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| US201562110440P | 2015-01-30 | 2015-01-30 | |
| US201562141133P | 2015-03-31 | 2015-03-31 | |
| PCT/US2016/012066WO2016122835A1 (en) | 2015-01-30 | 2016-01-04 | Lamp heating for process chamber |
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| SG11201706069WAtrue SG11201706069WA (en) | 2017-08-30 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201706069WASG11201706069WA (en) | 2015-01-30 | 2016-01-04 | Lamp heating for process chamber |
| Country | Link |
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| US (1) | US10356848B2 (en) |
| KR (2) | KR20230173740A (en) |
| CN (1) | CN107208966B (en) |
| SG (1) | SG11201706069WA (en) |
| TW (1) | TWI686869B (en) |
| WO (1) | WO2016122835A1 (en) |
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| Publication | Publication Date | Title |
|---|---|---|
| SG11201706069WA (en) | Lamp heating for process chamber | |
| GB201505311D0 (en) | Process | |
| GB201500989D0 (en) | Process | |
| GB201502894D0 (en) | Process | |
| GB201502893D0 (en) | Process | |
| HUE051924T2 (en) | Heat treatment process | |
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| GB201501952D0 (en) | Process | |
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