本揭露有關於一種組裝平台系統與其操作方法。The disclosure relates to an assembly platform system and method of operation thereof.
在半導體元件的製程中，半導體元件的表面平坦化相當重要。其中一種平坦化手段為化學-機械平坦化技術(Chemical-Mechanical Planarization，CMP)。CMP是一種使用機械研磨裝置透過化學蝕刻以及物理研磨的方式來平坦化半導體晶圓基板之表面的整體過程。In the process of semiconductor components, the planarization of the surface of the semiconductor component is quite important. One of the planarization means is Chemical-Mechanical Planarization (CMP). CMP is an overall process for planarizing the surface of a semiconductor wafer substrate by chemical etching and physical polishing using a mechanical polishing device.
由於機械研磨裝置之研磨頭可以重複使用，在不使用機械研磨裝置時，維護人員可以將研磨頭拆開，以便後續對研磨頭清潔、維修或更換零件等日常維護工作。之後，對拆開之研磨頭進行螺絲組裝時，依據研磨頭各層次元件上之每個螺絲所設定之額定扭力進行鎖合，以確保後續研磨頭不致產生漏氣與壓降，進而避免降低研磨頭的平坦化性能。Since the grinding head of the mechanical grinding device can be reused, the maintenance personnel can disassemble the grinding head without using the mechanical grinding device, so as to carry out routine maintenance work such as cleaning, repairing or replacing parts of the polishing head. After the screw assembly of the disassembled grinding head, the locking force is set according to the rated torque set by each screw on each layer of the polishing head to ensure that the subsequent grinding head does not cause air leakage and pressure drop, thereby avoiding the grinding reduction. Flattening performance of the head.
本揭露更有關一種組裝平台系統。組裝平台系統包含一組裝平台、一處理模組與一鎖附感測單元。組裝平台包括一平台本體及一鎖附工具。平台本體具有一放置台。放置台用以放置一工件。鎖附工具可移動地位於平台本體上。處理模組包含一存儲單元、一處理單元與一記錄單元。存儲單元包含多個預設鎖附規格。各個預設鎖附規格對應其中一種螺絲。處理單元電性連接存儲單元與鎖附工具，處理單元用以選擇其中一預設鎖附規格，以及驅動鎖附工具遵照預設鎖附規格將其中一螺絲鎖附於工件上。鎖附感測單元連接鎖附工具，且電性連接處理單元。鎖附感測單元感測鎖附工具鎖附各螺絲至工件所反饋之多個實測數據。記錄單元電性連接處理單元。在每一螺絲被鎖附於工件上之過程中，記錄單元記錄這些實測數據。The disclosure is more related to an assembly platform system. The assembly platform system comprises an assembly platform, a processing module and a lock sensing unit. Assembly platformIncludes a platform body and a locking tool. The platform body has a placement table. A placement table is used to place a workpiece. The locking tool is movably located on the platform body. The processing module includes a storage unit, a processing unit and a recording unit. The storage unit contains a number of preset lock specifications. Each preset lock specification corresponds to one of the screws. The processing unit is electrically connected to the storage unit and the locking tool. The processing unit is configured to select one of the preset locking specifications, and the driving locking tool attaches one of the screws to the workpiece according to the preset locking specification. The lock sensing unit is connected to the locking tool and electrically connected to the processing unit. The lock sensing unit senses the plurality of measured data that the lock tool locks each screw to the workpiece. The recording unit is electrically connected to the processing unit. The recording unit records these measured data during the process in which each screw is attached to the workpiece.
本揭露有關一種組裝平台系統之操作方法。組裝平台系統之操作方法包含數個步驟如下。提供一第一次元件、一第二次元件、一螺絲及對應螺絲之一預設鎖附規格。將第一次元件疊放於第二次元件上。遵照預設鎖附規格，將螺絲鎖附至第一次元件與第二次元件上，以固定第一次元件與第二次元件，在鎖附螺絲至第一次元件與第二次元件之過程中，記錄螺絲於鎖附時所反饋之多個實測數據。The present disclosure relates to a method of operating an assembly platform system. The method of operation of the assembly platform system involves several steps as follows. A first-time component, a second-order component, a screw, and one of the corresponding screws are provided with a preset locking specification. Stack the first component on the second component. According to the preset lock specification, the screw lock is attached to the first component and the second component to fix the first component and the second component, and the locking screw is attached to the first component and the second component. During the process, record the measured data of the screw feedback when it is attached.
本揭露有關一種組裝平台系統之操作方法。組裝平台系統之操作方法包含數個步驟如下。提供一第一次元件、一第二次元件、一第一螺絲、對應第一螺絲之一第一預設鎖附規格、一第二螺絲及對應第二螺絲之一第二預設鎖附規格；將第一次元件疊放於第二次元件上。遵照第一預設鎖附規格，將第一螺絲鎖附至第一次元件與第二次元件上，並記錄第一螺絲被鎖附於第一次元件與第二次元件之第一最終實測扭矩。遵照第二預設鎖附規格，將第二螺絲鎖附至第一次元件與第二次元件上，並記錄第二螺絲被鎖附於第一次元件與第二次元件之第二最終實測扭矩。The present disclosure relates to a method of operating an assembly platform system. The method of operation of the assembly platform system involves several steps as follows. Providing a first component, a second component, a first screw, a first preset locking specification corresponding to the first screw, a second screw, and a second preset locking specification corresponding to the second screw ; stack the first component on the second component. Attach the first screw to the first component and the second component in accordance with the first preset locking specification, and recordThe first screw is locked to the first final measured torque of the first component and the second component. Attaching the second screw to the first component and the second component in accordance with the second preset locking specification, and recording the second final measurement of the second component being locked to the first component and the second component Torque.
100‧‧‧組裝平台系統100‧‧‧Assembled platform system
101‧‧‧組裝平台101‧‧‧Assemble platform
110‧‧‧平台本體110‧‧‧ platform ontology
111‧‧‧放置台111‧‧‧Placement table
120‧‧‧夾具120‧‧‧Clamp
121‧‧‧座體121‧‧‧ body
122‧‧‧直桿122‧‧‧ Straight rod
123‧‧‧懸臂123‧‧‧cantilever
124‧‧‧操作部124‧‧‧Operation Department
125‧‧‧壓迫部125‧‧‧Compression
126‧‧‧偵測單元126‧‧‧Detection unit
130‧‧‧供料機130‧‧‧ Feeder
131‧‧‧轉盤131‧‧‧ Turntable
131T‧‧‧頂面131T‧‧‧ top surface
131B‧‧‧底面131B‧‧‧ bottom
132‧‧‧凹槽132‧‧‧ Groove
133‧‧‧轉動馬達133‧‧‧Rotating motor
134‧‧‧次放置區134‧‧‧ placement area
135‧‧‧送料軌135‧‧‧feed rail
136‧‧‧縫隙136‧‧‧ gap
140‧‧‧機械手臂140‧‧‧ Robotic arm
141‧‧‧連桿141‧‧‧ Connecting rod
142‧‧‧承載部142‧‧‧Loading Department
150‧‧‧鎖附工具150‧‧‧Locking tools
151‧‧‧數位馬達151‧‧‧ digital motor
152‧‧‧鎖附桿152‧‧‧Lock rod
153‧‧‧持料端153‧‧‧ holding end
154‧‧‧鎖附感測單元154‧‧‧Lock sensor unit
155‧‧‧外殼155‧‧‧Shell
160‧‧‧真空吸附裝置160‧‧‧Vacuum adsorption device
161‧‧‧管體161‧‧‧ tube body
162‧‧‧真空幫浦162‧‧‧vacuum pump
163‧‧‧管材163‧‧‧ pipes
164‧‧‧負壓感測單元164‧‧‧Negative pressure sensing unit
170‧‧‧檢測裝置170‧‧‧Detection device
171‧‧‧攝影單元171‧‧‧Photographic unit
172‧‧‧光發射元件172‧‧‧Light emitting elements
200‧‧‧處理模組200‧‧‧Processing module
210‧‧‧存儲單元210‧‧‧ storage unit
220‧‧‧預設鎖附規格220‧‧‧Preset lock specifications
221‧‧‧額定扭矩221‧‧‧ rated torque
222‧‧‧額定轉速222‧‧‧ rated speed
223‧‧‧額定圈數223‧‧‧Round laps
230‧‧‧額定負壓值230‧‧‧rated negative pressure value
240‧‧‧參考影像240‧‧‧Reference image
250‧‧‧預設座標值250‧‧‧Preset coordinate values
260‧‧‧額定光照度260‧‧‧Rated illuminance
270‧‧‧最低光強標準值270‧‧‧ minimum light intensity standard value
280‧‧‧處理單元280‧‧‧Processing unit
290‧‧‧記錄單元290‧‧‧recording unit
300‧‧‧組裝平台系統300‧‧‧Assembled platform system
310‧‧‧加工櫃體310‧‧‧Processing cabinet
311‧‧‧門體311‧‧‧
312‧‧‧開口312‧‧‧ openings
313‧‧‧密閉空間313‧‧‧Confined space
320‧‧‧控制介面320‧‧‧Control interface
321‧‧‧顯示裝置321‧‧‧ display device
322‧‧‧輸入裝置322‧‧‧Input device
401~403、4011~4014、4011’~4014’、4021~4024、411~416‧‧‧步驟401~403, 4011~4014, 4011'~4014', 4021~4024, 411~416‧‧‧ steps
501、502‧‧‧次元件501, 502‧‧‧ components
510‧‧‧螺孔510‧‧‧ screw hole
520‧‧‧墊圈520‧‧‧Washers
600‧‧‧螺絲600‧‧‧ screws
610‧‧‧螺柱610‧‧‧ Stud
620‧‧‧螺絲頭620‧‧‧ screw head
A-A‧‧‧線段A-A‧‧ ‧ line segment
本揭露最佳係在結合隨附圖式解讀時自以下詳細描述來理解。應強調，根據工業中之標準實務，各種特徵並非按比例繪製且僅用於說明目的。事實上，出於論述清晰之目的，可任意增加或減小各種特徵之尺寸。The disclosure is best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be emphasized that, depending on the standard practice in the industry, the various features are not drawn to scale and are for illustrative purposes only. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.
第1圖繪示依照本揭露一實施例之組裝平台系統的側視圖；第2圖繪示第1圖之組裝平台系統的電子方塊圖；第3A圖繪示依照本揭露一實施例之組裝平台系統的供料機的上視圖；第3B圖繪示第3A圖之供料機沿線段A-A之局部剖視圖；第4圖繪示依照本揭露一實施例之真空吸附裝置與鎖附工具的結合示意圖；第5圖繪示依照本揭露一實施例之組裝平台系統的立體圖；第6圖繪示依照本揭露一實施例之組裝平台系統之操作方法的流程圖；第7圖繪示第6圖之步驟402的細部流程圖；第8圖繪示第6圖之步驟401與步驟402之間於一實施例中的細部流程圖；第9圖繪示第6圖之步驟401與步驟402之間於另一實施例中的細部流程圖；以及第10圖繪示依照本揭露一實施例之組裝平台系統之操作方法的流程圖。1 is a side view of an assembly platform system according to an embodiment of the present disclosure; FIG. 2 is an electronic block diagram of the assembly platform system of FIG. 1; FIG. 3A is an assembly platform according to an embodiment of the present disclosure. FIG. 3B is a partial cross-sectional view of the feeder along the line AA of FIG. 3A; FIG. 4 is a schematic view showing the combination of the vacuum adsorption device and the locking tool according to an embodiment of the present disclosure. 5 is a perspective view of an assembly platform system according to an embodiment of the present disclosure; FIG. 6 is a flow chart showing an operation method of the assembly platform system according to an embodiment of the present disclosure; and FIG. 7 is a flowchart of FIG. Step 402 is a detailed flowchart; FIG. 8 is a diagram showing the relationship between step 401 and step 402 of FIG. 6 in an embodiment.FIG. 9 is a detailed flowchart of another embodiment between step 401 and step 402 of FIG. 6; and FIG. 10 illustrates the operation of the assembly platform system according to an embodiment of the present disclosure. Flow chart of the method.
以下揭露內容提供許多不同實施例或實例用於實施所提供之標的物之不同特徵。下文描述元件及佈置之特定實例以簡化本揭露。當然，此等僅為實例且並不意欲為限制性。舉例而言，以下描述中在第二特徵上方或第二特徵上形成第一特徵可包括以直接接觸形成第一特徵及第二特徵的實施例，且亦可包括可在第一特徵與第二特徵之間形成額外特徵以使得第一特徵與第二特徵可不直接接觸的實施例。另外，本揭露可在各種實例中重複元件符號及/或字母。此重複係出於簡明性及清晰之目的，且本身並不指示所論述之各種實施例及/或配置之間的關係。The following disclosure provides many different embodiments or examples for implementing different features of the subject matter provided. Specific examples of components and arrangements are described below to simplify the disclosure. Of course, these are merely examples and are not intended to be limiting. For example, forming the first feature over the second feature or the second feature in the following description may include forming the first feature and the second feature in direct contact, and may also include the first feature and the second feature Embodiments in which additional features are formed between features such that the first feature and the second feature may not be in direct contact. Additionally, the present disclosure may repeat element symbols and/or letters in various examples. This repetition is for the purpose of clarity and clarity, and is not intended to be a limitation of the various embodiments and/or configurations discussed.
此外，為便於描述，本文可使用空間相對性術語(諸如「之下」、「下方」、「下部」、「上方」、「上部」及類似者)來描述圖式中所說明之一個元件或特徵與另一元件(或多個元件)或特徵(或多個特徵)之關係。除了圖式中所描繪之定向外，空間相對性術語意欲包含在使用或操作中之裝置之不同定向。設備可以其他方式定向(旋轉90度或其他定向)且因此可同樣地解釋本文所使用之空間相對性描述詞。In addition, for ease of description, spatially relative terms (such as "below", "below", "lower", "above", "upper", and the like) may be used herein to describe one element or The relationship of a feature to another component (or components) or features (or features). In addition to the orientation depicted in the drawings, spatially relative terms are intended to encompass different orientations of the device in use or operation. The device may be otherwise oriented (rotated 90 degrees or other orientation) and thus the spatially relative descriptors used herein may be interpreted equally.
本揭露大致上係關於組裝平台系統與其操作方法。詳言之，本揭露為用以組裝工件之組裝平台系統與方法。舉例來說，本揭露為用以依序組裝一研磨頭之次元件之組裝平台系統與方法，研磨頭(Chemical-Mechanical Planarization，CMP)為用於平坦化半導體晶圓基板之加工件，然而，本揭露不僅限於此。The present disclosure generally relates to an assembly platform system and its method of operation. In particular, the present disclosure is an assembly platform system and method for assembling a workpiece. For example, the present disclosure is an assembly platform system and method for sequentially assembling a secondary component of a polishing head. The Chemical-Mechanical Planarization (CMP) is a workpiece for planarizing a semiconductor wafer substrate. The disclosure is not limited to this.
第1圖繪示依照本揭露一實施例之組裝平台系統100的側視圖。第2圖繪示第1圖之組裝平台系統100的電子方塊圖。如第1圖至第2圖所示，本揭露有關一種組裝平台系統100。組裝平台系統100包含組裝平台101與處理模組200。組裝平台101包括平台本體110、機械手臂140及鎖附工具150。平台本體110具有一放置台111。放置台111用以放置例如研磨頭之至少二個次元件501、502。機械手臂140可移動地位於平台本體110上。鎖附工具150連接機械手臂140，且隨機械手臂140連動。處理模組200包含存儲單元210與處理單元280。存儲單元210內儲存有多個預設鎖附規格220。各個預設鎖附規格220分別匹配其中一種螺絲600。處理單元280電性連接存儲單元210、機械手臂140與鎖附工具150，用以選擇匹配一螺絲600之預設鎖附規格220、控制機械手臂140帶動鎖附工具150至放置台111以及放置台111上之次元件501、502、將一螺絲600遵照對應其之預設鎖附規格220而鎖附於次元件501、502上。FIG. 1 is a side elevational view of an assembly platform system 100 in accordance with an embodiment of the present disclosure. 2 is an electronic block diagram of the assembled platform system 100 of FIG. 1. As shown in Figures 1 through 2, the present disclosure relates to an assembly platform system 100. The assembly platform system 100 includes an assembly platform 101 and a processing module 200. The assembly platform 101 includes a platform body 110, a robot arm 140, and a locking tool 150. The platform body 110 has a placement table 111. The placement table 111 is used to place, for example, at least two secondary elements 501, 502 of the polishing head. The robot arm 140 is movably located on the platform body 110. The locking tool 150 is coupled to the robot arm 140 and is coupled with the robot arm 140. The processing module 200 includes a storage unit 210 and a processing unit 280. A plurality of preset lock specifications 220 are stored in the storage unit 210. Each of the preset lock specifications 220 matches one of the screws 600, respectively. The processing unit 280 is electrically connected to the storage unit 210, the robot arm 140 and the locking tool 150 for selecting a preset locking specification 220 for matching a screw 600, controlling the robot arm 140 to drive the locking tool 150 to the placing table 111, and placing the table The secondary elements 501, 502 on the 111 are attached to the secondary elements 501, 502 in accordance with the preset locking specifications 220 corresponding thereto.
如此，如第1圖所示，由於本實施例之組裝平台系統100能夠遵照待鎖螺絲600所匹配之預設鎖附規格220，使得此待鎖螺絲600能以最大結構強度鎖附於至少二個次元件501、502上，以確保這些次元件501、502能夠彼此緊密結合，進而確保研磨頭之原有工作性能。Thus, as shown in FIG. 1 , since the assembly platform system 100 of the present embodiment can follow the preset lock specification 220 matched by the lockable screw 600,The lockable screw 600 can be locked to the at least two secondary elements 501, 502 with maximum structural strength to ensure that the secondary elements 501, 502 can be tightly coupled to each other, thereby ensuring the original working performance of the polishing head.
舉例來說，由於每個研磨頭例如包含6~8層依序層疊之次元件，且每二相層疊之次元件將透過多個螺絲(螺絲數量例如高達120個)鎖附其上，以緊密相互結合，才能組合完整之研磨頭。如此，透過本實施例之組裝平台系統，操作人員能夠方便且快速組合成研磨頭，不僅節省許多人力負擔，更可縮短製程時間以及提升工作效率。For example, since each of the polishing heads includes, for example, 6 to 8 layers of sequentially stacked secondary components, and the secondary components of each of the two phases are locked by a plurality of screws (for example, up to 120 screws), In combination with each other, a complete grinding head can be combined. In this way, through the assembly platform system of the embodiment, the operator can conveniently and quickly combine the grinding heads, which not only saves a lot of manpower burden, but also shortens the processing time and improves the working efficiency.
在本實施例中，平台本體110更具有固定機制，用以將上述那些次元件501、502固定於放置台111上，以順利研磨頭之次元件501、502進行上述螺絲600鎖附工作。具體來說，平台本體110更具有至少二個夾具120。這些夾具120相對地位於放置台111上，用以夾持次元件501、502之二相對側。每個夾具120包含座體121、懸臂123、操作部124與壓迫部125。座體121固定於放置台111之一側。例如但不以此為限，座體121鎖固於放置台111之一側。懸臂123樞接座體121。具體地，懸臂123之一端樞接至座體121之一直桿122，另端套接壓迫部125。壓迫部125觸壓其中一次元件501之表面，以固定這些次元件501、502於放置台111上。操作部124固接且連動懸臂123。具體地，操作部124例如為一扳桿。故，當扳動操作部124以連動懸臂123時，懸臂123相對座體121轉動，使得壓迫部125脫離而不再壓制次元件501之表面。In this embodiment, the platform body 110 further has a fixing mechanism for fixing the above-mentioned secondary components 501, 502 to the placing table 111 to smoothly perform the screw 600 locking operation of the secondary components 501, 502 of the polishing head. Specifically, the platform body 110 further has at least two clamps 120. These clamps 120 are located opposite the placement table 111 for holding the opposite sides of the secondary elements 501, 502. Each of the jigs 120 includes a seat body 121, a cantilever 123, an operating portion 124, and a pressing portion 125. The seat body 121 is fixed to one side of the placing table 111. For example, but not limited to, the seat body 121 is locked to one side of the placing table 111. The cantilever 123 pivots to the base 121. Specifically, one end of the cantilever 123 is pivotally connected to the straight rod 122 of the seat body 121, and the other end is sleeved with the pressing portion 125. The pressing portion 125 presses the surface of the primary element 501 to fix the secondary members 501, 502 on the placement table 111. The operation portion 124 is fixed and linked to the cantilever 123. Specifically, the operating portion 124 is, for example, a lever. Therefore, when the operating portion 124 is pulled to interlock the cantilever 123, the cantilever 123 is rotated relative to the seat 121, so that the pressing portion 125 is disengaged and the surface of the secondary member 501 is no longer pressed.
更進一步地，平台本體110更具有偵測單元126。偵測單元126位於平台本體110上，用以感測夾具120是否將次元件501固定於放置台111上。如此，當處理單元280從偵測單元126得知夾具120並未將次元件501、502固定於放置台111上，處理單元280發出對機械手臂140與鎖附工具150禁能之訊息。然而，本揭露不以此為限，本揭露所屬技術領域中具有通常知識者，也可視實際需要，改為當感測出夾具120將次元件501、502固定於放置台111上，處理單元280才會發出對機械手臂140與鎖附工具150致能之訊息。Further, the platform body 110 further has a detecting unit 126.The detecting unit 126 is located on the platform body 110 for sensing whether the fixture 120 fixes the secondary component 501 to the placing table 111. As such, when the processing unit 280 knows from the detecting unit 126 that the jig 120 does not fix the secondary components 501, 502 to the placement table 111, the processing unit 280 issues a message that the mechanical arm 140 and the locking tool 150 are disabled. However, the disclosure is not limited thereto, and the person having ordinary knowledge in the technical field of the present disclosure may also change the secondary component 501, 502 to the placement table 111 when the sensing fixture 120 is fixed according to actual needs, and the processing unit 280 The message that the robot arm 140 and the locking tool 150 are enabled will be issued.
舉例來說，偵測單元126依據紅外線收發感測方式感測夾具120是否將次元件501、502固定於放置台111上，然而，本揭露不限於其他感測方式。然而，本揭露不以此為限，本揭露所屬技術領域中具有通常知識者，也可視實際需要，選擇採用其他已知感測技術。For example, the detecting unit 126 senses whether the fixture 120 fixes the secondary component 501, 502 to the placing table 111 according to the infrared transmitting and receiving sensing mode. However, the disclosure is not limited to other sensing modes. However, the disclosure is not limited thereto, and those skilled in the art may choose other known sensing technologies according to actual needs.
第3A圖繪示依照本揭露一實施例之組裝平台系統100的供料機130的上視圖。第3B圖繪示第3A圖之供料機130沿線段A-A之局部剖視圖。如第3A圖與第3B圖所示，組裝平台系統100更包含供料機130。供料機130可提供多個螺絲600，以便鎖附工具150每次取得一螺絲600。此外，透過供料機130之運轉，螺絲600能夠被調整至預期位置，以供鎖附工具150正確地銜接螺絲600。FIG. 3A is a top view of the feeder 130 of the assembly platform system 100 in accordance with an embodiment of the present disclosure. Figure 3B is a partial cross-sectional view of the feeder 130 of Figure 3A taken along line A-A. As shown in Figures 3A and 3B, the assembly platform system 100 further includes a feeder 130. The feeder 130 can provide a plurality of screws 600 so that the locking tool 150 takes a screw 600 at a time. In addition, through operation of the feeder 130, the screw 600 can be adjusted to the desired position for the locking tool 150 to properly engage the screw 600.
舉例來說，供料機130包含轉盤131、轉動馬達133與送料軌135。轉動馬達133連接轉盤131之底面131B，用以帶動轉盤131旋轉。轉盤131之頂面131T上形成有多個凹槽132。每一凹槽132僅能接受一螺絲600。送料軌135伸至轉盤131之頂面131T上，且恰對準其中一凹槽132。送料軌135具有一縫隙136。縫隙136恰供螺絲600之螺絲柱610通過。For example, the feeder 130 includes a turntable 131, a rotating motor 133, and a feed rail 135. The rotating motor 133 is coupled to the bottom surface 131B of the turntable 131 for driving the turntable 131 to rotate. A plurality of grooves 132 are formed on the top surface 131T of the turntable 131. Each groove 132 can only accept one screw 600. Feed rail 135 extends to the turntableThe top surface 131T of 131 is aligned with one of the grooves 132. The feed rail 135 has a slit 136. The slit 136 is just passed through the screw post 610 of the screw 600.
故，當轉盤131帶動凹槽132同步旋轉時，凹槽132依序通過送料軌135之一末端。藉由多個螺絲600於送料軌135上單列地朝轉盤131移動，這些螺絲600能夠依序地落入每一恰好轉過來之凹槽132內，使得螺絲600之螺柱610落入其中一凹槽132，且讓螺絲600之螺絲頭620限位於轉盤131之頂面131T，以便讓螺絲600之螺絲頭620位處螺柱610上方，以供接受鎖附工具150之銜接。另外，供料機130內更具有多個次放置區134，每個次放置區134可供放置多個不同螺絲600，以便依序移至轉盤131上。不同螺絲600例如為不同尺寸、種類或是所對應之預設鎖附規格220。Therefore, when the turntable 131 drives the groove 132 to rotate synchronously, the groove 132 sequentially passes through one end of the feed rail 135. By moving a plurality of screws 600 on the feed rail 135 in a single row toward the turntable 131, the screws 600 can be sequentially dropped into the recesses 132 which are just turned around, so that the studs 610 of the screws 600 fall into one of the recesses. The slot 132 and the screw head 620 of the screw 600 are limited to the top surface 131T of the turntable 131 so that the screw head 620 of the screw 600 is positioned above the stud 610 for accepting the engagement of the locking tool 150. In addition, the feeder 130 further has a plurality of secondary placement zones 134, each of which can be used to place a plurality of different screws 600 for sequential movement onto the turntable 131. The different screws 600 are, for example, of different sizes, types or corresponding preset lock specifications 220.
回第1圖所示，機械手臂140具有多個連桿141與一承載部142。連桿141彼此軸接，機械手臂140最前段之連桿141鎖固於接平台本體110，機械手臂140最末段之連桿141連接承載部142。承載部142承載上述鎖附工具150。故，藉由處理單元280控制機械手臂140之運作，機械手臂140可變化出多種姿態，且移動至不同位置，更可呈現不同角度，以達到不同的工作需求。然而，本揭露不限只能透過機械手臂140移動，本揭露所屬技術領域中具有通常知識者，也可視實際需要選擇採用其他已知技術，例如以X-Y-Z軌道移動鎖附工具150，或者，省略機械手臂。Referring back to FIG. 1, the robot arm 140 has a plurality of links 141 and a carrier portion 142. The links 141 are axially coupled to each other, and the link 141 of the foremost section of the robot arm 140 is locked to the platform body 110, and the link 141 of the last stage of the robot arm 140 is coupled to the carrier portion 142. The carrier portion 142 carries the above-described locking tool 150. Therefore, by the processing unit 280 controlling the operation of the robot arm 140, the robot arm 140 can change a variety of postures, and move to different positions, and can also present different angles to achieve different work requirements. However, the disclosure is not limited to moving through the robot arm 140. Those skilled in the art may choose other known techniques, such as moving the locking tool 150 in an XYZ track, or omitting the machine. Arm.
鎖附工具150包含數位馬達151、鎖附桿152與殼體155。數位馬達151與鎖附桿152位於殼體155內。鎖附桿152與數位馬達151之轉軸共軸，且套接於數位馬達151之轉軸，鎖附桿152遠離數位馬達151之一端為持料端153。持料端153用以銜接螺絲600之螺絲頭620。鎖附桿152例如為開口312扳手、套筒扳手或起子工具等匹配螺絲種類者，然而，本揭露不以此為限。數位馬達151電性連接處理單元280，以便隨著處理單元280之訊號輸出匹配對應螺絲600之預設鎖附規格220的轉動力道。The locking tool 150 includes a digital motor 151, a locking lever 152, and a housing 155. The digital motor 151 and the locking lever 152 are located within the housing 155. Locking rod 152It is coaxial with the rotating shaft of the digital motor 151 and is sleeved on the rotating shaft of the digital motor 151. The locking rod 152 is away from the one end of the digital motor 151 as the holding end 153. The holding end 153 is used to engage the screw head 620 of the screw 600. The locking rod 152 is, for example, a matching screw type such as an opening 312 wrench, a socket wrench or a screwdriver tool. However, the disclosure is not limited thereto. The digital motor 151 is electrically connected to the processing unit 280 to match the rotational force of the preset locking specification 220 of the corresponding screw 600 with the signal output of the processing unit 280.
如此，當驅動數位馬達151轉動時，鎖附桿152隨數位馬達151之轉軸同步轉動。然而，本揭露不限驅動鎖附工具150之動力來源只能為數位馬達151，本揭露所屬技術領域中具有通常知識者，也可視實際需要，選擇採用其他已知技術，例如氣動工具。Thus, when the driving digital motor 151 is rotated, the lock lever 152 is synchronously rotated with the rotation shaft of the digital motor 151. However, the power source of the present invention is not limited to the digital motor 151. For those skilled in the art, other known techniques, such as pneumatic tools, may be selected according to actual needs.
此外，上述各個預設鎖附規格220例如包含，額定扭矩221(torque)、額定轉速222(speed)與額定圈數223(round)等參數，但本揭露不以此為限。如此，在鎖附工具150將螺絲600鎖附於次元件501、502之螺孔510時，處理單元280依據其中一預設鎖附規格220之額定扭矩221、額定轉速222與額定圈數223，驅動鎖附工具150將螺絲600鎖附於次元件501、502之螺孔510內，便可提升螺絲600緊密地結合這些次元件501、502之性能。In addition, each of the preset lock specifications 220 includes parameters such as a rated torque 221 (torque), a rated speed 222 (speed), and a rated number of turns 223 (round), but the disclosure is not limited thereto. Thus, when the locking tool 150 locks the screw 600 to the screw hole 510 of the secondary component 501, 502, the processing unit 280 according to one of the preset locking specifications 220, the rated torque 221, the rated rotational speed 222 and the rated number of turns 223, The drive locking tool 150 locks the screw 600 into the threaded bore 510 of the secondary member 501, 502 to enhance the performance of the screw 600 in tightly engaging the secondary members 501, 502.
此外，第4圖繪示依照本揭露一實施例之真空吸附裝置160與鎖附工具150的結合示意圖。如第1圖與第4圖所示，組裝平台系統100更包含一真空吸附裝置160。真空吸附裝置160連接鎖附工具150，用以透過真空吸力將螺絲600依附至鎖附桿152之持料端153。更具體地，在本實施例中，真空吸附裝置160包含管體161、真空幫浦162與管材163。管體161位於鎖附工具150之殼體155內。管體161之一端透過管材163連接真空幫浦162，管體161之另端伸至鎖附工具150之持料端153之位置。In addition, FIG. 4 is a schematic diagram showing the combination of the vacuum adsorption device 160 and the locking tool 150 according to an embodiment of the present disclosure. As shown in Figures 1 and 4, the assembly platform system 100 further includes a vacuum adsorption device 160. The vacuum adsorption device 160 is connected to the locking tool 150 for attaching the screw 600 to the lock through vacuum suctionThe holding end 153 of the rod 152. More specifically, in the present embodiment, the vacuum adsorption device 160 includes a tube body 161, a vacuum pump 162, and a tube 163. The tubular body 161 is located within the housing 155 of the locking tool 150. One end of the tubular body 161 is connected to the vacuum pump 162 through the pipe 163, and the other end of the tubular body 161 is extended to the holding end 153 of the locking tool 150.
如此，當機械手臂140帶動鎖附工具150至供料機130時，真空幫浦162對管體161抽真空，使得其中一螺絲600得以被吸附至管體161，進而讓螺絲600依附至鎖附工具150之持料端153上。換句話說，鎖附工具150之持料端153此時接觸螺絲600之螺絲頭620，以便鎖附工具150之持料端153得以帶動螺絲600轉動。然而，本揭露不限僅以真空方式取得螺絲600，本揭露所屬技術領域中具有通常知識者，也可視實際需要，選擇採用其他取得螺絲600之吸附技術，例如磁化鎖附工具150之持料端153，使得鎖附工具150之持料端153吸引螺絲600。Thus, when the robot arm 140 drives the locking tool 150 to the feeder 130, the vacuum pump 162 evacuates the tube body 161, so that one of the screws 600 can be adsorbed to the tube body 161, thereby allowing the screw 600 to be attached to the lock. The holding end 153 of the tool 150. In other words, the holding end 153 of the locking tool 150 now contacts the screw head 620 of the screw 600 so that the holding end 153 of the locking tool 150 can drive the screw 600 to rotate. However, the present disclosure is not limited to obtaining the screw 600 only in a vacuum manner. Those skilled in the art can also select other adsorption technologies for obtaining the screw 600, such as the holding end of the magnetizing and locking tool 150, depending on actual needs. 153, the holding end 153 of the locking tool 150 is caused to attract the screw 600.
此外，真空吸附裝置160更包含負壓感測單元164。負壓感測單元164接通管材163，且電連接處理單元280。故，當真空幫浦162對管體161抽真空，負壓感測單元164將所感測到真空吸力之實測負壓值傳至處理單元280，以便後續製程之檢視、分析與改良。In addition, the vacuum adsorption device 160 further includes a negative pressure sensing unit 164. The negative pressure sensing unit 164 turns on the tube 163 and electrically connects the processing unit 280. Therefore, when the vacuum pump 162 vacuums the tube body 161, the negative pressure sensing unit 164 transmits the measured negative pressure value of the vacuum suction force to the processing unit 280 for inspection, analysis and improvement of subsequent processes.
在本實施例中，存儲單元210內更包含多個額定負壓值230。這些額定負壓值230分別對應不同種類(尺寸或重量)之螺絲600。換句話說，為了將螺絲600正確地依附於鎖附工具150之持料端153上，因應不同種類(重量)之螺絲600，設計者預先提供不同之額定負壓值230。若真空吸力不足將導致螺絲600在鎖附工具150之持料端153上產生晃動，使得螺絲600之螺絲頭620不易正確地依附於鎖附工具150之持料端153上，意即，螺絲600之螺柱610與鎖附桿152之軸心不共軸。如此，真空吸附裝置160採用對應螺絲600之額定負壓值230的真空吸力將螺絲600吸附至鎖附工具150之持料端153上，以提高螺絲600正確地依附於鎖附工具150之持料端153的成功率。In the embodiment, the storage unit 210 further includes a plurality of rated negative pressure values 230. These rated negative pressure values 230 correspond to different types (size or weight) of screws 600, respectively. In other words, in order to properly attach the screw 600 to the holding end 153 of the locking tool 150, the screw 600 of different types (weights) is provided.The meter provides a different nominal negative pressure value of 230 in advance. If the vacuum suction is insufficient, the screw 600 will be shaken on the holding end 153 of the locking tool 150, so that the screw head 620 of the screw 600 is not easily attached to the holding end 153 of the locking tool 150, that is, the screw 600 The stud 610 is not coaxial with the axis of the locking rod 152. Thus, the vacuum adsorption device 160 adsorbs the screw 600 to the holding end 153 of the locking tool 150 by the vacuum suction corresponding to the rated negative pressure value 230 of the screw 600, so as to improve the screw 600 correctly attached to the holding material of the locking tool 150. The success rate of the end 153.
本實施例之組裝平台系統100更包含檢測裝置170。檢測裝置170位於平台本體110上，且電性連接處理單元280。檢測裝置170用以檢查研磨頭之次元件501或螺絲600，或者次元件501及螺絲600是否符合對應之堪用標準。更具體地，檢測裝置170包含攝影單元171。攝影單元171位於機械手臂140之連桿141上，以隨機械手臂140連動。攝影單元171電性連接處理單元280。如此，當機械手臂140帶動鎖附工具150至研磨頭之次元件501上方時，攝影單元171對研磨頭之次元件501之全部或局部取得擷取影像，故，處理單元280藉此檢查次元件501之全部或局部是否合乎堪用標準，以確保研磨頭的整體良率。The assembly platform system 100 of the present embodiment further includes a detection device 170. The detecting device 170 is located on the platform body 110 and electrically connected to the processing unit 280. The detecting device 170 is used to check the secondary element 501 or the screw 600 of the polishing head, or whether the secondary element 501 and the screw 600 meet the corresponding applicable standards. More specifically, the detecting device 170 includes a photographing unit 171. The photographing unit 171 is located on the link 141 of the robot arm 140 to be interlocked with the robot arm 140. The photographing unit 171 is electrically connected to the processing unit 280. Thus, when the mechanical arm 140 drives the locking tool 150 to the secondary element 501 of the polishing head, the photographing unit 171 obtains an image of all or part of the secondary element 501 of the polishing head, so the processing unit 280 checks the secondary component by this. Whether all or part of 501 is acceptable to the standard to ensure the overall yield of the grinding head.
更具體地，存儲單元210內更包含多個參考影像240。這些參考影像240分別為不同種類螺孔的參考外觀。如此，當攝影單元171取得螺孔510之擷取影像時，透過實際取得之擷取影像與參考影像240之比對，處理單元280能夠辨識出螺孔510之位置與外觀(例如螺紋狀況)等類似特徵是否合乎堪用標準，或者，至少二者差異介於特定範圍內。此外，處理單元280藉由螺孔510之擷取影像內之形狀與口徑計算出實際螺孔510之口徑大小，進而能夠辨識出螺孔510之種類以及匹配此螺孔510之螺絲600。More specifically, the storage unit 210 further includes a plurality of reference images 240. These reference images 240 are the reference appearances of different types of screw holes, respectively. In this manner, when the photographing unit 171 obtains the captured image of the screw hole 510, the processing unit 280 can recognize the position and appearance of the screw hole 510 (for example, the thread condition) by comparing the actually captured image with the reference image 240. Similar features are metStandards can be used, or at least the difference between the two is within a certain range. In addition, the processing unit 280 calculates the size of the actual screw hole 510 by the shape and the diameter of the screw hole 510, and can recognize the type of the screw hole 510 and the screw 600 that matches the screw hole 510.
此外，檢測裝置170更用以將螺絲600對位至次元件501之螺孔510。具體來說，存儲單元210內包含多個預設座標值250。這些預設座標值250分別代表這些螺孔510之預設座標。如此，當攝影單元171取得螺孔510之擷取影像時，處理單元280將螺孔510之預設座標值250所轉換之影像重疊至螺孔510之擷取影像上。透過比較二者之差異，控制機械手臂140移動微調，進而能夠精準地將鎖附工具150上之螺絲600對位至次元件501之螺孔510。然而，本揭露不以此為限，本揭露所屬技術領域中具有通常知識者，也可視實際需要，改採直接將螺孔510之擷取影像轉換為特定螺孔510之實際位置座標。In addition, the detecting device 170 is further used to align the screw 600 to the screw hole 510 of the secondary member 501. Specifically, the storage unit 210 includes a plurality of preset coordinate values 250. These preset coordinate values 250 represent the preset coordinates of the screw holes 510, respectively. Thus, when the photographing unit 171 obtains the captured image of the screw hole 510, the processing unit 280 superimposes the image converted by the preset coordinate value 250 of the screw hole 510 onto the captured image of the screw hole 510. By comparing the difference between the two, the control robot 140 is moved and fine-tuned, so that the screw 600 on the locking tool 150 can be accurately aligned to the screw hole 510 of the secondary member 501. However, the disclosure is not limited thereto, and the person having ordinary knowledge in the technical field of the disclosure may also directly convert the captured image of the screw hole 510 into the actual position coordinate of the specific screw hole 510 according to actual needs.
再者，檢測裝置170更用以檢查螺絲600是否正確地依附於鎖附工具150之持料端153。更具體地，上述鎖附工具150之鎖附桿152例如為內呈中空狀之鎖附桿152，攝影單元171更進一步地放置於鎖附工具150之鎖附桿152內。透過從鎖附桿152內直接對外窺視螺絲頭620，處理單元280得以檢查螺絲頭620與持料端153之間是否檢測出光線。若攝影單元171無法檢測出光線，則認定螺絲600正確地依附至鎖附工具150之持料端153；反之，若攝影單元171檢測出光線，認定螺絲600並非正確地依附至鎖附工具150之持料端153。Moreover, the detecting device 170 is further used to check whether the screw 600 is properly attached to the holding end 153 of the locking tool 150. More specifically, the locking lever 152 of the above-described locking tool 150 is, for example, a hollow locking lever 152, and the photographing unit 171 is further placed in the locking lever 152 of the locking tool 150. By directly peeking the screw head 620 from the inside of the lock lever 152, the processing unit 280 can check whether light is detected between the screw head 620 and the holding end 153. If the photographing unit 171 cannot detect the light, it is determined that the screw 600 is correctly attached to the holding end 153 of the locking tool 150; conversely, if the photographing unit 171 detects the light, it is determined that the screw 600 is not properly attached to the locking tool 150. Holding end 153.
再者，檢測裝置170更包含光發射元件172。光發射元件172位於平台本體110上，能夠光照所述次元件501之位置。光發射元件172例如位於機械手臂140最末段之連桿141。處理單元280電性連接攝影單元171與光發射元件172。如此，處理單元280能夠控制光發射元件172光照所述次元件501之局部或全部，接著，透過攝影單元171所傳來之擷取影像，處理單元280能夠藉由判斷擷取影像中反光強度之多寡，檢查出所述次元件501之局部之老化(堪用)程度。Furthermore, the detecting device 170 further includes a light emitting element 172. Light hairThe firing element 172 is located on the platform body 110 and is capable of illuminating the position of the secondary component 501. The light emitting element 172 is, for example, located at the last link 141 of the robot arm 140. The processing unit 280 is electrically connected to the photographing unit 171 and the light emitting element 172. In this manner, the processing unit 280 can control the light emitting element 172 to illuminate part or all of the secondary element 501, and then, through the captured image transmitted by the capturing unit 171, the processing unit 280 can determine the intensity of the reflected light in the captured image. The amount of aging (applicable) of the secondary element 501 is checked.
此外，存儲單元210內更包含多個額定光照度260與最低光強標準值270。處理單元280依據所選定之額定光照度260，使光發射元件172光照次元件501之局部(例如墊圈520)。藉由判斷擷取影像中之反光強度與對應之最低光強標準值270是否一致，或者，至少二者差異介於特定範圍內，處理單元280能夠認定所述次元件501之其中一部份(例如依附配件)之堪用狀況。In addition, the storage unit 210 further includes a plurality of rated illuminances 260 and a minimum light intensity standard value 270. Processing unit 280 causes light emitting element 172 to illuminate a portion of secondary element 501 (e.g., gasket 520) in accordance with selected nominal illuminance 260. By determining whether the reflected intensity in the captured image is consistent with the corresponding minimum light intensity standard value 270, or at least the difference between the two is within a certain range, the processing unit 280 can identify one of the secondary elements 501 ( For example, the accessories are available.
然而，本揭露不限必須從擷取影像中判斷反光強度之多寡，意即，檢測裝置170不必只為包含攝影單元171與光發射元件172，其他實施例中，本揭露亦可改為彼此光耦合之光發射元件與光感測單元，透過光感測單元藉此判斷反光強度之多寡。However, the disclosure is not limited to determining the amount of the light reflection intensity from the captured image, that is, the detecting device 170 does not need to include only the photographing unit 171 and the light emitting element 172. In other embodiments, the disclosure may also be changed to each other. The coupled light emitting element and the light sensing unit pass through the light sensing unit to determine the amount of reflective intensity.
舉例來說，次元件500之局部例如為墊圈520時，由於墊圈520大多包含塑膠材質，塑膠材質在長時間下會導致黃化(yellowing)、老化與脆化現象產生，當墊圈520過度之產品壽命即將到期時，意即，塑膠材質會產生嚴重黃化之外觀。故，處理單元280能夠藉由擷取影像中之反光強度與最低光強標準值270之差異，判斷出所述次元件500之墊圈520之老化(堪用)程度。例如，當反光強度小於最低光強標準值270，則認定墊圈520已不堪用。For example, when the part of the secondary component 500 is, for example, the gasket 520, since the gasket 520 mostly contains a plastic material, the plastic material may cause yellowing, aging and embrittlement in a long time, and the product of the gasket 520 is excessive. When the life is about to expire, it means that the plastic material will have a severe yellow appearance. Therefore, the processing unit 280 can capture the reflected intensity and the minimum light intensity in the image.The difference in the standard value 270 determines the degree of aging (applicable) of the gasket 520 of the secondary component 500. For example, when the reflected intensity is less than the minimum light intensity standard value 270, it is determined that the gasket 520 is no longer usable.
須了解到，由於所述次元件500為複合組件，除了次元件500之結構本體之外，其上仍包含數個依附配件(例如螺栓或墊圈)等，這些依附配件之老化(堪用)程度將影響研磨頭的整體良率，進而影響研磨頭的平坦化性能。It should be understood that since the secondary component 500 is a composite component, in addition to the structural body of the secondary component 500, there are still several attachment components (such as bolts or washers), etc., and the degree of aging of the attached components Will affect the overall yield of the polishing head, which in turn affects the flattening performance of the polishing head.
另外，除了由螺孔510辨識鎖匹配之螺絲600種類之方式外，在本實施例之一選項中，當機械手臂140帶動鎖附工具150至供料機130時，攝影單元171也能夠對供料機130內之螺絲600取得擷取影像，以辨識出螺絲600之種類，並且檢查螺絲600外觀(例如螺紋狀況)等類似特徵是否合乎堪用標準。然而，本揭露不限於此，其他實施例中，也可透過其他攝影單元側向地對螺絲600外觀(例如螺紋狀況)取得擷取影像。In addition, in addition to the manner in which the screw hole 510 recognizes the type of the screw 600 matched by the lock, in one of the options of the embodiment, when the robot arm 140 drives the locking tool 150 to the feeder 130, the photographing unit 171 can also provide The screw 600 in the hopper 130 takes the captured image to identify the type of the screw 600 and checks whether the appearance of the screw 600 (e.g., thread condition) and the like is acceptable. However, the disclosure is not limited thereto. In other embodiments, the captured image may be obtained laterally by the other camera unit for the appearance of the screw 600 (eg, the thread condition).
組裝平台系統100更具有一鎖附感測單元154。鎖附感測單元154設置於鎖附工具150上，且連接鎖附桿152，用以感測鎖附工具150實際對螺絲600所施予之扭力與其轉速。例如，在鎖附工具150將螺絲600鎖附於螺孔510內之過程(例如全程)中，鎖附感測單元154得以受到處理單元280之控制，而感測螺絲600在螺孔510上轉動多圈所依序反饋之實測扭矩。The assembly platform system 100 further has a lock sensing unit 154. The lock sensing unit 154 is disposed on the locking tool 150 and is connected with the locking rod 152 for sensing the torque applied by the locking tool 150 to the screw 600 and its rotation speed. For example, in the process (eg, the entire process) in which the locking tool 150 locks the screw 600 into the screw hole 510, the lock sensing unit 154 is controlled by the processing unit 280, and the sensing screw 600 rotates on the screw hole 510. The measured torque is fed back in multiple turns.
處理模組200更包含記錄單元290。記錄單元290電性連接處理單元280，在螺絲600鎖附於次元件501、502上之過程中，記錄上述螺絲600鎖附於次元件501、502所反饋之多個實測數據。實測數據例如為實測扭矩、實測轉速，或者實測扭矩與轉速。舉例來說，當鎖附工具150每次轉動單一螺絲600時，記錄單元290將此螺絲600自第一圈至最後一圈之轉動所依序反饋至鎖附感測單元154之實測扭矩予以記錄，以便處理單元280將每個螺絲600於此轉動歷程之所有實測扭矩製作成一第一圖表(如T表)，意即，每個螺絲600在被鎖附後，處理單元280製出對應此螺絲600之第一圖表(如T表)。The processing module 200 further includes a recording unit 290. The recording unit 290 is electrically connected to the processing unit 280. During the process of the screw 600 being attached to the secondary component 501, 502, the screw 600 is recorded and attached to the secondary component 501, 502 for feedback.Multiple measured data. The measured data is, for example, measured torque, measured rotational speed, or measured torque and rotational speed. For example, when the locking tool 150 rotates the single screw 600 each time, the recording unit 290 sequentially records the measured torque of the screw 600 from the first turn to the last turn to the measured torque of the lock sensing unit 154 for recording. Therefore, the processing unit 280 makes all the measured torques of each screw 600 in this rotation process into a first chart (such as a T-table), that is, after each screw 600 is locked, the processing unit 280 makes corresponding screws. The first chart of 600 (such as the T table).
另外，當鎖附工具150每次完成單一螺絲600之鎖附時，記錄單元290分別記錄每個螺絲600之最終實測扭矩，以便處理單元280最後將這些螺絲600之最終實測扭矩一併製作成一第二圖表(如U表)，意即，所有次元件組裝為研磨頭後，處理單元280製作出一個能夠顯露出研磨頭上多個螺絲600之最終實測扭矩之第二圖表(如U表)。須了解到，處理單元280例如為中央處理單元(CPU)、中央處理單元(CPU)之一部分或單晶片等硬體，處理單元280也可為軟體(包含韌體)或軟/硬體之組合。記錄單元290例如為中央處理單元(CPU)、中央處理單元(CPU)之一部分或單晶片等硬體，記錄單元290也可為軟體(包含韌體)或軟/硬體之組合。In addition, when the locking tool 150 completes the locking of the single screw 600 each time, the recording unit 290 records the final measured torque of each screw 600, respectively, so that the processing unit 280 finally makes the final measured torque of the screws 600 together. The second chart (e.g., U-sheet) means that after all of the secondary components are assembled into the polishing head, the processing unit 280 creates a second chart (e.g., U-table) that reveals the final measured torque of the plurality of screws 600 on the polishing head. It should be understood that the processing unit 280 is, for example, a central processing unit (CPU), a part of a central processing unit (CPU), or a hardware such as a single chip. The processing unit 280 can also be a soft body (including firmware) or a combination of soft/hardware. . The recording unit 290 is, for example, a central processing unit (CPU), a part of a central processing unit (CPU), or a hardware such as a single chip. The recording unit 290 may also be a soft body (including a firmware) or a combination of a soft/hard body.
此外，舉例來說，但本揭露不限於此，記錄單元290更能夠記錄上述偵測單元126之感測結果、負壓感測單元164之實測負壓值、攝影單元171之擷取影像，或/與擷取影像中之反光強度。In addition, for example, the disclosure is not limited thereto, and the recording unit 290 is more capable of recording the sensing result of the detecting unit 126, the measured negative pressure value of the negative pressure sensing unit 164, the captured image of the photographing unit 171, or / and capture the intensity of the reflection in the image.
舉例來說，但本揭露不限於此，記錄單元290電性連接存儲單元210，以便將上述實測數據儲存於存儲單元210內。存儲單元210例如為唯讀記憶體、快閃記憶體、軟碟、硬碟、光碟、隨身碟、磁帶或可由網路存取之資料庫等。然而，本揭露不限必須儲存於同一存儲單元內。For example, the disclosure is not limited thereto, and the recording unit 290 is electrically connected to the storage unit 210 to store the measured data in the storage unit 210.Inside. The storage unit 210 is, for example, a read-only memory, a flash memory, a floppy disk, a hard disk, a compact disk, a flash drive, a magnetic tape, or a database accessible by a network. However, the disclosure is not limited to being stored in the same storage unit.
第5圖繪示依照本揭露一實施例之組裝平台系統300的立體圖。除了第1圖之組裝平台系統100之所有描述外，如第5圖所示，組裝平台系統300更包含一加工櫃體310。加工櫃體310具有門體311與開口312。開口312形成於加工櫃體310之一面。門體311樞設於加工櫃體310上，用以關閉開口312時形成一密閉空間313。加工櫃體310覆蓋平台本體110、機械手臂140與鎖附工具150等元件，且將平台本體110、機械手臂140與鎖附工具150等元件容納於密閉空間313內。故，當門體311關上時，機械手臂140與鎖附工具150才被允許在密閉空間313中進行鎖附工作。為了確保作操作人員之安全為目的，當操作人員將門體311打開之期間，機械手臂140與鎖附工具150被強制性地限制運轉。此外，組裝平台系統300更包含一控制介面320。控制介面320位於加工櫃體310之另面，以供操作人員藉此控制上述螺絲600鎖附工作。控制介面320包含顯示裝置321與輸入裝置322。FIG. 5 is a perspective view of an assembly platform system 300 in accordance with an embodiment of the present disclosure. In addition to all of the description of the assembly platform system 100 of FIG. 1, as shown in FIG. 5, the assembly platform system 300 further includes a processing cabinet 310. The processing cabinet 310 has a door body 311 and an opening 312. The opening 312 is formed on one side of the processing cabinet 310. The door body 311 is pivoted on the processing cabinet 310 to form a sealed space 313 when the opening 312 is closed. The processing cabinet 310 covers the platform body 110, the robot arm 140, and the locking tool 150, and the components such as the platform body 110, the robot arm 140, and the locking tool 150 are housed in the sealed space 313. Therefore, when the door body 311 is closed, the robot arm 140 and the locking tool 150 are allowed to perform the locking work in the sealed space 313. In order to ensure the safety of the operator, the robot arm 140 and the locking tool 150 are forcibly restricted from operating during the opening of the door 311 by the operator. In addition, the assembly platform system 300 further includes a control interface 320. The control interface 320 is located on the other side of the processing cabinet 310 for the operator to control the locking operation of the screw 600 described above. The control interface 320 includes a display device 321 and an input device 322.
第6圖繪示依照本揭露一實施例之組裝平台系統之操作方法的流程圖。如第6圖所示，組裝平台系統之操作方法包含步驟401~步驟403。在步驟401中，將研磨頭之一次元件501疊放於另一次元件502上(請參考第1圖)；在步驟402中，取得一螺絲600及對應此螺絲600之預設鎖附規格220(請參考第2圖)；在步驟403中，遵照此預設鎖附規格220，將螺絲600鎖附至相疊放之次元件501、502上，以固定次元件501、502(請參考第1圖)，同步驟中，在將螺絲600鎖附至次元件501、502之過程中，記錄螺絲600在鎖附時實際所反饋之多個實測數據。實測數據例如為實際扭矩與圈數等等。然而，須了解到，步驟403不限於記錄螺絲所有或部分之實測數據，且不限於同步或延遲記錄實測數據。FIG. 6 is a flow chart showing a method of operating an assembly platform system in accordance with an embodiment of the present disclosure. As shown in FIG. 6, the operation method of the assembly platform system includes steps 401 to 403. In step 401, the primary component 501 of the polishing head is stacked on the other component 502 (refer to FIG. 1); in step 402, a screw 600 and a preset locking specification 220 corresponding to the screw 600 are obtained ( Please refer to FIG. 2); in step 403, according to the preset lock specification 220, the screwThe wire 600 is attached to the sub-assembled secondary elements 501, 502 to secure the secondary elements 501, 502 (refer to Figure 1), in the same step, during the process of locking the screws 600 to the secondary elements 501, 502 And recording a plurality of measured data actually fed back by the screw 600 when the lock is attached. The measured data is, for example, actual torque and number of turns, and the like. However, it should be understood that step 403 is not limited to recording all or part of the measured data of the screw, and is not limited to synchronous or delayed recording of the measured data.
如此，由於本實施例之操作方法能夠記錄螺絲實際在鎖附時所施加之實測數據，以便為人工智慧構建大數據和機器學習。舉例來說，透過收集個別螺絲於轉動歷程之所有實測數據(例如實際扭矩)以製作出第一圖表(如T表)，或者透過收集所有螺絲之最終實際扭矩以製作出第二圖表(如U表)。如此，操作人員能夠檢視、分析與改良對應每個螺絲之預設鎖附規格，進而提高組裝平台系統之操作性能以及降低研磨頭之故障率。Thus, since the operation method of the embodiment can record the measured data actually applied by the screw when it is locked, it is necessary to construct big data and machine learning for artificial intelligence. For example, by collecting all the measured data (such as actual torque) of individual screws in the rotation process to make a first chart (such as T table), or by collecting the final actual torque of all screws to make a second chart (such as U table). In this way, the operator can view, analyze, and improve the preset lock specifications for each screw, thereby improving the operational performance of the assembly platform system and reducing the failure rate of the polishing head.
第7圖繪示第6圖之步驟402的細部流程圖。如第4圖與第7圖所示，步驟402還包含一種細部實施方式，細部實施方式包含步驟4021~步驟4024。在步驟4021中，透過一真空吸力將螺絲600吸附至鎖附工具150上(請參考第4圖)，且真空吸力遵照一額定負壓值230(第2圖)。在步驟4022中，判斷螺絲600是否正確地依附至鎖附工具150上；若是，進行步驟4023；反之，進行步驟4024。在步驟4023中，記錄此真空吸力之實測負壓值。在步驟4024中，將螺絲600放回供料機130之轉盤131上(請參考第3A圖)，並且調整真空吸附裝置160之真空吸力之額定負壓值230(第2圖)，接著，回步驟4021。須了解到，放回螺絲600與調整額定負壓值230不限於同步進行。FIG. 7 is a detailed flow chart of step 402 of FIG. 6. As shown in FIGS. 4 and 7, step 402 further includes a detailed embodiment, and the detailed embodiment includes steps 4021 to 4024. In step 4021, the screw 600 is attracted to the locking tool 150 by a vacuum suction (refer to Fig. 4), and the vacuum suction is in accordance with a rated negative pressure value 230 (Fig. 2). In step 4022, it is determined whether the screw 600 is properly attached to the locking tool 150; if so, proceed to step 4023; otherwise, proceed to step 4024. In step 4023, the measured negative pressure value of the vacuum suction is recorded. In step 4024, the screw 600 is placed back on the turntable 131 of the feeder 130 (please refer to FIG. 3A), and the vacuum negative pressure of the vacuum suction device 160 is adjusted to a nominal negative pressure value 230 (Fig. 2), and then, back. Step 4021. mustIt is understood that the reversing of the screw 600 and the adjustment of the nominal negative pressure value 230 are not limited to being performed simultaneously.
舉例來說，在步驟4021中更包含如下步驟，請參考第1、2圖所示，處理單元280辨識螺絲600種類，並從存儲單元210中取得匹配此種螺絲600之額定負壓值230；接著，處理單元280驅動真空吸附裝置160產生匹配上述額定負壓值230之真空吸力，以便真空吸力將螺絲600吸附至鎖附工具150上，進而提高螺絲600正確地依附於鎖附工具150之持料端153的成功率(第4圖)。然而，本揭露不以此為限，本揭露所屬技術領域中具有通常知識者，也可視實際需要，將步驟4021改為以統一預設值吸附螺絲600，而免除辨識螺絲且取得匹配之額定負壓值之手段。For example, in step 4021, the following steps are further included. Referring to FIGS. 1 and 2, the processing unit 280 identifies the type of the screw 600, and obtains a rated negative pressure value 230 matching the screw 600 from the storage unit 210; Next, the processing unit 280 drives the vacuum adsorption device 160 to generate a vacuum suction force matching the rated negative pressure value 230, so that the vacuum suction absorbs the screw 600 onto the locking tool 150, thereby improving the correct attachment of the screw 600 to the locking tool 150. The success rate of the material end 153 (Fig. 4). However, the disclosure is not limited thereto, and those having ordinary knowledge in the technical field of the present disclosure may also change step 4021 to a uniform preset value adsorption screw 600 according to actual needs, thereby eliminating the identification screw and obtaining a matching rated negative. The means of pressure.
舉例來說，在步驟4022中，如第1圖所示，透過檢測裝置170之攝影單元171檢查螺絲600之螺絲頭620與持料端153之間的光線，以判斷螺絲600是否正確地依附至鎖附工具150上。然而，本揭露不以此判斷方式為限。For example, in step 4022, as shown in FIG. 1, the photographing unit 171 of the detecting device 170 checks the light between the screw head 620 of the screw 600 and the holding end 153 to determine whether the screw 600 is properly attached to the screw unit 600. Attached to the tool 150. However, this disclosure is not limited to this judgment.
舉例來說，在步驟4023中，如第2圖所示，記錄單元290將負壓感測單元164所感測到之實測負壓值記錄至存儲單元210。須了解到，其他實施例中，步驟4023中實測負壓值之記錄也不限必須進行於步驟4022後。For example, in step 4023, as shown in FIG. 2, the recording unit 290 records the measured negative pressure value sensed by the negative pressure sensing unit 164 to the storage unit 210. It should be understood that, in other embodiments, the record of the measured negative pressure value in step 4023 is not limited to be performed after step 4022.
此外，舉例來說，在上述步驟4021中，在處理單元280辨識出螺絲600種類之後，處理單元280更從存儲單元210中取得匹配此種螺絲600之預設鎖附規格220。然而，本揭露不限於此。In addition, for example, in the above step 4021, after the processing unit 280 recognizes the type of the screw 600, the processing unit 280 further obtains the preset locking specification 220 matching the screw 600 from the storage unit 210. However, the disclosure is not limited thereto.
在上述步驟402之一選項中，當處理單元280辨識出螺絲600種類，處理單元280更比對螺絲600之擷取影像與存儲單元內之一預設標準(圖中未示)，以判斷此擷取影像是否符合對應之預設標準。如此，當檢查出螺絲600外觀(例如螺紋狀況)等類似特徵合乎堪用標準時，進行步驟403；反之，停止繼續將螺絲600鎖附至次元件801、802上，回到步驟4021重新取得另外螺絲。In one of the above steps 402, when the processing unit 280 recognizesThe type of the screw 600 is used, and the processing unit 280 compares the preset standard (not shown) of the image and the storage unit with respect to the screw 600 to determine whether the captured image meets the corresponding preset standard. Thus, when it is checked that the appearance of the screw 600 (such as the thread condition) and the like are in compliance with the standard, proceed to step 403; otherwise, stop continuing to lock the screw 600 to the secondary components 801, 802, and return to step 4021 to re-take additional screws. .
此外，在步驟401與步驟402之間，操作方法更包含檢查研磨頭之次元件501是否符合一堪用標準的步驟。此步驟包含檢查研磨頭之次元件501之螺孔510或墊圈520是否合乎堪用標準，以確保研磨頭的整體良率，進而避免降低研磨頭的平坦化性能。In addition, between step 401 and step 402, the method of operation further includes the step of checking whether the secondary component 501 of the polishing head conforms to a standard. This step involves checking whether the screw holes 510 or washers 520 of the secondary component 501 of the polishing head are compliant to ensure the overall yield of the polishing head, thereby avoiding the flattening performance of the polishing head.
更具體地，第8圖繪示第6圖之步驟401與步驟402之間於一實施例中的細部流程圖。如第1圖與第8圖所示，檢查研磨頭之次元件501是否符合堪用標準之步驟還包含一種細部實施方式，其步驟4011~步驟4014之順序如下。在步驟4011中，對次元件501之螺孔510取得擷取影像；在步驟4012中，藉由比對螺孔510之擷取影像與一預設標準，判斷螺孔510是否堪用，例如判斷螺孔510之外觀(例如螺紋狀況)是否符合所述預設標準；若是，進行步驟4013，否則進行步驟4014。在步驟4013中，由於螺孔510之外觀(例如螺紋狀況)符合所述預設標準，則認定次元件501之螺孔510仍是堪用，便可繼續依據螺孔510之種類，取得匹配此螺孔510之螺絲600。在步驟4014中，由於螺孔510之外觀(例如螺紋狀況)不符合所述預設標準，則認定次元件501之螺孔510已不堪用，暫停進行將螺絲600鎖附至次元件501、502之步驟。須了解到，由於次元件501在步驟401中尚未透過任何螺絲600鎖附於另一次元件502上，故，步驟4014後亦可選擇移除具有螺孔510之次元件501。More specifically, FIG. 8 is a detailed flow chart of an embodiment between step 401 and step 402 of FIG. 6. As shown in Figures 1 and 8, the step of inspecting whether the secondary component 501 of the polishing head conforms to the applicable standard further includes a detailed embodiment, and the sequence of steps 4011 to 4014 is as follows. In step 4011, the captured image is obtained for the screw hole 510 of the secondary component 501. In step 4012, by comparing the captured image of the screw hole 510 with a predetermined standard, it is determined whether the screw hole 510 is applicable, for example, determining the snail. Whether the appearance of the aperture 510 (e.g., thread condition) meets the predetermined criteria; if so, proceed to step 4013, otherwise proceed to step 4014. In step 4013, since the appearance of the screw hole 510 (for example, the thread condition) conforms to the preset standard, it is determined that the screw hole 510 of the secondary element 501 is still available, and the matching can be continued according to the type of the screw hole 510. Screw 600 of screw hole 510. In step 4014, since the appearance of the screw hole 510 (for example, the thread condition) does not meet the preset standard, it is determined that the screw hole 510 of the secondary element 501 is unbearable.To suspend the step of locking the screw 600 to the secondary elements 501, 502. It should be understood that since the secondary component 501 has not been attached to the other component 502 through any of the screws 600 in step 401, the secondary component 501 having the screw hole 510 may also be selectively removed after the step 4014.
第9圖繪示第6圖之步驟401與步驟402之間於另一實施例中的細部流程圖。如第1圖與第9圖所示，檢查研磨頭之次元件501是否符合堪用標準之步驟還包含另一種細部實施方式，其步驟4011’至步驟4014’之順序如下。在步驟4011’中，光照次元件501之一部份。在步驟4012’中，判斷來自次元件501之那部份之反光強度是否小於最低光強標準值270，若是，進行步驟4013’，否則，進行步驟4014’。在步驟4013’中，當來自次元件501之那部份之反光強度不小上述最低光強標準值270，則認定次元件501之那部份仍是堪用，便可繼續依據螺孔510之種類，取得匹配此螺孔510之螺絲600。在步驟4014’中，由於來自次元件501之那部份之反光強度小於上述最低光強標準值270，則認定次元件501之那部份已是老化(不堪用)，並停止進行將鎖附螺絲600之步驟。步驟4014’後亦可選擇移除次元件501。須了解到，由於次元件501在步驟401中尚未透過任何螺絲600鎖附於另一次元件502上，故，可直接將部份老化之次元件501移除。FIG. 9 is a detailed flow chart of another embodiment between step 401 and step 402 of FIG. 6. As shown in Figs. 1 and 9, the step of inspecting whether the secondary element 501 of the polishing head conforms to the applicable standard further includes another detailed embodiment, and the order of steps 4011' to 4014' is as follows. In step 4011', a portion of the secondary element 501 is illuminated. In step 4012', it is determined whether the reflected intensity from the portion of the secondary element 501 is less than the minimum light intensity standard value 270, and if so, step 4013' is performed, otherwise, step 4014' is performed. In step 4013', when the reflection intensity of the portion from the secondary element 501 is not smaller than the minimum light intensity standard value 270, it is determined that the portion of the secondary element 501 is still usable, and can continue to be based on the screw hole 510. For the type, a screw 600 matching the screw hole 510 is obtained. In step 4014', since the reflected intensity from the portion of the secondary element 501 is less than the minimum light intensity standard value 270, it is determined that the portion of the secondary element 501 is aging (unusable) and stops being locked. The steps of the screw 600. Sub-element 501 may also be selected after step 4014'. It should be understood that since the secondary component 501 has not been attached to the other component 502 through any of the screws 600 in step 401, the partially aged secondary component 501 can be directly removed.
在步驟403之後，本實施例更包含步驟如下。取得其中一實測數據與預設鎖附規格220之差異；接著，依據所述差異，調整對應螺絲600之預設鎖附規格220。舉例來說，當鎖附工具150對螺絲600施以之扭矩尚未到達預設鎖附規格220之預設扭矩，便無法繼續轉動時，處理單元280依據實測數據與預設鎖附規格220之扭矩的差異，調整對應螺絲600之轉速或圈數，以便更精準地調控預設鎖附規格220。After step 403, the embodiment further includes the following steps. The difference between one of the measured data and the preset lock specification 220 is obtained; then, according to the difference, the preset lock specification 220 of the corresponding screw 600 is adjusted. For example, when the torque applied by the locking tool 150 to the screw 600 has not reached the preset locking specificationWhen the preset torque of 220 is unable to continue to rotate, the processing unit 280 adjusts the rotation speed or the number of turns of the corresponding screw 600 according to the difference between the measured data and the torque of the preset locking specification 220, so as to more precisely adjust the preset locking specification. 220.
第10圖繪示依照本揭露一實施例之組裝平台系統之操作方法的流程圖。如第1圖與第10圖所示，這種組裝平台系統之操作方法包含步驟411~步驟416。在步驟411中，將研磨頭之一次元件501疊放於另一次元件502上；在步驟412中，取得一螺絲600及對應此螺絲600之預設鎖附規格；在步驟413中，遵照此預設鎖附規格，將螺絲600鎖附至相疊放之次元件501、502上，並且記錄此螺絲600被鎖附於次元件501、502之最終實測扭矩；在步驟414中，取得另一螺絲600及對應此另一螺絲600之另一預設鎖附規格；在步驟415中，遵照此另一預設鎖附規格，將另一螺絲600鎖附至相疊放之次元件501、502上，並且記錄此另一螺絲600被鎖附於次元件501、502之另一最終實測扭矩；在步驟416中，將所述最終實測扭矩以及另一最終實測扭矩一併製作成第二圖表(如U表)。然而，本揭露不限於僅製作第二圖表(如U表)，在其他實施例中，這些最終實測扭矩也可以其他方式幫助螺絲鎖附之檢視、分析與改良。FIG. 10 is a flow chart showing a method of operating an assembly platform system in accordance with an embodiment of the present disclosure. As shown in FIGS. 1 and 10, the method of operating the assembly platform system includes steps 411 to 416. In step 411, the primary element 501 of the polishing head is stacked on the other element 502; in step 412, a screw 600 and a preset locking specification corresponding to the screw 600 are obtained; in step 413, the pre-compliance is followed. With the lock specification, the screw 600 is attached to the sub-assembled sub-components 501, 502, and the final measured torque of the screw 600 is locked to the secondary component 501, 502; in step 414, another screw is obtained. 600 and another preset locking specification corresponding to the other screw 600; in step 415, another screw 600 is attached to the stacked secondary components 501, 502 according to the other preset locking specification. And recording another final measured torque that the other screw 600 is locked to the secondary component 501, 502; in step 416, the final measured torque and the other final measured torque are combined into a second chart (eg, U table). However, the present disclosure is not limited to making only a second chart (such as a U-table). In other embodiments, these final measured torques may also aid in the inspection, analysis, and improvement of the screw-locking.
前述內容概述若干實施例之特徵以使得一般技術者可較佳地理解本揭露之態樣。一般技術者應理解，其可容易地使用本揭露作為設計或修改其他製程及結構之基礎用於進行本文中所介紹之實施例之相同的目的及/或達成相同的優點。一般技術者亦應意識到，此等等效構建不偏離本揭露之精神及範疇，且其可在本文中進行各種變化、替代及修飾而不偏離本揭露之精神及範疇。The foregoing summary is a summary of the features of the embodiments of the invention It will be appreciated by those skilled in the art that the present disclosure may be used as a basis for designing or modifying other processes and structures for the same purpose of the embodiments described herein and/or to achieve the same advantages. The average technician should also be aware that such equivalent construction does not deviate from the essence of the disclosure.The spirit and scope of the present disclosure are intended to be varied and substituted and modified without departing from the spirit and scope of the disclosure.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106108597ATWI633964B (en) | 2017-03-15 | 2017-03-15 | Assembly platform system and its operation method |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106108597ATWI633964B (en) | 2017-03-15 | 2017-03-15 | Assembly platform system and its operation method |
| Publication Number | Publication Date |
|---|---|
| TWI633964Btrue TWI633964B (en) | 2018-09-01 |
| TW201834780A TW201834780A (en) | 2018-10-01 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106108597ATWI633964B (en) | 2017-03-15 | 2017-03-15 | Assembly platform system and its operation method |
| Country | Link |
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| TW (1) | TWI633964B (en) |
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| CN112986880A (en)* | 2019-12-17 | 2021-06-18 | 芯恩（青岛）集成电路有限公司 | Probe station fault detection method and system, probe station and use method thereof |
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| CN203900853U (en)* | 2014-05-30 | 2014-10-29 | 台达电子电源(东莞)有限公司 | Automatic screw locking machine and screw locking module thereof |
| CN104259840A (en)* | 2014-09-04 | 2015-01-07 | 昆山富新立伟自动化科技有限公司 | Automatic screw locking machine |
| CN204935053U (en)* | 2015-08-07 | 2016-01-06 | 武汉理工大学 | Machine paid by screw automatic locking |
| CN205817250U (en)* | 2016-06-29 | 2016-12-21 | 青岛科莱尔机器人科技有限公司 | A kind of high efficiency smart lock screws appts |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN202963898U (en)* | 2012-09-06 | 2013-06-05 | 福州超宏自动化设备有限公司 | Locking machine for automobile lamp reflective mirror |
| CN203900853U (en)* | 2014-05-30 | 2014-10-29 | 台达电子电源(东莞)有限公司 | Automatic screw locking machine and screw locking module thereof |
| CN104259840A (en)* | 2014-09-04 | 2015-01-07 | 昆山富新立伟自动化科技有限公司 | Automatic screw locking machine |
| CN204935053U (en)* | 2015-08-07 | 2016-01-06 | 武汉理工大学 | Machine paid by screw automatic locking |
| CN205817250U (en)* | 2016-06-29 | 2016-12-21 | 青岛科莱尔机器人科技有限公司 | A kind of high efficiency smart lock screws appts |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112986880A (en)* | 2019-12-17 | 2021-06-18 | 芯恩（青岛）集成电路有限公司 | Probe station fault detection method and system, probe station and use method thereof |
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| TW201834780A (en) | 2018-10-01 |
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