TW202020427A - Test system of dew point sensor capable of saving costs and providing a stable test environment for the dew point sensor - Google Patents

Abstract

The present invention relates to a test system of a dew point sensor. After the air is compressed by an air compressor, a constant temperature air with low humidity is generated by a drying device and a constant temperature bath, and is outputted to a dew point test chamber. A reference dew point sensor and a to-be- tested dew point sensor sense the dew point temperature of the chamber in the dew point test chamber, and send a reference dew point signal and a to-be-tested dew point signal to a processing host for display, so as to provide the basis for calibrating the to-be-tested dew point sensor. Since the test system directly compresses the air by means of the air compressor, there is no need to prepare a nitrogen barrel to provide nitrogen. Therefore, the present invention can not only save costs, but also provide a stable test environment for the dew point sensor.

Description

Translated fromChinese

露點傳感器的測試系統Test system of dew point sensor

本發明係一種測試系統，尤指一種露點傳感器的測試系統。The invention is a test system, especially a dew point sensor test system.

在低濕度的環境中，稍有一絲水氣都會嚴重影響露點溫度的量測結果。一般手法營造測試露點傳感器的環境時，都是使用氮氣桶提供一低溫的氣體，再透過高精度低濕度產生器來提供一穩定而準確的露點傳感器的測試環境，並透過一露點儀來確認當下的露點溫度。這樣是標準的驗證露點傳感器的手法之一。但採用這種手法的驗證時間相對很長，特別在於營造極低濕的環境的時間需要更久，而且一次能夠驗證的露點傳感器的數量不多，難以量產化測試。因此，現有營造測試露點傳感器的環境的技術還需進一步之改良。In a low-humidity environment, a slight trace of water vapor will seriously affect the measurement results of the dew point temperature. In general, when creating an environment for testing the dew point sensor, a nitrogen barrel is used to provide a low-temperature gas, and then a high-precision low-humidity generator is used to provide a stable and accurate dew point sensor test environment, and a dew point meter is used to confirm the current Dew point temperature. This is one of the standard methods of verifying dew point sensors. However, the verification time of this method is relatively long, especially because it takes longer to create an extremely low-humidity environment, and the number of dew point sensors that can be verified at a time is not large, which is difficult to mass-produce. Therefore, the existing technology for creating an environment for testing the dew point sensor needs further improvement.

有鑒於此，本發明的主要目的是提供一露點傳感器的測試系統，能夠大量化的測試多個露點傳感器，且能縮短營造測試環境的時間。該露點傳感器的測試系統係包含有一空壓機、一乾燥設備、一恆溫槽、一露點測試腔體、一參考露點傳感器、一待測露點傳感器及一處理主機。In view of this, the main purpose of the present invention is to provide a dew point sensor test system, which can test a large number of dew point sensors, and can shorten the time to create a test environment. The test system of the dew point sensor includes an air compressor, a drying device, a constant temperature bath, a dew point test cavity, a reference dew point sensor, a dew point sensor to be measured and a processing host.

該空壓機具有一壓縮空氣輸出端，並產生一壓縮空氣由該壓縮空氣輸出端輸出。該乾燥設備具有一乾燥輸入端及一乾燥輸出端，該乾燥輸入端連接該空壓機的壓縮空氣輸出端，以接收該壓縮空氣，並產生一乾燥空氣由該乾燥輸出端輸出。The air compressor has a compressed air output end, and generates a compressed air output from the compressed air output end. The drying device has a drying input end and a drying output end. The drying input end is connected to the compressed air output end of the air compressor to receive the compressed air and generate a dry air to be output from the drying output end.

該恆溫槽具有一恆溫輸入端及一恆溫輸出端，該恆溫輸入端連接該乾燥設備的乾燥輸出端，以接收該乾燥空氣，並產生一恆溫空氣由該恆溫輸出端輸出。該露點測試腔體具有一外殼，該外殼內具有一腔室，且該外殼上形成有複數容置孔及一空氣輸入端，而各該容置孔及該空氣輸入端分別連通該腔室。該露點測試腔體的空氣輸入端連接至該恆溫槽的恆溫輸出端，接收該恆溫空氣。The constant temperature bath has a constant temperature input end and a constant temperature output end. The constant temperature input end is connected to the drying output end of the drying device to receive the dry air and generate a constant temperature air to be output from the constant temperature output end. The dew point test cavity has an outer shell, and the outer shell has a chamber, and the outer shell is formed with a plurality of accommodating holes and an air input end, and each accommodating hole and the air input end communicate with the chamber respectively. The air input end of the dew point test cavity is connected to the constant temperature output end of the constant temperature bath, and receives the constant temperature air.

該參考露點傳感器設置於該露點測試腔體的其中一容置孔中，並感測該露點測試腔體的腔室的露點溫度，以產生一參考露點訊號。該待測露點傳感器設置於該露點測試腔體的其中一容置孔中，並感測該露點測試腔體的腔室的露點溫度，以產生一待測露點訊號。該處理主機電連接該參考露點傳感器及該待測露點傳感器，以接收並顯示該參考露點訊號及該待測露點訊號。The reference dew point sensor is disposed in one of the receiving holes of the dew point test cavity, and senses the dew point temperature of the chamber of the dew point test cavity to generate a reference dew point signal. The dew point sensor to be measured is disposed in one of the accommodating holes of the dew point test cavity, and senses the dew point temperature of the chamber of the dew point test cavity to generate a dew point signal to be measured. The processing host is electrically connected to the reference dew point sensor and the dew point sensor to be measured to receive and display the reference dew point signal and the dew point signal to be measured.

本發明的露點傳感器的測試系統通過該空壓機直接壓縮空氣後，由該乾燥設備去除壓縮空氣中的水分後，由該恆溫槽調整乾燥空氣的溫度，且同時再度去除乾燥空氣中的多餘水氣，並將輸出的恆溫空氣提供至該露點測試腔體，使該露點測試腔體的腔室中的空氣能夠足夠乾燥且溫度穩定，且該露點傳感器的測試系統是直接壓縮空氣，不需要另外準備氮氣桶來提供氮氣。如此一來，不僅可節省成本，且能夠提供給露點傳感器穩定的測試環境。同時，該露點測試腔體具有多的容置孔可供多個待測露點傳感器設置於其中，並且各個待測露點傳感器的感測資料能夠直接傳送至該處理主機顯示並記錄下來，藉此，本發明便可同時驗證多個待測露點傳感器，進而提高驗證效率，縮短驗證時間。The test system of the dew point sensor of the present invention directly compresses air through the air compressor, after removing the moisture in the compressed air by the drying equipment, the temperature of the drying air is adjusted by the constant temperature bath, and at the same time, the excess water in the drying air is removed again Air, and provide the output constant temperature air to the dew point test cavity, so that the air in the chamber of the dew point test cavity can be sufficiently dry and temperature stable, and the test system of the dew point sensor is directly compressed air, no additional Prepare a nitrogen barrel to supply nitrogen. In this way, not only can the cost be saved, but also a stable test environment for the dew point sensor can be provided. At the same time, the dew point test cavity has multiple accommodating holes for a plurality of dew point sensors to be tested to be set therein, and the sensing data of each dew point sensor to be tested can be directly transmitted to the processing host for display and recording, thereby The invention can simultaneously verify multiple dew point sensors to be tested, thereby improving verification efficiency and shortening verification time.

以下配合圖式及本發明之較佳實施例，進一步闡述本發明為達成預定發明目的所採取的技術手段。In the following, in conjunction with the drawings and preferred embodiments of the present invention, the technical means adopted by the present invention to achieve the intended purpose of the invention will be further described.

請參閱圖1所示，本發明係一種露點傳感器的測試系統，該露點傳感器的測試系統包含有一空壓機10、一乾燥設備20、一恆溫槽30、一露點測試腔體40、一參考露點傳感器50、一待測露點傳感器60及一處理主機70。As shown in FIG. 1, the present invention is a dew point sensor test system. The dew point sensor test system includes anair compressor 10, adrying device 20, aconstant temperature bath 30, a dewpoint test chamber 40, and a reference dew point. Thesensor 50, adew point sensor 60 to be measured and aprocessing host 70.

該空壓機10具有一壓縮空氣輸出端，並產生一壓縮空氣由該壓縮空氣輸出端輸出。該乾燥設備20具有一乾燥輸入端及一乾燥輸出端，該乾燥輸入端連接該空壓機10的壓縮空氣輸出端，以接收該壓縮空氣，並產生一乾燥空氣由該乾燥輸出端輸出。Theair compressor 10 has a compressed air output end, and generates a compressed air to be output from the compressed air output end. Thedrying device 20 has a drying input end and a drying output end. The drying input end is connected to the compressed air output end of theair compressor 10 to receive the compressed air and generate a dry air output from the drying output end.

該恆溫槽30具有一恆溫輸入端及一恆溫輸出端，該恆溫輸入端連接該乾燥設備20的乾燥輸出端，以接收該乾燥空氣，並產生一恆溫空氣由該恆溫輸出端輸出。請一併參閱圖2及圖3所示，該露點測試腔體40具有一外殼41，該外殼41內具有一腔室42，且該外殼40上形成有複數容置孔43及一空氣輸入端44，而各該容置孔43及該空氣輸入端44分別連通該腔室42。該露點測試腔體40的空氣輸入端44連接至該恆溫槽30的恆溫輸出端，接收該恆溫空氣。Theconstant temperature bath 30 has a constant temperature input end and a constant temperature output end. The constant temperature input end is connected to the drying output end of thedrying device 20 to receive the dry air and generate a constant temperature air to be output from the constant temperature output end. Please refer to FIG. 2 and FIG. 3 together, the dewpoint test chamber 40 has ahousing 41 with achamber 42 therein, and a plurality of accommodatingholes 43 and an air input end are formed on thehousing 40 44, and each of theaccommodating hole 43 and theair input end 44 communicate with thechamber 42 respectively. Theair input end 44 of the dewpoint test chamber 40 is connected to the constant temperature output end of theconstant temperature bath 30 to receive the constant temperature air.

該參考露點傳感器50設置於該露點測試腔體40的其中一容置孔43中，並感測該露點測試腔體40的腔室42的露點溫度，以產生一參考露點訊號。該待測露點傳感器60設置於該露點測試腔體40的其中一容置孔43中，並感測該露點測試腔體40的腔室42的露點溫度，以產生一待測露點訊號。該處理主機70電連接該參考露點傳感器50及該待測露點傳感器60，以接收並顯示該參考露點訊號及該待測露點訊號。The referencedew point sensor 50 is disposed in one of the receivingholes 43 of the dewpoint test cavity 40 and senses the dew point temperature of thechamber 42 of the dewpoint test cavity 40 to generate a reference dew point signal. Thedew point sensor 60 to be measured is disposed in one of the accommodatingholes 43 of the dewpoint test cavity 40 and senses the dew point temperature of thechamber 42 of the dewpoint test cavity 40 to generate a dew point signal to be measured. Theprocessing host 70 is electrically connected to the referencedew point sensor 50 and thedew point sensor 60 to be measured to receive and display the reference dew point signal and the dew point signal to be measured.

本發明的露點傳感器的測試系統通過該空壓機10直接壓縮空氣後，由該乾燥設備20去除壓縮空氣中的水分後，再由該恆溫槽30調整乾燥空氣的溫度，且同時再度去除乾燥空氣中的多餘水氣，並將輸出的恆溫空氣提供至該露點測試腔體40，使該露點測試腔體40的腔室42中的空氣能夠足夠乾燥且溫度穩定，且該露點傳感器的測試系統是直接壓縮空氣，不需要另外準備氮氣桶來提供氮氣。如此一來，不僅可節省成本，且能夠提供給露點傳感器穩定的測試環境。同時，該露點測試腔體40具有多的容置孔43可供多個待測露點傳感器60設置於其中，並且各個待測露點傳感器60的感測資料能夠直接傳送至該處理主機70顯示並記錄下來，藉此，本發明便可同時驗證多個待測露點傳感器60，進而提高驗證效率，縮短驗證時間。The test system of the dew point sensor of the present invention directly compresses air through theair compressor 10, removes the moisture in the compressed air by thedrying device 20, and then adjusts the temperature of the dry air by thethermostatic bath 30, and simultaneously removes the dry air again Excess moisture in the air, and provide the output constant temperature air to the dewpoint test chamber 40, so that the air in thechamber 42 of the dewpoint test chamber 40 can be sufficiently dry and temperature stable, and the dew point sensor test system is Direct compressed air, no need to prepare a nitrogen barrel to provide nitrogen. In this way, not only can the cost be saved, but also a stable test environment for the dew point sensor can be provided. At the same time, the dewpoint test cavity 40 has a plurality of accommodatingholes 43 for a plurality ofdew point sensors 60 to be tested to be set therein, and the sensing data of eachdew point sensor 60 to be tested can be directly transmitted to theprocessing host 70 for display and recording Next, by this method, the present invention can simultaneously verify multipledew point sensors 60 to be tested, thereby improving verification efficiency and shortening verification time.

請再參閱圖1所示，該乾燥設備20包含有一冷藏式乾燥機21、一吸附式乾燥機22及一化學式乾燥機23。Please refer to FIG. 1 again. Thedrying device 20 includes a refrigerateddryer 21, anadsorption dryer 22 and achemical dryer 23.

該冷藏式乾燥機21具有一第一輸入端及一第一輸出端，該第一輸入端作為該乾燥設備20的乾燥輸入端，連接該空壓機10的壓縮空氣輸出端。該吸附式乾燥機22具有一第二輸入端及一第二輸出端，該第二輸入端連接該冷藏式乾燥機21的第一輸出端。該化學式乾燥機23具有一第三輸入端及一第三輸出端，該第三輸入端連接該吸附式乾燥機22的第二輸出端，且該第三輸出端作為該乾燥設備20的乾燥輸出端，連接該恆溫槽30的恆溫輸入端。The refrigerateddryer 21 has a first input end and a first output end. The first input end serves as the drying input end of thedrying device 20 and is connected to the compressed air output end of theair compressor 10. Theadsorption dryer 22 has a second input end and a second output end. The second input end is connected to the first output end of the refrigerateddryer 21. Thechemical dryer 23 has a third input end and a third output end, the third input end is connected to the second output end of theadsorption dryer 22, and the third output end is used as the drying output of thedrying device 20 Connected to the constant temperature input end of theconstant temperature bath 30.

該空壓機10輸出的壓縮空氣通過該冷藏式乾燥機21、該吸附式乾燥機22及該化學式乾燥機23乾燥後形成該乾燥空氣。在本較佳實施例中，該冷藏式乾燥機21、該吸附式乾燥機22及該化學式乾燥機23為常見的乾燥機種類，在此不再贅述。The compressed air output by theair compressor 10 is dried by the refrigerateddryer 21, theadsorption dryer 22, and thechemical dryer 23 to form the dried air. In the preferred embodiment, the refrigerateddryer 21, theadsorption dryer 22, and thechemical dryer 23 are common types of dryers, which will not be repeated here.

進一步而言，請參閱圖4及圖5所示，該恆溫槽30包含有一桶狀殼體31、一頂蓋32、一第一螺旋管33、一第二螺旋管34、一三通管35及一止水閥36。Further, please refer to FIGS. 4 and 5, thethermostat 30 includes a barrel-shaped housing 31, atop cover 32, a firstspiral tube 33, a secondspiral tube 34, and a three-way tube 35 And awater stop valve 36.

該桶狀殼體31具有一容置空間311，且該桶狀殼體31形成有一開口312，該開口312連通該容置空間311。該頂蓋32具有一輸入孔321及一輸出孔322，且設置於該桶狀殼體31的開口312中。The barrel-shaped casing 31 has anaccommodating space 311, and the barrel-shaped casing 31 is formed with an opening 312, the opening 312 communicates with theaccommodating space 311. Thetop cover 32 has aninput hole 321 and anoutput hole 322 and is disposed in the opening 312 of the barrel-shaped housing 31.

該第一螺旋管33設置於該桶狀殼體31的容置空間311中，且具有相對的一第一端及一第二端。該第一螺旋管33的第一端係穿出該頂蓋32的輸入孔321，且該第一螺旋管33的第一端係作為該恆溫槽30的恆溫輸入端，連接該乾燥設備20的乾燥輸出端。該第二螺旋管34設置於該桶狀殼體31的容置空間311中，且具有相對的一第一端及一第二端。該第二螺旋管34的第一端係穿出該頂蓋32的輸出孔322，且該第二螺旋管34的第一端係作為該恆溫槽30的恆溫輸出端，連接該露點測試腔體40的空氣輸入端。The firstspiral tube 33 is disposed in theaccommodating space 311 of the barrel-shaped housing 31 and has a first end and a second end opposite to each other. The first end of the firsthelical tube 33 passes through theinput hole 321 of thetop cover 32, and the first end of the firsthelical tube 33 serves as a constant temperature input end of theconstant temperature bath 30, which is connected to thedrying device 20 Dry output. The secondspiral tube 34 is disposed in theaccommodating space 311 of the barrel-shaped housing 31 and has a first end and a second end opposite to each other. The first end of the secondhelical tube 34 passes through theoutput hole 322 of thetop cover 32, and the first end of the secondhelical tube 34 serves as the constant temperature output end of thethermostatic bath 30, and is connected to the dewpoint test chamber 40 air input.

該三通管35設置於該桶狀殼體31的容置空間311中，且具有一第一端、一第二端及一第三端。該三通管35的第一端連接該第一螺旋管33的第二端，且該三通管35的第二端連接該第二螺旋管34的第二端。該止水閥36設置於該桶狀殼體31的容置空間31中，且連接該三通管35的第三端。The three-way tube 35 is disposed in theaccommodating space 311 of the barrel-shaped housing 31 and has a first end, a second end, and a third end. The first end of the three-way pipe 35 is connected to the second end of the firstspiral pipe 33, and the second end of the three-way pipe 35 is connected to the second end of the secondspiral pipe 34. Thewater stop valve 36 is disposed in theaccommodating space 31 of the barrel-shaped housing 31 and is connected to the third end of the three-way pipe 35.

在本較佳實施例中，該恆溫槽30的第一螺旋管33的旋轉半徑係大於該恆溫槽30的第二螺旋管34的旋轉半徑，且該第二螺旋管34係設置於該第一螺旋管33的內部。而該恆溫槽30的第一螺旋管33係以順時針方向螺旋，且該恆溫槽30的第二螺旋管34係以逆時針方向螺旋。此外，該恆溫槽30的桶狀殼體的容置空間311中填充有酒精。In the preferred embodiment, the rotation radius of the firstspiral tube 33 of thethermostatic bath 30 is greater than the rotation radius of the secondspiral tube 34 of thethermostatic bath 30, and the secondspiral tube 34 is disposed on the first The inside of thespiral tube 33. The firstspiral tube 33 of thethermostatic bath 30 is spirally clockwise, and the secondspiral tube 34 of thethermostatic bath 30 is spirally counterclockwise. In addition, theaccommodating space 311 of the barrel-shaped housing of thethermostat 30 is filled with alcohol.

該恆溫槽30係利用低溫方式，使該第一螺旋管33及該第二螺旋管34中的空氣中的水份結晶留在該第一螺旋管33及該第二螺旋管34內，藉此產生更乾燥的該恆溫氣體。Thethermostatic bath 30 uses a low-temperature method to cause water crystals in the air in the firstspiral tube 33 and the secondspiral tube 34 to remain in the firstspiral tube 33 and the secondspiral tube 34, thereby This drier constant temperature gas is produced.

此外，用酒精注滿該恆溫槽30的容置空間311，由於酒精比熱低，容易升溫、降溫，因此對於冷卻效果會比純水更好，而且酒精冰點低，透過上下疊合達到把該第一螺旋管33及該第二螺旋管34中的空氣中的水份留在該第一螺旋管33及該第二螺旋管34上。且當該第一螺旋管33及該第二螺旋管34中水份殘留過多時，可以將該止水閥36開啟，讓多餘的水份排出。In addition, theaccommodating space 311 of thethermostatic bath 30 is filled with alcohol. Since alcohol has a lower specific heat, it is easier to heat up and cool down, so it has a better cooling effect than pure water, and the freezing point of alcohol is lower. The water in the air in aspiral tube 33 and the secondspiral tube 34 is left on the firstspiral tube 33 and the secondspiral tube 34. And when there is too much water remaining in the firsthelical tube 33 and the secondhelical tube 34, thewater stop valve 36 can be opened to allow excess water to be discharged.

進一步而言，請參閱圖2及圖3所示，該露點測試腔體40的外殼41係一六角管，且該六角管具有相對的一第一端及一第二端，該六角管的第一端為該空氣輸入端44，而該六角管的第二端形成有一開口45，且該六角管的第二端周緣係沿其徑向向外延伸形成一底座46。在本較佳實施例中，該六角管係採用不鏽鋼管，且其內部係經過拋光處理。Further, as shown in FIGS. 2 and 3, theouter shell 41 of the dewpoint test chamber 40 is a hexagonal tube, and the hexagonal tube has a first end and a second end opposite to each other. The first end is theair input end 44, and the second end of the hexagonal tube is formed with anopening 45, and the peripheral edge of the second end of the hexagonal tube extends radially outward to form abase 46. In the preferred embodiment, the hexagonal pipe system is made of stainless steel, and the inside is polished.

由於該露點測試腔體40整體採用不繡鋼製作，且內部拋光使得氣體不易殘留表面達到穩定狀態，並具有多個容置孔43可同時連接多個待測露點傳感器60，且可接受轉接不同的牙規的使用。此外，該露點測試腔體40係採長條形設計，並利用冷空氣特性，讓上方的該空氣輸入端44導入的該恆溫氣體，向下方的開口45流動，以形成循環，達到氣體流動穩定。Because the dewpoint test chamber 40 is made of stainless steel as a whole, and the internal polishing makes the gas difficult to remain on the surface to reach a stable state, and has a plurality ofaccommodating holes 43 to connect multipledew point sensors 60 to be tested at the same time, and can be transferred Use of different tooth gauges. In addition, the dewpoint test chamber 40 adopts a long strip design, and uses the characteristics of cold air to allow the constant temperature gas introduced from theair input end 44 above to flow to theopening 45 below to form a cycle to achieve stable gas flow .

請參閱圖1所示，該露點傳感器的測試系統還包含有一空氣稀釋器80及一空氣混合器90。該空氣稀釋器80包含有一乾式流量控制單元81、一濕式流量控制單元82及一空氣混合單元83。Please refer to FIG. 1, the test system of the dew point sensor further includes anair diluter 80 and anair mixer 90. Theair diluter 80 includes a dryflow control unit 81, a wetflow control unit 82, and an air mixing unit 83.

該乾式流量控制單元81包含有一乾式輸入端及一乾式輸出端。該乾式輸入端連接該乾燥設備20的乾燥輸出端，接收該乾燥空氣，並產生一乾式空氣由該乾式輸出端輸出，且該乾式流量控制單元81控制該乾式空氣由該乾式輸出端輸出的流量。The dryflow control unit 81 includes a dry input terminal and a dry output terminal. The dry input terminal is connected to the dry output terminal of the dryingdevice 20, receives the dry air, and generates a dry air output from the dry output terminal, and the dryflow control unit 81 controls the flow rate of the dry air output from the dry output terminal .

該濕式流量控制單元82包含有一濕式輸入端及一濕式輸出端。該濕式輸入端連接該乾燥設備的乾燥輸出端，接收該乾燥空氣，並產生一濕式空氣由該濕式輸出端輸出，且該濕式流量控制單元82控制該濕式空氣的濕度以及由該濕式輸出端輸出的流量。The wetflow control unit 82 includes a wet input and a wet output. The wet input end is connected to the drying output end of the drying equipment, receives the dry air, and generates a wet air output from the wet output end, and the wetflow control unit 82 controls the humidity of the wet air and by The flow output from the wet output.

該空氣混合單元83包含有一第一輸入端、一第二輸入端及一輸出端。該空氣混合單元83的一第一輸入端連接至該乾式流量控制單元81的乾式輸出端，接收該乾式空氣，且該空氣混合單元83的第二輸入端連接至該濕式流量控制單元82的濕式輸出端，接收該濕式空氣，該空氣混合單元83進一步混合該乾式空氣及該濕式空氣後，產生一第一混合空氣由該輸出端輸出。The air mixing unit 83 includes a first input end, a second input end and an output end. A first input terminal of the air mixing unit 83 is connected to the dry output terminal of the dryflow control unit 81 to receive the dry air, and a second input terminal of the air mixing unit 83 is connected to the wetflow control unit 82 The wet output end receives the wet air, and after the air mixing unit 83 further mixes the dry air and the wet air, a first mixed air is generated and output by the output end.

該空氣混合器90具有一第一輸入端、一第二輸入端及一混合空氣輸出端。該恆溫槽30的恆溫空氣輸出端係通過該空氣混合器90連接至該露點測試腔體40。該空氣混合器90的第一輸入端係連接至該恆溫槽30的恆溫空氣輸出端，接收該恆溫空氣，且該空氣混合器90的第二輸入端係連接至該空氣稀釋器80的空氣混合單元83的輸出端，接收該第一混合空氣，該空氣混合器90進一步混合該恆溫空氣及該第一混合空氣後，產生一第二混合空氣由該混合空氣輸出端輸出，而該空氣混合器90的混合空氣輸出端係連接至該露點測試腔體40的空氣輸入端44，輸出該第二混合空氣至該露點測試腔體40。Theair mixer 90 has a first input end, a second input end, and a mixed air output end. The constant temperature air output end of theconstant temperature bath 30 is connected to the dewpoint test chamber 40 through theair mixer 90. The first input end of theair mixer 90 is connected to the constant temperature air output end of thethermostatic bath 30 to receive the constant temperature air, and the second input end of theair mixer 90 is connected to the air mixing of theair diluter 80 The output end of the unit 83 receives the first mixed air, and after theair mixer 90 further mixes the constant temperature air and the first mixed air, a second mixed air is generated and output from the mixed air output end, and the air mixer The mixed air output end of 90 is connected to theair input end 44 of the dewpoint test cavity 40, and outputs the second mixed air to the dewpoint test cavity 40.

本發明藉由該空氣稀釋器80裡面的該乾式流量控制單元81及該濕式流量控制單元82調節乾式氣體和濕式氣體的輸出量。且該乾式流量控制單元81及該濕式流量控制單元82分別輸出該乾式空氣及該濕式空氣，並依需求輸出不同比例的乾式空氣和濕式空氣後，通過該空氣混合單元83混合，再與恆溫槽30輸出的恆溫空氣通過該空氣混合氣90做混合，藉此控制改變該露點測試腔體40內的腔室的露點環境。如此一來，本發明便可透過該空氣稀釋器80營造出不同的露點環境，來驗證該些待測露點傳感器60在不同露點環境下感測到的露點溫度與該參考露點傳感器50感測到的露點溫度的差異，確認該些待測露點傳感器60的準確度，並可進一步根據差異對該些待測露點傳感器60進行較正。In the present invention, the output of dry gas and wet gas is adjusted by the dryflow control unit 81 and the wetflow control unit 82 in theair diluter 80. And the dryflow control unit 81 and the wetflow control unit 82 output the dry air and the wet air respectively, and output different proportions of dry air and wet air according to requirements, and then mix by the air mixing unit 83, and then The constant temperature air output from theconstant temperature tank 30 is mixed by theair mixture 90, thereby controlling and changing the dew point environment of the chamber in the dewpoint test chamber 40. In this way, the present invention can create different dew point environments through theair diluter 80 to verify the dew point temperature sensed by thedew point sensor 60 under different dew point environments and the referencedew point sensor 50 The difference in the dew point temperature of the tester confirms the accuracy of thedew point sensors 60 to be measured, and can further correct thedew point sensors 60 to be tested according to the difference.

此外，該露點傳感器的測試系統進一步包含有一壓力傳感器100、一溫度傳感器110及一流量傳感器120。In addition, the test system of the dew point sensor further includes apressure sensor 100, atemperature sensor 110 and aflow sensor 120.

該壓力傳感器100設置於該露點測試腔體40的其中一容置孔43中，並檢測該露點測試腔體40的腔室42中的壓力，產生一壓力訊號。Thepressure sensor 100 is disposed in one of theaccommodating holes 43 of the dewpoint test cavity 40 and detects the pressure in thechamber 42 of the dewpoint test cavity 40 to generate a pressure signal.

該溫度傳感器110設置於該露點測試腔體40的其中一容置孔43中，並檢測該露點測試腔體40的腔室42中的溫度，產生一溫度訊號。Thetemperature sensor 110 is disposed in one of the receiving holes 43 of the dewpoint test cavity 40 and detects the temperature in thechamber 42 of the dewpoint test cavity 40 to generate a temperature signal.

該流量傳感器120設置於該空氣混合器90的混合空氣輸出端與該露點測試腔體40的空氣輸入端44之間，並檢測該第二混合空氣流入該露點測試腔體40的流量，產生一流量訊號。Theflow sensor 120 is disposed between the mixed air output end of theair mixer 90 and theair input end 44 of the dewpoint test cavity 40, and detects the flow rate of the second mixed air flowing into the dewpoint test cavity 40, generating a Traffic signal.

該處理主機70進一步電連接該壓力傳感器100、該溫度傳感器110及該流量傳感器120，以接收並顯示該壓力訊號、該溫度訊號及該流量訊號。且該處理主機70進一步根據該壓力訊號判斷該露點測試腔體40的腔室42中的壓力是否在一壓力設定範圍內，藉此確認該露點測試腔體40的腔室42中的壓力一致性的穩定，有助於該露點測試腔體40的腔室42中的氣體平衡穩定。此外，當該處理主機70判斷該露點測試腔體40的腔室42中的壓力未在該壓力設定範圍內時，係產生一提醒訊號，藉此提醒使用者目前該露點測試腔體40的腔室42中的壓力在一異常狀態，供使用者參考，並提醒使用者前往處理。Theprocessing host 70 is further electrically connected to thepressure sensor 100, thetemperature sensor 110 and theflow sensor 120 to receive and display the pressure signal, the temperature signal and the flow signal. And theprocessing host 70 further determines whether the pressure in thechamber 42 of the dewpoint test chamber 40 is within a pressure setting range according to the pressure signal, thereby confirming the pressure consistency in thechamber 42 of the dewpoint test chamber 40 The stability of the gas helps stabilize the gas balance in thechamber 42 of the dewpoint test chamber 40. In addition, when theprocessing host 70 determines that the pressure in thechamber 42 of the dewpoint test cavity 40 is not within the pressure setting range, a reminder signal is generated to remind the user of the current cavity of the dewpoint test cavity 40 The pressure in thechamber 42 is in an abnormal state for the user's reference and reminds the user to proceed.

由於該露點測試腔體40的腔室42中的溫度的變化會影響相對濕度的改變，進而造成該露點測試腔體40的腔室42中的露點溫度的改變，特別是在露點溫度低的時候，該露點測試腔體40的腔室42中的溫度對露點溫度的影響會更多。因此該處理主機70還根據該溫度訊號判斷該露點測試腔體40的腔室42中的溫度是否在一溫度設定範圍內，藉此確認該露點測試腔體40的腔室42中的溫度一致性的穩定，有助於該露點測試腔體40的腔室42中的露點溫度平衡穩定。此外，當該處理主機70判斷該露點測試腔體40的腔室42中的溫度未在該溫度設定範圍內時，係產生一提醒訊號，藉此提醒使用者目前該露點測試腔體40的腔室42中的溫度在一異常狀態，供使用者參考，並提醒使用者前往處理。Since the temperature change in thechamber 42 of the dewpoint test chamber 40 affects the change in relative humidity, which in turn causes the change in the dew point temperature in thechamber 42 of the dewpoint test chamber 40, especially when the dew point temperature is low The temperature in thechamber 42 of the dewpoint test chamber 40 will have more influence on the dew point temperature. Therefore, theprocessing host 70 also determines whether the temperature in thechamber 42 of the dewpoint test chamber 40 is within a temperature setting range according to the temperature signal, thereby confirming the temperature consistency in thechamber 42 of the dewpoint test chamber 40 The stability of the temperature helps to stabilize the dew point temperature in thechamber 42 of the dewpoint test chamber 40. In addition, when theprocessing host 70 determines that the temperature in thechamber 42 of the dewpoint test cavity 40 is not within the temperature setting range, a reminder signal is generated to remind the user of the current cavity of the dewpoint test cavity 40 The temperature in thechamber 42 is in an abnormal state for the user to refer to, and reminds the user to proceed.

而該處理主機70進一步根據該流量訊號判斷該第二混合空氣流入該露點測試腔體40的流量是否在一流量設定範圍內，藉此確認流入該露點測試腔體40的腔室42中的第二混合空氣的氣體量，以確保該露點測試腔體40的腔室42中的氣體平衡穩定。此外，當該處理主機70判斷該第二混合空氣流入該露點測試腔體40的流量未在該流量設定範圍內時，係產生一提醒訊號，藉此提醒使用者目前該第二混合空氣流入該露點測試腔體40的流量在一異常狀態，供使用者參考，並提醒使用者前往處理。Theprocessing host 70 further determines whether the flow rate of the second mixed air flowing into the dewpoint test chamber 40 is within a flow setting range according to the flow signal, thereby confirming that the first flow into thechamber 42 of the dewpoint test chamber 40 Mix the gas volume of the air to ensure that the gas balance in thechamber 42 of the dewpoint test chamber 40 is stable. In addition, when theprocessing host 70 determines that the flow rate of the second mixed air flowing into the dewpoint test chamber 40 is not within the flow setting range, a reminder signal is generated to remind the user that the second mixed air flows into the current The flow rate of the dewpoint test chamber 40 is in an abnormal state for the user's reference and reminds the user to proceed.

進一步而言，本發明的露點傳感器的測試系統還包含有一露點儀130。該露點儀130連接至該露點測試腔體40，並感測該露點測試腔體40的腔室42的露點溫度，以產生一露點訊號。且該處理主機70進一步電連接該露點儀130，以接收並顯示該露點訊號。Further, the test system of the dew point sensor of the present invention further includes adew point meter 130. Thedew point meter 130 is connected to the dewpoint test cavity 40 and senses the dew point temperature of thechamber 42 of the dewpoint test cavity 40 to generate a dew point signal. And theprocessing host 70 is further electrically connected to thedew point meter 130 to receive and display the dew point signal.

由於該露點儀130具有較高的精密度，因此該露點儀130量測到的露點溫度相對而言係較為可靠的，故本發明進一步通過該露點儀130量測一個更具有參考價值的露點溫度作為標準，用於對該些待測露點傳感器60進行較正。Since thedew point meter 130 has high precision, the dew point temperature measured by thedew point meter 130 is relatively reliable, so the present invention further measures a dew point temperature with more reference value through thedew point meter 130 As a standard, it is used to correct thedew point sensors 60 to be measured.

以上所述僅是本發明的較佳實施例而已，並非對本發明做任何形式上的限制，雖然本發明已以較佳實施例揭露如上，然而並非用以限定本發明，任何熟悉本專業的技術人員，在不脫離本發明技術方案的範圍內，當可利用上述揭示的技術內容作出些許更動或修飾為等同變化的等效實施例，但凡是未脫離本發明技術方案的內容，依據本發明的技術實質對以上實施例所作的任何簡單修改、等同變化與修飾，均仍屬於本發明技術方案的範圍內。The above are only preferred embodiments of the present invention, and do not limit the present invention in any form. Although the present invention has been disclosed in the preferred embodiments as above, it is not intended to limit the present invention. Anyone who is familiar with this technology Personnel, within the scope of not departing from the technical solution of the present invention, when the technical contents disclosed above can be used to make some changes or modifications to equivalent embodiments of equivalent changes, but any content that does not depart from the technical solution of the present invention, according to the present invention Technical essence Any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.

10:空壓機20:乾燥設備21:冷藏式乾燥機22:吸附式乾燥機23:化學式乾燥機30:恆溫槽31:桶狀殼體311:容至哭間312:開口32:頂蓋321:輸入孔322:輸出孔33:第一螺旋管34:第二螺旋管35:三通管36:止水閥40:露點測試腔體41:外殼42:腔室43:容置孔44:空氣輸入端45:開口46:底座50:參考露點傳感器60:待測露點傳感器70:處理主機80:空氣稀釋器81:乾式流量控制單元82:濕式流量控制單元83:空氣混合單元90:空氣混合器100:壓力傳感器110:溫度傳感器120:流量傳感器130:露點儀10: Air compressor 20: Drying equipment 21: Refrigerated dryer 22: Adsorption dryer 23: Chemical dryer 30: Constant temperature bath 31: Barrel-shaped housing 311: Capacity to crying room 312: Opening 32: Top cover 321 : Input hole 322: Output hole 33: First spiral tube 34: Second spiral tube 35: Three-way tube 36: Water stop valve 40: Dew point test chamber 41: Housing 42: Chamber 43: Receiving hole 44: Air Input 45: Opening 46: Base 50: Reference dew point sensor 60: Dew point sensor to be measured 70: Processing unit 80: Air diluter 81: Dry flow control unit 82: Wet flow control unit 83: Air mixing unit 90: Air mixing 100: Pressure sensor 110: Temperature sensor 120: Flow sensor 130: Dew point meter

圖1係本發明較佳實施例之系統方塊示意圖。 圖2係本發明較佳實施例之露點測試腔體的外觀示意圖。 圖3係本發明較佳實施例之露點測試腔體的側視示意圖。 圖4係本發明較佳實施例之恆溫槽的外觀示意圖。 圖5係本發明較佳實施例之恆溫槽的內部空間示意圖。FIG. 1 is a schematic block diagram of a system according to a preferred embodiment of the present invention. FIG. 2 is a schematic view of the appearance of the dew point test cavity of the preferred embodiment of the present invention. FIG. 3 is a schematic side view of the dew point test cavity of the preferred embodiment of the present invention. 4 is a schematic view of the appearance of a thermostatic bath in accordance with a preferred embodiment of the present invention. FIG. 5 is a schematic diagram of the internal space of the thermostatic bath according to the preferred embodiment of the present invention.

10:空壓機10: Air compressor

20:乾燥設備20: Drying equipment

21:冷藏式乾燥機21: Refrigerated dryer

22:吸附式乾燥機22: Adsorption dryer

23:化學式乾燥機23: Chemical dryer

30:恆溫槽30: Constant temperature bath

40:露點測試腔體40: Dew point test chamber

50:參考露點傳感器50: Reference dew point sensor

60:待測露點傳感器60: Dew point sensor to be measured

70:處理主機70: processing host

80:空氣稀釋器80: Air thinner

81:乾式流量控制單元81: Dry flow control unit

82:濕式流量控制單元82: Wet flow control unit

83:空氣混合單元83: Air mixing unit

90:空氣混合器90: air mixer

100:壓力傳感器100: pressure sensor

110:溫度傳感器110: temperature sensor

120:流量傳感器120: flow sensor

130:露點儀130: Dew point meter

Claims (10)

Translated fromChinese

一種露點傳感器的測試系統，包含有： 一空壓機，具有一壓縮空氣輸出端，並產生一壓縮空氣由該壓縮空氣輸出端輸出； 一乾燥設備，具有一乾燥輸入端及一乾燥輸出端，該乾燥輸入端連接該空壓機的壓縮空氣輸出端，以接收該壓縮空氣，並產生一乾燥空氣由該乾燥輸出端輸出； 一恆溫槽，具有一恆溫輸入端及一恆溫輸出端，該恆溫輸入端連接該乾燥設備的乾燥輸出端，以接收該乾燥空氣，並產生一恆溫空氣由該恆溫輸出端輸出； 一露點測試腔體，具有一外殼，該外殼內具有一腔室，且該外殼上形成有複數容置孔及一空氣輸入端，而各該容置孔及該空氣輸入端分別連通該腔室；其中該露點測試腔體的空氣輸入端連接至該恆溫槽的恆溫輸出端，接收該恆溫空氣； 一參考露點傳感器，設置於該露點測試腔體的其中一容置孔中，並感測該露點測試腔體的腔室的露點溫度，以產生一參考露點訊號； 一待測露點傳感器，設置於該露點測試腔體的其中一容置孔中，並感測該露點測試腔體的腔室的露點溫度，以產生一待測露點訊號； 一處理主機，電連接該參考露點傳感器及該待測露點傳感器，以接收並顯示該參考露點訊號及該待測露點訊號。A test system for a dew point sensor includes: an air compressor with a compressed air output and generating a compressed air output from the compressed air output; a drying device with a drying input and a drying output, the The drying input end is connected to the compressed air output end of the air compressor to receive the compressed air and generate a dry air to be output from the drying output end; a constant temperature bath with a constant temperature input end and a constant temperature output end, the constant temperature input Connected to the drying output of the drying equipment to receive the dry air and generate a constant temperature air output from the constant temperature output; a dew point test chamber with a housing, the housing has a chamber, and the housing A plurality of accommodating holes and an air input end are formed, and each accommodating hole and the air input end are respectively connected to the chamber; wherein the air input end of the dew point test chamber is connected to the thermostatic output end of the thermostatic bath to receive The constant temperature air; a reference dew point sensor, set in one of the receiving holes of the dew point test cavity, and sensing the dew point temperature of the chamber of the dew point test cavity to generate a reference dew point signal; a dew point to be measured The sensor is arranged in one of the accommodating holes of the dew point test cavity and senses the dew point temperature of the chamber of the dew point test cavity to generate a dew point signal to be measured; a processing host is electrically connected to the reference dew point sensor And the dew point sensor to be measured to receive and display the reference dew point signal and the dew point signal to be measured.如請求項1所述之露點傳感器的測試系統，其中該乾燥設備包含有： 一冷藏式乾燥機，具有一第一輸入端及一第一輸出端，該第一輸入端作為該乾燥設備的乾燥輸入端，連接該空壓機的壓縮空氣輸出端； 一吸附式乾燥機，具有一第二輸入端及一第二輸出端，該第二輸入端連接該冷藏式乾燥機的第一輸出端； 一化學式乾燥機，具有一第三輸入端及一第三輸出端，該第三輸入端連接該吸附式乾燥機的第二輸出端，且該第三輸出端作為該乾燥設備的乾燥輸出端，連接該恆溫槽的恆溫輸入端； 其中該空壓機輸出的壓縮空氣通過該冷藏式乾燥機、該吸附式乾燥機及該化學式乾燥機乾燥後形成該乾燥空氣。The test system of the dew point sensor according to claim 1, wherein the drying equipment includes: a refrigerated dryer having a first input terminal and a first output terminal, the first input terminal is used for drying the drying equipment The input end is connected to the compressed air output end of the air compressor; an adsorption dryer has a second input end and a second output end, and the second input end is connected to the first output end of the refrigerated dryer; A chemical dryer has a third input end and a third output end, the third input end is connected to the second output end of the adsorption dryer, and the third output end is used as the drying output end of the drying equipment, Connected to the constant temperature input end of the constant temperature bath; wherein the compressed air output by the air compressor is dried by the refrigerated dryer, the adsorption dryer and the chemical dryer to form the dried air.如請求項1所述之露點傳感器的測試系統，其中該恆溫槽包含有： 一桶狀殼體，具有一容置空間，且該桶狀殼體形成有一開口，該開口連通該容置空間； 一頂蓋，具有一輸入孔及一輸出孔，且設置於該桶狀殼體的開口中； 一第一螺旋管，設置於該桶狀殼體的容置空間中，且具有相對的一第一端及一第二端；其中該第一螺旋管的第一端係穿出該頂蓋的輸入孔，且該第一螺旋管的第一端係作為該恆溫槽的恆溫輸入端，連接該乾燥設備的乾燥輸出端； 一第二螺旋管，設置於該桶狀殼體的容置空間中，且具有相對的一第一端及一第二端；其中該第二螺旋管的第一端係穿出該頂蓋的輸出孔，且該第二螺旋管的第一端係作為該恆溫槽的恆溫輸出端，連接該露點測試腔體的空氣輸入端； 一三通管，設置於該桶狀殼體的容置空間中，且具有一第一端、一第二端及一第三端；其中該三通管的第一端連接該第一螺旋管的第二端，且該三通管的第二端連接該第二螺旋管的第二端； 一止水閥，設置於該桶狀殼體的容置空間中，且連接該三通管的第三端。The test system of the dew point sensor according to claim 1, wherein the thermostatic bath includes: a barrel-shaped housing having an accommodating space, and the barrel-shaped housing is formed with an opening which communicates with the accommodating space; A top cover has an input hole and an output hole, and is arranged in the opening of the barrel-shaped casing; a first spiral tube is arranged in the accommodating space of the barrel-shaped casing, and has a first One end and a second end; wherein the first end of the first spiral tube passes through the input hole of the top cover, and the first end of the first spiral tube is used as the constant temperature input end of the constant temperature bath, connected to the A drying output end of the drying equipment; a second spiral tube, which is arranged in the accommodating space of the barrel-shaped casing, and has a first end and a second end opposite to each other; wherein the first end of the second spiral tube The output hole of the top cover is penetrated, and the first end of the second spiral tube is used as the constant temperature output end of the constant temperature bath, and is connected to the air input end of the dew point test chamber; a three-way tube is provided in the barrel In the accommodating space of the shell, and has a first end, a second end and a third end; wherein the first end of the tee tube is connected to the second end of the first helical tube, and the tee The second end of the tube is connected to the second end of the second helical tube; a water stop valve is provided in the accommodating space of the barrel-shaped housing and is connected to the third end of the three-way tube.如請求項3所述之露點傳感器的測試系統，其中該恆溫槽的第一螺旋管的旋轉半徑係大於該恆溫槽的第二螺旋管的旋轉半徑，且該第二螺旋管係設置於該第一螺旋管的內部。The test system of the dew point sensor according to claim 3, wherein the radius of rotation of the first spiral tube of the thermostatic bath is greater than the radius of rotation of the second spiral tube of the thermostatic bath, and the second spiral tube is disposed on the first The inside of a spiral tube.如請求項3所述之露點傳感器的測試系統，其中該恆溫槽的桶狀殼體的容置空間中填充有酒精。The test system of the dew point sensor according to claim 3, wherein the accommodating space of the barrel-shaped housing of the thermostat is filled with alcohol.如請求項3所述之露點傳感器的測試系統，其中： 該恆溫槽的第一螺旋管係以順時針方向螺旋； 該恆溫槽的第二螺旋管係以逆時針方向螺旋。The test system of the dew point sensor according to claim 3, wherein: the first spiral tube of the thermostatic bath is spirally clockwise; the second spiral tube of the thermostatic bath is spirally counterclockwise.如請求項1所述之露點傳感器的測試系統，其中該露點測試腔體的外殼係一六角管，且該六角管具有相對的一第一端及一第二端，該六角管的第一端為該空氣輸入端，而該六角管的第二端形成有一開口，且該六角管的第二端周緣係沿其徑向向外延伸形成一底座。The test system of the dew point sensor according to claim 1, wherein the outer shell of the dew point test cavity is a hexagonal tube, and the hexagonal tube has a first end and a second end opposite to each other, the first of the hexagonal tube The end is the air input end, and the second end of the hexagonal tube is formed with an opening, and the peripheral edge of the second end of the hexagonal tube extends radially outward to form a base.如請求項1所述之露點傳感器的測試系統，進一步包含有： 一空氣稀釋器，包含有： 　　一乾式流量控制單元，包含有一乾式輸入端及一乾式輸出端；其中該乾式輸入端連接該乾燥設備的乾燥輸出端，接收該乾燥空氣，並產生一乾式空氣由該乾式輸出端輸出，且該乾式流量控制單元控制該乾式空氣由該乾式輸出端輸出的流量； 　　一濕式流量控制單元，包含有一濕式輸入端及一濕式輸出端；其中該濕式輸入端連接該乾燥設備的乾燥輸出端，接收該乾燥空氣，並產生一濕式空氣由該濕式輸出端輸出，且該濕式流量控制單元控制該濕式空氣的濕度以及由該濕式輸出端輸出的流量； 　　一空氣混合單元，包含有一第一輸入端、一第二輸入端及一輸出端；其中該空氣混合單元的一第一輸入端連接至該乾式流量控制單元的乾式輸出端，接收該乾式空氣，且該空氣混合單元的第二輸入端連接至該濕式流量控制單元的濕式輸出端，接收該濕式空氣，該空氣混合單元進一步混合該乾式空氣及該濕式空氣後，產生一第一混合空氣由該空氣混合單元的輸出端輸出； 一空氣混合器，具有一第一輸入端、一第二輸入端及一混合空氣輸出端；其中該恆溫槽的恆溫空氣輸出端係通過該空氣混合器連接至該露點測試腔體，該空氣混合器的第一輸入端係連接至該恆溫槽的恆溫空氣輸出端，接收該恆溫空氣，且該空氣混合器的第二輸入端係連接至該空氣稀釋器的空氣混合單元的輸出端，接收該第一混合空氣，該空氣混合器進一步混合該恆溫空氣及該第一混合空氣後，產生一第二混合空氣由該混合空氣輸出端輸出，而該空氣混合器的混合空氣輸出端係連接至該露點測試腔體的空氣輸入端，輸出該第二混合空氣至該露點測試腔體。The test system of the dew point sensor as described in claim 1, further comprising: an air diluter, including: a dry flow control unit, including a dry input and a dry output; wherein the dry input is connected to the dry The dry output end of the device receives the dry air and generates a dry air output from the dry output end, and the dry flow control unit controls the flow rate of the dry air output from the dry output end; 　　 A wet flow control unit, including There is a wet input end and a wet output end; wherein the wet input end is connected to the drying output end of the drying equipment, receives the dry air, and generates a wet air output from the wet output end, and the wet type The flow control unit controls the humidity of the wet air and the flow output from the wet output; 　　 An air mixing unit includes a first input end, a second input end, and an output end; wherein one of the air mixing unit The first input is connected to the dry output of the dry flow control unit to receive the dry air, and the second input of the air mixing unit is connected to the wet output of the wet flow control unit to receive the wet air After the air mixing unit further mixes the dry air and the wet air, a first mixed air is generated and output from the output end of the air mixing unit; an air mixer has a first input end and a second input end And a mixed air output end; wherein the constant temperature air output end of the constant temperature bath is connected to the dew point test chamber through the air mixer, and the first input end of the air mixer is connected to the constant temperature air output end of the constant temperature bath , Receiving the constant temperature air, and the second input end of the air mixer is connected to the output end of the air mixing unit of the air diluter, receiving the first mixed air, the air mixer further mixes the constant temperature air and the first After a mixed air, a second mixed air is generated and output from the mixed air output end, and the mixed air output end of the air mixer is connected to the air input end of the dew point test chamber to output the second mixed air to the Dew point test cavity.如請求項8所述之露點傳感器的測試系統，進一步包含有： 一壓力傳感器，設置於該露點測試腔體的其中一容置孔中，並檢測該露點測試腔體的腔室中的壓力，產生一壓力訊號； 一溫度傳感器，設置於該露點測試腔體的其中一容置孔中，並檢測該露點測試腔體的腔室中的溫度，產生一溫度訊號； 一流量傳感器，設置於該空氣混合器的混合空氣輸出端與該露點測試腔體的空氣輸入端之間，並檢測該第二混合空氣流入該露點測試腔體的流量，產生一流量訊號； 其中該處理主機進一步電連接該壓力傳感器、該溫度傳感器及該流量傳感器，以接收並顯示該壓力訊號、該溫度訊號及該流量訊號。The test system of the dew point sensor according to claim 8, further comprising: a pressure sensor disposed in one of the receiving holes of the dew point test cavity and detecting the pressure in the chamber of the dew point test cavity, Generate a pressure signal; a temperature sensor, set in one of the accommodating holes of the dew point test cavity, and detect the temperature in the chamber of the dew point test cavity, generate a temperature signal; a flow sensor, set in the Between the mixed air output end of the air mixer and the air input end of the dew point test cavity, and detecting the flow rate of the second mixed air flowing into the dew point test cavity to generate a flow signal; wherein the processing host is further electrically connected to the The pressure sensor, the temperature sensor and the flow sensor receive and display the pressure signal, the temperature signal and the flow signal.如請求項1所述之露點傳感器的測試系統，進一步包含有： 一露點儀，連接至該露點測試腔體，並感測該露點測試腔體的腔室的露點溫度，以產生一露點訊號； 其中該處理主機進一步電連接該露點儀，以接收並顯示該露點訊號。The test system of the dew point sensor according to claim 1, further comprising: a dew point meter connected to the dew point test cavity and sensing the dew point temperature of the chamber of the dew point test cavity to generate a dew point signal; The processing host is further electrically connected to the dew point meter to receive and display the dew point signal.

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