本文揭露的實施例係關於一種機器人和機器人安裝方法。The embodiments disclosed herein relate to a robot and robot mounting method.
搬運諸如基板之類的工件的搬運機器人傳統上被稱為工業機器人。作為搬運機器人，已知有例如構造成沿水平方向伸展和縮回的水平多關節機器人。水平多關節機器人包括在其末端處設置有用於固持工件的手的臂單元。A handling robot that carries a workpiece such as a substrate is conventionally referred to as an industrial robot. As the transport robot, for example, a horizontal articulated robot configured to extend and retract in the horizontal direction is known. The horizontal articulated robot includes an arm unit provided at its end with a hand for holding a workpiece.
搬運機器人被使用在例如半導體製造設備或者液晶面板製造設備中，以搬運諸如半導體晶片或玻璃基板的工件。在這些設備中，通常的情況是工件在減壓真空室內進行處理。為此，搬運機器人通常設置在真空室內。搬運機器人被稱為真空機器人(例如參見日本特開2011-101912號公報)。The handling robot is used, for example, in a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus to carry a workpiece such as a semiconductor wafer or a glass substrate. In these devices, it is often the case that the workpiece is processed in a reduced pressure vacuum chamber. To this end, the handling robot is usually placed in a vacuum chamber. The handling robot is called a vacuum robot (see, for example, Japanese Laid-Open Patent Publication No. 2011-101912).
在搬運機器人(真空機器人)安裝在真空室內的情況下，通常的情況是，搬運機器人藉由使用頂棚吊車被升起並且移動到真空室上方。然後，搬運機器人被降下並且放入真空室中。In the case where the transport robot (vacuum robot) is installed in the vacuum chamber, it is usually the case that the transport robot is raised by using the ceiling crane and moved above the vacuum chamber. The handling robot is then lowered and placed in a vacuum chamber.
近年來，諸如玻璃基板和半導體晶片的工件的尺寸變得更大，因而搬運機器人和真空室的尺寸也趨於變得更大。這可能使得難以將搬運機器人安裝在真空室內。In recent years, the size of workpieces such as glass substrates and semiconductor wafers has become larger, and thus the size of the handling robot and the vacuum chamber has also tended to become larger. This may make it difficult to install the handling robot in the vacuum chamber.
例如，搬運機器人隨著其變得更大而高度趨於增大。為了將大型搬運機器人定位在真空室上方，因此期望的是擴大用於運入搬運機器人的空間，即，位於真空室的上表面和供安裝真空室的房間的頂棚表面之間的空間。然而，如果搬運機器人的高度增加，則用於容納搬運機器人的真空室的高度變得更大，但頂棚表面的高度保持不變。這使得難以擴大用於運入搬運機器人的空間。For example, the handling robot tends to increase as it becomes larger.In order to position the large handling robot above the vacuum chamber, it is desirable to expand the space for transporting the handling robot, that is, the space between the upper surface of the vacuum chamber and the ceiling surface of the room in which the vacuum chamber is installed. However, if the height of the handling robot increases, the height of the vacuum chamber for accommodating the handling robot becomes larger, but the height of the ceiling surface remains unchanged. This makes it difficult to expand the space for transporting the handling robot.
如上所述，如果搬運機器人的尺寸變得更大，則可能變得難以將機器人安裝在真空室內。As described above, if the size of the handling robot becomes larger, it may become difficult to mount the robot in the vacuum chamber.
揭露於本文中的實施例提供了一種能夠被容易地安裝在室中的機器人以及能夠將機器人容易地安裝在室內的機器人安裝方法。The embodiment disclosed herein provides a robot that can be easily installed in a room and a robot mounting method that can easily mount the robot indoors.
根據本發明的一個態樣，一種機器人被提供，該機器人包括：基座單元，該基座單元從一界定一作業空間的室的底面部分的下方被升起並且連接到該室的該底面部分；及臂單元，該臂單元被從該室的上方運入該室中，並且連接到與該室的該底面部分連接的該基座單元的上部。According to one aspect of the invention, a robot is provided, the robot comprising: a base unit that is raised from below a bottom portion of a chamber defining a work space and connected to the bottom portion of the chamber And an arm unit that is carried into the chamber from above the chamber and to an upper portion of the base unit that is coupled to the bottom portion of the chamber.
藉由本文所揭露的實施例，可以提供一種能夠被容易地安裝在室內的機器人和能夠將機器人容易地安裝在室內的機器人安裝方法。With the embodiments disclosed herein, it is possible to provide a robot that can be easily installed indoors and a robot mounting method that can easily mount the robot indoors.
現將參照形成本說明書的一部分的附圖來詳細地描述本文揭露的機器人和機器人安裝方法的實施例。本揭露內容不限於以下將描述的實施例。A detailed description will now be made with reference to the accompanying drawings which form a part of this specification.Embodiments of the robot and robot mounting method disclosed herein. The disclosure is not limited to the embodiments that will be described below.
首先，將參照圖1描述根據本實施例的機器人的構造。圖1是示出根據該實施例的機器人的示意性說明圖。First, the configuration of the robot according to the present embodiment will be described with reference to Fig. 1 . FIG. 1 is a schematic explanatory diagram showing a robot according to this embodiment.
如圖1所示，機器人1是一水平式多關節機器人，該機器人包括：臂單元20，該臂單元具有兩個能夠沿水平方向伸展和縮回的可伸展臂；以及主體單元10，該主體單元用於支承臂單元20。在本實施例中，主體單元10構成基座單元。As shown in FIG. 1, the robot 1 is a horizontal articulated robot including: an arm unit 20 having two extendable arms that can be extended and retracted in a horizontal direction; and a main body unit 10, the main body The unit is used to support the arm unit 20. In the present embodiment, the main body unit 10 constitutes a base unit.
主體單元10包括安裝在管狀殼體11內的下述升降裝置40(參見圖3)。主體單元10藉由使用升降裝置40而沿著垂直方向上下移動臂單元20。以下將參照圖3更詳細地描述升降裝置40。The main body unit 10 includes a lifting device 40 (see FIG. 3) installed in the tubular housing 11. The main body unit 10 moves the arm unit 20 up and down in the vertical direction by using the lifting device 40. The lifting device 40 will be described in more detail below with reference to FIG.
在殼體11的上部中形成凸緣部12。凸緣部12借助螺栓等連接到形成於真空室30中(參見圖2)作為單元連接開口的開口部31的周緣，該真空室30中界定有一作業空間。因此，該機器人1被安裝在該真空室30中。稍後將參照圖2更詳細地描述以上構造。稍後將參照圖5A至圖5C更詳細地描述將主體單元10安裝到真空室30的方法。A flange portion 12 is formed in an upper portion of the housing 11. The flange portion 12 is connected to a periphery of an opening portion 31 formed as a unit connection opening in the vacuum chamber 30 (see FIG. 2) by means of a bolt or the like, and a working space is defined in the vacuum chamber 30. Therefore, the robot 1 is installed in the vacuum chamber 30. The above configuration will be described in more detail later with reference to FIG. 2. A method of mounting the main body unit 10 to the vacuum chamber 30 will be described in more detail later with reference to FIGS. 5A through 5C.
臂單元20是借助稍後被描述的升降凸緣單元15而連接到主體單元10的單元。臂單元20包括臂基座21、第一臂22、第二臂23、手基座24以及輔助臂部25。The arm unit 20 is a unit that is connected to the main body unit 10 by means of a lifting flange unit 15 to be described later. The arm unit 20 includes an arm base 21, a first arm 22, a second arm 23, a hand base 24, and an auxiliary arm portion 25.
臂基座21以可旋轉的方式支承在升降凸緣單元15上。臂基座21設置有擺動裝置60(參見圖3)，該擺動裝置包括馬達61a、減速器61b和擺動軸62。臂基座21藉由使用擺動裝置60而進行轉動。稍後將參照圖3更詳細地描述擺動裝置60的構造。The arm base 21 is rotatably supported by the lift flange unit 15on. The arm base 21 is provided with a swinging device 60 (see FIG. 3) including a motor 61a, a speed reducer 61b, and a swing shaft 62. The arm base 21 is rotated by using the swinging device 60. The configuration of the swinging device 60 will be described in more detail later with reference to FIG.
第一臂22具有基端部，該基端部藉由減速器可旋轉地連接到臂基部21的上部。第二臂23具有基端部，該基端部藉由減速器可旋轉地連接到第一臂22的上部末端部。The first arm 22 has a base end portion rotatably coupled to an upper portion of the arm base portion 21 by a speed reducer. The second arm 23 has a base end portion rotatably coupled to the upper end portion of the first arm 22 by a speed reducer.
手基座24以可旋轉的方式連接到第二臂23的末端部。在手基座24的上部中設置有用於保持諸如玻璃基板或半導體晶片的工件的作為末端執行器的手24a。手基座24借助第一臂22和第二臂23的旋轉運動而移動。The hand base 24 is rotatably coupled to the distal end portion of the second arm 23. A hand 24a as an end effector for holding a workpiece such as a glass substrate or a semiconductor wafer is disposed in an upper portion of the hand base 24. The hand base 24 is moved by the rotational movement of the first arm 22 and the second arm 23.
機器人1構造成借助藉由使用單個馬達而同步地操作設置在第一臂22的基端部中的減速器和設置在第一臂22的末端部中的減速器而直線移動手24a。The robot 1 is configured to linearly move the hand 24a by synchronously operating a speed reducer provided in the base end portion of the first arm 22 and a speed reducer provided in the tip end portion of the first arm 22 by using a single motor.
更具體地，機器人1轉動第一臂22和第二臂23，從而第二臂23相對於第一臂22的轉動量變成第一臂22相對於壁基座21的轉動量的兩倍大。例如，第一臂22和第二臂23轉動，使得如果第一臂22相對於臂基座21轉動α度，則第二臂23相對於第一臂22轉動2α度。因此，該手24a被直線地移動。More specifically, the robot 1 rotates the first arm 22 and the second arm 23 such that the amount of rotation of the second arm 23 with respect to the first arm 22 becomes twice as large as the amount of rotation of the first arm 22 with respect to the wall base 21. For example, the first arm 22 and the second arm 23 are rotated such that if the first arm 22 is rotated by a degree with respect to the arm base 21, the second arm 23 is rotated by 2α with respect to the first arm 22. Therefore, the hand 24a is moved linearly.
為了防止弄髒真空室30的內部，而在保持於大氣壓下的第一臂22內設置有諸如馬達和減速器的驅動裝置。因此，即使機器人1保持在減壓環境下，也可以防止諸如油脂之類的潤滑劑變乾並且防止真空室30的內部被污物污染。In order to prevent soiling of the inside of the vacuum chamber 30, a driving device such as a motor and a speed reducer is disposed in the first arm 22 held at atmospheric pressure. Therefore, even if the robot 1 is kept under a reduced pressure environment, it is possible to prevent such asThe lubricant such as grease is dried and prevents the inside of the vacuum chamber 30 from being contaminated by dirt.
輔助臂部25是連桿機構，該連桿機構與第一臂22和第二臂23的轉動運動聯動地限制手基座24的轉動，使得手24a在其運動期間能夠始終面向特定方向。The auxiliary arm portion 25 is a link mechanism that restricts the rotation of the hand base 24 in conjunction with the rotational movement of the first arm 22 and the second arm 23 such that the hand 24a can always face a particular direction during its movement.
更具體地，輔助臂部25包括第一連桿25a、中間連桿25b以及第二連桿25c。More specifically, the auxiliary arm portion 25 includes a first link 25a, an intermediate link 25b, and a second link 25c.
第一連桿25a的基端部以可旋轉的方式連接到臂基座21。第一連桿25a的末端部以可旋轉的方式連接到中間連桿25b的末端部。中間連桿25b的基端部以與使第一臂22和第二臂23互連的連接軸線同軸的關係樞轉。中間連桿25b的末端部以可旋轉的方式連接到第一連桿25a的末端部。The base end portion of the first link 25a is rotatably coupled to the arm base 21. The distal end portion of the first link 25a is rotatably coupled to the distal end portion of the intermediate link 25b. The base end portion of the intermediate link 25b is pivoted in a coaxial relationship with the connection axis interconnecting the first arm 22 and the second arm 23. The distal end portion of the intermediate link 25b is rotatably coupled to the distal end portion of the first link 25a.
第二連桿25c的基端部以可旋轉的方式連接到中間連桿25b。第二連桿25c的末端部以可旋轉的方式連接到手基座24的基端部。手基座24的末端部以可旋轉的方式連接到第二臂23的末端部。手基座24的基端部以可旋轉的方式連接到第二連桿25c。The base end portion of the second link 25c is rotatably coupled to the intermediate link 25b. The distal end portion of the second link 25c is rotatably coupled to the base end portion of the hand base 24. The distal end portion of the hand base 24 is rotatably coupled to the distal end portion of the second arm 23. The base end portion of the hand base 24 is rotatably coupled to the second link 25c.
第一連桿25a、手基座21、第一臂22和中間連桿25b構成第一平行連桿機構。換言之，如果第一臂22繞其基端部轉動，則第一連桿25a在與第一臂22保持平行的同步轉動。當在平面圖中觀看時，使臂基座21與第一臂22的連接軸線和臂基座21與第二連桿25a的連接軸線互連的連接線在保持與中間連桿25b平行式(parallelism)轉動。The first link 25a, the hand base 21, the first arm 22, and the intermediate link 25b constitute a first parallel link mechanism. In other words, if the first arm 22 is rotated about its base end, the first link 25a is rotated in synchronization with the first arm 22 in parallel. When viewed in a plan view, the connection line connecting the arm base 21 with the first arm 22 and the connection axis of the arm base 21 and the second link 25a is kept parallel with the intermediate link 25b (parallelism )turnmove.
第二連桿25c、第二臂23、手基座24以及中間連桿25b構成第二平行連桿機構。換言之，如果第二臂23繞其基端部轉動，則第二連桿25c和手基座24在與第二臂23和中間連桿25b分別保持平行式轉動。The second link 25c, the second arm 23, the hand base 24, and the intermediate link 25b constitute a second parallel link mechanism. In other words, if the second arm 23 is rotated about its base end, the second link 25c and the hand base 24 are kept in parallel rotation with the second arm 23 and the intermediate link 25b, respectively.
中間連桿25b在第一平行連桿機構的作用下係保持與前述連接線的平行式轉動。為此，第二平行連桿機構的手基座24係保持與臂基座21平行式轉動。因此，安裝到手基座24的上部的手24a係保持與前述連接線平行式直線移動。The intermediate link 25b maintains a parallel rotation with the aforementioned connecting line by the action of the first parallel link mechanism. To this end, the hand base 24 of the second parallel link mechanism is kept in parallel rotation with the arm base 21. Therefore, the hand 24a attached to the upper portion of the hand base 24 is kept moving linearly in parallel with the aforementioned connecting line.
以此方式，機器人1利用兩個平行連桿機構(即第一平行連桿機構和第二平行連桿機構)能夠保持手24a的方位(orientation)恆定。因此，與例如其中滑輪和傳動皮帶設置在第二臂23內以利用滑輪和傳動皮帶保持末端執行器的方位恆定的情況相比，可以減少因滑輪和傳動皮帶而產生的污染物。In this way, the robot 1 can maintain the orientation of the hand 24a constant by using two parallel link mechanisms (i.e., the first parallel link mechanism and the second parallel link mechanism). Therefore, contaminants generated by the pulley and the transmission belt can be reduced as compared with, for example, a case where the pulley and the transmission belt are disposed in the second arm 23 to keep the orientation of the end effector constant by the pulley and the transmission belt.
由於臂的剛性藉由輔助臂部25而能夠整體上提高，因此可以降低在手24a操作期間的振動。為此，與其中末端執行器(end effector)的方位利用滑輪和傳動皮帶而保持恆定的情況相比，可以減少因在手24a的操作期間產生的振動而產生的污染物。Since the rigidity of the arm can be improved as a whole by the auxiliary arm portion 25, the vibration during the operation of the hand 24a can be reduced. For this reason, contaminants generated by the vibration generated during the operation of the hand 24a can be reduced as compared with the case where the orientation of the end effector is kept constant by the pulley and the transmission belt.
根據本實施例的機器人1的臂單元20包括兩個可伸展臂，這兩個臂的每個均包括第一臂22、第二臂23、手基座24和輔助臂部25。因此，機器人1能夠同時執行兩個任務，例如，利用其中一個可伸展臂從搬運位置取出工件的任務和利用另一個可伸展臂將新的工件運入搬運位置的任務。The arm unit 20 of the robot 1 according to the present embodiment includes two extendable arms, each of which includes a first arm 22, a second arm 23, a hand base 24, and an auxiliary arm portion 25. Therefore, the robot 1 can execute two at the same timeTasks, for example, the task of using one of the extendable arms to remove the workpiece from the handling position and the task of transporting the new workpiece into the handling position with the other extendable arm.
接下來，將對包括根據本實施例的機器人1和在其中限定有機器人1的作業空間的真空室30的半導體製造設備的一個實施例進行說明。之後，將詳細地描述將機器人1安裝在真空室30內的方法。Next, an embodiment of a semiconductor manufacturing apparatus including the robot 1 according to the present embodiment and the vacuum chamber 30 in which the working space of the robot 1 is defined will be described. Hereinafter, a method of installing the robot 1 in the vacuum chamber 30 will be described in detail.
圖2是示出半導體製造設備100的一個示例的示意性說明剖面圖。如圖2中所示，半導體製造設備100包括機器人1和用於容納機器人1的真空室30。FIG. 2 is a schematic explanatory cross-sectional view showing one example of the semiconductor manufacturing apparatus 100. As shown in FIG. 2, the semiconductor manufacturing apparatus 100 includes a robot 1 and a vacuum chamber 30 for housing the robot 1.
形成在機器人1的主體單元10中的凸緣部12借助密封構件(未示出)固定到形成於安裝在安裝面S上的真空到30的底部的大體中央區域中的開口部31的周緣。因此，真空室30被氣密地密封並且真空室30的內部借助諸如真空泵等的減壓裝置保持在減壓狀態下。主體單元10的殼體11從真空室30的底部突出並且位於用於支承真空室30的支承部35內。儘管支承部35由壁形成，但也可以利用多個腿形成支承部35。The flange portion 12 formed in the main body unit 10 of the robot 1 is fixed to the periphery of the opening portion 31 formed in a substantially central region of the bottom of the vacuum to 30 mounted on the mounting surface S by a sealing member (not shown). Therefore, the vacuum chamber 30 is hermetically sealed and the inside of the vacuum chamber 30 is maintained under a reduced pressure state by means of a pressure reducing device such as a vacuum pump. The housing 11 of the main body unit 10 protrudes from the bottom of the vacuum chamber 30 and is located inside the support portion 35 for supporting the vacuum chamber 30. Although the support portion 35 is formed by a wall, the support portion 35 may be formed using a plurality of legs.
機器人1在真空室30內執行工件搬運任務。例如，機器人1藉由使用第一臂22和第二臂23直線移動手24a，藉此藉由未示出的閘閥從連接到真空室30的另一真空室取出工件。The robot 1 performs a workpiece handling task in the vacuum chamber 30. For example, the robot 1 linearly moves the hand 24a by using the first arm 22 and the second arm 23, whereby the workpiece is taken out from another vacuum chamber connected to the vacuum chamber 30 by a gate valve not shown.
接著，機器人1將手24a返回然後使臂基座21繞擺動軸線O水平轉動，藉此使臂單元20直接面向作為工件的搬運目的地的另一真空室。然後，機器人1藉由使用第一臂22和第二臂23來直線移動手24a，藉此將工件運入作為工件的搬運目的地的另一真空室中。Next, the robot 1 returns the hand 24a and then horizontally rotates the arm base 21 about the swing axis O, thereby directly facing the arm unit 20 as a workpiece.Another vacuum chamber for the handling destination. Then, the robot 1 linearly moves the hand 24a by using the first arm 22 and the second arm 23, thereby carrying the workpiece into another vacuum chamber which is the destination of the workpiece.
真空室30形成得與機器人1的形狀一致。例如，如圖2所示，在真空室30的底面部中形成有凹部。機器人的諸如臂基座21和升降凸緣單元15的部分被設置在該凹部中。藉由以這樣的方式將真空室30形成為與機器人1的形狀一致，可以減小真空室30的內部容積並且可以容易地將真空室30保持在減壓狀態下。The vacuum chamber 30 is formed to conform to the shape of the robot 1. For example, as shown in FIG. 2, a concave portion is formed in the bottom surface portion of the vacuum chamber 30. Portions of the robot such as the arm base 21 and the lift flange unit 15 are disposed in the recess. By forming the vacuum chamber 30 in conformity with the shape of the robot 1 in this manner, the internal volume of the vacuum chamber 30 can be reduced and the vacuum chamber 30 can be easily maintained in a reduced pressure state.
用來以一種能夠與外部連通的方式封閉真空室30的蓋部32被設置在真空室30的上部中。如稍後將更詳細地描述的，根據本實施例的機器人1的臂單元20在移除蓋部32的同時從真空室30上方被引入真空室30中。A cover portion 32 for closing the vacuum chamber 30 in a manner capable of communicating with the outside is provided in the upper portion of the vacuum chamber 30. As will be described later in more detail, the arm unit 20 of the robot 1 according to the present embodiment is introduced into the vacuum chamber 30 from above the vacuum chamber 30 while removing the cover portion 32.
換言之，根據本實施例的機器人1被建構成讓主體單元10和臂單元20能夠在升降凸緣單元15處分開。In other words, the robot 1 according to the present embodiment is constructed such that the main body unit 10 and the arm unit 20 can be separated at the elevating flange unit 15.
更具體地，如圖2和圖3所示，機器人1的升降凸緣單元15包括兩個凸緣，即，第一停靠凸緣15a和第二停靠凸緣15b。第一停靠凸緣15a被固定到主體單元10。第二停靠凸緣15b被固定到臂單元20。在根據本實施例的機器人1中，主體單元10和臂單元20藉由利用螺栓等緊固第一停靠凸緣15a和第二停靠凸緣15b而整合。More specifically, as shown in FIGS. 2 and 3, the lifting flange unit 15 of the robot 1 includes two flanges, that is, a first docking flange 15a and a second docking flange 15b. The first docking flange 15a is fixed to the main body unit 10. The second docking flange 15b is fixed to the arm unit 20. In the robot 1 according to the present embodiment, the main body unit 10 and the arm unit 20 are integrated by fastening the first docking flange 15a and the second docking flange 15b with bolts or the like.
在本實施例中，機器人1借助將該機器人1分成主體單元10和臂單元20而安裝在真空室30中。這使得可以將機器人1容易地安裝在真空室30中。In the present embodiment, the robot 1 is installed in the vacuum chamber 30 by dividing the robot 1 into the main body unit 10 and the arm unit 20. This makes it possible to easily mount the robot 1 in the vacuum chamber 30.
現在將參照圖3描述具有第一停靠凸緣15a的主體單元10和具有第二停靠凸緣15b的臂基座21。圖3是示出主體單元10和臂基座21的示意性說明剖面圖。The body unit 10 having the first docking flange 15a and the arm base 21 having the second docking flange 15b will now be described with reference to FIG. FIG. 3 is a schematic explanatory cross-sectional view showing the main body unit 10 and the arm base 21.
如圖3所示，主體單元10包括設置在該主體單元10中的升降裝置40。升降裝置40是藉由使用馬達(未示出)和轉換機構42來垂直地移動升降軸43的裝置。第一停靠凸緣15a固定到升降軸43的突出穿過形成於凸緣部12中的凸緣開口121的上端部。As shown in FIG. 3, the main body unit 10 includes a lifting device 40 disposed in the main body unit 10. The lifting device 40 is a device that vertically moves the lifting shaft 43 by using a motor (not shown) and a switching mechanism 42. The first docking flange 15a is fixed to the upper end portion of the lift shaft 43 projecting through the flange opening 121 formed in the flange portion 12.
臂單元12包括擺動裝置60。擺動裝置60藉由滑輪64和65以及傳動皮帶63而用於將減速器-馬達元件61(其係藉由整合馬達61a和減速器61b來形成)的旋轉傳遞到擺動軸62，藉此使擺動軸62旋轉。擺動軸62借助軸承211以可旋轉的方式支承在臂基座21上，但沿旋轉方向不固定。從而，臂基座21繞擺動軸線O(即擺動軸62的中心軸線)水平旋轉。The arm unit 12 includes a swinging device 60. The swinging device 60 is used to transmit the rotation of the speed reducer-motor element 61 (which is formed by the integrated motor 61a and the speed reducer 61b) to the swing shaft 62 by the pulleys 64 and 65 and the drive belt 63, thereby making the swing The shaft 62 rotates. The swing shaft 62 is rotatably supported by the arm base 21 via a bearing 211, but is not fixed in the rotational direction. Thereby, the arm base 21 is horizontally rotated about the swing axis O (i.e., the central axis of the swing shaft 62).
第二停靠凸緣15b固定到擺動軸62的從臂基座21的下部垂直向下突出的末端部。The second docking flange 15b is fixed to a tip end portion of the swing shaft 62 that protrudes vertically downward from a lower portion of the arm base 21.
主體單元10和臂單元20借助用螺栓等固定第一停靠凸緣15a和第二停靠凸緣15b而結合到機器人1。The main body unit 10 and the arm unit 20 are coupled to the robot 1 by fixing the first docking flange 15a and the second docking flange 15b with bolts or the like.
如圖3所示，在第一停靠凸緣15a的上表面上設置有定位銷151，並且在第二停靠凸緣15b中形成有能與定位銷151接合的接合孔153。在定位銷151和接合孔153彼此接合的狀態下，臂單元20借助固定第一停靠凸緣15a和第二停靠凸緣15b而在適當位置連接到主體單元10。As shown in FIG. 3, a positioning pin 151 is provided on the upper surface of the first docking flange 15a, and an engagement hole 153 engageable with the positioning pin 151 is formed in the second docking flange 15b. In a state where the positioning pin 151 and the engagement hole 153 are engaged with each other, the arm unit 20 is connected to the main body unit 10 at an appropriate position by fixing the first docking flange 15a and the second docking flange 15b.
在根據本實施例的機器人1中，直徑比主體單元10小的第一停靠凸緣15a係設置在主體單元10的上部中。直徑實質等於第一停靠凸緣15a的第二停靠凸緣15b係設置在壁單元20的下部中。在根據本實施例的機器人1中，主體單元10和臂單元20係藉由連接第一停靠凸緣15a和第二停靠凸緣15b而被整合。這使得即使在主體單元10和臂單元20彼此分離時也可以容易地將該主體單元10和臂單元20整合。In the robot 1 according to the present embodiment, the first docking flange 15a having a smaller diameter than the main body unit 10 is disposed in the upper portion of the main body unit 10. A second docking flange 15b having a diameter substantially equal to the first docking flange 15a is disposed in a lower portion of the wall unit 20. In the robot 1 according to the present embodiment, the main body unit 10 and the arm unit 20 are integrated by connecting the first docking flange 15a and the second docking flange 15b. This makes it easy to integrate the main body unit 10 and the arm unit 20 even when the main body unit 10 and the arm unit 20 are separated from each other.
在根據本實施例的機器人1中，作為定位突起部的定位銷151設置在第一停靠凸緣15a中。作為能與定位銷151接合的定位凹部的接合孔153形成在第二停靠凸緣15b中。這使得可以在精確位置將臂單元20連接到主體單元10。In the robot 1 according to the present embodiment, the positioning pin 151 as a positioning protrusion is provided in the first docking flange 15a. An engagement hole 153 as a positioning recess engageable with the positioning pin 151 is formed in the second docking flange 15b. This makes it possible to connect the arm unit 20 to the main body unit 10 at a precise position.
在本實施例中，定位銷151設置在第一停靠凸緣15a中，接合孔153形成在第二停靠凸緣15b中。另選地，可在第一停靠凸緣15a中形成通孔，並且可在第二停靠凸緣15b中設置定位銷。在本實施例中，定位銷151和接合孔153以定位突起部和定位凹部為例。然而，定位突起部和定位凹部不被限制為銷和孔。In the present embodiment, the positioning pin 151 is disposed in the first docking flange 15a, and the engaging hole 153 is formed in the second docking flange 15b. Alternatively, a through hole may be formed in the first docking flange 15a, and a positioning pin may be provided in the second docking flange 15b. In the present embodiment, the positioning pin 151 and the engaging hole 153 are exemplified by the positioning protrusion and the positioning recess. However, the positioning protrusion and the positioning recess are not limited to the pin and the hole.
在本實施例中，已針對擺動裝置60設置有馬達-減速器元件61的情況進行了說明。然而，不總是必須將馬達和減速器整合。In the present embodiment, the case where the swinging device 60 is provided with the motor-reducer element 61 has been described. However, it is not always necessary to integrate the motor and the reducer.
接下來，將詳細地描述擺動裝置60和升降裝置40。如圖3所示，擺動裝置60的擺動軸62具有從該擺動軸62的上端沿著擺動軸線O向其下端延伸的通孔622。同樣，第二停靠凸緣15b具有通孔154。臂單元20的佈線電纜300插入通過通孔622和154。佈線電纜300藉由通孔622和154從擺動軸62的上方延伸到臂基座21的下方。Next, the swinging device 60 and the lifting device 40 will be described in detail. As shown in FIG. 3, the swing shaft 62 of the swinging device 60 has a swing shaft 62 from the swing shaft 62.The upper end has a through hole 622 extending toward the lower end thereof along the swing axis O. Also, the second docking flange 15b has a through hole 154. The wiring cable 300 of the arm unit 20 is inserted through the through holes 622 and 154. The wiring cable 300 extends from above the swing shaft 62 to below the arm base 21 through the through holes 622 and 154.
升降裝置40包括轉換機構42、升降軸43和線性引導件44。轉換機構42是用來將未示出的馬達的旋轉運動轉換成直線運動的機構。更具體地，轉換機構42包括滾珠螺桿421和滾珠螺帽422。滾珠螺桿421借助軸承112以可旋轉的方式支承在殼體11上。滾珠螺帽422與滾珠螺桿421係螺紋地耦合。The lifting device 40 includes a shifting mechanism 42, a lifting shaft 43, and a linear guide 44. The switching mechanism 42 is a mechanism for converting a rotational motion of a motor, not shown, into a linear motion. More specifically, the shifting mechanism 42 includes a ball screw 421 and a ball nut 422. The ball screw 421 is rotatably supported on the housing 11 by means of a bearing 112. The ball nut 422 is threadedly coupled to the ball screw 421.
升降軸43是沿著垂直方向延伸的管狀構件。轉換機構42係設置在升降軸43內。轉換機構424的滾珠螺帽422固定到升降軸43的內周面。升降軸43的外周面固定到線性引導件44。The lifting shaft 43 is a tubular member that extends in the vertical direction. The switching mechanism 42 is disposed within the lifting shaft 43. The ball nut 422 of the shifting mechanism 424 is fixed to the inner peripheral surface of the lift shaft 43. The outer peripheral surface of the lifting shaft 43 is fixed to the linear guide 44.
在操作未示出的馬達時，馬達的旋轉藉由未示出的傳動皮帶帶和滑輪傳遞到轉換機構42的滾珠螺桿421。馬達的旋轉運動借助滾珠螺桿421和滾珠螺帽422轉換成直線運動。因此，連接到滾珠螺帽422的升降軸43沿著線性引導件44上下運動。When a motor not shown is operated, the rotation of the motor is transmitted to the ball screw 421 of the shifting mechanism 42 by a drive belt and a pulley which are not shown. The rotational motion of the motor is converted into a linear motion by means of the ball screw 421 and the ball nut 422. Therefore, the lifting shaft 43 connected to the ball nut 422 moves up and down along the linear guide 44.
第一停靠凸緣15a具有沿著擺動軸線O延伸的通孔152。臂單元20的佈線電纜300通過通孔152插入升降軸43中。插入升降軸43中的佈線電纜300從形成於升降軸43的下部中的切口部431被引導到升降軸43的外部，並且連接到設置在升降軸43的外部的連接器面板(未示出)。The first docking flange 15a has a through hole 152 that extends along the swing axis O. The wiring cable 300 of the arm unit 20 is inserted into the lifting shaft 43 through the through hole 152. The wiring cable 300 inserted into the elevating shaft 43 is guided to the outside of the elevating shaft 43 from the cutout portion 431 formed in the lower portion of the elevating shaft 43, and is connected to a connector panel provided outside the elevating shaft 43 (not shown)Out).
在這方面，轉換機構42被靠近升降軸43的內周面地設置。更具體地，轉換機構42係設置在偏心位置，從而讓滾球螺桿421的中心軸線偏離升降軸43的中心軸線(即，擺動軸線O)。因此，在轉換機構42和升降軸43的內周面之間形成有用於容納佈線電纜300的佈線空間Q。In this regard, the switching mechanism 42 is disposed close to the inner peripheral surface of the elevating shaft 43. More specifically, the shifting mechanism 42 is disposed at an eccentric position such that the center axis of the ball screw 421 is offset from the center axis of the lift shaft 43 (i.e., the swing axis O). Therefore, a wiring space Q for accommodating the wiring cable 300 is formed between the conversion mechanism 42 and the inner peripheral surface of the lift shaft 43.
在升降軸43中設置有用於引導從上方朝向佈線空間Q插入的佈線電纜300的引導構件450。引導構件450是設置在佈線空間Q和轉換機構42之間從而覆蓋滾珠螺桿421的上表面和側表面的構件。引導構件450被朝向佈線空間Q傾斜。A guide member 450 for guiding the wiring cable 300 inserted from the upper side toward the wiring space Q is provided in the lift shaft 43. The guiding member 450 is a member that is disposed between the wiring space Q and the switching mechanism 42 so as to cover the upper surface and the side surface of the ball screw 421. The guiding member 450 is inclined toward the wiring space Q.
藉由將引導構件450以這樣的方式設置在升降軸43中，可以在不妨礙滾珠螺桿421和滾珠螺帽422的同時朝向佈線空間Q容易地引導佈線電纜300。還可以防止佈線電纜300和轉換機構42在機器人1的操作期間彼此接觸。By providing the guiding member 450 in the elevating shaft 43 in such a manner, the wiring cable 300 can be easily guided toward the wiring space Q while not obstructing the ball screw 421 and the ball nut 422. It is also possible to prevent the wiring cable 300 and the switching mechanism 42 from coming into contact with each other during the operation of the robot 1.
接下來，將對機器人1安裝在真空室30中的方法進行說明。圖4是將機器人1的高度與存在於真空室30上方的運入空間TS的高度進行對比的圖式。首先，將參照圖4描述機器人1的高度H與形成在真空室30和頂棚750之間的運入空間TS的高度X1的對比。如圖4所示，在蓋部32(參見圖2)從真空室30的上部被移除的狀態下執行將機器人1運入真空室30中的工作。Next, a method of mounting the robot 1 in the vacuum chamber 30 will be described. 4 is a view in which the height of the robot 1 is compared with the height of the carry-in space TS existing above the vacuum chamber 30. First, a comparison of the height H of the robot 1 with the height X1 of the carry-in space TS formed between the vacuum chamber 30 and the ceiling 750 will be described with reference to FIG. As shown in FIG. 4, the operation of transporting the robot 1 into the vacuum chamber 30 is performed in a state where the cover portion 32 (see FIG. 2) is removed from the upper portion of the vacuum chamber 30.
機器人1藉由使用例如頂棚吊車700而被升起。頂棚吊車700是能夠利用鉤701將物體提升到特定高度、沿著設置在頂棚750上的移動走道751移動並且在期望位置降下被提升的物體的吊車裝置。The robot 1 is raised by using, for example, a ceiling crane 700. The ceiling crane 700 is a crane apparatus that is capable of lifting an object to a specific height using a hook 701, moving along a moving walkway 751 disposed on the ceiling 750, and lowering the lifted object at a desired position.
為了用頂棚吊車700提升物體並且將物體運入真空室30中，物體的高度需要小於形成在真空室30上方的運入空間TS的高度X1。在這方面，運入空間TS是這樣的空間，即：定位在真空室30上方的物體(例如機器人1)經由該空間被運入真空室30中。更具體地，運入空間TS表示提升至最高位置的鉤701的下端和真空室30的上端之間的空間。In order to lift an object with the ceiling crane 700 and carry the object into the vacuum chamber 30, the height of the object needs to be smaller than the height X1 of the carry-in space TS formed above the vacuum chamber 30. In this regard, the carry-in space TS is a space through which an object positioned above the vacuum chamber 30 (for example, the robot 1) is carried into the vacuum chamber 30. More specifically, the carry-in space TS represents the space between the lower end of the hook 701 raised to the highest position and the upper end of the vacuum chamber 30.
如圖4所示，根據本實施例的機器人1的高度H充分大於運入空間TS的高度X1。在該情況下，即使試圖利用頂棚吊車700朝向運入空間TS移動機器人1，機器人1也與真空室30的側臂接觸。As shown in FIG. 4, the height H of the robot 1 according to the present embodiment is sufficiently larger than the height X1 of the carry-in space TS. In this case, even if it is attempted to move the robot 1 toward the carry-in space TS by the ceiling crane 700, the robot 1 comes into contact with the side arms of the vacuum chamber 30.
為此，機器人1的主體單元10和臂單元20被分開並且被單獨地運入真空室30中。To this end, the main body unit 10 and the arm unit 20 of the robot 1 are separated and separately carried into the vacuum chamber 30.
在根據本實施例的機器人1中，臂單元20的高度h2小於運入空間TS的高度X1。然而，主體單元10的高度h1大於運入空間TS的高度X1。臂單元20的高度h2包括臂單元20的上表面與頂棚吊車700的鉤701的下端之間的距離h0。In the robot 1 according to the present embodiment, the height h2 of the arm unit 20 is smaller than the height X1 of the carry-in space TS. However, the height h1 of the main body unit 10 is larger than the height X1 of the carry-in space TS. The height h2 of the arm unit 20 includes a distance h0 between the upper surface of the arm unit 20 and the lower end of the hook 701 of the ceiling crane 700.
儘管根據本實施例的機器人1能夠被分成主體單元10和臂單元20的事實，但也不能將主體單元10從真空室30上方運入真空室30中。Although the robot 1 according to the present embodiment can be divided into the body unit 10 and the arm unit 20, the main body unit 10 cannot be removed from the vacuum chamber 30.The upper portion is carried into the vacuum chamber 30.
因此在此實施例中，主體單元10從真空室30下方被傳送，並且臂單元20被從真空室30上方被傳送。之後，將主體單元10和臂單元20彼此連接。最後，將機器人1安裝在真空室30中。為此，主體單元10的高度h1被設定成小於從真空室30的安裝面S到真空室30的底面部分36的高度X2。Therefore, in this embodiment, the main body unit 10 is conveyed from below the vacuum chamber 30, and the arm unit 20 is conveyed from above the vacuum chamber 30. Thereafter, the main body unit 10 and the arm unit 20 are connected to each other. Finally, the robot 1 is mounted in the vacuum chamber 30. To this end, the height h1 of the main body unit 10 is set to be smaller than the height X2 from the mounting surface S of the vacuum chamber 30 to the bottom surface portion 36 of the vacuum chamber 30.
如上所述，根據本實施例的機器人1包括：從真空室30的底面部分36的下方向上提升並且連接到真空室30的底面部分36的主體單元10；以及被從真空室30上方運入真空室30中並且連接到與真空室30的底面部分36連接的主體單元10的上部的臂單元20。As described above, the robot 1 according to the present embodiment includes: the main body unit 10 which is lifted upward from the lower side of the bottom surface portion 36 of the vacuum chamber 30 and connected to the bottom surface portion 36 of the vacuum chamber 30; and is vacuumed from above the vacuum chamber 30 The arm unit 20 in the chamber 30 and connected to the upper portion of the main body unit 10 connected to the bottom surface portion 36 of the vacuum chamber 30.
接下來將參照圖5A至5C描述將根據本實施例的機器人1安裝在真空到30中的方法。圖5A和圖5B是圖示將主體單元10安裝在真空室30中的方法的說明圖。圖5C是圖示將臂單元20安裝在真空室30中的方法的說明圖。Next, a method of mounting the robot 1 according to the present embodiment in a vacuum to 30 will be described with reference to FIGS. 5A to 5C. 5A and 5B are explanatory diagrams illustrating a method of mounting the main body unit 10 in the vacuum chamber 30. FIG. 5C is an explanatory diagram illustrating a method of mounting the arm unit 20 in the vacuum chamber 30.
如圖5A所示，與臂單元20分離的主體單元10首先被安裝在具有腳輪910的手推車900上，並且將其上安裝有臂單元20的手推車900移動到位於真空室30的開口部31正下方的位置。此時，支承部35的位於真空室30下方的並且由壁形成的部分可以可移除的方式構造成並且當移動主體單元10時可被移除以形成運入孔35a。As shown in FIG. 5A, the main body unit 10 separated from the arm unit 20 is first mounted on a cart 900 having a caster 910, and the cart 900 on which the arm unit 20 is mounted is moved to the opening portion 31 of the vacuum chamber 30. Below the location. At this time, a portion of the support portion 35 located below the vacuum chamber 30 and formed by the wall may be removably configured and may be removed to form the carry-in hole 35a when the body unit 10 is moved.
主體單元10的凸緣部12的上附裝表面和用於安裝諸如O形環的密封構件的表面被預先清潔。為了將主體單元10穩定地安裝在手推車900上，將間隔件920附裝到主體單元10的下表面。The upper attachment surface of the flange portion 12 of the main body unit 10 and the surface for mounting a sealing member such as an O-ring are pre-cleaned. In order to put the main unit10 is stably mounted on the cart 900, and the spacer 920 is attached to the lower surface of the main body unit 10.
可將叉車適當地用作手推車900。或者，可將延伸至真空室30的中央位置的軌道鋪設在真空室30的安裝面S上，並且能夠運載主體單元10的運載件可被設置成沿著軌道來回移動。The forklift can be suitably used as the cart 900. Alternatively, a rail extending to a central position of the vacuum chamber 30 may be laid on the mounting surface S of the vacuum chamber 30, and a carrier capable of carrying the main body unit 10 may be disposed to move back and forth along the rail.
以上述方式，將主體單元10定位在真空室30的底面部分36的開口部31的正下方。在該位置，第一停靠凸緣15a能夠通過開口部31而面向上。In the above manner, the main body unit 10 is positioned directly below the opening portion 31 of the bottom surface portion 36 of the vacuum chamber 30. In this position, the first docking flange 15a can face upward through the opening portion 31.
接下來，將作為提升夾具的吊環螺栓810螺紋地耦合到預先形成於主體單元10的凸緣部12中的螺栓孔。之後，將從頂棚吊車700的鉤701懸垂的線820鎖定到吊環螺栓810的環形部。在本實施例中，使用四個吊環螺栓810。主體單元10係借助四根線820而被懸掛。Next, the eye bolt 810 as a lifting jig is threadedly coupled to a bolt hole previously formed in the flange portion 12 of the main body unit 10. Thereafter, the wire 820 depending from the hook 701 of the ceiling crane 700 is locked to the annular portion of the eye bolt 810. In the present embodiment, four eye bolts 810 are used. The main unit 10 is suspended by means of four wires 820.
如圖5B所示，主體單元10借助頂棚吊車700被略微吊起。As shown in FIG. 5B, the main body unit 10 is slightly suspended by the ceiling crane 700.
在此狀態下，工人能夠容易地移動主體單元10。因此，能夠便於執行主體單元10的位置對準。更具體地，借助沿水平方向直線移動主體單元10或者沿水平方向旋轉主體單元10而執行主體單元10的位置對準，從而形成在主體單元10的凸緣部12中的螺栓插入孔(未示出)能夠與形成在真空室30的開口部31的周緣部中的連接孔(未示出)對準。In this state, the worker can easily move the main unit 10. Therefore, it is possible to facilitate the positional alignment of the main body unit 10. More specifically, the positional alignment of the main body unit 10 is performed by linearly moving the main body unit 10 in the horizontal direction or rotating the main body unit 10 in the horizontal direction, thereby forming a bolt insertion hole in the flange portion 12 of the main body unit 10 (not shown) It can be aligned with a connection hole (not shown) formed in the peripheral portion of the opening portion 31 of the vacuum chamber 30.
然後，主體單元10的凸緣部12和形成在開口部31的周緣中的連接孔藉由使用螺栓而彼此連接並固定。最後，完成主體單元10在真空室30中的安裝。用於定位臂臂單元20的引導構件125和126(參見圖6)安裝到被安裝在真空室30中的主體單元10。稍後將參照圖6對引導構件125和126進行描述。Then, the flange portion 12 of the main body unit 10 and the opening portion 31 are formed.The connection holes in the circumference of the circumference are connected and fixed to each other by using bolts. Finally, the mounting of the main unit 10 in the vacuum chamber 30 is completed. Guide members 125 and 126 (see FIG. 6) for positioning the arm arm unit 20 are mounted to the main body unit 10 installed in the vacuum chamber 30. The guiding members 125 and 126 will be described later with reference to FIG.
如果完成了主體單元10在真空室30中的安裝，則將臂單元20安裝在真空室30中，如圖5C所示。If the mounting of the main body unit 10 in the vacuum chamber 30 is completed, the arm unit 20 is installed in the vacuum chamber 30 as shown in Fig. 5C.
首先，將具有環610的懸掛夾具600附裝到與主體單元10分離的臂單元20。之後，在利用頂棚吊車700的鉤701鉤住環601之後將臂單元20升起。此時，臂單元20的佈線電纜300保持從臂單元20的下部懸垂。First, the suspension jig 600 having the ring 610 is attached to the arm unit 20 separated from the main body unit 10. Thereafter, the arm unit 20 is raised after hooking the ring 601 with the hook 701 of the ceiling crane 700. At this time, the wiring cable 300 of the arm unit 20 is kept suspended from the lower portion of the arm unit 20.
然後，使頂棚吊車700沿著走行巷道751行進，借此將臂單元20移動到位於真空室30上方的運入空間TS。在這方面，包括懸掛夾具600的臂單元20的高度h2小於運入空間TS的高度X1，如圖5C所示。從而，臂單元20能夠移動到運入空間TS並且能夠被定位在真空室30的中央的上方而不可能與真空室30接觸。Then, the ceiling crane 700 is caused to travel along the running lane 751, thereby moving the arm unit 20 to the carry-in space TS located above the vacuum chamber 30. In this regard, the height h2 of the arm unit 20 including the suspension jig 600 is smaller than the height X1 of the carry-in space TS as shown in FIG. 5C. Thereby, the arm unit 20 can be moved to the carry-in space TS and can be positioned above the center of the vacuum chamber 30 without being in contact with the vacuum chamber 30.
接著，操作頂棚吊車700以藉此朝向已安裝在真空室30中的主體單元10降下臂單元20。此時，使得從臂單元20的下部懸垂的佈線電纜300插入主體單元10的升降裝置40的升降軸43中(參見圖3)。如早前所述，在佈線電纜300的佈線空間Q與升降軸43內的轉換機構42之間設置有引導構件450。為此，佈線電纜300能夠延伸通過佈線空間Q而不妨礙轉換機構42。Next, the ceiling crane 700 is operated to thereby lower the arm unit 20 toward the main body unit 10 that has been installed in the vacuum chamber 30. At this time, the wiring cable 300 suspended from the lower portion of the arm unit 20 is inserted into the lifting shaft 43 of the lifting device 40 of the main body unit 10 (see FIG. 3). As described earlier, the guiding member 450 is provided between the wiring space Q of the wiring cable 300 and the switching mechanism 42 in the lifting shaft 43. To this end, the wiring cable 300 can extend through the wiring space Q without obstructing the switching mechanism 42.
然後，進一步降下臂單元20，從而設置在臂單元20的下部中的第二停靠凸緣15b靠近設置在主體單元10的上部中的第一停靠凸緣15a。Then, the arm unit 20 is further lowered, so that the second docking flange 15b provided in the lower portion of the arm unit 20 is close to the first docking flange 15a provided in the upper portion of the body unit 10.
在該方面，在懸掛夾具600中形成有與設置在主體單元10中的引導構件125和126配對的定位標記。如稍後所述，工人藉由使用引導構件125和126以及定位標記而執行粗略定位臂單元20的任務。In this aspect, positioning marks paired with the guiding members 125 and 126 provided in the main body unit 10 are formed in the suspension jig 600. As will be described later, the worker performs the task of roughly positioning the arm unit 20 by using the guiding members 125 and 126 and the positioning marks.
圖6是圖示相對於主體單元10粗略地定位臂單元20的方法的說明圖。如圖6所示，筒狀柱引導構件125和126在特定位置附裝在主體單元10的凸緣部12上。在臂單元20的懸掛夾具600中以與引導構件125和126之間的間隔相同的間隔形成有作為定位標記的通孔620a和603a。FIG. 6 is an explanatory diagram illustrating a method of roughly positioning the arm unit 20 with respect to the main body unit 10. As shown in FIG. 6, the cylindrical column guiding members 125 and 126 are attached to the flange portion 12 of the main body unit 10 at a specific position. Through holes 620a and 603a as positioning marks are formed in the suspension jig 600 of the arm unit 20 at the same interval as the interval between the guiding members 125 and 126.
工人利用引導構件125和126以及作為定位標記的通孔620a和603a來執行定位臂單元20的任務。更具體地，工人在調節臂單元20的位置的同時朝向主體單元10降下臂單元20，使得當從上方看通孔620a和603a時，引導構件125和126能夠位於通孔620a和603a內。The worker performs the task of positioning the arm unit 20 by using the guiding members 125 and 126 and the through holes 620a and 603a as positioning marks. More specifically, the worker lowers the arm unit 20 toward the main body unit 10 while adjusting the position of the arm unit 20, so that the guiding members 125 and 126 can be located inside the through holes 620a and 603a when the through holes 620a and 603a are viewed from above.
在本實施例中，如上所述，定位引導構件125和126以可移除的方式附裝到主體單元10的凸緣部12。與引導構件125和126對應的通孔602a和603a形成在懸掛夾具600中。在本實施例中，藉由使用引導構件125和126以及通孔602a和603a執行相對於主體單元10定位臂單元20的工作。因而，工人能夠在將臂單元20朝向主體單元10降下的同時容易地感知臂單元20相對於主體單元10的粗略安裝位置。In the present embodiment, as described above, the positioning guide members 125 and 126 are removably attached to the flange portion 12 of the main body unit 10. Through holes 602a and 603a corresponding to the guiding members 125 and 126 are formed in the suspension jig 600. In the present embodiment, the operation of positioning the arm unit 20 with respect to the main body unit 10 is performed by using the guiding members 125 and 126 and the through holes 602a and 603a. Thus, the worker can face the arm unit 20 toward the main unitThe rough mounting position of the arm unit 20 with respect to the main body unit 10 is easily perceived while being lowered.
如早前所提及的，在主體單元10的第一停靠凸緣15a中設置作為定位突起部的定位銷151。在臂單元20的第二停靠凸緣15b中形成能與定位銷151接合的接合孔153。這使得工人能夠相對於第一停靠凸緣15a精確地安裝第二停靠凸緣15b。As mentioned earlier, the positioning pin 151 as a positioning protrusion is provided in the first landing flange 15a of the main body unit 10. An engagement hole 153 engageable with the positioning pin 151 is formed in the second landing flange 15b of the arm unit 20. This enables the worker to accurately mount the second docking flange 15b with respect to the first docking flange 15a.
在將第二停靠凸緣15b放置在第一停靠凸緣15a上之後，工人利用螺栓等緊固第一停靠凸緣15a和第二停靠凸緣15b。因此，將主體單元10和臂單元20整合為機器人1。After the second docking flange 15b is placed on the first docking flange 15a, the worker fastens the first docking flange 15a and the second docking flange 15b with bolts or the like. Therefore, the main body unit 10 and the arm unit 20 are integrated into the robot 1.
如圖6所示，臂單元20的懸掛夾具600包括上支承構件601、下支承構件602和603以及連接軸604至606。首先，將下支承構件602和603附裝到臂基座21的下部。附裝到臂基座21的下支承構件602和603從臂基座21朝向Y軸的負向側局部地突出。通孔602a和603a分別形成在下支承構件602和603的遠離臂基座21突出的部分中。As shown in FIG. 6, the suspension jig 600 of the arm unit 20 includes an upper support member 601, lower support members 602 and 603, and connection shafts 604 to 606. First, the lower support members 602 and 603 are attached to the lower portion of the arm base 21. The lower support members 602 and 603 attached to the arm base 21 partially protrude from the arm base 21 toward the negative side of the Y-axis. The through holes 602a and 603a are formed in portions of the lower support members 602 and 603 that protrude away from the arm base 21, respectively.
接著，將連接軸604和605附裝到下支承構件602和603。將連接軸606附裝到臂基座21。然後，將上支承構件601附裝到連接軸604至606。將上支承構件601和連接軸604至606借助螺栓等緊固。從而，將懸掛夾具600安裝到臂單元20。Next, the connecting shafts 604 and 605 are attached to the lower support members 602 and 603. The connecting shaft 606 is attached to the arm base 21. Then, the upper support member 601 is attached to the connecting shafts 604 to 606. The upper support member 601 and the connecting shafts 604 to 606 are fastened by bolts or the like. Thereby, the suspension jig 600 is attached to the arm unit 20.
之後，操作頂棚吊車700以朝向已安裝在真空室30中的主體單元10降下臂單元20。將主體單元10和臂單元20彼此連接。此時，利用引導構件125和126以及作為定位標記的通孔602a和602b執行臂單元20的定位。然後，將懸掛夾具600(包括上支承構件601、下支承構件602和603、連接軸604至606)以及引導構件125和126移除以最終完成機器人1的安裝。Thereafter, the ceiling crane 700 is operated to face the vacuum chamber 30 that has been installed.The main unit 10 in the lower arm unit 20 is lowered. The main body unit 10 and the arm unit 20 are connected to each other. At this time, the positioning of the arm unit 20 is performed using the guiding members 125 and 126 and the through holes 602a and 602b as positioning marks. Then, the suspension jig 600 (including the upper support member 601, the lower support members 602 and 603, the connection shafts 604 to 606) and the guide members 125 and 126 are removed to finally complete the installation of the robot 1.
如上所述，根據本實施例的機器人1包括從真空室30的底面部36升起並且連接到真空室30的底面部分36的主體單元10。而且，機器人1包括被從真空室30上方運入該真空室30中並且連接到與真空室30的底面部36連接的主體單元10的上部的臂單元20。As described above, the robot 1 according to the present embodiment includes the main body unit 10 that is raised from the bottom surface portion 36 of the vacuum chamber 30 and connected to the bottom surface portion 36 of the vacuum chamber 30. Moreover, the robot 1 includes an arm unit 20 that is carried into the vacuum chamber 30 from above the vacuum chamber 30 and connected to the upper portion of the body unit 10 that is connected to the bottom surface portion 36 of the vacuum chamber 30.
相對於具有作業空間和形成在底面部36中的單元連接開口部31的真空室30，借助執行包括下列兩個步驟的安裝方法將機器人1安裝在真空室30中。The robot 1 is mounted in the vacuum chamber 30 by performing a mounting method including the following two steps with respect to the vacuum chamber 30 having the working space and the unit connecting opening portion 31 formed in the bottom surface portion 36.
第一步驟是以下的基座單元連接步驟，即：將作為機器人的基座單元的主體單元10從真空室30的底面部分36的下方吊起，將主體單元10連接到真空室30的底面部分36，並且使凸緣部12的作為主體單元連接表面的上表面面向開口部31。The first step is a base unit connecting step of lifting the main body unit 10 as a base unit of the robot from below the bottom surface portion 36 of the vacuum chamber 30, and connecting the main body unit 10 to the bottom portion of the vacuum chamber 30. 36, and the upper surface of the flange portion 12 as the main body unit connecting surface faces the opening portion 31.
第二步驟是臂單元連接步驟，即：將機器人1的臂單元20從真空室30的上方運入真空室30中，使臂單元20經由開口部31而面向主體單元連接表面，並且將臂單元20連接到連接至真空室30的底面部分36上的主體單元10。The second step is an arm unit connecting step of transporting the arm unit 20 of the robot 1 from above the vacuum chamber 30 into the vacuum chamber 30, causing the arm unit 20 to face the body unit connecting surface via the opening portion 31, and the arm unit 20 is connected to the body unit 10 connected to the bottom surface portion 36 of the vacuum chamber 30.
藉由將機器人1安裝在真空室30中的該方法，即使機器人1具有增大的高度也可以容易地安裝在真空室30中。By the method of mounting the robot 1 in the vacuum chamber 30, even if the robot 1 has an increased height, it can be easily installed in the vacuum chamber 30.
基座單元連接步驟包括下列三個步驟。第一步驟是將主體單元10傳送到真空室30的底面部分36的下方的傳送步驟。第二步驟是將傳送到真空室30的底面部分36的下方的主體單元10吊起通過形成在真空室30的底面部分36中的開口部31的吊起步驟。第三步驟是相對於真空室30的底面部分36定位提升的主體單元10的定位步驟。The base unit connection step includes the following three steps. The first step is a transfer step of conveying the main body unit 10 below the bottom surface portion 36 of the vacuum chamber 30. The second step is a lifting step of lifting the main body unit 10 conveyed below the bottom surface portion 36 of the vacuum chamber 30 through the opening portion 31 formed in the bottom surface portion 36 of the vacuum chamber 30. The third step is a positioning step of positioning the elevated body unit 10 relative to the bottom surface portion 36 of the vacuum chamber 30.
因而，可以將主體單元10容易且精確地連接並固定到真空室30的底面部分36。Thus, the main body unit 10 can be easily and accurately connected and fixed to the bottom surface portion 36 of the vacuum chamber 30.
在本實施例中，主體單元10的高度h1和臂單元20的高度h2的總和被設定成大於形成在真空室30的上方的運入空間TS的高度X1。主體單元10的高度h1小於從真空室30的安裝面S到真空室30的底面部分36的高度X2，但大於運入空間TS的高度X1。In the present embodiment, the sum of the height h1 of the main body unit 10 and the height h2 of the arm unit 20 is set to be larger than the height X1 of the carry-in space TS formed above the vacuum chamber 30. The height h1 of the main body unit 10 is smaller than the height X2 from the mounting surface S of the vacuum chamber 30 to the bottom surface portion 36 of the vacuum chamber 30, but larger than the height X1 of the carry-in space TS.
因而，即使機器人1和真空室30的尺寸因主體單元10的高度增大而變得更大並且即使在確保真空室30和頂棚750之間的運入空間TS上遇到困難也可以容易地將機器人1安裝在真空室30中。Thus, even if the size of the robot 1 and the vacuum chamber 30 becomes larger due to the increase in the height of the main body unit 10 and even if it is difficult to ensure the carry-in space TS between the vacuum chamber 30 and the ceiling 750, it can be easily The robot 1 is installed in the vacuum chamber 30.
在前面的實施例中，已對機器人1的高度H大於運入空間TS的高度X1的例子進行了說明。或者，機器人1的高度H可以小於運入空間TS的高度X1。即使在該情況下，機器人1也可被分開並且被運入真空室30中。因此可以減小將借助一個運入操作被運入的物體的重量和尺寸。機器人1仍可被輕易地運入真空室30中。In the foregoing embodiment, an example has been described in which the height H of the robot 1 is larger than the height X1 of the transport space TS. Alternatively, the height H of the robot 1 may be smaller than the height X1 of the transport space TS. Even in this case, the robot 1 can be separated and carried into the vacuum chamber 30. thereforeIt is possible to reduce the weight and size of an object that will be carried in by a carry-in operation. The robot 1 can still be easily carried into the vacuum chamber 30.
在前面的實施例中，已對機器人1是用於搬運諸如玻璃基板或半導體晶片的工件的搬運機器人的例子進行了說明。或者，機器人1可以是用於執行除工件搬運之外的工作的機器人。在前面的實施例中，已對機器人1安裝在真空室30中的情況進行了說明。然而，供安裝機器人1的室可以是除真空室30之外的室。In the foregoing embodiment, an example in which the robot 1 is a transport robot for transporting a workpiece such as a glass substrate or a semiconductor wafer has been described. Alternatively, the robot 1 may be a robot for performing work other than workpiece handling. In the foregoing embodiment, the case where the robot 1 is mounted in the vacuum chamber 30 has been described. However, the chamber for mounting the robot 1 may be a chamber other than the vacuum chamber 30.
在前面的實施例中，已對藉由利用設置在建築物等中的頂棚吊車700來升降主體單元10和臂單元20而執行運入任務的情況進行了說明。然而，在主體單元10和臂單元20的運入工作中使用的吊車可以不必是頂棚吊車700。In the foregoing embodiment, the case where the carry-in task is performed by lifting the main body unit 10 and the arm unit 20 by the ceiling crane 700 provided in a building or the like has been described. However, the crane used in the carry-in operation of the main unit 10 and the arm unit 20 may not necessarily be the ceiling crane 700.
在前面的實施例中，已對可伸展臂的數量是兩個並且該可伸展臂包括第一臂和第二臂的例子進行了說明。然而，可伸展臂的數量不局限於兩個並且每個可伸展臂可以包括除第一臂和第二臂之外的附加臂。In the foregoing embodiments, an example in which the number of extendable arms is two and the extendable arms include the first arm and the second arm has been described. However, the number of extendable arms is not limited to two and each extendable arm may include additional arms other than the first and second arms.
本領域技術人員能夠容易地想到其他效果和其他修改示例。為此，本揭露內容的寬泛方面不局限於以上示出和描述的特定揭露內容和代表性實施例。因而，本揭露內容能夠以許多不同的形式進行修改，而不脫離由所附的申請專利範圍和其等同物限定的精神和範圍。Other effects and other modified examples can be easily conceived by those skilled in the art. To this end, the broad aspects of the disclosure are not limited to the specific disclosure and representative embodiments shown and described above. The disclosure may be modified in many different forms without departing from the spirit and scope of the appended claims.
10‧‧‧主體單元10‧‧‧Main unit
20‧‧‧臂單元20‧‧‧arm unit
40‧‧‧升降裝置40‧‧‧ lifting device
11‧‧‧管狀殼體11‧‧‧Tubular housing
1‧‧‧機器人1‧‧‧Robot
12‧‧‧凸緣部分12‧‧‧Flange section
30‧‧‧真空室30‧‧‧vacuum room
31‧‧‧開口部31‧‧‧ openings
21‧‧‧臂基座21‧‧‧ Arm base
22‧‧‧第一臂22‧‧‧First arm
23‧‧‧第二臂23‧‧‧second arm
24‧‧‧手基座24‧‧‧Hand base
25‧‧‧輔助臂部25‧‧‧Auxiliary arm
15‧‧‧升降凸緣單元15‧‧‧ Lifting flange unit
60‧‧‧擺動裝置60‧‧‧Swing device
61a‧‧‧馬達61a‧‧‧Motor
61b‧‧‧減速器61b‧‧‧Reducer
62‧‧‧擺動軸62‧‧‧swing axis
24a‧‧‧手24a‧‧‧Hand
25a‧‧‧第一連桿25a‧‧‧first link
25b‧‧‧中間連桿25b‧‧‧ intermediate link
25c‧‧‧第二連桿25c‧‧‧second link
100‧‧‧半導製造設備100‧‧‧ semi-conductive manufacturing equipment
35‧‧‧支承部35‧‧‧Support
32‧‧‧蓋部32‧‧‧ 盖部
15a‧‧‧第一停靠凸緣15a‧‧‧First docking flange
15b‧‧‧第二停靠凸緣15b‧‧‧Second docking flange
43‧‧‧升降軸43‧‧‧ lifting shaft
42‧‧‧轉換機構42‧‧‧ Conversion agency
121‧‧‧凸緣開口121‧‧‧Flange opening
63‧‧‧傳動皮帶63‧‧‧Drive belt
64‧‧‧滑輪64‧‧‧ pulley
65‧‧‧滑輪65‧‧‧ pulley
211‧‧‧軸承211‧‧‧ bearing
O‧‧‧擺動軸O‧‧‧ swing axis
151‧‧‧定位銷151‧‧‧Locating pin
153‧‧‧接合孔153‧‧‧Join hole
622‧‧‧通孔622‧‧‧through hole
154‧‧‧通孔154‧‧‧through hole
300‧‧‧佈線電纜300‧‧‧Wiring cable
42‧‧‧轉換機構42‧‧‧ Conversion agency
43‧‧‧升降裝置43‧‧‧ lifting device
44‧‧‧線性引導件44‧‧‧Linear guides
421‧‧‧滾珠螺桿421‧‧‧Rolling screw
422‧‧‧滾珠螺帽422‧‧‧Ball nuts
112‧‧‧軸承112‧‧‧ bearing
152‧‧‧通孔152‧‧‧through hole
431‧‧‧切口部431‧‧‧cut section
450‧‧‧引導構件450‧‧‧Guiding components
Q‧‧‧佈線空間Q‧‧‧ wiring space
TS‧‧‧運入空間TS‧‧‧Into the space
H‧‧‧機器人的高度H‧‧‧ height of the robot
750‧‧‧頂棚750‧‧‧ ceiling
700‧‧‧頂棚吊車700‧‧‧ Ceiling crane
701‧‧‧鉤701‧‧‧ hook
751‧‧‧移動走道751‧‧‧Mobile walkway
X1‧‧‧運入空間的高度X1‧‧‧ height of the space
h1‧‧‧主體單元的高度H1‧‧‧ height of the main unit
h2‧‧‧臂單元的高度H2‧‧‧ height of the arm unit
S‧‧‧安裝表面S‧‧‧ mounting surface
36‧‧‧底面部分36‧‧‧ bottom part
900‧‧‧手推車900‧‧‧Trolley
910‧‧‧腳輪910‧‧‧ casters
35a‧‧‧運入孔35a‧‧‧Into the hole
920‧‧‧間隔件920‧‧‧ spacers
810‧‧‧吊環螺栓810‧‧‧ring bolts
820‧‧‧線820‧‧‧ line
125‧‧‧引導構件125‧‧‧Guiding components
126‧‧‧引導構件126‧‧‧Guiding components
600‧‧‧懸掛夾具600‧‧‧ hanging fixture
610‧‧‧環610‧‧‧ Ring
602a‧‧‧通孔602a‧‧‧through hole
603a‧‧‧通孔603a‧‧‧through hole
601‧‧‧上支承構件601‧‧‧Upper support member
602‧‧‧下支承構件602‧‧‧ lower support member
603‧‧‧下支承構件603‧‧‧ lower support member
604‧‧‧連接軸604‧‧‧Connected shaft
605‧‧‧連接軸605‧‧‧Connected shaft
606‧‧‧連接軸606‧‧‧Connected shaft
圖1是示出根據一個實施例的機器人的示意性說明圖。FIG. 1 is a schematic illustration showing a robot according to an embodimentFigure.
圖2是示出安裝在真空室內的機器人的示意性說明剖面圖。Fig. 2 is a schematic explanatory cross-sectional view showing a robot installed in a vacuum chamber.
圖3是示出主體單元和臂基座的示意性說明剖面圖。Fig. 3 is a schematic explanatory cross-sectional view showing a main body unit and an arm base.
圖4是將機器人的高度與供將機器人運入真空室中的空間的高度對比的圖式。Figure 4 is a diagram comparing the height of the robot to the height of the space in which the robot is carried into the vacuum chamber.
圖5A是圖示將主體單元安裝在真空室中的方法的說明圖。Fig. 5A is an explanatory diagram illustrating a method of mounting a main body unit in a vacuum chamber.
圖5B是圖示將主體單元安裝在真空室中的另一種方法的說明圖。FIG. 5B is an explanatory diagram illustrating another method of installing the main body unit in the vacuum chamber.
圖5C是圖示將臂單元安裝在真空室中的方法的說明圖。Fig. 5C is an explanatory diagram illustrating a method of mounting an arm unit in a vacuum chamber.
圖6是圖示將臂單元相對於主體單元粗略定位的方法的說明圖。FIG. 6 is an explanatory diagram illustrating a method of roughly positioning an arm unit with respect to a main body unit.
10‧‧‧主體單元10‧‧‧Main unit
11‧‧‧管狀殼體11‧‧‧Tubular housing
12‧‧‧凸緣部分12‧‧‧Flange section
15a‧‧‧第一停靠凸緣15a‧‧‧First docking flange
30‧‧‧真空室30‧‧‧vacuum room
31‧‧‧開口部31‧‧‧ openings
35‧‧‧支承部35‧‧‧Support
700‧‧‧頂棚吊車700‧‧‧ Ceiling crane
701‧‧‧鉤701‧‧‧ hook
750‧‧‧頂棚750‧‧‧ ceiling
751‧‧‧移動走道751‧‧‧Mobile walkway
810‧‧‧吊環螺栓810‧‧‧ring bolts
820‧‧‧線820‧‧‧ line
S‧‧‧安裝表面S‧‧‧ mounting surface
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011277454AJP2013126707A (en) | 2011-12-19 | 2011-12-19 | Robot and robot installation method |
| Publication Number | Publication Date |
|---|---|
| TW201328838Atrue TW201328838A (en) | 2013-07-16 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101136510ATW201328838A (en) | 2011-12-19 | 2012-10-03 | Robot and robot installation method |
| Country | Link |
|---|---|
| US (1) | US20130269465A1 (en) |
| JP (1) | JP2013126707A (en) |
| KR (1) | KR20130070508A (en) |
| CN (1) | CN103159026A (en) |
| TW (1) | TW201328838A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI758595B (en)* | 2018-03-31 | 2022-03-21 | 日商平田機工股份有限公司 | chamber configuration |
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| US9190306B2 (en)* | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
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