US20030200927A1 - Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus - Google Patents

Abstract

An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.

Description

CROSS REFERENCE TO RELATED APPLICATION
• This is a divisional application of a patent application Ser. No. 09/774,887 filed on Feb. 1, 2001.[0001]
BACKGROUND OF THE INVENTION AND RELATED ART STATEMENT
• This invention relates to an apparatus for manufacturing magnetic recoding disks. Especially, this invention relates to an apparatus performing a manufacturing method including a step of removing protrusions on a substrate and a step of forming a lubricant film on the substrate.[0002]
• The manufacture of a magnetic recording disk such as a hard disk is roughly divided into former steps and latter steps. The former steps include deposition of an underlying film, deposition of a magnetic film for a recording layer, and deposition of an overcoat. The latter steps include preparation of a lubricant layer and other required steps. The lubricant layer is prepared considering contact of a magnetic head onto the disk in read-out.[0003]
• The preparation of the lubricant layer is carried out by a following procedure.[0004]
• To begin with, a substrate is taken out to the atmosphere after deposition steps because thin-films such as the magnetic film for a recording layer are usually deposited in a vacuum chamber. Then, burnishing is carried out to remove contaminants adhering to the substrate and to remove protrusions formed on the substrate during the film depositions. The burnishing is a step of removing the protrusions and the contaminants from the substrate by rubbing it with a tape-shaped polishing member. The “contaminant” in this specification means materials that may contaminate a substrate in general, which is a gas, ions, molecules, particles or other substances.[0005]
• The lubricant layer is prepared after the burnishing. As lubricant, fluorine lubricant such as perfluoropolyether (PFPE) is used. Such lubricant is diluted with solvent for improving uniformity. The diluted lubricant is coated onto the substrate by such method as a dipping method where the substrate is dipped into the diluted lubricant, or a spin-coating method where the lubricant is dropped onto the substrate when it is spun.[0006]
• “Substrate” means a board that consists a magnetic recording disk in this specification. “Surface of substrate” may mean a surface of a film or layer when a film deposition or a layer preparation has already been carried out onto the substrate.[0007]
• Recent improvement of recording density in magnetic recording disks is remarkable. For example, in hard disks it is becoming 20 gigabit/inch2 in the[0008]year 2000 and 40 gigabit/inch2 in the year 2001. One of factors that enable the improvement of the recording density is to reduce a spacing. FIG. 19 shows a view explaining the spacing.
• In FIG. 19, the spacing in the case of hard disks is explained as an example. As shown in FIG. 19, a hard disk has a structure where a[0009]recording layer91 is prepared on asubstrates9, anovercoat92 is deposited on therecording layer91, and alubricant layer93 is prepared on theovercoat92. A magnetic head for writing and reading information is located at a position slightly apart from the surface of the hard disk. The spacing, which is designated by “S” in FIG. 19, means distance between a write-readout device element900 of the magnetic head and therecording layer91 of the hard disk. A distance between the write-readout device element900 and thelubricant layer93 is called a “flying height”, which is designated by “FH” in FIG. 19. It is important to make the spacing S small in improving the recording density.
• As the spacing S becomes smaller, demands to the manufacturing process have been becoming severer by years. For reducing the spacing S, it is required not only to reduce the flying height FH, which is about 10 to 20 nm in a typical hard disk drive (HDD) currently on sale in the market, but also required to make a thickness of the[0010]overcoat92 and a thickness of thelubricant layer93 thinner. As thickness of theovercoat92 is made thinner, it is required to deposit a more compact and harder film as theovercoat92. As the thickness ofovercoat92 is made thinner, a demand for thickness uniformity of thelubricant layer93 becomes severer as well as a demand for enhancing an adhesion strength of thelubricant layer93 becomes severer.
• With the above described points in the background, a method for depositing the[0011]overcoat9 has been shifting from a conventional sputtering method to a chemical vapor deposition (CVD) method. Usually a carbon film is deposited as theovercoat92. By the CVD method, it is enabled to deposit a carbon film called a “diamond-like carbon” (DLC) film. The DLC film is known as a hard, compact and stable carbon film even when its thickness is small. This is the reason why the method has been shifting to the CVD method.
• However, the contaminants of gases or ions may adhere to the[0012]overcoat92 under influence of residual gases when it is deposited by the CVD method. In addition, minute protrusions are easily formed on theovercoat92 in the CVD method, resulting from abnormal film growth. If thelubricant layer93 is prepared over theovercoat92 on which the contaminants or the protrusions exist, there easily arise problems such as the adhesion strength of thelubricant layer93 may decrease, and the thickness of thelubricant layer93 may lose uniformity.
• The adhesion strength of the[0013]lubricant layer93 is enhanced when terminal groups of macromolecules composing the lubricant are bonded sufficiently with carbons in theovercoat92. For making the adhesion strength higher, it is preferable that the macromolecules are bonded with carbons in the surface of theovercoat92 at one of or both terminal groups. On the other hand, it is desirable that a degree of freedom of the macromolecules is high at a portion adjacent to the surface of thelubricant layer93, on purpose of prevention the write-readout device element900 of the magnetic head from chucking with the disk. In short, both terminal groups are preferably not bonded near the surface of the lubricant layer.
• A macromolecule bonded with a carbon at one of or both terminal groups is hereinafter called a “bonded lub”. A macromolecule not bonded with a carbon at either of terminal groups is hereinafter called a “free lub”. A thickness ratio of the bonded lub layer against the[0014]whole lubricant layer93 is hereinafter called a “bonded ratio”. Though an optimum bonded ratio has been supposed about 20-30% so far, a demand for accuracy of the bonded ratio tends to be severer as thelubricant layer93 is made thinner.
• For obtaining the demanded bonded ratio, it has been attempted to carry out treatment for controlling the bonds of the terminal groups after the lubricant-layer preparation. In this treatment, thermal energy or light energy is applied to the[0015]lubricant layer93, thereby controlling the bonds of the terminal groups. This treatment is hereinafter called “post-preparation treatment”.
• However, when the[0016]overcoat92 is exposed to the atmosphere after the deposition, many contaminants of gases or ions in the atmosphere are adsorbed with the surface of theovercoat92 because the surface has been chemically activated. As a result, when thelubricant layer93 is prepared, a contaminated layer may be formed between thelubricant layer93 and theovercoat92. If the contaminated layer is formed, it may become difficult to obtain an accurate bonded ratio by the post-preparation treatment. For preventing these problems, equipment that reduces the contaminants is required. Including such a point, the current situation is that huge investment is inevitable for coordinating manufacture environment.
• An object of the invention is to solve the described problems in the manufacturing process, which have been brought from the reduction of the spacing.[0017]
SUMMARY OF THE INVENTION
• To accomplish this object, the invention presents a method and an apparatus for manufacturing a magnetic recording disk, where steps from magnetic-film deposition to lubricant-layer preparation are carried out without breaking vacuum. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where a substrate is cleaned prior to lubricant-layer preparation. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where burnishing is carried out in vacuum after magnetic-film deposition. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where post-preparation treatment to coordinate adhesive strength and surface lubricity of a lubricant layer is carried out in vacuum. The invention also presents an in-line type substrate processing apparatus comprising a plurality of vacuum chambers provided along each of a plurality of circumventive transfer paths, a connection transfer path connecting at least two of the circumventive transfer paths, and a transfer system that transfers a substrate to be processed along the circumventive transfer paths and the connection transfer path without exposing the substrate to the atmosphere.[0018]
BRIEF DESCRIPTION OF THE DRAWINGS
• FIG. 1 shows a schematic plane view of a magnetic recording disk manufacturing apparatus of the first embodiment of the invention.[0019]
• FIG. 2 shows a schematic front view of the[0020]first substrate holder51 and a linear transfer mechanism in the apparatus shown in FIG. 1.
• FIG. 3 shows a schematic side cross-sectional view of the[0021]first substrate holder51 and the linear transfer mechanism in the apparatus shown in FIG. 1
• FIG. 4 shows a schematic side view of a direction-conversion mechanism provided in a direction-changing[0022]chamber17 shown in FIG. 1.
• FIG. 5 shows a schematic plane view of a magnetic-[0023]film deposition chamber14 shown in FIG. 1.
• FIG. 6 shows a schematic plane view of an[0024]overcoat deposition chamber15 shown in FIG. 1.
• FIG. 7 shows a schematic plane view the[0025]first cleaning chamber22 shown in FIG. 1.
• FIG. 8 shows a schematic plane view of the[0026]second cleaning chamber22 shown in FIG. 1.
• FIG. 9 shows a schematic side view of a burnishing[0027]chamber24 shown in FIG. 1.
• FIG. 10 shows a schematic cross-sectional view of a[0028]rotation mechanism8 shown in FIG. 9.
• FIG. 11 shows a front view explaining locations of[0029]contact blades821 shown in FIG. 10.
• FIG. 12 shows s schematic side view of a[0030]drive mechanism87 that drives apusher247 shown in FIG. 9.
• FIG. 13 shows a schematic side view of a lubricant-[0031]layer preparation chamber25 shown in FIG. 1.
• FIG. 14 shows a schematic side view of a[0032]post-preparation treatment chamber26 shown in FIG. 1.
• FIG. 15 shows a main part of a magnetic recording disk manufacturing apparatus of the second embodiment of the invention.[0033]
• FIG. 16 shows a main part of a magnetic recording disk manufacturing apparatus of the third embodiment of the invention.[0034]
• FIG. 17 shows a main part of a magnetic recording disk manufacturing apparatus of the fourth embodiment of the invention.[0035]
• FIG. 18 shows a main part of a magnetic recording disk manufacturing apparatus of the fifth embodiment of the invention.[0036]
• FIG. 19 shows a view explaining a spacing.[0037]
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
• Preferred embodiments of this invention are described as follows.[0038]
• FIG. 1 shows a schematic plane view of a magnetic recording disk manufacturing apparatus of the first embodiment of the invention. The first point characterizing the first embodiment is that the former steps such as preparation of a recording layer and the latter steps such as preparation of a lubricant layer can be carried out through only one apparatus. The second point characterizing the first embodiment is that each step from the recording layer preparation to the lubricant-layer preparation can be carried out continuously in vacuum, i.e. without taking out a[0039]substrate9 to the atmosphere.
• In the concrete, the apparatus shown in FIG. 1 is an in-line type apparatuses where a plurality of vacuum chambers[0040]10-17,20-29 is arranged alongtransfer paths1,2 of thesubstrates9. Each vacuum chamber10-17,20-29 is an airtight chamber pumped by a respective or a common pumping system (not shown). In each boundary of the vacuum chambers10-17,20-29, agate valve4 is provided.
• A plurality of the vacuum chambers[0041]10-17,20-29 is divided into the first group of the chambers10-17 arranged along the first rectangular transfer path (hereinafter, the first transfer path)1, and the second group of the chambers20-29 arranged along the second rectangular transfer path (hereinafter, the second transfer path)2. Thethird transfer path3 connecting thefirst transfer path1 and thesecond transfer path2 is provided. Avacuum chamber31 is also provided on thethird transfer path3. Thisvacuum chamber31 onthird transfer path3 is connected airtightly with onevacuum chamber16 of the first group and onevacuum chamber21 of the second group so that thesubstrate9 can be transferred from thefirst transfer path1 to thesecond transfer path2 without being taken out to the atmosphere.
• In the vacuum chambers[0042]10-17 of the first group, steps from the underlying-film deposition to the overcoat deposition are carried out. In the vacuum chambers20-29 of the second group, steps after the overcoat deposition to the lubricant-layer preparation are carried out.
• A composition of a transfer system that transfers the[0043]substrate9 through the first, the second and thethird transfer paths1,2,3 is described as follows. The transfer system is mainly composed of the first circulation means that circulates thefirst substrate holder51 holding thesubstrate9 along thefirst transfer path1, aloading robot61 that loads thesubstrate9 to thesubstrate holder51 on thefirst transfer path1, the second circulation means that circulates thesecond substrate holder52 holding thesubstrate9, an unloadingrobot62 that unloads thesubstrate9 from thesubstrate holder52 on thesecond transfer path2, and a shiftingrobot63 that unloads thesubstrate9 from thefirst substrate holder51 and loads it to thesecond substrate holder52.
• The[0044]loading robot61, the unloadingrobot62 and the shiftingrobot63 are all the same robot basically, which comprises a multi-articulation arm for holding thesubstrate9 at a tip of the arm. The first and thesecond substrate holders51,52 are also the same composition. The first and the second circulation means are basically the same composition as well. As an example, the compositions of thefirst substrate holder51 and the first circulation means are described as follows.
• The first circulation means is mainly composed of a linear movement mechanism that moves the[0045]first holders51 linearly on thefirst transfer path1, and a direction-conversion mechanism that converts a transfer direction of thefirst substrate holder51. The compositions of thefirst substrate holder51 and the linear movement mechanism are described as follows using FIG. 2 and FIG. 3. FIG. 2 and FIG. 3 show thefirst substrate holder51 and the linear movement mechanism employed in the apparatus shown in FIG. 1. FIG. 2 shows a front view of them and FIG. 3 shows a side cross-sectional view of them.
• The[0046]first substrate holder51 is mainly composed of amain board511 andpallets512 fixed with themain board511. Eightpallets512 are provided. Each group of fourpallets512 holds onesubstrate9. Therefore, in this embodiment, thefirst substrate holder51 simultaneously holds twosubstrates9. As shown in FIG. 2, themain board511 has two cutouts. A shape of each cutout is nearly circle and a little larger than thesubstrate9. In each group of thepallets512, twopallets512 are fixed at one side edge of each cutout. The other twopallets512 are fixed the other side edge of each cutout. Thesubstrate9 is sandwiched between two couples of thepallets512.
• The[0047]main board511 has another cutout elongated downward from both sides of each nearly circular cutout. A vertically elongatedspring band514 is provided in each cutout. Amount515 is fixed at the top of eachspring band514. As shown in FIG. 2, themount515 is a nearly trapezoid-shaped plate. Thepallet512 is fixed on the top and the bottom of themount515 by screwing. The edge of eachpallet512 is V-shaped in which the edge of thesubstrate9 is inlet.
• Each[0048]robot61,62,63 has a couple oflevers60 that curve a couple ofspring bands514 against elasticity so that thepallets512 shift away from the nearly circular cutout. A loading operation of thesubstrate9 onto thefirst substrate holder51 is described as follows. First, thelevers60 curve thespring bands514. In this state, thesubstrate9 is located at the center of the nearly circular cutout. Afterward, thelevers60 are returned to the initial position so that thespring bands12 can restore the initial posture on elasticity. As a result, thesubstrate9 is caught by the fourpallets512. By repeating the same operation so that theother substrate9 is caught by the other fourpallets512, twosubstrates9 are held by thefirst substrate holder51. The twosubstrates9 are unloaded from thefirst substrate holder51 by an operation quite reverse to this loading operation.
• As shown in FIG. 2, many[0049]small magnets513 are provided at the bottom of thefirst substrate holder51. Thesemagnets513 are hereinafter called “holder magnets”. Eachholder magnet513 has magnetic poles on the top and the bottom. As shown in FIG. 2, the magnetic poles of theholder magnets513 are alternatively opposite in an array direction.
• Beneath the[0050]first substrate holder51, a magnetic-coupling roller711 is provided, interposing apartition wall70. The magnetic-coupling roller711 is a cylinder, on which two spirallyelongated magnets712 are provided as shown in FIG. 2. Thesemagnets712 are hereinafter called “roller magnets”. A surface pole of eachroller magnet712 is opposite to each other. In short, the magnetic-coupling roller711 has a so-called double-helix structure.
• The magnetic-[0051]coupling roller711 is provided at a position where theroller magnets712 face to theholder magnet513 through thepartition wall70. Thepartition wall70 is formed of material with a high magnetic permeability. Theholder magnets513 and theroller magnets712 are magnetically coupled with each other. One side of thepartition wall70 where thefirst substrate holder51 is provided is a space kept at a vacuum pressure. The other side of thepartition wall70 where the magnetic-coupling roller711 is provided is a space of the atmospheric pressure. The magnetic-coupling roller711 is provided along thefirst transfer path1 shown in FIG. 1.
• A multiplicity of[0052]main pulleys714 that are rotated around horizontal axes are provided along thefirst transfer path1. As shown in FIG. 3, thefirst substrate holder51 rides on themain pulleys714. A couple ofsub-pulleys715,715 are contacted with a lower margin of thefirst substrate holder51. The sub-pulleys714,715 pinch the lower margin of thefirst substrate holder51 to prevent fall of thefirst substrate holder51. A multiplicity of the sub-pulleys715,715 are provided along thefirst transfer path1 as well.
• As shown in FIG. 3, a[0053]drive rod716 is connected with the magnetic-coupling roller711 through a bevel gear. Amotor717 is connected with thedrive rod716 so that the magnetic-coupling roller711 can be rotated around its center axis by driving force transferred from themotor717 through thedrive rod716.
• When the magnetic-[0054]coupling roller711 is rotated, the double-helix roller magnets712 shown in FIG. 2 are also rotated. Situation that theroller magnets712 are rotated is equivalent to situation that a plurality of aligned small magnets whose poles are alternately opposite simultaneously move linearly along an aligning direction. Therefore, theholder magnets513 magnetically coupled with theroller magnets712 also move linearly as theroller magnets712 are rotated, resulting in that thefirst substrate holder51 moves linearly as a whole. During this liner movement, themain pulleys714 and the sub-pulleys715,715 shown in FIG. 3 are driven to rotate following the movement.
• In the composition shown in FIG. 1, the vacuum chambers provided at corners of the first and the[0055]second transfer path1,2 are the direction-conversion chambers17,29 comprising a direction-conversion mechanism that converts the transfer direction of thesubstrate9 for90 degrees. Using FIG. 4, a composition of the direction-conversion mechanism provided in the direction-conversion chamber17 is described as an example. FIG. 4 shows a schematic side view of the direction-conversion mechanism provided in the direction-conversion chamber17.
• The direction-conversion mechanism shown in FIG. 4 is mainly composed of a holder[0056]721 holding the linear movement mechanism including the magnetic-coupling rollers of the same composition as described (not shown in FIG. 4), and amotor722 for rotating the holder721, thereby rotating the linear movement mechanism as a whole.
• A[0057]drive rod716 is connected with a shaft of a magnetic-coupling roller (not shown in FIG. 4) through a motion transfer mechanism such as a bevel gear. Anotherbevel gear723 is disposed at a rear end of thedrive rod716 as shown in FIG. 4. Apower transmission rod724 posing vertically is connected with thisbevel gear723. Abevel gear725 engaging with thebevel gear723 disposed at the rear end ofdrive rod716 is provided at the top of thepower transmission rod716. An output shaft of amotor717 is connected with a bottom end of thepower transmission rod724.
• On the other hand, the holder[0058]721 composing the direction-conversion mechanism is a member having a shape of a column or a cylinder, whose axis is vertical. As shown in FIG. 4, the holder721 has a through hole lengthened vertically, through which thepower transmission rod724 is inserted.Bearings725 are provided at a clearance between the inner surface of the through hole and thepower transmission rod724 so that thepower transmission rod724 is retained in the through hole while allowing the rotation of thepower transmission rod724.
• The described holder[0059]721 is placed in aholder cover726. Theholder cover726 has a nearly cylindrical shape and a larger radius than the holder721. Theholder cover726, which supports the holder721, is installed with abottom wall727 of the direction-conversion chambers17,29. Thebottom wall727 of the direction-conversion chambers17,29 has a circular opening with a size that suits an outer diameter of theholder cover726. Theholder cover726 is fitted in this opening. A vacuum seal such as an O-ring is provided at an interface of theholder cover726 and thebottom wall727.
• Four[0060]bearings729 and amechanical seal728 are provided at a clearance between theholder cover726 and the holder721. Themechanical seal728 is interposed between the uppermost andnext bearings729. Themechanical seal728 is to seal the clearance between the holder721 and theholder cover726 while allowing a rotation of the holder721. As themechanical seal728, a seal mechanism using magnetic-fluid is preferably employed.
• A[0061]pulley mount730 is provided at the bottom of the holder721. Aholder pulley731 is fixed at the bottom of thepulley mount730. Theholder pulley731 is coaxial with the holder721. Apulley732 is provided at a position at the same level as the holder pulleys731. An output shaft of amotor722 is connected with thepulley732. There is abelt733 stretching between thepulley732 and the side pulleys731 to connect them. Thepulley731 and thepulley732 are timing pulleys and thebelt733 is a timing belt.
• A[0062]frame734 as shown in FIG. 4 is fixed on an upper surface of the holder721. Theframe734 is to retain together thefirst substrate holder51, the magnetic-coupling roller711 and other members shown in FIG. 2. As shown in FIG. 4,several supports735 are provided uprightly on a lower part of theframe734. The described main pulleys and the sub-pulleys are supported by thesupports735. A vacuum seal (not shown) is provided between theframe734 and the holder721 to prevent leak of vacuum in the direction-conversion chamber17 from the inside of theframe734.
• An operation of such a direction-conversion mechanism in the direction-[0063]conversion chamber17 is described as follows.
• To begin with, when the[0064]motor717 is operated, the rotation motion is transmitted to the magnetic-coupling roller (not shown in FIG. 4) through thepower transmission rod724 and thedrive rod716, thereby rotating the magnetic-coupling roller. As a result of this rotation, thefirst substrate holder51 moves linearly.
• When the[0065]first substrate holder51 reaches a specific position in the direction-conversion chamber17, themotor722 is operated. A drive of themotors722 is transmitted to thepulley731 via thepulley732 by thebelt733. As a result, the holder721 is rotated, thereby rotating the linear transfer mechanism held by the holder721 simultaneously. With this rotation, thefirst substrate holder51 is also rotated. When the rotation angle reaches 90 degrees, the operation of themotor722 is stopped, thereby stopping the rotation of thefirst substrate holder51. By this operation, the transfer direction of thefirst substrate holder51 is converted to a direction rotated by 90 degrees.
• Afterwards, receiving a control signal, the linear transfer mechanism is driven so that the[0066]first substrate holder51 can be moved along thefirst transfer path1 in the direction rotated by90 degrees to a next vacuum chamber. Therefore, the surface of thesubstrate9 faces to the side of thetransfer path1, even after thesubstrate9 turns a corner of the rectangularfirst transfer path1.
• In the described composition of the direction-conversion mechanism, the control of the rotation angle such as 90 degrees may be carried out by control of the[0067]motor722 or by a detector (not shown) detecting the rotation angle of the holder721.
• Next are described details on the vacuum chambers of the first and the second groups.[0068]
• First of all, the vacuum chambers of the first group are described. The first group is composed of a[0069]load lock chamber11 in which thesubstrate9 temporarily stays when it is transferred from the atmosphere, apre-heat chamber12 to which thesubstrate9 is transferred next from theload lock chamber11, an underlying-film deposition chamber13 to which thesubstrate9 is transferred next from thepre-heat chamber12, a magnetic-film deposition chamber14 to which thesubstrate9 is transferred next to the underlying-film deposition chamber13, theovercoat deposition chamber15 to which thesubstrate9 is transferred next from the magnetic-film deposition chamber14, thefirst transition chamber16 in which thesubstrate9 temporarily stays when it is transferred to thesecond transfer path2, the direction-conversion chambers17, and anextra vacuum chamber10.
• The[0070]loading robot61 is provided at the outside of theload lock chamber11. Theloading robots61 is a robot that takes out thesubstrate9 from acassette611 placed at a load station in the atmosphere, and load it onto thefirst substrate holder51.
• The[0071]pre-heat chamber12 is a chamber in which thesubstrate9 is heated to release gases existing on or in thesubstrate9. Thepre-heat chamber12 comprises a lamp heater in it so that thesubstrate9 is heated to a specific temperature.
• In the underlying-[0072]film deposition chamber13 and the magnetic-film deposition chamber14, a specific thin-film is deposited by sputtering. As an example, components on the magnetic-film deposition chamber14 are described using FIG. 5. FIG. 5 shows a schematic plane view of the magnetic-film deposition chamber14 shown in FIG. 1.
• The magnetic-[0073]film deposition chamber14 comprises apumping system141 that discharge an air in the chamber, a gas-introduction system142 that introduces a process gas into the inside of the chamber, atarget143 whose surface to be sputtered is exposed to the inside space of the magnetic-film deposition chamber14, a sputteringpower supply144 for applying voltage to thetarget143 to generate a sputtering discharge, and amagnet assembly145 provided behind thetarget143 for the magnetron sputtering.
• While introducing the process gas such as argon into the magnetic-[0074]film deposition chamber14 by thegas introduction system142 and maintaining a specific vacuum pressure by thepumping system141, the sputteringpower supply144 is operated. As a result, the sputtering discharge is ignited. Particles released from the target through the sputtering discharge reach thesubstrate9, thereby depositing a specific thin film on thesubstrate9.
• The[0075]overcoat deposition chamber15 comprises a plasma generation means150 so that plasma-enhanced chemical vapor deposition (PE-CVD) is enabled. FIG. 6 is a schematic plane view of theovercoat deposition chamber15 shown in FIG. 1. Theovercoat deposition chamber15 comprises apumping system151 for discharging an air in the chamber. The plasma generation means150 is mainly composed of a gas-introduction system152 that introduces a gas mixture of hydrocarbon such as CH₄and hydrogen into the chamber, and aHF power supply153 for applying HF power to the gas mixture to form plasma P. Here, frequencies between LF (Low Frequency) and UHF (Ultra-High Frequency) are defined as HF (High Efficiency). The hydrocarbon gas decomposes in the plasma P, thereby depositing a carbon thin-film on thesubstrate9. A self-bias voltage may be given to thesubstrate9 by applying a HF voltage to thesubstrate9 via thefirst substrate holder51. The self-bias voltage is a voltage that has a negative direct current portion and is produced by a mutual reaction of the plasma P and the HF field.
• In this embodiment, a couple of the underlying-[0076]film deposition chambers13 and a couple of the magnetic-film deposition chambers14 are provided, as shown in FIG. 1. Thesubstrates9 are transferred from one underlying-film deposition chamber13, to the other underlying-film deposition chamber13, to one magnetic-film deposition chamber14, to the other magnetic-film deposition chamber14 in order. In other words, the underlying film is deposited in a form of a double layer. And, the magnetic film is deposited on the double-layered underlying film in a form of a double layer as well. There may be another structure where a layer made of the underlying film and the magnetic film is doubled. Showing examples of the films, a Cr film is deposited as the underlying film, and a CoCrTa film is deposited as the magnetic film. As shown in FIG. 1, a couple of theovercoat deposition chambers15 are provided. In the firstovercoat deposition chamber15, the overcoat is deposited at half of required thickness, and in the secondovercoat deposition chamber15 the overcoat with the rest half thickness is deposited.
• Next are described details on the vacuum chambers of the second group.[0077]
• The chambers of the second group is composed of the[0078]second transition chamber21 in which thesubstrate9 temporarily stays after thesubstrate9 is transferred through thefirst transfer path1 and thethird transfer path3, thefirst cleaning chamber22 in which contaminants are removed from thesubstrates9 by a plasma ashing method, thesecond cleaning chamber23 in which contaminants are removed from thesubstrates9 by a gas blowing method, a burnishingchamber24 in which protrusions on thesubstrates9 are removed, a lubricant-layer preparation chamber25 in which the lubricant layer is prepared on thesubstrates9, thepost-preparation treatment chamber26 in which the treatment is carried out after the lubricant-layer preparation, the coolingchamber27, anextra chamber20, an unloadlock chamber28 in which thesubstrate9 temporarily stays when thesubstrate9 is transferred to the atmosphere, and the direction-conversion chambers29.
• One of points that characterize this embodiment is the[0079]first cleaning chamber22. Components on thefirst cleaning chamber22 are described using FIG. 7. FIG. 7 shows a schematic plane view of thefirst cleaning chamber22 shown in FIG. 1.
• In the[0080]first cleaning chamber22, the contaminants are ashed by oxygen plasma. The components on thefirst cleaning chamber22 are almost the same as on theovercoat deposition chamber15 shown in FIG. 6, except that a gas-introduction system222 introduces an oxygen gas. Concretely, thefirst cleaning chamber22 comprises a couple ofHF electrodes223 located at both sides of thesubstrates9 and aHF power source224 that applies the HF voltage to theelectrodes223 to generate the plasma P.
• The[0081]HF electrodes223 are hollow and have a number of gas effusion holes on a surface facing to thesubstrates9. The gas-introduction system222 introduces oxygen gas into thefirst cleaning chamber22 through the inside of theHF electrode223. The gas-introduction system222 may mix a buffer gas or a gas for improving discharge characteristics with the oxygen gas.
• Contaminants formed of carbon or hydrocarbon sometimes adhere to the surface of the overcoat deposited on the[0082]substrates9. Adhesion of the contaminants is caused from factors as described next. The adhesion of carbon mainly results from suspended particles in theovercoat deposition chamber15. In theovercoat deposition chamber15, thin films, i.e. carbon films, are deposited not only on the surfaces of thesubstrates9 but also on exposed surfaces of members in theovercoat deposition chamber15 and a surface of thefirst substrate holder51. These thin-films may be peeled off by internal stress or another factors, when those grow to be thick films. The peeled thin film produces the suspended particles in theovercoat deposition chamber15. If the particles adhere to thesubstrates9, the wettability, i.e. a degree of contact, of the lubricant may deteriorate in the lubricant-layer preparation. Otherwise, abnormal film growth may take place to form minute protrusions on thesubstrates9 in the overcoat deposition.
• The adhesion of hydrocarbon is mainly caused under influence of residual gases in the[0083]overcoat deposition chamber15. Though the overcoat is deposited utilizing decomposition of the hydrocarbon gas in the plasma, non-decomposed hydrocarbon gases still reside in theovercoat deposition chamber15. These residual gases may adhere to thesubstrates9. When adhesion of the residual gases is accumulated, the residual gases may grow to be molecules or particles of some size on thesubstrate9. If such molecules or particles are produced on the surface of thesubstrate9, wettability of the lubricant may deteriorate, or characteristics of the lubricant layer may be affected.
• When the[0084]substrate9 on which such contaminants exist is exposed to the oxygen plasma, the carbon and hydrocarbon are rapidly oxidized, i.e. burnt, thereby becoming volatile substances such as carbon dioxide and water. This oxidation is caused by species produced in the oxygen plasma such as oxygen ions, monoatomic oxygen molecules (O) that are active, and activated oxygen molecules (O2*). Those volatile substances are pumped out by thepumping system221 of thefirst cleaning chamber22. By carrying out such the ashing, it is enabled to suppress the problems that adhesion strength of the lubricant may decrease, and that a magnetic head may be obstructed by the minute protrusions on the surface of the magnetic recording disk.
• On condition of the ashing, prudent examination is required. This is because excessive ashing may lead to eroding the surface of the overcoat. TABLE 1 shows a preferred example of conditions of the ashing on a substrate of 3.5-inch size.[0085]

  TABLE 1
  Preferred Ashing Condition

  	Condition	Preferred range or value

  	Pressure in thechamber 22	1-2	(Pa)
  	Flow rate of oxygen gas	100	(SCCM)
  	HF power	50	(W)
  	Frequency	13.56	(MHz)

• In TABLE 1, “SCCM” means a gas flow rate converted at 0° C. and 1 atm, standing for “Standard Cubic Centimeter per Minute”. When the ashing is carried out on the above condition, the contaminants can be removed within 0.3-2.0 seconds, while preventing the problem of the overcoat erosion. If the ashing is carried out with HF power over 50W, or if the ashing is carried out over 2.0 seconds, the overcoat might be eroded. Therefore, it is preferable that the ashing is carried out with HF power of 50W or less and for 2.0 seconds or less.[0086]
• Next are described components on the[0087]second cleaning chamber23. FIG. 8 shows a schematic plane view of thesecond cleaning chamber23 shown in FIG. 1.
• The[0088]second cleaning chamber23 comprises apumping system231 that discharges an air in the chamber, and a couple ofgas introduction tubes233 having anozzle232 that eject a gas toward thesubstrates9. Eachnozzle232 is a circular disk and parallel to thesubstrates9. Eachnozzle232 has a diameter little larger than that of thesubstrate9. Many gas ejection holes are provided on eachnozzle232 with an equal interval.
• The gas is ejected from each[0089]nozzle232 onto of thesubstrates9 so that the contaminants adhering on thesubstrates9 can be blown away. A pressure in thesecond cleaning chamber23 is about 1×10⁻⁴-1×10⁻⁵Pa, and an ejection pressure of the gas at thesubstrates9 is about 100 Pa. For this gas, an inert gas such as argon or nitrogen is adopted. A filter that removes the contaminants is preferably provided on a gas introduction line (not shown) connected with thegas introduction tube233.
• It may be possible to carry out the described gas-blow cleaning at the atmosphere. However, the gas-blow cleaning in the atmosphere has higher probability that the contaminants still remain after the cleaning than the cleaning in vacuum, because cleanliness of ambience is worse.[0090]
• It can be adopted to clean the[0091]substrate9 by extra-fine fibers instead of the cleaning by the plasma or the gas blow. Specifically, thesubstrate9 is rubbed with a fabric made of extra-fine fibers of about 0.06 denier. This fabric is similar to one that is on sale as a glass wiper.
• Next is described about the burnishing[0092]chamber24.
• FIG. 9 shows a schematic side view of the burnishing[0093]chamber24 shown in FIG. 1. As shown in FIG. 9, the burnishingchamber24 comprises apumping system241 that discharges an air in the chamber, arotation mechanisms8 that holds and rotates thesubstrate9 around a rotation axis corresponding to the center of thesubstrate9, and a burnishingtape242 that is pressed on thesubstrate9 being rotated by therotation mechanism8.
• A detail of the[0094]rotation mechanisms8 is described using FIG. 10. FIG. 10 shows a schematic cross-sectional view of therotation mechanism8 shown in FIG. 9. As shown in FIG. 10, therotation mechanism8 is mainly composed of a back-and-fore drive shaft81 elongated horizontally, a cylindricalrotation drive shaft82 provided coaxially with the back-and-fore drive shaft81, the first back-and-fore drive source83 that drives the back-and-fore drive shaft81, arotation drive source84 that rotates therotation shaft82, and the second back-and-fore drive source85 which moves backward or forward the back-and-fore drive shaft81 and therotation drive shaft82 together.
• At an end of the back-and-[0095]fore drive shaft81, adrive head86 is provided. Thedrive head86 is formed of adisk portion861 that is slightly smaller than a center opening of thesubstrate9, and ataper portion862 with a shape of circular cone coaxial with the back-and-fore drive shaft81.
• [0096]Contact blades821 are provided at an end of therotation drive shaft82. Thecontact blades821 are members that contact an inner edge of the center opening of thesubstrate9, when thesubstrate9 is held by therotation mechanism8. FIG. 11 shows a front view explaining locations of thecontact blades821 shown in FIG. 10. As shown in FIG. 11, threecontact blades821 are provided at every120 degrees on a circumference coaxial with the back-and-fore drive shaft81. As shown in FIG. 10, a cross-sectional shape of eachcontact blade821 is like a curved concave or a “V”-shape.
• As shown in FIG. 10, driven[0097]blades822 contacting a tapered surface of thetaper portion862 are provided.Connection plates824 are provided. Theconnection plates824 connect each drivenblade822 and eachcontact blade821 respectively. Projections are provided on an end of therotation shaft82.Spring members823 such as coil springs connecting each protrusion and each drivenblade22 are provided. Each drivenblade822 is fixed with each projection through eachspring member823. Thecontact blades821 are located outside the projections. Thecontact blades821 can slide on the end of therotation shaft82.
• The back-and-[0098]fore drive shaft81 is connected with the first back-and-fore drive source83 through ajoint mechanism811 capable of disconnection. The first back-and-fore drive source83 is a linear motion source that is a combination of a servomotor and a precise screw, or a linear actuator such as an air cylinder. Therotation drive source84 is a motor connected with the outer surface of therotation drive shaft82 through gears. Thesecond drive source85 moves theframe851 backward or forward, on which the back-and-fore drive shaft81, therotation driving shaft82, the first back-and-fore drive source83 are mounted, thereby moving them simultaneously as a whole. Therotation drive shaft82 penetrates airtightly a wall of the burnishingchamber24 with a vacuum seal such as a mechanical seal.
• A lever (not shown) linked to the described[0099]rotation mechanism8 is provided in the burnishingchamber23. This lever has the same function as the describedlever60 provided in eachrobot61,62,63.
• On the other hand, a storing[0100]roller243 for storing the burnishingtape242 is provided in the burnishingchamber24. The burnishingtape242 is rolled up around the storingroller243 in advance. The burnishingtape242 is used for the burnishing, being rolled out from the storingroller243. Aretrieval roller244 that retrieves a used portion of the burnishingtape242 is provided in the burnishingchamber24. Theretrieval roller244 is rotated by a vacuum motor (a motor operatable in a vacuum environment)245 to retrieve the used portion of the burnishingtape242. During this rotation for the retrieval, the storingroller243 is forced to rotate, thereby drawing out a virgin portion of the burnishingtape242.
• A[0101]pressure member247 that presses the burnishingtape242 against thesubstrate9 is provided. Adrive mechanism87 is also provided in thepressure member247. FIG. 12 shows a schematic side view of thedrive mechanism87 that drives thepressure member247 shown in FIG. 9.
• As shown in FIG. 12, the drive mechanism is mainly composed of a[0102]drive shaft871, atorque motor872 that drives thedrive shaft871, alinear drive source873 for moving backward or forward thedrive shaft871 and thetorque motor872 together. Thepressure member247 is fixed at an end of thedrive shaft871. The torque motor moves thedrive shaft871 forward so that thepressure member247 is pressed against thesubstrate9.
• A precise screw, or a ball thread,[0103]874 is jointed with an output shaft of thetorque motor872. A rear portion of thedrive shaft871 is hollow. An inner surface of this portion is screwed, with which theprecise screw874 is engaged. A rotation of thedrive shaft871 is restrained by a restraint member (not shown). As thelinear drive source873, a combination of a motor and a precise screw, or an air cylinder is adopted. Thedrive shaft871 airtightly penetrates a wall of the burnishingchamber24 with a vacuum seal such as a mechanical seal. As understood from FIG. 9, the burnishingtape242, the storingroller243, theretrieval roller244, thevacuum motor245, thepressure member247 and the drive mechanism are provided at both sides of a location of thesubstrate9, respectively.
• A width of a pressing area on the[0104]pressure member247 is nearly the same as a difference between a radius of the center opening and a radius of thesubstrate9. The width of the pressing area may be shortened, if thesubstrate9 moves along a radius direction relative to the burnishingtape243 and thepressure member247 while thesubstrate9 is rotated.
• An operation of the burnishing[0105]chamber24 is described as follows.
• The burnishing[0106]chamber24 is pumped by thepumping system241 in advance. The second back-and-fore drive source85 moves the back-and-fore drive shaft81 and therotation shaft82 to a standby position in advance. In a state that a pressure in the burnishingchamber24 is maintained at a specific vacuum pressure, thesecond substrate holder52 holding thesubstrates9 is moved into the burnishingchamber24. Thesecond substrate holder52 is stopped at a position where the center of one of thesubstrates9 corresponds to the center axis of the back-and-fore drive shaft81 shown in FIG. 9 and FIG. 10.
• Next, the second back-and-[0107]fore drive source85 is operated to move the back-and-fore drive shaft81 and therotation drive shaft82 forward simultaneously. The back-and-fore drive shaft81 and therotation drive shaft82 are stopped at a position where thedrive head86 is projected through the opening of thesubstrate9 and thecontact blades821 are located at the same vertical plane as thesubstrate9, as shown in FIG. 10.
• In this state, the first back-and-[0108]fore drive source83 is operated to move the back-and-fore drive shaft81 backward. As the back-and-fore drive shaft81 is moved backward, the drivenblades822 contacting the tapered surface of thetaper portion862 shift outward against elasticity of thespring member823. Concurrently, eachcontact blade821 also shifts outward, thereby contacting the inner edge of the center opening of thesubstrate9. The first back-and-fore drive source83 applies adequate force that works so as to move the back-and-fore drive shaft81 backward. Therefore, eachcontact blade821 is pressed onto the inner edge of the center opening of thesubstrate9 adequately. With this operation, thesubstrate9 is held by therotation mechanism8.
• In this state, the lever (not shown in FIG. 9) is driven to expand each of the spring bands (not shown in FIG. 9) outwardly. As a result, the[0109]substrate9 is held only by therotation mechanism8.
• Next, the rotation drive[0110]source84 of therotation mechanism8 is operated to rotate the back-and-fore drive shaft81 and therotation drive shaft82 together. With the rotations of the back-and-fore drive shaft81 and therotation drive shaft82, thesubstrate9 held by thecontact blades821 is also rotated. During this rotation, thejoint mechanism811 disconnects the back-and-fore drive shaft81 from the first back-and-fore drive source83.
• While the[0111]substrate9 is rotated, thedrive mechanism87 at both sides of the substrates is operated. Thepressure members247 at both sides are moved to a specific fore position by thelinear drive source873. This fore position is slightly back from a position at which thepressure member247 just presses the burnishing tape against thesubstrate9. Next, thetorque motor872 is operated to move thepressure member247 slightly forward. As a result, thepressure member247 presses the burnishingtape242 against thesubstrate9. A generated torque is adjusted to control a press pressure of the burnishingtape242 at a specific value.
• The[0112]substrate9 is rubbed with the pressed burnishingtape242, resulting in that the protrusions on thesubstrate9 are removed. In addition to the protrusion removal, the contaminations are sometimes removed if those have adhered to thesubstrate9. The burnishingtape242 is, for example, a tape made of polyethylene-terephthalate or polyamide, on which many abrasive grains such as alumina grains or silicon carbide gains are fixed. A rotation speed of thesubstrate9 may be 100-4000 rpm.
• Prudent examination is required for determining a pressing force of the[0113]pressure member247. When the burnishing by the burnishingtape242 is carried out in vacuum, a friction force between the burnishingtape242 and thesubstrate9 is higher than that in the atmosphere. Therefore, if the burnishing tape is pressed with the same force as in the case of the burnishing in the atmosphere, thesubstrate9 is scraped excessively. As a result, not only protrusion can be removed, but also thickness of the overcoat might be made thinner. For example, in the case of the burnishing at about 1.0×10⁻²-100 Pa, a pressure force is preferably 9.8-588 mN.
• There may be a case that the burnishing is carried out without moving the[0114]substrate9 but with moving the burnishingtape242, i.e. with retrieving the burnishing tape, while the burnishingtape242 is pressed against thesubstrate9. In this case, thepressure member247 is modified into a member that corresponds with a following roller.
• After carrying out the described burnishing on the whole surface of the[0115]substrate9, thedrive mechanism8 moves thepressure member247 to a specific back position, and the operation of the rotation drivesource84 is stopped. Next, the lever releases the spring bands to make thesecond substrate holder52 hold thesubstrate9 by the pallets again. After the first back-and-fore drive source83 and the back-and-fore drive shaft81 are jointed by thejoint mechanism811 again, the first back-and-fore drive source83 moves the back-and-fore drive shaft81 forward by a specific distance. As a result, thecontact blades821 are moved inside by elasticity of thespring member823, and therotation mechanism8 releases thesubstrate9. Then, the second back-and-fore drive source85 moves the back-and-fore drive shaft81 and therotation drive shaft82 backward together to the initial stand-by position.
• Next, the[0116]second substrate holder52 is moved to a position where the center of theother substrate9 is just on an axis of the back-and-fore drive shaft81. Then, the burnishing is carried out on theother substrate9 as well by repeating the same operation as described. As shown in FIG. 1, a couple of the burnishingchambers24 are provided interposing the lubricant-layer preparation chamber25. Therefore, the burnishing is carried out before and after the lubricant-layer preparation.
• Next is described about the lubricant-[0117]layer preparation chamber25.
• FIG. 13 shows a schematic side view of the lubricant-[0118]layer preparation chamber25 shown in FIG. 1. The lubricant-layer preparation chamber25 is a chamber in which the lubricant layer is prepared on thesubstrate9 in vacuum. The lubricant layer is prepared by the vacuum vapor deposition method in the lubricant-layer preparation chamber25.
• As shown in FIG. 13, the lubricant-[0119]layer preparation chamber25 comprises a pumping system that discharges an air in the chamber, a couple ofpots252 in which lubricant is stored, aheater253 for evaporating the lubricant in eachpot252, and arotation mechanism8 for rotating thesubstrate9 during the deposition.
• The lubricant is stored in the[0120]pots252 without diluting with any solvent. Theheater253 is a kind of resistance heaters. Other than the resistance heaters, an electron-beam irradiation heater or an HF induction heater may be employed as theheater253. A shutter is provided over eachpot252 if necessary.
• The[0121]rotation mechanism8 may be the same as one provided in the burnishingchamber24 shown in FIG. 9. In this embodiment, a couple of therotation mechanisms8 are provided so that twosubstrates9 can be rotated simultaneously.
• An operation of the lubricant-[0122]layer preparation chamber25 shown in FIG. 13 is described as follows.
• The lubricant-[0123]layer preparation chamber25 is pumped by thepumping system251 in advance. In a state that a pressure in the burnishingchamber25 is maintained at a specific vacuum pressure, thesecond substrate holder52 holding thesubstrates9 is moved into the lubricant-layer preparation chamber25 and is stopped. Eachrotation mechanism8 holds and rotates eachsubstrate9, respectively. Simultaneously, eachheater253 heats the lubricant in eachpot252. The lubricant is evaporated by heating, thereby depositing a lubricant film as the lubricant layer on eachsubstrate9. The lubricant layer is prepared on twosubstrates9 simultaneously. A principal component of the lubricant may be PEPE. A molecular weight of the lubricant may be 2000-4000. As commercially available lubricant of this kind, there are ZDOL200 and ZDOL4000 (production names) of AUSMONT Corporation.
• A heating temperature by the heater may be 50-310° C. A pressure in the lubricant-[0124]layer preparation chamber25 may be about 1.0×10⁻²-10 Pa. When the deposition is carried out under such conditions, the lubricant film of 1-2 nm in thickness is deposited within 3-5 seconds. A rotation speed is lower than that in the described burnishing. Specifically, it may be about 5-500 rpm.
• After carrying out the lubricant-layer preparation, the operations of the[0125]heater253 and therotation mechanisms8 are stopped. Thesubstrates9 are returned to thesecond substrate holder52. After the lubricant-layer preparation chamber25 is pumped again, thesecond substrate holder52 is moved to the nextpost-preparation treatment chamber26.
• Next are described about the[0126]post-preparation treatment chamber26 and the coolingchamber27. FIG. 14 shows a schematic side view of the post-preparation treatment chamber as shown in FIG. 1.
• The optimum bonded ratio is supposed 20-30% as described. In this embodiment, a bonded ratio within this range is accomplished by heating the[0127]substrates9 in thepost-preparation treatment chamber26, and by optimizing a heating temperature and a heating time. Specifically, the above bonded ratio is accomplished by maintaining a temperature of thesubstrate9 at 30-150° C. for 3-5 seconds.
• As shown in FIG. 14, an infrared (IR)[0128]lamp261 is provided at both sides of thesubstrate9 held with thesecond substrate holder52 in thepost-preparation treatment chamber26. Apumping system262 is provided in thepost-preparation treatment chamber26. Thepumping system262 pumps thepost-preparation treatment chamber26 to maintain a pressure at 1×10⁻⁴-1×10⁻⁵Pa during the post-preparation treatment. Although the vacuum is not an indispensable condition for the post-preparation treatment because this is the step after the lubricant preparation, it is enabled to prevent the contaminants from being adsorbed on a hot surface of the heated lubricant layer by carrying out the post-preparation treatment in vacuum.
• Instead of the heating, the post-preparation treatment may be carried out by irradiation. For example, in a case that the lubricant is capable of photo polymerization, a degree of the polymerization of the lubricant can be controlled by irradiating light such as ultraviolet ray. By this control, it is possible to adjust an adhesive strength and surface lubricity of the lubricant layer. If this method is employed, an ultraviolet (UV) lamp may be used instead of the[0129]IR lamp261.
• The cooling[0130]chamber27 is one for cooling thesubstrate9 after the treatment so that the unloadingrobot62 can easily handle thesubstrate9 in the unloadlock chamber28. In the coolingchamber27, a cooling gas such as hydrogen or helium is blown on thesubstrate9, thereby cooling it down at about 100° C. or below. The cooling system disclosed in Japanese Patent Publication No. 11-203734 is preferably applied to thiscooling chamber27. The unloadingrobot62 provided in the unloadlock chamber28 takes out thesubstrate9 from thesecond substrate holder52, and transfer it to an unloadingcassette621 placed in the atmosphere.
• Next is described a whole operation of the apparatus of this embodiment as follows. The following is a description of a manufacturing method according to an embodiment of the invention too.[0131]
• Two of the[0132]substrates9 are transferred from theloading cassette611 in the atmosphere to theload lock chamber11 by theloading robot61 piece by piece, and are loaded on thefirst substrate holder51. Thefirst substrate holder51 is moved to thepre-heat chamber12. Thesubstrates9 are pre-heated in thepre-heat chamber12. After the pre-heating, thefirst substrate holder51 is moved to the underlying-film deposition chamber13, the magnetic-film deposition chamber14, and theovercoat deposition chamber15 in order, thereby accumulatively depositing the underling film, the magnetic film and the overcoat on thesubstrates9.
• The[0133]substrates9 are unloaded from thefirst substrate holder51 by the shiftingrobot63 in thefirst transition chamber16, and are loaded on thesecond substrate holder52 on standby in thesecond transition chamber21. Thefirst substrate holder51 without thesubstrates9 is returned to theload lock chamber11, in which next twosubstrates9 are loaded.
• On the other hand, the[0134]second substrate holder52 holding thesubstrates9 is moved to thefirst cleaning chamber22, thesecond cleaning chamber23, the burnishingchamber24 and the lubricant-layer preparation chamber25 in order, thereby preparing the lubricant layer on the overcoat. Consequently, thesecond substrate holder52 is moved to thepost-preparation treatment chamber26 and the cooling chamber in order, thereby carrying out the treatment and the cooling of thesubstrates9. When thesecond substrate holder52 reaches the unloadlock chamber28, thesubstrates9 are unloaded from thesecond substrate holder52 and transferred out to the unloadingcassette621 at the atmosphere. Thesecond substrate holder52 without thesubstrates9 is moved to thesecond transition chamber21 for holding next twosubstrates9. Thesecond substrate holder52 holding the next twosubstrates9 is circulated along thesecond transfer path2. During this operation, in each chamber10-17,20-29, thefirst substrate holder51 or thesecond substrate holder52 is located. Eachsubstrate holder51,52 is moved to the next chamber10-17,20-29 at every tact time.
• The described apparatus of this embodiment has advantages as follows.[0135]
• First of all, because it is possible to carry out the steps from the underlying-film deposition to the lubricant-layer preparation with the only one apparatus, costs such as an equipment cost for manufacture and a labor cost for operation are reduced. An unmanned operation is possible while all the[0136]substrates9 in theloading cassette611 are processed and unloaded to the unloadingcassette621. Therefore, the productivity is improved because an unmanned operation time is extended.
• In addition, because the steps after the overcoat deposition to the lubricant-layer preparation are carried out without breaking vacuum, the incorporation or the adhesion of the contaminants with the overcoat and the lubricant layer is prevented. Accordingly, the apparatus of this embodiment can suppress the problems that: the recording layer may be contaminated; the adhesive strength of the lubricant layer may decrease; the thickness of the lubricant-layer may be made out of uniform; and control accuracy of the bonded-ratio of lubricant-layer may decrease. Therefore, the apparatus of this embodiment is much suitable for manufacture of the magnetic recording disks, where the spacing is decreasing.[0137]
• In addition, because the contaminants on the[0138]substrate9 are removed by the plasma-enhanced ashing method and the gas blow method, the above advantages are made higher. The plasma-enhanced ashing method is effective mainly for removal of the organic contaminants. The gas-blowing method is effective mainly for removal of the inorganic contaminants such as metal or glass. After the cleanings in thefirst cleaning chamber22 and thesecond cleaning chamber23, thesubstrate9 is transferred to the lubricant-layer preparation chamber25 without being exposed to the atmosphere. The lubricant layer is prepared on the surface of thesubstrate9 that remains cleaned, because the surface is not contaminated by the atmosphere. Therefore, the above advantages are also made higher from this point.
• In addition, because the burnishing is carried out in vacuum, the contaminants in the atmosphere never adhere to the[0139]substrate9 during the burnishing. From this point, the problems caused by the contaminants are prevented as well. Because thesubstrate9 is transferred to thepost-preparation treatment chamber26 without being exposed to the atmosphere after the lubricant-layer deposition, this advantage is also made higher.
• The point that the lubricant is used without diluting with solvent brings following advantages.[0140]
• As solvent for the lubricant, flon (chloro-fluoro-carbon) conventionally has been used because the lubricant is fluoride. However, considering a problem of the ozone layer destruction, use of flon-alternative solvent such as perfluorocarbon has become a major issue. Still, even the flon-alternative solvent is sometimes questioned because that is regarded as a material causing the global warming.[0141]
• Another problem with respect to the use of solvent is contamination of the lubricant layer. Diluted lubricant easily contains contaminants, resulting in that the contaminants are incorporated with the lubricant layer. The contaminants in the lubricant layer may cause many kinds of problems that: the magnetic head is corroded by ionized contaminants; the magnetic head is mechanically damaged by the protrusions formed on the surface of the lubricant layer; the magnetic head is chucked on the surface of the magnetic recording disk because the lubricity decreases. Contrarily, the method and the apparatus of the embodiments are free from these problems because of no use of the solvent.[0142]
• Nevertheless, a small amount of solvent is occasionally used on such purpose as to make it easier to deal with the lubricant. As solvent, perfluoroalkyl, for example, HFE7300 or HFE7100 of 3M Corporation may be used. A quantity of the solvent is one volume percentage or below against the lubricant.[0143]
• Next is described a magnetic disk manufacturing apparatus of the second embodiment of the invention.[0144]
• FIG. 15 shows a main part of the magnetic recording disk manufacturing apparatus of the second embodiment. The apparatus shown in FIG. 15 is different from the described first embodiment in the composition of the plasma-enhanced ashing to clean the[0145]substrate9. Concretely, in the embodiment shown in FIG. 15, the ashing is carried out in theovercoat deposition chamber15. FIG. 15 shows components on theovercoat deposition chamber15.
• The components on the[0146]overcoat deposition chamber15 are nearly the same as those in FIG. 6, except the gas-introduction system152. The gas-introduction152 shown in FIG. 15 can introduce a gas mixture of carbon hydride and hydrogen, or an oxygen gas selectively to theovercoat chamber15.
• In FIG. 15, when an overcoat is deposited, a gas mixture of hydrocarbon and hydrogen is introduced. After the overcoat deposition, without moving the[0147]first substrate holder51, theovercoat chamber15 is pumped by the pumping system down to about 5×10⁻²Pa. Then, the introduced gas is switched to oxygen by opening and closing thevalves154. The ashing is carried out by the oxygen plasma in the same way as the described.
• The embodiment shown in FIG. 15 has an advantage that it is enabled to remove the contaminants not only on the[0148]substrate9 but also on thefirst substrate holder51. If the contaminants remain on thefirst substrate holder51, the contaminants may adhere to thenext substrate9 held by the first substrate holder next. The apparatus of this embodiment has an effect that the adhesion of the contaminants via thefirst substrate holder51 is prevented in addition to the adhesion directly to thesubstrate9. Moreover, it also possible to remove the contaminants adhering to exposed surfaces of the components in theovercoat chamber15.
• Next is described a magnetic disk manufacturing apparatus of the third embodiment of the invention. FIG. 16 shows a main part of the magnetic recording disk manufacturing apparatus of the third embodiment of the invention. The apparatus of the third embodiment has the feature that the[0149]third cleaning chamber200 for cleaning thesubstrate9 is added. Thethird cleaning chamber200, for example, may be interposed between thesecond cleaning chamber23 and the burnishingchamber24 in the layout shown in FIG. 1. FIG. 16 shows a schematic side view of thethird cleaning chamber200.
• In the[0150]third cleaning chamber200 shown in FIG. 16, thesubstrate9 is cleaned by laser irradiation. Concretely, thethird cleaning chamber200 comprises alaser oscillator201, and anintroduction window202 for introducing laser beam into the chamber. Theintroduction window202 is mounted airtightly shutting an opening formed on a wall of thethird cleaning chamber200.
• The surface cleaning by laser irradiation is mainly conducted by ablation. When the laser beam is irradiated on the contaminants adhering to the[0151]substrate9, the contaminants are rapidly decomposed by energy of the laser beam. Thethird cleaning chamber200 comprises apumping system203 so that the laser irradiation cleaning can be carried out in vacuum.
• TABLE 2 shows an example of condition of the cleaning by laser irradiation.[0152]

  TABLE 2
  Preferred Condition of the Laser Irradiation Cleaning

  	Condition	Preferred range or value
  	Laser	Excimer laser
  	Wavelength	248 nm
  	Irradiation energy density	200 mJ/cm2or below
  	Irradiation type	Pulse (1-100 Hz)
  	The number of pulses	100 or below

• If an irradiation energy density exceeds 200 mJ/cm2, there arises a possibility to erode the overcoat on the[0153]substrate9. To carry out the cleaning without eroding the overcoat, a lower energy density, a lower frequency of the pulses or a smaller number of the pulses may be adopted. It is preferable to scan the laser beam in a radius direction of thesubstrate9 while thesubstrate9 is rotated so that the laser beam can be irradiated uniformly on the whole surface of thesubstrate9. For this rotation, the same rotation mechanism as in the described embodiment may be employed.
• Next is described a magnetic disk manufacturing apparatus of the fourth embodiment of the invention. FIG. 17 shows a main part of the magnetic recording disk manufacturing apparatus of the fourth embodiment of the invention. A point characterizing this embodiment is that the burnishing and the lubricant-layer preparation are carried out in the same chamber. In other words, a burnishing-[0154]preparation chamber210 is provided instead of the burnishingchamber25 and the lubricant-layer preparation chamber26 in the first embodiment.
• FIG. 17 shows a schematic side view of the burnishing-[0155]preparation chamber210. The burnishing-preparation chamber210 comprises a pumping system211 that discharges an air in the chamber, arotation mechanism8 that holds and rotates thesubstrate9 around the axis coaxial with thesubstrate9, a burnishing tape that is pressed against thesubstrate9 being rotated by therotation mechanism8, and alubricant coater213 that coats lubricant on thesubstrate9 simultaneously with the burnishing by a burnishingtape212.
• Description about the[0156]rotation mechanism8 and the burnishingtape212 are omitted because those are the same as in the described first embodiment. Thelubricant coater213 is mainly composed of anejector214 ejecting the lubricant from a tip thereof, afeeding tube215 connected with theejector214, and a pump (not shown) that feeds the lubricant from a lubricant storing vessel (not shown) to theejector214 through the feedingtube215. Thelubricant coater213 is provided at each side of the substrate location.
• An operation of the burnishing-[0157]preparation chamber210 is described.
• In a state that the burnishing-[0158]preparation chamber210 is pumped to obtain a specific vacuum pressure, thesecond substrate holder52 holding thesubstrates9 is moved into the burnishing-preparation chamber210 and is stopped at a specific position. Then, therotation mechanism8 holds one of thesubstrates9 and rotates it. During this rotation, thepressure members247 at both sides of thesubstrate9 are displaced toward thesubstrate9 by a drive source (not shown), thereby pressing the burnishingtapes212 against thesubstrate9. As a result, the protrusions existing on thesubstrate9 are removed.
• Simultaneously, the[0159]lubricant coater213 is operated. The lubricant is fed with theejectors214 by the pump through the feedingtubes215. The lubricant is ejected from theejectors214 and poured onto the burnishingtapes212. The lubricant poured on the burnishingtapes212 is moved as the burnishingtapes212 are moved. When the lubricant reaches a place where the burnishingtapes212 are pressed against thesubstrate9, the lubricant is thinly extended out between the burnishingtape212 and thesubstrate9. The extended lubricant adheres to thesubstrate9. Thus, the lubricant is coated on thesubstrate9.
• The lubricant in this embodiment may be the same as in the described embodiment, whose main component is PEPE. The use of a small amount of the solvent is allowed as described. A space pressure in the burnishing-[0160]preparation chamber210 and a pressure strength by thepressure members247 may be the same as those in the described embodiment as well.
• After the burnishing and the lubricant coating are simultaneously carried out on the whole surfaces of the[0161]substrate9, thepressure members247 are moved backward and the rotation by therotation mechanism8 is stopped. Thesecond substrate holder52 is moved to a position where therotation mechanism8 can hold theother substrate9. As therotation mechanism8 rotates theother substrate9, the burnishing and the lubricant coating are simultaneously carried out on the whole surfaces of theother substrate9. Operations of the components except the burnishing-preparation chamber210 are the same as those of the described first embodiment.
• As understood from the above description, productivity in this embodiment is enhanced because the burnishing and the lubricant-layer preparation are simultaneously carried out in the burnishing-[0162]preparation chamber210. Here, “simultaneously” includes the case that the burnishing and the lubricant-layer preparation are carried out literally at the same time, and the case that the burnishing and the lubricant-layer preparation are carried out roughly at the same time, exactly not the same time. The apparatus of this embodiment also has an advantage that the contaminants in the atmosphere cannot be incorporated with the lubricant layer because the burnishing and the lubricant-layer preparation are carried out in vacuum. Therefore, the apparatus contributes to manufacture of high-quality magnetic recording disks. The advantage that productivity is enhanced is still the same even when those are carried out in the atmosphere.
• Carrying out the burnishing in vacuum and carrying out the lubricant-layer preparation in vacuum are closely related to each other. Though carrying out the burnishing in vacuum is much effective for the reduction of the contaminants, the burnishing possibly might be excessive because a friction force between the burnishing[0163]tape212 and thesubstrate9 is higher than that in the atmosphere. “Excessive” means a situation that not only the protrusions are removed, but the deposited overcoat is also scraped off. Contrarily, the raw lubricant generally has a high viscosity. If the lubricant may be diluted with the solvent, the coating can be made easier. However, the use of the solvent brings the described problems.
• This embodiment has an advantage of solving these conflicting problems at once, that is, a ‘killing two birds with one stone’ solution. When the lubricant is coated on the[0164]substrate9 via the burnishingtape212, the lubricant coating is made easier even if a viscosity of the lubricant is high, in addition to that the excessive burnishing is prevented by the lubricant inserted between the burnishingtape212 and thesubstrate9.
• Though the lubricant-layer preparation is carried out by pouring the lubricant on the burnishing[0165]tape212 in this embodiment, the vapor deposition as in the first embodiment may be employed by providingpots252 andheaters253 as shown in FIG. 13 in the burnishing-preparation chamber210.
• The lubricant-layer preparation also may be carried out by a spraying method. Concretely, a sprayer is provided at each side of the substrate location in the burnishing-[0166]preparation chamber210. Lubricant diluted with solvent is sprayed from the sprayers onto thesubstrate9.
• Next is described a magnetic disk manufacturing apparatus of the fifth embodiment of the invention. FIG. 18 shows a main part of the magnetic recording disk manufacturing apparatus of the fifth embodiment of the invention.[0167]
• The fifth embodiment is different from the described first embodiment in the components on the burnishing[0168]chamber24. In the fifth embodiment, a cleaning means88 is provided. The cleaning means88 cleans a surface of the burnishingtape242 in vacuum prior to the burnishing.
• A film containing oxygen ions or sulfuric ions, dusts, or organic substance such as fat and oil may adhere to the surface of the burnishing[0169]tape242 as contaminants. If the burnishing is carried out in a state that such contaminants adhere to the surface of the burnishingtape242, the contaminants may transfer to thesubstrate9.
• Considering this, the surface of the burnishing[0170]tape242 is cleaned by the cleaning means88 prior to the burnishing in this embodiment. Concretely, the cleaning means88 is mainly composed of an ion-beam source881 provided in the burnishingchamber24, and agas supply system882 that supplies a material gas with the ion-beam source881.
• The[0171]gas supply system882 supplies an argon gas or an oxygen gas. The ion-beam source881 irradiates beam of argon ion or oxygen ion onto the burnishingtape242. Acceleration energy of the ion beam is preferably 250-600 eV. An incident angle of the ion beam onto to the burnishingtape242 is preferably 30-40 degrees. If the burnishingtape242 may be damaged by the ion beam, the acceleration energy is made lower, or the incident angle is made smaller.
• An irradiation pattern of the ion beam is a rectangle whose width is the same as the burnishing[0172]tape242 or slightly larger, and whose length is about 30 mm. The ion-beam source881 has a focusing electrode, which focuses the ion beam so that this irradiation pattern can be obtained.
• The incident ion beam onto the burnishing[0173]tape242 bombards or scrapes the contaminants existing on the surface of the burnishingtape242, thereby removing them. As a result, the surface of the burnishingtape242 is cleaned. The burnishing is carried out by pressing the cleaned surface of the burnishingtape242 onto thesubstrate9. Therefore, the contaminants are prevented from adhering to thesubstrate9.
• Though the surface of the burnishing[0174]tape242 is cleaned by the ion beam in this embodiment, it is possible to clean it by plasma or laser. It is also possible to clean the surface of the burnishingtape242 using the method in the fourth embodiment.
• Next is described about an in-line type substrate processing apparatus of an embodiment of the invention. The magnetic-recording disk manufacturing apparatus shown in FIG. 1 is concurrently an in-line type substrate processing apparatus. The apparatus comprises a plurality of vacuum chambers[0175]10-17,20-29 connected along twocircumventive transfer paths1,2, and the shiftingrobot63 that transfers thesubstrate9 in vacuum without exposing thesubstrate9 to the atmosphere along thethird transfer path3 that interconnects thefirst path1 and thesecond path2.
• The described structure is a kind of circumventive in-line type apparatus. U.S. Pat. No. 5,846,328 discloses the same kind of apparatus. This type of apparatus has a merit that the substrate holder does not bring contaminants in the atmosphere into the apparatus because the substrate holder is not taken out to the atmosphere. However, if it is intended to provide more vacuum chambers in such a kind of in-line type apparatus, a transfer path with a longer length is required. As imagined from FIG. 1, if the transfer path is longer, a space surrounded by the transfer path is larger. This space is not essential for the substrate processing. If whole occupation space of the apparatus increases with an increase in such a non-essential space, it is not a preferable result.[0176]
• Contrarily, by providing additional vacuum chambers along another circumventive transfer path as in the apparatus of this embodiment, the number of vacuum chambers can be increased without much increase in the whole occupation space of the apparatus. Therefore, this solution is very much suitable for the case that a larger number of processes are intended to carry out without breaking vacuum.[0177]
• An application of the idea of such an in-line type substrate processing apparatus is not limited to the described manufacture of magnetic recording disks. For example, the idea can be applied to manufacture of optical information recording media such as a compact disc, and manufacture of display devices such as a liquid crystal display, as far as the in-line type apparatus is used.[0178]
• The circumventive transfer path may have another shape than a rectangle. For example, the circumventive transfer path may have a shape of a triangle, a circle, a pentagon, or the like. This invention is not limited to the use of the substrate holder that holds two substrates simultaneously. It is possible to employ a substrate holder that holds only one substrate, or holds three or more substrates simultaneously.[0179]
• The magnetic-recording disk manufacturing apparatus of the invention is not limited to the described in-line type. For example, the invention includes a cluster-tool type apparatus where process chambers, a load lock chamber and an unload lock chamber are provided around a transfer chamber in which a transfer robot is provided.[0180]
• The term “magnetic-recording disk manufacturing apparatus” generally means an apparatus for manufacturing a magnetic recording disk. Therefore, it includes an apparatus with which all processes for manufacturing a magnetic recording disk are carried out, and an apparatus with which not all processes are carried out.[0181]
• The term “magnetic recording disk” means a disk where information is recorded utilizing an effect of magnetism in general. Therefore, it includes a disk utilizing another effect than magnetism in addition to the magnetism, such as a magneto-optical recording disk.[0182]

Claims (19)

What is claimed is:

1. An apparatus for manufacturing a magnetic recording disk, comprising:

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate;

a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and

a transfer system that transfers the substrate from the magnetic-film deposition chamber to the lubricant-layer preparation chamber without exposing the substrate to atmosphere.

2. An apparatus for manufacturing a magnetic recording disk, comprising:

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate;

a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and

a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber.

3. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 2, wherein, in said cleaning chamber, contaminants adhering to the substrate are removed by oxidizing the contaminants into volatile oxides, utilizing a reaction with oxygen ion or activated oxygen produced in oxygen plasma generated at a space facing the substrate.

4. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 2, wherein, in said cleaning chamber, contaminants adhering to the substrate are removed by energy of laser beam irradiated onto the substrate.

5. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 2, wherein, in said cleaning chamber, gas is blown onto the substrate, thereby blowing contaminants adhering to the substrate away from the substrate.

6. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 2, further comprising a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.

7. An apparatus for manufacturing a magnetic recording disk, comprising:

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate;

an overcoat deposition chamber in which an overcoat is deposited on the substrate after the magnetic-film deposition, said overcoat deposition chamber comprising means for generating plasma in which oxygen ion or activated oxygen is produced, said oxygen ion or said activated oxygen oxidizing contaminants on the substrate into volatile oxides, thereby removing the contaminants; and

a transfer system that transfers the substrate from the magnetic-film deposition chamber to the overcoat deposition chamber without exposing the substrate to atmosphere.

8. An apparatus for manufacturing a magnetic recording disk, comprising:

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; and

a burnishing chamber in which a burnishing is carried out in vacuum after the magnetic-film deposition, said burnishing being a step where protrusions on the substrate are removed.

9. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 8, further comprising a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate after the burnishing, and a transfer system that transfers the substrate from the burnishing chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.

10. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 8, wherein said burnishing chamber comprises a burnishing tape that is rubbed against the substrate for the burnishing, and cleaning means for cleaning a surface of the burnishing tape prior to the burnishing.

11. An apparatus for manufacturing a magnetic recording disk, comprising;

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate, and

a burnishing-preparation chamber in which a burnishing and a lubricant-layer preparation are carried out after the magnetic-film deposition, said burnishing being a step where protrusions on the substrate are removed, said lubricant-layer preparation being a step where a lubricant-layer is prepared on the substrate.

12. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 11, wherein said burnishing-preparation chamber comprises a burnishing tape that is rubbed against the substrate thereby removing the protrusions, and a lubricant coater that applies a lubricant on the burnishing tape being rubbed against the substrate, thereby coating the lubricant on the substrate.

13. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 11, further comprising cleaning means for cleaning a surface of the burnishing tape in vacuum prior to the burnishing.

14. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 12, wherein said lubricant coater coats the lubricant without diluting the lubricant with solvent.

15. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 12, wherein said burnishing and said lubricant-layer preparation are carried out in vacuum.

16. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 14, wherein said burnishing and said lubricant-layer preparation are carried out in vacuum.

17. An apparatus for manufacturing a magnetic recording disk, comprising;

a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate,

a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate after the magnetic-film deposition, and

a post-preparation treatment chamber in which a post-preparation treatment is carried out onto the substrate in vacuum, said post-preparation treatment being a step of controlling adhesive strength and surface lubricity of the lubricant layer by heating or irradiating the lubricant layer.

18. An apparatus for manufacturing a magnetic recording disk as claimed inclaim 17, further comprising a transfer system that transfers the substrate from the lubricant-layer preparation chamber to the post-preparation treatment chamber without exposing the substrate to the atmosphere.

19. An in-line type substrate processing apparatus, comprising:

a plurality of circumventive transfer paths;

a plurality of vacuum chambers provided along the transfer paths;

a connection transfer path connecting at least two of the circumventive transfer paths; and

a transfer system that transfers a substrate to be processed along the circumventive transfer paths, and transfers the substrate along the connection transfer path without exposing the substrate to atmosphere.

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