| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/776,836US9005458B2 (en) | 2013-02-26 | 2013-02-26 | Photonic device structure and method of manufacture |
| PCT/US2014/016009WO2014133760A1 (en) | 2013-02-26 | 2014-02-12 | Photonic device structure and method of manufacture |
| Publication Number | Publication Date |
|---|---|
| SG11201505841XAtrue SG11201505841XA (en) | 2015-09-29 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201505841XASG11201505841XA (en) | 2013-02-26 | 2014-02-12 | Photonic device structure and method of manufacture |
| Country | Link |
|---|---|
| US (2) | US9005458B2 (en) |
| EP (1) | EP2962139B1 (en) |
| JP (1) | JP6244380B2 (en) |
| KR (1) | KR101842758B1 (en) |
| CN (1) | CN105026966B (en) |
| SG (1) | SG11201505841XA (en) |
| TW (2) | TWI499817B (en) |
| WO (1) | WO2014133760A1 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9372308B1 (en) | 2012-06-17 | 2016-06-21 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
| US9768330B2 (en)* | 2014-08-25 | 2017-09-19 | Micron Technology, Inc. | Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions |
| US9606068B2 (en) | 2014-08-27 | 2017-03-28 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices |
| DE112016000309T5 (en)* | 2015-01-08 | 2017-09-28 | Acacia Communications, Inc. | Horizontal coupling to silicon waveguides |
| WO2016149397A1 (en) | 2015-03-16 | 2016-09-22 | Pacific Biosciences Of California, Inc. | Integrated devices and systems for free-space optical coupling |
| CN114691585B (en) | 2015-05-07 | 2023-10-13 | 加利福尼亚太平洋生物科学股份有限公司 | Multiprocessor pipeline architecture |
| US10365434B2 (en) | 2015-06-12 | 2019-07-30 | Pacific Biosciences Of California, Inc. | Integrated target waveguide devices and systems for optical coupling |
| US10416381B1 (en) | 2016-12-23 | 2019-09-17 | Acacia Communications, Inc. | Spot-size-converter design for facet optical coupling |
| US10571633B1 (en) | 2016-12-23 | 2020-02-25 | Acacia Communications, Inc. | Suspended cantilever waveguide |
| US20180372872A1 (en)* | 2017-06-23 | 2018-12-27 | Kabushiki Kaisha Toshiba | Photodetector, method of manufacturing photodetector, and lidar apparatus |
| US10466514B1 (en)* | 2018-11-06 | 2019-11-05 | Globalfoundries Inc. | Electro-optic modulator with vertically-arranged optical paths |
| US11169328B2 (en)* | 2019-09-20 | 2021-11-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photonic structure and method for forming the same |
| US11175451B2 (en)* | 2019-09-26 | 2021-11-16 | Intel Corporation | Mechanisms for refractive index tuning semiconductor photonic devices |
| US11262500B2 (en)* | 2019-12-02 | 2022-03-01 | Renesas Electronics Corporation | Semiconductor device and including an optical waveguide and method of manufacturing the same |
| CN111239900B (en)* | 2020-03-18 | 2022-03-29 | 联合微电子中心有限责任公司 | Forming SiO based on wafer bonding2Method for realizing spot-size conversion by waveguide and spot-size converter |
| EP3916760B1 (en) | 2020-05-28 | 2024-07-03 | Imec VZW | A method for producing an undercut in a 300 mm silicon-on-insulator platform |
| US11409037B2 (en)* | 2020-10-28 | 2022-08-09 | Globalfoundries U.S. Inc. | Enlarged waveguide for photonic integrated circuit without impacting interconnect layers |
| US11803009B2 (en)* | 2022-02-25 | 2023-10-31 | Globalfoundries U.S. Inc. | Photonics structures having a locally-thickened dielectric layer |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6734453B2 (en) | 2000-08-08 | 2004-05-11 | Translucent Photonics, Inc. | Devices with optical gain in silicon |
| US6712983B2 (en)* | 2001-04-12 | 2004-03-30 | Memsic, Inc. | Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
| US6695457B2 (en)* | 2001-06-02 | 2004-02-24 | Capella Photonics, Inc. | Bulk silicon mirrors with hinges underneath |
| US6983086B2 (en) | 2003-06-19 | 2006-01-03 | Intel Corporation | Thermally isolating optical devices |
| JP2005045162A (en) | 2003-07-25 | 2005-02-17 | Mitsubishi Electric Corp | Semiconductor device and manufacturing method thereof |
| US8119537B2 (en) | 2004-09-02 | 2012-02-21 | Micron Technology, Inc. | Selective etching of oxides to metal nitrides and metal oxides |
| US20060133754A1 (en) | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
| US7454102B2 (en) | 2006-04-26 | 2008-11-18 | Honeywell International Inc. | Optical coupling structure |
| US7628932B2 (en) | 2006-06-02 | 2009-12-08 | Micron Technology, Inc. | Wet etch suitable for creating square cuts in si |
| US7625776B2 (en) | 2006-06-02 | 2009-12-01 | Micron Technology, Inc. | Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon |
| US7709341B2 (en) | 2006-06-02 | 2010-05-04 | Micron Technology, Inc. | Methods of shaping vertical single crystal silicon walls and resulting structures |
| ITMI20070062A1 (en)* | 2007-01-18 | 2008-07-19 | St Microelectronics Srl | PROCESS OF MANUFACTURE OF AN INTEGRATED OPTICAL DEVICE |
| US7920770B2 (en) | 2008-05-01 | 2011-04-05 | Massachusetts Institute Of Technology | Reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal |
| US8877616B2 (en) | 2008-09-08 | 2014-11-04 | Luxtera, Inc. | Method and system for monolithic integration of photonics and electronics in CMOS processes |
| US8791405B2 (en)* | 2009-12-03 | 2014-07-29 | Samsung Electronics Co., Ltd. | Optical waveguide and coupler apparatus and method of manufacturing the same |
| US8506829B2 (en) | 2010-02-04 | 2013-08-13 | The United States Of America As Represented By The Secretary Of The Army | Semiconductor hollow-core waveguide using photonic crystal gratings |
| US20110249938A1 (en)* | 2010-04-07 | 2011-10-13 | Alcatel-Lucent Usa, Incorporated | Optical grating coupler |
| US20110260297A1 (en)* | 2010-04-27 | 2011-10-27 | Shian-Jyh Lin | Through-substrate via and fabrication method thereof |
| US20110304412A1 (en)* | 2010-06-10 | 2011-12-15 | Hao Zhang | Acoustic Wave Resonators and Methods of Manufacturing Same |
| KR101758141B1 (en)* | 2010-09-17 | 2017-07-14 | 삼성전자주식회사 | Optoelectronic device having vertical slabs |
| US8437585B2 (en) | 2010-12-07 | 2013-05-07 | Intel Corporation | Low-cost passive optical waveguide using Si substrate |
| CN102570312A (en)* | 2011-12-26 | 2012-07-11 | 南京邮电大学 | Hanging resonance photonic device based on SOI material, and preparation method of same |
| CN103091774A (en)* | 2012-11-13 | 2013-05-08 | 东北大学秦皇岛分校 | Floating type lithium niobate optical waveguide |
| Publication number | Publication date |
|---|---|
| CN105026966A (en) | 2015-11-04 |
| EP2962139A1 (en) | 2016-01-06 |
| TWI574069B (en) | 2017-03-11 |
| US9568674B2 (en) | 2017-02-14 |
| CN105026966B (en) | 2019-10-01 |
| KR101842758B1 (en) | 2018-03-27 |
| TW201443499A (en) | 2014-11-16 |
| JP6244380B2 (en) | 2017-12-06 |
| US20140241682A1 (en) | 2014-08-28 |
| US20150192737A1 (en) | 2015-07-09 |
| WO2014133760A1 (en) | 2014-09-04 |
| EP2962139B1 (en) | 2019-09-25 |
| JP2016509262A (en) | 2016-03-24 |
| US9005458B2 (en) | 2015-04-14 |
| KR20150113095A (en) | 2015-10-07 |
| TWI499817B (en) | 2015-09-11 |
| TW201539073A (en) | 2015-10-16 |
| Publication | Publication Date | Title |
|---|---|---|
| SG11201505841XA (en) | Photonic device structure and method of manufacture | |
| GB2518286B (en) | Security device and method of manufacture | |
| GB2517079B (en) | Security devices and methods of manufacture | |
| GB2518732B (en) | Display device and method of manufacturing the same | |
| GB2535360B (en) | Methods of preparing polyhemiaminals and polyhexahydrotriazines | |
| SG11201504442YA (en) | Semiconductor device and method of making semiconductor device | |
| GB201301790D0 (en) | Security devices and methods of manufacture thereof | |
| EP3588586C0 (en) | Photovoltaic devices and method of making | |
| IL231340A0 (en) | Methods and apparatus to form ophthalmic devices incorporating photonic elements | |
| GB201401761D0 (en) | Security devices and methods of manufacture thereof | |
| GB201517071D0 (en) | Hud object design and method | |
| GB2510381B (en) | Security devices and methods of manufacture thereof | |
| SG11201507640QA (en) | Electromechanical device and method of fabricating the same | |
| GB201312669D0 (en) | Microneedles and method of manufacture | |
| PL2951866T3 (en) | Optoelectronic device and method of producing the same | |
| EP2995905A4 (en) | X-ray device and manufacturing method of structure | |
| GB2513304B (en) | Peripheral apparatus and method of construction | |
| GB201315507D0 (en) | Container and method of manufacture | |
| GB2527996B (en) | Filter and method of manufacture | |
| EP2953382A4 (en) | Sound-emitting device and sound-emitting method | |
| IL234726A0 (en) | Catheter and method of manufacture thereof | |
| GB2517285B (en) | Semiconductor devices and methods of manufacture | |
| PL3019756T3 (en) | Structural assembly and method of assembly thereof | |
| GB201318737D0 (en) | Photovoltaic Device and method of Manufacture | |
| GB2514889B (en) | Slide member and method of manufacturing slide member |