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TW200725447A - Method and system for automatically wafer dispatching - Google Patents

Method and system for automatically wafer dispatching

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Publication number
TW200725447A
TW200725447ATW094146100ATW94146100ATW200725447ATW 200725447 ATW200725447 ATW 200725447ATW 094146100 ATW094146100 ATW 094146100ATW 94146100 ATW94146100 ATW 94146100ATW 200725447 ATW200725447 ATW 200725447A
Authority
TW
Taiwan
Prior art keywords
sheet
dispatching
wafer boat
tool
automatically
Prior art date
Application number
TW094146100A
Other languages
Chinese (zh)
Other versions
TWI296096B (en
Inventor
I-Hui Chang
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co LtdfiledCriticalTaiwan Semiconductor Mfg Co Ltd
Priority to TW094146100ApriorityCriticalpatent/TWI296096B/en
Publication of TW200725447ApublicationCriticalpatent/TW200725447A/en
Application grantedgrantedCritical
Publication of TWI296096BpublicationCriticalpatent/TWI296096B/en

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Abstract

A method for automatically wafer dispatching. A tool sheet and a wafer boat sheet are provided. Dispatching criterion is defined according to the tool sheet or the wafer boat sheet. Calculation is implemented to data comprised in the tool sheet and the wafer boat sheet according to the dispatching criterion using an intelligent algorithm to obtain an index value. The data comprised in the tool sheet and the wafer boat sheet is sorted according to the index value.
TW094146100A2005-12-232005-12-23Method and system for automatically wafer dispatchingTWI296096B (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
TW094146100ATWI296096B (en)2005-12-232005-12-23Method and system for automatically wafer dispatching

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
TW094146100ATWI296096B (en)2005-12-232005-12-23Method and system for automatically wafer dispatching

Publications (2)

Publication NumberPublication Date
TW200725447Atrue TW200725447A (en)2007-07-01
TWI296096B TWI296096B (en)2008-04-21

Family

ID=45068647

Family Applications (1)

Application NumberTitlePriority DateFiling Date
TW094146100ATWI296096B (en)2005-12-232005-12-23Method and system for automatically wafer dispatching

Country Status (1)

CountryLink
TW (1)TWI296096B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
TWI575561B (en)*2013-12-092017-03-21格羅方德半導體公司Method, storage medium and system for controlling the processing of lots of workpieces
CN112614795A (en)*2020-12-162021-04-06上海华力微电子有限公司Dispatching optimization method of furnace tube process
CN112907014A (en)*2019-12-032021-06-04财团法人工业技术研究院Fast screening dispatching rule method and device
CN115186945A (en)*2021-04-022022-10-14天津市环智新能源技术有限公司Thread cutting dispatching method, thread cutting dispatching system, computer equipment and storage medium
CN116009496A (en)*2023-01-102023-04-25上海赛美特软件科技有限公司 A product processing machine control method, system, device and storage medium

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
TWI385589B (en)*2009-03-172013-02-11Univ Nat Taiwan Science TechSystem and method for multi-objective capacity planning in panel

Cited By (8)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
TWI575561B (en)*2013-12-092017-03-21格羅方德半導體公司Method, storage medium and system for controlling the processing of lots of workpieces
US9748088B2 (en)2013-12-092017-08-29Globalfoundries Inc.Method, storage medium and system for controlling the processing of lots of workpieces
CN112907014A (en)*2019-12-032021-06-04财团法人工业技术研究院Fast screening dispatching rule method and device
CN112614795A (en)*2020-12-162021-04-06上海华力微电子有限公司Dispatching optimization method of furnace tube process
CN112614795B (en)*2020-12-162023-08-18上海华力微电子有限公司Dispatching optimization method for furnace tube process
CN115186945A (en)*2021-04-022022-10-14天津市环智新能源技术有限公司Thread cutting dispatching method, thread cutting dispatching system, computer equipment and storage medium
CN115186945B (en)*2021-04-022025-06-17天津市环智新能源技术有限公司 Line cutting dispatching method, system, computer device and storage medium
CN116009496A (en)*2023-01-102023-04-25上海赛美特软件科技有限公司 A product processing machine control method, system, device and storage medium

Also Published As

Publication numberPublication date
TWI296096B (en)2008-04-21

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