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TWI350949B - Stripping composition for removing color resist of tft-lcd manufacturing process - Google Patents

Stripping composition for removing color resist of tft-lcd manufacturing process

Info

Publication number
TWI350949B
TWI350949BTW093119125ATW93119125ATWI350949BTW I350949 BTWI350949 BTW I350949BTW 093119125 ATW093119125 ATW 093119125ATW 93119125 ATW93119125 ATW 93119125ATW I350949 BTWI350949 BTW I350949B
Authority
TW
Taiwan
Prior art keywords
tft
manufacturing process
color resist
stripping composition
lcd manufacturing
Prior art date
Application number
TW093119125A
Other languages
Chinese (zh)
Other versions
TW200506552A (en
Inventor
Suk-Il Yoon
Seong-Bae Kim
Original Assignee
Dongjin Semichem Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongjin Semichem Co LtdfiledCriticalDongjin Semichem Co Ltd
Publication of TW200506552ApublicationCriticalpatent/TW200506552A/en
Application grantedgrantedCritical
Publication of TWI350949BpublicationCriticalpatent/TWI350949B/en

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TW093119125A2003-07-102004-06-29Stripping composition for removing color resist of tft-lcd manufacturing processTWI350949B (en)

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
KR1020030046979AKR101043397B1 (en)2003-07-102003-07-10 Separation composition for removing color resist from TF LCD

Publications (2)

Publication NumberPublication Date
TW200506552A TW200506552A (en)2005-02-16
TWI350949Btrue TWI350949B (en)2011-10-21

Family

ID=34214642

Family Applications (1)

Application NumberTitlePriority DateFiling Date
TW093119125ATWI350949B (en)2003-07-102004-06-29Stripping composition for removing color resist of tft-lcd manufacturing process

Country Status (4)

CountryLink
JP (1)JP4395020B2 (en)
KR (1)KR101043397B1 (en)
CN (1)CN1577112B (en)
TW (1)TWI350949B (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP4906516B2 (en)*2006-01-112012-03-28東進セミケム株式会社 Color resist stripping composition for TFT-LCD
KR101328097B1 (en)*2006-01-112013-11-13주식회사 동진쎄미켐A color resist remover composition for tft-lcd preparation
KR100793241B1 (en)2006-06-192008-01-10삼성전자주식회사 Composition for removing silicon polymer and photoresist, film removal method and pattern formation method using same
KR100842853B1 (en)*2006-09-272008-07-02주식회사 대원에프엔씨Aqueous resist stripper formulation
CN101187788A (en)*2006-11-172008-05-28安集微电子(上海)有限公司Low etching relative thick photoresist cleaning liquor
CN101201557A (en)*2006-12-152008-06-18安集微电子(上海)有限公司Detergent for cleaning thick film photoresist
KR101333779B1 (en)*2007-08-202013-11-29주식회사 동진쎄미켐A color resist remover composition for tft-lcd preparation
KR101488265B1 (en)2007-09-282015-02-02삼성디스플레이 주식회사 Peeling composition and peeling method
JP5306755B2 (en)*2008-09-162013-10-02AzエレクトロニックマテリアルズIp株式会社 Substrate processing liquid and resist substrate processing method using the same
EP2427804B1 (en)2009-05-072019-10-02Basf SeResist stripping compositions and methods for manufacturing electrical devices
KR20110018775A (en)2009-08-182011-02-24삼성전자주식회사 Composition for peeling color filter and method for reproducing color filter using same
CN102163011A (en)*2011-04-292011-08-24西安东旺精细化学有限公司Stripping liquid composition of photoresist
KR102040064B1 (en)2012-12-242019-11-04동우 화인켐 주식회사color resist stripper composition
KR101988668B1 (en)2013-03-152019-06-12동우 화인켐 주식회사Cleaning composition for removing color resist and organic insulating layer
KR102009530B1 (en)2013-05-282019-08-09동우 화인켐 주식회사Liquid composition for stripping a color resist and an organic insulating layer
KR102009532B1 (en)*2013-08-262019-08-09동우 화인켐 주식회사A resist stripper composition
KR102009533B1 (en)*2013-09-062019-08-09동우 화인켐 주식회사Resist stripper composition and method of manufacturing flat panel display devices using the same
JP2015011356A (en)*2014-07-182015-01-19パナソニックIpマネジメント株式会社Stripping liquid for photoresist
KR20160017477A (en)2014-08-062016-02-16동우 화인켐 주식회사Cleaning composition
CN105368611B (en)*2014-08-062018-12-07东友精细化工有限公司Cleaning compositions
KR20160018210A (en)2014-08-082016-02-17동우 화인켐 주식회사Cleaning composition
US10072237B2 (en)*2015-08-052018-09-11Versum Materials Us, LlcPhotoresist cleaning composition used in photolithography and a method for treating substrate therewith
CN105388713A (en)*2015-12-162016-03-09无锡吉进环保科技有限公司Aluminum film drainage photoresist stripper in thin-film liquid crystal display
KR20170086965A (en)*2016-01-192017-07-27동우 화인켐 주식회사Liquid composition for stripping a color resist and an organic layer
CN106873236B (en)2017-04-112019-11-29惠科股份有限公司Display panel manufacturing method and display panel
KR101972212B1 (en)*2017-04-272019-04-25한양대학교 에리카산학협력단EUV mask cleansing solution and method of fabrication of the same
US10800897B2 (en)*2018-04-302020-10-13Skc Inc.Heat shrinkable film and method for reproducing polyester container using same
JP7458927B2 (en)*2020-07-282024-04-01東京応化工業株式会社 Processing liquid and substrate processing method
CN113296374A (en)*2021-05-252021-08-24深圳深骏微电子材料有限公司Reworking liquid for color filter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP3302120B2 (en)*1993-07-082002-07-15関東化学株式会社 Stripper for resist
JP3738996B2 (en)*2002-10-102006-01-25東京応化工業株式会社 Cleaning liquid for photolithography and substrate processing method
JP4282054B2 (en)*2002-09-092009-06-17東京応化工業株式会社 Cleaning liquid used in dual damascene structure forming process and substrate processing method

Also Published As

Publication numberPublication date
KR101043397B1 (en)2011-06-22
JP4395020B2 (en)2010-01-06
JP2005031682A (en)2005-02-03
KR20050006980A (en)2005-01-17
CN1577112B (en)2011-08-17
CN1577112A (en)2005-02-09
TW200506552A (en)2005-02-16

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Legal Events

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