TWD177995S - Gas supply plate for semiconductor manufacturing apparatus - Google Patents

Abstract

Translated fromChinese

【物品用途】;本設計係關於一種用於半導體製造設備之氣體供應板。;【設計說明】;本設計之用於半導體製造設備之氣體供應板係安裝在半導體製造設備的反應器內部，包括複數個孔，用以均勻地供應反應氣體至基板。;各圖式中，A-A’全剖面立體圖係沿著立體圖中之A-A’剖面線的全剖面立體圖，B部分局部放大圖是A-A’全剖面立體圖中之B區域部分的端面剖視放大圖，揭露在該用於半導體製造設備之氣體供應板的邊緣部分包括沿著該邊緣部分連續形成的突出部分。;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。圖式所揭露之一點鏈線所圍繞的灰階填色，為本案不主張設計之部分，該一點鏈線係界定本案主張設計之部分與本案不主張設計之交界，且一點鏈線本身為本案不主張設計之部分。[Use of article]; This design is about a gas supply plate used in semiconductor manufacturing equipment. ;[Design Description];The gas supply plate for semiconductor manufacturing equipment designed in this design is installed inside the reactor of the semiconductor manufacturing equipment and includes a plurality of holes to uniformly supply reaction gas to the substrate. ;In each drawing, the A-A' full-section perspective view is a full-section perspective view along the A-A' section line in the perspective view, and the partial enlarged view of part B is the end face of area B in the A-A' full-section perspective view. The enlarged cross-sectional view reveals that the edge portion of the gas supply plate for semiconductor manufacturing equipment includes protruding portions continuously formed along the edge portion. ; The solid line part disclosed in the drawing is the part where the design of this case is advocated, and the dotted line part is the part of this case where the design is not advocated. The gray-scale coloring surrounded by the one-point chain line disclosed in the drawing is the part of this case that is not subject to design. The one-point chain line defines the boundary between the part of this case that is subject to design and the part that is not subject to design, and the one-point chain line itself is the part of this case that is not subject to design. Not claiming the design part.