201210056 六、發明說明： 【發明所屬之技術領域】 本發明係關於太陽能晶圓位置校準裝置及具有該檢測裝置之檢測機 台’尤其是-種可校準太陽能晶圓保持在各正確位置的校準裝置及具有該 裝置之機台。 【先前技術】 潔淨能源如太陽能等之需求日增，目前鴻能的主要職方式是透過 太·電池敎轉換成電能雜使用，隨著太陽能電池_及，在封 裝成太陽能電賴必減進行嚴格的品質檢測，太陽能電池的檢測 也成為業界的重要課題。 太陽能電池的缺陷-般可分為外部瑕疫與内部缺陷，外部瑕庇是指在 佈局過程中的偏斜、漏失、破片或表面刮傷等，其中部分瑕絲光轉換為 電的效率«，另—些瑕酬可能更進—步傷害疊其他制太陽能晶 圓。内部缺陷主要是指由於結構些微斷裂造成的微裂（Micr〇-crgke)，雖 然此種微裂的裂縫寬度可能甚小，甚至僅存在於部分高度範圍，但由於微 裂會阻斷太陽能電池内部光電子的傳遞，因此會明顯降低太陽能電池所生 鲁 t此的傳輸效率，即使内部缺陷尺寸甚微小，仍然可能影響輸出電能。 此外’ §多#太陽能晶圓被統-安裝成為—片太陽能板時，若所有各 片晶圓的色彩紛呈、毫不相干’則不免予人不良印象，認定其品管不嚴。 因此在自動化過程中，亦需進-步將各片受測太陽能晶圓的色彩加以區 分，使得日光照射下色彩相近的太陽能晶圓被歸為同一類別，以使得未來 製成之成〇〇的色彩統一。 如圖1所不，太陽能晶圓11之收光面U1上具有一組供將所接收光轉 換為電能輸出的導電匯流排112,為提供快速自動化檢測，申請人亦已於前 申請案中提出如圖2所示設計之檢測機台，請一併參考圖丨，將疊放有複數 201210056 ===二人料E 21，透過入料裝置2取出待_能晶圓 A二_—條輸送路徑上紐設有光學檢測裝置4 器(圖未示），練制太_鱗影機的檢測 面瑕庇、並且進行例如前述的分色作業；再由光照檢辨;^否 示)接觸導電匯流排i 12，再以Μ 以探針(圖未 光面⑴而進行檢測，並依檢測f料_日===_ η的收 叶做為對太^晶圓11進行分類的依據。201210056 VI. Description of the Invention: [Technical Field] The present invention relates to a solar wafer position calibration device and a detection machine having the detection device, in particular, a calibration device in which the calibratable solar wafer is held at each correct position And a machine having the device. [Prior Art] The demand for clean energy such as solar energy is increasing. At present, the main mode of Hongneng's work is to convert it into electrical energy through the use of solar cells, and with solar cells, it is necessary to reduce the amount of solar cells. The quality inspection and the detection of solar cells have also become important issues in the industry. The defects of solar cells can be divided into external plagues and internal defects. External clogging refers to deflection, loss, fragmentation or surface scratching during the layout process. Some of the stroboscopic light is converted into electricity efficiency«, - Some rewards may be more advanced - step damage to stack other solar wafers. The internal defects mainly refer to the microcracks (Micr〇-crgke) caused by the slight fracture of the structure. Although the crack width of such microcracks may be very small, even only in the partial height range, the microcracks will block the interior of the solar cell. The transmission of photoelectrons will significantly reduce the transmission efficiency of the solar cell, and even if the internal defect size is very small, it may affect the output power. In addition, when the § multi-solar wafers were installed as a solar panel, if all the wafers were colorful and irrelevant, it would be unfortunate and the quality control was not strict. Therefore, in the process of automation, it is also necessary to further distinguish the colors of the solar wafers under test, so that the solar wafers with similar colors under sunlight are classified into the same category, so that the future can be made into a smashing Uniform color. As shown in FIG. 1, the light-receiving surface U1 of the solar wafer 11 has a set of conductive bus bars 112 for converting the received light into electrical energy output. To provide rapid and automatic detection, the applicant has also proposed in the prior application. As shown in Figure 2, the inspection machine is designed. Please refer to Figure 丨, stacking multiple 201210056 === two-person E 21, and take out the feeding device 2 through the feeding device 2 An optical detecting device 4 (not shown) is arranged on the path, and the detecting surface of the Tai-Ying machine is trained to perform the color separation operation, for example, and the light is detected by the light; The busbar i 12 is further detected by a probe (not shown in the figure (1), and the leaf is detected as the basis for classifying the wafer 11 according to the detection of the material_day===_η.
，·的檢顯纟在透過錢行待社陽能純 透過入料裝置2放置在輸送帶51上，由於放置過程中載 碰撞，造成待測太陽能晶圓u無法保_放置在_ 5i :震= J 4 3 曰丁圓η ^作業自無法順利貫施，例如進行光電檢測時，若待測太陽能 .曰曰圓她呆持在預定的檢測位置時，則如圖4所示，各探針μ並沒有 112，部分探針31甚至僅是接_收光面⑴ ，H排輯，使料総轉換而來的钱必須行 確數值’無疑使得自動化檢測作業檢測結果的正麵下降產 =率、成本因而上升。歪斜嚴重時，甚至可能造成受測太陽能 =圓她周邊物件而破片，不僅嚴重降低產出效能，更需增加額外的停機 /月理時間’人力成本增加，檢測的效率進—步降低。 止倘若在進行大里生產的作業流程時，經常性發生上述的問題，必然會 造j生產線良率下降’ @此如何確較測太陽能晶圓可以正確停留在檢測 機。上的適”位置’在所有自動化檢驗過程巾’糊取得正確檢測數值， 避免無謂的誤判、顺、甚至破片、停機，便是本發明的重點。 【發明内容】 本發明之-目的在提供—騎制太雜晶®鮮導人各檢測位置、 I S3 4 201210056 使自動化檢測成為可行的位置校準裝置。 本發明之又-目_供—種_域__人各檢測位 置、使自動化檢測數據更為精確的檢測機台。 避免無謂偏斜與破片風 本發明之[目的在提供_種增加檢測效率、 險的檢測機台。The inspection of the 纟 纟 纟 纟 透过 透过 透过 透过 透过 透过 透过 透过 阳 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置= J 4 3 曰丁圆η ^Operation can not be smoothly applied, for example, when performing photoelectric detection, if the solar energy to be tested is rounded, she stays at the predetermined detection position, as shown in Figure 4, each probe μ does not have 112, part of the probe 31 is even only the _ light-receiving surface (1), H series, so that the money from the conversion of the material must be confirmed by the value 'undoubtedly make the positive detection of the results of automated inspection work = yield And the cost has risen. When the skew is severe, it may even cause the measured solar energy = rounding the surrounding objects and fragmenting, which not only seriously reduces the output efficiency, but also increases the additional downtime/monthly time. The labor cost increases, and the efficiency of the detection is further reduced. If the above problems occur frequently during the operation of the production process in Dali, it will inevitably lead to a decline in the yield of the production line.] How can this be determined that the solar wafers can properly stay in the detector? The appropriate "position" on the automatic inspection process towel to obtain the correct detection value, to avoid unnecessary misjudgment, smooth, even fragmentation, shutdown, is the focus of the present invention. [Summary of the Invention] - The purpose of the present invention - Riding too heterogeneous crystals to guide each detection position, I S3 4 201210056 makes automatic detection a viable position calibration device. The invention again--------------------------------------------------------------- More accurate inspection machine. Avoid unnecessary deflection and fragmentation. The invention aims to provide a detection machine that increases detection efficiency and risk.
依照本個麟社陽能檢職台德置鱗裝置，係财 機台校準複數太陽能晶圓位置，其中上述太陽能晶圓分別具有一個收光 面、及複數位於該收光面並供將所接收光能轉換為魏輸_導電匯产 排，該檢職台包含-個沿―悔載方喊送轉待敎魏晶圓的移载 裝置、-組設置在對應該移餘置之至少—個受敵置之檢職置，盆中 該位置校準裝置包含：至少-組夾持件，包括：―個固定臂；及一㈣一 個與該移餅向夾-_寬度蝴目對棚定臂設置、並可沿對應上述 寬度方向相對棚定臂移動之活動f ;及至少_組夾持驅動件，係對應該 至少一組夾持件、並包括-個供當受該移載裝置承載之上述待測太陽能晶 圓位於該制位置時，驅_活姆使上述制太晶㈣該寬度方向 被保持在-辦應該受驗置之職位置的驅動器。 而採用上述校準裝置的太陽能晶圓檢職台，是聽檢測制太陽能 晶圓的，而供檢測的太陽能晶圓分別具有—個收細、及複數位於該收光 面並供將所接收光能轉換為魏輸出的導賴赫，鎌測機台包含：一 個基座，-個在該基座上、沿—個移載方向載送該等制太陽能晶圓的移 載裝置，-組《置在對應該移健置之至少—個影像齡之受測位置的光 于檢測裝置；-健置在對應該移載裝置之至少—個光照之受測位置的光 5 201210056 照檢測裝置；及複數組位置校準裝置，包括：複數組爽持件，包括.—個 固定臂；及-個沿—個與該鋪方向夾—角度喊度方向姆細定臂設 置、並可沿對應上述寬度方_對棚找_之轉臂；及複數組夹持 驅動件’係對應該等夹持件、並包括—個供#受該移餘置承載之上述待 測太陽能晶圓位於上述受測位置時，驅動該活動臂使上述待測太陽能晶圓 沿該寬度方向被保持在—個對應該受測位置之預定位置的驅動器。 由於機台上會對應光學檢測系統及光照檢測系統的各需要位置設置， 使得例如各別_位置_設置有—組位置校準裝置，藉以確保受測 太陽能晶圓的所處位置完全符合預期，使得太陽能晶圓在各檢測位置時均 不會至斜’不僅讓酬健更加流暢，增加其檢測之效顿正確率，也使 得依賴檢測數據進行分_分咖他確判斷，降低無謂的錯誤機 會、降低耗__縣，_晴她·、以及避免因 受測晶圓破片而需停機處理的困擾，從而達成上述所有之目的。 【實施方式】 有關树狀前述及其他技細容、_與功效，纽下配合參考圖 式之車乂佳實施_詳細說明巾，將可清楚的呈現。 处日5本Γ之待測太陽能晶圓與習知相同，因此延用圖1所示的受測太陽 電匯流排有收絲11卜並在收光面111上形成有輸出電能用的導 於其Γ， 列之檢測機台如圖5及圖6所示，包含有基座6’、及設置 署^，、^上之.系列自動化作業的入料裝置2’、移載裝置5’、光學檢測裝 m、檢職置3’、位置校轉置7,'及分類裝置8’。為便於說明起 挪番，例中將入料裝置2’供置放入料匠21，的位置稱為複數置放位置，入 2’則包括有—個對應上述置放位置的取放器22，，每-人舰21，分 201210056 別疊置有複數待測太陽能晶圓u，並由取放器22,負責由上往下、從入料匠 21’中逐一取出待測太陽能晶圓11。 一併參考圖7所示，其中移載裝置5,還包括有一道輸送帶51，，並於基 座6’上對應輸送帶51，方向設置有一組光學檢測裝置4,及光照檢測裝置3,， 在進行檢猶料，首先由各組取放n π分職各人· η，⑽待測太 陽能晶圓11取出’並且將待測太陽能晶圓u以收光面⑴肖下而背面向上According to the present Linshe Yangneng inspecting the Taide scale device, the financial machine station calibrates a plurality of solar wafer positions, wherein the solar wafers respectively have a light collecting surface, and the plurality of solar wafers are located on the light receiving surface and are received by the receiving unit. The light energy is converted into a Wei transmission _ conductive convergence production row, the inspection station contains a transfer device that is sent to the Wei wafer along the “repenter side”, and the group is set at least corresponding to the remaining position. The position checking device includes: at least a group of clamping members, including: - a fixed arm; and one (four) one with the moving cake to the clip - _ width butterfly to the shed fixed arm setting, and An activity f corresponding to the fixed arm movement corresponding to the width direction; and at least a group of clamping driving members corresponding to at least one set of clamping members and including a solar energy to be tested carried by the transfer device When the wafer is in the position of the system, the actuator is kept in the width direction of the above-mentioned system (4), and the driver should be in the position to be inspected. The solar wafer inspection station using the above calibration device is for detecting and detecting solar wafers, and the solar wafers for detection have a plurality of thinning and plural numbers on the light receiving surface for receiving the received light energy. Converted to the Wei output of the Wei, the measuring machine comprises: a pedestal, a transfer device for carrying the solar wafers on the pedestal along the direction of the transfer, Detecting the light at a position to be measured of at least one image age corresponding to the moving position; - illuminating the light at the measured position of at least one of the light corresponding to the transfer device; 201210056 illuminating the detecting device; The group position calibration device comprises: a complex array of holding members, comprising: a fixed arm; and a pair of edges along the direction of the shop direction - an angle of the direction of the direction of the arm, and along the corresponding width _ When the gantry of the shed is found; and the multiplexed array of the driving member is corresponding to the clamping member, and includes a solar wafer to be tested by the shifting, the solar wafer to be tested is located at the measured position. Driving the movable arm to make the solar wafer to be tested along the width The degree of direction is maintained at a drive that is at a predetermined position corresponding to the location being tested. Since the machine needs corresponding position setting of the optical detection system and the illumination detection system, for example, each position_position_ is provided with a group position calibration device, thereby ensuring that the position of the tested solar wafer is completely in accordance with expectations, so that The solar wafers will not be inclined at each detection position, which not only makes the rewards smoother, but also increases the accuracy of the detection. It also makes the dependence detection data to be judged, and the unnecessary error opportunities are reduced. Reducing the consumption of __ county, _ Qing she, and avoiding the need to stop processing due to the test wafer fragmentation, thus achieving all of the above purposes. [Embodiment] The above-mentioned and other technical details, _ and efficacy of the tree, and the implementation of the car with the reference pattern _ detailed description of the towel, will be clearly presented. The solar wafer to be tested is the same as the conventional one, so the extended solar power bus shown in FIG. 1 has the wire 11 and the output of the electric energy is formed on the light-receiving surface 111. In addition, as shown in FIG. 5 and FIG. 6, the detection machine of the column includes a susceptor 6', and a feeding device 2' for the series of automatic operations, and a transfer device 5'. Optical inspection equipment m, inspection position 3', position correction 7, 'and classification device 8'. For convenience of explanation, in the example, the feeding device 2' is placed in the position of the material maker 21, and the position is referred to as a plurality of placement positions, and the entry 2' includes a pick-and-place device 22 corresponding to the above-mentioned placement position. , each person ship 21, points 201210056 do not stack a plurality of solar wafers to be tested u, and by the pick and place device 22, responsible for taking the solar wafers to be tested one by one from the top into the bottom 21 . Referring to FIG. 7 together, the transfer device 5 further includes a conveyor belt 51, and a corresponding conveyor belt 51 on the base 6', and a set of optical detecting devices 4 and a light detecting device 3 are disposed in the direction. In the inspection, first of all, each group picks up n π, each person, η, (10) the solar wafer 11 to be tested is taken out 'and the solar wafer to be tested is taken up by the light-receiving surface (1)
的方式，被放置於輸送帶51，上減輸送至光學檢測裝置4，所對應的檢測位 置，同時由位置校準裝置7,的夾持件71’進行位置校準。 其中，本例的夾持件71，包括有：固定臂711，、活動臂712，、夹持驅動 件713’及侦測器714,，其中活動臂712，與固定臂7ιι，在本例中是呈一平行 角度設置，且之間鋪有—段大於待測太陽能晶圓u寬度方向的寬度距 離’當待測太陽能晶圓u由輸送㈣，輸送到設有餅件71，的檢測位置時 會觸發侧器714’，由_器714，判鱗測太陽能晶圓u已位於檢测位 置’而傳輸指令至夾持驅動件713,，由夹持驅動件713，之驅動器7⑶，驅動 活動臂爪，依圖中粗黑箭頭所示，沿著上述宽度方向相對朝固定臂川，移 =’逼迫制太陽能晶圓u進人縱範_，而且，鱗免待 圓U被夹持導正時發生不而破片，固定臂7ii，及活動臂712主體曰 7m、712Γ彼此相向側，更分別設置有—組緩衝部贈、助 、7122观質係在此例釋為_，钱，熟悉本技術者亦可輕易推 導至橡權等具緩衝性之材質。 在進行光學檢測時 ,,, 衣瓦4无經由例如第一組的背面檢測考 太陽_ u的_彡像，而此_像置 =_太_圓U被取” 22，移觀輸送㈣，上所 置，為避臟樹彳_鴻_ u放嫩w = 此衫像操取位置微-組夾持件71，，進行待測太陽 2 201210056 準。影像操取後，請-併參考如圖8所示， 11依箭頭指示方向進行翻面，使其收 （測太陽能晶圓 头收先面111向上而背面向下，以供菌_ 組的收光硫· 42’之攝影機練酬域能 11啸光㈣像: 過背面檢測器41，及收光面檢測器42,確認待測太陽能晶圓U _表= 疵或佈局不良問題。 而為避免鋪繼待測太陽_ u被放置時產生歪斜，耻於影 作：位置45亦需設一位置校準裝置7,以進行位置的爽持校準;隨後再由 作為第三組分色檢測器你之攝影機，針對待測太陽能晶圓^進行顏色判 2檢測，並將檢測結果之資料傳輸至—組控制端，藉以驅動後續的分類 裝置8’進打分類，雖穌例中僅在背面檢測器Μ，及 :峨有夹持件71，，但如熟悉本技術領域一^ =母一組攝韻所對應的檢麻置分顺置—錄置校轉置7,以進行校 ^光學表面檢測作業完成後，一併參考如圖9所示，由輸送帶Μ，將待 =⑽圓1聰蝴繼3’伽職騎職的光電檢測 3 ’且同樣的可在光電檢測位置33,設一央持件71，以進行校準，首先 式餅^71’對6位於光電檢測位置奸的待耻陽能晶圓11如上述同樣方 ^ W彳太陽11進械置校準’再由—組例釋為機械臂32,的導接 切^進行驅動-個對絲光輸彳位置33，設置之光照檢測裝置3，中的 作為導接電極的-組探針31’，使探針31，將被機械臂％，驅動而隨即 差並穩固地導接至該片待測太陽能晶圓u的導接g流排山，再由光 二％發光並照射至收光面⑴，此時，待測太陽能晶圓U之收光面⑴ =光源30,所發光的照射，並將光能轉換為電能而經由導接匯流排ιΐ2與 探針31，輸出供檢測 將7〇利的太H晶圓將由輸送帶，輸送往下游之分類裝置8’ 201210056 時，必須先驅動機械臂32,將尚抵壓於該片太陽能晶圓導接匯流排112上的 探針31，上移，並依光學檢測裝置4，及光照檢測裝置3,所檢測數據結果進行 分析，交由分類裝置8,做為完社陽能晶圓12分_依據，由纽分類器 81’之一將完測太陽能晶圓12放至對應的分類料匣82，内。 而本案之第二較佳實施例如圖1G所示，其中夾持件71，，之夾持驅動件 713”之驅動器簡”可與活動臂712，，設置在同一側，依粗黑箭頭指示方向， 以推/拉活動臂712”的方式進行校準，而且活動臂712，’進行校準的時機亦可 使用-組處理器7丨5”以計時的方式滅估算出待測太陽能晶圓叫皮移送到The manner of being placed on the conveyor belt 51 is reduced to the corresponding detection position of the optical detecting device 4, and the position is calibrated by the holding member 71' of the position aligning device 7. The holding member 71 of the present example includes: a fixed arm 711, a movable arm 712, a clamping driving member 713' and a detector 714, wherein the movable arm 712 and the fixed arm 7 ιι, in this example Is set at a parallel angle, and is laid between - the width distance greater than the width direction of the solar wafer to be tested. When the solar wafer to be tested is transported (four), it is transported to the detection position where the cake 71 is provided. The trigger side device 714' is triggered by the _ 714 to determine that the solar wafer u has been located at the detection position 'and transmits the command to the clamping drive member 713, and the driver 7 (3) is driven by the clamping drive member 713 to drive the movable arm The claws, as indicated by the thick black arrows in the figure, are relatively fixed toward the fixed arm along the width direction, and move = 'forced solar wafers u into the vertical _, and the scales are kept from being clamped. In the case of a fragment, the fixed arm 7ii, and the main body 曰7m, 712Γ of the movable arm 712 are opposite to each other, and are respectively provided with a group buffer, a gift, and a 7122 view system, which is explained herein as _, money, familiar with the present technology. It can also be easily derived from cushioning materials such as rubber. When the optical detection is performed, the clothing tile 4 is not detected by, for example, the back side of the first group, and the image is detected by the back side of the first group, and the image is replaced by 22, and the transport is carried out (4). Set on the top, to avoid the dirty tree 彳 _ Hong _ u put tender w = this shirt like the position of the micro-group grip 71, for the sun to be tested 2 201210056. After the image manipulation, please - and refer to As shown in Fig. 8, 11 is turned over in the direction indicated by the arrow to make it receive (the solar wafer head adopts the front surface 111 upward and the back side is downward, so as to provide the camera for the collection of sulfur sulphur 42'. Can 11 Xiaoguang (4) image: Pass the back detector 41, and the light collecting surface detector 42, confirm the solar wafer U _ table = 疵 or poor layout problem to be tested. And to avoid laying the sun to be tested _ u is placed It is skewed and shameful: position 45 also needs to be equipped with a position calibration device 7 for positional calibration; then, as a third component color detector, your camera will be used for the solar wafer to be tested. The color judgment 2 is detected, and the data of the detection result is transmitted to the group control end, thereby driving the subsequent classification device 8' into the classification, although In the example, only the back detector Μ, and: 峨 has the clamping member 71, but as is familiar with the technical field of the ^ ^ female group of rhyme corresponding to the inspection and placement of the placement - recording transposition 7, After the completion of the optical surface inspection operation, as shown in Figure 9, the conveyor belt Μ, will be = (10) round 1 Conghua following the 3' jia occupational photodetection 3 'and the same can be Photoelectric detection position 33, a central holding member 71 is provided for calibration, and the first type of cake 71 is used to calibrate the wafer to be smeared at the photodetection position as described above. 'Re----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- The probe 31, which is driven by the arm, is then differentially and stably guided to the lead g of the solar wafer to be tested, and then emitted by the light and irradiated to the light collecting surface (1). At the time, the light-receiving surface of the solar wafer U to be tested (1) = the light source 30, the illumination of the illumination, and the conversion of the light energy into electrical energy via the conduction bus ΐ 2 and exploration 31, the output for testing will be 7 profitable too H wafer will be transported by the conveyor belt to the downstream sorting device 8' 201210056, must first drive the robot arm 32, will still be pressed against the solar wafer guide bus The probe 31 on the 112 is moved up, and according to the optical detection device 4, and the illumination detecting device 3, the detected data results are analyzed and submitted to the classification device 8, as a complete solar wafer 12 points, based on One of the new classifiers 81' places the completed solar wafer 12 into the corresponding sorting magazine 82. The second preferred embodiment of the present invention is shown in FIG. 1G, in which the clamping member 71, the clamping drive The driver of the piece 713" can be aligned with the movable arm 712, on the same side, in the direction indicated by the thick black arrow, in the manner of pushing/pulling the movable arm 712", and the movable arm 712, 'the timing of the calibration is also The -group processor 7丨5” can be used to estimate the solar wafers to be tested in a timed manner.
檢測位置的時卩0[以時_期驅祕動臂712”進行制太陽能晶圓u的^ 準作業。 X 本發明之太陽能晶1]位置校轉置及具有該制裝置之_機台與習 知技術相互比辦’ S為檢靡置纽有位置鮮裝置，麵行待測太陽 能晶圓自動化移載檢測作树，待測太陽能關可於各檢測位置被校準， 因此’在進行光學檢測時’使擷取到的待測太陽能晶圓影像畫面在預期範 圍内’同樣的探針接觸至太陽能晶_導電匯流排進行光電檢測時，會完 全接觸到導《簡耐會接_其它部份，使得各制作業量測時的正 確率增加，尤其在輸送難巾，更可降健為放置歪斜輕撞周邊物件而 化成破片的風險’使產出良率隨之上升，整體良率即可達到預期目標。 准乂上所述者’僅本發明之較佳實施例而已，當不能以此限定本發明 實施之範g|即大凡依本發明申請專利範圍及發明說明内容所作簡單的等 效變化與修#，皆域本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1疋目刚常見太陽能晶圓受光面俯視之示意圖。 圖2是本案申請人已經提出的前案機台結構之示意圖。 圖3是太陽能晶圓歪斜放置在輸送帶上之示意圖。 201210056 意圖’說明探針無法取得 圖4是太陽能晶圓呈歪斜狀被探針接觸之示 正破量測數據。 圖5是本案第一較佳實施例的機台俯視之示意圖 圖6是圖5實施例的側視之示意圖。 圖7是圖5實關之移絲置及位置校轉置之立體示意圖。 圖8是圖5實施例之翻轉器之側視示意圖。 圖9是圖5實施例之機械臂驅動探針進行檢測之側視示意圖。At the time of detecting the position 卩0 [time-time driving arm 712", the solar wafer u is operated. X The solar crystal 1] position of the present invention is rotated and the machine having the device is The conventional technology is better than the other ones. The S is a new device with a positional device, and the solar wafer is automatically transferred to the test. The solar energy to be tested can be calibrated at each detection position, so 'optical detection is performed. When the 'photograph of the solar wafer to be tested is taken within the expected range', the same probe is in contact with the solar crystal-conducting busbar for photodetection, and it will be completely in contact with the other parts of the guide. This will increase the accuracy of the measurement of each system, especially in the transportation of difficult towels, but also reduce the risk of placing a slanting and slamming surrounding objects into a fragment. The output yield will increase and the overall yield will be reached. The object of the present invention is to be construed as merely a preferred embodiment of the present invention, and is not intended to limit the scope of the invention. With repair# The scope of the invention is covered by the patent. [Simplified illustration of the figure] Fig. 1 is a schematic view of the light-receiving surface of a solar wafer. Figure 2 is a schematic diagram of the structure of the front machine that the applicant has proposed. It is a schematic diagram of the solar wafer being placed obliquely on the conveyor belt. 201210056 Intended to explain that the probe cannot be obtained. FIG. 4 is the positive displacement measurement data of the solar wafer being skewed by the probe. FIG. Figure 6 is a schematic side view of the embodiment of Figure 5. Figure 7 is a perspective view of the moving wire and position reversal of Figure 5 of Figure 5. Figure 8 is a flip of the embodiment of Figure 5. Figure 9 is a side elevational view of the robotic arm driven probe of the embodiment of Figure 5 for detection.
◊圖10是本案第二較佳實施例的夾持驅動件與活動臂設置在同一側、並 受處理器控制之立體示意圖。 【主要元件符號說明】 11 太(¾能晶圓 12 完測太陽能晶圓 111 收光面 112 導電匯流排 2、2， 入料裝置 21 >21' 入料匣 22， 取放器 3、3， 光照檢測裝置 30， 光源 31、31， 探針 32， 機械臂 33， 光電檢測位置 4'4， 光學檢測裝置 5， 移載裝置 51 '51’ 輸送帶 6， 基座 7’ 位置校準裝置 71，、 71” 夹持件 711’ 固定臂 712’ ' » 712”活動臂 713’， ‘ 713”夾持驅動件 714, 偵測器 715，’ 處理器 7111， 、7121’主體 7112’ 、7122’緩衝部 8， 分類裝置10 is a perspective view of the second preferred embodiment of the present invention in which the clamping drive member and the movable arm are disposed on the same side and are controlled by the processor. [Main component symbol description] 11 Too (3⁄4 energy wafer 12 finished solar wafer 111 light-receiving surface 112 conductive busbar 2, 2, feeding device 21 > 21' feeding port 22, pick-and-place device 3, 3 Light detecting device 30, light source 31, 31, probe 32, robot arm 33, photodetection position 4'4, optical detecting device 5, transfer device 51 '51' conveyor belt 6, base 7' position calibration device 71 , 71" gripping member 711' fixed arm 712' ' » 712" movable arm 713', '713' gripping drive member 714, detector 715, 'processor 7111, '7121' main body 7112', 7122' Buffer portion 8, sorting device
201210056 40’ 、 45, 影像擷取位置 8Γ 分類器 41, 背面檢測器 82， 分類料匣 42， 收光面檢測器 7131， 、7131”驅動器 43, 分色檢測器 44, 翻轉器201210056 40' , 45, Image capture position 8Γ Classifier 41, Back detector 82, Sorter 匣 42, Light-receiving surface detector 7131, , 7131” Driver 43, Color separation detector 44, Flip-flop