TW200834085A - Probe head module for multi-site probing - Google Patents

Abstract

A probe head module for multi-site probing mainly comprises a probe head substrate and a plurality of pin transiting chips. The probe head substrate has a surface including a plurality of unit areas in an array. A plurality of pads are disposed within each unit area. Each pin transiting chip has an upper surface and a lower surface and includes a plurality of probe pins protruding from the upper surface and a plurality of connecting terminals disposed on the lower surface. The pin transiting chips are mounted on the corresponding unit areas so that the connecting terminals are bonded to the pads.