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SG144907A1 - Liquid immersion type lens system, projection exposure apparatus, and device fabricating method - Google Patents

Liquid immersion type lens system, projection exposure apparatus, and device fabricating method

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Publication number
SG144907A1
SG144907A1SG200804997-5ASG2008049975ASG144907A1SG 144907 A1SG144907 A1SG 144907A1SG 2008049975 ASG2008049975 ASG 2008049975ASG 144907 A1SG144907 A1SG 144907A1
Authority
SG
Singapore
Prior art keywords
lens system
type lens
exposure apparatus
projection exposure
immersion type
Prior art date
Application number
SG200804997-5A
Inventor
Noriaki Okada
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filedlitigationCriticalhttps://patents.darts-ip.com/?family=34386114&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG144907(A1)"Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nikon CorpfiledCriticalNikon Corp
Publication of SG144907A1publicationCriticalpatent/SG144907A1/en

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Abstract

LIQUID IMMERSION TYPE LENS SYSTEM, PROJECTION EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD The present invention provides a high performance liquid immersion type lens system that can be stably used over a long time period and a projection exposure apparatus provided therewith. Consequently, the liquid immersion type lens system of the present invention includes: an optical system main body 30 that has an optical surface 33a at one end along an optical axis, the optical surface 33a contacting a first immersion liquid IL t; a light transmitting member 42 that has two surfaces, one on each end along the optical axis, is disposed opposing the optical surface 33a of the optical system main body 30, one 42a of the two surfaces contacting the first immersion liquid IL1, the other 42b of the two surfaces contacting a second immersion liquid IL2; and a holding member 41 that detachably supports the light transmitting member 42 so that the one surface 42a opposes the optical surface 33a of the optical system main body 30. In addition, the projection exposure apparatus of the present invention includes such a liquid immersion type lens system.
SG200804997-5A2003-09-292004-09-29Liquid immersion type lens system, projection exposure apparatus, and device fabricating methodSG144907A1 (en)

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP20033370872003-09-29

Publications (1)

Publication NumberPublication Date
SG144907A1true SG144907A1 (en)2008-08-28

Family

ID=34386114

Family Applications (1)

Application NumberTitlePriority DateFiling Date
SG200804997-5ASG144907A1 (en)2003-09-292004-09-29Liquid immersion type lens system, projection exposure apparatus, and device fabricating method

Country Status (8)

CountryLink
US (1)US20060164616A1 (en)
EP (1)EP1670042A4 (en)
JP (1)JP4492539B2 (en)
CN (1)CN1860585B (en)
IL (1)IL174566A0 (en)
SG (1)SG144907A1 (en)
TW (1)TW200513809A (en)
WO (1)WO2005031823A1 (en)

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US8654306B2 (en)2008-04-142014-02-18Nikon CorporationExposure apparatus, cleaning method, and device fabricating method
ATE548679T1 (en)*2008-05-082012-03-15Asml Netherlands Bv LITHOGRAPHIC IMMERSION APPARATUS, DRYING APPARATUS, IMMERSION METROLOGY APPARATUS AND METHOD FOR PRODUCING A DEVICE
US8421993B2 (en)*2008-05-082013-04-16Asml Netherlands B.V.Fluid handling structure, lithographic apparatus and device manufacturing method
KR101712219B1 (en)2009-03-102017-03-03가부시키가이샤 니콘Exposure apparatus, exposure method and device manufacturing method
JP6261357B2 (en)*2014-01-302018-01-17オリンパス株式会社 Microscope and observation method
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Also Published As

Publication numberPublication date
US20060164616A1 (en)2006-07-27
JP4492539B2 (en)2010-06-30
WO2005031823A1 (en)2005-04-07
CN1860585B (en)2010-04-28
JPWO2005031823A1 (en)2007-11-15
EP1670042A4 (en)2008-01-30
IL174566A0 (en)2006-08-20
CN1860585A (en)2006-11-08
EP1670042A1 (en)2006-06-14
TW200513809A (en)2005-04-16

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