| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012195611AJP6033614B2 (en) | 2012-09-05 | 2012-09-05 | Thin-walled disk-shaped workpiece carrier device, manufacturing method thereof, and double-side grinding device |
| Publication Number | Publication Date |
|---|---|
| SG2013065842Atrue SG2013065842A (en) | 2014-04-28 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2013065842ASG2013065842A (en) | 2012-09-05 | 2013-09-02 | Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine |
| Country | Link |
|---|---|
| EP (1) | EP2705930B1 (en) |
| JP (1) | JP6033614B2 (en) |
| KR (1) | KR102093680B1 (en) |
| SG (1) | SG2013065842A (en) |
| TW (1) | TWI632987B (en) |
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| CN119115796A (en)* | 2024-07-03 | 2024-12-13 | 华海清科股份有限公司 | Manufacturing method of loading part and loading platform, loading part, loading platform and thinning system |
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| Publication number | Publication date |
|---|---|
| JP2014050901A (en) | 2014-03-20 |
| EP2705930B1 (en) | 2022-02-16 |
| KR102093680B1 (en) | 2020-03-26 |
| JP6033614B2 (en) | 2016-11-30 |
| TW201417951A (en) | 2014-05-16 |
| KR20140031816A (en) | 2014-03-13 |
| EP2705930A2 (en) | 2014-03-12 |
| TWI632987B (en) | 2018-08-21 |
| EP2705930A3 (en) | 2014-08-13 |
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