본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 종래 기술에 의한 박막트랜지스터의 구조를 나타낸 단면도.1 is a cross-sectional view showing the structure of a thin film transistor according to the prior art.
제2도는 (A)-(D)는 본 발명에 의한 박막트랜지스터의 제조공정을 설명하기 위한 도면.2 is a view for explaining the manufacturing process of the thin film transistor according to the present invention (A)-(D).
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019860004005AKR890003414B1 (en) | 1986-05-22 | 1986-05-22 | Thin film transistor |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019860004005AKR890003414B1 (en) | 1986-05-22 | 1986-05-22 | Thin film transistor |
| Publication Number | Publication Date |
|---|---|
| KR870011700Atrue KR870011700A (en) | 1987-12-26 |
| KR890003414B1 KR890003414B1 (en) | 1989-09-20 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019860004005AExpiredKR890003414B1 (en) | 1986-05-22 | 1986-05-22 | Thin film transistor |
| Country | Link |
|---|---|
| KR (1) | KR890003414B1 (en) |
| Publication number | Publication date |
|---|---|
| KR890003414B1 (en) | 1989-09-20 |
| Publication | Publication Date | Title |
|---|---|---|
| EP0270323A3 (en) | A thin-film transistor | |
| KR880001179A (en) | Method of manufacturing thin film transistor array substrate | |
| KR900019245A (en) | Thin film transistor and its manufacturing method | |
| JPS5688363A (en) | Field effect transistor | |
| KR870011700A (en) | Thin film transistor | |
| JPS567480A (en) | Film transistor | |
| JPS6476035A (en) | Manufacture of tft panel | |
| KR890008995A (en) | Thin film transistor | |
| KR910017646A (en) | Fabrication method of thin film FET transistor using plasma oxidation | |
| KR890016682A (en) | Thin Film Transistors for Flat Panel Displays | |
| KR900005612A (en) | Amorphous Silicon Thin Film Transistor with 4 Mask Level Protection Structure | |
| KR950012754A (en) | Thin film transistor for liquid crystal display device and manufacturing method thereof | |
| KR930005239A (en) | TFT manufacturing method | |
| KR920003534A (en) | Method of manufacturing thin film transistor | |
| KR920013770A (en) | Thin Film Transistor Manufacturing Method | |
| KR900015350A (en) | Amorphous silicon thin film transistor | |
| KR910005390A (en) | High voltage thin film transistor and its manufacturing method | |
| KR900015359A (en) | TFT with double gate structure | |
| KR970016679A (en) | Thin film transistor substrate for liquid crystal display device and manufacturing method thereof | |
| KR900005560A (en) | Electrode Formation Method of Thin Film Transistor | |
| KR860003668A (en) | Manufacturing method of activation matrix thin film transistor star for liquid crystal drive | |
| KR940001455A (en) | Method of manufacturing polycrystalline silicon thin film transistor | |
| KR930020718A (en) | Manufacturing method of thin film transistor for liquid crystal display | |
| KR910016090A (en) | Thin film transistor for liquid crystal display device and manufacturing method thereof | |
| KR860003669A (en) | Method of manufacturing thin film transistor for liquid crystal drive with top gate structure |
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0109 | Patent application | St.27 status event code:A-0-1-A10-A12-nap-PA0109 | |
| PA0201 | Request for examination | St.27 status event code:A-1-2-D10-D11-exm-PA0201 | |
| R17-X000 | Change to representative recorded | St.27 status event code:A-3-3-R10-R17-oth-X000 | |
| R17-X000 | Change to representative recorded | St.27 status event code:A-3-3-R10-R17-oth-X000 | |
| PG1501 | Laying open of application | St.27 status event code:A-1-1-Q10-Q12-nap-PG1501 | |
| G160 | Decision to publish patent application | ||
| PG1605 | Publication of application before grant of patent | St.27 status event code:A-2-2-Q10-Q13-nap-PG1605 | |
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration | St.27 status event code:A-1-2-D10-D22-exm-PE0701 | |
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment | St.27 status event code:A-2-4-F10-F11-exm-PR0701 | |
| PR1002 | Payment of registration fee | St.27 status event code:A-2-2-U10-U11-oth-PR1002 Fee payment year number:1 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:4 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:5 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:6 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:7 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:8 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:9 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:10 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:11 | |
| PN2301 | Change of applicant | St.27 status event code:A-5-5-R10-R13-asn-PN2301 St.27 status event code:A-5-5-R10-R11-asn-PN2301 | |
| PN2301 | Change of applicant | St.27 status event code:A-5-5-R10-R13-asn-PN2301 St.27 status event code:A-5-5-R10-R11-asn-PN2301 | |
| FPAY | Annual fee payment | Payment date:20000814 Year of fee payment:12 | |
| PR1001 | Payment of annual fee | St.27 status event code:A-4-4-U10-U11-oth-PR1001 Fee payment year number:12 | |
| R17-X000 | Change to representative recorded | St.27 status event code:A-5-5-R10-R17-oth-X000 | |
| LAPS | Lapse due to unpaid annual fee | ||
| PC1903 | Unpaid annual fee | St.27 status event code:A-4-4-U10-U13-oth-PC1903 Not in force date:20010921 Payment event data comment text:Termination Category : DEFAULT_OF_REGISTRATION_FEE | |
| PC1903 | Unpaid annual fee | St.27 status event code:N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text:Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date:20010921 | |
| R18-X000 | Changes to party contact information recorded | St.27 status event code:A-5-5-R10-R18-oth-X000 | |
| R17-X000 | Change to representative recorded | St.27 status event code:A-5-5-R10-R17-oth-X000 | |
| R18-X000 | Changes to party contact information recorded | St.27 status event code:A-5-5-R10-R18-oth-X000 | |
| R18-X000 | Changes to party contact information recorded | St.27 status event code:A-5-5-R10-R18-oth-X000 | |
| R18-X000 | Changes to party contact information recorded | St.27 status event code:A-5-5-R10-R18-oth-X000 | |
| P22-X000 | Classification modified | St.27 status event code:A-4-4-P10-P22-nap-X000 | |
| R18-X000 | Changes to party contact information recorded | St.27 status event code:A-5-5-R10-R18-oth-X000 | |
| P22-X000 | Classification modified | St.27 status event code:A-4-4-P10-P22-nap-X000 |