Movatterモバイル変換

[0]ホーム
URL:

TW200600749A - Device for measuring linear dual axis geometric tolerances - Google Patents

Device for measuring linear dual axis geometric tolerances

Info

Publication number
TW200600749A
TW200600749ATW093119554ATW93119554ATW200600749ATW 200600749 ATW200600749 ATW 200600749ATW 093119554 ATW093119554 ATW 093119554ATW 93119554 ATW93119554 ATW 93119554ATW 200600749 ATW200600749 ATW 200600749A
Authority
TW
Taiwan
Prior art keywords
dual axis
sets
geometric tolerances
dimension optical
tolerances
Prior art date
Application number
TW093119554A
Other languages
Chinese (zh)
Other versions
TWI245878B (en
Inventor
Wen-Yuh Jywe
Chien-Hong Liu
Hsueh-Liang Huang
Original Assignee
Nat Huwei Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Huwei Inst TechnologyfiledCriticalNat Huwei Inst Technology
Priority to TW93119554ApriorityCriticalpatent/TWI245878B/en
Application grantedgrantedCritical
Publication of TWI245878BpublicationCriticalpatent/TWI245878B/en
Publication of TW200600749ApublicationCriticalpatent/TW200600749A/en

Links

Landscapes

Abstract

A device for measuring linear dual axis geometric tolerances is disclosed. The system of the device comprises four sets of optical fiber displacement gauges, four sets of two-dimension optical sensors, and one two-dimension optical grating scale plate. The two-dimension optical sensor and the two-dimension optical grating scale plate form a grid encoder. The four sets of optical fiber displacement gauges and the four sets of two-dimension optical sensors are separately arranged on the two-dimension optical grating scale plate. The structure of a dual axis working platform is mainly constructed by dual axis ball screws. When the dual axis working platform is operated, thirteen rotating geometric tolerances are formed. The device can precisely measure the thirteen rotating geometric tolerances when the platform is operated. Moreover, the device can calibrate and compensate the tolerances.
TW93119554A2004-06-302004-06-30Device for measuring linear dual axis geometric tolerancesTWI245878B (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
TW93119554ATWI245878B (en)2004-06-302004-06-30Device for measuring linear dual axis geometric tolerances

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
TW93119554ATWI245878B (en)2004-06-302004-06-30Device for measuring linear dual axis geometric tolerances

Publications (2)

Publication NumberPublication Date
TWI245878B TWI245878B (en)2005-12-21
TW200600749Atrue TW200600749A (en)2006-01-01

Family

ID=37191257

Family Applications (1)

Application NumberTitlePriority DateFiling Date
TW93119554ATWI245878B (en)2004-06-302004-06-30Device for measuring linear dual axis geometric tolerances

Country Status (1)

CountryLink
TW (1)TWI245878B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN109631757A (en)*2018-12-132019-04-16珠海博明软件有限公司A kind of grating scale scaling method, device and vision inspection apparatus
CN110036261A (en)*2016-10-312019-07-19蒂莫西·韦伯斯特 Wear-resistant hydraulic/pneumatic piston position sensing device and method using optical sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN113211186B (en)*2021-05-262022-10-14上海理工大学Rotating shaft corner positioning error detection method of five-axis numerical control machine tool rotary table

Cited By (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN110036261A (en)*2016-10-312019-07-19蒂莫西·韦伯斯特 Wear-resistant hydraulic/pneumatic piston position sensing device and method using optical sensor
CN109631757A (en)*2018-12-132019-04-16珠海博明软件有限公司A kind of grating scale scaling method, device and vision inspection apparatus
CN109631757B (en)*2018-12-132020-11-03珠海博明软件有限公司Grating scale calibration method and device and visual detection device

Also Published As

Publication numberPublication date
TWI245878B (en)2005-12-21

Similar Documents

PublicationPublication DateTitle
ATE471502T1 (en) OPTICAL STRAIN GAUGE
CN101886911B (en)Instrument for measuring dimensions and height gauge
AU2001227690A1 (en)Abbe error correction system and method
TW200619858A (en)Lithographic apparatus and method for calibrating the same
TW200801859A (en)Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
WO2006052622A3 (en)Apparatus and methods for two-dimensional ion beam profiling
US8751193B2 (en)Positioning device with extensible cord and method
CN103256891A (en)Sensor
NO20071581L (en) Measuring instrument and sensor for measuring bending radius and shape of a structural element
TW200629014A (en)Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
WO2008043614A3 (en)Measuring element comprising a track used as a material measure, and corresponding measurement method carried out by means of such a measuring element
CN110631466B (en) Method and device for measuring diameter with cantilever beam sensor and coded screw rod
TW200743778A (en)A method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
EP2023094A3 (en)Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
ATE503208T1 (en) CALIBRATION OF A POSITION MEASURING DEVICE OF AN OPTICAL DEVICE
DE602006015342D1 (en) DEFORMATION MEASURING BEARINGS WITH AT LEAST THREE MEASURING MEASUREMENT SENSORS
CN109564108B (en)Sensor device
WO2005124283A3 (en)Scale and readhead apparatus
US3957378A (en)Two-axis moire fringe displacement transducer
TW200600749A (en)Device for measuring linear dual axis geometric tolerances
TW200732631A (en)Optical absolute value encoder
WO2006107322A3 (en)Method for compensating errors in interferometric surface metrology
US20060137204A1 (en)Linear moving capacitive sensor twin column electronic height gauge
FR2909446B1 (en) DEVICE AND METHOD FOR MEASURING MECHANICAL DEFORMATIONS OF A PROFILE
SE0402750D0 (en) A calibration method

Legal Events

DateCodeTitleDescription
MM4AAnnulment or lapse of patent due to non-payment of fees
[8]ページ先頭
©2009-2025 Movatter.jp