some of said spatial orientation deflectors.

499. The method claimed inclaim 498 and wherein said providing comprises generating said pulsed beam of radiation, said pulsed beam including a pulsed laser beam, using at least one pulsed laser.

500. The method claimed inclaim 499 and wherein said at least one pulsed laser is a Q-switched laser.

501. The method claimed inclaim 498 and wherein said providing comprises generating said beam using a Q-switched laser.

502. The method claimed inclaim 498 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams.

503. The method claimed inclaim 498 and wherein said splitting also comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

504. The method claimed inclaim 503 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

505. The method claimed inclaim 503 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable angles of sub-beams.

506. The method claimed inclaim 504 and wherein said controlling also comprises:

determining said selectable angles of sub-beams.

507. The method claimed inclaim 506 and wherein generating said acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

508. The method claimed inclaim 507 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

509. The method claimed inclaim 507 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

510. The method claimed inclaim 498 and wherein said splitting also comprises:

splitting said beam into a selectable number of sub-beams, and the method also comprising:

changing at least one of the number and angle of said sub-beams within a reconfiguration time duration; and wherein said temporal pulse separation is greater than said reconfiguration time duration.

511. The method claimed inclaim 498 and also comprising:

changing the angle of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.

512. The method claimed inclaim 510 and also comprising:

changing the angle of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.

513. The method claimed inclaim 499 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

514. The method claimed inclaim 512 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

515. The method claimed inclaim 513 and wherein said at least one actuator comprises a piezoelectric device.

516. The method claimed inclaim 513 and wherein said at least one actuator comprises a MEMs device.

517. The method claimed inclaim 512 and also comprising:

providing a plurality of selectable spatial orientation deflectors, including a number of selectable spatial orientation deflectors which exceeds the number of sub-beams included in said plurality of sub-beams;

directing at least some of said plurality of sub-beams to at least some of said plurality of selectable spatial orientation deflectors; and

simultaneously repositioning others of said plurality of said selectable spatial orientation deflectors.

518. The method claimed inclaim 502 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

519. The method claimed inclaim 517 and wherein said providing a plurality of selectable spatial orientation deflectors comprises providing a two dimensional array of selectable spatial orientation deflectors.

520. The method claimed inclaim 519 and also comprising:

deflecting said plurality of sub-beams, an array of fixed deflectors.

521. The method claimed inclaim 498 and also comprising:

removing a portion of said substrate at specific locations.

522. A method for micromachining a substrate, comprising:

providing a beam of radiation;

splitting said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number;

receiving at least one of said output beams, at least one beam steering element; and

directing said at least one of said output beams to micro-machine a portion of said substrate.

523. The method claimed inclaim 522 and wherein said providing comprises generating said beam defined by pulses of radiant energy.

524. The method claimed inclaim 522 and wherein said providing comprises generating said beam, said beam including a pulsed laser beam, using at least one pulsed laser.

525. The method claimed inclaim 524 and wherein said at least one pulsed laser is a Q-switched laser.

526. The method claimed inclaim 522 and wherein said providing comprises generating said beam using a Q-switched laser.

527. The method claimed inclaim 522 and also comprising:

directing each of said output beams in a selectable direction.

528. The method claimed inclaim 527 and wherein said splitting comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

529. The method claimed inclaim 528 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of output beams.

530. The method claimed inclaim 529 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said output beams.

531. The method claimed inclaim 529 and wherein said controlling also comprises:

determining said selectable directions of said output beams.

532. The method claimed inclaim 531 and wherein said generating an acoustic wave comprises: generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

533. The method claimed inclaim 532 and also comprising:

determining a corresponding spatially distinct direction of a corresponding output beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

534. The method claimed inclaim 532 and also comprising:

determining the number of corresponding output beams from the number of said spatially distinct acoustic wave segments.

535. The method claimed inclaim 523 and also comprising:

changing at least one of the number and direction of said output beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

536. The method claimed inclaim 523 and also comprising:

changing the direction of said output beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

537. The method claimed inclaim 535 and also comprising:

changing the direction of said output beams within a redirection time duration; and separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

538. The method claimed inclaim 524 and wherein said directing also comprises:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

539. The method claimed inclaim 537 and wherein said directing also comprises:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

540. The method claimed inclaim 538 and wherein said at least one actuator comprises a piezoelectric device.

541. The method claimed inclaim 538 and wherein said at least one actuator comprises a MEMs device.

542. The method claimed inclaim 537 and wherein said receiving comprises:

receiving said at least one of said output beams, said at least one beam steering element of a plurality of beam steering elements, said plurality of beam steering elements including a number of beam steering elements which exceeds the number of output beams included in said plurality of output beams;

and said directing comprises:

directing at least some of said plurality of output beams to at least some of said plurality of beam steering elements; and

simultaneously repositioning others of said plurality of said beam steering elements.

543. The method claimed inclaim 522 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

544. The method claimed inclaim 542 and wherein said plurality of beam steering elements comprises a two dimensional array of beam steering elements.

545. The method claimed inclaim 544 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of beams to said selectable locations.

546. The method claimed inclaim 522 and also comprising:

removing said portion of said substrate.

547. A method for delivering energy to a substrate, comprising:

providing a plurality of beams of radiation propagating in a plane;

receiving said plurality of beams, a plurality of deflectors; and

deflecting at least some of said beams to predetermined locations outside said plane.

548. The method claimed inclaim 547 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.

549. The method claimed inclaim 547 and wherein said providing comprises generating said plurality of beams, said plurality of beams of radiation including at least one pulsed laser beam, using at least one pulsed laser.

550. The method claimed inclaim 549 and wherein said at least one pulsed laser is a Q-switched laser.

551. The method claimed inclaim 547 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.

552. The method claimed inclaim 547 and wherein said providing comprises:

providing a selectable number of beams of radiant energy.

553. The method claimed inclaim 547 and also comprising:

directing each of said plurality of beams in a selectable direction.

554. The method claimed inclaim 552 and also comprising:

directing each of said plurality of beams in a selectable direction.

555. The method claimed inclaim 554 and wherein said deflecting comprises:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

556. The method claimed inclaim 555 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of beams.

557. The method claimed inclaim 555 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said beams.

558. The method claimed inclaim 556 and wherein said controlling also comprises:

determining said selectable directions of said beams.

559. The method claimed inclaim 558 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

560. The method claimed inclaim 559 and also comprising:

determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

561. The method claimed inclaim 559 and also comprising:

determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.

562. The method claimed inclaim 548 and wherein said providing comprises:

providing a selectable number of beams;

and the method also comprises:

changing at least one of the number and direction of said beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

563. The method claimed inclaim 548 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

564. The method claimed inclaim 562 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

565. The method claimed inclaim 549 and wherein each of said plurality of deflectors comprises reflector mounted on at least one selectably tilting actuator.

566. The method claimed inclaim 564 and wherein each of said plurality of deflectors comprises reflector mounted on at least one selectably tilting actuator.

567. The method claimed inclaim 565 and wherein said at least one actuator comprises a piezoelectric device.

568. The method claimed inclaim 565 and wherein said at least one actuator comprises a MEMs device.

569. The method claimed inclaim 564 and wherein said receiving comprises:

receiving said plurality of beams, said plurality of deflectors, said plurality of deflectors including a number of deflectors which exceeds the number of beams included in said plurality of beams;

and said deflecting comprises:

directing at least some of said plurality of output beams to at least some of said plurality of deflectors; and

simultaneously repositioning others of said plurality of said deflectors.

570. The method claimed inclaim 552 and wherein said providing a selectable number of beams comprises providing a selectable number of beams all lying in a plane.

571. The method claimed inclaim 547 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.

572. The method claimed inclaim 571 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors, prior to said deflecting said at least some of said beams to said predetermined locations.

573. The method claimed inclaim 547 and also comprising:

removing a portion of said substrate at said predetermined locations.

574. A method for delivering energy to a substrate, comprising:

providing a beam of radiation;

splitting said beam into a plurality of sub-beams propagating in a plane;

receiving said plurality of sub-beams, a plurality of deflectors; and

deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.

575. The method claimed inclaim 574 and wherein said providing comprises:

generating a beam defined by pulses of radiant energy.

576. The method claimed inclaim 574 and wherein said providing comprises:

generating said beam, said beam including at least one pulsed laser beam, using at least one pulsed laser.

577. The method claimed inclaim 576 and wherein said at least one pulsed laser is a Q-switched laser.

578. The method claimed inclaim 574 and wherein said providing comprises:

generating said beam using a Q-switched laser.

579. The method claimed inclaim 574 and wherein said splitting comprises:

splitting said beam into a selectable number of sub-beams.

580. The method claimed inclaim 574 and wherein also comprising:

directing each of said sub-beams in a selectable direction.

581. The method claimed inclaim 579 and also comprising:

directing each of said sub-beams in a selectable direction.

582. The method claimed inclaim 581 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

583. The method claimed inclaim 582 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

584. The method claimed inclaim 582 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said sub-beams.

585. The method claimed inclaim 583 and wherein said controlling also comprises:

determining said selectable directions of said sub-beams.

586. The method claimed inclaim 585 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

587. The method claimed inclaim 586 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

588. The method claimed inclaim 586 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

589. The method claimed inclaim 575 and wherein said splitting comprises:

splitting said beam into a selectable number of sub-beams;

and the method also comprises:

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

590. The method claimed inclaim 575 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

591. The method claimed inclaim 589 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

592. The method claimed inclaim 576 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

593. The method claimed inclaim 591 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.

594. The method claimed inclaim 592 and wherein said at least one actuator comprises a piezoelectric device.

595. The method claimed inclaim 592 and wherein said at least one actuator comprises a MEMs device.

596. The method claimed inclaim 591 and wherein said receiving comprises:

receiving said plurality of sub-beams, said plurality of deflectors, said plurality of deflectors including a number of deflectors which exceeds the number of sub-beams included in said plurality of sub-beams;

and said deflecting comprises:

directing at least some of said plurality of sub-beams to at least some of said plurality of deflectors; and

simultaneously repositioning others of said plurality of said deflectors.

597. The method claimed inclaim 579 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.

598. The method claimed inclaim 574 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.

599. The method claimed inclaim 598 and also comprising:

deflecting said plurality of sub-beams, an array of fixed deflectors, prior to receiving said plurality of sub-beams.

600. The method claimed inclaim 574 and also comprising:

removing a portion of said substrate at said predetermined locations.

601. A method for delivering energy to a substrate, comprising:

directing a plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;

during said first time interval, selectably positioning a second plurality of selectably positionable deflectors; and

during a second time interval, directing said plurality of beams of radiation onto said second plurality of selectably positionable deflectors for directing said plurality of beams onto a second plurality of locations.

602. The method claimed inclaim 601 and also comprising:

defining each of said plurality of beams by pulses of radiant energy.

603. The method claimed inclaim 601 and also comprising:

generating said plurality of beams, including at least one pulsed laser beam, using at least one pulsed laser.

604. The method claimed inclaim 603 and wherein said at least one pulsed laser is a Q-switched laser.

605. The method claimed inclaim 601 and also comprising:

generating said plurality of beams using a Q-switched laser.

606. The method claimed inclaim 601 and wherein said plurality of beams comprises a selectable number of beams.

607. The method claimed inclaim 601 and wherein said directing comprises:

directing each of said beams in a selectable direction.

608. The method claimed inclaim 606 and also comprising:

directing each of said beams in a selectable direction.

609. The method claimed inclaim 608 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

610. The method claimed inclaim 609 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of beams.

611. The method claimed inclaim 609 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said beams.

612. The method claimed inclaim 610 and wherein said controlling also comprises:

determining said selectable directions of said beams.

613. The method claimed inclaim 612 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

614. The method claimed inclaim 613 and also comprising:

determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

615. The method claimed inclaim 613 and also comprising:

determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.

616. The method claimed inclaim 602 and wherein said plurality of beams comprises a selectable number of beams;

and the method also comprises:

changing at least one of the number and direction of said beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

617. The method claimed inclaim 602 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

618. The method claimed inclaim 616 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

619. The method claimed inclaim 603 and wherein each of said first and second pluralities of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.

620. The method claimed inclaim 618 and wherein each of said first and second pluralities of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.

621. The method claimed inclaim 619 and wherein said at least one actuator comprises a piezoelectric device.

622. The method claimed inclaim 619 and wherein said at least one actuator comprises a MEMs device.

623. The method claimed inclaim 618 and wherein said first plurality of selectably positionable deflectors includes a number of selectably positionable deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of selectably positionable deflectors while others of said plurality of said selectably positionable deflectors are being repositioned.

624. The method claimed inclaim 606 and wherein said selectable number of beams all lie in a plane.

625. The method claimed inclaim 601 and wherein said first plurality of selectably positionable deflectors comprises a two dimensional array of selectably positionable deflectors.

626. The method claimed inclaim 625 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors.

627. The method claimed inclaim 601 and also comprising:

removing a portion of said substrate at said second plurality of locations.

628. A method for delivering energy to a substrate, comprising:

providing at least one beam of radiation;

receiving said at least one beam, at least one first deflector and at least one second deflector;

disposing said at least one first deflector and said at least one second deflector to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.

629. The method claimed inclaim 628 and also comprising:

associating a deflector positioner with each deflector; and

positioning each deflector, said deflector positioner associated therewith, in a spatial orientation such that a beam impinging on the deflector is delivered to said substrate within a region which is at least partially overlapping with a corresponding region to which a beam impinging on a different deflector is delivered.

630. The method claimed inclaim 629 and wherein said providing comprises generating said at least one beam defined by pulses of radiant energy.

631. The method claimed inclaim 629 and wherein said providing comprises generating said at least one beam, said at least one beam including at least one pulsed laser beam, using at least one pulsed laser.

632. The method claimed inclaim 631 and wherein said at least one pulsed laser is a Q-switched laser.

633. The method claimed inclaim 629 and wherein said providing comprises generating said at least one beam using a Q-switched laser.

634. The method claimed inclaim 629 and wherein said providing comprises:

generating a selectable number of beams.

635. The method claimed inclaim 629 and also comprising:

directing each of said at least one beams in a selectable direction.

636. The method claimed inclaim 634 and also comprising:

directing each of said at least one beams in a selectable direction.

637. The method claimed inclaim 636 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

638. The method claimed inclaim 637 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of beams.

639. The method claimed inclaim 637 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said beams.

640. The method claimed inclaim 638 and wherein said controlling also comprises:

determining said selectable directions of said beams.

641. The method claimed inclaim 640 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

642. The method claimed inclaim 641 and also comprising:

determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

643. The method claimed inclaim 641 and also comprising:

determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.

644. The method claimed inclaim 630 and wherein said providing comprises:

generating a selectable number of beams;

and the method also comprises:

changing at least one of the number and direction of said beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

645. The method claimed inclaim 630 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

646. The method claimed inclaim 644 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

647. The method claimed inclaim 631 and wherein each of said at least one first deflector and each of said at least one second deflector comprise a reflector mounted on at least one selectably tilting actuator.

648. The method claimed inclaim 646 and wherein each of said at least one first deflector and each of said at least one second deflector comprise a reflector mounted on at least one selectably tilting actuator.

649. The method claimed inclaim 647 and wherein said at least one actuator comprises a piezoelectric device.

650. The method claimed inclaim 647 and wherein said at least one actuator comprises a MEMs device.

651. The method claimed inclaim 634 and wherein said selectable number of beams all lie in a plane.

652. The method claimed inclaim 629 and wherein said at least one first deflector and said at least one second deflector comprise a two dimensional array of deflectors.

653. The method claimed inclaim 652 and also comprising:

deflecting said at least one beam, an array of fixed deflectors, prior to said receiving.

654. The method claimed inclaim 628 and also comprising:

removing a portion of said substrate at said overlapping locations.

655. A method for laser micro-machining comprising:

providing a plurality of radiation beams;

independently deflecting each of said plurality of beams to selectable locations on a substrate to be micro-machined; and

focusing said plurality of beams onto said selectable locations on said substrate.

656. The method claimed inclaim 655 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.

657. The method claimed inclaim 655 and wherein said providing comprises generating said plurality of beams, said plurality of beams including at least one pulsed laser beam, using at least one pulsed laser.

658. The method claimed inclaim 657 and wherein said at least one pulsed laser is a Q-switched laser.

659. The method claimed inclaim 655 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.

660. The method claimed inclaim 655 and wherein said providing comprises:

generating a selectable number of beams.

661. The method claimed inclaim 655 and also comprising:

directing each of said plurality of beams in a selectable direction.

662. The method claimed inclaim 660 and also comprising:

directing each of said plurality of beams in a selectable direction.

663. The method claimed inclaim 662 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

664. The method claimed inclaim 663 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of beams.

665. The method claimed inclaim 663 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said beams.

666. The method claimed inclaim 664 and wherein said controlling also comprises:

determining said selectable directions of said beams.

667. The method claimed inclaim 666 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

668. The method claimed inclaim 667 and also comprising:

determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

669. The method claimed inclaim 667 and also comprising:

determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.

670. The method claimed inclaim 656 and wherein said providing comprises:

generating a selectable number of beams;

and the method also comprises:

changing at least one of the number and direction of said beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

671. The method claimed inclaim 656 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

672. The method claimed inclaim 670 and also comprising:

changing the direction of said beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

673. The method claimed inclaim 657 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

674. The method claimed inclaim 672 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

675. The method claimed inclaim 673 and wherein said at least one actuator comprises a piezoelectric device.

676. The method claimed inclaim 673 and wherein said at least one actuator comprises a MEMs device.

677. The method claimed inclaim 672 and wherein said deflecting comprises:

providing a plurality of deflectors, including a number of deflectors which exceeds the number of beams included in said plurality of beams;

directing at least some of said plurality of beams to at least some of said plurality of deflectors; and

simultaneously repositioning others of said plurality of said deflectors.

678. The method claimed inclaim 660 and wherein said generating comprises generating said selectable number of beams all lying in a plane.

679. The method claimed inclaim 677 and wherein said providing a plurality of deflectors comprises providing a two dimensional array of deflectors.

680. The method claimed inclaim 679 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors.

681. The method claimed inclaim 655 and also comprising:

removing a portion of said substrate at said selectable locations.

682. An acousto-optic method comprising:

providing a beam of radiation along an optical axis;

receiving said beam, an optical element;

associating a transducer with said optical element;

forming in said optical element an acoustic wave simultaneously having different acoustic frequencies; and

outputting a plurality of sub-beams at different angles with respect to said optical axis.

683. The method claimed inclaim 682 and wherein said providing comprises generating said beam defined by pulses of radiant energy.

684. The method claimed inclaim 682 and wherein said providing comprises generating said beam, said beam including at least one pulsed laser beam, using at least one pulsed laser.

685. The method claimed inclaim 684 and wherein said at least one pulsed laser is a Q-switched laser.

686. The method claimed inclaim 682 and wherein said providing comprises generating said beam using a Q-switched laser.

687. The method claimed inclaim 682 and wherein said outputting comprises:

outputting a selectable number of sub-beams.

688. The method claimed inclaim 682 and wherein said different angles comprise selectable angles.

689. The method claimed inclaim 687 and wherein said different angles comprise selectable angles.

690. The method claimed inclaim 689 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

691. The method claimed inclaim 690 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable number of sub-beams.

692. The method claimed inclaim 691 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

693. The method claimed inclaim 692 and also comprising:

determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

694. The method claimed inclaim 692 and also comprising:

determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.

695. The method claimed inclaim 683 and wherein said outputting comprises:

generating a selectable number of sub-beams;

and the method also comprises:

changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

696. The method claimed inclaim 683 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

697. The method claimed inclaim 695 and also comprising:

changing the direction of said sub-beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

698. The method claimed inclaim 684 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

699. The method claimed inclaim 697 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

700. The method claimed inclaim 698 and wherein said at least one actuator comprises a piezoelectric device.

701. The method claimed inclaim 698 and wherein said at least one actuator comprises a MEMs device.

702. The method claimed inclaim 687 and wherein said outputting comprises:

outputting a selectable number of sub-beams all lying in a plane.

703. The method claimed inclaim 682 and also comprising:

deflecting said plurality of beams, an array of fixed deflectors.

704. The method claimed inclaim 682 and also comprising:

removing a portion of a substrate at specific locations.

705. A method for micro-machining a substrate, comprising:

providing a laser beam to a beam splitter device;

splitting said laser beam into a first number of output beams and directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate; and then

splitting said laser beam into a second number of output beams and directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.

706. The method claimed inclaim 705 and wherein said providing comprises generating said laser beam using a Q-switched laser.

707. The method claimed inclaim 705 and wherein said splitting said laser beam into a first number of output beams comprises:

splitting said laser beam into a selectable first number of output beams.

708. The method claimed inclaim 705 and wherein said splitting said laser beam into a second number of output beams comprises:

splitting said laser beam into a selectable second number of output beams.

709. The method claimed inclaim 705 and wherein said directing said first number of output beams comprises:

directing each of said first number of output beams in a selectable direction.

710. The method claimed inclaim 705 and wherein said directing ones of said second number of output beams comprises:

directing ones of said second number of output beams in a selectable direction.

711. The method claimed inclaim 707 and wherein said directing said first number of output beams comprises:

directing each of said first number of output beams in a selectable direction.

712. The method claimed inclaim 708 and wherein said directing ones of said second number of output beams comprises:

directing ones of said second number of output beams in a selectable direction.

713. The method claimed inclaim 711 and also comprising:

providing an acousto-optical deflector; and

controlling said acousto-optical deflector.

714. The method claimed inclaim 713 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable first number of output beams.

715. The method claimed inclaim 713 and wherein said controlling comprises:

generating an acoustic wave; and

determining said selectable directions of said first number of output beams.

716. The method claimed inclaim 714 and wherein said controlling also comprises:

determining said selectable directions of said first number of output beams.

717. The method claimed inclaim 716 and wherein said generating an acoustic wave comprises:

generating a plurality of spatially distinct acoustic wave segments; and

defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.

718. The method claimed inclaim 717 and also comprising:

determining a corresponding spatially distinct direction of a corresponding output beam from said each spatially distinct acoustic wave segment,

said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.

719. The method claimed inclaim 717 and also comprising:

determining the number of corresponding output beams from the number of said spatially distinct acoustic wave segments.

720. The method claimed inclaim 705 and wherein:

said first number of output beams comprises a selectable number of output beams;

said second number of output beams comprises a selectable number of output beams;

and the method also comprises:

changing at least one of the number and direction of said output beams within a reconfiguration time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.

721. The method claimed inclaim 705 and also comprising:

changing the direction of said first number of output beams within a redirection time duration;

changing the direction of said second number of output beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

722. The method claimed inclaim 720 and also comprising:

changing the direction of said first number of output beams within a redirection time duration;

changing the direction of said second number of output beams within a redirection time duration; and

separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.

723. The method claimed inclaim 705 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

724. The method claimed inclaim 722 and also comprising:

providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.

725. The method claimed inclaim 723 and wherein said at least one actuator comprises a piezoelectric device.

726. The method claimed inclaim 723 and wherein said at least one actuator comprises a MEMs device.

727. The method claimed inclaim 707 and wherein said selectable number of first output beams all lie in a plane.

728. The method claimed inclaim 708 and wherein said selectable number of second output beams all lie in a plane.

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