201010795 九、發明說明： 【發明所屬之技術領域】 本案係關於一種微流體輸送及霧化裝置，尤指一種適 用於電子元件散熱之微流體輸送及霧化裝置。 【先前技術】 近年來，電腦系統已逐漸成為人們日常生活中不可或 _ 缺的設備，其内部設有主機板以維持整個電腦系統的運 作，然而主機板於運作時其上的發熱元件，例如：CPU， 會產生大量的熱量，假若熱量無法適當地轉移至外界而累 積於殼體内，則不只會減損發熱元件的壽命甚至於損毁， 而且會降低整個電腦系統的運作效能，因此，為維持電腦 系統的使用壽命與效能，在主機板上通常會採取適當的散 熱機制以將熱量轉移至外界。 目前的發熱元件的散熱方式係利用一抽吸泵浦配合 ❿ 一熱交換機，其中熱交換機貼付於發熱元件的表面，主要 利用泵浦將水抽入熱交換機内，利用液體，例如：水，將 發熱元件所產生的熱量移除，以達到散熱的功效。 雖然習知使用抽吸泵浦配合熱交換機的方式可達到 將發熱元件所產生的熱量移除的功效，但是僅利用水不斷 重複進行循環的散熱效果有限，且使用抽吸泵浦的結構設 置不只體積大、結構複雜、不易組裝且成本高，無法符合 薄形化的需求。 201010795 因此，如何發展一種可改善上述習知技術缺失之微流 體輸送及霧化裝置，實為目前迫切需要解決之問題。 【發明内容】 本案之主要目的在於提供一種微流體輸送及霧化裝 置，俾解決習知藉由泵浦配合熱交換機對發熱元件進行散 熱的方式，除了以水進行循環的散熱效果有限外，使用抽 吸泵浦的結構設置不只體積大、結構複雜、不易組裝且成 ® 本高外，亦無法符合薄形化需求等缺點。 為達上述目的，本案之一較廣義實施樣態為提供一種 微流體輸送及霧化裝置，用以傳送流體並將流體霧化成複 數個液滴喷出，其係包含：微流體輸送器，具有入口通道 及出口通道；霧化器，其係具有喷嘴片、儲存槽及致動元 件，喷嘴片係與儲存槽相對應設置，且與致動元件連接； 其中，微流體輸送器係將流體經由入口通道傳送至霧化器 _ 之儲存槽，使喷嘴片因應致動元件之驅動而將流體霧化成 爆 複數個液滴喷出。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，k皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第一圖A及第一圖B，其中第一圖A係為較佳 7 201010795 實施例之微流體輸送及霧化裝置之正面分解結構示意，第 一圖B則為第一圖A之反面分解結構示意圖結構，如圖所 示，本案之微流體輸送及霧化裝置1主要由一微流體輸送 器2結合一霧化器3所組成，其中，微流體輸送器2主要 係由閥體座21、閥體蓋體22、閥體薄膜23、複數個暫存 室、致動裝置24及蓋體25所組成，而霧化器3則是由儲 存槽31、喷嘴片32、致動元件33及壓板34所組成，其 中，壓板34主要用來定位致動元件33及喷嘴片32，且具 ® 有相對應喷嘴片32之複數個喷孔321設置之開口 341。 請再參閱第一圖A，閥體蓋體22及致動裝置24之間 形成一壓力腔室225，主要用來儲存流體，該微流體輸送 器2之組裝方式係將閥體薄膜23設置於閥體座21及閥體 蓋體22之間，並使閥體薄膜23與閥體座21及閥體蓋體 22相互堆疊結合，且在閥體薄膜23與閥體蓋體22之間形 成一第一暫存室，而在閥體薄膜23與閥體座21之間形成 _ 一第二暫存室，並且於閥體蓋體22上之相對應位置更設 置有致動裝置24，致動裝置24係由一振動薄膜241以及 一致動器242組裝而成，用以驅動微流體輸送器2之作 動，最後，再將蓋體25設置於致動裝置24之上方，故其 係依序將閥體座21、閥體薄膜23、閥體蓋體22、致動裝 置24及蓋體25相對應堆疊設置，以完成微流體輸送器2 之組裝。 請再參閱第一圖A，閥體座21及閥體蓋體22係為微 流體輸送器2中導引流體進出之主要結構，閥體座21係 201010795 具有一個入口通道211以及一個出口通道212，流體係經 由入口通道211傳送至閥體座21上表面之一開口 213,並 且閥體薄膜23及閥體座21之間所形成的第二暫存室即為 圖中所示之出口暫存腔214，但不以此為限，其係由閥體 座21之上表面於與霧化器3之儲存槽31相對應之位置產 生部分凹陷而形成，並與儲存槽31及出口通道212相連 通，該出口暫存腔214係用以暫時儲存流體，並使該流體 由出口暫存腔214經由一開口 215而輸送至儲存槽31，再 _ 經由出口通道212排出。 以及，在閥體座21上更具有複數個凹槽結構，用以 供一密封環261(如第二圖A所示）設置於其上，閥體座21 係具有環繞開口 213週邊之凹槽216，及環繞於出口暫存 腔214週邊之凹槽217，主要藉由設置於凹槽216及217 内之密封環261使閥體座21與閥體薄膜23之間緊密的貼 合，以防止流體外洩。 ©閥體蓋體22係具有一上表面220及一下表面221，以 及在閥體蓋體22上亦具有貫穿上表面220至下表面221 之入口閥門通道222及出口閥門通道223，且該入口閥門 通道222係設置於與閥體座21之開口 213相對應之位置， 而出口閥門通道223則設置於與閥體座21之出口暫存腔 214内之開口 215相對應之位置，並且閥體薄膜23及閥體 蓋體22之間所形成之第一暫存室即為圖中所示之入口暫 存腔224，且不以此為限，其係由閥體蓋體22之下表面 221於與入口閥門通道222相對應之位置產生部份凹陷而 9 201010795 形成，且其係連通於入口閥門通道222。 請再參閱第一圖A，閥體蓋體22之上表面220係部份 凹陷，以形成一壓力腔室225，其係與致動裝置24之致動 器242相對應設置，壓力腔室225係經由入口閥門通道222 連通於入口暫存腔224，並同時與出口閥門通道223相連 通。 另外如第一圖A及B所示，閥體蓋體22上同樣具有 複數個凹槽結構，以本實施例為例，在閥體蓋體22之上 ® 表面220係具有環繞壓力腔室225而設置之凹槽226，而 在下表面221上則具有環繞設置於入口暫存腔224之凹槽 227、環繞設置於出口閥門通道223之凹槽228，同樣地， 上述凹槽結構係用以供一密封環262設置於其中，主要藉 由設置於凹槽227及228内之密封環262使閥體蓋體22 與閥體薄膜23之間緊密的貼合，以防止流體外洩，而設 置於凹槽226内之密封環262則用來使致動裝置24之致 φ 動薄膜241與閥體蓋體22之間緊密的貼合，以防止流體 外洩（如第二圖A所示）。 請再參閱第一圖A及B，閥體薄膜23主要係為一厚 度實質上相同之薄片結構，其上係具有複數個鏤空閥開 關，包含第一閥開關以及第二閥開關，於本實施例中，第 一閥開關係為入口閥門結構231，而第二閥開關係為出口 閥門結構232，其中，入口閥門結構231係具有入口閥片 2313以及複數個環繞入口閥片2313週邊而設置之鏤空孔 洞2312，另外，在孔洞2312之間更具有與入口閥片2313 201010795 相連接之延伸部2311’當閥體薄膜23承受自壓力腔室225 傳遞而來之應力時，如第二圖c所示，出口閥門結構232 開啟而使流體釋出時，入口閥門結構231係整個平貼於閥 體座21之上，此時入口閥片2313會緊貼於微凸結構218, 而畨封住閥體座21上之開口 213,且其外圍的鏤空孔洞 2312及延伸部2311則順勢浮貼於閥體座21之上，故因此 入口閥門結構231之關閉作用，使流體無法流出。 請再參閱第-圖B並配合第二圖A，於閥體蓋體22 之下表® 221之出口閥門通道223的邊緣係環繞設置一微 凸結構229，係與出口閥門結構232之出口閥片2323相抵 頂，用以施一預力於該出口閥門結構232，一旦，入口閥 門結構231開啟而使流體流入閥體座21内部時，闊體薄 膜23之出口閥門結構232仍能與微凸結構㈣形成一段 封閉面的接觸’能產生更大更佳之預蓋緊防止逆流的效 ⑩ ❿當暖薄膜23受關力腔室奶體積增加而產生 之吸力作用下，由於設置於閥體蓋體22之微凸結構似 已提供出口閥門結構232 一預力，因而出口闊片助 II由延伸部2321的支撐而產生更大之預蓋緊效果，以防 室225之負壓而使入°閥門結㈣ 產生位移（如第二圖B所示），此時，流體則可經由鎮空之 孔而23i2由閥體座21流至閥體蓋體22之人 201010795 壓力腔室225產生之正負壓力差而迅速的開啟或關閉，以 控制流體之進出，並使流體不會回流至閥體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232，其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述，惟與出口閥門結構232相抵頂之微凸結構 229設置方向係與與入口閥門結構231相抵頂之微凸結構 218反向設置，如第二圖C所示，因而當壓力腔室225壓 _ 縮而產生一推力時，設置於閥體座21上表面之微凸結構 218將提供入口閥門結構231 —預力（Preforce)，使得入口 閥片2313可藉由延伸部2311之支撐而產生更大之預蓋緊 效果，以防止逆流，當因壓力腔室225之正壓而使出口閥 門結構232產生位移，此時，流體則可經由鏤空之孔洞2322 由壓力腔室225經閥體蓋體22而流至閥體座21之出口暫 存腔214内，並可經由開口 215流入儲存槽31内並經由 出口通道212排出，如此一來，則可經由出口閥門結構232 開啟之機制，將流體自壓力腔室225内洩出，以達到流體 輸送之功能。 請再參閱第一圖B及第二圖A，霧化器3與微流體輸 送器2的組裝方式係將喷嘴片32及致動元件33所組成的 結構設置於微流體輸送器2之閥體座21及壓板34之間， 並相互堆疊結合，且於儲存槽31的周圍係環繞設置一凹 槽311，用以供一密封環263設置於其中，主要藉由設置 於凹槽311内之密封環263使閥體座21與喷嘴片32貼 12 201010795 合，以防止流體外洩，即可形成本案之微流體輸送及霧化 裝置1 (如第一圖C及D所示）。 請再參閱第一圖B、第二圖A及第三圖A，於本實施 例中，霧化器3之致動元件33係環繞設置於喷嘴片32之 複數個喷孔321的周圍，且喷孔321的兩側係分別與儲存 槽31及壓板34之開口 341相對應設置，且該儲存槽31 係由閥體座21之下表面凹陷設置，且與出口通道212、閥 體座21之開口 215及出口暫存腔214相連通。 _ 請同時參閱第二圖A、B、C，如第二圖A所示，當蓋 體25、致動裝置24、閥體蓋體22、閥體薄膜23、密封環 261、262、閥體座21、喷嘴片32、致動元件33、密封環 263以及壓板34彼此對應組裝設置後，即可成為本案之微 流體輸送及霧化裝置1。 當以一電壓驅動致動器242時，致動裝置24 產生彎曲變形，如第二圖B所示，致動裝置24係朝箭號a 所指之方向向上彎曲變形，使得壓力腔室225之體積增 _ 加，因而產生一吸力，使閥體薄膜23之入口閥門結構231、 出口閥門結構232承受一向上之拉力，並使已具有一預力 之入口閥門結構231之入口閥片2313迅速開啟（如第二圖 B所示），使流體可大量地經由閥體座21上之入口通道211 被吸取進來，並流經閥體座21上之開口 213、閥體薄膜 23上之入口閥門結構231之孔洞2312、閥體蓋體22上之 入口暫存腔224、入口閥門通道222而流入壓力腔室225 之内。 13 201010795 此時’由於閥體薄膜23之入口閥門結構23卜出口閥 門結構232承受該向上拉力，故位於另—端之出口闊門結 構232係因該向上拉力使得位於閥體薄膜23上之出口闕 月2323密封住出口闕門通道223,而使得出 232 關閉。 # 虽致動裝置224因電場方向改變而如第201010795 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a microfluidic delivery and atomization device, and more particularly to a microfluidic delivery and atomization device suitable for heat dissipation of electronic components. [Prior Art] In recent years, computer systems have gradually become an indispensable device in people's daily life, with a motherboard inside to maintain the operation of the entire computer system, but the heating elements on the motherboard during operation, for example : CPU, will generate a lot of heat, if the heat can not be properly transferred to the outside and accumulate in the housing, it will not only reduce the life of the heating element or even damage, but also reduce the operating efficiency of the entire computer system, therefore, to maintain The life and performance of the computer system, usually on the motherboard to take appropriate heat dissipation mechanism to transfer heat to the outside world. The heat dissipation method of the current heating element utilizes a suction pump to cooperate with a heat exchanger, wherein the heat exchanger is attached to the surface of the heating element, and the pump is mainly used to pump water into the heat exchanger, and the liquid, for example, water, will be used. The heat generated by the heating element is removed to achieve heat dissipation. Although it is known that the effect of removing the heat generated by the heating element can be achieved by using a suction pump in combination with a heat exchanger, the heat dissipation effect of continuously repeating the circulation using only water is limited, and the structure setting using the suction pump is not limited. It is bulky, complex in structure, difficult to assemble, and costly, and cannot meet the requirements of thinning. 201010795 Therefore, how to develop a microfluidic transport and atomization device that can improve the above-mentioned conventional technology is an urgent problem to be solved. SUMMARY OF THE INVENTION The main object of the present invention is to provide a microfluidic transport and atomization device, which solves the conventional method of dissipating heat from a heat-generating component by a pump-fitted heat exchanger, except that the heat dissipation effect by circulating water is limited. The structure of the suction pump is not only bulky, complex, difficult to assemble, but also inferior to thinning requirements. In order to achieve the above object, a broader aspect of the present invention provides a microfluidic delivery and atomization device for transferring a fluid and atomizing the fluid into a plurality of droplet ejections, comprising: a microfluidic conveyor having An inlet passage and an outlet passage; an atomizer having a nozzle piece, a storage tank and an actuating element, the nozzle piece being disposed corresponding to the storage tank and connected to the actuating element; wherein the microfluidic conveyor is configured to pass the fluid The inlet passage is transferred to the storage tank of the atomizer _ such that the nozzle piece atomizes the fluid into a burst of droplets in response to actuation of the actuating element. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention is capable of various changes in various aspects, and that the description and illustration are in the nature of the description and are not intended to limit the present invention. Please refer to FIG. 1A and FIG. BB, wherein the first figure A is a front exploded structure of the microfluidic transport and atomization device of the preferred embodiment of 201010795, and the first figure B is the first figure A. The reverse surface decomposition structure schematic structure, as shown in the figure, the microfluidic delivery and atomization device 1 of the present invention is mainly composed of a microfluidic conveyor 2 combined with an atomizer 3, wherein the microfluidic conveyor 2 is mainly composed of a valve body The seat 21, the valve body cover 22, the valve body film 23, the plurality of temporary storage chambers, the actuating device 24 and the cover body 25, and the atomizer 3 is composed of the storage tank 31, the nozzle piece 32, and the actuating element 33 and a pressure plate 34, wherein the pressure plate 34 is mainly used for positioning the actuating member 33 and the nozzle plate 32, and has an opening 341 provided with a plurality of nozzle holes 321 corresponding to the nozzle plate 32. Referring to FIG. A again, a pressure chamber 225 is formed between the valve body cover 22 and the actuating device 24 for storing fluid. The microfluidic conveyor 2 is assembled by placing the valve body film 23 on the valve body 23 . Between the valve body seat 21 and the valve body cover 22, the valve body film 23 and the valve body seat 21 and the valve body cover body 22 are stacked on each other, and a valve body film 23 and the valve body cover body 22 are formed. a first temporary storage chamber, and a second temporary storage chamber is formed between the valve body film 23 and the valve body seat 21, and an actuating device 24 is further disposed at a corresponding position on the valve body cover 22, the actuating device The 24 series is assembled by a vibrating membrane 241 and an actuator 242 for driving the microfluidic conveyor 2, and finally, the cover 25 is placed above the actuating device 24, so that the valve is sequentially The body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24, and the cover body 25 are correspondingly stacked to complete the assembly of the microfluidic conveyor 2. Referring to FIG. A again, the valve body seat 21 and the valve body cover 22 are the main structures for guiding fluid in and out of the microfluidic conveyor 2, and the valve body seat 21 201010795 has an inlet passage 211 and an outlet passage 212. The flow system is transmitted to the opening 213 of the upper surface of the valve body seat 21 via the inlet passage 211, and the second temporary storage chamber formed between the valve body film 23 and the valve body seat 21 is temporarily stored as an outlet shown in the figure. The cavity 214, but not limited thereto, is formed by partially recessing the upper surface of the valve body seat 21 at a position corresponding to the storage groove 31 of the atomizer 3, and is connected to the storage tank 31 and the outlet passage 212. The outlet temporary storage chamber 214 is configured to temporarily store the fluid and transport the fluid from the outlet temporary storage chamber 214 to the storage tank 31 via an opening 215, and then discharged through the outlet passage 212. And a plurality of groove structures on the valve body seat 21 for providing a sealing ring 261 (as shown in FIG. 2A), the valve body seat 21 having a groove surrounding the periphery of the opening 213 216, and a groove 217 surrounding the periphery of the outlet temporary cavity 214, the sealing body 211 and the valve body film 23 are closely adhered to each other mainly by the sealing ring 261 disposed in the grooves 216 and 217 to prevent Fluid leaks. The valve body cover 22 has an upper surface 220 and a lower surface 221, and an inlet valve passage 222 and an outlet valve passage 223 extending through the upper surface 220 to the lower surface 221 on the valve body cover 22, and the inlet valve The passage 222 is disposed at a position corresponding to the opening 213 of the valve body seat 21, and the outlet valve passage 223 is disposed at a position corresponding to the opening 215 in the outlet temporary chamber 214 of the valve body seat 21, and the valve body film The first temporary storage chamber formed between the 23 and the valve body cover 22 is the inlet temporary storage chamber 224 shown in the drawing, and is not limited thereto, and is disposed on the lower surface 221 of the valve body cover 22 A position corresponding to the inlet valve passage 222 creates a partial depression and 9 201010795 is formed and is in communication with the inlet valve passage 222. Referring again to FIG. A, the upper surface 220 of the valve body cover 22 is partially recessed to form a pressure chamber 225 corresponding to the actuator 242 of the actuator 24, the pressure chamber 225 It is communicated to the inlet temporary chamber 224 via the inlet valve passage 222 and simultaneously communicates with the outlet valve passage 223. In addition, as shown in the first FIGS. A and B, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the upper surface of the valve body cover 22 has a surrounding pressure chamber 225. The groove 226 is disposed on the lower surface 221, and has a groove 227 disposed around the inlet temporary cavity 224 and surrounding the groove 228 disposed in the outlet valve passage 223. Similarly, the groove structure is used for A sealing ring 262 is disposed therein, and the valve body cover 22 and the valve body film 23 are closely adhered to each other mainly by the sealing ring 262 disposed in the grooves 227 and 228 to prevent fluid leakage. The seal ring 262 in the recess 226 is used to provide a tight fit between the diaphragm 241 of the actuator 24 and the valve body cover 22 to prevent fluid leakage (as shown in Figure 2A). Referring to FIGS. A and B again, the valve body film 23 is mainly a sheet structure having substantially the same thickness, and has a plurality of hollow valve switches thereon, including a first valve switch and a second valve switch. In an example, the first valve opening relationship is an inlet valve structure 231, and the second valve opening relationship is an outlet valve structure 232, wherein the inlet valve structure 231 has an inlet valve piece 2313 and a plurality of surrounding inlet valve pieces 2313 disposed therebetween. The hollow hole 2312 is further provided with an extension 2311' connected to the inlet valve piece 2313 201010795 between the holes 2312. When the valve body film 23 is subjected to the stress transmitted from the pressure chamber 225, as shown in the second figure c When the outlet valve structure 232 is opened to release the fluid, the inlet valve structure 231 is entirely flushed over the valve body seat 21, and the inlet valve piece 2313 is in close contact with the micro-convex structure 218, and the valve is sealed. The opening 213 of the body seat 21, and the hollow hole 2312 and the extending portion 2311 of the outer periphery thereof are floated on the valve body seat 21, so that the closing function of the inlet valve structure 231 prevents the fluid from flowing out. Referring again to FIG. B and in conjunction with FIG. 2A, a micro-convex structure 229 is disposed around the edge of the outlet valve passage 223 of the lower surface of the valve body cover 22, which is an outlet valve of the outlet valve structure 232. The sheet 2323 is abutted against the top for applying a pre-force to the outlet valve structure 232. Once the inlet valve structure 231 is opened to allow fluid to flow into the interior of the valve body seat 21, the outlet valve structure 232 of the wide body film 23 can still be slightly convex. The structure (4) forms a contact with a closed surface to produce a larger and better pre-covering effect against backflow. 10 When the warm film 23 is subjected to the suction force generated by the increase in the volume of the chamber milk, it is placed on the valve body cover. The micro-convex structure of 22 seems to have provided a pre-stress of the outlet valve structure 232, so that the outlet wide-area assist II is supported by the extension portion 2321 to produce a greater pre-tightening effect, so as to prevent the negative pressure of the chamber 225 from entering the valve. The junction (4) produces a displacement (as shown in the second figure B). At this time, the fluid can flow through the hole of the air hole 23i2 from the valve body seat 21 to the valve body 22 of the person 201010795 pressure chamber 225 generates positive and negative pressure Poorly turned on or off to control The fluid enters and exits and the fluid does not flow back to the valve body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the direction of the micro-convex structure 229 abutting the outlet valve structure 232 is opposite to the micro-convex structure 218 abutting the inlet valve structure 231, as shown in the second figure C, and thus when the pressure chamber 225 is pressed _ When a thrust is generated, the micro-convex structure 218 disposed on the upper surface of the valve body seat 21 will provide the inlet valve structure 231 - Preforce, so that the inlet valve piece 2313 can be made larger by the support of the extension portion 2311. The pre-covering effect is to prevent backflow. When the outlet valve structure 232 is displaced due to the positive pressure of the pressure chamber 225, the fluid can be passed from the pressure chamber 225 through the valve body cover 22 via the hollowed hole 2322. And flowing into the outlet temporary chamber 214 of the valve body seat 21, and flowing into the storage tank 31 through the opening 215 and discharging through the outlet passage 212, so that the mechanism can be opened via the outlet valve structure 232. The fluid pressure in the chamber 225 from the inner escape, in order to achieve delivery of the functional fluid. Referring to FIG. 2B and FIG. 2A again, the atomizer 3 and the microfluidic conveyor 2 are assembled in such a manner that the structure of the nozzle piece 32 and the actuating element 33 is disposed on the valve body of the microfluidic conveyor 2. A seat 21 and a pressure plate 34 are stacked on each other, and a groove 311 is disposed around the storage tank 31 for a sealing ring 263 to be disposed therein, mainly by a seal disposed in the groove 311. The ring 263 engages the valve body seat 21 with the nozzle piece 32 12 201010795 to prevent fluid leakage, thereby forming the microfluidic delivery and atomization device 1 of the present invention (as shown in the first figures C and D). Referring to FIG. 24, FIG. 2A and FIG. 3A again, in the embodiment, the actuating element 33 of the atomizer 3 surrounds the plurality of nozzle holes 321 disposed in the nozzle piece 32, and The two sides of the injection hole 321 are respectively disposed corresponding to the opening 341 of the storage tank 31 and the pressure plate 34, and the storage tank 31 is recessed from the lower surface of the valve body seat 21, and is connected to the outlet passage 212 and the valve body seat 21. The opening 215 and the outlet temporary chamber 214 are in communication. _Please refer to the second drawing A, B, C, as shown in the second figure A, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 261, 262, the valve body After the seat 21, the nozzle piece 32, the actuating element 33, the seal ring 263, and the pressure plate 34 are assembled and arranged, the microfluidic delivery and atomization device 1 of the present invention can be obtained. When the actuator 242 is driven by a voltage, the actuating device 24 generates a bending deformation. As shown in the second drawing B, the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the pressure chamber 225 The volume is increased, thereby generating a suction force, so that the inlet valve structure 231 of the valve body film 23 and the outlet valve structure 232 are subjected to an upward pulling force, and the inlet valve piece 2313 of the inlet valve structure 231 having a pre-force is quickly opened. (as shown in the second figure B), the fluid can be sucked in a large amount through the inlet passage 211 on the valve body seat 21, and flows through the opening 213 on the valve body seat 21, and the inlet valve structure on the valve body film 23. The hole 231, the inlet temporary chamber 224 on the valve body cover 22, and the inlet valve passage 222 flow into the pressure chamber 225. 13 201010795 At this time, because the inlet valve structure 23 of the valve body film 23 and the outlet valve structure 232 are subjected to the upward pulling force, the outlet wide door structure 232 located at the other end is caused by the upward pulling force to be located at the outlet of the valve body film 23. The moon 2323 seals the exit door channel 223, causing the outlet 232 to close. # Although the actuating device 224 changes as the direction of the electric field changes
— 人 — mi尸汁不J 前號b向下彎曲變形時，則會壓縮壓力腔室225之體積 使得壓力腔室225對内部之流體產生一推力，並使閥體《 膜23之入口閥門結構23卜出口閥門結構232承受一向Ί 推力’此時，設置於微凸結構229上之出口間門結構Μ 的出口閥片2323其可迅速開啟，並使液體瞬間大量宣茂 由㈣腔室225經由閥體蓋體22上之出口闕門通道奶 閥體薄膜23上之出口關ρ弓έ士接。π 心出口閥門結構232之孔洞2322、間 =上之出口暫存腔214、開口 215而流至霧化器3之儲存 才曰31並經由出口通道212排出（如第二圖C及第三圖丑 ❿所不），同樣地，此時由於入口閥門結構咖係承受該向 下之推力，因而使得入口間片2 3 i 3密封 閉入口闊門結構231。 以關 ，再參閱第二圖C、D及第三圖a、b、c，如第二圖 IS二=所不，當流體經由微流體輸送器2傳送至霧 匕益3之儲存槽31内部，且霧化器3之致動元件％受一 驅動而產生方向向下彎曲變形，將帶動喷嘴片32向 下移動，而使儲存槽31内部之流體經由喷嘴片％之嗔孔 21 (如第— ®Α、β所示）霧化成複數個液滴4,並喷出 14 201010795 至外界，可藉由該霧化之液滴4將本案之微流體輸送及霧 化裝置1所連接之發熱元件所產生的熱量移除，以達到散 熱的功效，但不以此為限，本案之微流體輸送及霧化裝置 1亦可使用於例如醫療等方面，即均勻的喷出藥劑。 請再參閱第二圖D及第三圖C，當霧化器3之致動元 件33受一電Μ驅動而產生方向向上彎曲變形，將帶動噴 嘴片32向上移動，此時會使外界之氣體5經由喷孔321 滲透至儲存槽31内部，而氣體5可隨著儲存槽31内部之 流體經由閥體座21之出口通道212排出。 綜上所述，本案之微流體輸送及霧化裝置係藉由結合 微流體輸送器與霧化器，以達到將流體輸送至霧化器之儲 存槽，並藉由致動元件的驅動使流體經由喷嘴片霧化喷 出，如此的結構設置不只體積小、結構簡單、組裝容易， 而且可達到薄型化的需求。 是以，本案之微流體輸送及霧化裝置極具產業之價 φ 值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 15 201010795 【圖式簡單說明】 第一圖A :其係為較佳實施例之微流體輸送及霧化裝置之 正面分解結構示意圖。 第一圖B:其係為第一圖A之反面分解結構示意圖結構。 第一圖C:其係為第一圖A之組裝完成結構示意圖。 第一圖D:其係為第一圖B之組裝完成結構示意圖。 第二圖A:其係為第一圖C之A-A剖面結構示意圖。 第二圖B :其係為第二圖A之壓力腔室膨脹狀態示意圖。 ® 第二圖C:其係為第二圖A之壓力腔室壓縮及霧化器喷霧 狀態示意圖。 第二圖D:其係為第二圖C所示之霧化器之致動元件及噴 嘴片向上作動狀態示意圖 第三圖A :其係為第一圖C之B-B剖面結構示意圖。 第三圖B:其係為第三圖A所示之霧化器喷霧狀態示意圖。 第三圖C:其係為第三圖B所示之霧化器之致動元件及喷 _ 嘴片向上作動狀態示意圖。 16 201010795 【主要元件符號說明 微流體輸送及霧化裝置：1 微流體輸送器：2 閥體座：21 入口通道：211 出口通道：212 開口 ： 213 、 215 、 341 出口暫存腔：214 凹槽：216、217 微凸結構：218 閥體蓋體：22 上表面：220 下表面：221 入口閥門通道：222 出口閥門通道：223 響 入口暫存腔：224 壓力腔室：225 凹槽：226、227、228、311 微凸結構：229 閥體薄膜：23 入口閥門結構：231 出口閥門結構：232 延伸部：2311、2321 孔洞：2312、2322 入口閥片：2313 出口閥片：2323 致動裝置：24 振動薄膜：241 致動器：242 ^ 蓋體：25 參 密封環：261、262、263 霧化器：3 儲存槽：31 喷嘴片：32 噴孔：321 致動元件：33 壓板：34 17- human - mi corpse juice not J When the front mark b is bent downward, the volume of the pressure chamber 225 is compressed so that the pressure chamber 225 generates a thrust to the internal fluid, and the valve body "the inlet valve structure of the membrane 23" 23, the outlet valve structure 232 is subjected to a vertical thrust. At this time, the outlet valve piece 2323 of the outlet door structure 设置 disposed on the micro-convex structure 229 can be quickly opened, and the liquid is instantaneously mass-produced by the (four) chamber 225. The outlet on the valve body cover 22 is connected to the outlet of the valve body film 23 on the valve body. The hole 2322 of the π heart outlet valve structure 232, the outlet 214 of the upper outlet, and the opening 215 flow to the storage port 31 of the atomizer 3 and are discharged through the outlet channel 212 (as shown in FIG. 2C and FIG. 3). Ugly, as such, at this time, since the inlet valve structure is subjected to the downward thrust, the inlet piece 2 3 i 3 is sealed to close the inlet door structure 231. Referring to the second figure C, D and the third figure a, b, c, as shown in the second figure IS = no, when the fluid is transferred to the inside of the storage tank 31 of the misty benefit 3 via the microfluidic conveyor 2 And the actuating element % of the atomizer 3 is driven to be deformed downwardly, and the nozzle piece 32 is driven to move downward, so that the fluid inside the storage tank 31 passes through the nozzle 21 of the nozzle piece (such as - ® Α, β shown) atomized into a plurality of droplets 4, and sprayed 14 201010795 to the outside, the microfluidic delivery of the present invention and the heating element connected to the atomizing device 1 by the atomized droplet 4 The heat generated is removed to achieve heat dissipation, but not limited thereto. The microfluidic delivery and atomization device 1 of the present invention can also be used, for example, in medical treatment, that is, uniform ejection of the medicament. Referring to FIG. 2D and FIG. 3C again, when the actuating element 33 of the atomizer 3 is driven by an electric cymbal to cause upward bending deformation, the nozzle piece 32 is driven to move upward, and the external gas is generated at this time. 5 penetrates into the inside of the storage tank 31 through the injection holes 321, and the gas 5 can be discharged through the outlet passage 212 of the valve body seat 21 along with the fluid inside the storage tank 31. In summary, the microfluidic delivery and atomization device of the present invention combines the microfluidic conveyor with the atomizer to achieve delivery of the fluid to the storage tank of the atomizer, and the fluid is driven by the actuating element. By atomizing and ejecting through the nozzle piece, such a structural arrangement is not only small in size, simple in structure, easy in assembly, but also in demand for thinning. Therefore, the microfluidic transport and atomization device of this case has an industrial price of φ, and is submitted according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 15 201010795 BRIEF DESCRIPTION OF THE DRAWINGS Fig. A is a front exploded view showing the microfluidic transport and atomization device of the preferred embodiment. First figure B: It is a schematic structure of the reverse side decomposition structure of the first figure A. First Figure C: It is a schematic diagram of the assembled structure of the first Figure A. First figure D: It is a schematic diagram of the assembled structure of the first figure B. Second Figure A: It is a schematic view of the A-A cross-section of the first Figure C. Figure 2B is a schematic view showing the state of expansion of the pressure chamber of Figure 2A. ® Figure C: This is a schematic diagram of the pressure chamber compression and atomizer spray state in Figure A. Fig. D is a schematic view showing the actuating element of the atomizer and the upward movement state of the nozzle piece shown in Fig. C. Fig. 3 is a schematic cross-sectional view of the B-B of the first figure C. Third Figure B: This is a schematic diagram of the spray state of the atomizer shown in Figure 3A. Fig. C is a schematic view showing the actuating element of the atomizer and the upward movement state of the spray nozzle shown in Fig. B. 16 201010795 [Main component symbol description Microfluidic transport and atomization device: 1 Microfluidic conveyor: 2 Valve body seat: 21 Inlet channel: 211 Outlet channel: 212 Opening: 213, 215, 341 Exit temporary cavity: 214 groove : 216, 217 micro convex structure: 218 valve body cover: 22 upper surface: 220 lower surface: 221 inlet valve passage: 222 outlet valve passage: 223 ring inlet temporary cavity: 224 pressure chamber: 225 groove: 226, 227, 228, 311 micro convex structure: 229 valve body film: 23 inlet valve structure: 231 outlet valve structure: 232 extension: 2311, 2321 hole: 2312, 2322 inlet valve: 2313 outlet valve: 2323 Actuator: 24 Vibrating membrane: 241 Actuator: 242 ^ Cover: 25 Reference seal ring: 261, 262, 263 Nebulizer: 3 Storage tank: 31 Nozzle piece: 32 Injection hole: 321 Actuating element: 33 Platen: 34 17