200940970 七、指定代表圈： (一) 本案指定代表圖為：第（三）圖 (二) 本代表圖之元件符號簡單說明： 301 第一層軟性材料 302 第二層硬質材料 303 第三層硬質材料 304 壓力感測器 305 第四層軟性材料 306 軟性之印刷電路 307 第一層軟性材料 308 第二層硬質材料 309 第三層硬質材料 310 盲孔内軟性材料 311 軟板印刷製作之陣列式壓力感測系統 八、本案若有化學式時，請揭示最艇顯示發明特徵的化學式： 九、發明說明： 【發明所屬之技術領域】 本發明係一種軟電式壓力感測器陣列，乃由軟性橡膠材料及壓力 感測器陣列所組成的墊子，其配合r力量分散機制』，提高感測器之使 ©用壽命。 【先前技術】 過去對於採用軟性電路板來感測足部、臀部、身體等站立、坐、 臥所產生的力量，市場上並無可靠而且具有重複性的感測器，例如： TESCAN公司所提出的產品與美國專利us 5989700，主要包含高分子 結合材料(polymeric binder)主要是以含苯氧基的（phen〇xy)樹脂為 4 200940970 主，混合以重量比約1-7%半導體等級的碳黑，其粒徑為15〜45nm， 電阻率約106-104 ohm-cm。其產品主要適用於足部的力董量測，雖然 •其償格低廉，但僅使用數次，就失去其重複性。而市面上較具精準性 與重複性的產品，多屬壓力板形式，需要高昂的费用。 依目前來看，過去金屬粉、導電碳黑、半導體碳黑、碳織維等通 常被選擇作為加入高分子材料内成為導電複合材料，或者使用PDMS 混合多壁奈米碳管，可產生良好的關係維持到200kPa，但仍舊無法維 ❹ 持多次的變形舆壓力的線性關係，因此需要使用另一種材料組合，其 中較佳者為矽橡膠與多壁奈米碳管的混合。因為石墨、碳黑等舆PDMS 來比較’其延展性差異大，所以很容易在受到壓力變形時產生滑動， 因此不太可能有重複的電阻與壓力的關係。若是改採用多壁奈米破 管，則因為碳管本身的柔軟度舆可變形量極高，因此可以舆珍橡膠同 時變形不會產生滑動，亦即可使碳管在矽橡膠中的分佈情形，即使於 ©多次受壓力下也能恢復原狀，故其重覆性高且製作成本低，可改善先 前技術之不足》 【發明内容】 本發明使用偶聨劑，用來偶聯有機高分子(矽橡膠)和無機填料 (MWCNT)，增強粘結性，提高產品的機械、電氣、耐水、抗老化等性 能。當此混合物受到壓力下，可避免碳管與矽橡移的分離，其製造、 5 200940970 實驗流程及力量保護機制之說明如下： 1.製造流程 本系統之壓力感測器，主要是以奈米碳管101置入溶劑102内， '進行表面改質，並同時放於超音波震盪103機内，將粉末均勻分散後， 再將偶聯剤104混入，進行超音波震盪103，最後再與矽橡膠進行充 份的攪拌105，並填入模具106中，使感測器固定成形。而為了加速 感測器之成形’故於感測器固定成形後烘烤107，即可完成感測器1〇8 ❿ 製作，其流程第一圖所示。 2.實驗流程 本發明的實驗主要目的為測試感測器，其受反覆播壓形變，利用 電阻儀器量測感測器每次受壓後的電阻變化及一致性，並對於感測器 進行千次以上的反復擠堡測試，以確保感測器量測準確度。 本發明的實驗首先以反復擠壓機台快速播壓單顆感測器，達到千 參次以上，並董測挤麗後之變形量，量測電阻值，且紀錄感測器的電阻 值及變形董之變化，經多次不同比例調配及比較與實驗，將結果進行 評估後，獲得一電阻值較高且重覆性較佳之電阻變化值，如第二圖所 示0 3.力量分散的設計機制 對於鞋墊、椅墊、床墊三者而言，都是承受人禮的重量，但以受 6 200940970 力面積而言，鞋墊將承受最大的壓力，亦即會產生較大變形，加上衝 擊力，例如：跳壤等效應，必須乘上至少三倍，因此在設計上要有所 不同，例如為使三者變形範圍或是在彈性限接近，可以使力董分散的 設計機制依照面積比例調整，鞋墊為1/10〜1/20、椅墊1/7〜1/5、床墊 1/3 〜1/2。 以鞋墊而言，人體重量若假設為l〇〇kg，單腳足部面積約為 100cm2，因此單位面積的壓力為p =i〇〇〇n /1〇〇 cm2 = 1〇〇 kpa ,若 有跳躍可能需要乘以3倍，則約成為p = 3〇〇kPa，故本系統為了增加 感測器之受壓次數，採用一 f力量分散的設計機制j，其可分為兩種型 式，主要均乃由至少兩層材料所構成，如第三圖(a)及(b)所示。 本裝置之力量分教的設計機制一型式一，其第一層301具有柔軟 的特性且直接與使用者接觸並承受其作用力，可讓使用者感受其柔軟 度及舒適感，第二層302與第四層303為硬質材料，而第四層303設 ❹有陣列孔洞，其孔内可容納柔性的壓力感測器單元3〇4,而第三層3〇6 與第五層306為一軟性之印刷電路，與壓力感測器單元3〇4相連接， 而第六層305具柔軟的特性，直接與鞋内底層接觸，亦可吸收部份之 作用力。 如上所述的墊子，其中第一層材料進一步具有夏天能散熱、吸汗， 有涼爽的感覺；冬天能保溫、絕熱，有暖和的感覺。 7 200940970 當本裝置受力時，第四層303硬質材料可承受大部份的力量，而 孔内的壓力感測單元304，則只承受小部份的力董，此結構主要的目 的是為了防止第四層303内之壓力感測感測單元3〇4受力過大，而造 成塑性變形而損壞，並達到保護感測單元的功能。 本裝置之力量分散的設計機制一型式二，其第一層3〇7舆力董分 散的設計機制型式一之特性及作用均相同，而第二層3〇8及第三層3〇9 ❹為硬質材料，型式二唯一不同之處，在於第四層為軟板印刷製作之陣 列式壓力感測系統311及第三層309内設有陣列式盲孔，盲孔内均填 入軟性材料310，其主要目的是將形變均集中於第三層3〇9之盲孔周 圍，減少力量作用於軟板印刷製作之陣列式壓力感測系統311上，達 到力董分散的作用。第二層308也可以移除，並非必要，只要第三層 309的盲孔上方的強度適當足夠達成力量分散即可。 而本系統之r力董分散的設計機制j,經搜集各家廠商製作的鞋墊 ©材料，並針對各材料作拉伸試驗’取得各材料的揚氏係數及硬度利 用COMOS軟體進行結構分析，求取各種結構型式受力，於壓力感測 單元的應力分佈情形，進行比較並獲取最佳之設計。而經由模擬分析 得知，以多層鞋墊而言，假設承受lOOKPa的均佈力時，如直接將壓 力感測單元置放於軟性材質下，其較大之應力全部作用於壓力感測單 元上，致使壓力感測單元無法長時間重複受力而損壞，如第四圈所示， 8 200940970 故為了改善此項問題’本裝置係採用力量分散的設計機制，於相同作 用條件下，承受lOOKPa的均钸力時，可減少作用於壓力感測單元之 力量，讓較大的力董分散至陣列孔周圍之材料上，防止壓力感測單元 受力過大，而造成塑性變形，依其材料特性，揚氏係數作模擬分析， 經多次試驗’其中以第五圖之型式最佳，其結構可將作用於晶片之力 董吸收分散，以達保護晶片的效果。 ^ 而上述之壓力感測器設計、製造及實驗完成後，本發明之陣列壓 力感測系統’配合現有之電路系統，進行訊號之處理，而其電路系統 整體架構可分為感測部份6(H、掃瞄部份602及電猫部份603三部份， 如第六圖所示，而感測部份601為本發明之麼力感測器，掃瞄部份602 主要為得知壓力感測器受壓後之電阻變化及一致性，偵測電阻之變化 率’進而得知壓力的大小，其主要是運用基本的反向放大器。而電腦 部份603主要是將掃瞄部份602所接收到之資料傳送至電臑部份 © 603，進行分析解讀，其不但可用於鞋墊、床墊、椅墊與出力感測帶等 等，以瞭解人們行走、跑步、坐、躺、臥及手部出力之壓力區域分佈 概況’達到感測之效果。 【實施例一】 鞋墊701 使用者可將本裝置置放於鞋内，成為原鞋墊的一部份，在進行跑 9 200940970 步與行走時，作為足底壓力及剪力感測的董測艟。依足部骨骼之結構 及可承受壓力與剪力的比值不同而分成若干區塊，各自獨立測取各區 塊的壓力與剪力之分佈值，並經無線傳輸或近身網路，傳送至電雎或 手機’建立使用者足底承受壓力及剪力各區洗的平均值。其後則根據 使用者跑步與行走的狀況，將所量得之足部壓力及剪力的平均值與標 準範圍值作比對，此裝置將立即判斷出足底正常舆異常之狀況，提供 使用者瞭解其即時步態情形，並適時提出警告或建議，達到護腳的功 Ο 能與效果’其示意圖，如第七圖所示。 【實施例二】 椅墊801 對於坐姿不正可能造成脊椎侧彎等問題，可以透過本發明實施成 為椅墊來達成臀部左右力董的董測來加以判斷。另外對於按摩椅而 言’本發明能提供的方式是椅墊以及靠背的墊子，可由力董分佈的情 ❹形，提供按摩位置的改變以及按摩療程調整的回讀感測器。其示意圖， 如第八圖所示。 【實施例三】 床墊901 防止身艎局部受力不當，對痛處造成擠壓或使得受大力之處的微 血管產生擠壓，採用病床力量回餚，並控制力量分布，以作為身體各 10 200940970 部舒壓與解屋，或針對長期臥床造成褥瘡的問題加以改善，例如若是 腳痛則讓身體其他部位來承受，亦即改變床墊的局部高度與彈性，讓 •痛腳能懸浮，其他各部位若有傷痛處，亦可按此要領。若是依照此種 需求，我們需要一種氣囊構成的床墊，並且有壓力墊的感測器陣列做 為回饋。理論上藉由壓力分布圓配合影像圖案比對可以得知身體各部 位的位置，因此我們確實能由壓力墊來回饋身體各部位受力，並藉由 氣囊的操控來達成局部舒壓，其示意圖，如第九圖所示。 © 【實施例四】 出力感測帶1001 使用者可將本裝置束於手臂上，成為身艚一部份，作為手臂運動及 出力之測量體，經由無線傳輸或近身網路，傳至電膘或遊戲機上，顯 示出力大小，達到消耗熱量及運動的目的，其示意圖，如第十圖所示。 以上乃本發明之設計概述以及實施例，惟其設計概述及實施例僅 ⑩是舉例說明，並非用於限制本發明技藝之權利範圍，凡以均等之技藝 手段、或為下述「申請專利範圍J内容所涵蓋之權利範圍而實施者， 均不脫離本發明之範疇與申請人之權利範圍。 11 200940970 【圖示簡單說明】 <圖示 > < 名稱》 第一圖本發明之感測器製作程序 第二圖本發明之感測器重復性實驗結果 第三圈本發明之力量分散的設計機制結構剖面圈 第四圖本發明之【一般型】·麼力感測單元置放於軟性材質下 第五圖本發明之力董分散機制-陣列孔與上層之材料密合 ® 第六圖本發明之電路系統 第七圖本發明之實施例一-鞋墊 第八圖本發明之實施例二一椅墊 第九圈本發明之實施例三-床墊 第十圈本發明之實施例四一出力感測帶 12 200940970200940970 VII. Designated representative circle: (1) The representative representative of the case is: (3) Figure (2) The symbol of the symbol of the representative figure is simple: 301 The first layer of soft material 302 The second layer of hard material 303 The third layer of hard material Material 304 Pressure Sensor 305 Fourth Layer Soft Material 306 Flexible Print Circuit 307 First Layer Soft Material 308 Second Layer Hard Material 309 Third Layer Hard Material 310 Blind Hole Soft Material 311 Soft Plate Printing Array Pressure Sensing system 8. If there is a chemical formula in this case, please disclose the chemical formula of the most boat showing the characteristics of the invention: IX. Description of the invention: [Technical field of the invention] The present invention is a soft electric pressure sensor array, which is made of soft rubber The mat of materials and pressure sensor arrays, combined with the r-force dispersion mechanism, improves the lifetime of the sensor. [Prior Art] In the past, there was no reliable and repetitive sensor on the market for using a flexible circuit board to sense the strength of standing, sitting, and lying on the feet, buttocks, and the body. For example, TESCAN proposed The product and the US patent us 5989700, mainly comprising a polymeric binder mainly composed of a phenoxy-containing (phen〇xy) resin as the main product of 2009-0470, mixed with a weight ratio of about 1-7% semiconductor grade carbon. Black, having a particle size of 15 to 45 nm and a resistivity of about 106-104 ohm-cm. Its products are mainly suitable for the measurement of the foot of the foot, although • its low-paying, but only a few times, it loses its repeatability. Products with more precision and repeatability on the market are mostly in the form of pressure plates and require high costs. In the past, metal powder, conductive carbon black, semiconductor carbon black, carbon woven, etc. have been selected as conductive composites in polymer materials, or PDMS mixed multi-walled carbon nanotubes, which can produce good results. The relationship is maintained to 200 kPa, but the linear relationship of multiple deformation enthalpy pressures is still not maintained, so another material combination is required, preferably a mixture of ruthenium rubber and multi-walled carbon nanotubes. Because graphite, carbon black, etc. are compared with PDMS, the difference in ductility is large, so it is easy to slip when subjected to pressure deformation, so it is unlikely that there is a relationship between repeated resistance and pressure. If the multi-walled nano tube is used, the carbon tube itself has a very high degree of softness and deformation, so that the rubber can be deformed at the same time without slipping, and the distribution of the carbon tube in the rubber can be made. Even if it is restored to its original state under multiple pressures, it is highly repetitive and low in production cost, which can improve the deficiencies of the prior art. [Invention] The present invention uses an oxime agent for coupling an organic polymer. (矽 rubber) and inorganic filler (MWCNT), enhance adhesion, improve the mechanical, electrical, water, anti-aging properties of the product. When the mixture is under pressure, the separation of the carbon tube and the rubber strip can be avoided. The manufacture, 5 200940970 experimental procedure and the strength protection mechanism are as follows: 1. Manufacturing process The pressure sensor of the system is mainly nanometer. The carbon tube 101 is placed in the solvent 102, 'the surface is modified, and placed in the ultrasonic shock 103 machine, the powder is evenly dispersed, and then the coupled crucible 104 is mixed, ultrasonic shock 103, and finally with the rubber A sufficient agitation 105 is carried out and filled into the mold 106 to fix the sensor. In order to accelerate the formation of the sensor, the sensor 1〇8 ❿ can be completed after the sensor is fixed and baked, and the flow is shown in the first figure. 2. Experimental Flow The main purpose of the experiment of the present invention is to test the sensor, which is subjected to repeated warping deformation, and uses a resistance instrument to measure the resistance change and consistency of the sensor after each pressure, and performs thousands of sensors. More than one repeated squeeze test to ensure sensor measurement accuracy. The experiment of the invention firstly uses a repeated extrusion machine to quickly broadcast a single sensor, which is more than a thousand times, and measures the deformation amount after the squeeze, measures the resistance value, and records the resistance value of the sensor and The change of the deformation Dong, after several different proportions of the mix and comparison and experiment, after the results are evaluated, obtain a resistance value with a higher resistance value and a better repeatability, as shown in the second figure. The design mechanism is the weight of the insole, the chair cushion and the mattress. However, in terms of the strength of the 6 200940970, the insole will withstand the maximum pressure, which will cause large deformation, plus Impact, such as: the effect of jumping soil, must be multiplied by at least three times, so the design should be different, for example, to make the deformation range of the three or the elastic limit close, the design mechanism of the disperse can be made according to the area Proportion adjustment, insole is 1/10~1/20, seat cushion 1/7~1/5, mattress 1/3~1/2. In the case of insole, if the weight of the human body is assumed to be l〇〇kg, the area of the foot of the single foot is about 100cm2, so the pressure per unit area is p = i〇〇〇n /1〇〇cm2 = 1〇〇kpa, if Jumping may need to be multiplied by 3 times, then it is about p = 3 kPa, so in order to increase the number of times the sensor is pressed, the system uses a f-force dispersion design mechanism j, which can be divided into two types, mainly They are all composed of at least two layers of materials, as shown in the third figures (a) and (b). The design mechanism of the power division of the device is one type one, and the first layer 301 has soft characteristics and directly contacts the user and withstands its force, so that the user feels softness and comfort, and the second layer 302 The fourth layer 303 is made of a hard material, and the fourth layer 303 is provided with an array of holes, the holes of which can accommodate the flexible pressure sensor unit 3〇4, and the third layer 3〇6 and the fifth layer 306 are one. The flexible printed circuit is connected to the pressure sensor unit 3〇4, and the sixth layer 305 has a soft characteristic, and directly contacts the inner layer of the shoe, and can also absorb part of the force. The mat as described above, wherein the first layer of material further has the feeling of dissipating heat in the summer, absorbing sweat, and having a cool feeling; the winter can be insulated, insulated, and has a warm feeling. 7 200940970 When the device is stressed, the fourth layer 303 hard material can withstand most of the force, while the pressure sensing unit 304 in the hole only bears a small part of the force. The main purpose of this structure is to The pressure sensing sensing unit 3〇4 in the fourth layer 303 is prevented from being excessively stressed, causing plastic deformation and damage, and the function of protecting the sensing unit is achieved. The design mechanism of the power dispersion of the device is one type II, and the first layer 3〇7舆力董Distributed design mechanism type has the same characteristics and functions, while the second layer 3〇8 and the third layer 3〇9 ❹ The only difference between the two types of hard materials is that the fourth layer is an array type pressure sensing system 311 and the third layer 309 for soft-printing, and an array type blind hole is arranged, and the blind holes are filled with the soft material 310. The main purpose is to concentrate the deformation around the blind hole of the third layer 3〇9, and reduce the force on the array pressure sensing system 311 for soft-board printing to achieve the effect of dispersing. The second layer 308 can also be removed, not necessarily, as long as the strength above the blind holes of the third layer 309 is sufficient to achieve force dispersion. The system design of the system is based on the insole design material j, and the tensile test of each material is made, and the Young's coefficient and hardness of each material are obtained. Structural analysis is performed using COMOS software. Take a variety of structural types of force, compare the stress distribution of the pressure sensing unit, and obtain the best design. According to the simulation analysis, in the case of a multi-layer insole, assuming that the uniform force of lOOKPa is applied, if the pressure sensing unit is directly placed under the soft material, the greater stress acts on the pressure sensing unit. As a result, the pressure sensing unit can not be repeatedly stressed and damaged for a long time, as shown in the fourth circle, 8 200940970. Therefore, in order to improve the problem, the device adopts a force-distributed design mechanism, and under the same working conditions, it can withstand lOOKPa. When the force is applied, the force acting on the pressure sensing unit can be reduced, and the larger force can be dispersed to the material around the array hole, thereby preventing the pressure sensing unit from being overstressed and causing plastic deformation, according to its material characteristics, The coefficient is used for simulation analysis. After many tests, the pattern of the fifth figure is the best, and the structure can absorb and disperse the force acting on the wafer to achieve the effect of protecting the wafer. ^ After the design, manufacture and experiment of the pressure sensor described above, the array pressure sensing system of the present invention cooperates with the existing circuit system to perform signal processing, and the overall structure of the circuit system can be divided into the sensing portion 6 (H, the scanning portion 602 and the electric cat portion 603 are three parts, as shown in the sixth figure, and the sensing portion 601 is the force sensor of the present invention, and the scanning portion 602 is mainly known. The resistance change and consistency of the pressure sensor after being pressed, the rate of change of the detected resistance', and then the magnitude of the pressure, mainly using the basic inverting amplifier. The computer part 603 is mainly the scanning part. The data received by 602 is transmitted to the eMule part © 603 for analysis and interpretation. It can be used not only for insoles, mattresses, cushions and output sensing belts, etc., to understand people walking, running, sitting, lying, lying And the distribution of the pressure area of the hand output 'to achieve the effect of sensing. [Example 1] Insole 701 The user can place the device in the shoe and become part of the original insole, running 9 200940970 As a foot pressure and scissors when walking The sensed Dong tester is divided into several blocks according to the structure of the bone and the ratio of the compressible pressure to the shear force. The pressure and shear distribution values of each block are independently measured and transmitted wirelessly or The close-in network, transmitted to the eMule or mobile phone, 'establishes the average value of the user's foot to withstand the pressure and shearing force. Then the amount of foot pressure is measured according to the user's running and walking conditions. The average value of the shear force is compared with the standard range value. The device will immediately determine the normal ankle abnormality of the sole, provide the user with an understanding of the immediate gait situation, and provide warnings or suggestions in time to achieve the function of the foot protection. And the effect of the schematic diagram, as shown in the seventh figure. [Embodiment 2] The seat cushion 801 may cause problems such as scoliosis in the sitting posture, and can be implemented as a seat cushion by the present invention to achieve the Dong test of the buttocks. In addition, for the massage chair, the present invention can provide a cushion for the seat cushion and the backrest, which can be changed by the force of the Dong, providing a change in the massage position and a massage treatment. The back-reading sensor has a schematic diagram, as shown in the eighth figure. [Embodiment 3] The mattress 901 prevents the local body from being improperly stressed, causing the pain to be squeezed or causing the micro-vessels to be squeezed by the strong places. Use the strength of the bed to return to the food, and control the distribution of power, as the body of each of the 200940970 pressure relief and solution, or to improve the problem of hemorrhoids caused by prolonged bed rest, for example, if the foot hurts, let other parts of the body bear, that is, change The local height and elasticity of the mattress can make the painful foot suspend. If there are any pains in other parts, you can also follow the essentials. If you need this kind of mattress, we need a mattress made of airbag and pressure pad. The sensor array is used as feedback. In theory, the position of each part of the body can be known by the pressure distribution circle and the image pattern comparison, so we can really feed back the force of the body part by the pressure pad, and control by the airbag. To achieve local pressure relief, the schematic diagram, as shown in the ninth figure. © [Embodiment 4] Output Sensing Tape 1001 Users can bundle the device on the arm and become part of the body. As a measure of arm movement and output, it can be transmitted to the body via wireless transmission or close network. On the cymbal or game console, the force is displayed to achieve the purpose of consuming heat and moving, as shown in the tenth figure. The above is a summary of the design and the embodiments of the present invention, but the design summary and the embodiment are only for the purpose of limiting the scope of the invention, and are not intended to limit the scope of the invention. The scope of the scope of the invention and the scope of the applicant's rights are not deviated from the scope of the invention and the scope of the applicant's rights. 11 200940970 [Simple description of the illustration] <Illustration><Name" First figure The sensing of the present invention The second process of the present invention is the result of the repeatability test of the sensor. The third cycle of the present invention is the design mechanism of the power dispersion structure. The fourth section of the present invention is a general type of the present invention. The fifth figure of the present invention is a force dispersing mechanism of the present invention - the hole of the array hole is adhered to the material of the upper layer. The sixth figure is the circuit system of the present invention. The seventh embodiment of the present invention - the insole eighth embodiment of the present invention The fifth ring of a seat cushion The third embodiment of the present invention - the tenth ring of the mattress The fourth embodiment of the present invention is a force sensing belt 12 200940970
【主要元件符號說明】 《符號》《名稱》 《符號》 {名稱》 101 奈米碳管 102 乙醇 103 超音波震盡 104 矽浣偶聯劑 105 充份的攪拌 106 填入模具 107 烘烤 108 感測器 301 第一層軟性材料 302 第二層硬質材料 303 第三層硬質材料 304 壓力感測器 305 第四層軟性材料 306 軟性之印刷電路 307 第一層軟性材料 308 第二層硬質材料 309 第三層硬質材料 310 盲孔内軟性材料 311 軟板印刷製作之陣列式壓力感測系統 601 感測部份 602 掃瞄部份 603 電腦部份 701 鞋墊 801 椅墊 901 床整 1001 出力感測帶 13[Main component symbol description] "Symbol" "Name" "Symbol" {Name" 101 Carbon tube 102 Ethanol 103 Ultrasonic shock 104 矽浣 Coupling agent 105 Fully stirred 106 Filled in mold 107 Baking 108 Sense 301 first layer of soft material 302 second layer of hard material 303 third layer of hard material 304 pressure sensor 305 fourth layer of soft material 306 flexible printed circuit 307 first layer of soft material 308 second layer of hard material 309 Three layers of hard material 310 Soft material in blind hole 311 Array pressure sensing system made by soft board printing 601 Sensing part 602 Scanning part 603 Computer part 701 Insole 801 Seat cushion 901 Bed 1001 Output sensing belt 13