TWI794731B - Air floatation platform and optical inspection system comprising thereof - Google Patents

Abstract

The present invention provides a air floatation platform for placing a test workpiece. The air floatation platform comprises a supporting platform and a hollow structure carrier arranged on the supporting platform. The hollow structure carrier has a bearing surface and a supporting surface, so that the test workpiece is carried on the bearing surface. The hollow structure carrier comprises a hollow structure, and an inner side wall defines a bearing surface opening and a supporting surface opening. The test workpiece, the hollow structure carrier and the supporting platform constitute a closed cavity. Wherein, a plurality of exhaust holes are formed on the inner side wall, so as to output air in the closed cavity through a positive pressure to provide a central air floating zone.

Description

Translated fromChinese

氣浮載台及其光學檢測系統Air bearing platform and its optical detection system

本發明係提供一種載台架構，特別是指一種可以浮起待測工件的氣浮載台及其光學檢測系統。The invention provides a stage structure, in particular to an air-floating stage capable of floating a workpiece to be tested and an optical detection system thereof.

隨著全自動化工業的進展，自動光學辨識系統(Automatic Optical Inspection, AOI)是工業製程中常見的代表性手法，主要的做法是利用攝像裝置拍攝待測物的表面狀態，再以電腦影像處理技術來檢出異物或圖案異常等瑕疵，由於採用了非接觸式檢查，因此在產線過程中可以用以檢查半成品。基於自動光學辨識系統檢測的優勢，其已經被普遍應用在電子業的電路板組裝生產線的外觀檢查並取代以往的人工目檢作業(Visual Inspection)。With the development of the fully automated industry, Automatic Optical Inspection (AOI) is a common representative method in industrial processes. To detect defects such as foreign objects or abnormal patterns, and because of the non-contact inspection, it can be used to inspect semi-finished products during the production line. Based on the advantages of automatic optical identification system detection, it has been widely used in the visual inspection of circuit board assembly production lines in the electronics industry and replaced the previous manual visual inspection (Visual Inspection).

一般光學檢測平台進行正面檢測及反面檢測，主要是通過光學檢測裝置拍攝工件的雙面影像，例如，先由第一組光學檢測裝置拍攝動線上工件的第一面影像，經由翻面裝置將工件進行翻面後，再由動線上的第二組光學檢測裝置拍攝動線上工件的第二面影像。另一種方式則是於工件移動的路徑上由光學檢測裝置拍攝工件的第一面影像，並於翻面裝置將工件進行翻面後，由原動線復返再由該光學檢測裝置拍攝工件的第二面影像，藉此獲得待測工件的雙面影像。不管由前面的第一種方式或第二種方式，都必須要在動線上設計至少兩組或兩組以上的站台(例如第一組光學檢測裝置、第二組光學檢測裝置、翻面裝置)才能實現雙面檢測的功能，不僅會增加檢測設備製造的成本，也會佔去過多的空間。Generally, the optical inspection platform performs front inspection and back inspection, mainly by taking double-sided images of the workpiece through the optical inspection device. After turning over, the second set of optical detection devices on the moving line will take a second image of the workpiece on the moving line. Another way is to take the image of the first side of the workpiece by the optical detection device on the moving path of the workpiece, and after the workpiece is turned over by the turning device, the original moving line returns and the optical detection device takes the image of the first side of the workpiece Two-sided image, so as to obtain a double-sided image of the workpiece to be measured. Regardless of the first method or the second method above, it is necessary to design at least two or more platforms on the moving line (such as the first group of optical detection devices, the second group of optical detection devices, and the turning device) In order to realize the function of double-sided detection, it will not only increase the cost of manufacturing the detection equipment, but also take up too much space.

本發明的主要目的，在於提供一種氣浮載台，用以放置一待測工件。該氣浮載台包含一支撐平台、以及一設置於該支撐平台上的中空結構載具。該中空結構載具具有一承載面與一支撐面，使該待測工件被承載於該承載面上。其中該中空結構載具透過一內側壁以界定一承載面開口與一支撐面開口。其中該待測工件、該中空結構載具與該支撐平台構成一封閉式腔體。其中該內側壁上形成複數個排氣孔，藉以透過一正壓提供裝置，於該封閉式腔體內輸出空氣，以構成一中央氣浮區。The main purpose of the present invention is to provide an air bearing platform for placing a workpiece to be tested. The air bearing platform includes a support platform and a hollow structural carrier arranged on the support platform. The hollow structure carrier has a carrying surface and a supporting surface, so that the workpiece to be measured is carried on the carrying surface. Wherein the hollow structural carrier defines a loading surface opening and a supporting surface opening through an inner wall. Wherein the workpiece to be tested, the hollow structural carrier and the supporting platform form a closed cavity. Wherein a plurality of exhaust holes are formed on the inner wall to output air in the closed cavity through a positive pressure supply device to form a central air flotation area.

本發明的另一目的，在於提供一種光學檢測系統，用以對一待測工件進行檢測。該系統包含一支撐平台、一設置於該支撐平台上的中空結構載具、一第一影像擷取裝置、以及一影像檢測裝置。該中空結構載具具有一承載面與一支撐面，使該待測工件被承載於該承載面上，其中該中空結構載具透過一內側壁以界定一承載面開口與一支撐面開口。該第一影像擷取裝置設置於該支撐面的一側，用以拍攝該待測工件的第一面影像。該影像檢測裝置耦合至該第一影像擷取裝置，以檢測該待測工件的該第一面影像。其中該待測工件、該中空結構載具與該支撐平台構成一封閉式腔體。其中該內側壁上形成複數個排氣孔，藉以透過一正壓提供裝置，於該封閉式腔體內輸出空氣，以構成一中央氣浮區。Another object of the present invention is to provide an optical inspection system for inspecting a workpiece to be inspected. The system includes a support platform, a hollow structure carrier arranged on the support platform, a first image capture device, and an image detection device. The hollow structure carrier has a bearing surface and a supporting surface, so that the workpiece to be measured is carried on the bearing surface, wherein the hollow structure carrier defines a bearing surface opening and a supporting surface opening through an inner side wall. The first image capturing device is arranged on one side of the supporting surface, and is used for capturing the first surface image of the workpiece to be measured. The image detection device is coupled to the first image capture device to detect the first surface image of the workpiece to be measured. Wherein the workpiece to be tested, the hollow structural carrier and the supporting platform form a closed cavity. Wherein a plurality of exhaust holes are formed on the inner wall to output air in the closed cavity through a positive pressure supply device to form a central air flotation area.

是以，本發明可以自載台背面進行檢測，增加設備配置及動線的靈活度。另一方面，本發明可以於拍攝待測工件的同時整平待測工件的表面，利用正壓使待測工件得以被平均撐起，增加檢測結果的正確性。Therefore, the present invention can perform detection from the back of the carrier, increasing the flexibility of equipment configuration and moving lines. On the other hand, the present invention can level the surface of the workpiece to be tested while photographing the workpiece to be tested, and use positive pressure to prop up the workpiece to be tested evenly, thereby increasing the accuracy of the detection results.

有關本發明之詳細說明及技術內容，現就配合圖式說明如下。再者，本發明中之圖式，為說明方便，其比例未必按實際比例繪製，而有誇大之情況，該等圖式及其比例非用以限制本發明之範圍。The detailed description and technical contents of the present invention are described as follows with respect to the accompanying drawings. Furthermore, for the convenience of explanation, the proportions of the drawings in the present invention are not necessarily drawn according to the actual scale, but are exaggerated. These drawings and their proportions are not intended to limit the scope of the present invention.

本發明係用以對待測工件進行背面檢測或雙面檢測，將拍攝到的影像傳送至自動光學檢測設備，以經由自動光學檢測設備通過機器視覺確認待測工件的瑕疵，藉此完成自動光學檢測程序(Automated Optical Inspection)。The present invention is used to carry out back detection or double-side detection of the workpiece to be tested, and transmit the captured image to the automatic optical inspection equipment, so as to confirm the defects of the workpiece to be tested by machine vision through the automatic optical inspection equipment, thereby completing the automatic optical inspection Procedure (Automated Optical Inspection).

於本發明的實施例中，所述的待測工件可以是任意基板，例如包括印刷電路板(Printed Circuit Board)、軟性電路板(Flexible Printed Circuit, FPC)、晶圓、導光板、偏光板、面板、或其他類此的工件，於本發明中不予以限制。In an embodiment of the present invention, the workpiece to be tested can be any substrate, such as a printed circuit board (Printed Circuit Board), a flexible printed circuit board (Flexible Printed Circuit, FPC), a wafer, a light guide plate, a polarizer, Panels, or other such workpieces, are not limited in the present invention.

於本發明的其中一實施例，請參閱「圖1」，係為本發明中光學檢測系統單面檢測實施例的方塊示意圖，如圖所示。For one embodiment of the present invention, please refer to "Fig. 1", which is a schematic block diagram of a single-sided detection embodiment of the optical detection system in the present invention, as shown in the figure.

本發明提供一種光學檢測系統100，用以對一待測工件W進行檢測。所述的光學檢測系統100包括支撐平台10、中空結構載具20、第一影像擷取裝置30、以及影像檢測裝置50。The present invention provides anoptical inspection system 100 for inspecting a workpiece W to be inspected. Theoptical detection system 100 includes asupport platform 10 , ahollow structure carrier 20 , a firstimage capture device 30 , and animage detection device 50 .

所述的支撐平台10係用以供該中空結構載具20設置，該支撐平台10可以是任意的機構、或裝置，用以使中空結構載具20的一側構成封閉區間。支撐平台10與中空結構載具20的組合將構成一氣浮載台，當待測工件W設置於該中空結構載具20另一側時，兩側的支撐平台10、及待測工件W將於中空結構載具20的內側構成封閉式腔體CB。Thesupport platform 10 is used for setting thehollow structure carrier 20 , and thesupport platform 10 can be any mechanism or device to make one side of thehollow structure carrier 20 form a closed area. The combination of thesupport platform 10 and thehollow structure carrier 20 will constitute an air bearing platform. When the workpiece W to be measured is placed on the other side of thehollow structure carrier 20, thesupport platforms 10 on both sides and the workpiece W to be measured will The inner side of thehollow structure carrier 20 forms a closed cavity CB.

所述的中空結構載具 20設置於該支撐平台10上，且具有承載面21與支撐面22。待測工件W配置為承載於該承載面21上，支撐面22結合於支撐平台10上，並經由支撐平台10或支撐平台10的腔式構成封閉區間，其中該中空結構載具20透過內側壁23界定承載面開口231與支撐面開口232。內側壁23上形成複數個排氣孔233，藉以透過正壓提供裝置234，於該封閉式腔體CB內輸出空氣，以構成中央氣浮區。於圖式中，承載面開口231係朝向圖1中上方的方向(如箭頭A1)，支撐面開口232係朝向圖1中下方的方向，內側壁23係為中空結構載具20朝向中空結構中心方向上的牆面，環形外壁面24係為中空結構載具20遠離中空結構的外側牆面，中空結構載具20的上側平面為承載面21，中空結構載具20的下側平面為支撐面22。於一實施例中，承載面21上形成複數個吸附孔211，以構成外圍吸附區，藉以透過負壓提供裝置214，使該待測工件W被吸附於該承載面21上。Thehollow structure carrier 20 is arranged on the supportingplatform 10, and has a carryingsurface 21 and a supportingsurface 22. The workpiece W to be measured is configured to be carried on thecarrying surface 21, the supportingsurface 22 is combined with the supportingplatform 10, and forms a closed section through the supportingplatform 10 or the cavity of the supportingplatform 10, wherein thehollow structure carrier 20 sees through theinner wall 23 defines theloading surface opening 231 and the supportingsurface opening 232 . A plurality ofexhaust holes 233 are formed on theinner wall 23 to output air in the closed cavity CB through the positivepressure supply device 234 to form a central air flotation area. In the drawings, thebearing surface opening 231 is directed toward the upper direction in FIG. 1 (such as arrow A1), the supportingsurface opening 232 is directed toward the lower direction in FIG. The wall surface in the direction, the ring-shapedouter wall surface 24 is the outer wall surface of thehollow structure carrier 20 away from the hollow structure, the upper side plane of thehollow structure carrier 20 is thebearing surface 21, and the lower side plane of thehollow structure carrier 20 is the supporting surface twenty two. In one embodiment, a plurality ofadsorption holes 211 are formed on thebearing surface 21 to form a peripheral adsorption area, so that the workpiece W to be measured is adsorbed on thebearing surface 21 through the negativepressure providing device 214 .

於其中一實施例中，該中空結構載具20係為圓形；於其他實施例中，該中空結構載具20除了圓形以外，亦可為方形、多邊形、不規則形或其他任意的形狀，該等形狀非屬本發明所欲限制的範圍。In one embodiment, the hollowstructural carrier 20 is circular; in other embodiments, the hollowstructural carrier 20 can also be square, polygonal, irregular or other arbitrary shapes in addition to circular , these shapes are not within the scope of the present invention.

所述的第一影像擷取裝置30設置於該支撐面22的一側，用以拍攝該待測工件W的第一面影像。第一影像擷取裝置30朝向支撐面開口232方向(如箭頭A1)，用以通過支撐面開口232拍攝待測工件W的背面影像；在此所指的第一面影像係指待測工件W相對於中空結構載具20的位置而言，並不一定是指待測工件W本身的正面或背面，在此先行敘明。於一實施例中，第一影像擷取裝置30包括輔助光源31及影像感測裝置32。輔助光源31提供光源至待測工件W的第一面上。影像感測裝置32用以獲得該待測工件W的第一面影像。於一實施例中，輔助光源31例如可以是但不限定於同軸光源、環形光源、側向光源、或環境光源等，於本發明中不予以限制。於一實施例中，影像感測裝置32可以是線掃描攝影機(Line Scan Camera)、或面掃描攝影機(Area Scan Camera)，於本發明中不予以限制。The firstimage capture device 30 is disposed on one side of the supportingsurface 22 for capturing a first surface image of the workpiece W to be measured. The firstimage capture device 30 faces the direction of theopening 232 of the supporting surface (such as arrow A1), and is used to capture the backside image of the workpiece W to be measured through theopening 232 of the supporting surface; the first surface image referred to herein refers to the workpiece W to be measured The position relative to thehollow structure carrier 20 does not necessarily refer to the front or back of the workpiece W to be tested, which will be described here first. In one embodiment, the firstimage capturing device 30 includes anauxiliary light source 31 and animage sensing device 32 . Theauxiliary light source 31 provides light to the first surface of the workpiece W to be measured. Theimage sensing device 32 is used to obtain a first surface image of the workpiece W to be measured. In one embodiment, theauxiliary light source 31 may be, for example but not limited to, a coaxial light source, a ring light source, a side light source, or an ambient light source, etc., which are not limited in the present invention. In one embodiment, theimage sensing device 32 may be a line scan camera (Line Scan Camera) or an area scan camera (Area Scan Camera), which is not limited in the present invention.

所述的影像檢測裝置50耦合至第一影像擷取裝置30，以檢測待測工件W的第一面影像。影像檢測裝置50可以通過傳統影像分析演算法獲取待測工件W上的瑕疵、或是通過機器學習(Machine Learning)、深度學習(Deep Learning)、或其他類神經網絡分析影像並獲得檢測結果，於本發明中不予以限制。於一實施例中，所述的影像檢測裝置50可以將影像處理過後經由人員目檢的方式獲得檢測結果，於本發明中不予以限制。Theimage detection device 50 is coupled to the firstimage capture device 30 to detect the first surface image of the workpiece W to be measured. Theimage detection device 50 can acquire defects on the workpiece W to be tested through traditional image analysis algorithms, or analyze images through machine learning (Machine Learning), deep learning (Deep Learning), or other similar neural networks and obtain detection results, and then No limitation is imposed in the present invention. In one embodiment, theimage detection device 50 can process the image and obtain the detection result through visual inspection by personnel, which is not limited in the present invention.

於本發明的另一實施例，請參閱「圖2」，係為本發明中光學檢測系統雙面檢測實施例的方塊示意圖，如圖所示。For another embodiment of the present invention, please refer to "Fig. 2", which is a schematic block diagram of an embodiment of the double-sided detection of the optical detection system in the present invention, as shown in the figure.

本實施例與前一實施例的主要差異在於影像擷取裝置的數量及設置位置，其他相同部分，後面即不再與以贅述。The main difference between this embodiment and the previous embodiment lies in the number and installation positions of the image capture devices, and other similar parts will not be repeated hereafter.

本發明提供一種光學檢測系統200，用以進行雙面檢測。於本實施例中，第一影像擷取裝置30設置於該支撐面22的一側，用以拍攝該待測工件W的第一面影像。第一影像擷取裝置30朝向支撐面開口232方向(如箭頭A2)，用以通過支撐面開口232拍攝待測工件W的背面影像。The present invention provides anoptical inspection system 200 for double-sided inspection. In this embodiment, the firstimage capturing device 30 is disposed on one side of thesupport surface 22 for capturing a first surface image of the workpiece W to be measured. The firstimage capturing device 30 faces toward theopening 232 of the supporting surface (as shown by arrow A2 ), and is used for capturing the backside image of the workpiece W to be measured through theopening 232 of the supporting surface.

為了拍攝待測工件W的另一面(第二面影像)，本實施例中更進一步包括第二影像擷取裝置40，設置於該承載面21的一側，用以獲得該待測工件W的第二面影像。第二影像擷取裝置40朝向承載面開口231方向(如箭頭A3) ，用以拍攝待測工件W的正面影像。於一實施例中，第二影像擷取裝置40包括輔助光源41及影像感測裝置42。輔助光源41提供光源至待測工件W的第二面上。影像感測裝置42用以獲得該待測工件W的第二面影像。於一實施例中，輔助光源41例如可以是但不限定於同軸光源、環形光源、側向光源、或環境光源等，於本發明中不予以限制。於一實施例中，影像感測裝置42可以是線掃描攝影機(Line Scan Camera)、或面掃描攝影機(Area Scan Camera)，於本發明中不予以限制。In order to photograph the other side (second side image) of the workpiece W to be measured, this embodiment further includes a secondimage capture device 40, which is arranged on one side of thebearing surface 21, to obtain the image of the workpiece W to be measured. Second image. The secondimage capture device 40 faces toward theopening 231 of the carrying surface (as shown by arrow A3), and is used to capture a front image of the workpiece W to be measured. In one embodiment, the secondimage capturing device 40 includes anauxiliary light source 41 and animage sensing device 42 . Theauxiliary light source 41 provides light to the second surface of the workpiece W to be measured. Theimage sensing device 42 is used to obtain a second surface image of the workpiece W to be measured. In one embodiment, theauxiliary light source 41 may be, for example but not limited to, a coaxial light source, a ring light source, a side light source, or an ambient light source, etc., which are not limited in the present invention. In one embodiment, theimage sensing device 42 may be a line scan camera (Line Scan Camera) or an area scan camera (Area Scan Camera), which is not limited in the present invention.

所述的影像檢測裝置50耦合至第一影像擷取裝置30及第二影像擷取裝置40，以接收待測工件W的第一面影像及第二面影像，將該第一面影像及該第二面影像分別進行影像檢測，藉此實現雙面檢測的功能。Theimage detection device 50 is coupled to the firstimage capture device 30 and the secondimage capture device 40 to receive the first surface image and the second surface image of the workpiece W to be measured, and the first surface image and the second surface image Image detection is performed on the second-side images separately, so as to realize the function of double-side detection.

以下針對本發明中的氣浮載台舉其中二種不同具體實施例進行說明。第一實施例請一併參閱「圖3」、「圖4」、「圖5」及「圖6」，係為本發明第一實施例的外觀示意圖、側面示意圖、氣浮載台的剖面示意圖、以及氣浮載台的俯視圖，如圖所示。Two different specific embodiments of the air bearing platform in the present invention will be described below. The first embodiment Please refer to "Fig. 3", "Fig. 4", "Fig. 5" and "Fig. 6" together, which are the schematic view of the appearance, the side view, and the cross-sectional view of the air bearing platform of the first embodiment of the present invention. , and the top view of the air bearing platform, as shown in the figure.

本實施例揭示一種光學檢測系統300，用以對一待測工件W進行檢測。光學檢測系統300主要包括氣浮載台SA、第一影像擷取裝置30A、第二影像擷取裝置40A、以及影像檢測裝置50A。This embodiment discloses anoptical inspection system 300 for inspecting a workpiece W to be inspected. Theoptical detection system 300 mainly includes an air bearing stage SA, a firstimage capture device 30A, a secondimage capture device 40A, and animage detection device 50A.

關於第一影像擷取裝置30A、第二影像擷取裝置40A、以及影像檢測裝置50A的功能於前面實施例中已具體詳細說明，在此針對其硬體的配置不再重覆予以贅述。The functions of the firstimage capture device 30A, the secondimage capture device 40A, and theimage detection device 50A have been described in detail in the previous embodiments, and the hardware configuration thereof will not be repeated here.

所述的第一影像擷取裝置30A設置於氣浮載台SA支撐面22A的一側，以拍攝待測工件W的第一面影像，第一影像擷取裝置30A包括輔助光源31A及影像感測裝置32A；所述的第二影像擷取裝置40A設置於氣浮載台SA承載面21A的一側，以拍攝待測工件W的第二面影像，第二影像擷取裝置40A包括輔助光源41A及影像感測裝置42A。影像檢測裝置50A係耦合於第一影像擷取裝置30A、以及第二影像擷取裝置40A。The firstimage capture device 30A is arranged on one side of thesupport surface 22A of the air bearing stage SA to capture the image of the first surface of the workpiece W to be measured. The firstimage capture device 30A includes an auxiliarylight source 31A and an imagesensor Measuring device 32A; the secondimage capturing device 40A is arranged on one side of the bearingsurface 21A of the air bearing stage SA to capture the second surface image of the workpiece W to be measured, and the secondimage capturing device 40A includes an auxiliarylight source 41A andimage sensing device 42A. Theimage detection device 50A is coupled to the firstimage capture device 30A and the secondimage capture device 40A.

關於本實施例中氣浮載台SA的詳細構造，請參閱「圖5」及「圖6」。所述的氣浮載台SA主要包括透明材質平板10A、以及設置於透明材質平板10A上的中空結構載具20A。於本實施例中，中空結構載具20A包括設置於兩側的承載面21A、以及支撐面22A，中空結構載具20A中間的中空結構為圓形通孔25A，圓形通孔25A穿過中空結構載具20A的中心藉此於兩側形成承載面開口251A、以及支撐面開口252A。透明材質平板10A係封閉支撐面開口252A，以於該側方向上封閉圓形通孔25A。當待測工件W設置於承載面21A上時，待測工件W、中空結構載具20A與透明材質平板10A構成封閉式腔體CB1。藉由透明材質平板10A的配置，第一影像擷取裝置30A(如圖4所示)得以透過透明材質平板10A拍攝該待測工件W的該第一面影像。Please refer to "Fig. 5" and "Fig. 6" for the detailed structure of the air bearing stage SA in this embodiment. The air bearing platform SA mainly includes a flat plate oftransparent material 10A, and ahollow structure carrier 20A arranged on the flat plate oftransparent material 10A. In this embodiment, thehollow structure carrier 20A includes bearingsurfaces 21A andsupport surfaces 22A arranged on both sides. The hollow structure in the middle of thehollow structure carrier 20A is a circular throughhole 25A, and the circular throughhole 25A passes through the hollow The center of thestructural carrier 20A thus forms a loading surface opening 251A and a supporting surface opening 252A on both sides. Thetransparent material plate 10A closes theopening 252A of the supporting surface to close the circular throughhole 25A in the side direction. When the workpiece W to be measured is placed on thebearing surface 21A, the workpiece W to be measured, thehollow structure carrier 20A and thetransparent material plate 10A form a closed cavity CB1. With the configuration of thetransparent material plate 10A, the firstimage capture device 30A (as shown in FIG. 4 ) can capture the first surface image of the workpiece W to be measured through thetransparent material plate 10A.

於本實施例中，承載面21A上係設置有吸附孔211A用以吸附待測工件W，吸附孔211A經由中空結構載具20A內側的通道212A連接至環形外壁面24A上的通孔213A，以經由該通孔213A連接至抽真空裝置(圖未示)，藉以與抽真空裝置共同構成負壓提供裝置。於一實施例中，抽真空裝置例如可以是真空泵、或是真空機組等，於本發明中不予以限制。In this embodiment, the bearingsurface 21A is provided with anadsorption hole 211A for absorbing the workpiece W to be measured. Theadsorption hole 211A is connected to the throughhole 213A on the annularouter wall surface 24A via thechannel 212A inside thehollow structure carrier 20A, so as to It is connected to a vacuum device (not shown) through the throughhole 213A, so as to form a negative pressure providing device together with the vacuum device. In one embodiment, the vacuum device may be, for example, a vacuum pump or a vacuum unit, which is not limited in the present invention.

內側壁23A上係設置有排氣孔231A用以於該封閉式腔體CB1內輸出空氣以構成中央氣浮區FA，排氣孔231A經由中空結構載具20A內側的通道232A連接至環形外壁面24A上的通孔233A，以經由該通孔233A連接至氣體輸出裝置(圖未示)，藉以與氣體輸出裝置共同構成正壓提供裝置。於一實施例中，氣體輸出裝置例如可以是電動氣泵、或是氣壓鋼瓶等，於本發明中不予以限制。Theinner side wall 23A is provided with anexhaust hole 231A for outputting air in the closed cavity CB1 to form the central air flotation area FA. Theexhaust hole 231A is connected to the annular outer wall surface through thechannel 232A inside thehollow structure carrier 20A. The through hole 233A on 24A is connected to the gas output device (not shown) through the through hole 233A, so as to form a positive pressure providing device together with the gas output device. In one embodiment, the gas output device may be, for example, an electric gas pump, or a gas cylinder, etc., which are not limited in the present invention.

於本實施例中，吸附孔211A及排氣孔231A以交錯排列的方式環形分布於中空結構載具20A上，以令通孔213A以及通孔233A得以相間讓位排列於環形外壁面24A上。In this embodiment, theadsorption holes 211A and theexhaust holes 231A are distributed in a staggered manner on the hollowstructural carrier 20A in a circular manner, so that the throughholes 213A and the through holes 233A can alternately be arranged on the annularouter wall surface 24A.

於一實施例中，中空結構載具20A朝向支撐面開口252A方向的內周緣處係設置有導斜面26A，導斜面26A 由支撐面開口252A朝向承載面開口251A的方向漸縮，通過導斜面26A藉以使待測工件W對應於中央氣浮區FA位置避光。In one embodiment, a guideinclined surface 26A is provided at the inner periphery of thehollow structure carrier 20A toward the supportingsurface opening 252A, and the guidinginclined surface 26A is tapered from the supporting surface opening 252A toward the bearing surface opening 251A, and passes through the guidinginclined surface 26A Therefore, the position of the workpiece W to be measured corresponding to the central air-floating area FA is protected from light.

以下針對本發明的第二實施例進行說明，請一併參閱「圖7」、「圖8」及「圖9」，係為本發明第二實施例的外觀示意圖、側面示意圖、以及氣浮載台的剖面示意圖，如圖所示。The following describes the second embodiment of the present invention. Please refer to "Fig. 7", "Fig. 8" and "Fig. 9" together, which are the schematic appearance, side view and air bearing of the second embodiment of the present invention. A cross-sectional schematic diagram of the platform is shown in Fig.

本實施例揭示一種光學檢測系統400，用以對一待測工件W進行檢測。光學檢測系統400主要包括氣浮載台SB、第一影像擷取裝置30B、第二影像擷取裝置40B、以及影像檢測裝置50B。This embodiment discloses anoptical inspection system 400 for inspecting a workpiece W to be inspected. Theoptical detection system 400 mainly includes an air bearing stage SB, a firstimage capture device 30B, a secondimage capture device 40B, and animage detection device 50B.

關於第一影像擷取裝置30B、第二影像擷取裝置40B、以及影像檢測裝置50B的功能於前面實施例中已具體詳細說明，在此針對其硬體的配置不再重覆予以贅述。The functions of the firstimage capture device 30B, the secondimage capture device 40B, and theimage detection device 50B have been described in detail in the previous embodiments, and the hardware configuration thereof will not be repeated here.

所述的第一影像擷取裝置30B設置於中空結構載具20B支撐面22B的一側，以拍攝待測工件W的第一面影像，第一影像擷取裝置30B包括輔助光源31B及影像感測裝置32B；所述的第二影像擷取裝置40B設置於中空結構載具20B承載面21B的一側，以拍攝待測工件W的第二面影像，第二影像擷取裝置40B包括輔助光源41B及影像感測裝置42B。影像檢測裝置50B係耦合於第一影像擷取裝置30B、以及第二影像擷取裝置40B。The firstimage capture device 30B is set on one side of thesupport surface 22B of thehollow structure carrier 20B to capture the first surface image of the workpiece W to be measured. The firstimage capture device 30B includes an auxiliarylight source 31B and an imagesensor Measuring device 32B; the secondimage capturing device 40B is arranged on one side of the carryingsurface 21B of thehollow structure carrier 20B to capture the second surface image of the workpiece W to be measured, and the secondimage capturing device 40B includes an auxiliarylight source 41B andimage sensing device 42B. Theimage detection device 50B is coupled to the firstimage capture device 30B and the secondimage capture device 40B.

關於本實施例中氣浮載台SB的詳細構造，請參閱「圖9」。於本實施例中，所述的氣浮載台SB主要包括箱體10B、以及設置於箱體10B上的中空結構載具20B。於本實施例中，中空結構載具20B包括設置於兩側的承載面21B、以及支撐面22B，中空結構載具20B中間的中空結構為圓形通孔25B，圓形通孔25B穿過中空結構載具20B的中心藉此於兩側形成承載面開口251B、以及支撐面開口252B。箱體10B結合於支撐面開口252B開口上，並具有容納空間11B，藉以置放第一影像擷取裝置30B。當待測工件W設置於承載面21B上時，待測工件W、中空結構載具20B與箱體10B的容納空間11B構成封閉式腔體CB2。承載面21B上係設置有吸附孔211B用以吸附待測工件W，內側壁23B上係設置有排氣孔231B用以於該封閉式腔體CB2內輸出空氣以構成中央氣浮區FB。所述的排氣孔除了設置於該中空結構載具20B上外，亦可以設置於該箱體10B的內側，於本發明中不予以限制。For the detailed structure of the air bearing stage SB in this embodiment, please refer to "Fig. 9". In this embodiment, the air bearing platform SB mainly includes abox body 10B and ahollow structure carrier 20B disposed on thebox body 10B. In this embodiment, thehollow structure carrier 20B includes bearingsurfaces 21B and support surfaces 22B arranged on both sides. The hollow structure in the middle of thehollow structure carrier 20B is a circular throughhole 25B, and the circular throughhole 25B passes through the hollow The center of thestructural carrier 20B thereby forms abearing surface opening 251B and a supporting surface opening 252B on both sides. Thebox body 10B is combined with theopening 252B of the supporting surface, and has anaccommodating space 11B for accommodating the firstimage capturing device 30B. When the workpiece W to be measured is placed on thebearing surface 21B, the workpiece W to be measured, the hollowstructural carrier 20B and theaccommodation space 11B of thebox 10B form a closed cavity CB2. The bearingsurface 21B is provided with anadsorption hole 211B for absorbing the workpiece W to be measured, and theinner wall 23B is provided with anexhaust hole 231B for outputting air in the closed cavity CB2 to form a central air flotation area FB. In addition to being disposed on thehollow structure carrier 20B, the exhaust hole may also be disposed inside thebox body 10B, which is not limited in the present invention.

藉由箱體10B的配置，第一影像擷取裝置30B得以透過中空結構載具20B的支撐面開口252B拍攝待測工件W的該第一面影像。With the configuration of thebox 10B, the firstimage capturing device 30B can capture the first surface image of the workpiece W to be measured through theopening 252B of the support surface of thehollow structure carrier 20B.

綜上所述，本發明可以自載台背面進行檢測，增加設備配置及動線的靈活度。另一方面，本發明可以於拍攝待測工件的同時整平待測工件的表面，利用正壓使待測工件得以被平均撐起，增加檢測結果的正確性。In summary, the present invention can perform detection from the back of the carrier, increasing the flexibility of equipment configuration and moving lines. On the other hand, the present invention can level the surface of the workpiece to be tested while photographing the workpiece to be tested, and use positive pressure to prop up the workpiece to be tested evenly, thereby increasing the accuracy of the detection results.

以上已將本發明做一詳細說明，惟以上所述者，僅為本發明之一較佳實施例而已，當不能以此限定本發明實施之範圍，即凡依本發明申請專利範圍所作之均等變化與修飾，皆應仍屬本發明之專利涵蓋範圍內。The present invention has been described in detail above, but the above description is only one of the preferred embodiments of the present invention, and should not limit the scope of the present invention with this, that is, all equivalents made according to the patent scope of the present invention Changes and modifications should still fall within the scope of the patent coverage of the present invention.

100:光學檢測系統W:待測工件10:支撐平台20:中空結構載具21:承載面211:吸附孔214:負壓提供裝置22:支撐面23:內側壁231:承載面開口232:支撐面開口233:排氣孔234:正壓提供裝置24:環形外壁面30:第一影像擷取裝置31:輔助光源32:影像感測裝置50:影像檢測裝置CB:封閉式腔體A1:箭頭200:光學檢測系統40:第二影像擷取裝置41:輔助光源42:影像感測裝置A2:箭頭A3:箭頭300:光學檢測系統SA:氣浮載台10A:透明材質平板20A:中空結構載具21A:承載面211A:吸附孔212A:通道213A:通孔22A:支撐面23A:內側壁231A:排氣孔232A:通道233A:通孔24A:環形外壁面25A:圓形通孔251A:承載面開口252A:支撐面開口26A:導斜面30A:第一影像擷取裝置31A:輔助光源32A:影像感測裝置40A:第二影像擷取裝置41A:輔助光源42A:影像感測裝置50A:影像檢測裝置CB1:封閉式腔體FA:中央氣浮區400:光學檢測系統SB:氣浮載台10B:箱體20B:中空結構載具21B:承載面211B:吸附孔22B:支撐面23B:內側壁231B:排氣孔25B:圓形通孔251B:承載面開口252B:支撐面開口30B:第一影像擷取裝置31B:輔助光源32B:影像感測裝置40B:第二影像擷取裝置41B:輔助光源42B:影像感測裝置50B:影像檢測裝置FB:中央氣浮區CB2:封閉式腔體100: Optical detection systemW: workpiece to be tested10: Support platform20: Hollow Structure Vehicle21: Bearing surface211: adsorption hole214: Negative pressure providing device22: Support surface23: inner wall231: Loading surface opening232: Support surface opening233: exhaust hole234: positive pressure supply device24: Annular outer wall30: The first image capture device31: Auxiliary light source32: Image sensing device50: Image detection deviceCB: closed cavityA1: Arrow200: Optical detection system40: Second image capturing device41: Auxiliary light source42: Image sensing deviceA2: ArrowA3: Arrow300: Optical detection systemSA: air bearing stage10A: transparent material plate20A: Hollow structure carrier21A: bearing surface211A: adsorption hole212A: channel213A: Through hole22A: Support surface23A: Medial wall231A: exhaust hole232A: channel233A: Through hole24A: Annular outer wall25A: Round through hole251A: Loading surface opening252A: Support surface opening26A: guide slope30A: the first image capture device31A: auxiliary light source32A: Image sensing device40A: the second image capture device41A: auxiliary light source42A: Image sensing device50A: Image detection deviceCB1: closed cavityFA: central air flotation area400: Optical detection systemSB: air bearing platform10B: Box20B: Hollow Structure Vehicle21B: bearing surface211B: adsorption hole22B: Support surface23B: Medial wall231B: exhaust hole25B: Round through hole251B: Loading surface opening252B: Support surface opening30B: the first image capture device31B: Auxiliary light source32B: Image sensing device40B: the second image capture device41B: Auxiliary light source42B: Image sensing device50B: Image detection deviceFB: central air flotation areaCB2: closed cavity

圖1，本發明中光學檢測系統單面檢測實施例的方塊示意圖。Fig. 1 is a schematic block diagram of a single-sided detection embodiment of an optical detection system in the present invention.

圖2，本發明中光學檢測系統雙面檢測實施例的方塊示意圖。Fig. 2 is a schematic block diagram of an embodiment of double-sided detection of the optical detection system in the present invention.

圖3，本發明第一實施例的外觀示意圖。Fig. 3 is a schematic view of the appearance of the first embodiment of the present invention.

圖4，本發明第一實施例的側面示意圖。Fig. 4 is a schematic side view of the first embodiment of the present invention.

圖5，本發明第一實施例中氣浮載台的剖面示意圖。Fig. 5 is a schematic cross-sectional view of the air bearing platform in the first embodiment of the present invention.

圖6，本發明第一實施例中氣浮載台的俯視圖。Fig. 6 is a top view of the air bearing platform in the first embodiment of the present invention.

圖7，本發明第二實施例的外觀示意圖。Fig. 7 is a schematic view of the appearance of the second embodiment of the present invention.

圖8，本發明第二實施例的側面示意圖。Fig. 8 is a schematic side view of the second embodiment of the present invention.

圖9，本發明第二實施例中氣浮載台的剖面示意圖。Fig. 9 is a schematic cross-sectional view of the air bearing platform in the second embodiment of the present invention.

100:光學檢測系統100: Optical detection system

W:待測工件W: workpiece to be tested

10:支撐平台10: Support platform

20:中空結構載具20: Hollow Structure Vehicle

21:承載面21: Bearing surface

211:吸附孔211: adsorption hole

214:負壓提供裝置214: Negative pressure providing device

22:支撐面22: Support surface

23:內側壁23: inner wall

231:承載面開口231: Loading surface opening

232:支撐面開口232: Support surface opening

233:排氣孔233: exhaust hole

234:正壓提供裝置234: positive pressure supply device

24:環形外壁面24: Annular outer wall

30:第一影像擷取裝置30: The first image capture device

31:輔助光源31: Auxiliary light source

32:影像感測裝置32: Image sensing device

50:影像檢測裝置50: Image detection device

CB:封閉式腔體CB: closed cavity

A1:箭頭A1: Arrow

Claims (11)

Translated fromChinese

一種氣浮載台，用以放置一待測工件，包含： 一支撐平台；以及 一中空結構載具，設置於該支撐平台上，且具有一承載面與一支撐面，使該待測工件被承載於該承載面上，其中該中空結構載具透過一內側壁以界定一承載面開口與一支撐面開口； 其中該待測工件、該中空結構載具與該支撐平台構成一封閉式腔體； 其中該內側壁上形成複數個排氣孔，藉以透過一正壓提供裝置，於該封閉式腔體內輸出空氣，以構成一中央氣浮區。An air bearing platform for placing a workpiece to be tested, comprising: a support platform; and A hollow structure carrier is arranged on the support platform, and has a bearing surface and a support surface, so that the workpiece to be measured is carried on the bearing surface, wherein the hollow structure carrier defines a bearing surface through an inner wall surface opening and a supporting surface opening; Wherein the workpiece to be tested, the hollow structural carrier and the supporting platform form a closed cavity; Wherein a plurality of exhaust holes are formed on the inner wall to output air in the closed cavity through a positive pressure supply device to form a central air flotation area.如申請專利範圍第1項所述的氣浮載台，其中該承載面上形成複數個吸附孔，以構成一外圍吸附區，藉以透過一負壓提供裝置，使該待測工件被吸附於該承載面上。The air bearing platform described in item 1 of the scope of the patent application, wherein a plurality of adsorption holes are formed on the bearing surface to form a peripheral adsorption area, so that the workpiece to be measured is adsorbed on the carrier surface through a negative pressure supply device. bearing surface.如申請專利範圍第1項所述的氣浮載台，其中該支撐平台包括一透明材質平板。The air bearing platform described in item 1 of the scope of the patent application, wherein the support platform includes a transparent material flat plate.如申請專利範圍第1項所述的氣浮載台，其中該內側壁係設置一導斜面。The air bearing platform described in item 1 of the scope of the patent application, wherein the inner wall is provided with a guide slope.如申請專利範圍第1項所述的氣浮載台，其中該支撐平台包括一箱體，具有一容納空間。The air bearing platform described in item 1 of the scope of the patent application, wherein the support platform includes a box body with an accommodation space.一種光學檢測系統，用以對一待測工件進行檢測，該系統包含： 一支撐平台； 一中空結構載具，設置於該支撐平台上，且具有一承載面與一支撐面，使該待測工件被承載於該承載面上，其中該中空結構透過一內側壁以界定一承載面開口與一支撐面開口； 一第一影像擷取裝置，設置於該支撐面的一側，用以拍攝該待測工件的第一面影像；以及 一影像檢測裝置，耦合至該第一影像擷取裝置，以檢測該待測工件的該第一面影像； 其中該待測工件、該中空結構載具與該支撐平台構成一封閉式腔體； 其中該內側壁上形成複數個排氣孔，藉以透過一正壓提供裝置，於該封閉式腔體內輸出空氣，以構成一中央氣浮區。An optical detection system for detecting a workpiece to be measured, the system comprising: a support platform; A hollow structure carrier is arranged on the support platform, and has a load surface and a support surface, so that the workpiece to be measured is carried on the load surface, wherein the hollow structure defines an opening of the load surface through an inner wall open with a supporting surface; a first image capturing device, arranged on one side of the supporting surface, for capturing the image of the first surface of the workpiece to be measured; and an image detection device, coupled to the first image capture device, to detect the image of the first surface of the workpiece to be measured; Wherein the workpiece to be tested, the hollow structural carrier and the supporting platform form a closed cavity; Wherein a plurality of exhaust holes are formed on the inner wall to output air in the closed cavity through a positive pressure supply device to form a central air flotation area.如申請專利範圍第6項所述的光學檢測系統，其中該承載面上形成複數個吸附孔，以構成一外圍吸附區，藉以透過一負壓提供裝置，使該待測工件被吸附於該承載面上。The optical inspection system as described in item 6 of the scope of the patent application, wherein a plurality of adsorption holes are formed on the carrier surface to form a peripheral adsorption area, so that the workpiece to be tested is adsorbed on the carrier through a negative pressure supply device face.如申請專利範圍第6項所述的光學檢測系統，其中該支撐平台包括一透明材質平板，藉以該第一影像擷取裝置透過該透明材質平板，拍攝該待測工件的該第一面影像。In the optical inspection system described in item 6 of the scope of the patent application, wherein the supporting platform includes a flat plate made of transparent material, whereby the first image capture device captures the image of the first surface of the workpiece to be tested through the flat plate made of transparent material.如申請專利範圍第6項所述的光學檢測系統，其中該支撐平台包括一箱體，具有一容納空間，藉以置放該第一影像擷取裝置。The optical inspection system as described in item 6 of the scope of the patent application, wherein the support platform includes a box body with an accommodation space for placing the first image capture device.如申請專利範圍第6項所述的光學檢測系統，其中該第一影像擷取裝置包括: 一輔助光源，提供光源至該待測工件的第一面上；以及 一影像感測裝置，用以獲得該待測工件的該第一面影像。The optical inspection system as described in item 6 of the scope of the patent application, wherein the first image capture device includes: an auxiliary light source, providing a light source to the first surface of the workpiece to be measured; and An image sensing device is used to obtain the first surface image of the workpiece to be measured.如申請專利範圍第6項所述的光學檢測系統，更包含，一第二影像擷取裝置，設置於該承載面的一側，用以獲得該待測工件的第二面影像。The optical inspection system described in item 6 of the scope of the patent application further includes a second image capture device disposed on one side of the bearing surface to obtain a second image of the workpiece to be inspected.

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