本發明係一種觸覺感測裝置，其係利用一感知層與一壓力感測單元之組合，以構成有效之觸覺感測裝置。The present invention is a tactile sensing device that utilizes a combination of a sensing layer and a pressure sensing unit to form an effective tactile sensing device.
隨著時代的變遷與科技發展迅速，各種感測器已經朝輕薄短小與大量生產方向前進，「微機電系統(Micro-electro-mechanical system,MEMS)」技術毫無疑問的成為製作微小型感測器之關鍵，利用這種加工方式將元件微小化將帶來許多製程的優勢與元件的優點。在製程優勢方面，更能快速且大量生產，使得元件製作成本大幅降低；在元件優點方面，輕巧、高響應度、低功率消耗與高精確度等特點，可提升元件性能且增加其價值性。除此之外，微機電系統可整合於各種不同領域，如：機電整合技術、生醫科技等。在眾多優點中，降低生產成本與提升元件的價值性是產業界所追求的目標，因此其相關產品也已經量產並且在市面上販售，正可謂未來的明星產業技術。With the changes of the times and the rapid development of science and technology, various sensors have been moving toward light, short, and mass production. "Micro-electro-mechanical system (MEMS) technology has undoubtedly become a micro-small sensor. The key to this, the use of this processing method to miniaturize components will bring many advantages of the process and the advantages of components. In terms of process advantages, it can be more quickly and mass-produced, which makes the component manufacturing cost greatly reduced. In terms of component advantages, light weight, high responsivity, low power consumption and high precision can improve component performance and increase its value. In addition, MEMS can be integrated in a variety of different areas, such as: electromechanical integration technology, biomedical technology. Among the many advantages, reducing production costs and increasing the value of components is the goal pursued by the industry. Therefore, related products have also been mass-produced and sold in the market, which is a star industry technology in the future.
長久以來，人們利用各種原理發明各式各樣的感測元件，而感測元件提供給我們一些訊息，如物理以及電化學訊號，讓人類器官的感受不再只是主觀上的感覺，建立起人們與外界環境變化客觀感受的橋樑。將微機電技術引入微感測器之製作及應用發展是主要的課題之一，在日常生活中我們不難發現感測器的存在，例如：汽車工業上，因為車況與乘客生命息息相關，因此有越來越多的加速感應器(Acceleration sensors)配置在汽車裡，其目的就是在汽車發生碰撞或出現意外狀況時，能感測出各種必要的資訊，並提供系統做必要的判斷與反應。現階段在高階汽車裡就配有不少這類感測器，例如：加速度計(Accelerometers)就有六個之多，而且數量仍不斷增加中。除此之外，微感測器也應用在資訊、電腦、生醫、保健、製造、運輸、航空、工安與智慧型機器人等產業應用，無論在學術研究上或是工程及環境應用面上都有其不可或缺的重要性。而源於半導體製程概念的微機電系統技術從開始發展以來皆是以矽為基材做為加工材料，所有感測元件及微結構皆是以矽基為前提下以特殊蝕刻方式或出平面製程所製作。但是基於矽本身材料特性的限制以及材料成本的考慮，近年來以高分子材料(Polymer material)作為感測元件之結構與基材之應用漸漸開始成熟。與矽基材相較之下高分子材料具有以下幾個獨特的優點：第一、材料價格便宜；第二、可應用於許多微小化製程，如：微機電製程、熱壓印(Hot-embossing)、射出成型(Injection molding)，並可利用滾筒製程(Roll to roll)大量生產；第三、某些高分子材料也提供良好的物理及化學特性，如：重量輕、韌性佳、絕緣性良好以及耐酸鹼溶液侵蝕等，又高分子材料之生物相容性佳，因此也常被應用於生物微機電領域(Bio-MEMS)。For a long time, people have used various principles to invent all kinds of sensing components, and the sensing components provide us with some information, such as physical and electrochemical signals, so that the feeling of human organs is no longer just a subjective feeling, and people are built up. A bridge with an objective perception of changes in the external environment. The introduction of micro-electromechanical technology into the production and application of micro-sensors is one of the main topics. In daily life, we can easily find the existence of sensors. For example, in the automotive industry, because the condition of the car is closely related to the life of passengers, More and more Acceleration sensors are deployed inIn a car, the purpose is to sense all kinds of necessary information when the car collides or an unexpected situation, and provide the system to make the necessary judgments and reactions. At this stage, there are many such sensors in high-end cars. For example, there are as many as six accelerometers, and the number is still increasing. In addition, micro-sensors are also used in industrial applications such as information, computers, biomedical, health care, manufacturing, transportation, aviation, industrial safety and intelligent robots, both in academic research and in engineering and environmental applications. It has its indispensable importance. Since the beginning of the development of MEMS technology, the MEMS technology has been based on ruthenium as the processing material. All sensing components and microstructures are based on the ruthenium base with special etching or planar processing. Made. However, in recent years, based on the limitations of the material properties of tantalum itself and the consideration of material cost, in recent years, the application of a polymer material as a sensing element structure and a substrate has gradually matured. Compared with the enamel substrate, the polymer material has the following unique advantages: first, the material is cheap; second, it can be applied to many miniaturization processes, such as: micro-electromechanical process, hot embossing (Hot-embossing) ), injection molding, and can be mass-produced by roll to roll; third, some polymer materials also provide good physical and chemical properties, such as: light weight, good toughness, good insulation And the acid-base solution erosion, etc., and the high biocompatibility of polymer materials, it is also often used in the field of bio-MEMS.
當高分子材料製作成薄膜形式時，除了上述所介紹的優點外，還有一個特點就是可撓性(Flexible)，而且以可撓式為前提下的各項元件也正在迅速地發展當中，以發展最成熟的軟性印刷電路板(Flexible printed circuit,FPC或稱Flexible material interconnect constructions,FMIC)為例，因為掀蓋式手機與薄型顯示器的發明，讓軟性印刷電路板的存在是必要的，主要的因素在於TFT-LCD擁有高密度的金屬線路需要與控制IC做連接，而傳統的印刷電路板在整個控制系統的組裝上會有困難，因此利用軟性電路板做為連接元件。此外，目前最熱門的薄型顯示器也正朝著可撓式方向發展。由於顯示器尺寸越做越大，因為玻璃易脆的特性導致以往的玻璃基板在製程上的難度大幅提高，需要經費在機台設備做提升，且為了增加產品的設計自由度以及降低材料成本，故以塑膠基板製作可撓式顯示器成為各顯示器大廠及相關研究人員競相研究的目標。可撓式元件除了在印刷電路板與薄型顯示器的應用外，許多研究也朝著可撓式微型感測器上發展。近年來可撓式元件與高分子薄膜基材大量應用於感測器，此類之可撓式元件給予元件本身多變及新穎的應用，並且大幅增加產品的設計自由度；又利用微機電技術製作可撓式微型感測器，對於感測元件帶來低功率消耗、高響應度、高精確度以及批量生產，降低元件成本與可陣列化的特性更可使單一量測元件經由規則或不規則排列後利用複雜的控制系統互相配合，製作單位時間內可連續感測相同物理量於相對感應位置之感測元件，如：可撓式溫度感測器陣列與觸覺感測器。When the polymer material is formed into a thin film form, in addition to the advantages described above, there is also a feature that is flexible, and various components under the premise of being flexible are rapidly developing. The development of the most mature flexible printed circuit board (FPC or Flexible Material Interconnects, FMIC), for example, because of the invention of the clamshell mobile phone and the thin display, the existence of a flexible printed circuit board is necessary, the main The factor is that TFT-LCD has a high-density metal line that needs to be connected to the control IC.However, the conventional printed circuit board has difficulty in assembling the entire control system, so the flexible circuit board is used as the connecting component. In addition, the most popular thin display is currently moving in a flexible direction. As the size of the display is getting larger and larger, the fragile nature of the glass causes the difficulty of the conventional glass substrate to be greatly improved in the process, and the cost is required to be upgraded in the machine equipment, and in order to increase the design freedom of the product and reduce the material cost, The manufacture of flexible displays with plastic substrates has become the goal of research by various display manufacturers and related researchers. In addition to the use of flexible components in printed circuit boards and thin displays, many studies have also evolved toward flexible miniature sensors. In recent years, flexible components and polymer film substrates have been widely used in sensors. Such flexible components give the components their own varied and novel applications, and greatly increase the design freedom of products; Producing flexible micro-sensors that provide low power consumption, high responsivity, high accuracy, and mass production for sensing components, reducing component cost and arrayable features, allowing a single measurement component to pass regular or not After the rules are arranged, the complex control system is used to cooperate with each other to produce sensing elements that can continuously sense the same physical quantity in a relative sensing position, such as a flexible temperature sensor array and a tactile sensor.
「觸覺感測器(Tactile sensor)」是一種仿造人體皮膚觸覺的感測元件或系統，藉由數個感測單元在同平面或非同平面的排列，可感測出與不規則物體接觸後所造成的非均勻力的分布。這個名詞最早由學者Pennywitt於1986年定義為可變接觸力的連續感測，可感測出物體是否與其表面接觸並且測量出接觸力大小，接著於1999年Lee和Nicholls將觸覺感測定義為「一個元件或系統，藉由感測器與物體兩者間的物理接觸且量測、提供物體與接觸情況的特性」；觸覺感測器(Tactile sensor)有別於一般的壓力感測器(Pressure sensor)最顯著的部份在於應用面，壓力感測器通常使用單一感測元件進行測量，且在固定的量測範圍內去偵測出其壓力值或接觸力大小，所量測範圍之壓力值是固定的，譬如一般我們常見的真空系統的壓力值皆是由壓力感測器所量測出，感測器在固定範圍的真空腔體(Chamber)內進行真空壓力的測試，且腔體內的壓力值是固定的，不會因為位置的不同造成壓力感測有明顯的不同；而觸覺感測器主要應用於生醫及機器人領域，藉由與被量測物體的接觸可獲得一些訊息，如：接觸力大小、量測物體的形狀等。"Tactile sensor" is a sensing element or system that mimics the tactile sense of human skin. It can sense the contact with irregular objects by the arrangement of several sensing units in the same plane or non-same plane. The resulting distribution of non-uniform forces. The term was first defined by scholar Pennywitt in 1986 as continuous sensing of variable contact force, which senses whether an object is in contact with its surface and measures the amount of contact. Then in 1999 Lee and Nicholls defined tactile sensing as " a component or system, by the physical contact between the sensor and the objectMeasuring, providing the characteristics of objects and contact conditions; Tactile sensor is different from the general pressure sensor (Pressure sensor) is the most significant part of the application surface, pressure sensors usually use a single sensor The component is measured and its pressure value or contact force is detected within a fixed measurement range. The pressure value of the measured range is fixed. For example, the pressure value of our common vacuum system is sensed by pressure. The measured by the measuring device, the sensor performs vacuum pressure test in a fixed range of vacuum chamber, and the pressure value in the cavity is fixed, and the pressure sensing is not obvious due to the difference in position. The tactile sensors are mainly used in the fields of biomedicine and robotics. By contacting the object to be measured, some information can be obtained, such as the contact force and the shape of the object.
以紙為基材的微流體裝置提供了一種新的低成本和拋棄式的診斷平台，此優點促使近來許多以紙為基材的微型裝置之其他應用面的快速發展。本發明提供了一結構簡單之以紙為基材的觸覺感測裝置100。與依靠紙張的毛細作用或只是一個以矽為基材的裝置結構傳輸不同，本案之裝置係採用接觸電阻變化的機制而施行，其係利用紙的獨特性質-表面的不規則性和可壓縮性而達成。導電高分子經由噴墨打印方式噴印在紙上。此觸覺感測裝置100具有易加工、低成本和高可撓性，符合工業界快速製程與低價化的需求。Paper-based microfluidic devices offer a new low-cost and disposable diagnostic platform that has led to the rapid development of other applications for many paper-based microdevices. The present invention provides a paper-based tactile sensing device 100 having a simple structure. Unlike the wicking effect of paper or the transmission of a device structure based on ruthenium, the device of the present invention is implemented by a mechanism of contact resistance change, which utilizes the unique properties of paper - surface irregularities and compressibility. And reached. The conductive polymer is printed on paper by inkjet printing. The haptic sensing device 100 has the advantages of easy processing, low cost, and high flexibility, and meets the requirements of rapid manufacturing process and low cost in the industry.
如圖1A所示，一種可撓式觸覺感測裝置，其包含：一感知層110，其包含一可撓式基材111與一位於該可撓式基材下方之纖維式基材112，其中該可撓式基材111與該纖維式基材112表面上係塗佈含有導電高分子與溶劑之混合溶液，該纖維式基材112之兩側各設置有一塗佈其上之電極113，且該感知層110因其上所受外部壓力之不同而改變其等效電阻；及一壓力感測單元120，其包含一測量儀122與連接至其處之兩條電線121，其中該測量儀122以該兩條電線121分別電氣連接至該纖維式基材112上之各該電極113，其中該可撓式基材111與該纖維式基材112係以導電高分子面相疊合而形成該感知層110。As shown in FIG. 1A, a flexible tactile sensing device includes: a sensing layer 110 comprising a flexible substrate 111 and a fibrous substrate 112 under the flexible substrate, wherein The flexible substrate 111 and the surface of the fibrous substrate 112 are coated with a mixed solution containing a conductive polymer and a solvent, and the fiber substrate 112 is provided with an electrode 113 coated thereon, and The sensing layer 110 changes its equivalent resistance due to the external pressure applied thereto; and a pressure sensing unit 120 includes a measuring instrument 122 and two wires 121 connected thereto.The measuring device 122 is electrically connected to each of the electrodes 113 on the fiber substrate 112 by the two wires 121, wherein the flexible substrate 111 and the fiber substrate 112 are stacked with a conductive polymer surface. The sensing layer 110 is formed in combination.
依據本發明之可撓式觸覺感測裝置100，其中該導電高分子係可用於纖維之導電性高分子材料，於較佳具體實施例中，該導電高分子係聚3,4-乙烯基二氧噻吩與聚苯乙烯磺酸之共聚物(PEDOT：PSS)、聚咇咯(PPy)或聚苯胺(PANI)。而該溶劑係乙二醇(Ethylene glycol)或二甲基亞碸(DMSO)等以調整該混合溶液之導電度或黏滯性。According to the flexible tactile sensing device 100 of the present invention, the conductive polymer can be used for a conductive polymer material of fibers. In a preferred embodiment, the conductive polymer is poly(3,4-vinyl). Copolymer of oxythiophene with polystyrenesulfonic acid (PEDOT: PSS), polypyrrole (PPy) or polyaniline (PANI). The solvent is ethylene glycol (Ethylene glycol) or dimethyl hydrazine (DMSO) or the like to adjust the conductivity or viscosity of the mixed solution.
依據本發明之可撓式觸覺感測裝置100，其係利用噴墨打印方式將該導電高分子與該溶劑之混合溶液噴印至該纖維式基材112表面上。The flexible tactile sensing device 100 according to the present invention prints a mixed solution of the conductive polymer and the solvent onto the surface of the fibrous substrate 112 by an inkjet printing method.
依據本發明之可撓式觸覺感測裝置100，在較佳實施例中該可撓式基材111選自由聚對苯二甲酸二乙酯(PET)、紙、海綿以及織物所組成之群組；而該纖維式基材112係紙。In accordance with a flexible tactile sensing device 100 of the present invention, in a preferred embodiment the flexible substrate 111 is selected from the group consisting of polyethylene terephthalate (PET), paper, sponge, and fabric. And the fibrous substrate 112 is paper.
依據本發明之可撓式觸覺感測裝置100，其係利用該纖維式基材112之粗糙表面與纖維可壓縮性，加壓後該可撓式基材111與該纖維式基材112因壓縮而降低其間導電高分子之電阻而達到觸覺感測之功能。The flexible tactile sensing device 100 according to the present invention utilizes the rough surface of the fibrous substrate 112 and the compressibility of the fiber. After the pressurization, the flexible substrate 111 and the fibrous substrate 112 are compressed. The function of the tactile sensing is reduced by reducing the resistance of the conductive polymer therebetween.
依據本發明之可撓式觸覺感測裝置100，在較佳實施例中該纖維式基材112之粗糙度介於3奈米(nm)-1000奈米之間；在更佳之實施例中，該纖維式基材之粗糙度介於10奈米-800奈米之間；在最佳之實施例中，該纖維式基材之粗糙度介於100奈米-600奈米之間。In accordance with the flexible tactile sensing device 100 of the present invention, in a preferred embodiment, the fibrous substrate 112 has a roughness of between 3 nanometers (nm) and 1000 nanometers; in a more preferred embodiment, The fibrous substrate has a roughness of between 10 nm and 800 nm; in a preferred embodiment, the fibrous substrate has a roughness of between 100 nm and 600 nm.
依據本發明之可撓式觸覺感測裝置100，在較佳實施例中其用於外科器具、醫用機器人、機械手臂或處理易碎物之輸送帶。The flexible tactile sensing device 100 in accordance with the present invention, in the preferred embodiment, is used in surgical instruments, medical robots, robotic arms, or conveyor belts that handle fragile materials.
本發明另提供一種製備可撓式觸覺感測裝置100之方法，其包含：(a)利用噴墨打印方式將導電高分子與溶劑之混合溶液噴印至一纖維式基材112表面上，使該導電高分子與該溶劑之混合溶液於該纖維式基材112兩側各形成一電極113；(b)將該導電高分子與該溶劑之混合溶液塗佈至一可撓式基材111表面上；(c)將該可撓式基材111與該纖維式基材112以導電高分子面相疊合而形成一感知層110；及(d)將一測量儀122以兩條電線121分別電氣連接至該纖維式基材112上之各該電極。The present invention further provides a method for preparing a flexible tactile sensing device 100, comprising: (a) printing a mixed solution of a conductive polymer and a solvent onto a surface of a fibrous substrate 112 by inkjet printing. a mixed solution of the conductive polymer and the solvent forms an electrode 113 on each side of the fiber substrate 112; (b) applying a mixed solution of the conductive polymer and the solvent to the surface of a flexible substrate 111 (c) the flexible substrate 111 and the fibrous substrate 112 are laminated on the conductive polymer surface to form a sensing layer 110; and (d) electrically connecting a measuring device 122 to the two wires 121 Each of the electrodes on the fibrous substrate 112 is attached.
請參見圖1，此為本發明之觸覺感測裝置100之示意圖及感測機制圖，將一塗佈有導電高分子的可撓式基材111放置在一纖維式基材112上，該纖維式基材112之兩側塗有一對電極113，該纖維式基材112可為紙，該對電極113間的電阻如圖1B，其包含Re、Rc和Rf，其中Rc表示由上下表面不規則之粗糙度而產生之接觸電阻。如圖1B所示，當外加壓力於上表面時，基於紙之可壓縮性，使得上下表面間之接觸面積增加。換句話說，施加壓力促使兩粗糙表面之間的接觸狀態改變，使得Rc為可變電阻。Please refer to FIG. 1 , which is a schematic diagram and a sensing mechanism diagram of the tactile sensing device 100 of the present invention. A flexible substrate 111 coated with a conductive polymer is placed on a fibrous substrate 112. The two sides of the substrate 112 are coated with a pair of electrodes 113. The fiber substrate 112 can be paper. The resistance between the pair of electrodes 113 is as shown in FIG. 1B, which includes Re , Rc and Rf , where Rc represents Contact resistance due to irregular roughness of the upper and lower surfaces. As shown in FIG. 1B, when pressure is applied to the upper surface, the contact area between the upper and lower surfaces is increased based on the compressibility of the paper. In other words, the application of pressure causes a change in the contact state between the two rough surfaces such that Rc is a variable resistance.
圖2為本發明之觸覺感測裝置100的內部結構圖。請同時參見圖1、2，將聚3,4-乙烯基二氧噻吩與聚苯乙烯磺酸之共聚物(PEDOT：PSS)所形成之導電高分子溶液與乙二醇(Ethylene Glycol)混合以增加導電性，並將上述之混合物塗佈在聚酯薄膜111(PET film)上以形成上導電板。另將聚3,4-乙烯基二氧噻吩與聚苯乙烯磺酸之共聚物(PEDOT：PSS)利用噴墨打印方式(inkjet printing)噴印至紙上以形成一對具有間隙之電極203。將上導電板與紙質底層以導電高分子面對面組裝以形成一感知層110。接著使用銀膠201將電線黏在電極的底部並連接至測量儀122以偵測感知層110接受壓力後的反應。此裝置的結構如表一與圖二所示。2 is an internal structural view of the haptic sensing device 100 of the present invention. Please also refer to Figures 1 and 2 to mix the conductive polymer solution formed by the copolymer of poly(3,4-ethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) with ethylene glycol (Ethylene Glycol). Increase conductivity and apply the above mixture to polyester film111 (PET film) to form an upper conductive plate. Further, a copolymer of poly 3,4-ethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) was printed onto paper by inkjet printing to form a pair of electrodes 203 having a gap. The upper conductive plate and the paper bottom layer are assembled face to face with the conductive polymer to form a sensing layer 110. The silver glue 201 is then used to adhere the wire to the bottom of the electrode and to the meter 122 to detect the reaction of the sensing layer 110 after receiving the pressure. The structure of this device is shown in Table 1 and Figure 2.
本發明之感知層的電阻測量實驗設置圖如圖3。將一拉壓力測試計305固定在X-Y線性滑台307上以測量感知層所受之力。其結果如圖4之電阻與施加壓力之測量圖所示，當壓力增加時，感知層之電阻值則降低，而其電阻偏差為5%。本裝置更進一步用來測量聚二甲基矽氧烷(PDMS)在不同混合比例下之楊格係數，以顯示其實際應用面。而聚二甲基矽氧烷因具有相似之彈性而常用做仿生材料。圖5之楊格係數圖證實了此觸覺感測裝置之觸覺感測能力。The experimental setup of the resistance measurement of the sensing layer of the present invention is shown in FIG. A tensile tester 305 is attached to the X-Y linear slide 307 to measure the force experienced by the sensing layer. As a result, as shown in the measurement diagram of the electric resistance and the applied pressure as shown in Fig. 4, when the pressure is increased, the resistance value of the sensing layer is lowered, and the electric resistance deviation is 5%. The device is further used to measure the Young's modulus of polydimethylsiloxane (PDMS) at different mixing ratios to show its practical application. Polydimethyl siloxane is commonly used as a biomimetic material because of its similar elasticity. The Young's coefficient graph of Figure 5 confirms the tactile sensing capability of this tactile sensing device.
本發明之以紙為基材的觸覺感測裝置已經證明了其可行性。它具有低成本、易加工、配置簡單和高可撓性。而測量聚二甲基矽氧烷之楊格係數更進一步證明本發明用於軟性仿生材料甚至生物材料的潛力。The paper-based tactile sensing device of the present invention has proven its feasibility. It is low cost, easy to process, simple to configure and highly flexible. Measuring the Young's modulus of polydimethyl siloxane further demonstrates the potential of the invention for soft biomimetic materials and even biomaterials.
100‧‧‧觸覺感測裝置100‧‧‧Tactile sensing device
110‧‧‧感知層110‧‧‧sense
111‧‧‧可撓式基材111‧‧‧Flexible substrate
112‧‧‧纖維式基材112‧‧‧Fiber substrate
113‧‧‧電極113‧‧‧Electrode
120‧‧‧壓力感測單元120‧‧‧ Pressure sensing unit
121‧‧‧電線121‧‧‧Wire
122‧‧‧測量儀122‧‧‧Measurer
201‧‧‧銀膠201‧‧‧Silver glue
202‧‧‧接觸板202‧‧‧Contact plate
203‧‧‧聚3,4-乙烯基二氧噻吩與聚苯乙烯磺酸之共聚物(PEDOT：PSS)電極203‧‧‧Copolymer of poly(3,4-ethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) electrode
204‧‧‧聚3,4-乙烯基二氧噻吩與聚苯乙烯磺酸之共聚物(PEDOT：PSS)層204‧‧‧Copolymer of poly(3,4-ethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) layer
301‧‧‧測量儀301‧‧‧Measuring instrument
302‧‧‧壓力感測器302‧‧‧pressure sensor
303‧‧‧測試樣品303‧‧‧ test sample
304‧‧‧探針304‧‧‧ probe
305‧‧‧拉壓力測試計305‧‧‧ tensile tester
306‧‧‧固定器306‧‧‧Retainer
307‧‧‧X-Y線性滑台307‧‧‧X-Y linear slide
圖1係本發明之觸覺感測裝置之示意圖及其感測機制圖，(a)為本觸覺感測裝置之示意圖；(b)為感知層AA’橫截面之等效電路，Re為纖維式基材上兩電極間之電組，Rc為感知層之間之電阻，Rf為可撓式基材上之電阻；(c)為壓力施加前(c1)與後(c2)Rc的變化。1 is a schematic diagram of a tactile sensing device of the present invention and a sensing mechanism diagram thereof, (a) is a schematic diagram of the tactile sensing device; (b) is an equivalent circuit of a cross section of the sensing layer AA', and Re is a fiber The electrical group between the two electrodes on the substrate, Rc is the resistance between the sensing layers, Rf is the resistance on the flexible substrate; (c) is before the pressure application (c1 ) and after (c2 ) Rc changes.
圖2係本發明之觸覺感測裝置之內部結構圖。2 is an internal structural view of a tactile sensing device of the present invention.
圖3係本發明之感知層的電阻測量實驗設置圖。Figure 3 is a diagram showing the experimental setup of the resistance measurement of the sensing layer of the present invention.
圖4係本發明之電阻與施加壓力之測量實驗圖。Figure 4 is a graph showing the measurement of the resistance and applied pressure of the present invention.
圖5係聚二甲基矽氧烷(PDMS)在不同混合比例下之楊格係數圖。Figure 5 is a graph of the Young's modulus of polydimethyloxane (PDMS) at different mixing ratios.
100‧‧‧觸覺感測裝置100‧‧‧Tactile sensing device
110‧‧‧感知層110‧‧‧sense
111‧‧‧可撓式基材111‧‧‧Flexible substrate
112‧‧‧纖維式基材112‧‧‧Fiber substrate
113‧‧‧電極113‧‧‧Electrode
120‧‧‧壓力感測單元120‧‧‧ Pressure sensing unit
121‧‧‧電線121‧‧‧Wire
122‧‧‧測量儀122‧‧‧Measurer
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101122985ATWI502467B (en) | 2012-06-27 | 2012-06-27 | Fibrous material based flexible tactile sensing cell from contact mechanism |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101122985ATWI502467B (en) | 2012-06-27 | 2012-06-27 | Fibrous material based flexible tactile sensing cell from contact mechanism |
| Publication Number | Publication Date |
|---|---|
| TW201401147A TW201401147A (en) | 2014-01-01 |
| TWI502467Btrue TWI502467B (en) | 2015-10-01 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101122985ATWI502467B (en) | 2012-06-27 | 2012-06-27 | Fibrous material based flexible tactile sensing cell from contact mechanism |
| Country | Link |
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| TW (1) | TWI502467B (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318059B (en)* | 2018-02-12 | 2025-06-17 | 清华大学 | Paper-based sensor and preparation method thereof |
| TWI778721B (en)* | 2021-07-23 | 2022-09-21 | 王士華 | Flexible sensing device and manufacturing method thereof |
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| TW201117366A (en)* | 2009-11-10 | 2011-05-16 | Univ Nat Chiao Tung | Pressure detector and an array thereof |
| TW201131462A (en)* | 2009-12-11 | 2011-09-16 | Nissha Printing | Thin screen display, mounting structure of resistive touch panel, front surface projection-attached resistive touch panel unit, rear surface projection-attached resistive touch panel unit |
| Publication number | Priority date | Publication date | Assignee | Title |
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| TW201117366A (en)* | 2009-11-10 | 2011-05-16 | Univ Nat Chiao Tung | Pressure detector and an array thereof |
| TW201131462A (en)* | 2009-12-11 | 2011-09-16 | Nissha Printing | Thin screen display, mounting structure of resistive touch panel, front surface projection-attached resistive touch panel unit, rear surface projection-attached resistive touch panel unit |
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| TW201401147A (en) | 2014-01-01 |
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