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SG2013065842A - Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine - Google Patents

Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine

Info

Publication number
SG2013065842A
SG2013065842ASG2013065842ASG2013065842ASG2013065842ASG 2013065842 ASG2013065842 ASG 2013065842ASG 2013065842 ASG2013065842 ASG 2013065842ASG 2013065842 ASG2013065842 ASG 2013065842ASG 2013065842 ASG2013065842 ASG 2013065842A
Authority
SG
Singapore
Prior art keywords
manufacturing
same
grinding machine
shaped workpiece
thin disk
Prior art date
Application number
SG2013065842A
Inventor
Sibanaka Atsushi
Original Assignee
Koyo Machine Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Machine Ind Co LtdfiledCriticalKoyo Machine Ind Co Ltd
Publication of SG2013065842ApublicationCriticalpatent/SG2013065842A/en

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SG2013065842A2012-09-052013-09-02Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machineSG2013065842A (en)

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP2012195611AJP6033614B2 (en)2012-09-052012-09-05 Thin-walled disk-shaped workpiece carrier device, manufacturing method thereof, and double-side grinding device

Publications (1)

Publication NumberPublication Date
SG2013065842Atrue SG2013065842A (en)2014-04-28

Family

ID=49003679

Family Applications (1)

Application NumberTitlePriority DateFiling Date
SG2013065842ASG2013065842A (en)2012-09-052013-09-02Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine

Country Status (5)

CountryLink
EP (1)EP2705930B1 (en)
JP (1)JP6033614B2 (en)
KR (1)KR102093680B1 (en)
SG (1)SG2013065842A (en)
TW (1)TWI632987B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP2539321Y2 (en)1993-11-221997-06-25株式会社阪村機械製作所 Multistage forging machine
JP6197580B2 (en)*2013-10-292017-09-20株式会社Sumco Double-side polishing machine for carrier plate and workpiece
CN104493689B (en)2014-12-162017-01-11天津大学Double-disc straight-groove grinding disc for surfaces of cylindrical parts
CN114406853A (en)*2022-02-172022-04-29安徽申容压力容器有限公司Clamping mechanism for processing end cover of gas storage tank based on multidimensional rotation
CN115070604B (en)*2022-06-092023-09-29西安奕斯伟材料科技股份有限公司 Double-sided grinding device and double-sided grinding method
CN119115796A (en)*2024-07-032024-12-13华海清科股份有限公司 Manufacturing method of loading part and loading platform, loading part, loading platform and thinning system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS555222Y2 (en)*1976-05-191980-02-06
JP3207787B2 (en)*1997-04-042001-09-10株式会社日平トヤマ Wafer processing method, surface grinder and work support member
US6296553B1 (en)*1997-04-022001-10-02Nippei Toyama CorporationGrinding method, surface grinder, workpiece support, mechanism and work rest
JPH11221760A (en)*1998-02-061999-08-17Nippei Toyama CorpCracking occurrance predicting method of workpiece, wafer working method utilizing the same, and grinder
JPH11333707A (en)*1998-05-261999-12-07Toshiba Ceramics Co LtdCarrier
JP2000288921A (en)*1999-03-312000-10-17Hoya CorpPolishing carrier, polishing method and manufacture of information recording medium substrate
JP2003071704A (en)*2001-08-292003-03-12Nippei Toyama CorpDrive plate for rotating wafer
JP2003124167A (en)*2001-10-102003-04-25Sumitomo Heavy Ind LtdWafer support member and double-ended grinding device using the same
US6899595B2 (en)*2002-03-292005-05-31Maurice J. MoriartySeal assembly manufacturing methods and seal assemblies manufactured thereby
JP4881798B2 (en)*2007-06-202012-02-22清水建設株式会社 Member joining method and panel structure
JP2009178780A (en)*2008-01-292009-08-13Seiko Instruments IncCarrier, device and method of grinding wafer, piezoelectric transducer and its manufacturing method, oscillator, electric instrument and atomic clock

Also Published As

Publication numberPublication date
JP2014050901A (en)2014-03-20
EP2705930B1 (en)2022-02-16
KR102093680B1 (en)2020-03-26
JP6033614B2 (en)2016-11-30
TW201417951A (en)2014-05-16
KR20140031816A (en)2014-03-13
EP2705930A2 (en)2014-03-12
TWI632987B (en)2018-08-21
EP2705930A3 (en)2014-08-13

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