US20020000198A1 - The dome: shape and temperature controlled surfaces - Google Patents

Abstract

The present invention provides an HDP-CVD tool using simultaneous deposition and sputtering of doped and undoped silicon dioxide capable of excellent gap fill and blanket film deposition on wafers. The tool of the present invention includes: a dual RF zone inductively coupled plasma source; a dual zone gas distribution system; temperature controlled surfaces within the tool; a symmetrically shaped turbomolecular pumped chamber body; a dual cooling zone electrostatic chuck; an all ceramic/aluminum alloy chamber; and a remote plasma chamber cleaning system.

Description

FIELD OF THE INVENTION
• The present invention relates to an apparatus and method for processing semiconductor substrates, and more particularly, to a high density plasma (HDP) chemical vapor deposition (CVD) tool for deposition of films, preferably αC, αFC, SiN, SiON, doped and undoped SiO[0001]₂and BiN, onto substrates.
BACKGROUND OF THE INVENTION
• Plasma tools used for semiconductor processes such as chemical vapor deposition (CVD), etching, reactive ion etching and so forth typically employ either inductive coupling or capacitive coupling to strike and maintain a plasma. One advantage of inductively coupled plasmas over capacitively coupled plasmas is that the inductively coupled plasma is generated with a much smaller bias voltage on the substrate, reducing the likelihood of damage thereto. In addition, inductively coupled plasmas have a higher ion density thereby providing higher deposition rates and mean free paths, while operating at a much lower pressure than capacitively coupled plasmas. These advantages allow in situ sputtering and/or ion directionality during processing.[0002]
• More recently, high density plasma (HDP) CVD processes have been used to provide a combination of chemical reactions and physical sputtering. HDP-CVD processes promote the disassociation of the reactant gases by the application of radio frequency (RF) energy to the reaction zone proximate the substrate surface thereby creating a plasma of highly reactive ionic species. The relatively non-reactive ionic constituents, i.e., Ar, are given high momentum (e field) used to dislodge deposited film material selectively from specific areas along the profile of the film based on a sputter yield curve. The high reactivity of the released ionic species reduces the energy required for a chemical reaction to take place, thus lowering the required temperature for these processes.[0003]
• The goal in most HDP-CVD processes is to deposit a film of uniform thickness across the surface of a substrate, while also providing good gap fill between lines and other features formed on the substrate. Deposition uniformity and gap via fill are very sensitive to source configuration, gas flow changes, source radio frequency generator power, bias radio frequency generator power, gas nozzle design, including symmetry in distribution of nozzles, the number of nozzles, the height the nozzles are disposed above the substrate support and the lateral position of the nozzles relative to the substrate support. These variables change as processes performed within the tool change and as process gases change.[0004]
• One problem encountered in semiconductor fabrication is generation and maintenance of plasma density uniformity above the substrate. Plasma uniformity is dependent upon magnetic and electric fields generated in the tool as well as gas flow into and out of the tool. As substrate sizes increase, i.e., to 300 mm, uniformity over a larger area becomes even more difficult achieve.[0005]
• Another problem which affects deposition uniformity is uneven gas distribution over the substrate surface. Typically, a gas plenum is provided around the perimeter of a processing region and a plurality of nozzles extend radially inwardly to provide gases to the substrate surface. In some applications, the gases tend to be unevenly distributed across the substrate surface, with more gas provided towards the edge of the substrate and less gas provided towards the center of the substrate. In addition, reactant gases are typically mixed in the gas injection system prior to their introduction into the chamber. In these instances, material tends to deposit within the gas injection system itself, thereby clogging some gas injectors further heightening non-uniform gas distribution.[0006]
• Still another problem encountered is maintaining a uniform temperature across the substrate surface. As a substrate is processed, there exists a significant heat load due to plasma radiation and ion bombardment exposed to the substrate surface. If a temperature gradient exists across the substrate surface, the deposition of the film can proceed in a non-uniform manner. Therefore, it is important to precisely control the temperature of the substrate.[0007]
• Another problem is deposition of material on the tool itself. During processing, deposition material deposits throughout the tool, on the substrate support member, and on the gas distribution components. Over time, such material build up can flake off into the chamber resulting in particle contamination on the substrate which can compromise the integrity of the devices being fabricated. Thus, the tool must be periodically cleaned. A favored method of cleaning is to introduce cleaning gases into the chamber to react with the deposited material to form a product which can be exhausted from the chamber. Typically, a cleaning gas, such as a fluorinated gas, is introduced into the chamber and a plasma is struck in the chamber. The resultant excited products react with the deposition material to form gas phase byproducts which are then exhausted from the chamber. One problem with this process is that cleaning is typically localized in regions adjacent to the plasma. In order to enhance cleaning of all exposed chamber surfaces, the time period in which the cleaning process is performed is increased, thereby decreasing throughput, and/or the cleaning process is performed using high temperatures, thereby effectively over cleaning some of the chamber surfaces and increasing the cost of consumables and/or maintenance intervals.[0008]
• Therefore, there is a need for a process tool which provides more uniform conditions for forming thin CVD films on a substrate, including enhanced cleaning features and high throughput, in a more manufacturing worthy way.[0009]
SUMMARY OF THE INVENTION
• An embodiment of the present invention provides an HDP-CVD tool using deposition and sputtering of doped and undoped silicon dioxide capable of excellent gap fill and blanket film deposition on wafers having sub 0.5 micron feature sizes having aspect ratios higher than 1.2:1. The tool of the present invention includes: a dual RF zone inductively coupled plasma source; a dual zone gas distribution system; temperature controlled chamber components; a symmetrically shaped, turbomolecular pumped chamber body; a dual, cooling zone electrostatic chuck; an all ceramic/aluminum alloy chamber construction; and a remote plasma chamber cleaning system.[0010]
BRIEF DESCRIPTION OF THE DRAWINGS
• So that the manner in which the above recited features, advantages and objects of the present invention are attained can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings.[0011]
• It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are, therefore, not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.[0012]
• FIG. 1 is a cross sectional view of a process chamber of the present invention;[0013]
• FIGS.[0014]2A-2C are electrical schematic views showing three various RF matching configurations which can be used to advance in the present invention;
• FIG. 3 is a schematic cross sectional view showing the dual zone RF plasma source of the present invention;[0015]
• FIG. 4 is an exploded view of the top temperature control assembly and top antenna;[0016]
• FIG. 5 is a cross sectional view of a substrate support member of the present invention;[0017]
• FIG. 6 is a top cross sectional view of a substrate support member of the present invention;[0018]
• FIG. 7 is a top cross sectional view of a chamber having a substrate support member disposed therein;[0019]
• FIG. 8 is a top view of one embodiment of an electrostatic chuck;[0020]
• FIG. 8[0021]ais an alternative embodiment of the electrostatic chuck;
• FIG. 9 is a cross sectional view of one embodiment of the electrostatic chuck of FIG. 8;[0022]
• FIG. 10 is a flow diagram of the temperature control aspects of the electrostatic chuck of FIG. 8 and[0023]9;
• FIG. 11 is a cross-sectional view of an electrostatic chuck and a cover ring;[0024]
• FIG. 12 is a cross-sectional view of a cover ring disposed in proximity to a source coil;[0025]
• FIG. 13 is a side view partially in section showing the gas control system of the present invention;[0026]
• FIG. 14 is a side view partially in section showing the gas distribution ring and first gas channel;[0027]
• FIG. 15 is a side view partially in section showing the gas distribution ring and the second gas channel;[0028]
• FIG. 16 is a side view partially in section showing the center gas feed assembly;[0029]
• FIG. 17 is an exploded view of the gas distribution ring and the lose plate of the lid assembly;[0030]
• FIG. 18 is a schematic side view partially in section showing the microwave remote plasma clean and its location on the chamber;[0031]
• FIG. 19 is a top view of a gas diffuser;[0032]
• FIG. 20 is a side view of a gas diffuser; and[0033]
• FIG. 21 is a perspective view of a gas baffler.[0034]
DESCRIPTION OF A PREFERRED EMBODIMENT
• The tool will be described in detail below with reference to each of the following subassemblies: a chamber body, a chamber lid assembly, a cathode and lift assembly, a process kit, a gas distribution assembly and a remote plasma source.[0035]
• Chamber Body[0036]
• FIG. 1 is a cross sectional view of a[0037]processing tool10 of the present invention. Theprocessing tool10 generally includes achamber body12, alid assembly14 and a cantilevered, removablesubstrate support member16. These members in combination form a physically and electrically symmetric, evacuable enclosure andexhaust passage22 in which substrate processing is carried out.
• The[0038]chamber body12 is preferably a unitary, machined structure having asidewall18 which defines an innerannular processing region20 and tapers towards its lower end to define aconcentric exhaust passage22. Thechamber body12 defines a plurality of ports including at least asubstrate entry port24 sealed by aslit valve44 and aside port26 through which the cantilever mountedsubstrate support member16 is disposed. Thesubstrate entry port24 and thesupport member port26 are preferably disposed through opposite sides of thechamber body12. Two additional side ports are disposed on opposite sides of thechamber wall18 at about the level of the upper surface of thesubstrate support member16 and are connected to agas channel28 formed in thechamber wall18. Cleaning gases, such as disassociated fluorine containing gases, are introduced into thechannel28 from aremote plasma source30 and into the chamber through the gas inlet ports provided therefor and shown in FIG. 18. The location of the openings of the ports into the chamber are provided to direct gases towards areas of the reactor where heavy build-up occurs. The remote plasma source and cleaning gas delivery will be described in more detail below.
• The upper surface of the[0039]chamber wall18 defines a generally flat landing area on which abase plate33 of the lid assembly34 is supported. One or more o-ring grooves36 are formed in the upper surface of thewall18 to receive one or more o-rings38 to form an airtight seal between thechamber body12 and thebase plate33. The lid assembly will be described in more detail below.
• The[0040]substrate support member16 partially extends through theside access port26 formed in thechamber wall18 and is mounted to thechamber wall18 on aflange46 to provide a generally annularsubstrate receiving surface200 in the center of the chamber. When thesupport member16 is positioned in the chamber, anouter wall50 of theannular support member16 and aninner wall52 of the chamber define anannular fluid passage22 that is substantially uniform about the entire circumference of thesupport member16. It is preferred that the substantiallyuniform passage22 and theexhaust port54 be substantially concentric with the substrate receiving surface of the support member. Theexhaust port54 is centered below the substrate receiving portion of thesupport member16 to draw the gases evenly through theuniform passage22 and out of the chamber. This enables more uniform gas flow over the substrate surface about the entire circumference thereof and radially downwardly and outwardly from the chamber throughexhaust port54 centered in the base of the chamber. Theuniform fluid passage22 promotes uniform deposition of film layers by maintaining pressure and residence time uniformity, lacking in existing processing chambers, such as substrate locations with differing proximity in relation to the pumping port.
• A pumping stack comprising a twin[0041]blade throttle assembly56, agate valve58 and aturbomolecular pump60 is mounted on the tapered lower portion of the chamber body to provide pressure control within the chamber. The twinblade throttle assembly56 and thegate valve58 are mounted between thechamber body12 and theturbomolecular pump60 to allow isolation viagate valve58 and/or pressure control at pressures of from about 0 to about 100 milliTorr as determined by settings of the twinblade throttle assembly56. A 1600 L/sec turbo pump is a preferred pump, however, any pump which can achieve the desired pressure in the chamber can be used. A foreline57 is connected to theexhaust port54 at positions upstream and downstream from the turbo pump. This provides backing pump capability. The foreline is connected to the remote mainframe pump, typically a roughing pump. A port59 is formed in the pumping stack to mount a flange61 of the foreline. During chamber cleaning, cleaning gases are flown into the chamber at a high rate, thereby increasing the pressure in the chamber. In one aspect of the invention, therefore, the turbo pump is isolated from the chamber by thegate valve58 and the mainframe pump is used to maintain the pressure in the chamber during the cleaning process.
• During processing of a substrate in the chamber, the vacuum pump evacuates the chamber to a pressure in the range of about 4 to about 6 milliTorr, and a metered flow of a process gas or gases is supplied through the gas distribution assembly and into the chamber. The chamber pressure is controlled by directly measuring the chamber pressure and feeding this information to a controller that opens and closes the valves to adjust pumping speed. Gas flows/concentrations are controlled directly by mass flow controllers through a software set point provided in a process recipe. By measuring the flow rate of gases being pumped out of the chamber through the[0042]exhaust port54, a mass flow controller (not shown) on the inlet gas supply can also be used to maintain the desired pressure and gas concentration in the chamber.
• Chamber Lid Assembly[0043]
• The chamber lid assembly[0044]34 is generally comprised of anenergy transmitting dome32, anenergy delivery assembly62 and atemperature control assembly64 supported on a hinge mountedbase plate33. Thebase plate33 defines an inner annular channel in which a gas distribution ring is disposed. O-ring grooves are formed in the top of the gas distribution ring to receive an o-ring to seal thedome32 and the top of the gas distribution ring. In combination, the lid assembly provides both the physical enclosure of the plasma processing region as well as the energy delivery system to drive processing. A cover is preferably provided over the entire lid assembly to house the various components.
• The[0045]dome32 is generally comprised of acylindrical sidewall66 which is closed on one end by aflat top68. The cylindrical sidewall is generally perpendicular to the upper surface of thesubstrate support member16 and the planar top68 is generally parallel to the upper surface of thesupport member16. Thejunction70 between the sidewall and the top is rounded to provide a curved inner wall of thedome32. Thedome32 is made of a dielectric material which is transmissive to RF energy, preferably a ceramic such as aluminum oxide (Al₂O₃), aluminum nitride (AIN) or quartz (SiO₂).
• Two separately powered RF coils, a[0046]top coil72 and aside coil74, are wound external to adielectric dome32. Theside coil74 is preferably covered by a ground shield to reduce electrical crosstalk between thecoils72 and74. The RF coils72 and74 are powered by two variablefrequency RF sources76 and78.
• Each power source includes a control circuit which measures reflected power and which adjusts a digitally controlled synthesizer in the RF generator to sweep frequencies, typically starting at 1.8 MHZ, to minimize the reflected power. When the plasma ignites, the circuit conditions change because the plasma acts as a resistor in parallel with the coil. At this stage, the RF generator continues to sweep the frequency until a minimal reflected power point is again reached. The power source circuitry is designed so that each set of windings resonates at or near the frequency at which the minimum reflected power point is reached, so that the voltage of the windings is high enough to drive sufficient current to sustain the plasma. Thus, frequency tuning guarantees that the system remains close to resonance even if the resonance point of the circuit changes during processing. In this way, frequency tuning eliminates the need for circuit tuning and impedance matching by varying the values of impedance matching components (e.g., capacitors or inductors).[0047]
• Each power source ensures that the desired power is delivered to the load despite any impedance mismatches, even continuously varying impedance mismatches which can arise due to changes in the plasma impedance. To ensure that the correct power is delivered to the load, each RF generator dissipates the reflected power itself and increases the output power so that the delivered power remains at the desired level.[0048]
• FIGS.[0049]2(a),(b) and (c) show three separate local RF match configurations schematically. FIG. 2(a) shows a matching configuration for use with a coil L having one end grounded. The two capacitors C1 and C2 form an RF voltage divider. In FIG. 2(b), a balanced coil L having two shunt capacitors C2 and C3, where C2≈C3, across it to ground is used to match the load (plasma) frequency. Finally, in FIG. 2(c), a pi (π) network match is used having two variable capacitors to ground across the coil L. Since the output impedance of most conventional RF generators is designed to be 50 ohms, matching networks2(a), (b) or (c) can be used to transfer maximum power to plasmas ranging in impedance from as low as 5 ohms to as high as 900 ohms (in the balanced load case). This dual coil system allows control of the radial ion density profiles in the reaction chamber.
• FIG. 3 is a schematic side view of the chamber showing principally the coil geometry and RF feeds for[0050]top coil72 andside coil74. The pi network matching system described in FIG. 2(c) is shown in FIG. 3. A Langmuir probe was introduced into thechamber13 to measure the plasma ion density at different positions across thechamber13 using the top coil only, and the side coil only, to generate the plasma. The dual coil arrangement, when properly tuned to a substrate being processed, can generate uniform ion density across its surface.
• Uniform ion across the substrate surface contributes to the uniform deposition and gap-fill performance onto the wafer and helps alleviate plasma charging of device gate oxides due to nonuniform plasma densities. When the action of the coils is superimposed, uniform plasma density results and deposition characteristics may be vastly improved.[0051]
• The[0052]dome32 also includes atemperature control assembly64 to regulate the temperature of the dome during the various process cycles, i.e., deposition and clean. FIG. 4 is an exploded view of thetemperature control assembly64 and thetop coil72. The temperature control assembly generally comprises aheating plate80 and acooling plate82 disposed adjacent each other and preferably having athin layer84 of a thermally conductive material, such as grafoil, disposed therebetween. Preferably, about a 4 mil to about 8 mil layer of grafoil is disposed therebetween. A thermallyconductive plate86, such as an AlN plate, is provided with grooves formed in its lower surface to house thecoil72. Asecond layer88 of grafoil, preferably about 1 to about 4 mils thick, is disposed between the thermallyconductive plate86 and theheating plate80. A third thermallyconductive layer90 is disposed between thecoil72 and thedome32. The third layer is preferably a layer of chromerics having a thickness of about 4 mils to about 8 mils. The thermally conductive layers facilitate heat transfer to and from thedome32. During cleaning it is preferred to heat the dome, while during processing it is preferred to cool the dome. As a result, a thermally conductive path is provided to achieve these advantages.
• The[0053]cooling plate82 includes one or more fluid passages formed therein through which a cooling fluid such as water is flown. The water channel in the cooling plate is in series withcooling channels88 formed in the chamber body. A pushlock type rubber hose with quick disconnect fittings supplies water to the chamber body and the cooling channel in the lid. The return line has a visual flowmeter with an interlocked flow switch. The flowmeter is factory calibrated for a 0.8 gpm flow rate at a pressure of about 60 psi. A temperature sensor is mounted on the dome to measure the temperature thereof. Theheating plate80 preferably has one or more resistive heating elements disposed therein to provide heat to the dome during the cleaning phase. Preferably the heating plate is made of cast aluminum, however other materials known in the field may be used. A controller is connected to the temperature control assembly to regulate the temperature of the dome.
• Each of the[0054]components80,82,84,86, and88 define two channels through which the ends of thetop coil72 extend. Twoinsulative sleeves94,96 are disposed in each channel formed in theheating plate80, the coolingplate82 and the grafoil layers to insulate the coil leads extending therethrough. The insulative sleeves may include silicon suction cups disposed on their lower ends to provide a seal at theinsulative plate86.
• By direct conduction, the[0055]heating plate80 and the coolingplate82 are used to control the dome temperature. Control of the dome temperature to within ≈10° K improves wafer to wafer repeatability, deposition adhesion and has been found to reduce flake or particle counts in the chamber. The dome temperature is generally kept within the range of from about 100° C. to about 200° C. depending on processing requirements. It has been shown that higher chamber clean rates (etch rates) and better film adhesion to the substrate can also be obtained at higher dome temperatures.
• Cathode and Lift Assembly[0056]
• The cathode and lift assembly will now be described with reference to FIGS.[0057]5-10. The support member includes elements which are positionable within the chamber and elements positionable outside of the chamber. The elements of thesupport member16 positionable within the chamber extend throughaccess port26 provided in thesidewall18 of the chamber and are supported to the sidewall by elements positionable outside of the chamber. FIG. 5 is a cross-sectional view of thesubstrate support member16. Thesupport member16 generally includes a base94 having aflange46 for attachment to the chamber wall, acantilevered arm portion96 extending radially inward therefrom, and asubstrate receiving portion98 located at the end of the cantileveredarm96. Theflange46 mounts thebase94 of the support member to thechamber wall18 about the substrate supportmember access port26. Thebase94 extends inwardly from theflange46 to define an innercurvilinear wall portion51. Thecurvilinear wall51 is preferably an arc or segment of a circle having a radius (r) substantially equal to the overall inner radius (R) of the chamber. The surface of thecurvilinear wall51 in the circumferential direction is received adjacent theinner wall52 of the chamber. Thecurvilinear wall51 along with theinner wall52 of the chamber form a symmetrical and continuous inner chamber wall when thesupport member16 is located in the chamber for processing as shown in FIG. 7.
• The cantilevered[0058]arm96 extends inwardly from the lower portion of the base94 to support theESC receiving portion98 having asubstrate receiving surface99 thereon. TheESC receiving portion98 includes an upwardly extendingannular pilot100. Theannular pilot100 includes a larger inner diameter portion and a smaller inner diameter portion which form an inner annular step to support aninsulative member102 thereon. AnESC104 is preferably supported oninsulative plate102 to provide asubstrate receiving surface99. Theouter wall50 of theESC receiving portion98 defines a continuous annular face.
• The[0059]ESC receiving portion98 also defines arecess108 in which asubstrate positioning assembly110 is disposed. Abottom plate112 is secured to the lower portion of the receiving portion by a threaded screw arrangement to protect the inner components of thesupport member16 from the processing environment.
• FIG. 7 is a top sectional view showing a[0060]support member16 disposed in a chamber. The cantileveredarm96 extends across thesymmetric fluid passage22 to support theESC receiving portion98 within the chamber. It is preferred that the cantilevered arm minimize interruption, restriction or disturbance of the fluid flow through thefluid passage22 by including a fluid passage or plurality ofpassages114, such as a radial passage, therethrough. It is also preferred that thesupport arm116, include a passage or plurality ofpassages118 therethrough to minimize interruption, restriction or disturbance of fluid flow through the uniform fluid passage.
• It is also preferred that the cantilevered[0061]arm96 attach to theESC receiving portion98 at a point remote from the substrate receiving surface, such as along the bottom of theESC receiving portion98, in order to further minimize the effect on the gases near the surface of the substrate caused by any interruption, restriction or disturbance of fluid as it passes through and around the cantilevered arm. More generally, it is preferred that any nonuniformity in thefluid passage22 be minimized and positioned a sufficient distance from theESC receiving surface98 to avoid affecting the flow of fluid over a substrate placed thereon.
• The[0062]substrate lift assembly120 includes a plurality of radially extending substrate support pins122 which are aligned with and spaced about the periphery of theESC receiving member98 and are received on a winged mountingplate123. The mountingplate123 is disposed within a generallyrectangular recess124 formed in thesupport member16, and is actuated by a verticallymoveable elevator assembly126. As shown in FIG. 5, theelevator mechanism126 includes a verticallymoveable shaft128 that mounts aplate130 at the upper end thereof. Theshaft128 is moved vertically up and down by an actuator, preferably a pneumatic cylinder located outside of the chamber.
• The support pins[0063]122 are received insleeves132 located inbores134 disposed vertically through theESC receiving member98 and move independently ofsupport member16 within the enclosure. Support pins122 extend from thesupport member16 to allow the robot blade to remove a substrate from the enclosure, but must sink into thesupport member16 to locate a substrate on the upper surface of theESC104. Each pin includes a cylindrical shaft terminating in a lower spherical portion and an upper spherical portion.
• In operation, an external blade[0064]138 (with a substrate to be processed supported thereon) is inserted through theslit valve24 into the chamber to position a substrate over thesupport member16. One example of asuitable blade138 and an associated robot substrate handling system is described in co-pending, commonly assigned U.S. patent application Ser. No. 944,803, entitled “Multichamber Integrated Process System”, filed in the name of Dan Maydan, Sasson Somekh, David N. K. Wang, David Cheng, Masato Toshima, Isak Harari, and Peter Hoppe, which is hereby incorporated herein by reference. Theelevator mechanism126 raises the substrate support pins122 above the blade to pick up the substrate. The blade is then withdrawn from the chamber and a pneumatic cylinder closes a door over the blade access slot to seal chamber. Theelevator mechanism126 is actuated to lower support pins122 until the substrate is received on theupper surface98 of thesupport member16 in position for processing.
• After processing, the elevator mechanism raises the support pins[0065]122 to lift the substrate off thesubstrate support member16. The door is then opened and the blade is again inserted into the chamber. Next,elevator mechanism126 lowers the substrate support pins122 to deposit the substrate on the blade. After downwardly movingpins122 clear the blade, the blade is retracted.
• During processing, the plasma of the CVD process environment gives off large quantities of heat, the total heat generated by the plasma being at least partially dependent on the power density of the plasma. A portion of this heat is transferred into the substrate, and must be removed from the substrate to maintain the temperature of the substrate, below a pre-defined critical temperature. To remove this heat, a heat transfer system is provided in the[0066]substrate support member16 to control the temperature of the support member and the substrate being processed. FIG. 6 is a top sectional view showing the heat transfer system of thesupport member16.Water inlet140 andoutlet142 are connected bypassages144 and146. Awater manifold148 is located within thesupport member16 to facilitate heat transfer from the support member to the coolant fluids. The temperature of thesupport member16 is selected to eliminate premature deposition within the gas manifold upstream from the processing region of the chamber.Coolant channels144,146 received through the mass of thesubstrate support member16 are provided for the passage of coolant fluids therethrough. In addition, grooves in the surface of the ESC104 (which will be described below), wherein gases are flown, transfer heat from the substrate into thesupport member16 and subsequently into the coolant fluids.
• FIG. 8 is a top view of one embodiment of an[0067]electrostatic chuck104 according to the present invention. FIG. 8ais an alternative embodiment which is symmetric and eliminates a wafer flat area. Instead of having a smooth top surface, a number of grooves are provided in the surface to form a large number ofprotrusions166. Acentral zone168 of these protrusions is separated from aperipheral zone170 by aseal172.Seal172 is simply an area which has not had grooves formed in it to provide protrusions, thus forming a solid surface to minimize flow between separate zones. Anouter seal174 provides a barrier to minimize leakage of helium gas into the chamber.
• Helium gas is inserted into[0068]periphery zone170 through aring176 which is a groove having a series of holes in it which receive higher-pressure helium into this zone from helium line47 of FIG. 1. Aninner ring178 allows a lower pressure gas to thecentral zone168 from pressure helium line147. In operation, after establishing an initial low helium pressure incentral zone168,helium ring178 typically will be removing helium gas leaking throughseal area172 to maintain the desired low pressure helium. In an optional embodiment, vacuum holes180, which may be lift pin holes, can be used to pump out the gas in the central zone using vacuum line135 of FIG. 1 to further lower the pressure in the central zone. Optionally, additional vacuum holes could be added.
• [0069]Helium groove178 is preferably positioned nearseal area172. By positioning it as close as possible, the desired heat transfer step function can be approached. The high pressure gas is thus contained in a narrow region by the periphery. If the high pressure gas extends too far toward the center of the wafer, the cooler center will become even cooler, partially offsetting the reduction in heat differential provided by the higher pressure gas.
• In operation, for heating the wafer, lower pressure helium (1-15 torr) is provided into the[0070]central zone168, and higher pressure helium (1-20 torr) is provided toperipheral zone170. The higher pressure helium in the peripheral zone provides better heat transfer at the periphery of the wafer.
• In one embodiment, the seals are made of the same ceramic coating as the remainder of the top of[0071]electrostatic chuck164. Such a ceramic coating has small interstices, and thus the seal areas do not provide a perfect seal. In addition, the substrate or wafer will have some backside roughness, and may have more roughness than the substrate support. Accordingly, the seal area should have sufficient width to prevent significant leakage of helium from one area to the other.
• It has been determined by testing that for a ceramic covered electrostatic chuck with the pressure ranges set forth above, that a seal width of {fraction (1/10)} inch, or 100 mils, is effective. Preferably, the seal width is in the range of 50 to 300 mils. For the[0072]outer seal174, it is desirable to minimize the width because the area of the wafer above this seal will not have the benefit of the heat conduction from the high-pressure helium. At the same time, the seal must be wide enough to prevent significant leakage of helium into the chamber which could undermine its intended heat transfer capability by reaching the sustained helium pressure due to higher flow levels or affect the reaction in the chamber. The same 100 mil width has been found effective, with an optimum seal width being in the range of 50 to 300 mils. Alternate widths may be appropriate for different materials and smoothness of the substrate support and substrate. For example, if a polymer film, such as Kapton™, available from many well-known suppliers, is used, a small width can be achieved because of its compliancy.
• A preferred heat transfer gas is helium because it is inert and relatively inexpensive. Alternately, argon, oxygen, CF[0073]₄, or other gases could be used, or a mixture of gases may be used. A mixture could be used, for instance, to give additional pressure control capabilities. The particular gas could be chosen to be compatible with the chemical process in the chamber so that any leaking gas will have minimal effect on the chemical reactions. For example, in an etching reaction using fluorine as an etching species, it may be desirable to use CF₄as the backside heat transfer gas.
• Because heat conduction occurs primarily through the helium gas, it is desirable to minimize the size and number of the protrusions and seal areas for this purpose. Thus, there should be less contact area than non-contact area over the area of the substrate. On the other hand, the seals are required to prevent gas leakage and the protrusions must be of sufficient size and spacing to mechanically support the wafer. In addition there are other factors to be optimized. The height of the protrusions, which determine the gap between the substrate and the substrate support between the protrusions, must be sufficient to allow the gas to quickly become distributed throughout the zones without affecting a process start up time. Typically, this must be on the order of a few seconds, and preferably the gas is distributed in 10 seconds or less.[0074]
• For optimum heat transfer, the gap should be small enough so that heat transfer primarily occurs by molecules traveling directly from the substrate to the substrate support without colliding with another gas molecule, giving free molecular heat transfer. Thus, the gap should be less than the mean free path of the gas (or the average free path if a mixture of gases is used).[0075]
• The mean free path is a function of the pressure of the gas and the molecular collisional cross-section. Where a variety of pressures will be used, the mean free path will vary. In a preferred embodiment, the mean free path of the maximum pressure, to be applied is used to determine the gap dimension.[0076]
• In addition, the ratio of the gap to the overall dielectric thickness must be kept small to avoid local anomalies on the substrate. If this ratio is significant, the equivalent capacitance will vary significantly between the spaces and the protrusions, applying a significantly different electric field to the substrate. This different field can affect the chemical process, causing non-uniformities in the film that is being deposited, etched, doped, or undergoing other property transformations. Some difference will necessarily be present, but it is desirable to minimize this.[0077]
• The significance of the ratio also varies depending on the dielectric material, in particular the difference between the dielectric constant of the material and the heat transfer gas (essentially one). The closer the two dielectric constants, the less the concern with a larger gap.[0078]
• Another concern in setting the gap size is to avoid having a plasma generated with the heat transfer gas between the substrate support and the backside of the wafer. It is believed that this would begin to be a concern if the gap size were several times the mean free path of the heat transfer gas.[0079]
• For one embodiment of an electrostatic chuck, the thickness of the ceramic coating is on the order of 7-10 mils. If Kapton™ is used, a thickness of 1-2 mils may be used. Ideally, for chucking purposes, the dielectric is as thin as possible within the limits of maintaining manufacturing consistency and avoiding dielectric breakdown. The mean free path of helium at the pressures for the two zones described above is about 1-5 mils (at very high pressures, the mean free path may be less than one). Accordingly, protrusion heights of 0.7-1.2 mils have been chosen, tested, and found effective. This gives a gap less than the mean free path of helium at the desired pressures. Preferably, the gap is less than twice the mean free path of the heat transfer gas at the pertinent pressures, and more preferably less than the mean free path.[0080]
• The spacing between the protrusions is as large as possible while still supporting the substrate without bowing. In one embodiment, the substrate is kept planar, while in other embodiments it may be desirable to vary the protrusion height, or alternately the top surface of the substrate support (with the protrusions of equal height), to properly support a curved substrate. Another factor is avoiding sharp points that could cause local anomalies in the electric field. Too large a spacing can also affect the movement of charge during dechucking, causing damage.[0081]
• It has been determined that an optimum center-to-center spacing of the protrusions is in the range of 100-300 mils, more preferably approximately 300 mils. The size of the protrusions themselves is preferably between 10 and 150 mils, more preferably approximately 130 mils in diameter. Square protrusions are shown simply because of their ease in manufacture, and other shapes could be used as well. Annular shapes could be used, for example.[0082]
• In the embodiment shown, no openings for removing gas are shown in the outer peripheral region, although this can be provided in an alternative embodiment. The control of helium pressure can be done either by providing high or low pressure helium, or by more pumping through a vacuum pump. Similarly, for the central region, the pressure can be controlled in either of these ways or through a combination of both. The placement of the helium source as a ring near the edges in combination with a vacuum near the middle of the support provides an additional pressure gradient within the central region, decreasing towards the center.[0083]
• An alternate embodiment of the present invention thus provides a coarse adjustment of the heat transfer through the two pressure zones, with a fine tuning occurring through the placement of the helium inlet and vacuum outlets in the central portion. In alternate embodiments, more than one zone could be used for finer adjustments, with the trade off of requiring more hardware.[0084]
• FIG. 9 is a side view of one embodiment of an[0085]ESC104 showing a varying dielectric thickness of a dielectric186. Awafer182 is shown mounted on the chuck. The chuck includes anelectrode portion184 covered bydielectric186. The dielectric extends across the top and along thesides190 of the electrostatic chuck. As can be seen, the dielectric is thicker at acentral portion192, and thinner atperipheral portions194. The side view shows themultiple protrusions170 and also shows theinner seal172 and theouter seal174.
• The thinner dielectric at[0086]peripheral portions194 provides a stronger electrostatic force at these portions. This is beneficial for a number of reasons. First, it holds the wafer more tightly, ensuring better heat transfer by providing better contact with the top of the electrostatic chuck. Second, a tighter force helps hold in the higher pressure helium betweenseals172 and174 near the periphery. In addition, if the peripheral portion of the wafer has a temperature different from the central portion, this may cause it to bend relative to the central portion, and it may bow up or down, further exacerbating the heat differential problem. This can be overcome by an appropriately higher electrostatic force at the peripheral portion.
• In an alternate embodiment, the varying dielectric thickness can be used without the two pressure zones, or without the protrusions. The varying in the dielectric coating can be continuous, or stepwise. A stepwise difference makes the manufacturing simpler and less expensive.[0087]
• Another advantage of the[0088]seal area174 and the stronger electrostatic force at the edge of the wafer is to prevent arcing of the plasma to exposed metal near the top surface of the electrostatic chuck. Such exposed metal would typically be at the helium inlet ports, which would come up through the aluminum electrode, thus exposing through those holes a path to the electrode. Arcing is prevented by providing a tighter seal, locating the helium inlet holes sufficiently away from the edges of the electrostatic chuck, or putting a groove there to prevent such arcing.
• As shown in FIG. 9, a[0089]temperature sensor196 can be placed in the space between the top surface of the electrostatic chuck and the wafer. The temperature of the wafer can thus be inferred from the sensor.
• FIG. 10 is a feedback control system signal flow diagram illustrating the temperature control. The FIG. 10 diagram is for a closed loop temperature control system for controlling the helium pressure. Alternately, an open loop system could be used without the temperature sensor. Prior experimentation could dictate the appropriate helium pressure for the desired process parameters, and thus the temperature sensor could be eliminated in an alternate embodiment. FIG. 9 contains both functions performed in a processor, and physical effects.[0090]
• A temperature set point is provided as a user-programmed input to a controller from a control program in a memory[0091]245. The temperature set point value is multiplied by a constant198 by the controller, which adds the result to afeedback signal213 as indicated by anadd function202. The result of the add function is used by the controller to control the helium pressure by controlling flow restrictors or valves in the helium supply. This varies the extent of the heat transfer of the helium gas. In a preferred embodiment, the helium pressure is controlled according to a mathematical model; however, empirical results could also be used as the basis of the pressure control. The mathematical model is described below. The helium pressure controls the heat transfer to the ESC as indicated by block202 (alternately, any type of substrate support may be used). The ESC is either cooled by heat exchanger233, or heated by heater243, with the amount of heat transfer to the wafer controlled by the helium pressure. This heat transfer can be offset by the heat generated by energy transferred from the plasma (as illustrated by block204), which combines (as illustrated by block206) with the heat transfer to the ESC. The total heat transfer, applied to the wafer thermal mass (as illustrated by block208), produces thetemperature210 of the wafer. Note that alternate substrates may be used rather than a semiconductor wafer. Thefinal temperature210 of the wafer also impacts the amount of heat transfer to the electrostatic chuck, as indicated byfeedback line211. The heat transfer function between the ESC and the wafer indicated inblock202 is a function of the temperature of the wafer, as well as the temperature of the ESC. As shown, the heat transfer to the ESC removes heat from the wafer while the heat from the plasma adds heat to the wafer. However, these can be reversed when the electrostatic chuck is used to heat the wafer, and thus provides heat input while heat is removed due to the plasma at a lower temperature, or simply by the chamber in the absence of a plasma.
• A[0092]block212 illustrates the transformation of the temperature into an electrical signal by the temperature sensor.Block214 illustrates the transfer function applied in the processor before combining the temperature signal with the temperature set point as a feedback. Such a transfer function could in its simplest form be a multiplication by a constant, which could be unity, or simply a transformation from an analog signal to a digital signal.
• The functions performed by the controller are done under the control of a program in memory[0093]245. That program will include instructions for performing the various steps, such as instructions for reading the temperature indication from the temperature sensor, an instruction for comparing that temperature to the desired input set temperature, and an instruction for controlling the pressure valve (or flow restrictor) to vary the pressure of the gas in a particular pressure zone. Other instructions are provided to shut off the gas in the event of a fault, etc.
• The helium pressure can be controlled by increasing or decreasing the pressure where a simple one pressure electrostatic chuck is used. Alternately, where two pressure zones are used as in the preferred embodiment of the invention, the outer and inner helium pressures can be controlled separately. The temperature of each region can be inferred from a single temperature sensor which may be placed, for instance, near the intersection of the two zones. Alternately, two different temperature sensors could be used. In other alternate embodiments, the temperature sensor could be attached to the top surface of the electrostatic chuck, or alternately be put in direct contact with the wafer itself. The temperature sensor may be used to infer the pressure, such as where there is leakage between zones causing a pressure variance. A pressure regulator may detect only the pressure at its output, which would typically be some distance from the wafer, which could thus have a different pressure under it. A temperature sensor could be used to infer the actual pressure under the wafer. Depending on the wafer surface roughness, the leakage could vary, and the pressure provided may need to be varied.[0094]
• The control system typically will have certain constraints on it. For instance, the helium pressure is limited so that the wafer is not lifted off the electrostatic chuck, or so much of a pressure differential is provided to cause a thermal gradient that damages the wafer due to thermal stress. In the event that such constraints are exceeded, or some other defined fault occurs, the gas flow is stopped. Process Kit The process kit is comprised of a collar and a cover. Additionally, a skirt may also be used. The ceramic collar is wafer size and type specific and is disposed between the electrostatic chuck and the quartz cover. The primary purpose of the collar is to protect the electrostatic chuck flange from the effects of the plasma. The cover extends from the collar to the outer periphery of the cathode assembly and its primary purpose is to protect the cathode assembly from the effects of the plasma. A skirt may be disposed on the lower chamber to protect the spacer and o-ring which seal the upper and lower chamber from the effects of the plasma.[0095]
• In one aspect, the present invention provides an improved process kit or shield for an electrostatic chuck in a semiconductor processing chamber that inhibits or resists the deposition of gaseous products thereon. In addition, the shield provides faster removal of oxide deposition which results in enhancing the throughput of the wafer manufacturing process.[0096]
• In one embodiment, the collar or cover may include a conducting material disposed on one or more surfaces or therein to enhance cleaning of its surface. Generally, the inductive coils disposed about the[0097]dielectric dome32 are used to heat the conducting material in or on the collar or cover which then results in heating the collar or cover surfaces. It has been shown that in situ cleaning processes performed using fluorinated chemistry or other reactive gases is enhanced at elevated temperatures. Using the inductive coil and a conductor disposed in or on the process kit components elevates the temperature of the surfaces of these components to increase cleaning rates.
• As one example, a metal can be deposited on one surface of a process kit component, such as a collar or cover, to provide a conductor in which a current can be induced. The operation of the heating process is similar to that which is seen in a transformer with the coil being the external winding and the metal layer being the internal winding.[0098]
• FIG. 11 is a cross-sectional view of a electrostatic chuck and a processing kit. A[0099]substrate support assembly230 comprises asupport body232 preferably fabricated as an integral block from an electrically conducting material having a high thermal mass and good thermal conductivity to facilitate absorption of heat from a wafer cooled over its upper surface. Aluminum or anodized aluminum is the preferred material forsupport body232 because it has a high thermal conductivity of approximately 2.37 watts/cm-° C. and it is generally process compatible with the semiconductor wafer.Support body232 may comprise other metals, such as stainless steel or nickel, andsupport body232 may comprise an additional non-conducting material or theentire support body232 may comprise a non-conducting or semi-conducting material. In an alternative embodiment,support body232 comprises a monolithic plate of ceramic. In this configuration, the ceramic plate incorporates a conducting element imbedded therein. The conducting element may comprise a metallic element, green printed metalization, a mesh screen or the like.Support body232 defines anannular mounting flange234 extending outwardly from the outer surface ofsupport body232. A voltage, preferably about 700 Volts, is applied to thesubstrate support assembly230 by a DC voltage source (not shown) to generate the electrostatic attraction force which holds a wafer W in close proximity to the upper surface ofsupport body232.
• Referring to FIG. 11,[0100]substrate support assembly230 comprises a smooth layer ofdielectric material236 covering anupper surface238 ofsupport body232 for supporting the lower surface of waferW. Dielectric layer236 covers the entireupper surface238 ofsupport body232 except for the region overlying four lift pin holes240.Dielectric layer236 preferably comprises a thin ceramic dielectric layer (preferably on the order of about 0.10 to 0.30 inches) of alumina, aluminum oxide or an alumina/titania composite that is plasma sprayed overupper surface238 ofsupport body232.
• In one embodiment,[0101]shield242 comprises a thin annulus of conductingmaterial244 deposited underneath thecollar246. Thecollar246 is supported by anannular flange234 and held by acover248. Cover248 is preferably a ceramic outer jacket for covering and protecting the lateral surfaces ofsupport body232 to decrease the time required to clean the chamber. Thecollar246 is preferably separated fromannular flange234 by a smallinterstitial gap250.Gap250 is created by the natural surface roughness of the upper surface of theannular flange234 and the lower surface of the conductingmaterial244 or thecollar246.Gap250 is preferably about 0.5 to about 5 mills thick. In the relatively low-pressure environment of the processing chamber (typically on the order of about 5 milliTorr),gap250 establishes a thermal barrier that inhibits thermal conduction between thecollar246 and thesupport body232.
• As shown in FIGS.[0102]11, thecollar246 preferably has an inner diameter larger than the diameter ofsupport body232 to define asecond gap252 therebetween.Gap252 provides room for expansion ofsupport body232 when it is heated in the process chamber and also ensures that theshield242 can be installed and removed without damaging thesubstrate support230 or thecollar246.Collar246 is comprised of an insulating or dielectric material, preferably ceramic or ceramic, that serves to prevent or inhibit the plasma in the processing chamber above the wafer from contacting, and thereby eroding, part of the electrostatic chuck. However,collar246 is not necessarily limited to an insulating material and, in fact, applicant has found that acollar246 made of a semiconducting material may effectively protect the electrostatic chuck from the plasma within the processing chamber.
• The[0103]collar246 is a thin ring254 having a curvedupper surface256 that is exposed to deposition from gases in the process chamber. The ratio of the surface area of exposedupper surface256 to the thermal mass ofcollar246 is preferably high, usually about 0.1 to 5 cm²K/J and preferably about 1 to 1.6 cm²K/J. The high ratio of exposed surface area to thermal mass ofcollar246 causes it to be heated to a substantially high temperature from the RF energy in the chamber. Since the oxide deposition rate is generally inversely proportional to the temperature of a surface in the process chamber, the heat received by thecollar246 inhibits oxide deposition on the exposed upper surface. Thus, the geometry of collar246 (i.e., the high ratio of exposed surface to thermal mass) minimizes the rate of deposition onupper surface256.
• During a deposition process, oxide from process gases is deposited onto wafer W and onto a substantial portion of the exposed surfaces of the chamber, such as the inner walls of the enclosure and[0104]upper surface256 ofcollar246. Since the thermal mass ofcollar246 is relatively small compared to the surface area ofsurface256,collar246 will receive a relatively large amount of heat from the RF power supply.Collar246 is also heated by the thin annulus of conductingmaterial244 which generates heat through the RF power. This further decreases the rate of oxide deposition ontoupper surface72.
• As shown in FIG. 11,[0105]collar246 is preferably sized so that upper surface ofcollar246 is positioned below the upper surface of the wafer when the wafer rests on or is adjacent to the upper surface ofdielectric layer236.Positioning collar246 below the upper surface of the wafer further lowers the oxide deposition rate onupper surface256 and provides an improved line of sight to the wafer edges. Therefore, the edges of the wafer may receive a higher deposition rate than if theshield242 were to extend above the wafer. In some processes, this may be advantageous to compensate for the higher deposition rate in the center of the wafer that typically occurs during processing.
• Referring to FIG. 12, a cross-sectional view of the process kit in a processing chamber, the[0106]source RF coil260 in an inductive HDP source can be used to heat the ceramic process The thin annulus of conductingmaterial244, which can be disposed on one or more surfaces or within the ceramic process kit, acts as the secondary coil of a transformer and conducts the current induced by RF currents in thesource RF coil260 which generates heat for the process kit. The resistance of the secondary coil is of primary importance because either too low or too high of a resistance results in inefficient power transfer and thus inefficient heating of the process kit.
• For the circular geometry indicated in FIG. 12, the resistance R is approximately 2πrp/w·d, where r is a measure of the radial dimension of the outer radius of the thin annulus of conducting material, w is the width of the conducting material, d is the thickness of the conducting material, and ρ is the resistivity of the conducting material. The resistance R is preferably controlled by varying w·d, the cross-sectional area of the conducting[0107]material244. To achieve optimal contact withcollar246, it is preferred that w be as large as possible but smaller than the width of thecollar246. One preferred method of obtaining the optimal value of d is empirically monitoring the heating rates of various samples with different thickness d of conducting material. In one preferred embodiment, a process kit having graphite as the conducting material with the annulus having an inner radius of 10 cm and outer radius of 12 cm and thickness of 0.13 mm was heated inductively to a temperature of about 288° C.
• In another aspect of the invention, the clean rate or deposition removal rate of the process kit is typically a function of its temperature (i.e., the hotter the shield becomes during processing, the faster it can be cleaned). During cleaning, the conducting[0108]material244 acts as the secondary coil of a transformer which conducts the current induced by RF currents in thesource RF coil260 which generates heat for the process kit. Thus, with increased temperature, the clean rate ofcollar246 will be increased, which reduces the downtime of apparatus2, thereby enhancing the throughput of the process.
• Gas Distribution Assembly[0109]
• The[0110]gas distribution assembly300 will be described below with reference to FIGS.132016. FIG. 13 is a cross sectional view through a chamber of the present invention showing thegas distribution assembly300. Generally, the gas distribution system comprises anannular gas ring310 disposed between the lower portion of the dome and the upper surface of the chamber body and a centrally located center gas feed312 positioned through the top of the dome. Gases are introduced into the chamber through both circumferentially mountedgas nozzles302,304 located near the bottom of thedome32, and a centrally locatedgas nozzle306 located in the top plate of the dome. One advantage of this configuration is that a plurality of different gases can be introduced into the chamber at select locations within the chamber via thenozzles302,304,306. In addition, another gas, such as oxygen or a combination of gases, can be introduced alongside nozzle306 through agas passage308 disposed aroundnozzle306 and mixed with the other gases introduced into the chamber.
• The gas distribution ring and the centrally located gas manifold will be described separately below.[0111]
• Generally, the[0112]gas distribution ring310 comprises an annular ring made of aluminum or othersuitable material314 having a plurality of ports formed therein for receiving nozzles therein and which are in communication with one ormore gas channels316,318. Preferably, there are at least two separate channels formed in the gas ring to supply at least two separate gases into the chamber. Each of the ports for receiving the nozzles is connected to at least one of thegas distribution channels316,318 formed in the ring. In one embodiment of the invention, alternating ports are connected to one of the channels, while the other ports are connected to the other channel. This arrangement allows for the introduction of separate gases, such as SiH₄and O₂, separately into the chamber, as one example.
• FIG. 14 is a cross sectional view showing a[0113]first gas channel316 connected to oneport314 having anozzle302 disposed therein. As shown, thegas channel316 is formed in the upper surface of the chamber body wall and is preferably annular around the entire circumference the chamber wall. The annular gas ring has a first set ofchannels320 longitudinally disposed within the ring which are connected to each of theports314 provided for distribution of the gas in that channel. When the gas ring is positioned over the gas channel, the passages are in communication with the channel. The gas distribution ring is sealed in the top surface of the chamber wall via two separately placed o-rings322,324 disposed outwardly from the channel to prevent gas leaks to the interior of the chamber. ATeflon seal326, or the like, is disposed inwardly of the channel in arecess328 to prevent gas leakage into the chamber.
• The[0114]nozzles302,304 disposed in theports314 are preferably threaded and mate with threads in the port to provide a seal therebetween and to provide quick and easy replacement. A restricting orifice330 is located in the end of each nozzle and can be selected to provide the desired distribution of the gas within the chamber.
• FIG. 15 is a cross sectional view showing the[0115]second gas channel318. Thesecond gas channel318 is formed in the upper portion of the annular gas distribution ring and is similarly disposed in an annular configuration around the circumference of the gas distribution ring. A horizontally disposedpassage332 connects the second gas channel to one or more ports formed in the gas ring and in which additional gas nozzles are disposed. The upper containing surface of the second gas channel is formed by the portion of the lid which supports thedome32 and is sealed at the top by thebase plate33. Thegas ring310 is bolted to thebase plate33 which is hingedly mounted to the chamber body.
• One advantage of the present invention is that the gas distribution ring can be easily removed and replaced with a ring having ports formed for receiving and positioning the tips of the nozzles at various angles so that the distribution pattern of gases can be adjusted. In other words, in certain applications it may be beneficial to angle some of the gas nozzles upwardly in the chamber, or conversely to angle some of them downwardly in the chamber. The ports formed in the gas distribution ring can be milled so that a desired angle can be selected to provide the desired process results. In addition, having at least two gas channels which can deliver at least two gases separately into the chamber allows greater control of the reaction which occurs between the various gases. Still further, reaction of the gases within the gas distribution assembly can be prevented by delivering the gases separately into the chamber.[0116]
• FIG. 16 is a cross sectional view showing the center gas feed[0117]312 disposed through thedome32. Thetop gas feed312 is preferably a tapered structure having a base334 which is disposed on the top of the dome and atapered body336 disposed in a recess formed in the dome. Two separate o-rings336,338, one the lower surface of thetaper body336 and one on the side surface of thetaper body338 towards the lower end, provided sealable contact between thegas feed312 and the dome of the chamber. Aport340 is formed in the lower portion of the body of the top gas feed to receive anozzle306 for delivering gases into the chamber. At least onegas passage342 is disposed through thegas feed310 connected to the port to deliver gases to the back of the nozzle. In addition, thenozzle306 is tapered and theport340 define asecond gas308 passage which delivers a gas along side of thenozzle306 and into the chamber. Asecond gas channel304 is disposed through thegas feed312 to deliver gas into thepassage308. A gas, such as oxygen, can be delivered along side a gas such as SiH₄.
• FIG. 17 is an exploded view showing the[0118]base plate33 of the lid assembly and thegas distribution ring310. Achannel350 is formed in the lower portion of thebase plate33 to receive thegas distribution ring310. Thegas ring310 is bolted, or otherwise mounted, to thebase plate33. The base plate is hingedly mounted to the chamber body.
• A[0119]first gas source352 and afirst gas controller354 control entry of a first gas vialine356 into afirst gas channel316 formed in the chamber wall. Similarly, asecond gas source358 and asecond gas controller360 supply a second desired gas vialine362 into thesecond gas channel318 formed in the gas distribution ring.
• A[0120]third gas source364 and athird gas controller366 supply a third gas vialine368 to a gas channel disposed on the top of the chamber. Afourth gas source370 and afourth gas controller372 supply a fourth gas vialine374 togas passage308. The gas introduced through the third gas nozzle andfourth gas nozzle64 and O₂are mixed in the-upper portion of chamber as both gases enter the chamber.
• Remote Plasma Cleaning System[0121]
• The remote plasma source generally includes a remote chamber having a gas inlet and a gas outlet, a power source coupled to the chamber by a waveguide, and an applicator tube disposed through the chamber between the gas inlet and gas outlet. FIG. 18 shows a schematic view of a[0122]remote plasma source500 connected to a chamber. Achamber502 is a cylindrical chamber, preferably made of aluminum, having agas inlet504 and agas outlet506 disposed on opposite ends thereof. The chamber is preferably cooled using either a fan disposed through a wall of the chamber or by using a fluid cooling system such as a series of coils having a heat transfer fluid such as water flown therethrough. Anapplicator tube508, such as a sapphire tube, or other energy transmissive tube, is disposed between the gas inlet and gas outlet within thechamber502. A water cooleddelivery conduit510 connects the gas outlet to agas channel28 formed in the lower portion of theprocessing chamber10. A power source is coupled to the chamber by awaveguide512. One remote plasma source which can be used to advantage in the present invention is described in U.S. patent application Ser. No. 08/278,605, filed on Jul. 21, 1994, which is incorporated herein by reference.
• Preferably, power in the range of from about 2000 W to about 5000 W is delivered into the[0123]chamber502. The optimum power needed to dissociate the gas should be used. Any additional power is wasted and is typically used in generating additional heat. Lower power than optimum results in an incomplete dissociation of the cleaning gas and a decrease in the clean rate and efficiency. In one embodiment, a single power source is used to drive both the source antenna and the remote plasma chamber.
• In the chamber, it is believed that the cleaning reactions which proceed most rapidly are of the type:[0124]
• 4F*_(Gas)+SiO₃→SiF_4(Gas)+O_2(Gas)
• and
• 2F*_(Gas)+SiO_{2 (Gas)}→SiF_2(Gas)+O_2(Gas)
• producing gaseous products which are removed from[0125]chamber13 by vacuum pumping the gas phase. The reactant gases which are most effective at producing high concentrations of long lived excited neutral Fluorine species F* are NF₃, F₂, SF₆, ClF₃, CF₄, and C₂F₆. However, other cleaning gases which are excitable by Microwaves and react with deposition material within the chamber may be used. For the remote microwave cleaning system of FIG. 9 in the present invention, it is preferred to use NF₃and F₂diluted to concentrations of from about 10% to about 50% in inert argon gas. The desired cleaning reactions produced by the use of the remote plasma source proceed without any ion bombardment of the chamber or substrate support structures, therefor, the need for cover wafers on theESC104, or periodic replacement of critical chamber assemblies is avoided. Thus, a much more efficient use and throughput of the system is provided.
• FIG. 18 also shows the cleaning gas delivery channels formed in the chamber walls. Gas is delivered from the[0126]remote source500 to afirst gas channel28 disposed horizontally in theback wall520 of the chamber. Thefirst gas channel28 extends the length of the back wall to deliver gases to opposed sides of the chamber. Acentral gas522 connection is formed in the lower portion of the chamber and connects to thefirst gas channel28 to thedelivery conduit510.
• A[0127]second gas channel524 is formed in each of the side walls of the chamber and terminate in a slit opening526 within the chamber. A corner cover is made with a channel formed therein to connect the ends of thefirst gas channel28 with each of theside gas channels524 formed in the sidewalls. The corner cover is preferably welded in position on the chamber body and facilitates gas delivery through the chamber body to theslit openings526 in the chamber.
• A first[0128]gas diffusing member528 is preferably disposed in theslit openings526 of thesecond gas channels524 to guide the cleaning gases into the chamber. FIG. 19 is a top view of thegas diffusing member528 showing the curved side faces530,532 which deliver the cleaning gases to opposite sides of the chamber. Thecurved surfaces530,532 are disposed across thesecond gas channels524 to guide the gases outwardly into the chamber.
• FIG. 20 is a side view of the[0129]gas diffusing member528 . Theback portion534 of the gas diffuser is tapered to allow gases to pass beyond the gas diffuser disposed in thechannel524 so that gas is guided into both sides of the chamber. Arecess536 is formed in one end of the gas diffuser to provide wedged engagement of the diffuser in position within the gas channel. Awedge538 is provided to mate with the recess and a screw forces the wedge into position within the recess and connects the wedge to the diffuser and connects the diffuser to the chamber body.
• In an alternative embodiment, a gas baffler can be disposed in the chamber adjacent to each slit opening[0130]526 in the chamber to direct the cleaning gases upwardly and over the process kit andESC104. FIG. 21 shows a perspective view of abaffler540 which is mounted to thegas diffuser528 by aflange542. Thebody544 of the baffler provides acurved face546 which is angled slightly upwardly when positioned in the chamber to urge the cleaning gases upwardly in the chamber and over theESC104 and the process kit.
• It has been found that the clean process is most efficient when the cleaning gases enter the chamber from above the ESC and process kit. In addition, it is preferred that the gases flow upwardly in the chamber and away from the ESC and process kit to prevent the cleaning gases from pushing particles or residue loosened during the cleaning process onto the ESC. If particles remain on the ESC, the likelihood that helium leaks will occur during chucking increases. The baffle diverts the gas flow upwards to enhance cleaning and prevents deposition of particles on the ESC.[0131]
• While the foregoing is directed to the preferred embodiment of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims which follow.[0132]

Claims (14)

What is claimed is:

1. An apparatus for processing substrates, comprising:

(a) a chamber having:

(i) a sidewall;

(ii) a lid disposed at one end of the sidewall; and

(iii) a bottom disposed at the opposite end of the sidewall;

(b) a substrate support member cantilever mounted on the sidewall;

(c) one or more gas inlets disposed through one or more of the sidewall and the lid to admit gas into the chamber;

(d) one or more gas inlets disposed through one or more of the sidewall and the lid to admit one or more cleaning gases into the chamber; and

(e) an exhaust port disposed in the bottom of the chamber.

2. The apparatus ofclaim 1 wherein the lid comprises a dome comprised of a dielectric material.

3. The apparatus ofclaim 2 wherein the dome comprises a material selected from the group consisting of Al₂O₃, AlN, SiO₂or combinations thereof.

4. The apparatus ofclaim 3 wherein the dome further comprises a generally annular sidewall and a generally planar top.

5. The apparatus ofclaim 2 further comprising a heat transfer assembly disposed adjacent to the lid.

6. The apparatus ofclaim 5 wherein the heat transfer assembly comprises one or more heat transfer plates.

7. The apparatus ofclaim 6 wherein the one or more heat transfer plates comprise a heating plate and a cooling plate.

8. The apparatus ofclaim 7 wherein the heating and cooling plates are comprised of a thermally conductive material.

9. The apparatus ofclaim 8 wherein the thermally conductive material is selected from the group consisting of AlN, SiN, Al or combinations thereof.

10. The apparatus ofclaim 9 wherein the heating plate includes a resistive heating element disposed therein.

11. The apparatus ofclaim 10 wherein the cooling plate includes one or more fluid passages disposed therein.

12. The apparatus ofclaim 11 wherein a heat conducting member is disposed between the heating plate and the cooling plate.

13. The apparatus ofclaim 12 wherein the heat conducting member comprises a heat transfer material such as grafoil, chromerics, or combinations thereof.

14. The apparatus ofclaim 13 wherein the heat conducting member comprises one or more pucks disposed between the heating and cooling plates.

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