1321190 九、發明說明： 【發明所屬之技術領域】 本創作係關於一種幫浦技術，特別是關於一種微幫浦。 【先前技術】 目前微幫浦最常見的為無閥門式微幫浦，主要用〆致動 器使薄膜產生震動再使腔體的容積產生變化，在進出口設 計成擴散及喷嘴型式利用其型狀來控制流體流入流出的廢 力。但目前之無閥門幫浦只能控其平均的流量，無法控制 其每一次輸出的量。在生醫檢測上，無法達到供給定量檢 體的功能。 近年來常有研究改變其致動源材料、改變腔體設計或闕 門型式等等。在微幫浦系統上，楊聲震等人，在中華民國 專利公告號00568881 ‘‘可程控電容式微泵浦，，專利中，提供 —個長扁矩形微流道腔室，腔室之上下兩面（或僅上面）， 覆蓋一層鍍有多個條形（栅狀）金屬電極之彈性薄膜，利用 柵狀電極與腔室底部電極發生電容靜電吸引力及彈性薄膜 回復力的效應，施加每一柵狀電極適當之相位差的致動電 =以驅動彈性薄膜產生數個單_方向的行進波，使得彈性 缚膜藉㈣錢方式軸流體，而使㈣祕夠平順 效的運作。 f陳世洲，在中華民國專利公告號00324948“電磁致動式 微幫浦’’專利中，提供—種電磁致動式微幫浦，以微加工技 1321190 術製成、’可操賴量精確料體，㈣_祕方式配合 無閥式進出σ構成往復式的微幫浦。由平面線圈，配合軟 磁鐵或永久磁鐵在同1直面上產生磁力作用。其構造為 將線圈"L積於薄膜上構成動件，磁鐵為固定件，或線圈為 固疋件磁鐵為動件等，或利用兩組線圈產生往復式的動 作。進出ϋ的料聰_ H /喷嘴式（Diff/N〇Zzle ) 疋件取代傳統的逆止閱。此種組合構成的微幫浦具有反 應快速、輪人電壓小、進出口製程容易及可靠度高等優點。1321190 IX. Description of the invention: [Technical field to which the invention pertains] This creation relates to a pumping technique, in particular to a micro-pull. [Prior Art] At present, the most common type of micro-pull is a valveless micro-pump. The main actuator is used to make the film vibrate and then change the volume of the cavity. The inlet and outlet are designed to diffuse and the nozzle type utilizes its shape. To control the waste force of fluid inflow and outflow. However, the current valveless pump can only control its average flow rate and cannot control the amount of each output. In the biomedical test, the function of supplying a quantitative test cannot be achieved. In recent years, research has often changed the source material, changing the cavity design or the type of the door. In the micro-pull system, Yang Shengzhen et al., in the Republic of China Patent Bulletin No. 00568881 ''programmable capacitive micropump, patent, provides a long flat rectangular micro-channel chamber, above and below the chamber (or Only the above), covering an elastic film coated with a plurality of strip-shaped (grid-shaped) metal electrodes, applying each of the grid electrodes by the effect of capacitive electrostatic attraction and elastic film restoring force by the grid electrode and the bottom electrode of the chamber Appropriate phase difference of the actuation power = to drive the elastic film to generate a number of single-direction traveling waves, so that the elastic bond film (4) money mode shaft fluid, and (4) secret enough smooth operation. f Chen Shizhou, in the Republic of China Patent Bulletin No. 00324948 "Electromagnetic Actuated Micro-Pu" patent, provides an electromagnetically actuated micro-pull, made with micro-machining technology 1321190, 'acquisitive precision material, (4) The secret method cooperates with the valveless inlet and outlet σ to form a reciprocating micro-pump. The planar coil is combined with a soft magnet or a permanent magnet to generate a magnetic force on the same straight surface. The structure is constructed by winding the coil "L on the film. The moving parts, the magnets are fixed parts, or the coils are solid parts magnets, etc., or the two sets of coils are used to generate reciprocating motion. The material of the inlet and outlet is _H / nozzle type (Diff/N〇Zzle) It replaces the traditional reverse stop. The micro-pull composed of this combination has the advantages of fast response, small wheel voltage, easy import and export process and high reliability.
然而’上述微幫浦系統，皆以無閥門為主，其缺點就是 無法做定量輸出。以常見壓電無閥門微幫浦而言，採用壓 電片做為致動源’利用壓電片振動原理，使薄膜振動驅使 腔體内體積變化，使流體經由擴散/嘴嘴進人/輸出腔體。此 與上述設計原理大同小異，雜㈣體容賴㈣方式來 方式必需配合擴散及喷嘴的設計來控制 μ體輸出，但無法精確控制流體輸出量。 【發明内容】However, the above-mentioned micro-pull system is mainly based on no valve, and its disadvantage is that quantitative output cannot be performed. In the case of the common piezoelectric valveless micro-pump, the piezoelectric piece is used as the actuating source. Using the vibration principle of the piezoelectric piece, the vibration of the film drives the volume change in the cavity, so that the fluid enters/outputs through the diffusion/mouth. Cavity. This is similar to the above design principle. The hybrid (4) method depends on the diffusion and nozzle design to control the μ body output, but the fluid output cannot be precisely controlled. [Summary of the Invention]
之目的之―’係設計—電梳轉微幫浦系統，能 連續輸出而無法定量輸出的微幫浦，達 到使机體w量出，可廣泛應胁生化反應、檢體、 實驗室晶片以及各類微流體運動之相關應用。 0 為此’本發明提供-種雜驅動微幫浦系統 含一活塞、一梳狀致動器以及一 、夕匕 致動器可隸Α μ ^視檢料置。梳狀 塞’使活塞發生-第—位移，致-流體進入 致動器了在接受-電堡之後，產生—靜電力 窀，栋法玄旅4 —松 用从帶動活 腔體内，其 電壓具有—電壓值’其可決线人腔體内之流體體積， 且=中在㈣值逐_降低之後，靜電力會減弱，使活塞逐 漸文一彈菁之驅動而發生與第一位移方向相反的一第二位 ^ ’以輸出腔體内之流體。上述即時監視檢測裝置，用以 k供梳狀致動器即時資訊。 透過上述電梳驅動微幫浦系統，可讓微流體之輸出，達 到檢測所需之固定液量。流體在腔體内，受活塞推擠使流 體輪出，可達到定量的目的。 【實施方式】 為讓本發明之上述或其他目的、特徵和優點能更明顯易 Μ ’下文特舉本發明之較佳實施例，並配合所附圖式，作 詳細說明如下： 第一圖繪示根據本發明第一較佳實施例，一種微幫浦剖 面結構示意圖。請參照第一圖，此微幫浦至少包含一活塞 10以及一梳狀致動器2〇。此梳狀致動器2〇可在接受來自 電源供應器98(第六圖）之一電壓之後，產生一靜電力，用 以帶動該活塞10，使活塞10發生一第一位移12，致一流 體3〇(第二圖）進入一腔體40内。此流體30例如是樣品或 試劑。 上述電壓具有一電壓值，其可決定進入腔體4〇内之流 體30體積°上述電壓之電壓值逐漸降低之後，靜電力會減 弱’使活塞10逐漸受一彈簧70之驅動而發生與第一位移 12方向相反的一第二位移14(第三圖），以輸出腔體4〇内 之流體30。此種輸出方式可精確控制流體3〇輸出量。 制本發明第一較佳實施例之微幫浦，可更包括一電壓控 電置80(例如一繼電器），其可用於逐漸降低電壓值。此 控制裝置80亦可用於改變電壓值，以改變進入腔體内 栓=體的體積。藉由電壓控制裝置80，本發明之微幫浦可 可j其每一次輸出的量。在生醫檢測上，本發明之微幫浦 建到供給定量檢體的功能。 趲。本發明第一較佳實施例之腔體40可以是無閥門腔 此夕至於上述流體3〇，可以透過〜導入口 32進入腔體40。 =，腔體40内之流體30 ,可以透過一輸出口 ％從腔體 %輪出。 兩上述導入口 32之入口方向，與輸出口 34之出口方向， 可失-特定角度’以控制流體3〇的流動方向。這個特 鱿β度，例如是約九十度。上述輪出口 34之出口方向也 淹^塞1G之第二位移14方向。上述微幫浦可更包括一 ^供應及控職置，連接-導人接頭。此越供應及控 =置可提供-固定壓力，以驅動微幫浦祕中之流體， ^住-特定方向運動。此迴路細微幫浦内之流體流動 第六圖繪示-種電梳驅動微幫浦系統示意圖。請參照第 上述梳狀致動器20可連接1時監視檢測裝置％， 連行外部控制之即時監控。此印時監視㈣裝置％，可 直接檢測微幫浦迴路中之流體，叫供梳狀致動器2〇即時 資訊。詳言之，上述即時監視檢測裝置，是透過類比/數位 轉換器94(AD/DA-converter)以及電腦％提供即時資訊。 1321190 根據此項即時資訊’電壓控制裝置80可以決定電壓值，進 而決定進入腔體40(第一圖）内之流體體積。 請參照第四圖以及第五圖’本發明第一較佳實施例之微 幫浦採電壓驅動，即利用電壓與靜電力之關係，控制電梳 位移。流體直接由外部驅動導入無閥門腔體内，再由電壓 變化控制電梳的位移行程，驅使活塞10將腔體40内的流 體30輸出。此微幫浦可改善無閥門微幫浦無法定量輸出之 缺點。由於此微幫浦的輸出為完全輪出，故可改善液滴現 • 象。 上述微幫浦之設計可讓微流體透過微幫浦之輸出’達到 檢測所需之固定液量》微幫浦之設計利用擴散及喷嘴的原 理，再施以一驅動源，做活塞式的往復作動，使流體30在 活塞10腔體40内，受活塞10推擠使流體30輸出，達到 定量的目的。 根據第一較佳實施例，本發明可廣泛應用於生化反應、 檢體混合、實驗室晶片、生物晶片定量檢測、以及各類微 * 流體運動之相關應用。此外，本發明利用外加之電壓及壓 , 力控制裝置及即時監測裝置，可即時監測反應情況、控制 電壓大小以及輪出量控制，排除傳統晶片僅能連續輸出的 缺點，並以簡單的無閥門腔體設計減少控制困難度降低製 程成本。 第一圖至第三圖繪示根據本發明第二較佳實施例，一種 微幫浦之作動方法流程示意圖。請參照第一圖，第一個步 9 1321190 驟是流體30由一個外部控制的固定驅動壓力經導入接頭 導入，進入暫儲槽90使流體30填滿暫儲槽90。 第四圖繪示根據本發明第二較佳實施例之第二圖，一種 微幫浦結構的下視示意圖。請參照第四圖以及第二圖，第 二個步驟，係施加一電壓於一梳狀致動器20，以產生一靜 電力，用以帶動一活塞10,使活塞10發生一第一位移12， 致一流體30進入一腔體40内，其中電壓具有一電壓值， 其可決定進入腔體40内之流體30體積。 請參照第四圖以及第二圖，上述電壓值越大，產生靜電 力越大，而活塞10的位移量也隨之越大。活塞之第一位移 12，例如是由腔體40底部向上移動（第四圖；第二圖則為 向右移動）。此時，腔體40内因此產生壓力變化。當活塞 10前端移動至導入口 32時，因腔體40壓力變化的關係， 流體30會迅速充滿於腔體40之内，如第二圖所示。 第五圖繪示根據本發明第二較佳實施例之第三圖，一種 微幫浦結構的下視示意圖。請參照第五圖以及第三圖，於 第三步驟，逐漸降低上述電壓值，以減弱靜電力，使活塞 10逐漸受一彈簧70之驅動而發生與第一位移12方向相反 的一第二位移14，以輸出腔體40内之流體30。 施於梳狀致動器20上之驅動電壓緩慢下降，梳狀致動 器20也因靜電力的減弱，而受上述彈簧力的影響，驅使活 塞發生第二位移14,例如是向下移動（第五圖；第三圖則為 向左移動）。當活塞10下行時，將充滿於腔體40内的流體 1321190 30向外輸出。 根據本發明第二較佳實施例，上述作動方法可更包括一 改變步驟。該步驟可改變電壓值，以改變進入腔體40内之 流體30的體積。 本發明第二較佳實施例之腔體40可以是無閥門腔體。 至於上述流體30，請參照第二圖，可以透過一導入口 32 進入腔體40。此外，腔體40内之流體30，可以透過一輸 出口 34從腔體40輸出。 上述導入口 32之入口方向，與輸出口 34之出口方向， 兩者可夾一特定角度，以控制流體的流動方向。這個特定 角度，例如是約九十度。上述輸出口 34之出口方向，也就 是活塞10之第二位移14方向。 根據第二較佳實施例，本發明可廣泛應用於生化反應、 檢體混合、實驗室晶片、生物晶片定量檢測、以及各類微 流體運動之相關應用。此外，本發明利用外加之電壓及壓 力控制裝置及即時監測裝置，可即時監測反應情況、控制 電壓大小以及輸出量控制，排除傳統晶片僅能連續輸出的 缺點，並以簡單的無閥門腔體設計減少控制困難度降低製 程成本。 雖然本發明已利用上述較佳實施例揭示，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作各種更動與修改，因此本發明之保護範 圍當視後附之申請專利範圍所界定者為準。 11 1321190 【圖式簡單說明】 第一圖繪示根據本發明第一較佳實施例，一種微幫浦剖 面結構示意圖； 第一圖至第三圖繪示根據本發明第二較佳實施例，一種 微幫浦之作動方法流程示意圖； * 第四圖繪示根據本發明第二較佳實施例之第二圖，一種 微幫浦結構的下視示意圖； 第五圖繪示根據本發明第二較佳實施例之第三圖，一種 Φ 微幫浦結構的下視示意圖；以及 第六圖繪示一種電梳驅動微幫浦系統示意圖。 【主要元件符號說明】 20梳狀致動器 34輸出口 80電壓控制裝置 12第一位移 30流體 92即時監視檢測裝置 10活塞 J 32導入口 40腔體 90暫儲槽 14第二位移 φ 70彈簀 94類比/數位轉換器96電腦 ‘ 98電源供應器 12The purpose of the design is - the electric comb-to-micro-pull system, which can continuously output and can not quantitatively output the micro-pull, so that the body can be measured, and the biochemical reaction, the sample, the laboratory wafer and the Various types of microfluidic motion related applications. 0 The present invention provides a hybrid drive micro-pull system comprising a piston, a comb actuator, and a 匕 匕 actuator that can be used to view the material. The comb plug causes the piston to generate a -first displacement, causing the fluid to enter the actuator. After receiving the - electric castle, the electrostatic force is generated, and the voltage is used to drive the living chamber. Having a voltage value that can determine the volume of the fluid in the human cavity, and after the (four) value is decreased by _, the electrostatic force is weakened, causing the piston to gradually drive in the opposite direction of the first displacement. A second bit ^' to output the fluid in the cavity. The above-mentioned instant monitoring and detecting device is configured to provide instant information of the comb actuator. The micro-pull system is driven by the above-mentioned electric comb to allow the output of the microfluid to reach the amount of fixed liquid required for detection. The fluid is in the cavity and is pushed by the piston to make the fluid rotate, which can achieve the purpose of quantification. The above and other objects, features, and advantages of the present invention will become more apparent from the <RTIgt; A schematic view of a cross-sectional structure of a micro-push according to a first preferred embodiment of the present invention. Referring to the first figure, the micro pump includes at least a piston 10 and a comb actuator 2〇. The comb actuator 2 can generate an electrostatic force after receiving a voltage from a power supply 98 (the sixth diagram) to drive the piston 10 to cause a first displacement 12 of the piston 10, resulting in a The fluid 3〇 (second image) enters a cavity 40. This fluid 30 is, for example, a sample or a reagent. The voltage has a voltage value, which can determine the volume of the fluid 30 entering the cavity 4, and after the voltage value of the voltage is gradually decreased, the electrostatic force is weakened, so that the piston 10 is gradually driven by a spring 70 to occur first. A second displacement 14 (third map) having the opposite direction of displacement 12 is outputted to output fluid 30 within the chamber 4. This output mode precisely controls the output of the fluid. The micro-push of the first preferred embodiment of the present invention may further include a voltage control device 80 (e.g., a relay) that can be used to gradually reduce the voltage value. This control device 80 can also be used to vary the voltage value to vary the volume of the plug = body entering the cavity. By means of the voltage control means 80, the micro-push of the present invention can be used for each amount of output. In the biomedical examination, the micro-pull of the present invention is built to supply a quantitative sample. urge. The cavity 40 of the first preferred embodiment of the present invention may be a valveless chamber. As for the fluid 3, the fluid may enter the cavity 40 through the inlet port 32. =, the fluid 30 in the cavity 40 can be rotated out of the cavity through an output port %. The inlet direction of the two inlet ports 32 and the outlet direction of the outlet port 34 can be lost at a specific angle to control the flow direction of the fluid 3〇. This characteristic β degree is, for example, about ninety degrees. The exit direction of the wheel outlet 34 is also flooded by the second displacement 14 of the 1G. The above micro-pull can further include a supply and control position, a connection-guide connector. This more supply and control = set available - fixed pressure to drive the fluid in the micro-pump, ^ live - specific direction of movement. The fluid flow in the micro-pull of this circuit. The sixth figure shows a schematic diagram of a kind of electric comb-driven micro-pump system. Please refer to the above-mentioned comb actuator 20 for monitoring the detection device % when it is connected to 1, and to perform on-line monitoring of external control. This printing time monitors (4) the device %, which can directly detect the fluid in the micro-pull circuit, called the comb-like actuator 2 〇 instant information. In detail, the above-mentioned real-time monitoring and detecting device provides instant information through the analog/digital converter 94 (AD/DA-converter) and the computer %. 1321190 According to this instant information, the voltage control device 80 can determine the voltage value and thereby determine the volume of fluid entering the cavity 40 (first map). Referring to the fourth and fifth figures, the micro-pushing voltage driving of the first preferred embodiment of the present invention controls the electric comb displacement by utilizing the relationship between voltage and electrostatic force. The fluid is directly driven into the valveless chamber by external drive, and the displacement of the comb is controlled by the voltage change to drive the piston 10 to output the fluid 30 in the chamber 40. This micro-pump can improve the shortcomings of the valveless micro-pump that cannot be quantified. Since the output of this micro pump is completely rotated, the droplet phenomenon can be improved. The above-mentioned micro-pump design allows the microfluid to pass through the output of the micro-pump to achieve the amount of fixed liquid required for detection. The design of the micro-pull is based on the principle of diffusion and nozzle, and then a driving source is used to make the piston reciprocating. Actuation, the fluid 30 is placed in the cavity 10 of the piston 10, and is pushed by the piston 10 to output the fluid 30 for quantitative purposes. According to the first preferred embodiment, the present invention is widely applicable to biochemical reactions, sample mixing, laboratory wafers, biochip quantitative detection, and related applications of various types of micro* fluid motion. In addition, the invention utilizes the applied voltage and pressure, the force control device and the instant monitoring device to instantly monitor the reaction situation, the control voltage and the rotation amount control, and eliminate the disadvantage that the conventional wafer can only continuously output, and the simple valveless The cavity design reduces control difficulties and reduces process costs. The first to third figures illustrate a flow chart of a method for operating a micro-pull according to a second preferred embodiment of the present invention. Referring to the first figure, the first step 9 1321190 is that the fluid 30 is introduced by an externally controlled fixed driving pressure through the introduction joint, and enters the temporary storage tank 90 to fill the temporary storage tank 90 with the fluid 30. The fourth figure shows a second diagram of a second embodiment of the present invention, a schematic view of a micro-pull structure. Referring to the fourth figure and the second figure, in the second step, a voltage is applied to a comb actuator 20 to generate an electrostatic force for driving a piston 10 to cause a first displacement of the piston 10. A fluid 30 is introduced into a cavity 40, wherein the voltage has a voltage value that determines the volume of fluid 30 entering the cavity 40. Referring to the fourth and second figures, the larger the voltage value is, the larger the electrostatic force is generated, and the displacement amount of the piston 10 is also increased. The first displacement 12 of the piston, for example, is moved upward from the bottom of the cavity 40 (fourth figure; the second figure is rightward movement). At this time, a pressure change is thus generated in the cavity 40. When the front end of the piston 10 is moved to the introduction port 32, the fluid 30 will quickly fill the cavity 40 due to the pressure change of the cavity 40, as shown in the second figure. FIG. 5 is a bottom view of a micro-push structure according to a third embodiment of the second preferred embodiment of the present invention. Referring to the fifth figure and the third figure, in the third step, the voltage value is gradually decreased to weaken the electrostatic force, so that the piston 10 is gradually driven by a spring 70 to generate a second displacement opposite to the direction of the first displacement 12. 14. The fluid 30 in the output cavity 40 is output. The driving voltage applied to the comb actuator 20 is slowly lowered, and the comb actuator 20 is also affected by the above-described spring force due to the weakening of the electrostatic force, thereby causing the piston to generate a second displacement 14, for example, moving downward ( The fifth picture; the third picture is to move to the left). When the piston 10 descends, the fluid 1321190 30 filled in the cavity 40 is output outward. According to a second preferred embodiment of the present invention, the above actuating method may further comprise a changing step. This step changes the voltage value to vary the volume of fluid 30 entering the cavity 40. The cavity 40 of the second preferred embodiment of the present invention may be a valveless cavity. As for the fluid 30 described above, please refer to the second figure, and the chamber 40 can be accessed through an inlet 32. Additionally, fluid 30 within chamber 40 can be output from chamber 40 through an outlet 34. The inlet direction of the inlet port 32 and the outlet direction of the outlet port 34 can be sandwiched by a specific angle to control the flow direction of the fluid. This particular angle is, for example, about ninety degrees. The exit direction of the output port 34 is the second displacement 14 of the piston 10. According to the second preferred embodiment, the present invention is widely applicable to biochemical reactions, sample mixing, laboratory wafers, biochip quantitative detection, and related applications of various types of microfluidic motion. In addition, the present invention utilizes an external voltage and pressure control device and an instant monitoring device to instantly monitor the reaction situation, control voltage and output control, eliminate the disadvantage that the conventional wafer can only be continuously output, and design a simple valveless cavity. Reduce control difficulties and reduce process costs. While the present invention has been described in connection with the preferred embodiments of the present invention, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application attached. 11 1321190 [FIG. 1] FIG. 1 is a schematic view showing a cross-sectional structure of a micro-pilot according to a first preferred embodiment of the present invention; and FIGS. 1 to 3 are a second preferred embodiment of the present invention. A schematic diagram of a flow of a micro-pushing method; *Fourth drawing is a second view of a second preferred embodiment of the present invention, a schematic view of a micro-pull structure; and a fifth drawing showing a second embodiment according to the present invention A third view of the preferred embodiment, a schematic view of a Φ micro-pull structure; and a sixth diagram showing a schematic diagram of an electric comb-driven micro-push system. [Main component symbol description] 20 comb actuator 34 output port 80 voltage control device 12 first displacement 30 fluid 92 real-time monitoring and detecting device 10 piston J 32 inlet port 40 cavity 90 temporary storage tank 14 second displacement φ 70 bomb箦94 analog/digital converter 96 computer '98 power supply 12